CN107437878B - A kind of Three Degree Of Freedom linear electromagnetic actuator - Google Patents
A kind of Three Degree Of Freedom linear electromagnetic actuator Download PDFInfo
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- CN107437878B CN107437878B CN201710636968.7A CN201710636968A CN107437878B CN 107437878 B CN107437878 B CN 107437878B CN 201710636968 A CN201710636968 A CN 201710636968A CN 107437878 B CN107437878 B CN 107437878B
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 32
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 30
- 230000005284 excitation Effects 0.000 claims abstract description 27
- 238000003825 pressing Methods 0.000 claims description 8
- 238000012360 testing method Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003913 materials processing Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 210000000988 bone and bone Anatomy 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K16/00—Machines with more than one rotor or stator
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/14—Stator cores with salient poles
- H02K1/141—Stator cores with salient poles consisting of C-shaped cores
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/12—Stationary parts of the magnetic circuit
- H02K1/17—Stator cores with permanent magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
- H02K11/21—Devices for sensing speed or position, or actuated thereby
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- Microelectronics & Electronic Packaging (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
Abstract
The invention belongs to actuator fields, and specifically disclose a kind of Three Degree Of Freedom linear electromagnetic actuator, it includes the identical actuator stator unit of four structures, an actuator mover and three displacement sensors, four actuator stator units are symmetrically distributed in the side up and down of actuator mover, each actuator stator unit includes rectangular stator iron core, rectangle permanent magnet, two C-shaped stator cores and two groups of excitation coils, rectangular stator iron core is bonded in the pole S of permanent magnet, and two C-shaped stator cores are symmetrically distributed in the two sides of permanent magnet；Actuator mover includes cross mover iron core, and four ends of mover iron core are inserted into the trench structure of four actuator stator units；Three displacement sensors are mounted on actuator stator unit, for measuring the displacement of actuator mover.The present invention can effectively solve the problems, such as actuator electromagnetic force output nonlinear, have the output characteristics of linearisation and the ability of multiple degrees of freedom driving.
Description
Technical field
The invention belongs to electromagnetic actuator fields, more particularly, to a kind of Three Degree Of Freedom linear electromagnetic actuator.
Background technique
Boring cutter is a kind of cutter of long hole in workpieces processing, and generally in slim-lined construction, elongated boring cutter is being processed
In the process usually can because of its own Low rigidity and generate violent vibration, thus influence workpiece machining accuracy and surface it is thick
Rugosity.In order to avoid boring cutter generates vibration, generally vibration damping is carried out by the way of passive type, however passive type oscillation damping method institute energy
The effectiveness in vibration suppression of acquirement is relatively limited.
For the vibration for preferably inhibiting elongated boring cutter to generate in process, it is necessary to be vibrated using active control
Method promote the dynamic characteristic of cutter or workpiece, such as setting is suitable for the actuator of boring cutter.However it is applicable on the market at present
More rare in the actuator product of boring cutter vibration control, electromagnetic bearing is produced as a kind of actuator for controlling boring cutter vibration
Product, although may be mounted on boring cutter, the output of its electromagnetic force is ability that is non-linear, and not having control twisting vibration.
It is therefore proposed that the linearisation electromagnetic actuator of translational degree of freedom and a torsional freedom must with urgent there are two a kind of tools
The property wanted.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of Three Degree Of Freedom linear electromagnetic actuations
Device accordingly devises the actuator suitable for boring cutter vibration control, and to its crucial group wherein combining the application of actuator
The part such as structure of actuator stator unit, actuator mover and its specific set-up mode are studied and are designed, and can be had accordingly
Effect solves the problems, such as actuator product electromagnetic force output nonlinear, has output characteristics and multiple degrees of freedom driving of linearisation etc.
Advantage.
