CN107422754A - 一种微量气体流速控制装置及控制方法 - Google Patents
一种微量气体流速控制装置及控制方法 Download PDFInfo
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- CN107422754A CN107422754A CN201710777940.5A CN201710777940A CN107422754A CN 107422754 A CN107422754 A CN 107422754A CN 201710777940 A CN201710777940 A CN 201710777940A CN 107422754 A CN107422754 A CN 107422754A
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- gas
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- 238000000034 method Methods 0.000 title claims abstract description 28
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 178
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 27
- 239000001301 oxygen Substances 0.000 abstract description 27
- 229910052760 oxygen Inorganic materials 0.000 abstract description 27
- 102000001554 Hemoglobins Human genes 0.000 abstract description 9
- 108010054147 Hemoglobins Proteins 0.000 abstract description 9
- 238000011160 research Methods 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 238000012986 modification Methods 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012360 testing method Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 238000010494 dissociation reaction Methods 0.000 description 3
- 230000005593 dissociations Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 210000004369 blood Anatomy 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- QRSFFHRCBYCWBS-UHFFFAOYSA-N [O].[O] Chemical compound [O].[O] QRSFFHRCBYCWBS-UHFFFAOYSA-N 0.000 description 1
- 239000012637 allosteric effector Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 238000013139 quantization Methods 0.000 description 1
- 208000023504 respiratory system disease Diseases 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/20—Control of fluid pressure characterised by the use of electric means
- G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
- G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
- G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Physical Vapour Deposition (AREA)
- Investigating Or Analysing Biological Materials (AREA)
Abstract
Description
流量(Vn/t)(mL/s) | P(mmHg) |
0.05 | 3 |
0.10 | 11 |
0.15 | 25 |
0.20 | 45 |
0.25 | 70 |
0.30 | 101 |
0.35 | 137 |
0.40 | 179 |
0.45 | 227 |
0.50 | 280 |
Claims (11)
Priority Applications (1)
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CN201710777940.5A CN107422754B (zh) | 2017-09-01 | 2017-09-01 | 一种微量气体流速控制装置及控制方法 |
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CN201710777940.5A CN107422754B (zh) | 2017-09-01 | 2017-09-01 | 一种微量气体流速控制装置及控制方法 |
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CN107422754A true CN107422754A (zh) | 2017-12-01 |
CN107422754B CN107422754B (zh) | 2023-11-14 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109343592A (zh) * | 2018-10-29 | 2019-02-15 | 苏州锐讯生物科技有限公司 | 高精度多通道自动气压流体控制系统及其控制方法 |
CN111624731A (zh) * | 2019-02-28 | 2020-09-04 | 上海微电子装备(集团)股份有限公司 | 一种物镜装置 |
