CN107402061B - Resonant mode scanning mirror amplitude measurement system and method - Google Patents
Resonant mode scanning mirror amplitude measurement system and method Download PDFInfo
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- CN107402061B CN107402061B CN201710516939.7A CN201710516939A CN107402061B CN 107402061 B CN107402061 B CN 107402061B CN 201710516939 A CN201710516939 A CN 201710516939A CN 107402061 B CN107402061 B CN 107402061B
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- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
Abstract
The invention belongs to the fields micro photo-electro-mechanical (MOEMS), and in particular to a kind of resonant mode scanning mirror amplitude measurement system and method.System includes laser, for the frock clamp of fixed laser and scanning mirror to be measured, photosensitive nonadjustable signal and at least two photodetector being arranged on photosensitive nonadjustable signal；Laser beam is incident to scanning mirror center to be measured；Incident ray reflects to form scan path through scanning mirror to be measured；Multiple photodetectors capture reflection light and generate the electric signal for indicating respective position；The vibration amplitude of scanning mirror to be measured is calculated in the positional relationship of electric signal and each photodetector that foundation step 3 obtains.It is measured using multiple photodetectors, so that systematic survey amount reduces, when solving to calculate the amplitude of scanning mirror to be measured using photodetector, the low problem of measurement accuracy.
Description
Technical field
The invention belongs to the fields micro photo-electro-mechanical (MOEMS), and in particular to a kind of resonant mode scanning mirror amplitude measurement system and
Method.
Background technique
Resonant mode MEMS scanning mirror to be measured is with scanning angle is big, driving power consumption is low, inertia is small, small in size, light-weight, easy
The advantages such as integrated have extensive demand in the application such as laser sensing, laser projection, laser imaging, are in laser application
Primary Component.
The vibration amplitude of resonant mode MEMS scanning mirror to be measured is to the external rings such as its driving voltage and temperature, humidity, air pressure
Border is more sensitive, and some such as laser radars, and the application such as laser projection is more demanding to the amplitude precision of scanning mirror to be measured.For
Meet amplitude required precision, scanning mirror to be measured is assembled angular position sensor and realized as feedback element, and in a closed loop manner
Accurate control to scanning mirror amplitude to be measured.Its main amplitude feedback detecting method has capacitor or voltage detecting method and photoelectricity inspection
Survey method.Capacitor or voltage-type feedback device have small size, easy of integration, and amplitude detection precision is high but detection signal is weak, signal-to-noise ratio
The features such as low.Photo-electric feedback device has detector position flexible, and optical path is intuitive but amplitude precision is influenced vulnerable to structural failure,
It is difficult to the features such as integrated.
2009, Australian A.Tortschanoff et al. was delivered in Elsevier periodical about using photodetection
Device measures the article of scanning mirror amplitude to be measured, but specific measurement scheme and calculation method are not directed in text.It is 2016, open
Number to propose a kind of measurement scheme of scanning mirror amplitude to be measured in CN105910697A patent and provide the side of amplitude calculating
Method.Its amplitude that scanning mirror to be measured is calculated using the photodetector of an absolute position, and its amplitude precision mainly depends on
In the measurement accuracy of photoelectric probe position mark angle and scanning mirror centre scan line to be measured and photodetector plane
Verticality.Amplitude measurement structure is simple in the patent, the high measurement accuracy of photoelectric probe position it is difficult to ensure that, and then will lead to
Scanning mirror amplitude measurement error to be measured is larger.
In view of the above technical problem, it is desirable to provide a method of scanning mirror amplitude measurement precision to be measured is improved, to solve
Above-mentioned technical problem.
Summary of the invention
When in order to solve to calculate the amplitude of scanning mirror to be measured using photodetector, the low problem of measurement accuracy, the present invention
A kind of system and method for precise measurement resonant mode scanning mirror amplitude to be measured is provided, it is single by being placed in scanning mirror side to be measured
The modes of a laser and several photodetectors calculates amplitude.
The technical solution of the invention is as follows provides a kind of resonant mode scanning mirror amplitude measurement system, and special character exists
In: including laser 14, the frock clamp 11 for fixed laser 14 and scanning mirror to be measured 15, photosensitive nonadjustable signal 16 and set
Set at least two photodetector on the photosensitive nonadjustable signal 16；
Frock clamp is used to guarantee the relative position of laser and scanning mirror so that input path is constant.