To achieve the above object, the invention proposes a kind of Three Degree Of Freedom linear electromagnetic actuator comprising four structures
Identical actuator stator unit, an actuator mover and three displacement sensors, in which:
Four actuator stator units are symmetrically distributed in the side up and down of the actuator mover, each work
Dynamic device stator unit includes rectangular stator iron core, rectangle permanent magnet, two C-shaped stator cores and two groups of excitation coils, described
Rectangular stator iron core is bonded in the pole S of permanent magnet, and described two C-shaped stator cores are symmetrically distributed in up and down the two of the permanent magnet
Side, and one end of two C-shaped stator cores is contacted with the upper and lower surface of the rectangular stator iron core respectively, and two C-shapeds are fixed
A trench structure, two groups of excitation coils are formed between the end face of the other end of sub- iron core and the N pole surface of the permanent magnet
It respectively corresponds and is wrapped on described two C-shaped stator cores；
The actuator mover is cross-shaped symmetrical formula structure comprising cross mover iron core, the cross mover iron
Be provided with circular through hole in the middle part of core, and its corresponding four actuator are inserted into four ends respectively up and down
In the trench structure of stator unit, with this by an end and the corresponding actuator of the cross mover iron core
One magnetic structure unit of stator unit composition electromagnetic actuator；Three displacement sensors, which respectively correspond, is mounted on distribution
On three actuator stator units on right side up and down of the actuator mover.
As it is further preferred that the actuator mover further includes the mover skeleton and mover pressure for being cross-shaped structure
Plate, the cross mover iron core are set between the mover skeleton and mover pressing plate, and solid by fastener between three
Fixed connection.
As it is further preferred that the actuator stator unit further includes stator casing, each actuator stator
Rectangular stator iron core, rectangle permanent magnet, two C-shaped stator cores and two groups of excitation coils in unit are installed in corresponding institute
It states within shell.
As it is further preferred that four ends of the mover skeleton are equipped with rectangular block architecture outstanding using as institute
The test object of displacement sensors.
As it is further preferred that institute's displacement sensors are mounted on the shell of actuator stator unit by fixture.
As it is further preferred that gap between the mover iron core and the magnetic pole surfaces of corresponding C-shaped stator core
The sum of remained unchanged in actuator mover motion process.
As it is further preferred that the thickness of the rectangular stator iron core, C-shaped stator core and mover iron core is homogeneous
Together, and the flush of rectangular stator iron core, C-shaped stator core and mover iron core.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, mainly have below
Technological merit:
1. Three Degree Of Freedom linear electromagnetic actuator of the invention has two translations in horizontal direction and vertical direction certainly
By degree and around the torsional freedom of actuator axis rotation, is applied in boring cutter, have and inhibit elongated boring cutter in level
The radial vibration in direction and vertical direction, and from horizontal direction to the ability of the twisting vibration of vertical direction torsion.
2. the pole orientation of the permanent magnet in the magnetic structure unit of Three Degree Of Freedom linear electromagnetic actuator of the invention is hung down
The magnetic direction directly generated in excitation coil, and permanent magnet produces biasing in upper and lower C-shaped stator core and magnetic pole gap
Magnetic field, the direction of the bias magnetic field is identical as the excitation field direction that coil generates at a magnetic pole gap, in another magnetic
It is contrary with the excitation field that coil generates at clearance between poles, the linearisation magnetic structure of permanent magnetic radial biasing is constituted with this,
It ensure that electromagnetic force and the exciting current of output are in a linear relationship, so that actuator has the electromagnetic force output characteristics of linearisation,
Consequently facilitating the control of vibration.
Detailed description of the invention
Fig. 1 is a kind of contour structures main view of Three Degree Of Freedom linear electromagnetic actuator of the invention；
Fig. 2 is the assembling structure schematic diagram of actuator mover in the present invention；
Fig. 3 is the structural schematic diagram of single electromagnetic actuator driving unit；
Fig. 4 is the exciting current direction and electromagnetic force direction schematic diagram when electromagnetic actuator is vertically moving；
Fig. 5 is the exciting current direction and electromagnetic force direction schematic diagram when electromagnetic actuator moves in the horizontal direction；
Fig. 6 is the exciting current direction and electromagnetic force direction schematic diagram when electromagnetic actuator makees twist motion.
