CN107413163A - Exhaust gas cleaner in ultra-thin polysilicon chip slicer - Google Patents
Exhaust gas cleaner in ultra-thin polysilicon chip slicer Download PDFInfo
- Publication number
- CN107413163A CN107413163A CN201710779728.2A CN201710779728A CN107413163A CN 107413163 A CN107413163 A CN 107413163A CN 201710779728 A CN201710779728 A CN 201710779728A CN 107413163 A CN107413163 A CN 107413163A
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- Prior art keywords
- wheel shaft
- rotating shaft
- mounting ring
- bearing block
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 28
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 28
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 16
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 14
- 230000007246 mechanism Effects 0.000 claims abstract description 9
- 238000007789 sealing Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims 1
- 238000010276 construction Methods 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 description 8
- 238000000746 purification Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000003610 charcoal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000796 flavoring agent Substances 0.000 description 3
- 235000019634 flavors Nutrition 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000013475 authorization Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000877 morphologic effect Effects 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/45—Gas separation or purification devices adapted for specific applications
- B01D2259/455—Gas separation or purification devices adapted for specific applications for transportable use
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention provides the exhaust gas cleaner in a kind of ultra-thin polysilicon chip slicer, belong to polysilicon chip manufacture field.Exhaust gas cleaner in this ultra-thin polysilicon chip slicer, including housing, housing includes roof, bottom wall and side wall, the air inlet communicated with cavity is offered in housing top wall, the upper surface of housing is vertically fixed mounting ring one and mounting ring two, negative-pressure air fan is fixed with the inwall of mounting ring one, air inlet pipe is connected with mounting ring one；It is circumferential in housing sidewall equidistantly to offer gas outlet, gas outlet is equipped with active carbon layer at side wall inwall, jack is offered on roof vertically, described jack is corresponding with gas outlet to be communicated, gas outlet is equipped with outlet baffle plate at side wall outer wall, the venthole offered on outlet baffle plate, travel mechanism is additionally provided with bottom plate.The advantages of present invention is simple in construction, and using flexible is strong.
Description
Technical field
The invention belongs to polysilicon chip manufacture field, is related to a kind of exhaust gas cleaner, particularly a kind of ultra-thin polysilicon
Exhaust gas cleaner in piece slicer.
Background technology
Polysilicon chip, it is a kind of form of elemental silicon, for the elemental silicon of melting when being solidified under the conditions of supercooling, silicon atom is with gold
Hard rock lattice morphologic arrangement grows up to the different crystal grain of high preferred orientation into many nucleus, such as these nucleus, then these crystal grain combine
Come, just crystallize into polysilicon.Due to poor in the workshop ventilation processed to ultra-thin polysilicon chip, hence for the operation in workshop
The health of member produces certain influence.
Due to the problem of above-mentioned be present, a kind of machine room's purification of air dress is disclosed through retrieval, such as Chinese patent literature
Put【The patent No.：ZL201520182532.1；Authorization Notice No.：CN204485580U】.This machine room's air cleaning unit,
Machine room is arranged at including air cleaning system, several air supply ducts and several return air ducts, air cleaning system
Outside, the air outlet of several intake stacks are arranged at the top of machine room, and the return air inlet of several return air ducts is arranged at
The bottom of machine room；Air cleaning system includes wind pushing air clarifier and return air clarifier, wind pushing air clarifier
Inside include the first prefiltration layer, the first electric purification filter layer, the cleaned filtering layer of film, humidifying part, return air clarifier successively
Inside include the second prefiltration layer, the second electric purification filter layer successively；The export department of air supply duct and wind pushing air clarifier connects
Connect, return air duct is connected with the import department of return air clarifier.
But this machine room's air cleaning unit is complicated, considerably increases cost, and for the car of large space
Between for clean-up effect it is poor, region specific aim is poor.
The content of the invention
The purpose of the present invention is above mentioned problem be present for existing technology, it is proposed that a kind of ultra-thin polysilicon chip slicer
In exhaust gas cleaner, the exhaust gas cleaner in this ultra-thin polysilicon chip slicer is simple in construction, and using flexible is strong
Feature.
The purpose of the present invention can be realized by following technical proposal：
A kind of exhaust gas cleaner in ultra-thin polysilicon chip slicer, including in cylindrical housings, it is characterised in that institute
The housing stated includes roof, bottom wall and side wall, and described housing has cavity, and entering of being communicated with cavity is offered in housing top wall
Gas port, the upper surface of described housing are vertically fixed mounting ring one and mounting ring two, and mounting ring one is fixed on the interior of gas outlet
On wall, negative-pressure air fan is fixed with the inwall of described mounting ring one, air inlet pipe is connected with described mounting ring one；Described
Circumferential in housing sidewall equidistantly to offer some gas outlets, gas outlet is equipped with active carbon layer at side wall inwall, described
Roof on offer some jacks vertically, described jack is corresponding with gas outlet to be communicated, and the width of jack with activity
The width of layer of charcoal is equal, and described gas outlet is equipped with outlet baffle plate at side wall outer wall, and what is offered on outlet baffle plate goes out
Stomata, travel mechanism is additionally provided with described bottom plate.
The regulation of position can be more flexibly carried out to whole exhaust gas cleaner by travel mechanism, so as to more
Good remove exhaust gas cleaner is moved near the slicer in work, make the enterprising tracheae other end of mounting ring one preferably with
Slicer is connected；Start negative-pressure air fan, so as to which harmful gas with foreign flavor in slicer working environment is pumped into shell
In body cavity, distributed after active carbon layer purifies, then by the venthole of outlet baffle plate, meanwhile, active carbon layer passes through
Jack is plugged to gas outlet, consequently facilitating being replaced cleaning to active carbon layer.
In exhaust gas cleaner in above-mentioned ultra-thin polysilicon chip slicer, described travel mechanism, which includes rotating, to be set
Rotating shaft one, rotating shaft two, rotating shaft three and rotating shaft four on bottom plate, wheel shaft one and wheel shaft two are fixed with described rotating shaft one, take turns
Axle one and the serrated vertical of wheel shaft two, wheel shaft three and wheel shaft four, wheel shaft three and the serrated vertical of wheel shaft four, rotating shaft are fixed with rotating shaft two
Wheel shaft five and wheel shaft six, wheel shaft five and the serrated vertical of wheel shaft six are fixed with three, wheel shaft seven and wheel shaft eight are fixed with rotating shaft four,
Wheel shaft seven and the serrated vertical of wheel shaft eight, described wheel shaft one, wheel shaft two, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven
Rotated provided with wheel with the both ends of wheel shaft eight.Wheel shaft one and the serrated vertical of wheel shaft two in rotating shaft one, the wheel shaft in rotating shaft two
Three and the serrated vertical of wheel shaft four, wheel shaft five and the serrated vertical of wheel shaft six in rotating shaft three, wheel shaft seven and wheel shaft eight in rotating shaft four
Serrated vertical, and rotating shaft one, rotating shaft two, rotating shaft three and the and can of rotating shaft four enough rotate, and make wheel shaft one, wheel so as to more flexible
Wheel on axle two, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven and wheel shaft eight rotates, and realizes exhaust gas cleaner
Opposing bottom surface moves horizontally.
In exhaust gas cleaner in above-mentioned ultra-thin polysilicon chip slicer, described wheel shaft one, wheel shaft two, wheel shaft
3rd, the both ends of wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven and wheel shaft eight are respectively and fixedly provided with bearing, described wheel and bearing inner race
Between be respectively and fixedly provided with check ring.Check ring primarily serve the relatively corresponding wheel shaft one of limitation wheel, wheel shaft two, wheel shaft three,
Wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven and wheel shaft eight move axially.
In exhaust gas cleaner in above-mentioned ultra-thin polysilicon chip slicer, the lower surface of described bottom plate is fixed with axle
Bearing one, bearing block two, bearing block three, bearing block four, bearing block five, bearing block six, bearing block seven and bearing block eight, rotating shaft one
It is rotatably arranged between bearing block one and bearing block two, rotating shaft two is rotatably arranged between bearing block three and bearing block four, rotating shaft
Three are rotatably arranged between bearing block five and bearing block six, and rotating shaft four is rotatably arranged between bearing block seven and bearing block eight, institute
Angle between adjacent shafts one, rotating shaft two, rotating shaft three and the rotating shaft four stated is equal 90 degree.
In exhaust gas cleaner in above-mentioned ultra-thin polysilicon chip slicer, described outlet baffle plate with corresponding outlet
Mouth matches, and is arranged with sealing rubber cover on outlet baffle plate outer wall.Can be significantly more efficient by outlet by sealing rubber cover
Baffle wedge is set on corresponding gas outlet.
In exhaust gas cleaner in above-mentioned ultra-thin polysilicon chip slicer, described mounting ring one is towards mounting ring two
A side wall on offer external screw thread, offer the internal thread to match with external screw thread on described inside pipe wall of entering.Air inlet pipe
By the way of threaded connection, consequently facilitating dismounting is moved.
In exhaust gas cleaner in above-mentioned ultra-thin polysilicon chip slicer, described mounting ring one is located at mounting ring two
Interior, the external diameter of mounting ring two is equal to the external diameter of housing.
Compared with prior art, the exhaust gas cleaner in this ultra-thin polysilicon chip slicer has advantages below：
1st, the present invention passes through wheel shaft one, wheel shaft two, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven and wheel shaft eight
On wheel rotate, more flexibly exhaust gas cleaner can be removed and be moved near the slicer in work, make mounting ring
The one enterprising tracheae other end is preferably connected with slicer.
2nd, the present invention starts negative-pressure air fan, so as to which harmful gas with foreign flavor in slicer working environment is pumped into
In housing hollow, distributed after active carbon layer purifies, then by the venthole of outlet baffle plate, meanwhile, active carbon layer is logical
Cross jack to plug to gas outlet, consequently facilitating being replaced active carbon layer cleaning.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram one of the present invention；
Fig. 2 is the dimensional structure diagram two of the present invention；
Fig. 3 is the structural representation of the travel mechanism of the present invention.
In figure, 1, roof；2nd, bottom wall；3rd, side wall；4th, mounting ring one；5th, mounting ring two；6th, negative-pressure air fan；7th, gas outlet；
8th, active carbon layer；9th, rotating shaft one；10th, rotating shaft two；11st, rotating shaft three；12nd, rotating shaft four；13rd, wheel shaft one；14th, wheel shaft two；15th, take turns
Son；16th, bearing；17th, check ring；18th, bearing block one；19th, bearing block two；20th, outlet baffle plate.
Embodiment
It is the specific embodiment of the present invention and with reference to accompanying drawing below, technical scheme is further described,
But the present invention is not limited to these embodiments.
As depicted in figs. 1 and 2, the exhaust gas cleaner in a kind of ultra-thin polysilicon chip slicer, including in circular cylindrical shell
Body, housing include roof 1, bottom wall 2 and side wall 3, and housing has cavity, the air inlet communicated with cavity is offered in housing top wall 1
Mouthful, the upper surface of housing is vertically fixed mounting ring 1 and mounting ring 25, and mounting ring 1 is fixed on the inwall of gas outlet 7,
Mounting ring 1 is located in mounting ring 25, and the external diameter of mounting ring 25 is equal to the external diameter of housing.It is fixed on the inwall of mounting ring 1
There is negative-pressure air fan 6, be connected with air inlet pipe in mounting ring 1, mounting ring 1 is outer towards offering in a side wall 3 of mounting ring 25
Screw thread, the internal thread to match with external screw thread is offered on inside pipe wall of entering, air inlet pipe is by the way of threaded connection, so as to just
Moved in dismounting.
