CN107481832A - Electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing - Google Patents
Electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing Download PDFInfo
- Publication number
- CN107481832A CN107481832A CN201710662451.5A CN201710662451A CN107481832A CN 107481832 A CN107481832 A CN 107481832A CN 201710662451 A CN201710662451 A CN 201710662451A CN 107481832 A CN107481832 A CN 107481832A
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- Prior art keywords
- magnetic
- permanent magnet
- magnetic pole
- pole disk
- circuit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/02—Permanent magnets [PM]
- H01F7/0273—Magnetic circuits with PM for magnetic field generation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a kind of electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing.Mainly include：The circuit control part and magnetic loop structure division of interconnection, the magnetic loop structure division include：Magnet coil, yoke and iron core, left magnetic pole disk, right magnetic pole disk, permanent magnet and pole air-gaps, the output current of the circuit control part flow into the magnet coil, and the circuit control part controls direction and the size of the output current.The current control division point includes：Power supply, sense of current control circuit, partial pressure regulation resistance, sense of current control circuit include single-chip microcomputer and relay switch.The direction in magnetic field produced by the present invention constantly controls magnetic coil both ends using circuit control part, so that device magnetic circuit changes, finally make it that generation amplitude size is adjustable with frequency at air gap above permanent magnet and can be used in the pulsating field of magnetorheological plane polishing.
Description
Technical field
The present invention relates to Ultraprecision Machining field, more particularly to a kind of electric control permanent magnet for magnetorheological plane polishing
Formula pulsating field generating means.
Background technology
With the fast development of semiconductor cause, polishing required precision to semi-conducting material also more and more higher, specific table
The high request of layer is destroyed to surface figure accuracy, surface quality and sub-surface now, in addition, process is stable and processes
The requirement of efficiency high is even more to constrain the mass production of semi-conducting material.In order that semi-conducting material is this kind of unmanageable hard
Crisp material realizes the planarization design of high-effect high-quality, and the processing method of magnetorheological plane polishing is arisen at the historic moment.
MRF is to utilize rheological behavior of the Magnetorheologicai polishing liquid under magnetic fields, to contacting effect and having
The workpiece of relative motion realizes the design mode of micro removal.In polishing process, pulsating field enables to polishing to grind
Grain is constantly updated from sharpening, and can obtain higher efficiency and more preferable polishing effect.Magnetic field generator is set as MRF
Standby core component, the formation of pulsating field then need corresponding magnetic field generator to realize.
Existing magnetic field generator to be divided into electromagnetic type and magneto from the point of view of magnet type, magneto field generator for magnetic
Distribution of Magnetic Field is stable but is difficult to alternation control, can only adjust polishing by changing the gap between magnetic pole disk and polishing disk
The magnetic field intensity and Distribution of Magnetic Field of polishing area in disk, this causes magneto field generator for magnetic magnetic field intensity and Distribution of Magnetic Field
Adjust relatively complicated, magnetic pole gap adjustment is relatively limited, and it is inadequate that excessive gap easily causes polishing area magnetic field intensity, separately
Outside due to above magnetic pole gradient magnetic in vertical direction be not linear change so that this method adjusts magnetic field by adjusting gap
Intensity and distribution can be very inaccurate, and then can not meet polishing demand.
For electromagnetic type field generator for magnetic, although preferably can be controlled to polishing area magnetic field intensity and Distribution of Magnetic Field
System, but the magnetic structure of electromagnetic type field generator for magnetic designs and optimizes relative complex, long magnetic circuit and easily causes polishing area
Magnetic field intensity and Distribution of Magnetic Field form can not meet that polishing requires.
The content of the invention
The embodiment provides a kind of electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing, with
Realize and MRF processing is carried out to workpiece surface.
To achieve these goals, this invention takes following technical scheme.
A kind of electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing, including：The circuit control of interconnection
System part and magnetic loop structure division, the magnetic loop structure division include：Magnet coil, yoke and iron core, left magnetic pole disk, the right side
Magnetic pole disk, permanent magnet and pole air-gaps, the output current of the circuit control part flow into the magnet coil, the circuit control
System part controls direction and the size of the output current.
