CN107462019A - One Room dual temperature vacuum drying chamber and furnace drying method - Google Patents
One Room dual temperature vacuum drying chamber and furnace drying method Download PDFInfo
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- CN107462019A CN107462019A CN201710879590.3A CN201710879590A CN107462019A CN 107462019 A CN107462019 A CN 107462019A CN 201710879590 A CN201710879590 A CN 201710879590A CN 107462019 A CN107462019 A CN 107462019A
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- chamber
- heater
- heating
- vacuum drying
- dual temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B9/00—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards
- F26B9/06—Machines or apparatus for drying solid materials or objects at rest or with only local agitation; Domestic airing cupboards in stationary drums or chambers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
- F26B23/10—Heating arrangements using tubes or passages containing heated fluids, e.g. acting as radiative elements; Closed-loop systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/06—Chambers, containers, or receptacles
- F26B25/08—Parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B5/00—Drying solid materials or objects by processes not involving the application of heat
- F26B5/04—Drying solid materials or objects by processes not involving the application of heat by evaporation or sublimation of moisture under reduced pressure, e.g. in a vacuum
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Sustainable Development (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention discloses a Room dual temperature vacuum drying chamber and furnace drying method, the drying box includes body of heater and vavuum pump, body of heater is connected by pipeline with the air inlet of vavuum pump, first heater and secondary heating mechanism are provided with body of heater, body of heater cavity includes the first chamber and second chamber of connection, first heater is used for placing product heating, drying in the first chamber, secondary heating mechanism is used to spread its moment the liquid medicine heating in second chamber, and first chamber, the heating-up temperature of second chamber are different.The characteristics of technological requirement that it is dried is different, must be carried out under condition of different temperatures, so needing to carry out a Room dual temperature control, using the Room dual temperature vacuum drying chamber, can complete kinds of processes demand simultaneously, and concrete operations are convenient, and efficiency is double.And using vacuum drying oven drying product, because body of heater chamber is closed, cleanliness factor is high, and dust, impurity in body of heater, and the water stain of surface are taken away by vavuum pump, and product will not be contaminated in heating process.
Description
Technical field
The present invention relates to a Room dual temperature vacuum drying chamber and furnace drying method.
Background technology
Some special products need to carry out its surface the drying and processing of different process, such as special glass piece, drying
Spread with surface vaporization, the two needs different Temperature Treatments under same environment, and prior art is done without a Room dual temperature vacuum
For dry device, it is necessary to which substep and multiple devices are carried out, cumbersome, efficiency is low, and is completed in normal pressure baking oven, causes product adding
During heat drying, the water of product surface, oil stain can leave spot, and dust, debris etc. can be to productions in heating process after vaporization
Product produce pollution.
The content of the invention
It is an object of the invention to provide a Room dual temperature vacuum drying chamber and furnace drying method, solves in the prior art without one
Room dual temperature Minton dryer, drying and diffusion need substep to carry out, and efficiency is low, and during heating, drying, water, the ash of product surface
Dirt can produce the technical problem of pollution to product.
To achieve these goals, art solutions of the present invention are as follows：
One Room dual temperature vacuum drying chamber, including body of heater and vavuum pump, offer on the body of heater and vacuumize hole, vacuumize hole
Connected by pipeline with the air inlet of vavuum pump, first heater and secondary heating mechanism, the chamber of body of heater are provided with body of heater
Body is divided into first chamber and second chamber, and first chamber connects with second chamber, and first heater is used for being placed on first
Product heating, drying in chamber, secondary heating mechanism are used to spread its rapid vaporization the liquid medicine heating in second chamber,
First chamber is different with the heating-up temperature in second chamber；Exhaust-valve is provided with the body of heater.