The emergent ray of above-mentioned laser 14 is incident to be measured along the direction perpendicular to 15 centre scan line of scanning mirror to be measured
The central point of scanning mirror 15；After light being reflected in 15 vibration processes of scanning mirror to be measured form scan path；Above-mentioned photosensitive fixation
Scale 16 is located in the scan path of scanning mirror 15 to be measured；Above-mentioned multiple photodetectors are for capturing reflection light and generating mark
The electric signal of the respective position of will.Scanning can be calculated to obtain using the positional relationship of the above-mentioned electric signal combination photodetector respectively exported
The scan amplitude of mirror.
Preferably, relative position is provided with the scanning mirror to be measured for fixing scanning mirror 15 to be measured on above-mentioned frock clamp 11
Fixed frame 12 and the laser fixation hole 13 for being used for fixed laser 14.
Preferably, the number of above-mentioned photodetector is 2-3.
Preferably, above-mentioned 16 place plane of photosensitive nonadjustable signal is vertical with 15 centre scan line of scanning mirror to be measured.
Preferably, the number of above-mentioned photodetector is 4, the photosensitive 16 place plane of nonadjustable signal and scanning to be measured
There is angle between 15 centre scan line of mirror.
Preferably, using the initial starting of oscillation direction of scanning mirror 15 to be measured as positive direction, multiple photodetector settings are swept in forward direction
It retouches on path.
The present invention also provides a kind of sides using above-mentioned resonant mode scanning mirror amplitude measurement systematic survey scanning mirror amplitude
Method, comprising the following steps:
Step 1: laser beam is incident to scanning mirror center to be measured；
Step 2: incident ray reflects to form scan path through scanning mirror to be measured；
Step 3: multiple photodetectors capture reflection light and generate the electric signal for indicating respective position；
Step 4: scanning to be measured is calculated in the positional relationship of electric signal and each photodetector that foundation step 3 obtains
The vibration amplitude of mirror.
Preferably, the plane where photosensitive nonadjustable signal is vertical with scanning mirror centre scan line to be measured and including two photoelectricity
When detector,
Above-mentioned steps four specifically:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, with to
Surveying the scanning mirror first positive inswept photodetector moment is initial time, with the first reversed inswept photodetection of scanning mirror to be measured
The device moment is end time, the time difference τ at record start moment and end time；When remembering the first detector initial time and terminating
The time difference at quarter is τ1, the time difference of the second detector initial time and end time is τ2；
B, the scan amplitude for calculating scanning mirror to be measured according to the following formula is A:
S*(tan(A*COS(π*τ2*f))-tan(A*COS(π*τ1* f)))=L
F is the vibration frequency of scanning mirror to be measured in formula, and S is vertical interval of the scanning mirror to be measured to photosensitive nonadjustable signal, and L is
The horizontal space of two photodetector photosurfaces；
C, scanning mirror to be measured is measured to the vertical interval S of photosensitive nonadjustable signal and reads two photodetector photosurfaces
Horizontal space L, the scan amplitude that the formula brought into step b calculates scanning mirror to be measured is A.
Preferably, the plane where photosensitive nonadjustable signal is vertical with scanning mirror centre scan line to be measured and including three photoelectricity
When detector,
Above-mentioned steps four specifically:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, with to
Surveying the scanning mirror first positive inswept photodetector moment is initial time, with the first reversed inswept photodetection of scanning mirror to be measured
The device moment is end time, the time difference τ at record start moment and end time；When remembering the first detector initial time and terminating
The time difference at quarter is τ1, the time difference of the second detector initial time and end time is τ2, third detector initial time and end
Only the time difference at moment is τ3；
B, the scan amplitude for calculating scanning mirror to be measured according to the following formula is A:
L1*(tan(A*COS(π*τ3*f))-tan(A*COS(π*τ2*f)))-L2
*(tan(A*COS(π*τ2*f))-tan(A*COS(π*τ1* f)))=0
F is the vibration frequency of scanning mirror to be measured in formula, and L1 is the first photodetector and the second photodetector photosurface
The spacing of horizontal plane, L2 are the spacing of the second photodetector and third photodetector photosurface horizontal plane；
C, horizontal space L1 and the second photodetection of the first photodetector and the second photodetector photosurface are read
The spacing L2 of device and third photodetector photosurface horizontal plane, the formula brought into step b calculate the scanning of scanning mirror to be measured
Amplitude is A.
