CN107490938A - Light blockage coating equipment and coating method - Google Patents
Light blockage coating equipment and coating method Download PDFInfo
- Publication number
- CN107490938A CN107490938A CN201710910823.1A CN201710910823A CN107490938A CN 107490938 A CN107490938 A CN 107490938A CN 201710910823 A CN201710910823 A CN 201710910823A CN 107490938 A CN107490938 A CN 107490938A
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- China
- Prior art keywords
- substrate
- shower nozzle
- workbench
- light blockage
- fumarole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Spray Control Apparatus (AREA)
Abstract
The invention discloses a kind of light blockage coating equipment, including：Workbench, worktable upper surface compartment of terrain, which offers multiple substrates being used for upward and blown, makes the fumarole of substrate suspension；Nozzle component, including movable stand and shower nozzle, perpendicular to its length direction, shower nozzle is used to spray photoresist towards substrate the moving direction of movable stand；Detection unit, it is fixed on nozzle component, for detecting at the top of shower nozzle the distance between substrate；Controller, for controlling the ejection pressure of fumarole according to the testing result of detection unit, to adjust the hoverheight of substrate.The light blockage coating equipment of the present invention can be such that substrate is suspended in above workbench, and spray photoresist towards substrate using shower nozzle, avoid substrate and generation electrostatic is directly contacted with workbench, it also avoid shower nozzle or substrate damage, ensure that light blockage coating thickness and quality.Meanwhile the distance between substrate and shower nozzle can be calibrated before light blockage coating, further ensure the uniformity of the coating thickness of photoresistance.
Description
Technical field
The present invention relates to light blockage coating technical field, more particularly to a kind of light blockage coating equipment and coating method.
Background technology
CF (color filter, i.e. colored filter) substrate is LCD (Liquid Crystal Display, liquid crystal
Show device) it is used for realizing the main devices of colored display, it forms and generally included substantially：Glass substrate, black matrix" (Black
Matrix, i.e. BM), colored color blocking layer etc..The light that backlight is sent incides CF substrates by the modulation of liquid crystal molecule, passes through CF
Substrate is enameled the filter action of the red color resistance of color blocking layer, green color blocking and blue color blocking, shows red, green, blue three respectively
Kind light, the light of the color blocking difference TEM investigation color bands of different colours, so as to realize the colored display of display.In CF systems
Cheng Dangzhong, including the processing procedure such as light blockage coating, exposure, development, wherein, light blockage coating is undoubtedly a mostly important link, light
Hindering the uniformity of coating and the thickness of photoresistance has critically important influence for display effect.
To ensure the homogeneity of light blockage coating thickness, existing Photoresisting coating machines generally include workbench, head module
And head cartridge, workbench are used for the substrate for placing photoresistance to be sprayed, two head cartridges are parallel to each other, respectively positioned at work
The both sides of the width of platform, a row are coated with shower nozzle and are integrated on the coating head module of strip, coating head module both ends
It is slidably matched respectively with head cartridge, coating head module sprays light during moving back and forth on the length direction along substrate
Material is hindered, the coating of photoresistance is carried out to the substrate of lower section.However, the substrate surface of such a coating method easily produces some particulates
(Particle), when particulate is got involved between shower nozzle and substrate, easily cause shower nozzle damage or cut occurs in substrate, so as to influence
Light blockage coating thickness.Meanwhile substrate contacts with workbench and is also easy to produce electrostatic, so as to influence light blockage coating quality.
The content of the invention
In view of the shortcomings of the prior art, the invention provides a kind of light blockage coating equipment and coating method, can keep away
Exempt to produce electrostatic during light blockage coating, it is also ensured that light blockage coating thickness.
In order to realize above-mentioned purpose, present invention employs following technical scheme：
A kind of light blockage coating equipment, including：
Workbench, the worktable upper surface compartment of terrain, which offers multiple substrates being used for upward and blown, makes the substrate
The fumarole of suspension；
Nozzle component, including in the horizontal direction on be movably disposed in movable stand above the workbench and along the shifting
Moving frame length direction is linearly arranged at least row's shower nozzle of the movable stand bottom, the moving direction of the movable stand perpendicular to
The length direction of the movable stand, the shower nozzle are used to spray photoresist towards the substrate；
Detection unit, be fixed on the nozzle component, for detect at the top of the shower nozzle between the substrate away from
From；
Controller, for controlling the ejection pressure of the fumarole according to the testing result of the detection unit, with adjustment
The hoverheight of the substrate.
