CN107475678A - A kind of method for preparing ceramic membrane in PE membrane surfaces - Google Patents

A kind of method for preparing ceramic membrane in PE membrane surfaces Download PDF

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Publication number
CN107475678A
CN107475678A CN201710657738.9A CN201710657738A CN107475678A CN 107475678 A CN107475678 A CN 107475678A CN 201710657738 A CN201710657738 A CN 201710657738A CN 107475678 A CN107475678 A CN 107475678A
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opened
membrane
ceramic
poly
hydrocarbon molecule
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CN107475678B (en
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赵斌
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Huizhou engu New Energy Industry Technology Research Institute Co., Ltd.
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Shenzhen Valley Energy Holdings Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/40Separators; Membranes; Diaphragms; Spacing elements inside cells
    • H01M50/403Manufacturing processes of separators, membranes or diaphragms
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021Reactive sputtering or evaporation
    • C23C14/0036Reactive sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • C23C14/0652Silicon nitride
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00Secondary cells; Manufacture thereof
    • H01M10/05Accumulators with non-aqueous electrolyte
    • H01M10/052Li-accumulators
    • H01M10/0525Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/40Separators; Membranes; Diaphragms; Spacing elements inside cells
    • H01M50/409Separators, membranes or diaphragms characterised by the material
    • H01M50/411Organic material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/40Separators; Membranes; Diaphragms; Spacing elements inside cells
    • H01M50/409Separators, membranes or diaphragms characterised by the material
    • H01M50/431Inorganic material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01MPROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M50/00Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
    • H01M50/40Separators; Membranes; Diaphragms; Spacing elements inside cells
    • H01M50/409Separators, membranes or diaphragms characterised by the material
    • H01M50/449Separators, membranes or diaphragms characterised by the material having a layered structure
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10Energy storage using batteries

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Abstract

The present invention, which discloses, provides a kind of method for preparing ceramic membrane in PE membrane surfaces using vacuum magnetic-control sputtering technology, it by using vacuum magnetron sputtering coating film technology in lithium battery with layer of ceramic film is deposited on PE barrier films, improve PE barrier films to the wetability of electrolyte and improve PE barrier film heat endurances.Under vacuum conditions, the PE barrier films are bombarded using energetic plasma, poly- hydrocarbon molecule key section is opened, while poly- hydrocarbon molecule key is opened, ceramic material is embedded into the poly- hydrocarbon molecule key position being opened using magnetron sputtering so as to form ceramic membrane coat, the ceramic coating combined by molecular link, substantially increases the adhesion with PE films, ceramic film thickness is controlled by precision, reduces the influence to PE barrier film through-hole rates to greatest extent.