Preferably, it plane and vertical with plane where scanning mirror centre scan line to be measured is put down where photosensitive nonadjustable signal
Angle between face is α, and when including 4 photodetectors,
The step 4 specifically:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, with to
Surveying the scanning mirror first positive inswept photodetector moment is initial time, with the first reversed inswept photodetection of scanning mirror to be measured
The device moment is end time, the time difference τ at record start moment and end time；When remembering the first detector initial time and terminating
The time difference at quarter is τ1, the time difference of the second detector initial time and end time is τ2, third detector initial time and end
Only the time difference at moment is τ3, the time difference of the 4th detector initial time and end time is τ4；
B, the following formula 3-1 of simultaneous and formula 3-3 calculate the scan amplitude A of scanning mirror to be measured:
F is the vibration frequency of scanning mirror to be measured in formula, and L1 is the first photodetector and the second photodetector photosurface
The spacing of horizontal plane, L2 are the spacing of the second photodetector and third photodetector photosurface horizontal plane, and L3 is third light
The spacing of electric explorer and the 4th photodetector photosurface horizontal plane；
C, horizontal space L1, the second photodetector of the first photodetector and the second photodetector photosurface are read
With the spacing L2 and third photodetector of third photodetector photosurface horizontal plane and the 4th photodetector photosurface water
The spacing L3 of plane, the scan amplitude that the formula brought into step b calculates scanning mirror to be measured is A.
The beneficial effects of the present invention are:
1, the invention proposes a kind of the resonant mode scanning mirror amplitude measurement system and method based on photodetection principle, benefit
It is measured with multiple photodetectors, so that systematic survey amount reduces, so that precision is easy to guarantee, so that scanning to be measured
The measurement accuracy of mirror amplitude is improved；
2, when being measured using two photodetectors, it is only necessary to measure the horizontal spaces of two photodetector photosurfaces with
Scanning mirror to be measured while ensuring scanning mirror centre scan line to be measured and photosensitive nonadjustable signal to the vertical interval of photosensitive nonadjustable signal
Verticality, do not need measurement photoelectric probe position mark angle high-acruracy survey can be realized, be suitable for telemeasurement
The occasion of scanning mirror amplitude to be measured；
3, when being measured using three photodetectors, it is only necessary to measure the spacing of adjacent detector photosurface horizontal plane, together
When ensure the verticality of scanning mirror centre scan line and photosensitive nonadjustable signal to be measured, do not need to measure scanning mirror to be measured to photosensitive solid
The vertical interval of drift slide, also not needing measurement photoelectric probe position mark angle can be realized high-acruracy survey；
4, when being measured using four photodetectors, it is only necessary to the spacing of measurement detector photosurface horizontal plane, and should not
The verticality of scanning mirror centre scan line and photosensitive nonadjustable signal to be measured is sought, and without measuring scanning mirror to be measured to photosensitive fixed mark
The vertical interval of ruler does not need measurement photoelectric probe position mark angle yet, and since all measured bodies are respectively positioned on same put down
Face, amplitude precision are easier to reach.
Detailed description of the invention
Fig. 1: double-photoelectric detector amplitude measurement system schematic；
Fig. 2: double-photoelectric detector sweep time difference signal extracts figure；
Fig. 3: three photodetector amplitude measurement system schematics；
Fig. 4: three photodetector sweep time difference signals extract figure；
Fig. 5: four photodetector amplitude measurement system schematics；
Fig. 6: four photodetector sweep time difference signals extract figure；
Appended drawing reference in figure are as follows: 11- frock clamp, 12- scanning mirror fixed frame to be measured, 13- laser fixation hole, 14- swash
Light device, 15- scanning mirror to be measured, the photosensitive nonadjustable signal of 16-, the first photodetector of 17-, the second photodetector of 18-, 19- are waited for
Survey scanning mirror centre scan line, 31- third photodetector, the 4th photodetector of 51-.
Specific embodiment
The present invention is elaborated with reference to the accompanying drawings and examples:
Embodiment one
It is the condition based on vertical photosensitive 16 plane of nonadjustable signal of scanning mirror centre scan line 19 to be measured in the present embodiment,
And two photodetectors are used to realize the measuring and calculating of scanning mirror amplitude to be measured.
It will be seen from figure 1 that the measuring system mainly includes laser 14, frock clamp 11, photosensitive nonadjustable signal 16 with
And the first photodetector 17, the second photodetector 18 on photosensitive nonadjustable signal are set, wherein set on frock clamp 11
It is equipped with scanning mirror fixed frame 12 to be measured and laser fixation hole 13, scanning mirror 15 to be measured is fixed on the scanning mirror to be measured of frock clamp
On fixed frame 12, laser 14 is fixed in laser fixation hole 13.
