CN107388984A - Micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation - Google Patents
Micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation Download PDFInfo
- Publication number
- CN107388984A CN107388984A CN201710559050.7A CN201710559050A CN107388984A CN 107388984 A CN107388984 A CN 107388984A CN 201710559050 A CN201710559050 A CN 201710559050A CN 107388984 A CN107388984 A CN 107388984A
- Authority
- CN
- China
- Prior art keywords
- resolution
- super
- micro
- light
- nano structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The present invention is a kind of micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation, using white light broad spectrum light source, coding manipulation is carried out to measurement optical field amplitude by spatial light modulator DMD, while medium microsphere is positioned over object under test surface.On longitudinal direction, longitudinal direction high accuracy scanning is completed by piezoelectric ceramics, a series of structure light modulation figures obtained are gathered to CCD and carry out arithmetic analysis, find independent single pixel modulation degree extreme value, realizes the elevation information recovery to micro-nano structure.In transverse direction, the characteristic of super-resolution 3 d light fields is produced using medium microsphere, the super-resolution imaging for breaking through diffraction limit is acquired by microscopic system.According to the longitudinal direction of gained, transversary information, finally it is integrated into space three-dimensional data message, realizes the super-resolution D surface contouring of micro-nano structure.This method can fully obtain the high-frequency information for embodying object detail composition in limited numerical aperture, while improve longitudinal direction, horizontal detection resolution.
Description
Technical field
The invention belongs to field of optical detection, and in particular to a kind of micro-nano based on structure light Yu medium microsphere combined modulation
Structure super-resolution three-dimensional appearance testing method.
Background technology
At present, micro-nano structure measurement means are broadly divided into the non-optical, class of optics two.In non-optical detection, mainly there is platform
The means such as rank instrument, AFM (AFM), SEM (SEM), use contact type measurement form, precision mostly
Height, but measuring speed is slow, scope is smaller, easy damaged device surface, and equipment is expensive, applied in micro-nano device detection process by
Limitation.In optical detection, mainly there is confocal scanning microscope, the means such as ellipsometer and white light interference, connect mostly using non-
Touch measures, and has the advantages that measuring speed is fast, precision is high, is the important means of micro-nano structure detection.
However, existing measuring method, is limited to Diffraction of light wave effect, transverse resolution is only up to 200nm or so,
And the Imaging Resolution far can not meet the needs of people explore to the micro-nano world.It is limited in high resolution
Application in micro-nano structure detection, it is difficult to meet the needs that micro-nano structure resolving power improves constantly.Such as in semiconductor applications, by
In the continuous breakthrough of photoetching technique, for micro-nano device characteristic size constantly close to technological limit, detection resolution becomes maximum tug
Elbow.
In recent years, domestic and international scientific research personnel puts into optical ultra-discrimination detection research field one after another, achieves many heavy
Gonna breakthrough.For example the Nobel laureate Germany scientist Stephan W. and American scientist William E. in 2014 is carried
The photoactivation positioning microscopy (PALM) that the stimulated emission depletion microtechnic (STED) and Eric Betz gone out proposes.But this
A little technologies need to carry out dye marker to biological sample, can not be applied to micro-nano structure device topography and detect.In addition, it is directed to micro-nano
The super-resolution Research on measuring technique of structure also includes the Structured Illumination microtechnic that L.Gustafsson team proposes, deconvolutes
Technology and optical confocal etc., imaging resolution all can be effectively lifted to a certain extent, but be difficult to break through 200nm transverse directions point
Resolution
Also there are many Research Centers and research of the colleges and universities to optical microphotograph super-resolution at home, but current optical ultra-discrimination shows
Microtechnology is had focused largely in two dimensional surface imaging, using few in the detection of micro-nano structure three-dimensional appearance super-resolution.Realize inspection
Precision height is surveyed, the high micro-nano structure three-dimensional appearance testing method of lateral resolution is still to need to continue what is broken through at present both at home and abroad
Problem.