When drying product using the drying baker, first product is put into the first chamber of body of heater, closes fire door, closes emptying
Valve, then sealing state is in body of heater, then starts vavuum pump, vacuum negative pressure condition will be evacuated in body of heater chamber, then first
Heater works, and reaches the purpose of drying product surface moisture；In drying course, when the vacuum of body of heater chamber reaches setting
During value, secondary heating mechanism work, the liquid medicine being placed in second chamber is heated, spreads its rapid vaporization.After the completion of close
Heating tube and first heater, secondary heating mechanism are closed, exhaust-valve pressure release is opened when product is come out of the stove.Because different dries temperature
Degree requires, it is necessary to carries out in different temperature environments, so needing to carry out dual temperature control, is dried in vacuo using the Room dual temperature
Case, easy to operate, efficiency high.And using vacuum tank drying product, because body of heater chamber is closed, cleanliness factor is high, in body of heater
Dust, impurity, and the water stain of surface are all taken away by vavuum pump, and product will not be contaminated in heating process.
Further improving, the first heater includes heating water tank, water pump and water pipe, wherein, water tank and water pump are set
Put outside body of heater, water pipe is arranged in the interlayer of sidewall of the furnace body or on the inwall of first chamber, the water inlet of water pipe and water pump
Water side connects, and the delivery port of water pipe connects with water tank, and the water inlet end of water pump connects with water tank, forms a hot water circuit and returns
Road, electric heating tube is provided with water tank.
The first temperature meter is provided with first chamber, when measurement temperature is less than design temperature, is controlled in water tank
Electric heating tube work is heated, and when measurement temperature is higher than design temperature, electric heating tube is stopped and enters perseverance in water tank
Temperature state, temperature control is accurate, and hot water circulates in coils, heats evenly, and hot water more recycles, heat utilization rate
Height, cost is low, pollution-free.
Other mode of heatings can also be utilized to heat first chamber, as electric heating tube, deep fat heat.
Further improve, the secondary heating mechanism is electric boiling plate.Because will be to the liquid medicine that is placed in second chamber
Quick heating, spreads its rapid vaporization, it is advantageous to heat up faster, easily controllable electric boiling plate.It can certainly select
Other mode of heatings.
Further improve, depression forms second chamber downwards for the bottom of the first chamber, and electric boiling plate is arranged on second
Cavity bottom.Because density is smaller after liquid medicine vaporization, diffuse up, so needing for second chamber to be arranged on the bottom of first chamber
Portion.
Further improve, the heat exchange support for placing drip pan is provided with the first chamber, drip pan is used to put production
Product, by setting the support that exchanges heat, it is easy to neat loading product.Charging tray is placed with second chamber, charging tray is used to contain product.
Further improve, be provided with the first interface for adding liquid medicine on the body of heater, and for leading to the of nitrogen
Two interfaces, the first magnetic valve are provided with first interface, first interface is connected with charging tray by conduit, is provided with second interface
Valve.In the course of work, when the vacuum of body of heater chamber reaches setting value, the first magnetic valve is opened on first interface, by medicine
Water is added in charging tray by conduit, then rapid to close, because the dosage of liquid medicine is smaller, the first magnetic valve is opened, closed
Completed in moment.In drying course, the valve in second interface is opened, it is 0 or normal that nitrogen to pressure is passed through in body of heater chamber
Pressure, it is impossible to higher than normal pressure.Make product belong in protective gas to dry, anti-oxidation.
Further improve, the body of heater is double-decker, including outside plate, inner panel and interlayer, outside plate, inner panel are stainless steel steel
Plate, is provided with channel-section steel or I-steel between outside plate, inner panel, stainless-steel sheet is fixed on channel-section steel or I-steel both sides, wherein outside plate
Thickness 1~2mm, interior 5~10mm of thickness of slab.Double-decker heat insulation effect is high, compared with low energy consumption.Made using stainless steel, favorable anti-corrosion effect,
Corrosion is not easy, and bulk strength is high, service life length.
Further improve, the second vacuum solenoid is installed on the vavuum pump.Second vacuum solenoid is mounted in machine
Special valve on tool formula vavuum pump.Second vacuum solenoid is connected on same power supply with vavuum pump, the second vacuum solenoid
Open the open and close with stopping directly controlling vavuum pump.When the second vacuum solenoid is stopped or power supply interrupts suddenly
When, vavuum pump automatically can close vacuum system, and air is filled with into pump chamber by the air inlet of pump, avoid pump oil from backflowing pollution
Vacuum system.