In figure: 1- actuator stator unit, 2- displacement sensor, 3- clamp of sensor, 4- actuator mover, 5- mover bone
Frame, 6- mover iron core, 7- mover pressing plate, 8-C shape stator core, 9- stator casing, 10- excitation coil, 11- permanent magnet, 12- square
Shape stator core, 13- excitation coil, 14-C shape stator core.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
As shown in Figure 1-3, a kind of Three Degree Of Freedom linear electromagnetic actuator provided in an embodiment of the present invention comprising four knots
1, actuator mover 4 of the identical actuator stator unit of structure and three displacement sensors 2, wherein four actuator stator lists
The side up and down that member 1 is symmetrically distributed in actuator mover 4, each actuator stator unit 1 include rectangular stator iron core 12,
11, two C-shaped stator cores 8,14 of rectangle permanent magnet and two groups of excitation coils 10,13, rectangular stator iron core 12 is bonded in permanent magnetism
The outside (surface of the pole S) of iron 11, two C-shaped stator cores 8,14 are symmetrically distributed in the two sides up and down of permanent magnet 11, and two
One end of a C-shaped stator core 8,14 contacts (namely two C-shaped stator cores with the upper and lower surface of rectangular stator iron core 12 respectively
8, the magnetic pole surfaces of 14 respective one end are in contact with the magnetic pole surfaces of rectangular stator iron core), to guarantee magnetic circuit in stator core
It is unimpeded, and between the end face of the other end of two C-shaped stator cores 8,14 and the inner surface (surface of the pole N) of permanent magnet 11
A trench structure is formed, two groups of excitation coils 10,13, which respectively correspond, to be wrapped on two C-shaped stator cores 8,14；Actuator is dynamic
Son 4 is cross-shaped symmetrical formula structure comprising cross-shaped symmetrical formula structure mover iron core 6 (i.e. there are four ends for tool), the mover
The middle part of iron core 6 is provided with the circular through hole for installing elongated boring cutter, and its four ends are inserted into respectively up and down
In the trench structure of four corresponding actuator stator units 1；Three displacement sensors 2, which respectively correspond to be mounted on, to be distributed in
On three actuator stator units on right side up and down of actuator mover 4, for measuring the displacement of actuator mover 4.
Further, each actuator stator unit 1 further includes a stator casing 9, in each actuator stator unit 1
Rectangular stator iron core 12,11, two C-shaped stator cores 8,14 of rectangle permanent magnet and two groups of excitation coils 10,13 are installed in pair
Within the shell 9 answered, and by bonding agent and shell fixation at being integral.And displacement sensor 2 is then installed by fixture 3
On the shell 9 of corresponding actuator stator unit 1.
More specifically, actuator mover 4 further includes the mover skeleton 5 and mover pressing plate for being cross-shaped symmetrical formula structure
7, mover iron core 6 is set between mover skeleton 5 and mover pressing plate 7, and by fastener, for example screw fixes company between three
Connect, be furthermore again provided on mover skeleton 5 and mover pressing plate 7 be connected with the circular through hole on mover iron core 6 it is onesize
Circular through hole, to guarantee the smooth installation of boring cutter.Preferably, four ends of mover skeleton 5 are equipped with rectangular block outstanding
Structure is using the test object as displacement sensor, namely as shown in Fig. 2, four ends of mover skeleton 5 are equipped with to evagination
Rectangular block architecture out, the lateral surface of the rectangular block architecture are opposite with corresponding displacement sensor (as shown in Figure 1, mover skeleton
Right-hand end up and down on rectangular block architecture it is opposite with three displacement sensors on upper and lower right side respectively), so that passing through
The displacement of displacement sensor test rectangular block architecture is to realize the displacement detecting of actuator mover.
Specifically, as shown in Figure 1, the displacement of actuator mover (i.e. the direction x) in the horizontal direction is fixed by being mounted on right side
Displacement sensor on subshell directly measures, actuator mover vertical direction (i.e. the direction y) displacement by being mounted on
Displacement sensor on the stator casing of side directly measures, and the corner that actuator is moved in the direction θ (is rotated from the direction x to the direction y
Angle, namely the angle around the rotation of actuator axis) can by the right side of mover skeleton with downside rectangular block in the horizontal direction (i.e.
