CN107478165A - A kind of lens surface coating film thickness evenness test device - Google Patents
A kind of lens surface coating film thickness evenness test device Download PDFInfo
- Publication number
- CN107478165A CN107478165A CN201710729965.8A CN201710729965A CN107478165A CN 107478165 A CN107478165 A CN 107478165A CN 201710729965 A CN201710729965 A CN 201710729965A CN 107478165 A CN107478165 A CN 107478165A
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- CN
- China
- Prior art keywords
- parallel light
- source
- lens surface
- coating film
- film thickness
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Eyeglasses (AREA)
Abstract
The invention discloses a kind of lens surface coating film thickness evenness test device, including source of parallel light, auxiliary eyeglass, photosensitive screen, computer, the source of parallel light is connected with an XY platform, XY platform courses source of parallel light is to X, the precession of Y-direction, it is close to tested eyeglass above the auxiliary eyeglass, it is tested it is glasses lens plated the refractive index of the auxiliary eyeglass is less than the refractive index of tested eyeglass upward, the source of parallel light sends parallel light irradiation measured lens piece and reflexes to photosensitive screen；The photosensitive screen connection computer.A kind of lens surface coating film thickness evenness test device of the present invention utilizes basic optical principle and basic mechanical mechanism, form a set of simple efficient system, measurement is convenient, data are reliable, it is i.e. available with being totally reflected luminous point light path difference caused by angle and the angle of itself after refraction by reflection, it is convenient to calculate, it is high equivalent to by data measurement by magnification, accuracy.
Description
Technical field
The present invention relates to optical mirror slip manufacturing technology field, especially a kind of lens surface coating film thickness uniformity test dress
Put.
Background technology
Optical mirror slip is generally glass or resin material, etc., no matter it is any, radical needs of production,
The film layer of the specific uses such as last layer anti-reflection film, Anti-reflective coating, enhancing film will be plated to its surface.
For the thickness effect of institute's film plating layer to a series of important indicators such as anti-reflection rate, the anti-rates of increasing, it is that method can to have at present more
, can direct measurement or measurement indirectly to survey the thickness of film.Direct measurement is directly to sense thickness by an induction mechanism, convenient
It is quick but inaccurate.And the thickness of film can be calculated according to refraction and total reflection principle, then it is more accurate.
The content of the invention
Goal of the invention：In order that glasses lens plated thickness measuring becomes easy and accurate, measurement efficiency is improved, is measured using matrix form
Method, the present invention design a kind of compact-sized lens surface coating film thickness evenness test device, to solve in the prior art
The problem of existing.
The content of the invention：A kind of lens surface coating film thickness evenness test device, including it is source of parallel light, auxiliary eyeglass, photosensitive
Screen, computer, the source of parallel light are connected with an XY platform, and XY platform courses source of parallel light is described to X, the precession of Y-direction
Be close to tested eyeglass above auxiliary eyeglass, be tested it is glasses lens plated upward, the refractive index of the auxiliary eyeglass is less than the refraction of tested eyeglass
Rate, the source of parallel light send parallel light irradiation measured lens piece and reflex to photosensitive screen；The photosensitive screen connection computer.
Preferably, the color for the directional light that the source of parallel light is sent is the complementary color of coated reflection color.Source of parallel light
Color for coated reflection color complementary color enter auxiliary eyeglass light it is more, easily measurement.
Preferably, the XY platforms include X platforms, Y stage, the X platform ends also have R platforms, the connection of R platforms
Source of parallel light and the adjustment for controlling its luffing angle.The setting of the structure and R structures of XY platforms can be more convenient regulation, mobile
Measurement is rapider.
Further, the X platforms, Y stage are the mechanism of motor drives screw mandrel nut, and the R platforms are motor driven
The mechanism of rotary shaft.The mechanism of motor driven is smooth freely, is easy to automatically control.
Further, the X platforms, Y stage, the motor of R platforms are controlled by controller, controller connection computer, and
Control signal is sent by computer program.X platforms, Y stage, R platforms by motor controller control by way of it is simply fast
Victory, it is easy to operation.
Preferably, the source of parallel light is irradiated to after auxiliary eyeglass meets that directional light is in auxiliary mirror with auxiliary eyeglass angulation
Piece upper surface is totally reflected.Directional light causes the operation light loss of total reflection small in auxiliary eyeglass.