As one of which embodiment, the shower nozzle is multiple rows of, and array is arranged on the nozzle component lower surface.
As one of which embodiment, the detection unit is fixed on the nozzle component side.
As one of which embodiment, the shower nozzle includes spray chamber and is connected to the nozzle of the spray chamber bottom, described
Detection unit is stretched between the spray chamber bottom and the workbench, for detecting between the spray chamber bottom and the substrate
Distance.
As one of which embodiment, the detection unit is two, is respectively arranged on the both ends of the nozzle component.
As one of which embodiment, the worktable upper surface also compartment of terrain offers multiple suction holes.
As one of which embodiment, the jet hole array is set, and the suction hole is multiple rows of, often arranges the air-breathing
Hole is located between fumarole described in two adjacent rows.
As one of which embodiment, the fumarole is also opened perpendicular to the workbench, the worktable upper surface
Provided with sub- fumarole, the sub- fumarole is set with the fumarole in an angle.
As one of which embodiment, described light blockage coating equipment also includes multiple rows of roller, and the roller can roll
Ground is on the workbench, and the part idler wheel surface of the roller protrudes from the worktable upper surface.
Another object of the present invention is to provide a kind of light blockage coating method of the light blockage coating equipment described in use, including
The distance between described substrate is measured at the top of the shower nozzle, calculates the spacing between the shower nozzle end and the substrate, and
The hoverheight of the substrate is adjusted according to the gap of the spacing between the shower nozzle end and the substrate and predetermined gap value,
Then the shower nozzle starts to spray and translated, until spraying is completed.
The light blockage coating equipment of the present invention can be such that substrate is suspended in above workbench, and spray light towards substrate using shower nozzle
Material is hindered, substrate is avoided and generation electrostatic is directly contacted with workbench, it also avoid shower nozzle or substrate damage, ensure that photoresistance
Coating thickness and quality.Meanwhile the distance between substrate and shower nozzle can be calibrated before light blockage coating, further ensure
The uniformity of the coating thickness of photoresistance.
Brief description of the drawings
Fig. 1 is the working state schematic representation of the light blockage coating equipment of the embodiment of the present invention 1；
Fig. 2 is the shower nozzle of the embodiment of the present invention 1 and the position relationship schematic diagram of substrate；
Fig. 3 is the schematic view of the mounting position of the detection unit of the embodiment of the present invention 1；
Fig. 4 is the light path schematic diagram of the detection unit of the embodiment of the present invention 1；
Fig. 5 is the side schematic view of the light blockage coating equipment of the embodiment of the present invention 1；
Fig. 6 is the top view of the workbench of the embodiment of the present invention 1；
Fig. 7 is the light blockage coating method flow diagram of the embodiment of the present invention 1；
Fig. 8 is the working state schematic representation of the light blockage coating equipment of the embodiment of the present invention 2；
Fig. 9 is a kind of top view of workbench of the embodiment of the present invention 2；
Figure 10 is a kind of top view of workbench of the embodiment of the present invention 3.
Embodiment
In the present invention, term " setting ", " being provided with ", " connection " should be interpreted broadly.For example, it may be fixedly connected,
It is detachably connected, or monolithic construction；Can mechanically connect, or electrical connection；Can be joined directly together, or pass through centre
Medium is indirectly connected, or is connection internal between two devices, element or parts.For ordinary skill
For personnel, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In addition, term " on ", " under ", "left", "right", "front", "rear", " top ", " bottom ", " interior ", " outer ", " in ", it is " perpendicular
Directly ", the orientation of the instruction such as " level " or position relationship are based on orientation shown in the drawings or position relationship.These terms are mainly
In order to preferably describe the present invention and embodiment, being not intended to limit indicated device, element or part must have
There is particular orientation, or constructed and operated with particular orientation.
Also, above-mentioned part term is in addition to it can be used to indicate that orientation or position relationship, it is also possible to for representing it
His implication, such as term " on " also be likely used for representing certain relations of dependence or annexation in some cases.For ability
For the those of ordinary skill of domain, the concrete meaning of these terms in the present invention can be understood as the case may be.