The content of the invention
In order to solve above-mentioned problem, the present invention devises described structure light and the micro-nano structure of medium microsphere combined modulation
Super-resolution three-dimensional appearance testing method, it is possible to achieve horizontal accuracy of detection is improved while longitudinal high-acruracy survey.Solve existing
Optical detecting method transverse resolution is limited to diffraction effect, can not break through 200nm bottleneck problem, meets micro-nano structure feature
Size constantly reduces, the active demand to high resolution D surface contouring.
The technical solution adopted by the present invention is：A kind of micro-nano structure oversubscription based on structure light Yu medium microsphere combined modulation
Three-dimensional appearance testing method is distinguished, using white light broad spectrum light source, measurement optical field amplitude is compiled by spatial light modulator DMD
Code manipulation, while medium microsphere is positioned over object under test surface, on longitudinal direction, longitudinal direction high accuracy is completed by piezoelectric ceramics and swept
Retouch, a series of structure light modulation figures obtained are gathered to CCD (Charge-Coupled Device) and carry out arithmetic analysis, are found
Independent single pixel modulation degree extreme value, realize the elevation information recovery to micro-nano structure；In transverse direction, produced using medium microsphere
The characteristic of super-resolution 3 d light fields, the super-resolution imaging for breaking through diffraction limit is acquired by microscopic system；According to gained
Longitudinal direction, transversary information, is finally integrated into space three-dimensional data message, realizes the super-resolution three-dimensional appearance inspection of micro-nano structure
Survey.
Wherein, using white light broad spectrum light source, coding behaviour is carried out to measurement optical field amplitude by spatial light modulator DMD
Control, while medium microsphere is positioned over object under test surface.
Wherein, on longitudinal direction, longitudinal direction high accuracy scanning is completed by piezoelectric ceramics, to CCD (Charge-Coupled
Device) a series of structure light modulation figures that collection obtains carry out arithmetic analysis, find independent single pixel modulation degree extreme value,
Realize and the elevation information of micro-nano structure is recovered.
Wherein, in transverse direction, the characteristic of super-resolution 3 d light fields is produced using medium microsphere, is acquired by microscopic system
Break through the super-resolution imaging of diffraction limit.
Wherein, according to the longitudinal direction of gained, transversary information, finally it is integrated into space three-dimensional data message, realizes micro-nano
The super-resolution D surface contouring of structure.
Wherein, the modulation degree numerical value of each pixel is obtained using 5 step phase shift methods, due to the high accuracy of its phase shift method parsing
Characteristic, by finding modulation degree extreme point and its corresponding scan position, elevation information can be recovered in high precision.It is simultaneously micro- using medium
The super-resolution imaging characteristic of ball, improves horizontal detection resolution, has the characteristics of measurement accuracy, practical.
The present invention compared with prior art the advantages of be：
(1), modulated with reference to controlled architecture light and medium microsphere, while improve the longitudinal direction of detection, transverse precision, laterally differentiated
Rate is even more to break through diffraction limit, realizes the three-dimensional super-resolution detection of micro-nano structure.Meet that micro-nano structure characteristic size constantly reduces,
Active demand to high resolution D surface contouring；
(2), in the present invention, compared to conventional three-dimensional Shap feature detection system structure, can be achieved without increasing system complexity
The detection of higher precision, there is very strong usability.
Brief description of the drawings
Fig. 1 is that a kind of micro-nano structure super-resolution three-dimensional appearance based on structure light and medium microsphere combined modulation of the present invention is examined
The system construction drawing that survey method utilizes, wherein, 1 is micro-nano structure to be measured, and 2 be medium microsphere, and 3 be micro-imaging object lens, and 4 be point
Light microscopic, 5 be image pick-up card, and 6 be tube lens, and 7 be spatial light modulator DMD, and 8 be white light source；
Fig. 2 is that the width modulation degree curve map that an independent pixel point parses to obtain is directed in the present invention.
Embodiment
Below in conjunction with the accompanying drawings and theory deduction specific embodiments of the present invention is described in detail.