Description

A kind of method for preparing ceramic membrane in PE membrane surfaces
Technical field
The present invention relates to lithium battery device and lithium battery material manufacturing technology field, and in particular to one kind utilizes vacuum magnetic control The method that sputtering technology prepares ceramic membrane in lithium battery with PE barrier films surface.
Background technology
Because polyolefine material has the excellent performances such as high intensity, the corrosion of water-fast and solvent resistant, and it is cheap, it is raw Production. art is simple, therefore is as lithium ion battery separator ideal material.Up to the present, industrially in high volume used Barrier film has polyethylene (PE) barrier film, polypropylene (PP) barrier film etc..
Although polyolefin based materials have many excellent characteristics, as the diaphragm material of lithium ion battery, still There is the deficiency of many.Such as because the crystallinity of polyolefin polymers is high and polarity is small, with high organic molten of polarity Compatibility between agent electrolyte is bad, it is impossible to is fully swelled by electrolyte.The fusing point of polyolefine material works as battery all than relatively low Temperature rise when, polyalkene diaphragm is heated and shrinks deformation even barrier film fusing, and the security to battery is brought potential Hidden danger, this also seriously hinders lithium ion battery popularizing as electrical source of power.
How under the premise of the original breaking current temperature of barrier film is maintained, the fusing-off temperature of barrier film is improved, reduces barrier film heat Shrinkage factor is barrier film manufacturer urgent problem to be solved.The mode that current each manufacturer takes is that wet coating mode is being isolated One layer of ceramic coating of film surface (divide one side and two-sided) coating, has main steps that:Ceramic slurry coating-drying-roll-in-into The performance such as type, the fusing-off temperature of coated ceramic barrier film, percent thermal shrinkage obtains obvious improvement.Lithium battery electric core manufacturer It also found when using the PE barrier films of coated ceramic coating, although ceramic coating improves fusing-off temperature and the thermal contraction of barrier film Property, but by the PE barrier films of coated ceramic coating, through-hole rate reduces 10%, and ceramic coating is easily molten when running into electrolyte Delamination is solved, so as to increase the internal resistance of battery, this is primarily due to the ceramic coating of wet coating, and the more difficult control of thickness is most thin Also 3um is can only achieve, coating layer thickness is bigger, and it is more serious to influence barrier film through-hole rate;Wet coating is by ceramics by adhesive agent Layer is by mechanical presses and diaphragm adhering, and the adhesion of two kinds of materials is poor, so easily there is dissolving delamination.
The content of the invention
In view of the defects and deficiencies of the prior art, the present invention intends to provide one kind utilizes vacuum magnetic-control sputtering technology In the method that PE membrane surfaces prepare ceramic membrane, it is by using vacuum magnetron sputtering coating film technology in lithium battery PE barrier films Upper deposition layer of ceramic film, improve PE barrier films to the wetability of electrolyte and improve PE barrier film heat endurances.Under vacuum conditions, The PE barrier films are bombarded using energetic plasma, poly- hydrocarbon molecule key section is opened, while poly- hydrocarbon molecule key is opened, profit Ceramic material is embedded into the poly- hydrocarbon molecule key position being opened with magnetron sputtering so as to form ceramic membrane coat, by molecule The ceramic coating closed is bonded, substantially increases the adhesion with PE films, ceramic film thickness is controlled by precision, subtracted to greatest extent The small influence to PE barrier film through-hole rates.
To achieve the above object, the above method specifically includes following steps:
Vacuum magnetic-control sputtering is arranged on after the PE barrier films to be processed to be cut into the size of needs in purification room a, On the let off roll of filming equipment;
B, vacuum magnetron sputtering coating film equipment is opened, adjusting device extremely can coating process condition;
C, ion gun bombardment PE films are opened, poly- hydrocarbon molecule key section is opened;
D, while poly- hydrocarbon molecule key is opened, the mid frequency sputtering negative electrode of vacuum magnetron sputtering coating film equipment is opened, is utilized Medium frequency magnetron sputtering cathode reaction sputters Si targets, forms Si3N4- ceramic material is embedded into the poly- hydrocarbon molecule key position being opened; By the control of the technique to magnetic control sputtering cathode, one layer of fine and close ceramic membrane is formed;
E, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane stress.
Preferably, the size in the step a after the cutting of PE barrier films is:0.2-1.2m.
Preferably, in step b can coating process condition be:Background vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, add Hot 80-200 DEG C of temperature, ion source power 0.2-3kw, medium frequency magnetron sputtering cathode power 1-20W, coating speed 0.1-5m/s.
Preferably, the vacuum 3x10 in step e-1-5x10-3Pa。
Preferably, step is also included after the step e:
F, receive-unreel continuous sputtering;
G, entire volume plated film is completed;
H, vacuum breaker;
I, remove and receive certificate roller;
J, take a sample to check performance;
K, packaging and storage.