Enter the improvement of two steps, the fire door is manual manipulation door, and fire door is hinged on sidewall of the furnace body, furnace body outer wall upper furnace door pair
Answer position to be provided with sealing ring, improve sealing, visor is provided with fire door, be easy to observe the drying situation of product in stove.Stove
Door can also be automatic overhead door, but cost is higher.
Further improve, the drying temperature in the first chamber is 60~70 degree.Drying temperature can not it is too low, can not
Too high, the time that is too low, then drying product surface moisture needs is grown, and efficiency is low；It is too high then easily because high temperature failure product.The
Heating-up temperature in two chambers is 120 degree, sets pressure when adding liquid medicine as -0.096MPa~-0.098MPa.Liquid medicine is at this
Energy rapid vaporization volatilization under temperature, pressure limit, vaporization, diffusion velocity are faster.
Using the method for a Room dual temperature vacuum drying chamber drying, comprise the following steps:
Step 1: product is put into drip pan, drip pan is put on heat exchange support, closes fire door, closes exhaust-valve, body of heater
Chamber is in sealing state；
Step 2: the second vacuum solenoid is opened, start vavuum pump, body of heater chamber is vacuumized；
Step 3: opening the valve on water pump, hot water circulates in water pipe, first chamber is heated, heating-up temperature
For 60~70 degree, the moisture of product surface is dried；Control the electric boiling plate of second chamber bottom to work simultaneously, to second chamber plus
Heat, heating-up temperature are 120 degree；
Step 4: when the pressure in body of heater chamber is -0.096~-0.098MPa, the first magnetic valve is opened, and liquid medicine is led to
Conduit is crossed to add in charging tray, it is then rapid to close, enable liquid medicine in product surface fully vaporization diffusion；
Step 5: stop, to heating in stove, opening the valve in second interface, nitrogen being passed through into body of heater chamber to pressure
For 0 or normal pressure；
Step 6: stopping heating in stove, exhaust-valve pressure release is opened, the course of work terminates.
The present invention has technique effect as is evident below using above-mentioned technical proposal：
According to different products and different temperature requirements, it is necessary to completed in same equipment, so needing to carry out dual temperature
Control, using the Room dual temperature vacuum drying chamber, securely and reliably, technology is exclusive, easy to operate, and efficiency is double.It is and true using this
Empty baking oven dryed product, because body of heater chamber is closed, cleanliness factor is high, dust, impurity in body of heater, and water stain whole quilts on surface
Vacuum pumped, product will not be contaminated in heating process.
Brief description of the drawings
Fig. 1 is the schematic diagram of herein described Room dual temperature vacuum drying chamber.
Structure chart when Fig. 2 is oven door opening.
Fig. 3 is Fig. 1 rearview.
Specific embodiment
To make the purpose of the present invention and technical scheme clearer, the skill below in conjunction with the embodiment of the present invention to the present invention
Art scheme is clearly and completely described.
Embodiment one：
As Figure 1-3, a Room dual temperature vacuum drying chamber, including body of heater 1 and vavuum pump 10, offer on the body of heater and take out
Vacuum interface, vacuumize interface and connected by pipeline with the air inlet of vavuum pump 10, be provided with body of heater first heater and
Secondary heating mechanism, first heater include heating water tank 8, water pump 9 and water pipe 7, wherein, water tank 8 and water pump 9 are arranged on stove
Outside body 1, water pipe 7 is arranged in the interlayer of sidewall of the furnace body, and the water inlet of water pipe 7 connects with the water side of water pump 9, and water pipe 7 goes out
The mouth of a river connects with water tank 8, and the water inlet end of water pump 9 connects with water tank 8, forms a hot water circulation loop, electricity is provided with water tank 8
Heating tube.Secondary heating mechanism is electric boiling plate 11.The cavity of body of heater is divided into first chamber and second chamber, the bottom of first chamber
Depression forms second chamber downwards in portion, and electric boiling plate 11 is arranged on second chamber bottom.In heating water tank 8 electric heating tube be used for pair
Sheet glass heating, drying in the first chamber is placed, heating-up temperature is 70 degree, heating power 8KW, and secondary heating mechanism is used
Liquid medicine heating in second chamber makes its vaporization diffusion, and heating-up temperature is 120 degree, heating power 400W.Set on body of heater 1
It is equipped with exhaust-valve 4.