The direction x) displacement be calculated indirectly, specially；First by being mounted on right side stator casing and downside stator casing
Displacement sensor is measured on the right side of mover skeleton with the displacement of downside rectangular block in the x-direction, uses downside rectangular block and right side square later
The difference of the displacement of shape block approximate can be obtained divided by the vertical range of downside rectangular block center and actuator mover center
To the radian value of the corner in the direction θ.
When actuator mover is in equilbrium position, (i.e. one end of mover iron core 6 is located at the magnetic pole of C-shaped stator core 8 and 14
Middle) when, the upper and lower surfaces of mover core ends or left and right surface and two C-shaped stator cores in corresponding stator unit
Up and down or left and right magnetic pole surfaces gap (d1, d2) is equal, i.e. magnetic of two surfaces of mover core ends to corresponding two C-shaped iron cores
Gap between pole surface is equal, and in actuator mover motion process, mover iron core 6 and corresponding C-shaped stator core 8,
(d1+d2) does not change in the sum of gap between 14 magnetic pole surfaces.
Further, the thickness of 12, two C-shaped stator cores 8,14 of rectangular stator iron core and mover iron core 6 is all the same,
So that electromagnetic field transmits between mover and stator core, reduces leakage field, promotes magnetic field utilization efficiency, and in assembly and use
Mover iron core and the front and rear surfaces difference of stator core (including rectangular stator iron core 12, C-shaped stator core 8,14) are neat in the process
It is flat, in addition, actuator stator core and mover iron core are all made of soft magnetic materials processing and manufacturing, and it is stator casing, mover skeleton, dynamic
Sub- pressing plate and fixture are all made of aluminum alloy materials processing and manufacturing.
Fig. 3 is the structural schematic diagram of single electromagnetic actuator driving unit, is the rear view of electromagnetic actuator, to scheme
It is further illustrated for electromagnetic actuator driving unit in 3, it is fixed that corresponding actuator is inserted into 6 right part of mover iron core
In the middle part trench structure of subelement 1, when actuator mover 4 is in equilbrium position, the upper and lower surface of 6 end of mover iron core with
The gap d of magnetic pole surfaces up and down 1 of two C-shaped iron cores 8,14 in stator unit 1, d2 is equal；In 4 motion process of actuator mover
In, the sum of upper and lower sides magnetic pole gap of mover iron core 6 and stator core 8,14 d1+d2 does not change.
The working principle of Three Degree Of Freedom linear electromagnetic actuator is described below with reference to Fig. 3, Fig. 4, Fig. 5, Fig. 6, wherein Fig. 3,
Fig. 4, Fig. 5, Fig. 6 are the rear view of electromagnetic actuator.
Three Degree Of Freedom linear electromagnetic actuator disclosed by the invention is made of four equivalent electromagnetic actuator driving units,
Each electromagnetic actuator driving unit includes one end of an actuator stator unit 1 and actuator mover 4, in stator unit
Excitation coil generates excitation field, and the pole orientation of permanent magnet is vertical with the magnetic direction that excitation coil generates, and permanent magnet is dynamic
Bias magnetic field is generated at son and the magnetic pole gap of stator, excitation field is added at a magnetic pole gap with bias magnetic field, another
Subtract each other at one magnetic pole gap, the electromagnetic force that the biggish gap location of magnetic field strength generates is larger, and then actuator mover is to the magnetic
The movement of clearance between poles side.As shown in figure 3, excitation coil 10,13 generates an excitation magnetic in each electromagnetic actuator driving unit
Field (black arrow), permanent magnet 11 generate one partially at two magnetic pole gaps d1, d2 of mover iron core 6 and stator core 8,14
It sets magnetic field (white arrow), the d2 at the magnetic pole gap of lower end is added excitation field with bias magnetic field, at the magnetic pole gap d1 of upper end
Subtract each other, the electromagnetic force generated at the biggish lower end magnetic pole gap d2 of magnetic field strength is larger, then in electromagnetic actuator driving unit
6 end of mover iron core to-y, when the direction for changing exciting current, keep the direction of excitation field reversed, then 6 end of mover iron core
The direction of motion also can be reversed.