Circumferential in housing sidewall 3 equidistantly to offer some gas outlets 7, gas outlet 7 is equipped with work at the inwall of side wall 3
Property layer of charcoal 8, offer some jacks vertically on roof 1, jack is corresponding with gas outlet 7 to be communicated, the width of jack with activity
The width of layer of charcoal 8 is equal, and gas outlet 7 is equipped with outlet baffle plate 20 at the outer wall of side wall 3, and what is offered on outlet baffle plate 20 goes out
Stomata.Outlet baffle plate 20 matches with corresponding gas outlet 7, and is arranged with sealing rubber cover on the outer wall of outlet baffle plate 20, passes through
The card of outlet baffle plate 20 significantly more efficient can be set on corresponding gas outlet 7 by sealing rubber cover.
As shown in figure 3, being additionally provided with travel mechanism on bottom plate, travel mechanism includes the rotating shaft one being rotatably arranged on bottom plate
9th, rotating shaft 2 10, rotating shaft 3 11 and rotating shaft 4 12, wheel shaft 1 and wheel shaft 2 14, wheel shaft one are fixed with described rotating shaft 1
13 and the serrated vertical of wheel shaft 2 14, wheel shaft three and wheel shaft four, wheel shaft three and the serrated vertical of wheel shaft four are fixed with rotating shaft 2 10, are turned
Wheel shaft five and wheel shaft six, wheel shaft five and the serrated vertical of wheel shaft six are fixed with axle 3 11, the He of wheel shaft seven is fixed with rotating shaft 4 12
Wheel shaft eight, wheel shaft seven and the serrated vertical of wheel shaft eight, wheel shaft 1, wheel shaft 2 14, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six,
The both ends of wheel shaft seven and wheel shaft eight are rotated provided with wheel 15.Wheel shaft 1 and the serrated vertical of wheel shaft 2 14 in rotating shaft 1, turn
Wheel shaft three and the serrated vertical of wheel shaft four on axle 2 10, wheel shaft five and the serrated vertical of wheel shaft six in rotating shaft 3 11, rotating shaft 4 12
On wheel shaft seven and the serrated vertical of wheel shaft eight, and rotating shaft 1, rotating shaft 2 10, rotating shaft 3 11 and the and can of rotating shaft 4 12 enough rotate, from
And can be more flexible make wheel shaft 1, wheel shaft 2 14, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven and wheel shaft eight
On wheel 15 rotate, realize that exhaust gas cleaner opposing bottom surface moves horizontally.
Wheel shaft 1, wheel shaft 2 14, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, the both ends of wheel shaft seven and wheel shaft eight are equal
Bearing 16 is fixed with, check ring 17 is respectively and fixedly provided between described wheel 15 and the inner ring of bearing 16.Check ring 17 mainly rises
To the relatively corresponding wheel shaft 1 of limitation wheel 15, wheel shaft 2 14, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, the and of wheel shaft seven
Wheel shaft eight moves axially.
The lower surface of bottom plate is fixed with bearing block 1, bearing block 2 19,16 three, bearing, 16 four, bearing, bearing 16
Seat five, 16 six, bearing, 16 seven, bearing and 16 eight, bearing, rotating shaft 1 is rotatably arranged on bearing block 1 and bearing block two
Between 19, rotating shaft 2 10 is rotatably arranged between 16 three, bearing and 16 four, bearing, and rotating shaft 3 11 is rotatably arranged on bearing 16
Between seat five and 16 six, bearing, rotating shaft 4 12 is rotatably arranged between 16 seven, bearing and 16 eight, bearing, adjacent shafts one
9th, the angle between rotating shaft 2 10, rotating shaft 3 11 and rotating shaft 4 12 is equal 90 degree.
