CN107424945A - A kind of chamber of wet process board - Google Patents
A kind of chamber of wet process board Download PDFInfo
- Publication number
- CN107424945A CN107424945A CN201710611727.7A CN201710611727A CN107424945A CN 107424945 A CN107424945 A CN 107424945A CN 201710611727 A CN201710611727 A CN 201710611727A CN 107424945 A CN107424945 A CN 107424945A
- Authority
- CN
- China
- Prior art keywords
- pipeline
- cleaning
- chamber
- cleaning pipeline
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of chamber of wet process board, chamber is provided with the first pipeline for providing it the first solution, and chamber includes：Cleaning device, with the first pipeline communication, to allow the first pipeline to provide to cleaning device the second solution for cleaning chamber, cleaning device includes cleaning pipeline, cleaning pipeline is arranged in chamber, multiple spray parts are provided with cleaning pipeline, when cleaning device cleans to chamber, cleaning device can carry out the cleaning without dead angle by multiple spray parts to chamber.By the above-mentioned means, the present invention can carry out the cleaning without dead angle to chamber, the residual particles in harmful effect and reduction processed product of the board to product are effectively reduced, so as to effectively improve the yield of product and etching effect.
Description
Technical field
The present invention relates to wet process technical field, more particularly to a kind of chamber of wet process board.
Background technology
With the increase of wet process board converted products quantity, the chamber inner wall deposit of board storage decoction also increases therewith
Add, when deposit is accumulated to a certain extent, certain influence will be produced towards processed products, so as to influence processed product
Yield.Therefore, it is necessary to which the chamber that decoction is stored to wet process board is periodically cleaned, to remove the deposit in chamber.
At present, because wet process board underlying space is narrow and small, the chamber of wet process board storage decoction sprays without Special cleaning
Shower pipe road, it can only be cleaned manually when board maintains.
Present inventor is in long-term R＆D process, can not be thoroughly clear even if finding by manually cleaning
It is clean, meanwhile, for wet process board when not working, scouring force when regularly washing away is inadequate, can not be effective clear to being carried out in chamber
It is clean, easily cause that deposit on chamber inner wall is more cumulative more, so as to cause the pollution amounts of particles on processed product to increase, reduce
Product yield and etch effect.
The content of the invention
The present invention solves the technical problem of a kind of chamber of wet process board is provided, effectively chamber can be entered
Cleaning of the row without dead angle, the residual particles in harmful effect and reduction processed product of the board to product are effectively reduced, from
And effectively improve the yield and etching effect of product.
In order to solve the above technical problems, one aspect of the present invention is：A kind of chamber of wet process board is provided
Room, the chamber are provided with the first pipeline for providing it the first solution, and the chamber includes：
Cleaning device, and first pipeline communication, to allow first pipeline to be provided to the cleaning device
For cleaning the second solution of the chamber, the cleaning device includes cleaning pipeline, and the cleaning pipeline is arranged on the chamber
Interior, described clean is provided with multiple spray parts on pipeline, described clear when the cleaning device cleans to the chamber
Clean device can carry out the cleaning without dead angle by the multiple spray part to the chamber.
The beneficial effects of the invention are as follows：Prior art is different from, the present invention provides a kind of chamber of wet process board, described
Chamber is provided with the first pipeline for providing it the first solution, and the chamber includes：Cleaning device, connect with first pipeline
It is logical, it is described clear to allow first pipeline to provide to the cleaning device the second solution for cleaning the chamber
Clean device includes cleaning pipeline, and the cleaning pipeline is arranged in the chamber, and multiple sprays are provided with the cleaning pipeline
Part, when the cleaning device cleans to the chamber, the cleaning device can be to institute by the multiple spray part
State chamber and carry out the cleaning without dead angle.By setting cleaning device in chamber, effectively chamber can be carried out without dead angle
Cleaning, the residual particles in harmful effect and reduction processed product of the board to product are effectively reduced, so as to effectively improve
The yield and etching effect of product；In addition, by cleaning device and the first pipeline communication, the first pipeline is providing the to chamber
On the basis of one solution, also the second solution can be provided to cleaning device so that cleaning device can be carried out without dead angle to chamber
While cleaning, the pipeline of the second solution is supplemented without additional, effectively simplifies the internal structure of chamber.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, make required in being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, other can also be obtained according to these accompanying drawings
Accompanying drawing.Wherein：
Fig. 1 is the schematic side view of the embodiment of chamber one of existing wet process board；
Fig. 2 is the schematic side view of the embodiment of chamber one of wet process board of the present invention；
Fig. 3 is the schematic top plan view of the chamber of the wet process board shown in Fig. 2；
Fig. 4 is the structural representation that the embodiment of pipeline one is cleaned in the chamber of the wet process board shown in Fig. 2.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.Based on this
Embodiment in invention, those of ordinary skill in the art are obtained every other under the premise of performing creative labour is not made
Embodiment, belong to the scope of protection of the invention.