After above-mentioned technology, the present invention has the beneficial effect that:
1st, surface activation process is carried out to PE barrier films using vacuum ionic source handling process, opens poly- hydrocarbon molecule key, ensured The molecular link bond of poly- hydrocarbon molecule and ceramic material molecule is closed, and improves film adhesion.
2nd, Si is sputtered using medium frequency magnetron sputtering cathode reaction3N4, layer of ceramic film is deposited in PE membrane surfaces, is improved PE barrier films also improve the heat endurance of PE barrier films to the wetability of electrolyte, improve the security performance of lithium ion battery.
3rd, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane internal stress, change The mechanical performance of kind barrier film.
Embodiment
Below in conjunction with embodiment of the present invention, the technology in embodiment of the present invention is clearly and completely described, Obviously, described embodiment only a part of scheme of the present invention, rather than whole embodiments.Based in the present invention Embodiment, the every other embodiment party that those of ordinary skill in the art are obtained under the premise of creative work is not made Case, belong to the scope of protection of the invention.
The purpose of the present invention is under vacuum conditions, the PE barrier films to be bombarded using energetic plasma, by poly- hydrocarbon molecule Key section open, while poly- hydrocarbon molecule key is opened, ceramic material is embedded into using magnetron sputtering be opened it is described gather For hydrocarbon molecule key position so as to form ceramic membrane coat, the capital equipment used during experiment is that Roll-Roll vacuum magnetic controls splash Penetrate filming equipment.Present embodiment is using step in detail below:
Roll-Roll Vacuum Magnetics are arranged on after PE barrier films to be processed to be cut into the size of needs in purification room a, On the let off roll for controlling sputtering coating equipment;
B, Roll-Roll vacuum magnetron sputtering coating film equipment is opened, adjusting device extremely can coating process condition;
C, ion gun bombardment PE films are opened, and poly- hydrocarbon molecule key section is opened;
D, while poly- hydrocarbon molecule key is opened, the mid frequency sputtering negative electrode of vacuum magnetron sputtering coating film equipment is opened, is utilized Medium frequency magnetron sputtering cathode reaction sputters Si targets, forms Si3N4- ceramic material is embedded into the poly- hydrocarbon molecule key position being opened; By the control of the technique to magnetic control sputtering cathode, one layer of fine and close ceramic membrane is formed;
E, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane stress;
F, receive-unreel continuous sputtering;
G, entire volume plated film is completed;
H, vacuum breaker;
I, remove and receive certificate roller;
J, take a sample to check performance;
K, packaging and storage.
In the step a PE barrier films cutting after size be:0.2-1.2m.In step b can coating process condition be:Background Vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, 80-200 DEG C of heating-up temperature, ion source power 0.2-3kw, intermediate frequency magnetic control splash Penetrate cathode power 1-20W, coating speed 0.1-5m/s.Vacuum 3x10 in step e-1-5x10-3Pa。
By above-mentioned experiment, sputter a layer thickness 3um silicon nitride films can be less than on the PE diaphragms of lithium battery.
Present embodiment carries out surface ceramic deposition to lithium battery using vacuum magnetron sputtering coating film technology with PE barrier films Processing, under vacuum conditions, PE films are bombarded using energetic plasma, poly- hydrocarbon molecule key section are opened, in poly- hydrocarbon molecule key While opening, using magnetic control sputtering cathode reactive sputtering Si targets, Si is formed3N4- ceramic material is embedded into the poly- hydrocarbon being opened Molecule key position, by the control of the temperature, atmosphere, power to magnetic control sputtering cathode etc., one layer of fine and close ceramic coating is formed, The ceramic coating combined by molecular link, substantially increases the adhesion with PE films, controls ceramic thickness by precision, to greatest extent Ground reduces the influence to PE barrier film through-hole rates.
While embodiments of the invention have been illustrated and described, for the ordinary skill in the art, may be used A variety of to the progress of these embodiments can be changed without departing from the principles and spirit of the present invention with understanding, changed, Replacement and modification, the scope of the present invention is defined by the appended.
In the description of this specification, reference term " embodiment ", " some embodiments ", " an implementation The description of example ", " some embodiments ", " example ", " specific example " or " some examples " etc. means to combine the embodiment or example Specific features, structure, material or the feature of description are contained at least one embodiment or example of the present invention.In this explanation In book, identical embodiment or example are not necessarily referring to the schematic representation of above-mentioned term.Moreover, the specific spy of description Sign, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.
Above content is to combine specific embodiment further description made for the present invention, it is impossible to assert this hair Bright specific implementation is confined to these explanations.For general technical staff of the technical field of the invention, do not taking off On the premise of from present inventive concept, some simple deduction or replace can also be made.