Laser beam is incident to 15 center of scanning mirror to be measured, is formed after reflecting light in 15 vibration processes of scanning mirror to be measured
The scanning track of certain angle, the angle are scanning mirror vibration amplitude.Two photodetectors being placed on scanning track
Be sequentially generated the electric signal for indicating respective position, according to the positional relationship of this multiple signals and each photodetector can calculate to
Survey scanning mirror vibration amplitude.
The geometrical relationship of scanning mirror amplitude measurement structure to be measured: setting the horizontal space of two photodetector photosurfaces as L,
The vertical interval of scanning mirror 15 to be measured to photosensitive nonadjustable signal 16 is S, and scanning mirror centre scan line 19 and the first photoelectricity to be measured are visited
The horizontal space for surveying device 17 is L0.The mark angle of first photodetector, 17 position is θ1, 18 position of the second photodetector
Mark angle be θ2。
The electric signal of the respective position of mark generated according to two photodetectors extracts photodetector sweep time: light
Electric explorer sweep time difference τ1With τ2Calculation see Fig. 2, take scanning mirror 15 to be measured by initial position positive inswept the
It is t at the time of one photodetector 171, successively it is t at the time of inswept second photodetector 182, rear scanning mirror to be measured returns first
It is t at the time of inswept second photodetector 18 when beginning position3, successively it is t at the time of inswept first photodetector 174, then exist
In the preceding half period of scanning mirror 15 to be measured, the sweep time difference of the first photodetector 17 is τ1=t4-t1, the second light
The sweep time difference of electric explorer 18 is τ2=t3-t2。
Scanning mirror amplitude to be measured calculates principle: the vibration frequency for taking scanning mirror to be measured is f, the scan amplitude of scanning mirror to be measured
A and θ1, θ2Relationship is as follows:
According to above-mentioned geometry:
Abbreviation formula 1-2:
S*(tanθ2-tanθ1)=L (formula 1-3)
Joint type 1-1 and formula 1-3, only amplitude A is unknown parameter, calculates to obtain scanning mirror amplitude A using mathematics root finding method.
The precision of amplitude depends primarily on the vertical interval S of scanning mirror 15 to be measured to photosensitive nonadjustable signal 16 in the above method
Measurement accuracy, the measurement accuracy of the horizontal space L of two photodetector photosurfaces and scanning mirror centre scan line to be measured
19 and photosensitive nonadjustable signal 16 verticality, the occasion suitable for telemeasurement scanning mirror amplitude to be measured.
Embodiment two
It is the condition based on vertical photosensitive 16 plane of nonadjustable signal of scanning mirror centre scan line 19 to be measured in the present embodiment,
And three photodetectors are used to realize the measuring and calculating of scanning mirror amplitude to be measured.
From figure 3, it can be seen that the measuring system mainly includes frock clamp 11, photosensitive nonadjustable signal 16 and setting are in light
The first photodetector 17, the second photodetector 18, third photodetector 31 on quick nonadjustable signal, wherein frock clamp
Scanning mirror fixed frame 12 to be measured and laser fixation hole 13 is respectively set in relative position on 11, and scanning mirror 15 to be measured is fixed on tooling
On the scanning mirror fixed frame 12 to be measured of fixture, laser 14 is fixed in laser fixation hole 13.The embodiment is different from implementation
It is in place of example one, increases third photodetector 31.
Laser beam is incident to 15 center of scanning mirror to be measured, is formed after reflecting light in 15 vibration processes of scanning mirror to be measured
The scanning track of certain angle, the angle are scanning mirror vibration amplitude.Three photodetectors being placed on scanning track
Be sequentially generated the electric signal for indicating respective position, according to the positional relationship of this multiple signals and each photodetector can calculate to
Survey scanning mirror vibration amplitude.