Citations (25)
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EP0446920A2 (en) * | 1990-03-14 | 1991-09-18 | Sumitomo Electric Industries, Ltd. | Fluid flow control device |
US5190068A (en) * | 1992-07-02 | 1993-03-02 | Brian Philbin | Control apparatus and method for controlling fluid flows and pressures |
JPH08263144A (ja) * | 1995-03-22 | 1996-10-11 | Ishikawajima Harima Heavy Ind Co Ltd | 流量制御装置 |
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US20020040733A1 (en) * | 1998-10-08 | 2002-04-11 | Balazy Richard D. | Fluid flow controlling |
US20020117214A1 (en) * | 2001-02-28 | 2002-08-29 | Tucker Jeffrey C. | Fluid flow control system, fluid delivery and control system for a fluid delivery line, and method for controlling pressure oscillations within fluid of a fluid delivery line |
US6539813B1 (en) * | 1999-11-15 | 2003-04-01 | Smc Kabushiki Kaisha | Throttle structure and flow meter incorporated with throttle structure |
CN1524205A (zh) * | 2001-04-27 | 2004-08-25 | ��ϣ�����ƹ��ʹ�˾ | 具有输入/输出能力的智能调节器 |
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CN101479682A (zh) * | 2006-04-20 | 2009-07-08 | 先进能源工业公司 | 流体的特定量的流量控制器输送 |
CN101583916A (zh) * | 2006-10-03 | 2009-11-18 | 株式会社堀场Stec | 质量流量控制器 |
JP2010108338A (ja) * | 2008-10-31 | 2010-05-13 | Yamatake Corp | アクチュエータおよび流量測定装置 |
JP2010134812A (ja) * | 2008-12-08 | 2010-06-17 | Ckd Corp | 圧力制御装置および流量制御装置 |
CN101855039A (zh) * | 2007-09-03 | 2010-10-06 | 威尔特克公司 | 用于焊接设备的保护气体流量控制器 |
CN102169352A (zh) * | 2009-12-25 | 2011-08-31 | 喜开理株式会社 | 电动真空阀的排气速度控制方法、排气速度控制系统及阀开度设定点决定方法 |
CN103529869A (zh) * | 2012-07-03 | 2014-01-22 | 株式会社堀场Stec | 压力控制装置、流量控制装置、压力控制方法及流量控制方法 |
CN204028709U (zh) * | 2014-08-29 | 2014-12-17 | 湖南三德科技股份有限公司 | 一种压力式电子流量控制器 |
CN204989996U (zh) * | 2015-06-23 | 2016-01-20 | 长沙开元仪器股份有限公司 | 一种气体流量调节装置 |
CN105659178A (zh) * | 2013-10-28 | 2016-06-08 | 株式会社富士金 | 流量计及具备该流量计的流量控制装置 |
JP2016201530A (ja) * | 2015-04-08 | 2016-12-01 | 東京エレクトロン株式会社 | ガス供給制御方法 |
CN106594971A (zh) * | 2016-11-10 | 2017-04-26 | 西安建筑科技大学 | 洞窟中机械通风系统的最小风量控制方法 |
CN106774468A (zh) * | 2016-12-27 | 2017-05-31 | 中国航天空气动力技术研究院 | 气体流量控制方法 |
CN107003684A (zh) * | 2015-02-26 | 2017-08-01 | 株式会社富士金 | 压力控制装置 |
CN207264214U (zh) * | 2017-09-01 | 2018-04-20 | 中国人民解放军军事医学科学院野战输血研究所 | 一种微量气体流速控制装置 |
-
2017
- 2017-09-01 CN CN201710777940.5A patent/CN107422754B/zh active Active
Patent Citations (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0446920A2 (en) * | 1990-03-14 | 1991-09-18 | Sumitomo Electric Industries, Ltd. | Fluid flow control device |
US5190068A (en) * | 1992-07-02 | 1993-03-02 | Brian Philbin | Control apparatus and method for controlling fluid flows and pressures |
JPH08263144A (ja) * | 1995-03-22 | 1996-10-11 | Ishikawajima Harima Heavy Ind Co Ltd | 流量制御装置 |
CN1272186A (zh) * | 1998-05-29 | 2000-11-01 | 株式会社富士金 | 具备压力式流量控制装置的气体供给设备 |
US20020040733A1 (en) * | 1998-10-08 | 2002-04-11 | Balazy Richard D. | Fluid flow controlling |
US6539813B1 (en) * | 1999-11-15 | 2003-04-01 | Smc Kabushiki Kaisha | Throttle structure and flow meter incorporated with throttle structure |
US20020117214A1 (en) * | 2001-02-28 | 2002-08-29 | Tucker Jeffrey C. | Fluid flow control system, fluid delivery and control system for a fluid delivery line, and method for controlling pressure oscillations within fluid of a fluid delivery line |
CN1524205A (zh) * | 2001-04-27 | 2004-08-25 | ��ϣ�����ƹ��ʹ�˾ | 具有输入/输出能力的智能调节器 |
CN1777790A (zh) * | 2003-03-12 | 2006-05-24 | 罗斯蒙德公司 | 具有多传感器的流量仪器 |
JP2006078466A (ja) * | 2004-08-11 | 2006-03-23 | Surpass Kogyo Kk | 流量計及びこれを用いた流量制御システム |
CN101479682A (zh) * | 2006-04-20 | 2009-07-08 | 先进能源工业公司 | 流体的特定量的流量控制器输送 |
CN101583916A (zh) * | 2006-10-03 | 2009-11-18 | 株式会社堀场Stec | 质量流量控制器 |
CN101855039A (zh) * | 2007-09-03 | 2010-10-06 | 威尔特克公司 | 用于焊接设备的保护气体流量控制器 |
JP2010108338A (ja) * | 2008-10-31 | 2010-05-13 | Yamatake Corp | アクチュエータおよび流量測定装置 |
JP2010134812A (ja) * | 2008-12-08 | 2010-06-17 | Ckd Corp | 圧力制御装置および流量制御装置 |
CN102169352A (zh) * | 2009-12-25 | 2011-08-31 | 喜开理株式会社 | 电动真空阀的排气速度控制方法、排气速度控制系统及阀开度设定点决定方法 |
CN103529869A (zh) * | 2012-07-03 | 2014-01-22 | 株式会社堀场Stec | 压力控制装置、流量控制装置、压力控制方法及流量控制方法 |
CN105659178A (zh) * | 2013-10-28 | 2016-06-08 | 株式会社富士金 | 流量计及具备该流量计的流量控制装置 |
CN204028709U (zh) * | 2014-08-29 | 2014-12-17 | 湖南三德科技股份有限公司 | 一种压力式电子流量控制器 |
CN107003684A (zh) * | 2015-02-26 | 2017-08-01 | 株式会社富士金 | 压力控制装置 |
JP2016201530A (ja) * | 2015-04-08 | 2016-12-01 | 東京エレクトロン株式会社 | ガス供給制御方法 |
CN204989996U (zh) * | 2015-06-23 | 2016-01-20 | 长沙开元仪器股份有限公司 | 一种气体流量调节装置 |
CN106594971A (zh) * | 2016-11-10 | 2017-04-26 | 西安建筑科技大学 | 洞窟中机械通风系统的最小风量控制方法 |
CN106774468A (zh) * | 2016-12-27 | 2017-05-31 | 中国航天空气动力技术研究院 | 气体流量控制方法 |
CN207264214U (zh) * | 2017-09-01 | 2018-04-20 | 中国人民解放军军事医学科学院野战输血研究所 | 一种微量气体流速控制装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109343592A (zh) * | 2018-10-29 | 2019-02-15 | 苏州锐讯生物科技有限公司 | 高精度多通道自动气压流体控制系统及其控制方法 |
CN111624731A (zh) * | 2019-02-28 | 2020-09-04 | 上海微电子装备(集团)股份有限公司 | 一种物镜装置 |
CN111624731B (zh) * | 2019-02-28 | 2021-12-10 | 上海微电子装备(集团)股份有限公司 | 一种物镜装置 |
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Inventor after: Zhao Lian Inventor after: Wang Ying Inventor after: Zhou Hong Inventor after: Zhou Rong Inventor after: You Guoxing Inventor after: Zhang Li Inventor before: Zhao Lian Inventor before: Zhou Hong Inventor before: Wang Ying Inventor before: Zhou Rong Inventor before: You Guoxing Inventor before: Zhang Li |
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Effective date of registration: 20210630 Address after: 100850 No. 27 Taiping Road, Beijing, Haidian District Applicant after: ACADEMY OF MILITARY MEDICAL SCIENCES Address before: 100850 No. 27 Taiping Road, Beijing, Haidian District Applicant before: INSTITUE OF TRANSFUSION MEDICINE, ACADEMY OF MILITARY MEDICAL SCIENCES, PEOPLE'S LIBRATION ARMY OF CHINA |
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