CN107481956A - Silicon chip cleaning device - Google Patents

Silicon chip cleaning device Download PDF

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Publication number
CN107481956A
CN107481956A CN201710577183.7A CN201710577183A CN107481956A CN 107481956 A CN107481956 A CN 107481956A CN 201710577183 A CN201710577183 A CN 201710577183A CN 107481956 A CN107481956 A CN 107481956A
Authority
CN
China
Prior art keywords
silicon chip
fixed mount
conveyer belt
connecting plate
brush
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710577183.7A
Other languages
Chinese (zh)
Inventor
孙文生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hefei Winshine Amperex Technology Ltd
Original Assignee
Hefei Winshine Amperex Technology Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hefei Winshine Amperex Technology Ltd filed Critical Hefei Winshine Amperex Technology Ltd
Priority to CN201710577183.7A priority Critical patent/CN107481956A/en
Publication of CN107481956A publication Critical patent/CN107481956A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876Particular processes or apparatus for batch treatment of the devices
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/10Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12Brushes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00Cleaning by methods involving the use of tools
    • B08B1/20Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67023Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Brushes (AREA)

Abstract

Silicon chip cleaning device, including fixed mount, conveyer belt, motor, connecting plate, the first brush, the second brush;The fixed mount is above the conveyer belt, side at the top of the fixed mount is provided with the motor, the rotating shaft of the motor is accordingly located at the bottom of the fixed mount, the rotating shaft is fixed with the connecting plate on one end of the conveyer belt, and the connecting plate is uniformly provided with several first brushes on the side of the conveyer belt;The opposite side of the fixed mount bottom is provided with several described second brushes.Beneficial effects of the present invention are:(1)The cleaning device is mobility cleaning, avoids the possibility to same silicon chip repeated washing, cleaning performance is good;(2)Due to being designed with barb in every cordage, when cordage touches silicon chip, barb would be at open configuration, and the impurity of some adhesions on silicon chip surface is removed by reaction force.