Further, the current control division point includes：Power supply, sense of current control circuit, partial pressure regulation resistance, it is described
Sense of current control circuit, the partial pressure regulation resistance all connect with the power sources in series, the sense of current control circuit bag
Include single-chip microcomputer and relay switch.
Further, the single-chip microcomputer controls the action of the relay switch, and the relay switch is by changing
Access point that the both positive and negative polarity of power supply even switchs is stated to change the flow direction of electric current and conduction time in the magnet coil, by changing
Become the resistance of the partial pressure regulation resistance to change the intensity of electric current in the magnet coil.
Further, be connected with two magnetic circuits at the magnetic pole both ends of the permanent magnet, the magnetic circuit of top one be by left magnetic pole disk,
Pole air-gaps and right magnetic pole disk are formed, and the magnetic circuit of lower section one is made up of left magnetic pole disk, yoke and iron core and right magnetic pole disk, electromagnetism
Coil is located in the magnetic circuit of lower section and is wound on iron core,
Further, the magnet coil and permanent magnet access magnetic circuit with parallel form, and the permanent magnet is shaped as U
Shape, the two poles of the earth of the permanent magnet are identical with the direction of pole air-gaps.
Further, the left magnetic pole disk and the right magnetic pole disk use grid type structure, the left magnetic pole disk and described
The grizzly bar of opposed polarity is arranged in the form of interlaced on right magnetic pole disk.
Further, when the left and right polarity of the magnet coil and the consistent left and right polarity of the permanent magnet, it is described forever
Magnetic field produced by magnet forms loop, magnetic field produced by the magnet coil by left magnetic pole disk, pole air-gaps, right magnetic pole disk
Loop is formed by yoke and iron core, left magnetic pole disk, pole air-gaps, right magnetic pole disk, now magnetic be present in the pole air-gaps
.
Further, when the left and right polarity and the left and right opposite polarity of the permanent magnet of the magnet coil, so forever
Magnetic field produced by magnet and the magnet coil is made up of back yoke and iron core, left magnetic pole disk, permanent magnet, right magnetic pole disk
Road, magnetic field is now not present in the pole air-gaps.
Further, the sense of current control circuit flows into the electricity of magnet coil using the control of adjustable frequency square-wave signal
Forward and reverse alternation is flowed, polishing pulsating field is correspondingly produced in the pole air-gaps.
Electric control permanent magnet provided in an embodiment of the present invention it can be seen from the technical scheme provided by embodiments of the invention described above
Formula field generator for magnetic controls the sense of current and the conduction time for flowing into magnet coil by sense of current control circuit, and is dividing
Press direction, intensity and the control of magnetic field duration realized under the regulation of regulation resistance and magnetic field is produced to magnet coil；Electricity
Flow direction of the magnetic field in whole magnetic circuit produced by the direction in magnetic field produced by magnetic coil and intensity can effectively control permanent magnet and
Distribution, and then change the distribution of polishing area gradient magnetic and magnetic field intensity above magnetic pole disk, gradient magnetic field strength changes with distribution
Corresponding adjustment occurs for the characteristic that becoming can allow magnetic flow liquid in polishing disk to form " flexible grinding head ", so as to be more beneficial for it
Processing to target workpiece, it is achieved thereby that reasonable to magnetic field needed for polishing process and magnetic field duration by control circuit
Control, makes it more meet the demand of modern electromechanical integration technology.
The additional aspect of the present invention and advantage will be set forth in part in the description, and these will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Brief description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Accompanying drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for this
For the those of ordinary skill of field, without having to pay creative labor, other can also be obtained according to these accompanying drawings
Accompanying drawing.
Fig. 1 is a kind of the whole of electric control permanent magnet formula field generator for magnetic for MRF provided in an embodiment of the present invention
Body structural representation；
Fig. 2 is a kind of shaft side figure of electric control permanent magnet formula field generator for magnetic provided in an embodiment of the present invention；
Fig. 3 is a kind of internal structure sectional view of electric control permanent magnet formula field generator for magnetic provided in an embodiment of the present invention；
Fig. 4 is a kind of top view of electric control permanent magnet formula field generator for magnetic magnetic pole disk provided in an embodiment of the present invention.