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further described.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
Embodiment 1
Refering to Fig. 1 and Fig. 2, the light blockage coating equipment of the present embodiment includes workbench 10, nozzle component 20, detection unit 30
And controller (not shown), wherein, the upper surface compartment of terrain of workbench 10 offers multiple substrates 1 being used for upward and blown
The fumarole 11 for making substrate 1 suspend, nozzle component 20 include movable stand 21 and shower nozzle 200, movable stand 21 in the horizontal direction on can
Movably movable stand 21 is linearly arranged in located at the top of workbench 10, length direction of at least row's shower nozzle 200 along movable stand 21
Bottom, perpendicular to the length direction of movable stand 21, shower nozzle 200 is used to spray photoresistance towards substrate 1 for the moving direction of movable stand 21
Material.Detection unit 30 is fixed on nozzle component 20, for detecting the distance between the top of shower nozzle 200 and substrate 1, controller
For controlling the ejection pressure of fumarole 11 according to the testing result of detection unit 30, to adjust the hoverheight of substrate 1, ensure
The distance between the end of shower nozzle 200 and substrate 1 remain at steady state value, so that photoresistance coating thickness is consistent all the time.
To improve spray efficiency, shower nozzle 200 is preferably provided into multiple rows of, and some arrays of shower nozzle 200 are arranged on nozzle component
20 lower surfaces, the area of the substrate once sprayed can be improved.With reference to shown in Fig. 3, detection unit 30 is fixed on nozzle component 20
Side, shower nozzle 200 include spray chamber 201 and are connected to the nozzle 202 of the bottom of spray chamber 201, offered in spray chamber 201 and accommodate photoresistance
Space and the nozzle installation passage of bottom, nozzle 202 are installed at the nozzle installation passage of the bottom of spray chamber 201, detection unit 30
Stretch between the bottom of spray chamber 201 and workbench 10, the distance between nozzle 202 and substrate 1 for detecting the bottom of spray chamber 201
(i.e. coating clearance G).
As shown in figure 4, it is preferred that the detection unit 30 is light sensor, including light transmitter unit 31, light receiver list
Member 32 and numerous optical components in the light path of light transmitter unit 31 and light receiver unit 32, optical component bag
Galvanometer 33 and lens 34 are included, the detection light that light transmitter unit 31 is sent is divided into two-way, two-way detection light point after light-splitting processing
Do not handled through respective galvanometer 33, lens 34, midway is injected into the bottom of spray chamber 201 and the upper surface of substrate 1, the bottom of spray chamber 201 respectively
By light receiver list after portion and the upper surface of substrate 1 form two-way feedback light after reflecting, then galvanometer 33, lens 34 are handled after
Member 32 detects, light receiver unit 32 confirmed respectively after this two-way feedback light by analyzing the height of the bottom of spray chamber 201 with
And the height of the upper surface of substrate 1, so as to calculate the difference in height of the bottom of spray chamber 201 and the upper surface of substrate 1, referred to here as actual measurement
Height H (as shown in Figure 2).And the length L of nozzle 202 is fixed, controller can be easily calculated coating clearance G, the painting
Cloth clearance G is the distance between nozzle 202 and substrate 1.Finally, by contrasting coating clearance G and predetermined gap value gap △
H, you can show that substrate 1 needs the height risen or fallen, the ejection pressure of fumarole 11 is controlled by controller, you can adjustment
The height of substrate 1, so as to ensure the uniformity of photoresistance coating thickness.
As one of which embodiment, detection unit 30 is two, is respectively arranged on the both ends of nozzle component 20, respectively position
In the both ends of movable stand 21, by the way that the actual measurement height H of the detection unit 30 at both ends is adjusted to consistent, it is ensured that substrate
The uniformity of the photoresistance thickness of regional on 1.
As shown in Figure 5 and Figure 6, the upper surface of workbench 10 of the present embodiment offers fumarole 11 and suction hole 12 simultaneously,
Each fumarole 11, suction hole 12 are preferably set in a row respectively.The array of fumarole 11 is set, and is often arranged suction hole 12 and is located at interspersedly
Between two adjacent row's fumaroles 11, rows of fumarole 11, suction hole 12 are alternately arranged.The fumarole 11 of the present embodiment is vertical
In workbench 10, the equipment course of work, fumarole 11 is blown upward so that substrate 1 is suspended in the top of workbench 10, together
When, the air-breathing of suction hole 12, substrate 1 is drawn downward so that substrate 1 can be stably maintained at constant height without by external force
Influence.Here, controller is PLC (Programmable Logic Controller, you can programmed logic controller), is led to
The aperture of control magnetic valve is crossed, so as to accurately adjust the air pressure of fumarole 11 and suction hole 12.