In other embodiments, first chamber, the heating-up temperature of second chamber can be other values, according to different productions
Product, select its different temperature.Heating power can determine according to the volume of body of heater, heating-up temperature.
In other embodiments, water pipe 7 can be arranged on the inwall of first chamber.
In other embodiments, other mode of heatings can also be utilized to heat first chamber, as electric heating tube, deep fat add
Heat.Other mode of heatings can also be selected to heat second chamber.
In the present embodiment, the heat exchange support 13 for placing drip pan 14 is provided with the first chamber, drip pan 14 is used
In putting glass tablet, by setting the support that exchanges heat, it is easy to neat loading glass tablet, the width of first chamber is 550mm,
High 870mm, depth 670mm.Charging tray 12 is placed with second chamber, charging tray is used to contain sheet glass, and the width of charging tray is
140mm, long 140mm, it is highly 12mm.In other embodiments, the size of cavity can be changed according to the actual requirements.
In the present embodiment, the first interface 3 for adding liquid medicine is provided with the body of heater, and for leading to nitrogen
Second interface 6, the first magnetic valve is provided with first interface 3, first interface is connected by conduit 15 with charging tray, second interface 6
On be provided with valve.In drying course, when the vacuum of body of heater chamber reaches -0.098MPa, the first electromagnetism on first interface 3
Valve is opened, and liquid medicine is added in charging tray by conduit 15, then rapid to close, because the dosage of liquid medicine is smaller, the first electricity
Magnet valve is opened, closes and completed in moment.In drying course, the valve in second interface 6 is opened, nitrogen is passed through extremely in body of heater chamber
Pressure is normal pressure, it is impossible to higher than normal pressure.Sheet glass belongs in stove dries in protective gas, anti-oxidation.
In other embodiments, in drying course, when the vacuum of body of heater chamber reaches -0.096MPa, first interface 3
Upper first magnetic valve is opened.
In the present embodiment, the body of heater 1 is double-decker, including outside plate, inner panel and interlayer, outside plate, inner panel are stainless
Steel steel plate, channel-section steel or I-steel being provided between outside plate, inner panel, stainless-steel sheet is fixed on channel-section steel or I-steel both sides, wherein
Outside plate is thick 2mm stainless steel matt plate, and inner panel is thick 8mm 304 stainless steel plates.Double-decker heat insulation effect is high, compared with low energy
Consumption.Made using stainless steel, favorable anti-corrosion effect, be not easy corrosion, and bulk strength is high, service life length.
In the present embodiment, second vacuum solenoid is installed on the vavuum pump 10.Second vacuum solenoid is installation
Special valve in mechanical vacuum pump.Second vacuum solenoid is connected on same power supply with vavuum pump, vacuum solenoid
Open the open and close with stopping directly controlling vavuum pump.When vacuum solenoid is stopped or power supply interrupts suddenly,
Vavuum pump automatically can close vacuum system, and air is filled with into pump chamber by the air inlet of pump, avoid pump oil from backflowing pollution very
Empty set is united.
In the present embodiment, the fire door 2 is manual manipulation door, and fire door 2 is hinged on sidewall of the furnace body, stove on furnace body outer wall
Door correspondence position is provided with sealing ring, improves sealing, visor 5 is provided with fire door, is easy to observe liquid medicine sheet glass in stove
Drying situation.In other embodiments, fire door can also be automatic overhead door, but cost is higher.
In the present embodiment, it is sheet glass to dry product.
