CN107475678A - A kind of method for preparing ceramic membrane in PE membrane surfaces - Google Patents
A kind of method for preparing ceramic membrane in PE membrane surfaces Download PDFInfo
- Publication number
- CN107475678A CN107475678A CN201710657738.9A CN201710657738A CN107475678A CN 107475678 A CN107475678 A CN 107475678A CN 201710657738 A CN201710657738 A CN 201710657738A CN 107475678 A CN107475678 A CN 107475678A
- Authority
- CN
- China
- Prior art keywords
- opened
- membrane
- ceramic
- poly
- hydrocarbon molecule
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/40—Separators; Membranes; Diaphragms; Spacing elements inside cells
- H01M50/403—Manufacturing processes of separators, membranes or diaphragms
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C23C14/0652—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M10/00—Secondary cells; Manufacture thereof
- H01M10/05—Accumulators with non-aqueous electrolyte
- H01M10/052—Li-accumulators
- H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/40—Separators; Membranes; Diaphragms; Spacing elements inside cells
- H01M50/409—Separators, membranes or diaphragms characterised by the material
- H01M50/411—Organic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/40—Separators; Membranes; Diaphragms; Spacing elements inside cells
- H01M50/409—Separators, membranes or diaphragms characterised by the material
- H01M50/431—Inorganic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/40—Separators; Membranes; Diaphragms; Spacing elements inside cells
- H01M50/409—Separators, membranes or diaphragms characterised by the material
- H01M50/449—Separators, membranes or diaphragms characterised by the material having a layered structure
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Secondary Cells (AREA)
- Laminated Bodies (AREA)
Abstract
The present invention, which discloses, provides a kind of method for preparing ceramic membrane in PE membrane surfaces using vacuum magnetic-control sputtering technology, it by using vacuum magnetron sputtering coating film technology in lithium battery with layer of ceramic film is deposited on PE barrier films, improve PE barrier films to the wetability of electrolyte and improve PE barrier film heat endurances.Under vacuum conditions, the PE barrier films are bombarded using energetic plasma, poly- hydrocarbon molecule key section is opened, while poly- hydrocarbon molecule key is opened, ceramic material is embedded into the poly- hydrocarbon molecule key position being opened using magnetron sputtering so as to form ceramic membrane coat, the ceramic coating combined by molecular link, substantially increases the adhesion with PE films, ceramic film thickness is controlled by precision, reduces the influence to PE barrier film through-hole rates to greatest extent.
Description
Technical field
The present invention relates to lithium battery device and lithium battery material manufacturing technology field, and in particular to one kind utilizes vacuum magnetic control
The method that sputtering technology prepares ceramic membrane in lithium battery with PE barrier films surface.
Background technology
Because polyolefine material has the excellent performances such as high intensity, the corrosion of water-fast and solvent resistant, and it is cheap, it is raw
Production. art is simple, therefore is as lithium ion battery separator ideal material.Up to the present, industrially in high volume used
Barrier film has polyethylene (PE) barrier film, polypropylene (PP) barrier film etc..
Although polyolefin based materials have many excellent characteristics, as the diaphragm material of lithium ion battery, still
There is the deficiency of many.Such as because the crystallinity of polyolefin polymers is high and polarity is small, with high organic molten of polarity
Compatibility between agent electrolyte is bad, it is impossible to is fully swelled by electrolyte.The fusing point of polyolefine material works as battery all than relatively low
Temperature rise when, polyalkene diaphragm is heated and shrinks deformation even barrier film fusing, and the security to battery is brought potential
Hidden danger, this also seriously hinders lithium ion battery popularizing as electrical source of power.
How under the premise of the original breaking current temperature of barrier film is maintained, the fusing-off temperature of barrier film is improved, reduces barrier film heat
Shrinkage factor is barrier film manufacturer urgent problem to be solved.The mode that current each manufacturer takes is that wet coating mode is being isolated
One layer of ceramic coating of film surface (divide one side and two-sided) coating, has main steps that:Ceramic slurry coating-drying-roll-in-into
The performance such as type, the fusing-off temperature of coated ceramic barrier film, percent thermal shrinkage obtains obvious improvement.Lithium battery electric core manufacturer
It also found when using the PE barrier films of coated ceramic coating, although ceramic coating improves fusing-off temperature and the thermal contraction of barrier film
Property, but by the PE barrier films of coated ceramic coating, through-hole rate reduces 10%, and ceramic coating is easily molten when running into electrolyte
Delamination is solved, so as to increase the internal resistance of battery, this is primarily due to the ceramic coating of wet coating, and the more difficult control of thickness is most thin
Also 3um is can only achieve, coating layer thickness is bigger, and it is more serious to influence barrier film through-hole rate;Wet coating is by ceramics by adhesive agent
Layer is by mechanical presses and diaphragm adhering, and the adhesion of two kinds of materials is poor, so easily there is dissolving delamination.