Claims (6)

  1. A kind of 1. method for preparing ceramic membrane in PE membrane surfaces, it is characterised in that under vacuum conditions, utilize high energy plasma Body bombards the PE barrier films, and poly- hydrocarbon molecule key section is opened, and while poly- hydrocarbon molecule key is opened, will be made pottery using magnetron sputtering Ceramic material is embedded into the poly- hydrocarbon molecule key position that is opened so as to form ceramic membrane coat.
  2. A kind of 2. method for preparing ceramic membrane in PE membrane surfaces according to claim 1, it is characterised in that:It include with Lower step:
    Vacuum magnetron sputtering coating film is arranged on after the PE barrier films to be processed to be cut into the size of needs in purification room a, On the let off roll of equipment;
    B, vacuum magnetron sputtering coating film equipment is opened, adjusting device extremely can coating process condition;
    C, ion gun bombardment PE films are opened, poly- hydrocarbon molecule key section is opened;
    D, while poly- hydrocarbon molecule key is opened, the mid frequency sputtering negative electrode of vacuum magnetron sputtering coating film equipment is opened, utilizes intermediate frequency Magnetic control sputtering cathode reactive sputtering Si targets, form Si3N4- ceramic materials and be embedded into the poly- hydrocarbon molecule key position being opened;It is logical The control to the technique of magnetic control sputtering cathode is crossed, forms one layer of fine and close ceramic membrane;
    E, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane stress.
  3. A kind of 3. method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that the step a Size after the cutting of middle PE barrier films is:0.2-1.2m.
  4. 4. a kind of method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that can in step b Coating process condition is:Background vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, 80-200 DEG C of heating-up temperature, ion source power 0.2-3kw, medium frequency magnetron sputtering cathode power 1-20W, coating speed 0.1-5m/s.
  5. 5. a kind of method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that in step e Vacuum 3x10-1-5x10-3Pa。
  6. A kind of 6. method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that the step e Also include step afterwards:
    F, receive-unreel continuous sputtering;
    G, entire volume plated film is completed;
    H, vacuum breaker;
    I, remove and receive certificate roller;
    J, take a sample to check performance;
    K, packaging and storage.
CN201710657738.9A 2016-08-04 2017-08-03 method for preparing ceramic membrane on surface of PE (polyethylene) diaphragm Active CN107475678B (en)

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CN109920957A (en) * 2019-01-31 2019-06-21 华中科技大学 A kind of intercalation material of lithium-sulfur cell
CN109994692A (en) * 2017-12-29 2019-07-09 宁德时代新能源科技股份有限公司 Separator, method for preparing the same, and electrochemical device comprising the same

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CN106282949A (en) * 2016-08-04 2017-01-04 深圳市第四能源科技有限公司 A kind of method preparing ceramic membrane at lithium battery non-woven fabrics membrane surface
CN107221701A (en) * 2017-05-22 2017-09-29 中国科学院上海微系统与信息技术研究所 A kind of extended-life lithium ion battery and preparation method thereof
CN112201904B (en) * 2020-10-30 2023-06-27 天目湖先进储能技术研究院有限公司 Diaphragm intermediate layer material of lithium-sulfur battery, and preparation method and application thereof

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CN103972451A (en) * 2014-05-21 2014-08-06 北京印刷学院 Surface modification treatment method of battery diaphragm

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CN109994692A (en) * 2017-12-29 2019-07-09 宁德时代新能源科技股份有限公司 Separator, method for preparing the same, and electrochemical device comprising the same
CN109920957A (en) * 2019-01-31 2019-06-21 华中科技大学 A kind of intercalation material of lithium-sulfur cell

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