Micro-nano structure super-resolution three-dimensional appearance testing method of the invention based on structure light Yu medium microsphere combined modulation, by
, can be extensive in high precision by finding modulation degree extreme point and its corresponding scan position due to the high-precision characteristic of its phase shift method parsing
Multiple elevation information.Simultaneously using the super-resolution imaging characteristic of medium microsphere, horizontal detection resolution is improved, there is measurement accuracy,
The characteristics of practical.
System uses broad spectrum light source first, amplitude-controlled information is carried after spatial light modulator, and then pass through light splitting
Mirror enters micro-imaging object lens, medium microsphere and treats geodesic structure, and last image-forming information is obtained by image pick-up card, then carries out again
Later stage dissection process, system architecture are as shown in Figure 1.The elevation information of object is coded in the information transfer system of structure light.Thing
Object point modulation angle value on face positioned at grating image face is maximum, and the object point modulation angle value before and after imaging surface tapers into, and is
The information transfer system of each point parses the topographical information of object, it is necessary to longitudinal direction high accuracy scanning object and lead to from testee
Cross related algorithm and find out the maximum position of each independent point optical modulation degree, so as to rebuild the three-dimensional appearance information of object.The technology
Phase ambiguity can be effectively avoided, there is high measurement accuracy and larger measurement range.
The present invention takes five step Stoilov phase shift methods to solve, and can be represented in different longitudinal scanning position image light intensity
For：
Now phaseshift step size is θ.I1(x, y), I2(x, y), I3(x, y), I4(x, y), I5(x, y) is respectively that different longitudinal directions are swept
The light intensity of position independent pixel point is retouched, for I (x, y) to adopt figure background light intensity, m (x, y) is fringe contrast,At the beginning of adopting figure
Beginning phase number, the modulation degree expression formula of Stoilov algorithms can be released by equation group (11)：
Wherein, m is by the image modulation of fringes required by method.
A series of imaging code patterns are obtained by piezoelectric ceramics high accuracy longitudinal scanning object under test, utilize Stoilov five
Portion's phase shift algorithm obtains the information transfer system of independent pixel point and finds corresponding extreme point, as shown in Figure 2.
Meanwhile medium microsphere is positioned over object under test surface, the spy of super-resolution 3 d light fields is produced using medium microsphere
Property, the super-resolution imaging for breaking through diffraction limit is acquired by microscopic system.According to the longitudinal direction of gained, transversary information,
Finally it is integrated into space three-dimensional data message, realizes the super-resolution D surface contouring of micro-nano structure.
Structure light and the micro-nano structure super-resolution three-dimensional appearance testing method of medium microsphere combined modulation, a side in the present invention
Face can realize very high longitudinal frame, on the other hand realize that transverse super-resolution detects, practicality simply fast with system architecture
The features such as strong.
Certainly, in this example, due to the limitation of Microsphere Size, imaging viewing field is caused to be limited, when the big visual field super-resolution of needs
During imaging, it is also necessary to which later image is spliced, and completes the Shape measure of whole micro-nano structure.
Claims (7)
1. a kind of micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation, its feature
It is：Using white light broad spectrum light source, coding manipulation is carried out to measurement optical field amplitude by spatial light modulator DMD, while will be situated between
Matter microballoon is positioned over object under test surface, on longitudinal direction, longitudinal direction high accuracy scanning is completed by piezoelectric ceramics, to CCD (Charge-
Coupled Device) a series of structure light modulation figures progress arithmetic analysis obtained is gathered, find independent single pixel tune
System extreme value, realize the elevation information recovery to micro-nano structure；In transverse direction, super-resolution 3 d light fields are produced using medium microsphere
Characteristic, the super-resolution imaging for breaking through diffraction limit is acquired by microscopic system；According to the longitudinal direction of gained, transversary letter
Breath, is finally integrated into space three-dimensional data message, realizes the super-resolution D surface contouring of micro-nano structure.
2. a kind of micro-nano structure super-resolution based on structure light and medium microsphere combined modulation according to claim 1 is three-dimensional
Shape measure method, it is characterized in that：Using white light broad spectrum light source, measurement optical field amplitude is entered by spatial light modulator DMD
Row coding manipulation, while medium microsphere is positioned over object under test surface.