By reasonably selecting the current direction of excitation coil in each electromagnetic actuator driving unit, electromagnetism can control
The mover of actuator is along x, tri- direction movements of y, θ: the excitation coil 10,13 in the electromagnetic actuator driving unit of the left and right sides
When current direction and 11 pole orientation of permanent magnet consistent with direction shown in Fig. 4, the left and right ends of actuator mover 4 are by one
The electromagnetic force in the direction a edge-y, therefore actuator mover will be moved to the direction-y；When upper and lower two sides electromagnetic actuator driving unit
In 10,13 current direction of excitation coil and when 11 pole orientation of permanent magnet consistent with direction shown in Fig. 5, actuator mover 4
Electromagnetic force of the upper and lower ends by the edge direction-x, therefore actuator mover will be moved to the direction-x；When four electromagnetism
10,13 current direction of excitation coil and 11 pole orientation of permanent magnet in actuator driving unit is consistent with direction shown in Fig. 6
When, effect of four ends of actuator mover 4 by the electromagnetic torque along the direction θ, therefore actuator mover will be along the direction θ
Rotation.
Since the design of each electromagnetic actuator driving unit has been all made of the magnetic structure of permanent magnetic radial biasing, Er Qieqi
The sum of upper and lower sides magnetic pole gap or left and right sides magnetic pole gap are a fixed value, and when mover is located at equilbrium position, upper and lower sides magnetic
Clearance between poles or left and right sides magnetic pole gap are equal in magnitude.Then, available each electromagnetism is calculated by Analysis of Magnetic Circuit and electromagnetic force
Output electromagnetic force (F) and exciting current (I) and the mover displacement (y) of actuator driving unit are just like offline sexual intercourse:
F=kiI+kdy
Wherein, kiWith kdIt is electromagnetism force coefficient.
I.e. the output electromagnetic force of the actuator with structure of the invention and exciting current are in a linear relationship namely of the invention
Actuator has the output characteristics of linearisation, therefore can apply it in the active control of boring cutter vibration, is swashed by controlling
The control of output electromagnetic force size can be realized in the size and Orientation for encouraging electric current, and then realizes effective inhibition of boring cutter vibration.And
It is the prior art for specifically how to inhibit the vibration of boring cutter, the present invention mainly protects the structure of the actuator.Briefly
It is exactly to be transferred to controller by the vibration of displacement sensor real-time measurement actuator mover, and by vibration information, in controller
Control algolithm control output valve is calculated according to the vibration information of sensor feedback, and the control output valve is passed into power
Amplifier, by the size of current of each coil in power amplifier control electromagnetic actuator, to realize to actuator mover position
The control set, and then realize the inhibition of vibration, realize the active control for the vibration that boring cutter generates in process.Due to this hair
Bright actuator has the output characteristics of linearisation, therefore when being used for the vibration control of boring cutter, so that the control in controller
Algorithm processed is easier to design, and is easier to obtain ideal control effect, if output characteristics be not it is linear, need in algorithm
In advanced row linearization process, then carry out control algolithm again and write, increase the complexity and difficulty of control algolithm, it is not easy to
Obtain comparatively ideal vibration control effect.
Three Degree Of Freedom linear electromagnetic actuator provided by the invention, not only can be with drive ram mover in x, and y, θ tri-
The movement in direction, and have the electromagnetic force output characteristics of linearisation, can effectively it overcome existing for the vibration control of elongated boring cutter
Deficiency existing for the actuator of system has the output characteristics of linearisation and the ability of multiple degrees of freedom driving.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of Three Degree Of Freedom linear electromagnetic actuator, which is characterized in that including the identical actuator stator unit of four structures
(1), an actuator mover (4) and three displacement sensors (2), in which:
Four actuator stator units (1) are symmetrically distributed in the side up and down of the actuator mover (4), each described
Actuator stator unit (1) includes rectangular stator iron core (12), rectangle permanent magnet (11), two C-shaped stator cores (8,14)
With two groups of excitation coils (10,13), the rectangular stator iron core (12) is bonded in the pole S of permanent magnet (11), and described two C-shapeds are fixed
Sub- iron core (8,14) is symmetrically distributed in the two sides up and down of the permanent magnet (11), and the one of two C-shaped stator cores (8,14)
End is contacted with the upper and lower surface of the rectangular stator iron core (12) respectively, and the other end of two C-shaped stator cores (8,14)
A trench structure is formed between end face and the N pole surface of the permanent magnet (11), two groups of excitation coils (10,13) are right respectively
It should be wrapped on described two C-shaped stator cores (8,14)；
The actuator mover (4) is cross-shaped symmetrical formula structure comprising cross mover iron core (6), the cross mover
Be provided with circular through hole in the middle part of iron core (6), and its corresponding described four are inserted into four ends respectively up and down
In the trench structure of actuator stator unit (1), with this by the cross mover iron core (6) an end with it is corresponding
An actuator stator unit composition electromagnetic actuator a magnetic structure unit；Three displacement sensors (2) point
It Dui Ying not be mounted on the three actuator stator units on right side up and down for being distributed in the actuator mover (4).