By on wheel shaft 1, wheel shaft 2 14, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, wheel shaft seven and wheel shaft eight
Wheel 15 rotates, and the regulation of position can be more flexibly carried out to whole exhaust gas cleaner, so as to preferably by tail
Air purifying apparatus, which is removed, to be moved near the slicer in work, makes the enterprising tracheae other end of mounting ring 1 preferably and slicer
It is connected；Start negative-pressure air fan 6, so as to which harmful gas with foreign flavor in slicer working environment is pumped into housing hollow
It is interior, distributed after the purification of active carbon layer 8, then by the venthole of outlet baffle plate 20, meanwhile, active carbon layer 8 is by inserting
Hole is plugged to gas outlet 7, consequently facilitating being replaced cleaning to active carbon layer 8.
Specific embodiment described herein is only to spirit explanation for example of the invention.Technology belonging to the present invention is led
The technical staff in domain can be made various modifications or supplement to described specific embodiment or be replaced using similar mode
Generation, but without departing from the spiritual of the present invention or surmount scope defined in appended claims.
Although 1, roof has more been used herein；2nd, bottom wall；3rd, side wall；4th, mounting ring one；5th, mounting ring two；6th, negative pressure
Blower fan；7th, gas outlet；8th, active carbon layer；9th, rotating shaft one；10th, rotating shaft two；11st, rotating shaft three；12nd, rotating shaft four；13rd, wheel shaft one；14、
Wheel shaft two；15th, wheel；16th, bearing；17th, check ring；18th, bearing block one；19th, the second-class term of bearing block, but be not precluded from making
With the possibility of other terms.It is used for the purpose of more easily describing and explaining the essence of the present invention using these terms；It
Be construed to any additional limitation and all disagreed with spirit of the present invention.
Claims (7)
1. the exhaust gas cleaner in a kind of ultra-thin polysilicon chip slicer, including in cylindrical housings, it is characterised in that it is described
Housing include roof, bottom wall and side wall, described housing has cavity, the air inlet communicated with cavity is offered in housing top wall
Mouthful, the upper surface of described housing is vertically fixed mounting ring one and mounting ring two, and mounting ring one is fixed on the inwall of gas outlet
On, negative-pressure air fan is fixed with the inwall of described mounting ring one, air inlet pipe is connected with described mounting ring one；Described shell
Circumferential on body sidewall equidistantly to offer some gas outlets, gas outlet is equipped with active carbon layer at side wall inwall, described
Some jacks are offered on roof vertically, described jack is corresponding with gas outlet to be communicated, and the width of jack is and activated carbon
The width of layer is equal, and described gas outlet is equipped with outlet baffle plate, the outlet offered on outlet baffle plate at side wall outer wall
Hole, travel mechanism is additionally provided with described bottom plate.
2. the exhaust gas cleaner in ultra-thin polysilicon chip slicer according to claim 1, it is characterised in that described
Travel mechanism includes rotating shaft one, rotating shaft two, rotating shaft three and the rotating shaft four being rotatably arranged on bottom plate, is fixed in described rotating shaft one
There are wheel shaft one and wheel shaft two, wheel shaft one and the serrated vertical of wheel shaft two, wheel shaft three and wheel shaft four, the He of wheel shaft three are fixed with rotating shaft two
The serrated vertical of wheel shaft four, is fixed with wheel shaft five and wheel shaft six, wheel shaft five and the serrated vertical of wheel shaft six in rotating shaft three, solid in rotating shaft four
Surely have wheel shaft seven and wheel shaft eight, wheel shaft seven and a serrated vertical of wheel shaft eight, described wheel shaft one, wheel shaft two, wheel shaft three, wheel shaft four,
Wheel shaft five, wheel shaft six, the both ends of wheel shaft seven and wheel shaft eight are rotated provided with wheel.
3. the exhaust gas cleaner in ultra-thin polysilicon chip slicer according to claim 2, it is characterised in that described
Wheel shaft one, wheel shaft two, wheel shaft three, wheel shaft four, wheel shaft five, wheel shaft six, the both ends of wheel shaft seven and wheel shaft eight are respectively and fixedly provided with bearing, institute
Check ring is respectively and fixedly provided between the wheel and bearing inner race stated.
4. the exhaust gas cleaner in ultra-thin polysilicon chip slicer according to claim 2, it is characterised in that described
The lower surface of bottom plate is fixed with bearing block one, bearing block two, bearing block three, bearing block four, bearing block five, bearing block six, bearing
Seat seven and bearing block eight, rotating shaft one are rotatably arranged between bearing block one and bearing block two, and rotating shaft two is rotatably arranged on bearing block
Between three and bearing block four, rotating shaft three is rotatably arranged between bearing block five and bearing block six, and rotating shaft four is rotatably arranged on bearing
Between seat seven and bearing block eight, the angle between described adjacent shafts one, rotating shaft two, rotating shaft three and rotating shaft four is equal 90 degree.
5. the exhaust gas cleaner in ultra-thin polysilicon chip slicer according to claim 1, it is characterised in that described
Outlet baffle plate matches with corresponding gas outlet, and is arranged with sealing rubber cover on outlet baffle plate outer wall.
6. the exhaust gas cleaner in ultra-thin polysilicon chip slicer according to claim 1, it is characterised in that described
Mounting ring one offers and external screw thread phase towards external screw thread is offered in a side wall of mounting ring two on described inside pipe wall of entering
The internal thread of matching.
7. the exhaust gas cleaner in ultra-thin polysilicon chip slicer according to claim 1, it is characterised in that described
Mounting ring one is located in mounting ring two, and the external diameter of mounting ring two is equal to the external diameter of housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710779728.2A CN107413163A (en) | 2017-09-01 | 2017-09-01 | Exhaust gas cleaner in ultra-thin polysilicon chip slicer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710779728.2A CN107413163A (en) | 2017-09-01 | 2017-09-01 | Exhaust gas cleaner in ultra-thin polysilicon chip slicer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107413163A true CN107413163A (en) | 2017-12-01 |
Family
ID=60435561
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710779728.2A Pending CN107413163A (en) | 2017-09-01 | 2017-09-01 | Exhaust gas cleaner in ultra-thin polysilicon chip slicer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107413163A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107569971A (en) * | 2017-09-01 | 2018-01-12 | 浙江昊能光电有限公司 | Mobile air purifier in ultra-thin polysilicon chip slicer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203777818U (en) * | 2014-04-29 | 2014-08-20 | 东莞市德尔工业服务有限公司 | Movable filter cartridge purification machine |
| CN106731268A (en) * | 2016-12-27 | 2017-05-31 | 天津厦禾科技发展有限公司 | A kind of indoor gas purifier |
| CN207271001U (en) * | 2017-09-01 | 2018-04-27 | 浙江昊能光电有限公司 | Exhaust gas cleaner in ultra-thin polysilicon chip slicer |
-
2017
- 2017-09-01 CN CN201710779728.2A patent/CN107413163A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203777818U (en) * | 2014-04-29 | 2014-08-20 | 东莞市德尔工业服务有限公司 | Movable filter cartridge purification machine |
| CN106731268A (en) * | 2016-12-27 | 2017-05-31 | 天津厦禾科技发展有限公司 | A kind of indoor gas purifier |
| CN207271001U (en) * | 2017-09-01 | 2018-04-27 | 浙江昊能光电有限公司 | Exhaust gas cleaner in ultra-thin polysilicon chip slicer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107569971A (en) * | 2017-09-01 | 2018-01-12 | 浙江昊能光电有限公司 | Mobile air purifier in ultra-thin polysilicon chip slicer |
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Address after: 314415 21 pillow Road, Huang Wan Town, Haining, Jiaxing, Zhejiang Applicant after: Zhejiang Hao Neng Au Optronics Co. Address before: 314415 21 pillow Road, Huang Wan Town, Haining, Jiaxing, Zhejiang Applicant before: ZHEJIANG HOUNEN SOLAR Co.,Ltd. |
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Application publication date: 20171201 |
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| RJ01 | Rejection of invention patent application after publication |