3. a kind of micro-nano structure super-resolution based on structure light and medium microsphere combined modulation according to claim 1 is three-dimensional
Shape measure method, it is characterized in that：On longitudinal direction, longitudinal direction high accuracy scanning is completed by piezoelectric ceramics, to CCD (Charge-
Coupled Device) a series of structure light modulation figures progress arithmetic analysis obtained is gathered, find independent single pixel tune
System extreme value, realize the elevation information recovery to micro-nano structure.
4. a kind of micro-nano structure super-resolution based on structure light and medium microsphere combined modulation according to claim 1 is three-dimensional
Shape measure method, it is characterized in that：In transverse direction, the characteristic of super-resolution 3 d light fields is produced using medium microsphere, passes through micro- system
System acquires the super-resolution imaging for breaking through diffraction limit.
5. a kind of micro-nano structure super-resolution based on structure light and medium microsphere combined modulation according to claim 1 is three-dimensional
Shape measure method, it is characterized in that：According to the longitudinal direction of gained, transversary information, finally it is integrated into space three-dimensional data message,
Realize the super-resolution D surface contouring of micro-nano structure.
A kind of 6. micro-nano structure based on structure light Yu medium microsphere combined modulation according to any one of claim 1 to 5
Super-resolution three-dimensional appearance testing method, it is characterized in that：The modulation degree numerical value of each pixel is obtained using 5 step phase shift methods, due to
The high-precision characteristic of its phase shift method parsing, by finding modulation degree extreme point and its corresponding scan position, it can recover high in high precision
Spend information；Simultaneously using the super-resolution imaging characteristic of medium microsphere, horizontal detection resolution is improved.
7. a kind of micro-nano structure super-resolution based on structure light and medium microsphere combined modulation according to claim 6 is three-dimensional
Shape measure method, it is characterized in that：Due to the limitation of Microsphere Size, imaging viewing field is caused to be limited, when the big visual field super-resolution of needs
During imaging, it is also necessary to which later image is spliced, and completes the Shape measure of whole micro-nano structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710559050.7A CN107388984A (en) | 2017-07-11 | 2017-07-11 | Micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710559050.7A CN107388984A (en) | 2017-07-11 | 2017-07-11 | Micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107388984A true CN107388984A (en) | 2017-11-24 |
Family
ID=60340135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710559050.7A Pending CN107388984A (en) | 2017-07-11 | 2017-07-11 | Micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107388984A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107831589A (en) * | 2017-12-04 | 2018-03-23 | 中国计量大学 | A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens |
| CN108775875A (en) * | 2018-08-31 | 2018-11-09 | 苏州大学 | A kind of microstructure appearance measurement method and its device based on dispersion spectrum coding |
| CN108844492A (en) * | 2018-08-31 | 2018-11-20 | 苏州大学 | A kind of microstructure appearance measurement method and its device based on Spectral modulation depth depth coding |
| CN108917651A (en) * | 2018-07-06 | 2018-11-30 | 中国科学院光电技术研究所 | A kind of super-resolution 3 D measuring method based on optical tweezer medium microsphere |
| CN109341574A (en) * | 2018-09-30 | 2019-02-15 | 中国科学院光电技术研究所 | A kind of micro-nano structure three-dimensional appearance high speed detection method based on structure light |
| CN111258046A (en) * | 2020-02-26 | 2020-06-09 | 清华大学 | Light field microscope system and method based on front microlens array |
| CN111308724A (en) * | 2019-11-26 | 2020-06-19 | 中国科学院光电技术研究所 | Long-focus light-generating nanometer light pipe generation method based on radial polarized light |