In figure, 1 power supply, 2 sense of current control circuits, 3 partial pressure regulation resistances, 4 magnet coils, 5 yokes and iron core, 6 is left
Magnetic pole disk, 7 right magnetic pole disks, 8 permanent magnets, 9 pole air-gaps, 10 workpiece, 11 Magnetorheologicai polishing liquids, 12 polishing disks and 13 rotary shafts.
Embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Below by ginseng
The embodiment for examining accompanying drawing description is exemplary, is only used for explaining the present invention, and is not construed as limiting the claims.
Those skilled in the art of the present technique are appreciated that unless expressly stated, singulative " one " used herein, " one
It is individual ", " described " and "the" may also comprise plural form.It is to be further understood that what is used in the specification of the present invention arranges
Diction " comprising " refer to the feature, integer, step, operation, element and/or component be present, but it is not excluded that in the presence of or addition
One or more other features, integer, step, operation, element, component and/or their groups.It should be understood that when we claim member
Part is " connected " or during " coupled " to another element, and it can be directly connected or coupled to other elements, or there may also be
Intermediary element.In addition, " connection " used herein or " coupling " can include wireless connection or coupling.Wording used herein
"and/or" includes any cell of one or more associated list items and all combined.
Those skilled in the art of the present technique are appreciated that unless otherwise defined, all terms used herein (including technology art
Language and scientific terminology) with the general understanding identical meaning with the those of ordinary skill in art of the present invention.Should also
Understand, those terms defined in such as general dictionary, which should be understood that, to be had and the meaning in the context of prior art
The consistent meaning of justice, and unless defined as here, will not be with idealizing or the implication of overly formal be explained.
For ease of the understanding to the embodiment of the present invention, done further by taking several specific embodiments as an example below in conjunction with accompanying drawing
Explanation, and each embodiment does not form the restriction to the embodiment of the present invention.
In order to improve polishing efficiency, the embodiment of the present invention, which combines permanent magnet and electromagnet, to be designed for magnetorheological
The electric control permanent magnet formula field generator for magnetic of polishing.
The high-effect high-quality of workpieces processing is polished in order to be realized in Technique of Magnetorheological Finishing, the embodiment of the present invention provides
It is a kind of to be occurred by control circuit to adjust the electric control permanent magnet formula magnetic field of MRF area magnetic field intensity and Distribution of Magnetic Field
Device.The field generator for magnetic overcome traditional magneto field generator for magnetic magnetic field be not easy adjustment and electromagnetic type magnetic field fill
The shortcomings that magnetic structure is complicated, and polishing area magnetic field intensity is inadequate is put, passes through magnetic field produced by control circuit changes magnet coil
Intensity and direction, with this come flow direction of the magnetic field in whole magnetic circuit produced by controlling permanent magnet, and then indirectly change magnetic pole
The distribution of gradient magnetic and the intensity of gradient magnetic above disk；The electric control permanent magnet formula field generator for magnetic can allow MRF
Polishing workpiece adaptability, polishing efficiency and quality of finish preferably improved.
A kind of overall knot of electric control permanent magnet formula field generator for magnetic for MRF provided in an embodiment of the present invention
Structure schematic diagram as shown in figure 1, including：The circuit control part of interconnection and magnetic loop structure division.The circuit control unit
The output current divided flows into the magnet coil, and the circuit control part controls direction and the size of the output current.
Current control division point includes：Power supply, sense of current control circuit, partial pressure regulation resistance, the wherein sense of current control
Circuit includes single-chip microcomputer and relay switch etc..Sense of current control circuit all connects with partial pressure regulation resistance with power sources in series.
The direction in magnetic field and magnetic field intensity produced by foregoing circuit control section can realize adjustment magnet coil, flow into the electricity of magnet coil
Stream size controlled by the partial pressure regulation resistance in main circuit, relay switch control flow into magnet coil the sense of current and
Conduction time, the switch motion of single-chip microcomputer control relay.
The idiographic flow of whole current control part connects connecing for switch by relay switch by changing power positive cathode
Access point changes the flow direction of electric current and conduction time in magnet coil, and partial pressure regulation resistance is then realized pair by changing resistance
The electric current that the control of magnet coil inflow current intensity, direction and intensity are all adjusted when flowing through magnet coil its just can produce
Required magnetic field, the process are finally accomplished that by regulation of the control circuit realization to polishing area magnetic field, so as in polishing disk
" the flexible grinding head " that magnetic flow liquid is formed is more beneficial for the polishing to workpiece surface, so that polishing area magnetic field better meets throwing
Light demand.The sense of current control circuit can utilize the electric current of adjustable frequency square-wave signal control inflow magnet coil positive and negative
To alternation, polishing pulsating field is produced in corresponding pole air-gaps.
Fig. 2 is a kind of shaft side figure of electric control permanent magnet formula field generator for magnetic provided in an embodiment of the present invention, and Fig. 3 is device
Internal structure sectional view, Fig. 4 are the top view of magnetic pole disk in device.As shown in Figure 2, Figure 3 and Figure 4, the magnetic loop knot of the device
Structure part mainly by magnet coil, yoke and iron core, left magnetic pole disk, pole air-gaps, right magnetic pole disk and set of permanent magnets into.It is described
Left magnetic pole disk and the right magnetic pole disk use grid type structure, the grid of opposed polarity on the left magnetic pole disk and the right magnetic pole disk
Bar is arranged in the form of interlaced, and magnet coil and permanent magnet access magnetic circuit with parallel form.
Permanent magnet is shaped as U-shaped, and the two poles of the earth of permanent magnet are identical with the direction of pole air-gaps.At the magnetic pole both ends of permanent magnet
Be connected with two magnetic circuits, the magnetic circuit of top one is made up of left magnetic pole disk, pole air-gaps and right magnetic pole disk, the magnetic circuit of lower section one be by
Left magnetic pole disk, yoke and iron core and right magnetic pole disk are formed, and magnet coil is located in the magnetic circuit of lower section and is wound on iron core, such magnetic
Road design can preferably realize that the control by producing magnetic field to magnet coil flows to adjust the magnetic field of permanent magnet, and finally change
Become the Distribution of Magnetic Field and magnetic field intensity of polishing area.
Said apparatus can realize the ferromagnetic field of electromagnet-controlled permanent magnet, and produce specific distribution magnetic field.It is first when the device works
First magnet coil produces corresponding magnetic field under the control of sense of current control circuit, when the left and right polarity and permanent magnetism of magnet coil
When the left and right polarity of body is consistent, because same interpolar can have " repulsion " phenomenon, so magnetic field mainly passes through a left side produced by permanent magnet
Magnetic pole disk, pole air-gaps, right magnetic pole disk form loop, and similarly magnetic field produced by magnet coil also mainly passes through yoke and iron
Core, left magnetic pole disk, pole air-gaps, right magnetic pole disk form loop, and so the magnetic field of two magnetic field sources will pass through magnetic pole gas
Gap, there is magnetic field in pole air-gaps, and the gradient magnetic for be formed above pole air-gaps can significantly be strengthened；
And when magnet coil left and right polarity and permanent magnet left and right opposite polarity when, due to that can exist between opposed polarity
" attracting " phenomenon, so magnetic field caused by permanent magnet and magnet coil mainly passes through yoke and iron core, left magnetic pole disk, permanent magnetism
Body, right magnetic pole disk form loop, and the gradient magnetic so formed above magnetic pole disk upper magnetic pole air gap will substantially subtract
Weak, magnetic field intensity when magnetic field is adjusted to proper strength produced by magnet coil above pole air-gaps even can be small to tending to
Zero；Thus rational adjustment can be carried out to the magnetic field intensity and Distribution of Magnetic Field in MRF area makes it meet associated workpiece
Polishing demand.
The U-shape structure selection of permanent magnet and the grid type design of magnetic pole disk, can make polishing area produce distribution more reasonable
Gradient magnetic, and due to multistage pole air-gaps between magnetic pole disk be present, corresponding ladder can be formed above every section of pole air-gaps
Magnetic field is spent, thus the magnetic flow liquid in polishing disk can just be formed multiple " flexible grinding heads ", and then cause MRF
During its polishing efficiency and quality of finish improved well.