Referring to Fig. 1, Fig. 1 is the schematic side view of the embodiment of chamber 100 1 of existing wet process board.Existing wet system
The chamber 100 of journey board is at least provided with providing it the first pipeline 101 of water, provide it second pipe 102, the medicine of decoction
The pipeline 104 of liquid circulation pipe 103 and the 3rd.As shown in Figure 1, the chamber 100 of existing wet process board is without special cleaning pipeline, only
Can be by manually being cleaned to chamber.
Fig. 2 to Fig. 3 is please referred to, Fig. 2 is the side view signal of the embodiment of chamber 200 1 of wet process board of the present invention
Figure；Fig. 3 is the schematic top plan view of the chamber 200 of the wet process board shown in Fig. 2.
In present embodiment, the chamber 200 of the wet process board is used to store decoction, to be heated to decoction.At it
In its embodiment, the chamber 200 of the wet process board can be used for storing other materials, not limit herein.
The chamber 200 of the wet process board of present embodiment includes the first pipeline 10, cleaning device 30, decoction circulation pipe
50th, the pipeline 70 of second pipe 60 and the 3rd.Wherein, the first pipeline 30 to chamber 200 provide the first solution, cleaning device 30 with
First pipeline 10 connects, to allow the first pipeline 10 to provide to cleaning device 30 the second solution for cleaning chamber 200.
It is appreciated that one end of the first pipeline 10 is arranged at outside chamber 200, the other end connects with cleaning pipeline 31, with logical
The one end for being arranged at chamber 200 is crossed to provide the first solution to chamber 200 or/and provide the second solution to cleaning pipeline 31.
In present embodiment, the first pipeline 10 is moisturizing pipeline.
Cleaning device 30 includes cleaning pipeline 31, drive mechanism 33, the first carrying axle 35 and the second carrying axle 36.
Fig. 4 is please referred to, Fig. 4 is to clean the embodiment of pipeline 31 1 in the chamber 200 of the wet process board shown in Fig. 2
Structural representation.Wherein, cleaning pipeline 31 is arranged in chamber 200, cleans and multiple spray parts 311 are provided with pipeline 31,
When cleaning device 30 cleans to chamber 200, cleaning device 30 can be carried out by multiple spray parts 311 to chamber 200
Cleaning without dead angle.
In the present embodiment, spray part 311 be spray head, multiple spray heads helically circulating type on pipeline 31 is cleaned
Distribution.
It is appreciated that helically circulating type is distributed on cleaning pipeline 31 multiple spray heads, effectively chamber 200 can be entered
Cleaning of the row without dead angle.
It is appreciated that in other embodiments, multiple spray parts 311 can be arranged at cleaning pipe by other distribution modes
On road 31, to carry out the cleaning at no dead angle to chamber 200, do not limit herein.
In present embodiment, cleaning pipeline 31 is made up of the material of high temperature resistant, strong alkali-acid resistance, further, cleaning pipe
The material in road 31 is included in polyvinyl chloride, polyethylene, polypropylene and tetrafluoroethene-perfluorinated alkoxy vinyl ether copolymer
At least one；The second solution for cleaning chamber 200 includes deionized water, neutral clean agent solution, tetramethyl hydroxide
At least one of ammonium TMAH solution.
Drive mechanism 33 is arranged on outside chamber 200, is connected with cleaning pipeline 31, for driving cleaning pipeline 31 to be managed around cleaning
The axis rotation in road 31, and then cleaning device 30 is carried out the clear of no dead angle to chamber 200 by multiple spray parts 311
It is clean.
Drive mechanism 33 includes rotation motor, gear and the transmission component being sequentially connected, wherein, transmission component and cleaning
Pipeline 31 connects.
In the present embodiment, cleaning device 30 also includes connector 37, one end and the cleaning pipeline 31 of the connector 37
It is fixedly connected, the other end is fixedly connected with transmission component, in this way, the driving force that rotation motor provides, passes sequentially through gear, transmission
Component band follower link 37 rotates, and then drives axis rotation of the cleaning pipeline 31 around cleaning pipeline 31.
In other embodiments, drive mechanism 33 can be combined by other components.
In present embodiment, one end that cleaning pipeline 31 is connected with connector 37 is open state, and the other end is closed
State, to clean the liquid in pipeline 31 there is sufficiently large pressure to be sprayed.
It is appreciated that by drive mechanism 33 to the driving effect of cleaning pipeline 31 so that cleaning pipeline 31 is around its axis
Rotation, it can further strengthen the cleaning action of cleaning device 30, so as to carry out the cleaning at no dead angle to chamber 200.
Cleaning pipeline 31 includes the first cleaning pipeline 312, and the first carrying axle 35 is used to carry the first cleaning pipeline 312, its
In, the first carrying axle 35 is hollow structure, and the first cleaning pipeline 312 is connected by the first carrying axle 35 with the first pipeline 10.
It is appreciated that two the first cleaning pipelines 312 be arrangeding in parallel are carried in the first carrying axle 35.
In present embodiment, cleaning pipeline 31 includes two the first cleaning pipelines 312 be arrangeding in parallel, and cleaning device 30 wraps
Two the first carrying axles 35 be arrangeding in parallel are included, the both ends of every one first carrying axle 35 are arranged at inwall corresponding to chamber 200, often
The both ends of one first cleaning pipeline 312 connect with one of them first carrying axle 35 respectively.
It is appreciated that second liquid passes sequentially through the first pipeline 10, the first carrying axle 35 flows into the first cleaning pipeline 312
In, then the cleaning at no dead angle is carried out by spray part 311 to chamber 200, in this way, the first pipeline 10 can both provide into chamber 200
First liquid, second liquid can be provided to cleaning device 30 again, the work of the liquid make-up of the first pipeline 10 can be made full use of
With in this way, while setting up cleaning device 30 in chamber 200, moreover it is possible to effectively simplify the structure inside chamber 200.
Cleaning pipeline 31 also includes the second cleaning pipeline 313, and the second carrying axle 36 is used to carry the second cleaning pipeline 313,
Wherein, the second carrying axle 36 is hollow structure, and the second cleaning pipeline 313 is connected by the second carrying axle 36 with decoction circulating line 50
It is logical.
In present embodiment, pump 51 is provided with decoction circulation pipe 50 so that decoction enters from relatively low entrance, most
Flow into the second cleaning pipeline 313, and sprayed out by multiple spray parts 311 eventually, in this way, the decoction of the bottom of chamber 200 leads to
Cross spray part 311 to spray out so that decoction is sufficiently stirred, so as to be heated evenly.
It is appreciated that two the second cleaning pipelines 313 be arrangeding in parallel are carried in the second carrying axle 36.
In present embodiment, cleaning pipeline 31 includes two the second cleaning pipelines 313 be arrangeding in parallel, and cleaning device 30 wraps
Two the second carrying axles 36 be arrangeding in parallel are included, the both ends of every one second carrying axle 36 are arranged at inwall corresponding to chamber 200, often
The both ends of one second cleaning pipeline 313 connect with one of them second carrying axle 36 respectively.
In present embodiment, the first cleaning pipeline 312 is arranged at the upper end of chamber 200, and the second cleaning pipeline 313 is arranged at
The lower end of chamber 200, the first cleaning pipeline 312 and second cleans pipeline 313 and corresponds setting, to cause the first cleaning pipeline
312 and second cleaning pipeline 313 positions such as the upper end, lower end and side wall of chamber 200 more can thoroughly be cleaned.
It is appreciated that in other embodiments, the first carrying axle 35, the second carrying axle 35, the quantity for cleaning pipeline 31
And set location can carry out adaptation according to demand, here, not limiting.
In present embodiment, the first cleaning pipeline 312 connects with the second cleaning pipeline 313, is provided with the first pipeline 10
First valve 11, the second valve 52 is provided with decoction circulating line 50, between the first valve 11 can replace with the second valve 52
Separate pass.
Specifically, cleaning device 30 also includes connecting pipe 38, the both ends of connecting pipe 38 respectively with the first carrying axle 35
Connected with the second carrying axle 36 so that first cleaning pipeline 312 with second clean pipeline 313 by the first carrying axle 35, be connected
The carrying axle 36 of pipeline 38 and second connects；Connecting pipe 38 also connects with decoction circulating line 50, to cause decoction circulation pipe
Decoction in road 50 can flow into the first carrying axle 35 and the second carrying axle 36, so flow into the first cleaning pipeline 312 with
And the second cleaning pipeline 313, and sprayed out by spray part 311, i.e., the decoction of the bottom of chamber 200 is sprayed by spraying part 311
Out so that decoction is sufficiently stirred, so as to be heated evenly.
When needing to clean chamber 200, the first valve 11 is opened, the second valve 52 is closed, by the second solution stream
Enter into the first pipeline 10 so that the second solution flows into the first cleaning pipeline 312 by the first carrying axle 35 respectively, passes through company
Adapter road 38, the second carrying axle 36 flow into the second cleaning pipeline 313, then carry out no dead angle to chamber 200 by spraying part 311
Cleaning；When needing to be stirred the decoction in chamber 200, the first valve 11 is closed, opens the second valve 52 so that medicine
Liquid flows into connecting pipe 38 by decoction circulation pipe, then respectively by the first carrying axle 35 flow into the first cleaning pipeline 312,
Second cleaning pipeline 313 is flowed into by the second carrying axle 36, and sprayed out by spray part 311, so as to be filled to decoction
The stirring divided, is heated evenly decoction.
It is appreciated that when being cleaned to chamber 200, the inflow and the sprinkling of spray part 311 of the second solution can be carried out simultaneously,
The sprinkling for spraying part 311 is successional；First the second solution can also be filled into cleaning pipeline 31, pipeline 31 to be cleaned
Second spray solution is come out by spray part 311 again when being filled full, that is, the sprinkling for spraying part 311 is discontinuity.
In the present embodiment, connecting pipe 38 is the extensional pipeline of the first pipeline 10, i.e. the first pipeline 10 and connecting tube
Road 38 is same pipeline, and the first pipeline 10 and the junction of the first carrying axle 35 are provided with through hole, so that the first pipeline 10
Connected simultaneously with the first carrying axle 35 and the second carrying axle 36.
In other embodiments, do not connected between the first pipeline 10 and connecting pipe 38, then the first pipeline 10 and first
Carrying axle 35 connects, and the both ends of connecting pipe 38 connect with the first carrying axle 35, the second carrying axle 36 respectively.
It is appreciated that in one embodiment, do not connected between the first cleaning pipeline 312 and the second cleaning pipeline 313, then
Second carrying axle 36 and other pipeline communications, so that the second solution flows into the second cleaning pipeline 313 by other pipelines
In, so as to carry out the cleaning at no dead angle to chamber 200.
It is appreciated that in one embodiment, cleaning pipeline 30 only includes the first cleaning pipeline 312 or second and cleans pipeline
313, cleaning device 30 only includes corresponding first carrying axle 35 or the second carrying axle 36, now, the first cleaning pipeline 312 or the
Two cleaning pipelines 313 are connected with the first pipeline 10, decoction circulating line 50 simultaneously, i.e., the first cleaning pipeline 312 is held by first
Carry axle 35 to connect with the first pipeline 10, decoction circulating line 50, or second cleans pipeline 313 and pass through the second carrying axle 36 and the
One pipeline 10, decoction circulating line 50 connect, in this way, the decoction of the second solution and inflow decoction circulation pipe 50 is clear by first
Clean pipeline 312 or second cleans pipeline 313 and sprayed.
Wherein, second pipe 60 is used to provide decoction to chamber 200, and the 3rd pipeline 70 is used for the liquid in chamber 200
Discharge outside chamber 200.
It is appreciated that in other embodiments, chamber 200 can also include other pipelines, be fitted according to demand
The addition answered.
Prior art is different from, present embodiment provides a kind of chamber 200 of wet process board, and chamber 200 sets oriented
It provides the first pipeline 10 of the first solution, and chamber 200 includes：Cleaning device 30, connected with the first pipeline 10, to cause first
Pipeline 10 can provide the second solution for cleaning chamber 200 to cleaning device 30, and cleaning device 30 includes cleaning pipeline 31,
Cleaning pipeline 31 is arranged in chamber 200, cleans and multiple spray parts 311 are provided with pipeline 31, when cleaning device 30 is to chamber
200 when being cleaned, and cleaning device 30 can carry out the cleaning at no dead angle by multiple spray parts 311 to chamber 200.By
Cleaning device 30 is set in chamber 200, the cleaning at no dead angle can be effectively carried out to chamber 200, effectively reduces board to production
Residual particles in the harmful effect of product and reduction processed product, so as to effectively improve the yield of product and etching effect
Fruit；In addition, being connected by cleaning device 30 with the first pipeline 10, the first pipeline 10 is providing the base of the first solution to chamber 200
On plinth, also the second solution can be provided to cleaning device 30 so that cleaning device 30 can carry out the cleaning at no dead angle to chamber 200
While, without the pipeline of additional the second solution of supplement, the internal structure of effectively simplified chamber 200.
Embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this
The equivalent structure or equivalent flow conversion that description of the invention and accompanying drawing content are made, or directly or indirectly it is used in other correlations
Technical field, it is included within the scope of the present invention.
Claims (10)
1. a kind of chamber of wet process board, the chamber are provided with the first pipeline for providing it the first solution, its feature exists
In the chamber includes：
Cleaning device, with first pipeline communication, it is used for alloing first pipeline to be provided to the cleaning device
The second solution of the chamber is cleaned, the cleaning device includes cleaning pipeline, and the cleaning pipeline is arranged in the chamber,
Multiple spray parts are provided with the cleaning pipeline, when the cleaning device cleans to the chamber, the sanitizer cartridge
The cleaning without dead angle can be carried out by the multiple spray part to the chamber by putting.
2. chamber according to claim 1, it is characterised in that the spray part is spray head, and the multiple spray head exists
Helically circulating type is distributed on the cleaning pipeline.
3. chamber according to claim 1, it is characterised in that the cleaning device also includes：
Drive mechanism, the drive mechanism are arranged on outside the chamber, are connected with the cleaning pipeline, for driving the cleaning
Pipeline rotates around the axis of the cleaning pipeline, and then allows the cleaning device by the multiple spray part to the chamber
Room carries out the cleaning without dead angle.
4. chamber according to claim 3, it is characterised in that the drive mechanism include be sequentially connected rotation motor,
Gear and transmission component, wherein, the transmission component is connected with the cleaning pipeline.
5. chamber according to claim 1, it is characterised in that first pipeline is moisturizing pipeline, the cleaning pipeline
Including the first cleaning pipeline, the cleaning device also includes：
First carrying axle, for carrying the first cleaning pipeline, wherein, first carrying axle is hollow structure, described the
One cleaning pipeline is connected by first carrying axle with the moisturizing pipeline.
6. chamber according to claim 5, it is characterised in that two institutes be arrangeding in parallel are carried in first carrying axle
State the first cleaning pipeline.
7. chamber according to claim 5, it is characterised in that first pipeline also includes decoction circulating line, described
Cleaning pipeline also includes the second cleaning pipeline, and the cleaning device also includes：
Second carrying axle, for carrying the second cleaning pipeline, wherein, second carrying axle is hollow structure, described the
Two cleaning pipelines are connected by second carrying axle with the decoction circulating line.
8. chamber according to claim 7, it is characterised in that two institutes be arrangeding in parallel are carried in second carrying axle
State the second cleaning pipeline.
9. chamber according to claim 7, it is characterised in that the first cleaning pipeline connects with the described second cleaning pipeline
It is logical, the first valve is provided with the moisturizing pipeline, the second valve, first valve are provided with the decoction circulating line
It can be switched with second valve with alternate intervals.
10. chamber according to claim 1, it is characterised in that the cleaning pipeline is high temperature resistant, the material of strong alkali-acid resistance
Material is made；Second solution for being used to clean the chamber includes deionized water, neutral clean agent solution, tetramethyl hydroxide
At least one of ammonium TMAH solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710611727.7A CN107424945B (en) | 2017-07-25 | 2017-07-25 | Chamber of wet processing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710611727.7A CN107424945B (en) | 2017-07-25 | 2017-07-25 | Chamber of wet processing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107424945A true CN107424945A (en) | 2017-12-01 |
| CN107424945B CN107424945B (en) | 2020-07-03 |
Family
ID=60430302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710611727.7A Active CN107424945B (en) | 2017-07-25 | 2017-07-25 | Chamber of wet processing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107424945B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113725130A (en) * | 2021-11-01 | 2021-11-30 | 天霖(张家港)电子科技有限公司 | Etching device of semiconductor structure |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009202088A (en) * | 2008-02-27 | 2009-09-10 | Dainippon Screen Mfg Co Ltd | Substrate treating device |
| CN106647164A (en) * | 2015-11-04 | 2017-05-10 | 常州瑞择微电子科技有限公司 | Method for avoiding crystallization of etching solution conveying pipelines |
| CN106971933A (en) * | 2017-03-31 | 2017-07-21 | 深圳市华星光电技术有限公司 | Etching chamber and its cleaning assembly with automatic cleaning function, cleaning method |
-
2017
- 2017-07-25 CN CN201710611727.7A patent/CN107424945B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009202088A (en) * | 2008-02-27 | 2009-09-10 | Dainippon Screen Mfg Co Ltd | Substrate treating device |
| CN106647164A (en) * | 2015-11-04 | 2017-05-10 | 常州瑞择微电子科技有限公司 | Method for avoiding crystallization of etching solution conveying pipelines |
| CN106971933A (en) * | 2017-03-31 | 2017-07-21 | 深圳市华星光电技术有限公司 | Etching chamber and its cleaning assembly with automatic cleaning function, cleaning method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113725130A (en) * | 2021-11-01 | 2021-11-30 | 天霖(张家港)电子科技有限公司 | Etching device of semiconductor structure |
| CN113725130B (en) * | 2021-11-01 | 2021-12-28 | 天霖(张家港)电子科技有限公司 | Etching device of semiconductor structure |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107424945B (en) | 2020-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206139601U (en) | High -efficient cleaning system of oil tank | |
| CN205797940U (en) | Inner tank wall cleans device | |
| CN206296260U (en) | A kind of Chinese medicine Water-saving washing device | |
| CN107413782A (en) | A kind of new tube wall cleaning device | |
| CN104841652A (en) | Novel naked enameled wire cleaning device | |
| CN108836201A (en) | Multifunctional drawing floor-washing robot | |
| CN107424945A (en) | A kind of chamber of wet process board | |
| KR101593205B1 (en) | A grass window cleaning apparatus | |
| CN204974546U (en) | Multi -functional wiper mechanism and modularization combination formula cleaning station | |
| CN207640339U (en) | A kind of division box of Intelligent cleaning robot | |
| CN207222426U (en) | A kind of cleaning device | |
| CN206744874U (en) | It is a kind of to wash away synchronous handheld cup-like containers cleaning device | |
| CN207188382U (en) | A kind of new tube wall cleaning device | |
| CN205599572U (en) | Washing bottle | |
| CN209574544U (en) | A kind of household small-size dust catcher | |
| CN210304930U (en) | Multifunctional ultrasonic cleaner | |
| CN107284421A (en) | A kind of new-energy automobile cleaning equipment | |
| CN203936068U (en) | Automatic spray cleaning device | |
| CN209156661U (en) | Portable nursing bottle cleaning machine | |
| CN206425317U (en) | A kind of sweeping robot foul water tank cleaning device | |
| CN209219194U (en) | A kind of equipment of batch cleaning fruit | |
| CN215164463U (en) | Road marking cleaning machine | |
| CN204738028U (en) | Seamless steel pipe's batch cleaning equipment | |
| CN204656999U (en) | A kind of household cleaner | |
| CN204989585U (en) | Can abluently ward off glass sight glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee after: TCL Huaxing Photoelectric Technology Co.,Ltd. Address before: No.9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |