CN107482953A - The self-driven energy conversion device of drop and preparation method based on wetting gradient surface - Google Patents
The self-driven energy conversion device of drop and preparation method based on wetting gradient surface Download PDFInfo
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- CN107482953A CN107482953A CN201710835730.7A CN201710835730A CN107482953A CN 107482953 A CN107482953 A CN 107482953A CN 201710835730 A CN201710835730 A CN 201710835730A CN 107482953 A CN107482953 A CN 107482953A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Abstract
The present invention discloses the self-driven energy conversion device of drop based on wetting gradient surface, the electrode zone of the device includes substrate base from bottom to top, oxide layer, electrode layer and dielectric layer, the hydrophilic region of wetting gradient surface is made up of uniform dielectric layer striped, gradient surface is soaked to realize just, the hydrophobic region of the separation of negative electrode is made up of uniform silicon nanoneedle, electrode layer is covered by dielectric layer, by adjusting the area of hydrophilic region and hydrophobic region than realizing that solid soaks the change of gradient surface structure and then the displacement of driving surface drop, drop is self-driven to change the electric double layer area formed on solid-liquid contact interface, and the electric charge of positive and negative electrode dielectric layer surface is induced to redistribute, and then realize the voltage output of two electrode tips.The micro-fluidic chip system self-powered function based on drop movement is realized, meets the demand of low energy-consumption electronic device run under wild environment, it is novel in design, it is a kind of good innovation scheme.
Description
Technical field
The present invention relates to energy conversion device, more particularly to the self-driven energy conversion of drop based on wetting gradient surface
Device.
Background technology
Energy conversion technique is constantly updated in the daily production and life of people, and the energy conversion device used earliest can
Trace back to windmill, sail, water wheels epoch.With electric energy appearance and widely use, the energy of electric energy is converted into based on environmental energy
Measure conversion equipment to continuously emerge, the environmental energy of mass, which changes into electrical energy devices, wind-driven generator, hydroelectric generator, underground heat
The TRTs such as generator, solar generator.The device that high-power environmental energy changes into electric energy has greatly promoted society to enter
Step, and due to its volume is big, be not easy to move the defects of, the low work(that runs under the adverse circumstances such as field that can not meet gradually to increase
Consume requirement on devices.
With reaching its maturity for microelectric technique, the new and high technology such as radio sensing network, wearable device, micro-fluidic chip
Product develops rapidly, and this kind of device or system generally power consumption as little as microwatt are to nanowatt magnitude, but application environment is harsher, to supplying
Energy element proposes higher requirement, particularly micro-fluidic chip in working environment, cost, service life etc. to energy supply member
The requirement such as no electromagnetic pollution of part.Energy conversion technique based on drop movement arises at the historic moment, because of its cleanliness without any pollution, repeatability
The good, advantage such as portability difficulty is low, it is expected to turn into the alternative technique of this kind of device or system functions.And this energy conversion fills
Put and be difficult to integrated with micro-fluidic chip system, hinder the self-powered process of micro-fluidic chip system, it is impossible to meet
The higher demand of social development.
In summary, for prior art the defects of, it is accordingly required in particular to the drop self-powered energy based on wetting gradient surface
Conversion equipment, to solve the deficiencies in the prior art.
The content of the invention
The defects of for above-mentioned technical problem and energy conversion device, the present invention are proposed based on wetting gradient table
The self-driven energy conversion device of drop in face, it is simple for structure, easy to operate, be easy to carry, it disclosure satisfy that and run under wild environment
Low energy-consumption electronic device demand.
To achieve these goals, technical scheme is as follows：
Based on the self-driven energy conversion device of drop of wetting gradient surface, the electrode zone of the device includes from bottom to top
Substrate base, oxide layer, electrode layer and dielectric layer, the hydrophilic region of gradient surface is soaked by uniform dielectric layer striped group
Into wetting gradient surface realizes that the hydrophobic region of the separation of positive and negative electrode is made up of uniform silicon nanoneedle, and electrode layer is situated between by electricity
Matter layer is covered, and is entered by adjusting change of the area of hydrophilic region and hydrophobic region than realizing solid wetting gradient surface structure
And the displacement of driving surface drop, drop is self-driven to change the electric double layer area formed on solid-liquid contact interface, and induces
The electric charge redistribution of positive and negative electrode dielectric layer surface, and then realize the voltage output of two electrode tips.