As shown in fig. 7, correspondingly, the light blockage coating method of the present embodiment mainly includes：
S01：Control fumarole 11 and suction hole 12 work, and substrate 1 is suspended；
S02：Measure the distance between the top of shower nozzle 200 and substrate 1；
S03：Calculate the spacing between the end of shower nozzle 200 and substrate 1, i.e. coating clearance G；
S04：According to the hoverheight of the gap of coating clearance G and predetermined gap value adjustment substrate 1, the coating clearance G is set to be
Predetermined gap value；
S05：Nozzle 202 is started working, and is sprayed photoresistance towards substrate 1 and is translated, until spraying is completed.
During nozzle 202 sprays photoresistance, nozzle 202 translates with movable stand 21, can also pass through spacing of controls
Ground performs above-mentioned steps S02, S03, S04, ensures that nozzle 202 keeps predetermined gap value between substrate 1 all the time, so as to ensure base
The homogeneity of the coating thickness of photoresistance on plate 1.
In the resuspension procedure of substrate 1, can used controller increase fumarole 11 air pressure, reduce the air pressure of suction hole 12, make
Substrate 1 is obtained to rise, or by reducing the air pressure of fumarole 11, increasing the air pressure of suction hole 12 so that substrate 1 declines, until base
The air pressure that plate 1 reaches the air pressure and suction hole 12 that adjust fumarole 11 after predetermined altitude makes substrate 1 keep balance.
Embodiment 2
As shown in Figure 8 and Figure 9, on the basis of embodiment 1, the upper surface of workbench 10 of the present embodiment is further opened with sub- spray
Stomata 13, sub- fumarole 13 are set with fumarole 11 in an angle.
The sub- fumarole 13 is preferably several, is distributed between fumarole 13 and suction hole 12, for when necessary towards same
One direction sprays gases at high pressure, and driving substrate 1 translates towards a direction.For example, fumarole 13 can be one group, every group of fumarole
13 angle of inclination is consistent, and by the setting of sub- fumarole 13, the nozzle component 20 of the present embodiment is without mobile, in spraying process
In only sub- fumarole 13 need to be controlled to start to blow towards the substrate 1 above it, substrate 1 can translate along predetermined direction, practical operation
When need to only control the continuous spray photoresistance of nozzle 202, until the surface light blockage coating region of substrate 1 coating complete.In another example spray
Stomata 13 can be multigroup, and the direction of every two groups of fumaroles 13 is different, can control different groups of fumarole respectively as needed
13 work, so as to drive substrate 1 to translate in different directions.
Embodiment 3
As shown in Figure 10, on the basis of embodiment 2, the light blockage coating equipment of the present embodiment also has multiple rows of roller 14,
These rollers 14 are rollably on workbench 10, and the part idler wheel surface of roller 14 is protruded from the upper table of workbench 10
Face, the preferably grounding of roller 14, with conduct static.It is equal in fumarole 13, suction hole 12, sub- fumarole 13 of workbench 10 etc.
When not working, substrate 1 can be carried on the surface of roller 14, the grounding and can of roller 14 avoid the surface of substrate 1 produce electrostatic or
Adsorbent particles, it ensure that light blockage coating quality.Meanwhile substrate 1 is when being carried on roller 14, also using sub- fumarole 13 towards base
Plate 1 is blown to be allowed to roll on roller 14 and is transmitted.
In summary, light blockage coating equipment of the invention can be such that substrate is suspended in above workbench, and utilize shower nozzle court
Substrate sprays photoresist, avoids substrate and generation electrostatic is directly contacted with workbench, it also avoid shower nozzle or substrate damage,
It ensure that light blockage coating thickness and quality.Meanwhile the distance between substrate and shower nozzle can be calibrated before light blockage coating, enter
One step ensure that the uniformity of the coating thickness of photoresistance.
Described above is only the embodiment of the application, it is noted that for the ordinary skill people of the art
For member, on the premise of the application principle is not departed from, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as the protection domain of the application.