The geometrical relationship of scanning mirror amplitude measurement structure to be measured: the first photodetector 17 and the second photodetector 18 are set
The spacing of photosurface horizontal plane is L1, and the spacing of the second photodetector 18 and 31 photosurface horizontal plane of third photodetector is
L2, the vertical interval of scanning mirror 15 to be measured to photosensitive nonadjustable signal 16 are S, scanning mirror centre scan line 19 and the first photoelectricity to be measured
The horizontal space of detector 17 is L0.The mark angle of first photodetector, 17 position is θ1, the second photodetector 18
The mark angle set is θ2, the mark angle of 31 position of third photodetector is θ3。
The electric signal of the respective position of mark generated according to three photodetectors extracts photodetector sweep time: each
Photodetector sweep time difference τ1, τ2, τ3Calculation see Fig. 4, take scanning mirror 15 to be measured to be swept by initial position forward direction
It is t at the time of crossing the first photodetector 171, successively it is t at the time of inswept second photodetector 182, successively inswept third light
It is t at the time of electric explorer 313, it is t at the time of inswept third photodetector 31 when rear scanning mirror to be measured returns to initial position4,
It is successively t at the time of inswept second photodetector 185, successively it is t at the time of inswept first photodetector 176, then to be measured
In the preceding half period of scanning mirror 15, the sweep time difference of the first photodetector 17 is τ1=t6-t1, the spy of the second photoelectricity
The sweep time difference for surveying device 18 is τ2=t5-t2, the sweep time difference of third photodetector 31 is τ3=t4-t3。
Scanning mirror amplitude to be measured calculates principle: the vibration frequency for taking scanning mirror to be measured is f, the scan amplitude of scanning mirror to be measured
A and θ1, θ2, θ3Relationship is as follows:
According to above-mentioned geometry:
Abbreviation formula 2-2:
L1*(tanθ3-tanθ2)-L2*(tanθ2-tanθ1)=0 (formula 2-3)
Joint type 2-1 and formula 2-3, only amplitude A is unknown parameter, calculates to obtain scanning mirror amplitude A using mathematics root finding method.
In the embodiment, the precision of amplitude depends primarily on the first photodetector 17 and the second photodetector 18 is photosensitive
The survey of the spacing L1 of face horizontal plane and the second photodetector 18 and the spacing L2 of 31 photosurface horizontal plane of third photodetector
The verticality of accuracy of measurement and scanning mirror centre scan line 19 and photosensitive nonadjustable signal 16 to be measured, without measuring scanning mirror to be measured
15 to photosensitive nonadjustable signal 16 vertical interval S, and all measured bodies are respectively positioned on same plane, and amplitude precision is easier to reach,
Therefore the embodiment amplitude measurement precision should be better than the amplitude measurement precision in embodiment one.
Embodiment three
It is the plane vertical with photosensitive 16 plane of nonadjustable signal based on scanning mirror centre scan line 19 to be measured in the present embodiment
In the condition of α angle, and four photodetectors are used to realize the measuring and calculating of scanning mirror amplitude to be measured.
From fig. 5, it can be seen that the measuring system mainly includes frock clamp 11, photosensitive nonadjustable signal 16 and setting are in light
The first photodetector 17, the second photodetector 18, third photodetector 31 and the 4th photoelectricity on quick nonadjustable signal are visited
Device 51 is surveyed, wherein scanning mirror fixed frame 12 to be measured and laser fixation hole 13 is respectively set in relative position on frock clamp 11, to
It surveys scanning mirror 15 to be fixed on the scanning mirror fixed frame 12 to be measured of frock clamp, laser 14 is fixed on laser fixation hole 13
In, which is in place of being different from embodiment two, does not have scanning mirror centre scan line to be measured vertically photosensitive nonadjustable signal
The condition of plane, and increase the 4th photodetector 51.
Laser beam is incident to scanning mirror center, and sweeping for certain angle is formed after reflecting light in scanning mirror vibration processes
Track is retouched, which is scanning mirror vibration amplitude.Four photodetectors being placed on scanning track are sequentially generated mark
The electric signal of respective position can calculate to obtain scanning mirror vibration width according to the positional relationship of this multiple signals and each photodetector
Value.