Further, described hydrophilic region and hydrophobic region are all in accordance with Cassie-Baxter models, by adjusting dielectric
The area ratio of layer striped and silicon nanometer needle construction, some moistened surface regions with wettability contrast are designed, and these are soaked
The order that region is successively decreased by contact angle is connected to form the wetting gradient surface of energy conversion device.
Further, each wetting zones end using vertical electrode lead of the surface covered with dielectric layer respectively with just,
Negative electrode is connected, and adjacent wetting zones connect different electrodes respectively, to form the energy conversion device of comb electrode.
Further, the adoptable material of described dielectric layer is silica, silicon nitride, and the length of single wetting zones is not
More than 3mm.
The invention further relates to the preparation method of the self-driven energy conversion device of drop based on wetting gradient surface, this method
Comprise the following steps：
(a) high-temperature oxydation substrate layer, and using metal sputtering processes in oxidation layer surface sputtering layer of metal electrode layer；
(b) one layer of dielectric tunic is deposited in electrode layer using chemical vapor deposition method；
(c) pattern transfer is carried out by ultraviolet photolithographic, and dielectric layer, electrode is sequentially etched using dry etch process
Layer；
(d) reactive ion etching technology, etched substrate surface oxide layer are used；
(e) deep reaction ion etching technology is used, nano-silicon needle construction is etched in surface of silicon；
(f) degumming process.
Further, hydrophobic region, hydrophilic region, electrode layer surface carry out Silanized hydrophobic processing, effectively avoid remnants
The influence that moisture film exports to subsequent droplet energy conversion electric energy.
The beneficial effects of the invention are as follows：The present invention realizes solid liquid system first using the self-driven whole process of drop
Surface free energy is transformed into drop kinetic energy, and drop kinetic energy is transformed into the conversion process of energy of electric energy again, and this energy conversion device will
Energy conversion technique is combined with the self-driven technology of drop, and the micro-fluidic chip system based on drop movement can be achieved and confess electric work
Can, meet the demand of low energy-consumption electronic device run under wild environment, it is novel in design, it is a kind of good innovation scheme.
Brief description of the drawings
Describe the present invention in detail with reference to the accompanying drawings and detailed description：
Fig. 1 the structural representation of present invention；
The process chart of Fig. 2 present invention；
Surface Scanning Electron microscope (SEM) figure of Fig. 3 present invention；
Fig. 4 present invention is by taking four wetting zones as an example, the static contact angle variation diagram in selected different wetting region；
Fig. 5 present invention surface drop is self-driven and energy conversion device output voltage figure；
Embodiment
In order that the technical means, the inventive features, the objects and the advantages of the present invention are easy to understand, tie below
Conjunction is specifically illustrating, and the present invention is expanded on further.
Referring to Fig. 1, a kind of self-driven energy conversion device of drop based on wetting gradient surface, the electrode zone of this device
Include the dielectric layer 12 of substrate base 10, oxide layer 16, electrode layer 13 and hydrophobic treatment from bottom to top, oxide layer 16 is arranged at
Between substrate base 10 and electrode layer 13, the hydrophilic region for soaking gradient surface is made up of the uniform striped of dielectric layer 12, profit
Wet gradient surface realizes that the hydrophobic region of the separation of positive and negative electrode is made up of uniform silicon nanoneedle 11, hydrophobic region realize just,
The separation of negative electrode.Electrode layer 13 is covered by dielectric layer 12, by adjusting the area of hydrophilic region and hydrophobic region than real
The change of existing solid wetting gradient surface structure and then the displacement of driving surface drop 15, drop 15 is self-driven change it is solid-
The electric double layer area formed on liquid contact interface, and induce the electric charge of positive and negative electrode dielectric layer surface to redistribute, Jin Ershi
The voltage output of existing two electrode tips.
As shown in figure 3, wetting gradient surface is made up of the wetting zones of some (4~5) individual contact angle difference, according to
Cassie-Baxter models, surface different wetting region of the design with wettability contrast, and these wetting zones are pressed into contact angle
The order successively decreased is connected, and forms the wetting gradient surface of energy conversion device, and the length of each wetting zones is not more than
3mm.With driving surface drop displacement.
Each wetting zones end using vertical electrode lead 14 of the surface covered with dielectric layer respectively with positive and negative electrode
It is connected, and adjacent wetting zones connect different electrodes respectively, to form the energy conversion device of comb electrode, hydrophobic region,
Hydrophilic region, electrode layer surface carry out Silanized hydrophobic processing, effectively avoid remaining moisture film to subsequent droplet energy conversion electricity
The influence that can be exported.
As shown in Fig. 2 energy conversion device preparation technology flow includes：
(a) high-temperature oxydation substrate layer, the compact oxidation layer that a layer thickness is 1~2 μm is formed sinking to the bottom surface, and using gold
Belong to sputtering technology and sputter one layer of 10~50nm titanium tungsten transition zone in oxidation layer surface, then sputter the golden film that thickness is 100~500nm
As electrode, and extraction wire, two wires are used to connect external load.
(b) chemical vapor deposition method is used to deposit silicon dioxide layer of a layer thickness for 150~500nm in electrode layer,
It is used as dielectric layer and hydrophilic region simultaneously.
(c) pattern transfer is carried out by ultraviolet photolithographic, and dielectric layer, electrode is sequentially etched using dry etch process
Layer；
(d) reactive ion etching technology, etched substrate surface oxide layer are used；
(e) deep reaction ion etching technology is used, nano-silicon needle construction is etched in surface of silicon；
(f) energy conversion device photomask surface glue is removed using wet processing.
Referring to Fig. 4, Fig. 5, the Energy harvesting methods of the self-driven energy conversion device of drop based on wetting gradient surface, bag
Include following steps：
1) sample is fixed on testboard first, energy conversion contact conductor end is connected with data collecting card.And lead to
Cross wetting gradient surface of solids leveling of the level governor by conversion equipment
2) syringe needle is adjusted at the wetting zones S0 of sample, is injected using the high precision micro being connected with syringe
Quantitative deionized water drop is added dropwise in sample S0 regions pump, adjusts horizontal checkout platform, makes the preceding inlet wire that solid-liquid contacts close to profit
Wet zone S1 regions, pull syringe is until syringe needle departs from drop straight up.
3) the drop progress of disengaging syringe needle is two-way sprawls, when current inlet wire is moved to S1 regions, present on solid-liquid interface
Gradient disparities, i.e. wettability contrast between S0 and S1 are soaked, this wetting gradient-driven drop moves along the direction more soaked.When
When drop moves in energy conversion device metal electrode region, the electric charge of upper/lower electrode can be caused to redistribute, and then form two
Electrical potential difference between electrode, realize that electric flux exports.
It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, above-described embodiment and explanation
Merely illustrating the principles of the invention described in book, it is of the invention without departing from the spirit and scope of the present invention also to have respectively
Kind changes and improvements, these changes and improvements all fall within the protetion scope of the claimed invention.The claimed scope of the invention by
Appended claims and its equivalent define.
Claims (6)
1. the self-driven energy conversion device of drop based on wetting gradient surface, it is characterised in that：The electrode zone of the device is certainly
Upper down to include substrate base, oxide layer, electrode layer and dielectric layer, the hydrophilic region for soaking gradient surface is situated between by uniform electricity
Matter layer striped forms, and wetting gradient surface realizes that the hydrophobic region of positive and negative electrode separation is made up of uniform silicon nanoneedle, electrode
Layer is covered by dielectric layer, and the area ratio by adjusting hydrophilic region and hydrophobic region realizes that solid soaks gradient surface structure
Change so that driving surface drop displacement, drop is self-driven to change the electric double layer face that is formed on solid-liquid contact interface
Product, and induce the electric charge of positive and negative electrode dielectric layer surface to redistribute, and then realize the voltage output of two electrode tips.
2. the self-driven energy conversion device of drop according to claim 1 based on wetting gradient surface, it is characterised in that：Institute
The hydrophilic region and hydrophobic region stated are all in accordance with Cassie-Baxter models, by adjusting dielectric layer striped and silicon nanoneedle
The area ratio of structure, some moistened surface regions with wettability contrast are designed, and these wetting zones are successively decreased by contact angle
Order be connected to form the wetting gradient surface of energy conversion device.
3. the self-driven energy conversion device of drop based on wetting gradient surface according to claim 1 or claim 2, its
It is characterised by：Each wetting zones end using vertical electrode lead of the surface covered with dielectric layer respectively with positive and negative electrode
It is connected, and adjacent wetting zones connect different electrodes respectively, to form the energy conversion device of comb electrode.
4. the self-driven energy conversion device of drop according to claim 1 based on wetting gradient surface, it is characterised in that：Institute
The adoptable material of dielectric layer stated is silica or silicon nitride, and the length of single wetting zones is not more than 3mm.
5. the preparation method of the self-driven energy conversion device of drop based on wetting gradient surface, this method comprise the following steps：
(a) high-temperature oxydation substrate layer, and using metal sputtering processes in oxidation layer surface sputtering layer of metal electrode layer；
(b) one layer of dielectric tunic is deposited in electrode layer using chemical vapor deposition method；
(c) pattern transfer is carried out by ultraviolet photolithographic, and dielectric layer, electrode layer is sequentially etched using dry etch process；
(d) reactive ion etching technology, etched substrate surface oxide layer are used；
(e) deep reaction ion etching technology is used, nano-silicon needle construction is etched in surface of silicon；
(f) degumming process.
6. the preparation method of the self-driven energy conversion device of drop according to claim 5 based on wetting gradient surface, its
It is characterised by：Hydrophobic region, hydrophilic region, electrode layer surface carry out Silanized hydrophobic processing, effectively avoid remaining moisture film pair
The influence of subsequent droplet energy conversion electric energy output.
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| CN108490736A (en) * | 2018-03-27 | 2018-09-04 | 浙江工业大学 | It is a kind of that functional layer and preparation method thereof of the drop from driving is realized based on shape gradient |
| CN109539846A (en) * | 2018-11-23 | 2019-03-29 | 西安交通大学 | A kind of flat-plate heat pipe with gradient wetting structure |
| CN111181443A (en) * | 2018-11-12 | 2020-05-19 | 现代自动车株式会社 | Energy harvesting system based on reverse electrowetting on dielectric |
| CN112020570A (en) * | 2018-04-20 | 2020-12-01 | 柯尼卡美能达株式会社 | Transparent member and method for producing transparent member |
| CN112113904A (en) * | 2020-09-18 | 2020-12-22 | 南京理工大学 | Micro-fluidic optical observation system and method for gas gradient driven macromolecule translation |
| CN113162477A (en) * | 2021-02-05 | 2021-07-23 | 西安交通大学 | Liquid drop energy collecting device and method based on thin film interdigital electrode |
| CN113289700A (en) * | 2021-05-14 | 2021-08-24 | 北京航空航天大学 | Density gradient microstructure, preparation method of density gradient microstructure and magnetic control switch |
| CN114552937A (en) * | 2022-02-17 | 2022-05-27 | 南京航空航天大学 | Energy collecting mechanism and method for driving flat plate to move by raindrops |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108490736A (en) * | 2018-03-27 | 2018-09-04 | 浙江工业大学 | It is a kind of that functional layer and preparation method thereof of the drop from driving is realized based on shape gradient |
| CN112020570B (en) * | 2018-04-20 | 2023-11-28 | 柯尼卡美能达株式会社 | Transparent member and method for manufacturing transparent member |
| CN112020570A (en) * | 2018-04-20 | 2020-12-01 | 柯尼卡美能达株式会社 | Transparent member and method for producing transparent member |
| EP3783129A4 (en) * | 2018-04-20 | 2021-06-02 | Konica Minolta, Inc. | Transparent member and transparent-member manufacturing method |
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| CN111181443A (en) * | 2018-11-12 | 2020-05-19 | 现代自动车株式会社 | Energy harvesting system based on reverse electrowetting on dielectric |
| CN111181443B (en) * | 2018-11-12 | 2024-05-31 | 现代自动车株式会社 | Energy harvesting system based on inverse electrowetting on dielectric |
| CN109539846A (en) * | 2018-11-23 | 2019-03-29 | 西安交通大学 | A kind of flat-plate heat pipe with gradient wetting structure |
| CN112113904A (en) * | 2020-09-18 | 2020-12-22 | 南京理工大学 | Micro-fluidic optical observation system and method for gas gradient driven macromolecule translation |
| CN113162477A (en) * | 2021-02-05 | 2021-07-23 | 西安交通大学 | Liquid drop energy collecting device and method based on thin film interdigital electrode |
| CN113289700A (en) * | 2021-05-14 | 2021-08-24 | 北京航空航天大学 | Density gradient microstructure, preparation method of density gradient microstructure and magnetic control switch |
| CN114552937B (en) * | 2022-02-17 | 2023-09-29 | 南京航空航天大学 | Energy collection mechanism and method for driving flat plate to move by raindrops |
| CN114552937A (en) * | 2022-02-17 | 2022-05-27 | 南京航空航天大学 | Energy collecting mechanism and method for driving flat plate to move by raindrops |
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Application publication date: 20171215 |