| CN111829457A (en) * | 2020-07-09 | 2020-10-27 | 中国科学院光电技术研究所 | Method for detecting three-dimensional morphology of ultrathin film device based on structured light illumination microscope system |
| DE102019130711A1 (en) * | 2019-11-14 | 2021-01-28 | Carl Zeiss Smt Gmbh | Device for measuring semiconductor lithography structures and use of the device |
| CN113237546A (en) * | 2021-04-12 | 2021-08-10 | 淮阴工学院 | Method for generating micron focusing rainbow based on medium microspheres and spectrometer |
| CN117788547B (en) * | 2024-02-26 | 2024-04-26 | 南京埃米仪器科技有限公司 | White light interference image super-resolution three-dimensional reconstruction method based on medium microspheres |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540446A (en) * | 2011-12-28 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | High-speed structure illumination optical microscope system and method based on digital micromirror device |
| CN104570315A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院西安光学精密机械研究所 | Colored three-dimensional tomography micro-imaging system and method based on structural illumination |
| CN104655051A (en) * | 2014-12-29 | 2015-05-27 | 四川大学 | High-speed structured light three-dimensional surface shape vertical measurement method |
| CN106197257A (en) * | 2016-07-06 | 2016-12-07 | 中国科学院光电技术研究所 | Amplitude & Phase combined modulation super-resolution three-dimensional micro-nano structure topography measurement device |
| CN106197310A (en) * | 2016-06-29 | 2016-12-07 | 中国科学院光电技术研究所 | A kind of wide spectrum micro-nano structure three-dimensional appearance testing method based on modulation degree |
-
2017
- 2017-07-11 CN CN201710559050.7A patent/CN107388984A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102540446A (en) * | 2011-12-28 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | High-speed structure illumination optical microscope system and method based on digital micromirror device |
| CN104655051A (en) * | 2014-12-29 | 2015-05-27 | 四川大学 | High-speed structured light three-dimensional surface shape vertical measurement method |
| CN104570315A (en) * | 2014-12-30 | 2015-04-29 | 中国科学院西安光学精密机械研究所 | Colored three-dimensional tomography micro-imaging system and method based on structural illumination |
| CN106197310A (en) * | 2016-06-29 | 2016-12-07 | 中国科学院光电技术研究所 | A kind of wide spectrum micro-nano structure three-dimensional appearance testing method based on modulation degree |
| CN106197257A (en) * | 2016-07-06 | 2016-12-07 | 中国科学院光电技术研究所 | Amplitude & Phase combined modulation super-resolution three-dimensional micro-nano structure topography measurement device |
Non-Patent Citations (5)
| Title |
|---|
| 张雨东、饶长辉、李新阳: "《自适应光学及激光操控》", 30 November 2016, 国防工业出版社 * |
| 王云新 等: "突破衍射极限的远场光学成像方法", 《北京工业大学学报》 * |
| 王开福等: "《现代光测力学技术》", 30 November 2009, 哈尔滨工业大学出版社 * |
| 王成: "《生物医学光学》", 28 February 2017, 东南大学出版社 * |
| 钱克矛 等: "相移技术中五步等步长Stoilov算法的性能分析", 《光学技术》 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107831589A (en) * | 2017-12-04 | 2018-03-23 | 中国计量大学 | A kind of controllable super-resolution microscope equipment of focusing based on spherical micro-nano liquid lens |
| CN107831589B (en) * | 2017-12-04 | 2024-02-02 | 中国计量大学 | Focusing controllable super-resolution microscopic device based on spherical micro-nano liquid drop lens |
| CN108917651A (en) * | 2018-07-06 | 2018-11-30 | 中国科学院光电技术研究所 | A kind of super-resolution 3 D measuring method based on optical tweezer medium microsphere |
| CN108775875A (en) * | 2018-08-31 | 2018-11-09 | 苏州大学 | A kind of microstructure appearance measurement method and its device based on dispersion spectrum coding |
| CN108844492A (en) * | 2018-08-31 | 2018-11-20 | 苏州大学 | A kind of microstructure appearance measurement method and its device based on Spectral modulation depth depth coding |
| CN108775875B (en) * | 2018-08-31 | 2020-05-22 | 苏州大学 | Microstructure morphology measuring method and device based on dispersion spectrum coding |
| CN109341574A (en) * | 2018-09-30 | 2019-02-15 | 中国科学院光电技术研究所 | A kind of micro-nano structure three-dimensional appearance high speed detection method based on structure light |