Embodiment two：
Using the method for a Room dual temperature vacuum drying chamber drying, comprise the following steps:
Step 1: sheet glass is put into drip pan, drip pan is put on heat exchange support, closes fire door, closes exhaust-valve, stove
Fluid chamber is in sealing state；
Step 2: starting second solenoid valve, the unlatching of vavuum pump, body of heater chamber is vacuumized；
Step 3: opening the valve on water pump, hot water circulates in water pipe, first chamber is heated, heating-up temperature
For 70 degree, the moisture of glass sheet surface is dried；Control the electric boiling plate of second chamber bottom to work simultaneously, to second chamber plus
Heat, heating-up temperature are 120 degree；
Step 4: when the pressure in body of heater chamber is -0.098MPa, the first magnetic valve is opened, and liquid medicine is added by conduit
In feeding disk, then rapid to close, liquid medicine fully vaporizes diffusion in glass sheet surface；
Step 5: stop, to heating in stove, opening the valve in second interface, nitrogen being passed through into body of heater chamber to pressure
For 0 or normal pressure；
Step 6: drying diffusion process terminates, exhaust-valve pressure release is opened.
In the present embodiment, it is sheet glass to dry product.
In other embodiments, in the step 3, the valve on water pump is opened, hot water circulates in water pipe, right
First chamber heats, and heating-up temperature is 60 degree, dries the moisture of glass sheet surface；The electrical heating of second chamber bottom is controlled simultaneously
Plate is worked, and second chamber is heated, and heating-up temperature is 120 degree；Step 4: when the pressure in body of heater chamber is -0.096MPa, the
One magnetic valve is opened, and liquid medicine is added in charging tray by conduit, then rapid to close, liquid medicine fully vaporizes expansion in glass sheet surface
Dissipate.
Do not done in the present invention illustrate be prior art or by prior art i.e. can be achieved, and the present invention
Described in be embodied case be only the present invention preferable case study on implementation, not be used for limit the present invention practical range.
The equivalent changes and modifications that i.e. all contents according to scope of the present invention patent are made, it all should be used as the technology category of the present invention.
Claims (10)
- A 1. Room dual temperature vacuum drying chamber, it is characterised in that including body of heater and vavuum pump, offer and vacuumize on the body of heater Hole, vacuumize hole and connected by pipeline with the air inlet of vavuum pump, first heater and the second heating dress are provided with body of heater Put, the cavity of body of heater is divided into first chamber and second chamber, and first chamber connects with second chamber, first heater be used for pair Product heating, drying in the first chamber is placed, secondary heating mechanism is used to make its moment to the liquid medicine heating in second chamber Vaporization diffusion, first chamber, the heating-up temperature of second chamber are different；Exhaust-valve is provided with the body of heater.
- 2. Room dual temperature vacuum drying chamber according to claim 1, it is characterised in that the first heater includes adding Boiler, water pump and water pipe, wherein, water tank and water pump are arranged on outside body of heater, and water pipe is arranged in the interlayer of sidewall of the furnace body or On the inwall of one chamber, the water inlet of water pipe connects with the water side of water pump, and the delivery port of water pipe connects with water tank, and water pump enters Water end (W.E.) connects with water tank, forms a hot water circulation loop, electric heating tube is provided with water tank.
- 3. Room dual temperature vacuum drying chamber according to claim 1 or 2, it is characterised in that the secondary heating mechanism is Electric boiling plate.
- 4. Room dual temperature vacuum drying chamber according to claim 3, it is characterised in that the bottom of the first chamber is downward Depression forms second chamber, and electric boiling plate is arranged on second chamber recess bottom；The heat exchange support for placing drip pan is provided with the first chamber, charging tray is placed with second chamber.
- 5. Room dual temperature vacuum drying chamber according to claim 4, it is characterised in that be provided with the body of heater for adding The first interface of medicine adding and the second interface for leading to nitrogen, the first magnetic valve are provided with first interface, first interface leads to Cross conduit to connect with charging tray, valve is provided with second interface.
- 6. the Room dual temperature vacuum drying chamber according to any one of claim 1,4,5, it is characterised in that the body of heater is Double-decker, including outside plate, inner panel and interlayer, outside plate, inner panel are stainless-steel sheet, be provided between outside plate, inner panel channel-section steel or I-steel, stainless-steel sheet are fixed on channel-section steel or I-steel both sides, wherein outer 1~2mm of thickness of slab, interior 5~10mm of thickness of slab.
- 7. Room dual temperature vacuum drying chamber according to claim 6, it is characterised in that be provided with second on the vavuum pump Vacuum solenoid.
- 8. Room dual temperature vacuum drying chamber according to claim 7, it is characterised in that the fire door is manual manipulation door, Fire door is hinged on sidewall of the furnace body, and furnace body outer wall upper furnace door correspondence position is provided with sealing ring, and visor is provided with fire door.
- 9. Room dual temperature vacuum drying chamber according to claim 8, it is characterised in that the drying temperature in the first chamber Spend for 60~70 degree, the heating-up temperature in second chamber be 120 degree, set addition liquid medicine when pressure as -0.096MPa~- 0.098MPa。
- 10. a kind of method using a Room dual temperature vacuum drying chamber drying any one of claim 1-9, its feature exists In comprising the following steps:Step 1: product is put into drip pan, drip pan is put on heat exchange support, closes fire door, closes exhaust-valve, body of heater chamber In sealing state；Step 2: the second vacuum solenoid is opened, start vavuum pump, body of heater chamber is vacuumized；Step 3: opening the valve on water pump, hot water circulates in water pipe, first chamber is heated, heating-up temperature 60 ~70 degree, dry the moisture of product surface；Control the electric boiling plate of second chamber bottom to work simultaneously, second chamber heated, Heating-up temperature is maintained at as 120 degree；Step 4: when the pressure in body of heater chamber is -0.096MPa~-0.098MPa, the first magnetic valve is opened, and liquid medicine is passed through Conduit adds the surface of sheet glass in charging tray, then rapid to close, and the liquid medicine of entrance is fully vaporized in glass sheet surface Diffusion；Step 5: stopping heating second chamber, the valve in second interface is opened, nitrogen is passed through into body of heater chamber to pressure For 0 or normal pressure；Step 6: stopping heating first chamber, exhaust-valve pressure release is opened, completes the drying to product.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710879590.3A CN107462019B (en) | 2017-09-25 | 2017-09-25 | One-room double-temperature vacuum drying oven and drying method |
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| CN201710879590.3A CN107462019B (en) | 2017-09-25 | 2017-09-25 | One-room double-temperature vacuum drying oven and drying method |
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| CN107462019A true CN107462019A (en) | 2017-12-12 |
| CN107462019B CN107462019B (en) | 2022-08-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113587570A (en) * | 2021-08-10 | 2021-11-02 | 宁波市计量测试研究院(宁波新材料检验检测中心) | Full-automatic calibration device for calibrating vacuum drying oven |
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| CN207365583U (en) * | 2017-09-25 | 2018-05-15 | 南京天煌机械有限公司 | One Room dual temperature vacuum drying chamber |
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| US6092299A (en) * | 1997-09-05 | 2000-07-25 | Tokyo Electron Limited | Vacuum processing apparatus |
| CN101603170A (en) * | 2009-07-21 | 2009-12-16 | 黄益新 | A kind of method that is coated with poly-to the dimethyl benzene film on the led chip surface |
| CN102818439A (en) * | 2012-08-30 | 2012-12-12 | 西安隆基硅材料股份有限公司 | Drying device and drying method for high-purity silicon materials |
| CN103436845A (en) * | 2013-06-18 | 2013-12-11 | 广东工业大学 | Method for coating TiC layer on surface of diamond particles |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113587570A (en) * | 2021-08-10 | 2021-11-02 | 宁波市计量测试研究院(宁波新材料检验检测中心) | Full-automatic calibration device for calibrating vacuum drying oven |
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| CN107462019B (en) | 2022-08-16 |
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