The geometrical relationship of scanning mirror amplitude measurement structure to be measured: the first photodetector 17 and the second photodetector 18 are set
The spacing of photosurface horizontal plane is L1, and the spacing of the second photodetector 18 and 31 photosurface horizontal plane of third photodetector is
L2, the spacing of 51 photosurface horizontal plane of third photodetector 31 and the 4th photodetector are similarly L3, scanning mirror 15 to be measured
Vertical interval to photosensitive nonadjustable signal 16 is S, the level of scanning mirror centre scan line 19 and the first photodetector 17 to be measured
Spacing is L0.The mark angle of first photodetector, 17 position is θ1, the mark angle of 18 position of the second photodetector is
θ2, the mark angle of 31 position of third photodetector is θ3, the mark angle of 51 position of the 4th photodetector is θ4。
The electric signal of the respective position of mark generated according to four photodetectors extracts photodetector sweep time: light
Electric explorer sweep time difference τ1, τ2, τ3, τ4Calculation see Fig. 6, take scanning mirror 15 to be measured by initial position forward direction
It is t at the time of inswept first photodetector 171, successively it is t at the time of inswept second photodetector 182, successively inswept third
It is t at the time of photodetector 313, successively it is t at the time of inswept 4th photodetector 514, rear scanning mirror to be measured returns initial
It is t at the time of inswept 4th photodetector 51 when position5, successively it is t at the time of inswept third photodetector 316, successively sweep
It is t at the time of crossing the second photodetector 187, successively it is t at the time of inswept first photodetector 178, then in scanning mirror to be measured
In 15 preceding half period, the sweep time difference of the first photodetector 17 is τ1=t8-t1, the second photodetector 18
Sweep time difference be τ2=t7-t2, the sweep time difference of third photodetector 31 is τ3=t6-t3, the 4th photodetector
51 sweep time difference is τ4=t5-t4。
Scanning mirror amplitude to be measured calculates principle: the vibration frequency for taking scanning mirror to be measured is f, the scan amplitude of scanning mirror to be measured
A and θ1, θ2, θ3, θ4Relationship is as follows:
According to above-mentioned geometry:
Abbreviation formula 3-2 is obtained:
Based on different condition difference joint type 3-1 and formula 3-3, wherein only amplitude A is unknown parameter, utilizes mathematics rooting
Method calculates to obtain scanning mirror amplitude A.
In the embodiment, the precision of amplitude depends primarily on spacing L1, the L2 of photodetector photosurface horizontal plane, L3's
Measurement accuracy, the verticality without requiring scanning mirror centre scan line 19 and photosensitive nonadjustable signal 16 to be measured, and without measuring S,
Again since all measured bodies are respectively positioned on same plane, amplitude precision is easier to reach, therefore the embodiment amplitude measurement precision is answered
Better than the amplitude measurement precision in embodiment two.
Particularly, the photodetector comprising four or more photosensitive units can be used in three measuring principles based on the above embodiment
Array measures scanning mirror amplitude to be measured, i.e., if there is more than four photodetectors, it is only necessary to measurement wherein adjacent four
Scanning mirror amplitude measurement to be measured can be realized in the spacing of detector photosurface horizontal plane.
Claims (7)
1. a kind of resonant mode scanning mirror amplitude measurement system, it is characterised in that: including laser (14), be used for fixed laser
(14) and the frock clamp (11) of scanning mirror to be measured (15), photosensitive nonadjustable signal (16) and setting are in the photosensitive nonadjustable signal
(16) at least two photodetector on；
The emergent ray of the laser (14) is incident to be measured along the direction perpendicular to scanning mirror to be measured (15) centre scan line
The central point of scanning mirror (15)；After light being reflected in scanning mirror (15) vibration processes to be measured form scan path；It is described photosensitive
Nonadjustable signal (16) is located in the scan path of scanning mirror to be measured (15)；The photodetector is for capturing reflection light and producing
The raw electric signal for indicating respective position；
Positional relationship according to multi-channel electric signal and each photodetector can calculate to obtain scanning mirror vibration amplitude to be measured；
When photosensitive nonadjustable signal place plane is vertical with scanning mirror centre scan line to be measured and including two photodetectors, tool
Body calculating process is as follows:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, is swept with to be measured
Retouching the mirror first positive inswept photodetector moment is initial time, when reversed inswept photodetector first with scanning mirror to be measured
Carve is end time, the time difference τ at record start moment and end time；Remember the first detector initial time and end time
Time difference is τ1, the time difference of the second detector initial time and end time is τ2；