| DE102019130711A1 (en) * | 2019-11-14 | 2021-01-28 | Carl Zeiss Smt Gmbh | Device for measuring semiconductor lithography structures and use of the device |
| CN111308724A (en) * | 2019-11-26 | 2020-06-19 | 中国科学院光电技术研究所 | Long-focus light-generating nanometer light pipe generation method based on radial polarized light |
| CN111258046A (en) * | 2020-02-26 | 2020-06-09 | 清华大学 | Light field microscope system and method based on front microlens array |
| CN111829457A (en) * | 2020-07-09 | 2020-10-27 | 中国科学院光电技术研究所 | Method for detecting three-dimensional morphology of ultrathin film device based on structured light illumination microscope system |
| CN113237546A (en) * | 2021-04-12 | 2021-08-10 | 淮阴工学院 | Method for generating micron focusing rainbow based on medium microspheres and spectrometer |
| CN113237546B (en) * | 2021-04-12 | 2022-03-18 | 淮阴工学院 | Method for generating micron focusing rainbow based on medium microspheres and spectrometer |
| CN117788547B (en) * | 2024-02-26 | 2024-04-26 | 南京埃米仪器科技有限公司 | White light interference image super-resolution three-dimensional reconstruction method based on medium microspheres |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107388984A (en) | Micro-nano structure super-resolution three-dimensional appearance testing method based on structure light Yu medium microsphere combined modulation | |
| CN101303533B (en) | Aligning system, aligning method for photolithography equipment and enhancement type aligning mark | |
| CN106526823B (en) | A kind of non-fluorescence non-intuitive microscopic imaging device of DNA nanospheres and method | |
| CN103353675B (en) | Based on frequency-shift super-resolution micro imaging method and the device of microstructure | |
| CN108917651B (en) | Super-resolution three-dimensional shape measurement method based on optical tweezers medium microspheres | |
| TW201100858A (en) | Method and system for three-dimensional polarization-based confocal microscopy | |
| US9823458B2 (en) | Imaging system and method for multi-scale three-dimensional deformation or profile output | |
| CN109269438A (en) | A kind of Structured Illumination microscopic measuring method for the detection of multilayer complexity micro-nano structure | |
| CN109916331A (en) | A kind of structure light micro-nano structure 3 D detection method based on composite grating | |
| CN108332684A (en) | A kind of measuring three-dimensional profile method based on Structured Illumination microtechnic | |
| Ma et al. | Sharpness-statistics-based auto-focusing algorithm for optical ptychography | |
| CN113466279A (en) | Wide-field super-resolution gyromagnetic imaging device and method | |
| CN108254340A (en) | Flying-spot microscope based on linear polarization modulation | |
| Zhu et al. | Superfast and large-depth-range sinusoidal fringe generation for multi-dimensional information sensing | |
| Ren et al. | Multi-view object topography measurement with optical sectioning structured illumination microscopy | |
| Le Feber et al. | A full vectorial mapping of nanophotonic light fields | |
| Sandoz et al. | In-plane rigid-body vibration mode characterization with a nanometer resolution by stroboscopic imaging of a microstructured pattern | |
| McGray et al. | Centroid precision and orientation precision of planar localization microscopy | |
| Khademi et al. | A sub pixel resolution method | |
| Zhang et al. | A noise-robust multi-intensity phase retrieval method based on structural patch decomposition | |
| CN109883955A (en) | Obtain the device and method of the optimum structure probe function of structure detection micro imaging system | |
| KR101391180B1 (en) | Structured Illumination Imaging Method Using Laser Bean Scanning | |
| Huang et al. | Accurate and fast registration algorithm for multi-height lensless in-line on-chip holographic microscopy | |
| CN112858345B (en) | Random phase-shifting optical element defect rapid super-resolution detection device and detection method | |
| Sun et al. | Deep Learning Enables Large Depth-of-Field Images for Sub-Diffraction-Limit Scanning Superlens Microscopy |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20171124 |