Claims (10)
- A kind of 1. light blockage coating equipment, it is characterised in that including：Workbench (10), workbench (10) the upper surface compartment of terrain, which offers multiple substrates (1) being used for upward and blown, to be made The fumarole (11) that the substrate (1) suspends；Nozzle component (20), including in the horizontal direction on be movably disposed in movable stand (21) above the workbench (10) and At least row's shower nozzle (200) of the movable stand (21) bottom is linearly arranged in along the movable stand (21) length direction, it is described Perpendicular to the length direction of the workbench (10), the shower nozzle (200) is used for towards the base moving direction of movable stand (21) Plate (1) sprays photoresist；Detection unit (30), it is fixed on the nozzle component (20), for detecting the shower nozzle (200) top and the substrate The distance between (1)；Controller, for controlling the ejection pressure of the fumarole (11) according to the testing result of the detection unit (30), with Adjust the hoverheight of the substrate (1).
- 2. light blockage coating equipment according to claim 1, it is characterised in that the shower nozzle (200) is multiple rows of, and array is set In the nozzle component (20) lower surface.
- 3. light blockage coating equipment according to claim 1, it is characterised in that the detection unit (30) is fixed on the spray Head assembly (20) side.
- 4. light blockage coating equipment according to claim 1, it is characterised in that the shower nozzle (200) include spray chamber (201) and The nozzle (202) of the spray chamber (201) bottom is connected to, the detection unit (30) stretches into the spray chamber (201) bottom and institute Between stating workbench (10), for detecting the distance between the spray chamber (201) bottom and the substrate (1).
- 5. light blockage coating equipment according to claim 1, it is characterised in that the detection unit (30) is two, respectively Located at the both ends of the nozzle component (20).
- 6. according to any described light blockage coating equipment of claim 1-5, it is characterised in that workbench (10) upper surface is also Compartment of terrain offers multiple suction holes (12).
- 7. light blockage coating equipment according to claim 6, it is characterised in that fumarole (11) array is set, described Suction hole (12) is multiple rows of, often arranges the suction hole (12) between fumarole (11) described in two adjacent rows.
- 8. light blockage coating equipment according to claim 6, it is characterised in that the fumarole (11) is perpendicular to the work Platform (10), workbench (10) upper surface are further opened with sub- fumarole (13), the sub- fumarole (13) and the fumarole (11) set in an angle.
- 9. light blockage coating equipment according to claim 6, it is characterised in that also including multiple rows of roller (14), the roller (14) rollably on the workbench (10), and the part idler wheel surface of the roller (14) protrudes from the workbench (10) upper surface.
- 10. a kind of usage right requires the light blockage coating method of any described light blockage coating equipment of 1-9, it is characterised in that bag The distance between described substrate (1) is included at the top of the measurement shower nozzle (200), calculates the shower nozzle (200) end and the base Spacing between plate (1), and according to the spacing between the shower nozzle (200) end and the substrate (1) and predetermined gap value Gap adjusts the hoverheight of the substrate (1), and then the shower nozzle (200) starts to spray and translated, until spraying is completed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710910823.1A CN107490938B (en) | 2017-09-29 | 2017-09-29 | Photoresist coating equipment and coating method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710910823.1A CN107490938B (en) | 2017-09-29 | 2017-09-29 | Photoresist coating equipment and coating method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107490938A true CN107490938A (en) | 2017-12-19 |
| CN107490938B CN107490938B (en) | 2020-09-08 |
Family
ID=60654181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710910823.1A Active CN107490938B (en) | 2017-09-29 | 2017-09-29 | Photoresist coating equipment and coating method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107490938B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112319055A (en) * | 2020-09-10 | 2021-02-05 | 季华实验室 | Conveying device, control method thereof and ink-jet printing equipment |
| CN115534519A (en) * | 2021-06-29 | 2022-12-30 | 细美事有限公司 | Printing apparatus and printing method |
| CN115970983A (en) * | 2022-12-06 | 2023-04-18 | 京东方科技集团股份有限公司 | Gluing device |
-
2017
- 2017-09-29 CN CN201710910823.1A patent/CN107490938B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112319055A (en) * | 2020-09-10 | 2021-02-05 | 季华实验室 | Conveying device, control method thereof and ink-jet printing equipment |
| CN115534519A (en) * | 2021-06-29 | 2022-12-30 | 细美事有限公司 | Printing apparatus and printing method |
| CN115534519B (en) * | 2021-06-29 | 2024-03-26 | 细美事有限公司 | Printing device and printing method |
| CN115970983A (en) * | 2022-12-06 | 2023-04-18 | 京东方科技集团股份有限公司 | Gluing device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107490938B (en) | 2020-09-08 |
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