Further, the directional light is irradiated to the normal of auxiliary eyeglass and directional light angulation is more than 50 °.Parallel light irradiation
To normal and the directional light angulation of auxiliary eyeglass close to the accurate of measurement is beneficial in the case of 45 °, too small angle is inaccurate,
It can not be totally reflected, based on the property of universal refracting layer, more insure more than 50 °.
Compared to the prior art, the beneficial effects of the present invention are：A kind of lens surface coating film thickness of the present invention is uniform
Test device is spent, it is compact-sized, easy to operate.Source of parallel light is connected with XY platforms, and XY platforms and R platforms are by controller control
Motor processed operates, and greatly facilitates the movement of source of parallel light, quickly to measure multiple point positions；The intensity of the measurement light of photosensitive screen
Reliable accurate, computer analyze data is timely, and controller is easy to control.A kind of lens surface coating film thickness uniformity of the present invention
Test device utilizes basic optical principle and basic mechanical mechanism, forms a set of simple efficient system, measurement is convenient, data
Reliably, it is available, convenient meter with being totally reflected luminous point light path difference caused by angle and the angle of itself after refraction by reflection
Calculate, it is high equivalent to by data measurement by magnification, accuracy.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention.
In figure：1- sources of parallel light, the auxiliary eyeglasses of 2-, the photosensitive screens of 3-, 4- computers, 5-XY platforms, 51-X platforms, 52-Y are put down
Platform, 53-R platforms, 6- controllers, 7- are tested eyeglass.
Embodiment
, below will be to embodiment or existing in order to illustrate more clearly of the embodiment of the present application or technical scheme of the prior art
There is the required accompanying drawing used in technology description to be briefly described, drawings in the following description are only described in the application
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other accompanying drawings.
Such as Fig. 1, a kind of lens surface coating film thickness evenness test device, including source of parallel light 1, auxiliary eyeglass 2, photosensitive screen
3rd, computer 4, the parallel light color that the source of parallel light 1 is sent for eyeglass coated reflection color complementary color, the directional light
Source 1 is connected with an XY platform 5, and XY platforms 5 control source of parallel light 1, and to X, the precession of Y-direction, X, Y-direction are eyeglass extension
Two dimensions, the XY platforms 5 include X platforms 51, Y stage 52, and the end of X platforms 51 also has R platforms 53, R platforms 53
Connection source of parallel light 1 simultaneously controls the adjustment of its luffing angle, and the X platforms 51, Y stage 52 are motor drives screw mandrel nut
Mechanism, the R platforms 53 are the mechanism of motor driven rotary shaft, and the X platforms 51, Y stage 52, the motor of R platforms 53 are by controlling
Device 6 processed controls, and controller 6 connects computer 4, and sends control signal by computer program；
Tested eyeglass 7 is close in the top of auxiliary eyeglass 2, and upward, the refractive index of the auxiliary eyeglass 7 is less than the plated film of tested eyeglass 7
The refractive index of tested eyeglass 7, the source of parallel light 1 send parallel light irradiation measured lens piece 7 and reflex to photosensitive screen 3；The sense
Optical screen 3 connects computer 4；
The source of parallel light 1 meets that directional light is sent out in the auxiliary upper surface of eyeglass 2 with auxiliary eyeglass angulation after being irradiated to auxiliary eyeglass 2
Raw total reflection, the directional light are irradiated to the normal of auxiliary eyeglass 2 with directional light angulation at 50 ° ~ 75 °.
Finally, it is to be noted that, term " comprising ", "comprising" or its any other variant be intended to it is non-exclusive
Property includes, so that process, method, article or equipment including a series of elements not only include those key elements, and
Also include the other element that is not expressly set out, or also include for this process, method, article or equipment inherently
Key element.
Claims (7)
1. a kind of lens surface coating film thickness evenness test device, it is characterised in that including source of parallel light, auxiliary eyeglass, photosensitive
Screen, computer, the source of parallel light are connected with an XY platform, and XY platform courses source of parallel light is described to X, the precession of Y-direction
Be close to tested eyeglass above auxiliary eyeglass, be tested it is glasses lens plated upward, the refractive index of the auxiliary eyeglass is less than the refraction of tested eyeglass
Rate, the source of parallel light send parallel light irradiation measured lens piece and reflex to photosensitive screen；The photosensitive screen connection computer.
2. a kind of lens surface coating film thickness evenness test device according to claim 1, it is characterised in that described flat
The color for the directional light that line light source is sent is the complementary color of coated reflection color.