The content of the invention
In view of the defects and deficiencies of the prior art, the present invention intends to provide one kind utilizes vacuum magnetic-control sputtering technology
In the method that PE membrane surfaces prepare ceramic membrane, it is by using vacuum magnetron sputtering coating film technology in lithium battery PE barrier films
Upper deposition layer of ceramic film, improve PE barrier films to the wetability of electrolyte and improve PE barrier film heat endurances.Under vacuum conditions,
The PE barrier films are bombarded using energetic plasma, poly- hydrocarbon molecule key section is opened, while poly- hydrocarbon molecule key is opened, profit
Ceramic material is embedded into the poly- hydrocarbon molecule key position being opened with magnetron sputtering so as to form ceramic membrane coat, by molecule
The ceramic coating closed is bonded, substantially increases the adhesion with PE films, ceramic film thickness is controlled by precision, subtracted to greatest extent
The small influence to PE barrier film through-hole rates.
To achieve the above object, the above method specifically includes following steps:
Vacuum magnetic-control sputtering is arranged on after the PE barrier films to be processed to be cut into the size of needs in purification room a,
On the let off roll of filming equipment;
B, vacuum magnetron sputtering coating film equipment is opened, adjusting device extremely can coating process condition;
C, ion gun bombardment PE films are opened, poly- hydrocarbon molecule key section is opened;
D, while poly- hydrocarbon molecule key is opened, the mid frequency sputtering negative electrode of vacuum magnetron sputtering coating film equipment is opened, is utilized
Medium frequency magnetron sputtering cathode reaction sputters Si targets, forms Si3N4- ceramic material is embedded into the poly- hydrocarbon molecule key position being opened;
By the control of the technique to magnetic control sputtering cathode, one layer of fine and close ceramic membrane is formed;
E, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane stress.
Preferably, the size in the step a after the cutting of PE barrier films is:0.2-1.2m.
Preferably, in step b can coating process condition be:Background vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, add
Hot 80-200 DEG C of temperature, ion source power 0.2-3kw, medium frequency magnetron sputtering cathode power 1-20W, coating speed 0.1-5m/s.
Preferably, the vacuum 3x10 in step e-1-5x10-3Pa。
Preferably, step is also included after the step e:
F, receive-unreel continuous sputtering;
G, entire volume plated film is completed;
H, vacuum breaker;
I, remove and receive certificate roller;
J, take a sample to check performance;
K, packaging and storage.
After above-mentioned technology, the present invention has the beneficial effect that:
1st, surface activation process is carried out to PE barrier films using vacuum ionic source handling process, opens poly- hydrocarbon molecule key, ensured
The molecular link bond of poly- hydrocarbon molecule and ceramic material molecule is closed, and improves film adhesion.
2nd, Si is sputtered using medium frequency magnetron sputtering cathode reaction3N4, layer of ceramic film is deposited in PE membrane surfaces, is improved
PE barrier films also improve the heat endurance of PE barrier films to the wetability of electrolyte, improve the security performance of lithium ion battery.
3rd, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane internal stress, change
The mechanical performance of kind barrier film.
Embodiment
Below in conjunction with embodiment of the present invention, the technology in embodiment of the present invention is clearly and completely described,
Obviously, described embodiment only a part of scheme of the present invention, rather than whole embodiments.Based in the present invention
Embodiment, the every other embodiment party that those of ordinary skill in the art are obtained under the premise of creative work is not made
Case, belong to the scope of protection of the invention.