2. Three Degree Of Freedom linear electromagnetic actuator as described in claim 1, which is characterized in that the actuator mover (4) is also
Mover skeleton (5) and mover pressing plate (7) including being cross-shaped structure, the cross mover iron core (6) are set to described dynamic
Between sub- skeleton (5) and mover pressing plate (7), and it is fixedly connected between three by fastener.
3. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 2, which is characterized in that the actuator stator unit
It (1) further include stator casing (9), rectangular stator iron core (12), rectangle permanent magnet in each actuator stator unit (1)
(11), two C-shaped stator cores (8,14) and two groups of excitation coils (10,13) are installed within the corresponding shell (9).
4. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 3, which is characterized in that the four of the mover skeleton (5)
A end is equipped with rectangular block architecture outstanding using the test object as institute's displacement sensors.
5. Three Degree Of Freedom linear electromagnetic actuator as described in claim 3 or 4, which is characterized in that institute's displacement sensors (2)
It is mounted on the shell (9) of actuator stator unit (1) by fixture (3).
6. Three Degree Of Freedom linear electromagnetic actuator according to any one of claims 1-4, which is characterized in that the cross is dynamic
The sum of gap between sub- iron core (6) and the magnetic pole surfaces of corresponding C-shaped stator core (8,14) is moved through in actuator mover
It is remained unchanged in journey.
7. Three Degree Of Freedom linear electromagnetic actuator as claimed in claim 6, which is characterized in that the rectangular stator iron core
(12), the thickness of C-shaped stator core (8,14) and cross mover iron core (6) is all the same, and rectangular stator iron core (12),
The flush of C-shaped stator core (8,14) and cross mover iron core (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710636968.7A CN107437878B (en) | 2017-07-31 | 2017-07-31 | A kind of Three Degree Of Freedom linear electromagnetic actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710636968.7A CN107437878B (en) | 2017-07-31 | 2017-07-31 | A kind of Three Degree Of Freedom linear electromagnetic actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107437878A CN107437878A (en) | 2017-12-05 |
| CN107437878B true CN107437878B (en) | 2019-05-21 |
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| CN201710636968.7A Expired - Fee Related CN107437878B (en) | 2017-07-31 | 2017-07-31 | A kind of Three Degree Of Freedom linear electromagnetic actuator |
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Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1838330B (en) * | 2006-04-21 | 2011-06-29 | 清华大学 | Electromagnetic force parallel-connection driving type plane 3-DOF micropositioner |
| CN100470378C (en) * | 2007-04-27 | 2009-03-18 | 清华大学 | Ultrathin triple-freedom inching work table |
| CN203275876U (en) * | 2013-04-27 | 2013-11-06 | 清华大学 | Micromotion working platform of silicon wafer platform of a photoetching machine |
| JP5614478B2 (en) * | 2013-07-22 | 2014-10-29 | 日本電気株式会社 | Mirror tilt actuator |
| EP3350663A1 (en) * | 2015-09-15 | 2018-07-25 | Behr-Hella Thermocontrol GmbH | Operating unit for a vehicle |
| CN105978200B (en) * | 2016-07-19 | 2018-07-20 | 上海航天控制技术研究所 | A kind of multifrequency complex vibration simulator and its method for realizing multifrequency complex vibration |
| CN106953551B (en) * | 2017-05-05 | 2018-12-11 | 哈尔滨工业大学 | Magnetcisuspension suspension gravity compensator |
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