A kind of 3. lens surface coating film thickness evenness test device according to claim 1, it is characterised in that the XY
Platform includes X platforms, Y stage, and the X platform ends also have R platforms, and R platforms connection source of parallel light simultaneously controls its angle of pitch
The adjustment of degree.
A kind of 4. lens surface coating film thickness evenness test device according to claim 3, it is characterised in that the X
Platform, Y stage are the mechanism of motor drives screw mandrel nut, and the R platforms are the mechanism of motor driven rotary shaft.
A kind of 5. lens surface coating film thickness evenness test device according to claim 4, it is characterised in that the X
Platform, Y stage, the motor of R platforms are controlled by controller, controller connection computer, and send control by computer program
Signal.
6. a kind of lens surface coating film thickness evenness test device according to claim 1, it is characterised in that described flat
Line light source meets that directional light is totally reflected in auxiliary upper lens surface with auxiliary eyeglass angulation after being irradiated to auxiliary eyeglass.
7. a kind of lens surface coating film thickness evenness test device according to claim 6, it is characterised in that described flat
Row illumination is mapped to the normal of auxiliary eyeglass and directional light angulation is more than 50 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710729965.8A CN107478165A (en) | 2017-08-23 | 2017-08-23 | A kind of lens surface coating film thickness evenness test device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710729965.8A CN107478165A (en) | 2017-08-23 | 2017-08-23 | A kind of lens surface coating film thickness evenness test device |
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| Publication Number | Publication Date |
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| CN107478165A true CN107478165A (en) | 2017-12-15 |
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| CN201710729965.8A Pending CN107478165A (en) | 2017-08-23 | 2017-08-23 | A kind of lens surface coating film thickness evenness test device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108942403A (en) * | 2018-06-26 | 2018-12-07 | 北京理工大学 | A kind of processing method of accurate control lens thickness |
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| CN1071004A (en) * | 1992-09-29 | 1993-04-14 | 清华大学 | Super thin transparent medium membrane thickness measured method |
| CN1396445A (en) * | 2002-08-22 | 2003-02-12 | 上海交通大学 | Dual-surface metal waveguide measuring method and its device |
| CN1950669A (en) * | 2004-05-10 | 2007-04-18 | 皇家飞利浦电子股份有限公司 | Device and method for optical precision measurement |
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| CN102478389A (en) * | 2010-11-26 | 2012-05-30 | 上海光刻电子科技有限公司 | Method for measuring thickness of metal film of lithographic mask |
| CN202956092U (en) * | 2012-11-22 | 2013-05-29 | 上海嘉视光学科技有限公司 | Optical detection device for coating thicknesses of lenses |
| CN104048612A (en) * | 2014-06-24 | 2014-09-17 | 江苏大学 | Method and device used for detecting thicknesses of coated films of lenses simultaneously in multi-point mode |
| CN104677315A (en) * | 2015-03-05 | 2015-06-03 | 上海光刻电子科技有限公司 | Measuring method of surface roughness of silicon wafers |
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| CN1071004A (en) * | 1992-09-29 | 1993-04-14 | 清华大学 | Super thin transparent medium membrane thickness measured method |
| CN1396445A (en) * | 2002-08-22 | 2003-02-12 | 上海交通大学 | Dual-surface metal waveguide measuring method and its device |
| CN1950669A (en) * | 2004-05-10 | 2007-04-18 | 皇家飞利浦电子股份有限公司 | Device and method for optical precision measurement |
| CN201047757Y (en) * | 2007-06-28 | 2008-04-16 | 武汉钢铁(集团)公司 | Line shape green laser width gage |
| CN102478389A (en) * | 2010-11-26 | 2012-05-30 | 上海光刻电子科技有限公司 | Method for measuring thickness of metal film of lithographic mask |
| CN202956092U (en) * | 2012-11-22 | 2013-05-29 | 上海嘉视光学科技有限公司 | Optical detection device for coating thicknesses of lenses |
| CN104048612A (en) * | 2014-06-24 | 2014-09-17 | 江苏大学 | Method and device used for detecting thicknesses of coated films of lenses simultaneously in multi-point mode |
| CN104677315A (en) * | 2015-03-05 | 2015-06-03 | 上海光刻电子科技有限公司 | Measuring method of surface roughness of silicon wafers |
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|---|---|---|---|---|
| CN108942403A (en) * | 2018-06-26 | 2018-12-07 | 北京理工大学 | A kind of processing method of accurate control lens thickness |
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Application publication date: 20171215 |
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