The purpose of the present invention is under vacuum conditions, the PE barrier films to be bombarded using energetic plasma, by poly- hydrocarbon molecule
Key section open, while poly- hydrocarbon molecule key is opened, ceramic material is embedded into using magnetron sputtering be opened it is described gather
For hydrocarbon molecule key position so as to form ceramic membrane coat, the capital equipment used during experiment is that Roll-Roll vacuum magnetic controls splash
Penetrate filming equipment.Present embodiment is using step in detail below:
Roll-Roll Vacuum Magnetics are arranged on after PE barrier films to be processed to be cut into the size of needs in purification room a,
On the let off roll for controlling sputtering coating equipment;
B, Roll-Roll vacuum magnetron sputtering coating film equipment is opened, adjusting device extremely can coating process condition;
C, ion gun bombardment PE films are opened, and poly- hydrocarbon molecule key section is opened;
D, while poly- hydrocarbon molecule key is opened, the mid frequency sputtering negative electrode of vacuum magnetron sputtering coating film equipment is opened, is utilized
Medium frequency magnetron sputtering cathode reaction sputters Si targets, forms Si3N4- ceramic material is embedded into the poly- hydrocarbon molecule key position being opened;
By the control of the technique to magnetic control sputtering cathode, one layer of fine and close ceramic membrane is formed;
E, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane stress;
F, receive-unreel continuous sputtering;
G, entire volume plated film is completed;
H, vacuum breaker;
I, remove and receive certificate roller;
J, take a sample to check performance;
K, packaging and storage.
In the step a PE barrier films cutting after size be:0.2-1.2m.In step b can coating process condition be:Background
Vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, 80-200 DEG C of heating-up temperature, ion source power 0.2-3kw, intermediate frequency magnetic control splash
Penetrate cathode power 1-20W, coating speed 0.1-5m/s.Vacuum 3x10 in step e-1-5x10-3Pa。
By above-mentioned experiment, sputter a layer thickness 3um silicon nitride films can be less than on the PE diaphragms of lithium battery.
Present embodiment carries out surface ceramic deposition to lithium battery using vacuum magnetron sputtering coating film technology with PE barrier films
Processing, under vacuum conditions, PE films are bombarded using energetic plasma, poly- hydrocarbon molecule key section are opened, in poly- hydrocarbon molecule key
While opening, using magnetic control sputtering cathode reactive sputtering Si targets, Si is formed3N4- ceramic material is embedded into the poly- hydrocarbon being opened
Molecule key position, by the control of the temperature, atmosphere, power to magnetic control sputtering cathode etc., one layer of fine and close ceramic coating is formed,
The ceramic coating combined by molecular link, substantially increases the adhesion with PE films, controls ceramic thickness by precision, to greatest extent
Ground reduces the influence to PE barrier film through-hole rates.
While embodiments of the invention have been illustrated and described, for the ordinary skill in the art, may be used
A variety of to the progress of these embodiments can be changed without departing from the principles and spirit of the present invention with understanding, changed,
Replacement and modification, the scope of the present invention is defined by the appended.
In the description of this specification, reference term " embodiment ", " some embodiments ", " an implementation
The description of example ", " some embodiments ", " example ", " specific example " or " some examples " etc. means to combine the embodiment or example
Specific features, structure, material or the feature of description are contained at least one embodiment or example of the present invention.In this explanation
In book, identical embodiment or example are not necessarily referring to the schematic representation of above-mentioned term.Moreover, the specific spy of description
Sign, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.
Above content is to combine specific embodiment further description made for the present invention, it is impossible to assert this hair
Bright specific implementation is confined to these explanations.For general technical staff of the technical field of the invention, do not taking off
On the premise of from present inventive concept, some simple deduction or replace can also be made.
Claims (6)
- A kind of 1. method for preparing ceramic membrane in PE membrane surfaces, it is characterised in that under vacuum conditions, utilize high energy plasma Body bombards the PE barrier films, and poly- hydrocarbon molecule key section is opened, and while poly- hydrocarbon molecule key is opened, will be made pottery using magnetron sputtering Ceramic material is embedded into the poly- hydrocarbon molecule key position that is opened so as to form ceramic membrane coat.
- A kind of 2. method for preparing ceramic membrane in PE membrane surfaces according to claim 1, it is characterised in that:It include with Lower step:Vacuum magnetron sputtering coating film is arranged on after the PE barrier films to be processed to be cut into the size of needs in purification room a, On the let off roll of equipment;B, vacuum magnetron sputtering coating film equipment is opened, adjusting device extremely can coating process condition;C, ion gun bombardment PE films are opened, poly- hydrocarbon molecule key section is opened;D, while poly- hydrocarbon molecule key is opened, the mid frequency sputtering negative electrode of vacuum magnetron sputtering coating film equipment is opened, utilizes intermediate frequency Magnetic control sputtering cathode reactive sputtering Si targets, form Si3N4- ceramic materials and be embedded into the poly- hydrocarbon molecule key position being opened;It is logical The control to the technique of magnetic control sputtering cathode is crossed, forms one layer of fine and close ceramic membrane;E, after membrane surface deposition of ceramic films, made annealing treatment under vacuum conditions, eliminate ceramic membrane stress.