B, the scan amplitude for calculating scanning mirror to be measured according to the following formula is A:
S*(tan(A*COS(π*τ2*f))-tan(A*COS(π*τ1* f)))=L
F is the vibration frequency of scanning mirror to be measured in formula, and S is vertical interval of the scanning mirror to be measured to photosensitive nonadjustable signal, and L is two
The horizontal space of photodetector photosurface；
C, the level of scanning mirror to be measured to two photodetector photosurfaces of the vertical interval S of photosensitive nonadjustable signal and reading is measured
Spacing L, the scan amplitude that the formula brought into step b calculates scanning mirror to be measured is A；
When photosensitive nonadjustable signal place plane is vertical with scanning mirror centre scan line to be measured and including three photodetectors, tool
Body calculating process is as follows:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, is swept with to be measured
Retouching the mirror first positive inswept photodetector moment is initial time, when reversed inswept photodetector first with scanning mirror to be measured
Carve is end time, the time difference τ at record start moment and end time；Remember the first detector initial time and end time
Time difference is τ1, the time difference of the second detector initial time and end time is τ2, when third detector initial time is with terminating
The time difference at quarter is τ3；
B, the scan amplitude for calculating scanning mirror to be measured according to the following formula is A:
L1*(tan(A*COS(π*τ3*f))-tan(A*COS(π*τ2*f)))-L2*(tan(A*COS(π*τ2*f))-tan(A*
COS(π*τ1* f)))=0
F is the vibration frequency of scanning mirror to be measured in formula, and L1 is that the first photodetector and the second photodetector photosurface are horizontal
The spacing in face, L2 are the spacing of the second photodetector and third photodetector photosurface horizontal plane；
C, read the first photodetector and the second photodetector photosurface horizontal space L1 and the second photodetector and
The spacing L2 of third photodetector photosurface horizontal plane, the formula brought into step b calculate the scan amplitude of scanning mirror to be measured
For A；
Folder where photosensitive nonadjustable signal between plane and the plane vertical with plane where scanning mirror centre scan line to be measured
Angle is α, and when including 4 photodetectors, specific calculating process is as follows:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, is swept with to be measured
Retouching the mirror first positive inswept photodetector moment is initial time, when reversed inswept photodetector first with scanning mirror to be measured
Carve is end time, the time difference τ at record start moment and end time；Remember the first detector initial time and end time
Time difference is τ1, the time difference of the second detector initial time and end time is τ2, when third detector initial time is with terminating
The time difference at quarter is τ3, the time difference of the 4th detector initial time and end time is τ4；
B, the following formula 3-1 of simultaneous and formula 3-3 calculate the scan amplitude A of scanning mirror to be measured:
F is the vibration frequency of scanning mirror to be measured in formula, and L1 is that the first photodetector and the second photodetector photosurface are horizontal
The spacing in face, L2 are the spacing of the second photodetector and third photodetector photosurface horizontal plane, and L3 is the spy of third photoelectricity
Survey the spacing of device and the 4th photodetector photosurface horizontal plane；
C, the horizontal space L1 of the first photodetector and the second photodetector photosurface, the second photodetector and the are read
The spacing L2 and third photodetector of three photodetector photosurface horizontal planes and the 4th photodetector photosurface horizontal plane
Spacing L3, the formula brought into step b calculate scanning mirror to be measured scan amplitude be A.
2. resonant mode scanning mirror amplitude measurement system according to claim 1, it is characterised in that: the frock clamp (11)
Upper relative position is provided with the scanning mirror fixed frame (12) to be measured for fixing scanning mirror to be measured (15) and is used for fixed laser
(14) laser fixation hole (13).
3. resonant mode scanning mirror amplitude measurement system according to claim 2, it is characterised in that: the photodetector
Number is 2-3.
4. resonant mode scanning mirror amplitude measurement system according to claim 3, it is characterised in that: the photosensitive nonadjustable signal
(16) plane where is vertical with scanning mirror to be measured (15) centre scan line.
5. resonant mode scanning mirror amplitude measurement system according to claim 2, it is characterised in that: the photodetector
Number is 4, has angle between plane and scanning mirror to be measured (15) centre scan line where the photosensitive nonadjustable signal (16).
6. -5 any resonant mode scanning mirror amplitude measurement system according to claim 1, it is characterised in that: with scanning to be measured
The initial starting of oscillation direction of mirror (15) is positive direction, and multiple photodetectors are arranged on forward scan path.