Description

Silicon chip cleaning device
Technical field
The invention belongs to solar battery sheet preparing technical field, and in particular to silicon chip cleaning device.
Background technology
The technological process that solar panel makes is that section → cleaning → prepares matte → periphery etches → and removes the back side PN+ ties → made upper/lower electrode → making antireflective coating → sintering → test → stepping.Wherein in the program of cleaning, typically deposit Halfway phenomenon, such as some magazines of silicon chip surface adhesion are being cleaned, are being not easy to be eliminated.
The content of the invention
The invention aims to overcome deficiency of the prior art, there is provided silicon chip cleaning device.
In order to solve the above technical problems, the technical scheme is that:
Silicon chip cleaning device, including fixed mount, conveyer belt, motor, connecting plate, the first brush, the second brush;
For the fixed mount above the conveyer belt, the side at the top of the fixed mount is provided with the motor, the drive The rotating shaft of dynamic motor is accordingly located at the bottom of the fixed mount, and the rotating shaft is fixed with described on one end of the conveyer belt Connecting plate, the connecting plate are uniformly provided with several first brushes, first brush on the side of the conveyer belt The first hairbrush is equipped with head;The opposite side of the fixed mount bottom is provided with several described second brushes, second brush Upper one end close to the conveyer belt is provided with the second hairbrush;
Second hairbrush is formed by several cordage, and several barbs are equipped with each cordage.
Preferably, the barb is Fiber Materials.
Beneficial effects of the present invention are:(1)The cleaning device is mobility cleaning, is avoided to same silicon chip weight The possibility cleaned again, cleaning performance are good;(2)Due to being designed with barb in every cordage, when cordage touches silicon chip When, barb would be at open configuration, and the impurity of some adhesions on silicon chip surface is removed by reaction force.
Brief description of the drawings
Accompanying drawing 1 is schematic structural view of the invention;
Accompanying drawing 2 is run time organization schematic diagram of the present invention;
Accompanying drawing 3 is cordage structural representation.
Embodiment
The effect of to make to architectural feature of the invention and being reached, has a better understanding and awareness, to preferable Embodiment and accompanying drawing coordinate detailed description, are described as follows:
As shown in accompanying drawing 1 ~ 3, silicon chip cleaning device, including fixed mount 100, conveyer belt 200, motor 300, connecting plate 302, First brush 303, the second brush 400;
As shown in Figure 1, the fixed mount 100 is set located at the top of conveyer belt 200, the side at the top of fixed mount 100 There is a motor 300, the rotating shaft 301 of the motor 300 is accordingly located at the bottom of the fixed mount 100, described turn Axle 301 is fixed with the connecting plate 302 on one end of the conveyer belt 200, and the connecting plate 302 is close to the conveyer belt Several first brushes 303 are uniformly provided with 200 side, the first hairbrush 3031 is equipped with first brush 303; The opposite side of the bottom of fixed mount 100 is provided with several described second brushes 400, close to described on second brush 400 One end of conveyer belt 200 is provided with the second hairbrush 4001;
Second hairbrush 4001 forms by several cordage 4001a, is equipped with each cordage 4001a some Individual barb 4001b, the barb 4001b is Fiber Materials.As shown in Figure 3, accompanying drawing 3 is that the cordage 4001a is in During working condition, that is, when touching silicon chip, due to being designed with barb 4001b on every cordage 4001a, work as cordage When 4001a touches silicon chip, barb 4001b would be at open configuration, and the impurity of some adhesions on silicon chip surface is passed through Reaction force is removed.
The silicon chip of required cleaning is placed sequentially on the conveyer belt 200 first, it is such as attached when whole device operates Shown in Fig. 2, the direction of arrow is the transporting direction of the conveyer belt 200 in figure, and the motor 300 drives institute after starting Rotating shaft 301 is stated to rotate, so as to drive the connecting plate 302 to rotate, first hairbrush that is fixed on the connecting plate 302 3031 will quickly rotate, and so as to play a part of tentatively cleaning, silicon chip goes successively to the lower section of the second hairbrush 4001, institute Stating the second hairbrush 4001 can bend with the transport of silicon chip, and when cordage 4001a touches silicon chip, barb 4001b will In open configuration, the impurity of some adhesions on silicon chip surface is removed by reaction force.
Beneficial effects of the present invention are:(1)The cleaning device is mobility cleaning, is avoided to same silicon chip weight The possibility cleaned again, cleaning performance are good;(2)Due to being designed with barb in every cordage, when cordage touches silicon chip When, barb would be at open configuration, and the impurity of some adhesions on silicon chip surface is removed by reaction force.
It should be understood by those skilled in the art that the present invention is not limited to the above embodiments, above-described embodiment and explanation The principle of the simply present invention described in book, it is of the invention without departing from the spirit and scope of the present invention also to have various changes Change and improve, these changes and improvements are both fallen within the range of claimed invention.The protection domain of application claims by Appended claims and its equivalent define.

Claims (2)

1. silicon chip cleaning device, it is characterised in that:Including fixed mount, conveyer belt, motor, connecting plate, the first brush, second Brush;
For the fixed mount above the conveyer belt, the side at the top of the fixed mount is provided with the motor, the drive The rotating shaft of dynamic motor is accordingly located at the bottom of the fixed mount, and the rotating shaft is fixed with described on one end of the conveyer belt Connecting plate, the connecting plate are uniformly provided with several first brushes, first brush on the side of the conveyer belt The first hairbrush is equipped with head;The opposite side of the fixed mount bottom is provided with several described second brushes, second brush Upper one end close to the conveyer belt is provided with the second hairbrush;
Second hairbrush is formed by several cordage, and several barbs are equipped with each cordage.
2. silicon chip cleaning device according to claim 1, it is characterised in that:The barb is Fiber Materials.
CN201710577183.7A 2017-07-14 2017-07-14 Silicon chip cleaning device Pending CN107481956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710577183.7A CN107481956A (en) 2017-07-14 2017-07-14 Silicon chip cleaning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710577183.7A CN107481956A (en) 2017-07-14 2017-07-14 Silicon chip cleaning device

Publications (1)

Publication Number Publication Date
CN107481956A true CN107481956A (en) 2017-12-15

Family

ID=60595755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710577183.7A Pending CN107481956A (en) 2017-07-14 2017-07-14 Silicon chip cleaning device

Country Status (1)

Country Link
CN (1) CN107481956A (en)