- A kind of 3. method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that the step a Size after the cutting of middle PE barrier films is:0.2-1.2m.
- 4. a kind of method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that can in step b Coating process condition is:Background vacuum 5x10-3Pa, processing atmosphere 3x10-1Pa, 80-200 DEG C of heating-up temperature, ion source power 0.2-3kw, medium frequency magnetron sputtering cathode power 1-20W, coating speed 0.1-5m/s.
- 5. a kind of method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that in step e Vacuum 3x10-1-5x10-3Pa。
- A kind of 6. method for preparing ceramic membrane in PE membrane surfaces according to claim 2, it is characterised in that the step e Also include step afterwards:F, receive-unreel continuous sputtering;G, entire volume plated film is completed;H, vacuum breaker;I, remove and receive certificate roller;J, take a sample to check performance;K, packaging and storage.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2016106354704 | 2016-08-04 | ||
CN201610635470.4A CN106169552A (en) | 2016-08-04 | 2016-08-04 | Utilize the method that vacuum magnetic-control sputtering technology prepares ceramic membrane at PE membrane surface |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107475678A true CN107475678A (en) | 2017-12-15 |
CN107475678B CN107475678B (en) | 2019-12-06 |
Family
ID=58066065
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610635470.4A Pending CN106169552A (en) | 2016-08-04 | 2016-08-04 | Utilize the method that vacuum magnetic-control sputtering technology prepares ceramic membrane at PE membrane surface |
CN201710657738.9A Active CN107475678B (en) | 2016-08-04 | 2017-08-03 | method for preparing ceramic membrane on surface of PE (polyethylene) diaphragm |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610635470.4A Pending CN106169552A (en) | 2016-08-04 | 2016-08-04 | Utilize the method that vacuum magnetic-control sputtering technology prepares ceramic membrane at PE membrane surface |
Country Status (1)
Country | Link |
---|---|
CN (2) | CN106169552A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109920957A (en) * | 2019-01-31 | 2019-06-21 | 华中科技大学 | A kind of intercalation material of lithium-sulfur cell |
CN109994692A (en) * | 2017-12-29 | 2019-07-09 | 宁德时代新能源科技股份有限公司 | Separator, method for preparing the same, and electrochemical device comprising the same |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106282949A (en) * | 2016-08-04 | 2017-01-04 | 深圳市第四能源科技有限公司 | A kind of method preparing ceramic membrane at lithium battery non-woven fabrics membrane surface |
CN107221701A (en) * | 2017-05-22 | 2017-09-29 | 中国科学院上海微系统与信息技术研究所 | A kind of extended-life lithium ion battery and preparation method thereof |
CN112201904B (en) * | 2020-10-30 | 2023-06-27 | 天目湖先进储能技术研究院有限公司 | Diaphragm intermediate layer material of lithium-sulfur battery, and preparation method and application thereof |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070077364A1 (en) * | 2005-10-05 | 2007-04-05 | Aba Con International Limited | Method to coat insulation film on aluminum body of electrolytic capacitor |
CN102407623A (en) * | 2011-08-04 | 2012-04-11 | 中国第一汽车股份有限公司 | Preparation method of composite membrane for lithium ion battery |
CN102427119A (en) * | 2011-12-02 | 2012-04-25 | 中国科学院上海微系统与信息技术研究所 | Method for continuously coating on lithium ion battery membrane |
CN103066228A (en) * | 2012-12-27 | 2013-04-24 | 广东工业大学 | Preparation method for inorganic / organic multilayer composite separator |
CN103137929A (en) * | 2011-11-24 | 2013-06-05 | 比亚迪股份有限公司 | Lithium ion battery diaphragm, preparation method of the lithium ion battery diaphragm, and lithium ion battery containing the lithium ion battery diaphragm |
CN103972451A (en) * | 2014-05-21 | 2014-08-06 | 北京印刷学院 | Surface modification treatment method of battery diaphragm |
-
2016
- 2016-08-04 CN CN201610635470.4A patent/CN106169552A/en active Pending
-
2017
- 2017-08-03 CN CN201710657738.9A patent/CN107475678B/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070077364A1 (en) * | 2005-10-05 | 2007-04-05 | Aba Con International Limited | Method to coat insulation film on aluminum body of electrolytic capacitor |