7. a kind of side using any resonant mode scanning mirror amplitude measurement systematic survey scanning mirror amplitude of claim 1-6
Method, which comprises the following steps:
Step 1: laser beam is incident to scanning mirror center to be measured；
Step 2: incident ray reflects to form scan path through scanning mirror to be measured；
Step 3: multiple photodetectors capture reflection light and generate the electric signal for indicating respective position；
Step 4: scanning mirror to be measured is calculated in the positional relationship of electric signal and each photodetector that foundation step 3 obtains
Vibration amplitude；The plane where photosensitive nonadjustable signal is vertical with scanning mirror centre scan line to be measured and including two photodetectors
When,
The step 4 specifically:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, is swept with to be measured
Retouching the mirror first positive inswept photodetector moment is initial time, when reversed inswept photodetector first with scanning mirror to be measured
Carve is end time, the time difference τ at record start moment and end time；Remember the first detector initial time and end time
Time difference is τ1, the time difference of the second detector initial time and end time is τ2；
B, the scan amplitude for calculating scanning mirror to be measured according to the following formula is A:
S*(tan(A*COS(π*τ2*f))-tan(A*COS(π*τ1* f)))=L
F is the vibration frequency of scanning mirror to be measured in formula, and S is vertical interval of the scanning mirror to be measured to photosensitive nonadjustable signal, and L is two
The horizontal space of photodetector photosurface；
C, the level of scanning mirror to be measured to two photodetector photosurfaces of the vertical interval S of photosensitive nonadjustable signal and reading is measured
Spacing L, the scan amplitude that the formula brought into step b calculates scanning mirror to be measured is A；Where photosensitive nonadjustable signal plane with to
It is vertical and when including three photodetectors to survey scanning mirror centre scan line,
The step 4 specifically:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, is swept with to be measured
Retouching the mirror first positive inswept photodetector moment is initial time, when reversed inswept photodetector first with scanning mirror to be measured
Carve is end time, the time difference τ at record start moment and end time；Remember the first detector initial time and end time
Time difference is τ1, the time difference of the second detector initial time and end time is τ2, when third detector initial time is with terminating
The time difference at quarter is τ3；
B, the scan amplitude for calculating scanning mirror to be measured according to the following formula is A:
L1*(tan(A*COS(π*τ3*f))-tan(A*COS(π*τ2*F)))-L2*(tan(A*COS(π*τ2*f))-tan(A*
COS(π*τ1* f)))=0
F is the vibration frequency of scanning mirror to be measured in formula, and L1 is that the first photodetector and the second photodetector photosurface are horizontal
The spacing in face, L2 are the spacing of the second photodetector and third photodetector photosurface horizontal plane；
C, read the first photodetector and the second photodetector photosurface horizontal space L1 and the second photodetector and
The spacing L2 of third photodetector photosurface horizontal plane, the formula brought into step b calculate the scan amplitude of scanning mirror to be measured
For A；Folder where photosensitive nonadjustable signal between plane and the plane vertical with plane where scanning mirror centre scan line to be measured
Angle is α, and when including 4 photodetectors,
The step 4 specifically:
A, the electric signal of the respective position of mark generated according to photodetector extracts photodetector sweep time, is swept with to be measured
Retouching the mirror first positive inswept photodetector moment is initial time, when reversed inswept photodetector first with scanning mirror to be measured
Carve is end time, the time difference τ at record start moment and end time；Remember the first detector initial time and end time
Time difference is τ1, the time difference of the second detector initial time and end time is τ2, when third detector initial time is with terminating
The time difference at quarter is τ3, the time difference of the 4th detector initial time and end time is τ4；
B, the following formula 3-1 of simultaneous and formula 3-3 calculate the scan amplitude A of scanning mirror to be measured:
F is the vibration frequency of scanning mirror to be measured in formula, and L1 is that the first photodetector and the second photodetector photosurface are horizontal
The spacing in face, L2 are the spacing of the second photodetector and third photodetector photosurface horizontal plane, and L3 is the spy of third photoelectricity
Survey the spacing of device and the 4th photodetector photosurface horizontal plane；
C, the horizontal space L1 of the first photodetector and the second photodetector photosurface, the second photodetector and the are read
The spacing L2 and third photodetector of three photodetector photosurface horizontal planes and the 4th photodetector photosurface horizontal plane
Spacing L3, the formula brought into step b calculate scanning mirror to be measured scan amplitude be A.
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| CN110426181B (en) * | 2019-08-29 | 2021-04-13 | 上海禾赛科技股份有限公司 | Scanning parameter measuring method of scanning mirror |
| CN110530264B (en) * | 2019-09-26 | 2021-08-20 | 重庆工商大学 | Position sensitive detector |
| CN112393797B (en) * | 2020-11-26 | 2022-12-23 | 国网山西省电力公司电力科学研究院 | Reactor vibration speed detection method and device, control equipment and storage medium |
| CN113932908B (en) * | 2021-09-29 | 2023-02-28 | 北京理工大学 | Measuring system and measuring method for vibration parameters of MEMS scanning galvanometer |
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