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1219758A (en) * 1997-12-09 1999-06-16 Tdk株式会社 Washing method and device
CN1306404A (en) * 1998-05-22 2001-08-01 阿伊昂株式会社 Cleaning rotary brush
CN200998007Y (en) * 2007-01-22 2008-01-02 王建波 Toothbrush
CN201171452Y (en) * 2008-03-05 2008-12-31 邹建义 Agnail brush-finish toothbrush
CN101767940A (en) * 2009-12-30 2010-07-07 东莞宏威数码机械有限公司 Glass-cleaning and drying device
CN201632462U (en) * 2009-12-30 2010-11-17 东莞宏威数码机械有限公司 Cleaning and drying device of coated glass
CN102339774A (en) * 2010-07-14 2012-02-01 东京毅力科创株式会社 Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method
CN202760491U (en) * 2012-06-11 2013-03-06 罗伟 Toothbrush with barbs at upper parts of bristle roots
CN202774855U (en) * 2012-07-12 2013-03-13 葛新路 Toothbrush with double-side bristles
CN202779101U (en) * 2012-09-25 2013-03-13 芜湖东旭光电科技有限公司 Drive device of liquid crystal glass substrate cleaning plate brushes
CN103094160A (en) * 2011-11-04 2013-05-08 东京毅力科创株式会社 Substrate Treatment System And Substrate Transfer Method
CN203945220U (en) * 2014-06-10 2014-11-19 福建省万达汽车玻璃工业有限公司 A kind of coated glass rinsing maching
CN204470172U (en) * 2015-03-17 2015-07-15 涡阳县鸿运玻璃制品有限公司 Glass washing device
CN205926420U (en) * 2016-08-04 2017-02-08 江苏景泰玻璃有限公司 Automatic glass cleaning machine
CN206104422U (en) * 2016-09-22 2017-04-19 肇庆市科润真空设备有限公司 Dish brush belt cleaning device that glass coating production line used
CN206182623U (en) * 2016-11-09 2017-05-24 河南省奥林特药业有限公司 A brush hair for driving gap presss from both sides brush of thing and surperficial spot

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1219758A (en) * 1997-12-09 1999-06-16 Tdk株式会社 Washing method and device
CN1306404A (en) * 1998-05-22 2001-08-01 阿伊昂株式会社 Cleaning rotary brush
CN200998007Y (en) * 2007-01-22 2008-01-02 王建波 Toothbrush
CN201171452Y (en) * 2008-03-05 2008-12-31 邹建义 Agnail brush-finish toothbrush
CN101767940A (en) * 2009-12-30 2010-07-07 东莞宏威数码机械有限公司 Glass-cleaning and drying device
CN201632462U (en) * 2009-12-30 2010-11-17 东莞宏威数码机械有限公司 Cleaning and drying device of coated glass
CN102339774A (en) * 2010-07-14 2012-02-01 东京毅力科创株式会社 Substrate cleaning apparatus, coating and developing apparatus having the same and substrate cleaning method
CN103094160A (en) * 2011-11-04 2013-05-08 东京毅力科创株式会社 Substrate Treatment System And Substrate Transfer Method
CN202760491U (en) * 2012-06-11 2013-03-06 罗伟 Toothbrush with barbs at upper parts of bristle roots
CN202774855U (en) * 2012-07-12 2013-03-13 葛新路 Toothbrush with double-side bristles
CN202779101U (en) * 2012-09-25 2013-03-13 芜湖东旭光电科技有限公司 Drive device of liquid crystal glass substrate cleaning plate brushes
CN203945220U (en) * 2014-06-10 2014-11-19 福建省万达汽车玻璃工业有限公司 A kind of coated glass rinsing maching
CN204470172U (en) * 2015-03-17 2015-07-15 涡阳县鸿运玻璃制品有限公司 Glass washing device
CN205926420U (en) * 2016-08-04 2017-02-08 江苏景泰玻璃有限公司 Automatic glass cleaning machine
CN206104422U (en) * 2016-09-22 2017-04-19 肇庆市科润真空设备有限公司 Dish brush belt cleaning device that glass coating production line used
CN206182623U (en) * 2016-11-09 2017-05-24 河南省奥林特药业有限公司 A brush hair for driving gap presss from both sides brush of thing and surperficial spot

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SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
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Application publication date: 20171215