In summary, electric control permanent magnet formula field generator for magnetic provided in an embodiment of the present invention passes through sense of current control circuit
Control flows into sense of current and the conduction time of magnet coil, and is realized under the regulation of partial pressure regulation resistance to magnet coil
Produce direction, intensity and the control of magnetic field duration in magnetic field；The direction in magnetic field produced by magnet coil and intensity can have
Flow direction and distribution of the magnetic field in whole magnetic circuit produced by the control permanent magnet of effect, and then change polishing field gradient above magnetic pole disk
Changes of the distribution in magnetic field and magnetic field intensity, gradient magnetic field strength and distribution can allow magnetic flow liquid in polishing disk to form " flexibility
Corresponding adjustment occurs for the characteristic of grinding head ", so as to make it be more beneficial for the processing to target workpiece, it is achieved thereby that passing through control
Reasonable control of the circuit processed to magnetic field needed for polishing process and magnetic field duration, makes it more meet modern electromechanical integration technology
Demand.
The direction in magnetic field produced by the embodiment of the present invention constantly controls magnetic coil both ends using circuit control part so that dress
Put magnetic circuit to change, finally make it that air gap produces amplitude size and the adjustable pulsating field of frequency above permanent magnet, and
It can be used in magnetorheological plane polishing.Electric control permanent magnet body is incorporated into by the present invention towards on the basis of Technique of Magnetorheological Finishing
In the field generator for magnetic of MRF, magnet coil magnetic direction and magnetic field intensity are controlled by control circuit, to magnetic
The magnetic field of pole disk polishing area is adjusted, and makes it be more beneficial for polishing.
The U-shape structure design of permanent magnet and the particular design of whole magnetic structure in the embodiment of the present invention so that polishing
Area is more likely formed required gradient magnetic, and polishing area magnetic field can be controlled by controlling magnet coil to produce magnetic field.Magnetic
The grid type design of pole disk can then realize that more " flexible grinding heads " are processed simultaneously, are advantageous to improve magnetorheological throwing in polishing process
The polishing efficiency and quality of finish of light.
One of ordinary skill in the art will appreciate that：Accompanying drawing is the schematic diagram of one embodiment, module in accompanying drawing or
Flow is not necessarily implemented necessary to the present invention.
One of ordinary skill in the art will appreciate that：The part in device in embodiment can describe to divide according to embodiment
It is distributed in the device of embodiment, respective change can also be carried out and be disposed other than in one or more devices of the present embodiment.On
The part for stating embodiment can be merged into a part, can also be further split into multiple subassemblies.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in,
It should all be included within the scope of the present invention.Therefore, protection scope of the present invention should be with scope of the claims
It is defined.
Claims (9)
- A kind of 1. electric control permanent magnet formula field generator for magnetic for magnetorheological plane polishing, it is characterised in that including：Interconnect Circuit control part and magnetic loop structure division, the magnetic loop structure division include：Magnet coil, yoke and iron core, a left side Magnetic pole disk, right magnetic pole disk, permanent magnet and pole air-gaps, the output current of the circuit control part flow into the magnet coil, The circuit control part controls direction and the size of the output current.
- 2. device according to claim 1, it is characterised in that the current control division point includes：Power supply, sense of current control Circuit processed, partial pressure regulation resistance, the sense of current control circuit, the partial pressure regulation resistance all connect with the power sources in series Connect, the sense of current control circuit includes single-chip microcomputer and relay switch.
- 3. device according to claim 2, it is characterised in that the single-chip microcomputer controls the action of the relay switch, The relay switch is electric in the magnet coil to change by changing the access point that the both positive and negative polarity of the power supply even switchs The flow direction of stream and conduction time, change the strong of electric current in the magnet coil by changing the resistance of the partial pressure regulation resistance Degree.
- 4. according to the device described in claims 1 or 2 or 3, it is characterised in that be connected with the magnetic pole both ends of the permanent magnet Two magnetic circuits, the magnetic circuit of top one are made up of left magnetic pole disk, pole air-gaps and right magnetic pole disk, and the magnetic circuit of lower section one is by left magnetic Pole disk, yoke and iron core and right magnetic pole disk are formed, and magnet coil is located in the magnetic circuit of lower section and is wound on iron core.
- 5. device according to claim 4, it is characterised in that the magnet coil and permanent magnet access magnetic with parallel form Road, the permanent magnet are shaped as U-shaped, and the two poles of the earth of the permanent magnet are identical with the direction of pole air-gaps.
- 6. device according to claim 4, it is characterised in that the left magnetic pole disk and the right magnetic pole disk use grid type The grizzly bar of opposed polarity is arranged in the form of interlaced on structure, the left magnetic pole disk and the right magnetic pole disk.
- 7. device according to claim 4, it is characterised in that when left and right polarity and the permanent magnet of the magnet coil Left and right polarity it is consistent when, magnetic field produced by the permanent magnet is made up of back left magnetic pole disk, pole air-gaps, right magnetic pole disk Road, magnetic field produced by the magnet coil form loop by yoke and iron core, left magnetic pole disk, pole air-gaps, right magnetic pole disk, Now magnetic field be present in the pole air-gaps.
- 8. device according to claim 4, it is characterised in that when left and right polarity and the permanent magnet of the magnet coil Left and right opposite polarity when, so magnetic field produced by permanent magnet and the magnet coil passes through yoke and iron core, left magnetic pole disk, forever Magnet, right magnetic pole disk form loop, are now not present magnetic field in the pole air-gaps.
- 9. device according to claim 2, it is characterised in that the sense of current control circuit utilizes adjustable frequency square wave Signal control flows into the forward and reverse alternation of electric current of magnet coil, and polishing pulsating field is correspondingly produced in the pole air-gaps.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710662451.5A CN107481832B (en) | 2017-08-04 | 2017-08-04 | Electric control permanent magnet type magnetic field generating device for magnetorheological plane polishing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710662451.5A CN107481832B (en) | 2017-08-04 | 2017-08-04 | Electric control permanent magnet type magnetic field generating device for magnetorheological plane polishing |
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| CN107481832A true CN107481832A (en) | 2017-12-15 |
| CN107481832B CN107481832B (en) | 2023-07-25 |
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| CN201710662451.5A Active CN107481832B (en) | 2017-08-04 | 2017-08-04 | Electric control permanent magnet type magnetic field generating device for magnetorheological plane polishing |
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| CN108907902A (en) * | 2018-06-26 | 2018-11-30 | 南通大学 | A kind of magnetic pole adjusting unit of Magnetorheological Polishing equipment |
| CN110640622A (en) * | 2018-06-27 | 2020-01-03 | 株式会社Pdt | Object polishing apparatus and object polishing method |
| CN110724952A (en) * | 2019-12-03 | 2020-01-24 | 浙江工业大学 | Combined magnetic core magnetic field generating device for improving magnetic gathering capacity |
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| CN205520755U (en) * | 2016-04-13 | 2016-08-31 | 童和平 | Finger -like electromagnet structure magnetic current becomes throwing optical equipment |
| CN106938407A (en) * | 2017-02-21 | 2017-07-11 | 广东工业大学 | The dynamic magnetorheological finishing device and its polishing method of a kind of controllable moving field |
| CN207587461U (en) * | 2017-08-04 | 2018-07-06 | 北京交通大学 | For the electric control permanent magnet formula field generator for magnetic of magnetorheological plane polishing |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108907902A (en) * | 2018-06-26 | 2018-11-30 | 南通大学 | A kind of magnetic pole adjusting unit of Magnetorheological Polishing equipment |
| CN110640622A (en) * | 2018-06-27 | 2020-01-03 | 株式会社Pdt | Object polishing apparatus and object polishing method |
| CN110724952A (en) * | 2019-12-03 | 2020-01-24 | 浙江工业大学 | Combined magnetic core magnetic field generating device for improving magnetic gathering capacity |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107481832B (en) | 2023-07-25 |
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