CN102407623A (en) * | 2011-08-04 | 2012-04-11 | 中国第一汽车股份有限公司 | Preparation method of composite membrane for lithium ion battery |
CN103137929A (en) * | 2011-11-24 | 2013-06-05 | 比亚迪股份有限公司 | Lithium ion battery diaphragm, preparation method of the lithium ion battery diaphragm, and lithium ion battery containing the lithium ion battery diaphragm |
CN102427119A (en) * | 2011-12-02 | 2012-04-25 | 中国科学院上海微系统与信息技术研究所 | Method for continuously coating on lithium ion battery membrane |
CN103066228A (en) * | 2012-12-27 | 2013-04-24 | 广东工业大学 | Preparation method for inorganic / organic multilayer composite separator |
CN103972451A (en) * | 2014-05-21 | 2014-08-06 | 北京印刷学院 | Surface modification treatment method of battery diaphragm |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109994692A (en) * | 2017-12-29 | 2019-07-09 | 宁德时代新能源科技股份有限公司 | Separator, method for preparing the same, and electrochemical device comprising the same |
CN109920957A (en) * | 2019-01-31 | 2019-06-21 | 华中科技大学 | A kind of intercalation material of lithium-sulfur cell |
Also Published As
Publication number | Publication date |
---|---|
CN107475678B (en) | 2019-12-06 |
CN106169552A (en) | 2016-11-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107475678A (en) | A kind of method for preparing ceramic membrane in PE membrane surfaces | |
US20100264017A1 (en) | Method for depositing ceramic thin film by sputtering using non-conductive target | |
CN106654118A (en) | Lithium-ion battery composite membrane with thermal shutdown function and preparation method | |
CN102409293A (en) | Preparation method of alumina film | |
CN111321380B (en) | Super-hydrophobic diamond-like composite layer structure and preparation method thereof | |
JP2012506130A5 (en) | ||
CN106435494A (en) | Method for improving electrical performance of positive electrode collector electrode of lithium battery | |
KR20120079716A (en) | Anti-fingerprint coating method and device | |
WO2010098891A2 (en) | Electrode compositions and processes | |
CN106099201B (en) | A kind of preparation method of the All-solid film batteries of high-energy density | |
WO2020119528A1 (en) | Composite negative plate, preparation method therefor and application thereof | |
KR100336621B1 (en) | Method of depositing an io or ito thin film on polymer substrate | |
CN106282949A (en) | A kind of method preparing ceramic membrane at lithium battery non-woven fabrics membrane surface | |
CN105568239B (en) | A kind of blue vacuum coating method | |
CN106119795A (en) | Utilize the method that vacuum magnetron sputtering coating film technology prepares lithium battery C Si negative pole coating | |
US20120107606A1 (en) | Article made of aluminum or aluminum alloy and method for manufacturing | |
CN103866241B (en) | A kind of ion auxiliary thermal evaporation combined magnetic-controlled sputter coating apparatus | |
CN100575543C (en) | A kind of method at the high radiation coating of cobalt base superalloy surface deposition silicon carbide | |
CN110729445A (en) | Tab with coating, preparation method thereof, battery cell, battery and electric tool | |
CN101748371B (en) | Method for preparing insulating film attached to touch screen | |
CN108456857A (en) | A kind of coating system and its method for preparing fexible film | |
CN114086143A (en) | Substrate coating process | |
CN113774347A (en) | Superhard and tough nano composite coating, preparation method and use equipment | |
CA2727650C (en) | Method for producing a transparent and conductive metal oxide layer by highly ionized pulsed magnetron sputtering | |
CN201817542U (en) | Ion plating device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180327 Address after: 516000 Building No. 108, building No. 108, Dongxin Avenue, Dongxing section, Dongjiang high tech Zone, Huizhou City, Guangdong Applicant after: Huizhou engu New Energy Industry Technology Research Institute Co., Ltd. Address before: 518000 D, E, unit, building 1, Merchants Plaza, No. 1166, hope road, Shekou, Shenzhen, Guangdong, China Applicant before: Shenzhen Valley Energy Holdings Co., Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant |