CN107388785A - Substrate hot drying equipment - Google Patents
Substrate hot drying equipment Download PDFInfo
- Publication number
- CN107388785A CN107388785A CN201710633363.2A CN201710633363A CN107388785A CN 107388785 A CN107388785 A CN 107388785A CN 201710633363 A CN201710633363 A CN 201710633363A CN 107388785 A CN107388785 A CN 107388785A
- Authority
- CN
- China
- Prior art keywords
- roller
- stepper motor
- guide rail
- support
- drying equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B15/00—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form
- F26B15/10—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions
- F26B15/12—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined
- F26B15/122—Machines or apparatus for drying objects with progressive movement; Machines or apparatus with progressive movement for drying batches of material in compact form with movement in a path composed of one or more straight lines, e.g. compound, the movement being in alternate horizontal and vertical directions the lines being all horizontal or slightly inclined the objects or batches of material being carried by transversely moving rollers or rods which may rotate
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
- F26B23/04—Heating arrangements using electric heating
- F26B23/06—Heating arrangements using electric heating resistance heating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B25/00—Details of general application not covered by group F26B21/00 or F26B23/00
- F26B25/001—Handling, e.g. loading or unloading arrangements
- F26B25/003—Handling, e.g. loading or unloading arrangements for articles
- F26B25/004—Handling, e.g. loading or unloading arrangements for articles in the shape of discrete sheets
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Drying Of Solid Materials (AREA)
Abstract
The invention provides a kind of substrate hot drying equipment, including housing, an import and an outlet are respectively equipped with the opposite sides of housing, the conveying mechanism of conveying substrate is provided with the housing, the both ends of conveying mechanism pass through import and outlet, support is provided with housing, at least one roller that rotation is driven by motor is respectively equipped with both sides up and down positioned at transport mechanism on the support, the axis of roller is vertical with the conveying direction of conveying mechanism and surface with conveying mechanism is parallel, and the rotation direction of roller is opposite with the conveying direction of conveying mechanism；The heater element for heating is wound with the roller, the heater element is connected with the electric controller on roller, gap is provided between the roller and conveying mechanism, blast pipe is additionally provided with housing.Compared with prior art, so as to reduce the generation of hair dirt and foreign matter, avoid impacting substrate.
Description
Technical field
The present invention relates to a kind of display panel technology, more particularly to a kind of substrate hot drying equipment.
Background technology
The equipment (such as cleaning agent and developing machine) for wet processing (Wet) is used as LCD (LCDs at this stage
Plate)/LTPS (low-temperature polysilicon silicon technology) color membrane process processing procedure in important process apparatus, either disclosure satisfy that will in production
The characteristic value (CD) asked is each liquid close to the level designed, or the lifting to product quality (foreign matter, Mura (ripple) etc.)
Crystal panel factory must strive link.
Current either this kind equipment of cleaning machine or developing machine, device structure substantially has all been shaped, and from into
This angle is set out, it is most of tiny the defects of will not be by as the index in buying, or could be put into practice out in actual production
Its genuine problem points.
In CF (colored filter) technique, the capital equipment used in its technique productions is cleaning machine and developing machine.And
The removal drying of liquid can be all carried out using illumination or hot blast typically after cleaning or development, then enters to overheat drying device, enters
The heated drying device of row redrying, wherein cleaning machine and developing machine has two kinds, and one kind is to close to be dried using infrared lamp,
One property is good, but because what is utilized is that face is dried, hair dirt is more serious, to substrate or is made and causes secondary flaw (defect)；Separately
One kind is dried by air knife blowing hot-air, utilize be line dry, hair dirt it is lighter, but due to utilize be heating pressure
Contracting dry air (CDA), the cleanliness factor of high compression dry air and pipeline is required heater and compression drying air source
To substrate and it is made and larger risk is present.
The content of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of substrate hot drying equipment, reduces the production of hair dirt and foreign matter
It is raw, avoid impacting the surface of substrate.
The invention provides a kind of substrate hot drying equipment, including housing, is respectively equipped with one in the opposite sides of housing and enters
Mouth and an outlet, the interior conveying mechanism for being provided with conveying substrate of the housing, the both ends of conveying mechanism pass through import and outlet,
Is provided with support in housing, being respectively equipped with up and down on both sides for transport mechanism is located on the support and at least one passes through motor
The roller rotated is driven, the axis of roller is vertical with the conveying direction of conveying mechanism and surface with conveying mechanism is parallel, rolls
The rotation direction of cylinder is opposite with the conveying direction of conveying mechanism；The heater element for heating is wound with the roller, it is described
Heater element is connected with the electric controller on roller, gap is provided between the roller and conveying mechanism, on housing
It is additionally provided with blast pipe.
Further, two rollers are provided with the governor motion that can be vertically moved along the both side surface of transport mechanism, described
Governor motion is used to adjust gap.
Further, the governor motion includes a pair of guide rails, the first stepper motor, the second stepper motor and rack,
The guide rail is respectively arranged on side relative with roller both ends on support, and guide rail is vertical with the axis of roller, the first stepping electricity
Machine, the second stepper motor are arranged on to be set with wherein side guide rail position corresponding section, the first stepper motor and the second stepper motor
Put on identical side, rack is arranged on by guide rail adjacent with the first stepper motor, the second stepper motor on support, rack
With guide rail parallel, the guide rail has two sliding blocks respectively, and one of sliding block is connected with one of roller, another
Sliding block is connected with another roller, and first stepper motor is fixed therein on a roller, and the second stepper motor is consolidated
It is scheduled on another roller, first stepper motor, the output shaft of the second stepper motor are provided with and rack meshed gears.
Further, the support is provided with regulating system, the regulating system include respectively with the first stepper motor with
And second stepper motor connection controller and the display screen that be connected with controller, the controller is for controlling the first step
The displacement of stepper motor and the second stepper motor, display screen are used to show displacement.
Further, the governor motion includes the linear electric motors and an at least guide rail for being respectively used to driving drum, institute
It is relative with roller both ends wherein on side on the support respectively to state linear electric motors, guide rail is on support and the phase of roller both ends
To opposite side on, there are two sliding blocks, linear electric motors and guide rail are vertical with the axis of roller, one of rolling on guide rail
One end of cylinder is fixed on the mover seat of one of linear electric motors, and the other end is fixed on one of sliding block of guide rail；Separately
One end of one roller is fixed on the mover seat of another linear electric motors, and the other end is fixed on another sliding block of guide rail.
Further, the support is provided with regulating system, and the regulating system includes the servo being connected with linear electric motors
Driver and the display screen being connected with servo-driver, servo-driver control the displacement of linear motor rotor, display
Shield for showing displacement.
Further, the heater element is wrapped in roller in a manner of spiral winding.
Further, the heater element is heating wire.
Further, the heating wire is made up of nickel chromium.
The present invention compared with prior art, by the both sides up and down of conveying mechanism set with heater element roller,
Because it is linear drying mode, wind will not be produced and do not contacted directly with substrate, so as to reduce the production of hair dirt and foreign matter
It is raw, avoid impacting substrate.
Brief description of the drawings
Fig. 1 is the internal structure schematic diagram of substrate hot drying equipment of the present invention；
Fig. 2 is the structural representation of the first elevating mechanism of the present invention；
Fig. 3 is the structural representation of second of elevating mechanism of the present invention；
Fig. 4 is the structural representation of roller of the present invention.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
As shown in Figure 1, Figure 2 and Figure 4, a kind of substrate hot drying equipment of the invention, including housing 7, housing 7 is interior to be provided with phase
To the cavity of sealing, an import 71 and an outlet 72 are respectively equipped with the opposite sides of housing 7, conveying base is provided with housing 7
The conveying mechanism 1 of plate, the both ends of conveying mechanism 1 are provided with support 8, support 8 is through import 71 and outlet 72 in housing 7
Rectangular frame structure, conveying mechanism 1 pass through from support 8, on support 8 positioned at conveying mechanism 1 both sides up and down be respectively equipped with to
Few one drives the roller 2 rotated by motor 4, the axis of roller 2 it is vertical with the conveying direction of conveying mechanism 1 and with
The surface of conveying mechanism 1 is parallel, and the rotation direction of roller 2 is opposite with the conveying direction of conveying mechanism 1；Wound in the roller 2
Have a heater element 3 for heating, the heater element 3 is connected with the electric controller 6 on roller 2, two rollers 2 with
Gap 5 is provided between conveying mechanism 1, blast pipe 18 is additionally provided with housing 7.
In said structure, the gap 5 between the roller 2 and conveying mechanism 1 of the upside of conveying mechanism 1 is more than substrate 21
Thickness, it is not contacted directly with substrate, the generation of hair dirt and foreign matter can be reduced.
In order to ensure the drying effect of roller 2, roller 2 is located between the wherein two neighboring live-roller of conveying mechanism 1.
Specifically, conveying mechanism 1 is conveying roll, and the both sides up and down positioned at conveying mechanism 1 on support 8 are respectively equipped with one
It is individual by motor 4 drive rotate roller 2, can so ensure on conveying mechanism 1 with two rollers between with
Certain interval, so that the roller 2 positioned at the downside of conveying mechanism 1 can play the side relative with conveying mechanism 1 to substrate 1
Surface carries out heated drying, and the temperature of heating can be adjusted by electric controller 6, adapts to the needs of different temperatures.
As one embodiment of the present invention, covered with dismountable encapsulant 19 on the inwall of housing 7, avoid
Housing distils caused by directly being contacted with heat, and it is more convenient that cleaning is carried out to enclosure interior.
As shown in Fig. 2 two rollers 2 are provided with the governor motion that can be vertically moved along the both side surface of transport mechanism 1, institute
Governor motion is stated to be used to adjust gap 5.
As shown in Fig. 2 be the present invention the first governor motion structural representation, governor motion include a pair of guide rails 9,
First stepper motor 10, the second stepper motor 11 and rack 12, in order to make it easy to understand, below dividing guide rail 9 for the first guide rail
9A and the second guide rail 9B, roller 2 are respectively the first roller 2A, second tin roller 2B, the first guide rail 9A and 9B points of the second guide rail
(left and right sides in figure), the first guide rail 9A on side that She Yu be not relative with the first roller 2A, second tin roller 2B both ends on support 8
Vertical with the first roller 2A, second tin roller 2B axis with the second guide rail 9B, the first stepper motor 10, the second stepper motor 11 are set
Corresponding with the second guide rail 9B positions side on support 8 is put, rack 12 is arranged on by the second guide rail 9B, rack 12 and second
Guide rail 9B is parallel, has two sliding blocks 22A, 22B, 22C, 22D respectively on the first guide rail 9A and the second guide rail 9B, first leads
Position corresponding one of sliding block 22A, 22C and the first roller 2A rotating shaft are connected on rail 9A and the second guide rail 9B,
Position corresponding another sliding block 22B, 22D and second tin roller 2B rotating shaft connection are solid on first guide rail 9A and the second guide rail 9B
Fixed, first stepper motor 10 is fixed on the first roller 2A, and the second stepper motor 11 is fixed on second tin roller 2B, described
First stepper motor 10, the second stepper motor 11 output shaft be provided with the meshed gears 13 of rack 12, so as to realize spacing 5
It is adjustable.
In said structure, a limited block 20 is set on the rail 9, so as to which guide rail is divided into two between two sliding blocks
Part, play a part of without interference with certainly the invention is not restricted to this, each a pair of guide rails 9 can also be correspondingly arranged by roller 2.
As shown in Fig. 2 the support 8 is provided with regulating system, the regulating system include respectively with the first stepper motor
10 and second controller 14 that connects of stepper motor 11 and the display screen 15 that is connected with controller 14, the controller 14
For controlling the displacement of the first stepper motor 10 and the second stepper motor 11, display screen 15 is used to show displacement,
Intuitively displacement is known so as to realize.
As shown in figure 3, governor motion can also use following structure to realize, including it is respectively used to the straight line of driving drum 2
Motor 16 and at least a guide rail 9, for the ease of distinguishing, two rollers 2 are defined as the first roller 2A, second tin roller 2B, two
Individual linear electric motors 16 are defined as first straight line motor 16A, second straight line motor 16B, the first straight line motor 16A, second straight
Line motor 16B is respectively arranged on relative with the first roller 2A, second tin roller 2B both ends (right in figure wherein on side on support 8
Side), guide rail 9 is located on opposite side relative with the first roller 2A, second tin roller 2B both ends on support 8 (left side in figure), here
It is worth noting that, linear electric motors 16 are not arranged in identical side with guide rail 9, guide rail 9 is provided with two sliding blocks 22A, 22B,
First straight line motor 16A, second straight line motor 16B and guide rail 9 are vertical with the first roller 2A, second tin roller 2B axis,
The rotating shaft of the first roller 2A one end is fixed on first straight line motor 16A mover seat, and the rotating shaft of the other end is fixed on guide rail 9
One of sliding block 22A on；The rotating shaft of second tin roller 2B one end is fixed on second straight line motor 16B mover seat, separately
The rotating shaft of one end is fixed on another sliding block 22B of guide rail 9.
In said structure, a limited block 20 is set on the rail 9, so as to which guide rail is divided into two between two sliding blocks
Part, play a part of without interference with certainly the invention is not restricted to this, each a guide rail can also be correspondingly arranged by roller 2.
As shown in figure 3, support 8 is provided with regulating system, the regulating system includes the servo being connected with linear electric motors 16
Driver 17 and the display screen 15 being connected with servo-driver 17, servo-driver 17 control the movement of the rotor of linear electric motors 16
Distance, display screen 15 are used to show displacement.
Although the above-mentioned structure for having been disclosed for two kinds of governor motions, is replaced the invention is not restricted to this, such as by rack
It is changed to the mode of V belt translation or the effect of vertical lift can be achieved in worm geared mode.
As shown in figure 4, heater element 3 is wrapped in a manner of spiral winding in roller 2, specifically, heater element 3 is electricity
Heated filament.It is made up of nickel chromium.
As shown in Fig. 2 medium-height trestle 8 of the present invention include two montants 81 for being used for secured adjusted mechanism and regulating system,
And the connecting rod 82 of the connection upper and lower ends of montant 81, it is respectively provided with the upper and lower ends of montant 81 and is connected with the inwall of housing 7
And the support member 83 supported.
A master controller and power supply, master controller connection power supply and motor, regulation can be also provided with the present invention
System.
The present invention can be used in the heated drying unit of decontaminating apparatus or developing apparatus.
Although the present invention has shown and described with reference to specific embodiment, it should be appreciated by those skilled in the art that：
In the case where not departing from the spirit and scope of the present invention limited by claim and its equivalent, can carry out herein form and
Various change in details.
Claims (9)
- A kind of 1. substrate hot drying equipment, it is characterised in that：Including housing (7), one is respectively equipped with the opposite sides of housing (7) Import (71) and an outlet (72), the interior conveying mechanism (1) for being provided with conveying substrate of the housing (7), the both ends of conveying mechanism (1) Through import (71) and outlet (72), support (8) is provided with housing (7), is located at transport mechanism (1) on the support (8) Be respectively equipped with up and down on both sides it is at least one by motor (4) drive rotate roller (2), the axis of roller (2) with The conveying direction of conveying mechanism (1) is vertical and, the rotation direction of roller (2) and conveying parallel with the surface of conveying mechanism (1) The conveying direction of mechanism (1) is opposite；The heater element (3) for heating, the heater element are wound with the roller (2) (3) it is connected with the electric controller (6) on roller (2), gap is provided between the roller (2) and conveying mechanism (1) (5) blast pipe (18), is additionally provided with housing (7).
- 2. substrate hot drying equipment according to claim 1, it is characterised in that：Two rollers (2) are provided with can be along transmission The governor motion that the both side surface of mechanism (1) vertically moves, the governor motion are used to adjust gap (5).
- 3. substrate hot drying equipment according to claim 2, it is characterised in that：The governor motion includes a pair of guide rails (9), the first stepper motor (10), the second stepper motor (11) and rack (12), the guide rail (9) are respectively arranged on support (8) On the upper side relative with roller (2) both ends, guide rail (9) is vertical with the axis of roller (2), the first stepper motor (10), second Stepper motor (11) is arranged on and a wherein side rails (9) position corresponding section, the first stepper motor (10) and the second stepping electricity Machine (11) is arranged on identical side, and rack (12) is arranged on support (8) and the first stepper motor (10), the second stepping electricity The adjacent guide rail (9) of machine (11) is other, and rack (12) is parallel with guide rail (9), and the guide rail (9) has two sliding blocks respectively, wherein One sliding block is connected with one of roller (2), and another sliding block is connected with another roller (2), and described first Stepper motor (10) is fixed therein on a roller (2), and the second stepper motor (11) is fixed on another roller (2), institute State the first stepper motor (10), the output shaft of the second stepper motor (11) is provided with and rack (12) meshed gears (13).
- 4. substrate hot drying equipment according to claim 3, it is characterised in that：The support (8) is provided with regulating system, The regulating system include be connected respectively with the first stepper motor (10) and the second stepper motor (11) controller (14), with And the display screen (15) being connected with controller (14), the controller (14) are used to control the first stepper motor (10) and second The displacement of stepper motor (11), display screen (15) are used to show displacement.
- 5. substrate hot drying equipment according to claim 2, it is characterised in that：The governor motion includes being respectively used to drive The linear electric motors (16) of dynamic roller (2) and an at least guide rail (9), the linear electric motors (16) be respectively arranged on support (8) with Roller (2) both ends it is relative wherein on side, on guide rail (9) opposite side relative with roller (2) both ends on the support (8), There are two sliding blocks, linear electric motors (16) and guide rail (9) are vertical with the axis of roller (2), one of rolling on guide rail (9) One end of cylinder (2) is fixed on the mover seat of one of linear electric motors (16), and the other end is fixed on one of them of guide rail (9) On sliding block；One end of another roller (2) is fixed on the mover seat of another linear electric motors (16), and the other end is fixed on guide rail (9) on another sliding block.
- 6. substrate hot drying equipment according to claim 5, it is characterised in that：The support (8) is provided with regulating system, The regulating system includes the servo-driver (17) that is connected with linear electric motors (16) and is connected with servo-driver (17) Display screen (15), servo-driver (17) control the displacement of linear electric motors (16) rotor, and display screen (15), which is used to show, to be moved Dynamic distance.
- 7. according to the substrate hot drying equipment described in claim 1-6 any one, it is characterised in that：The heater element (3) It is wrapped in a manner of spiral winding in roller (2).
- 8. substrate hot drying equipment according to claim 7, it is characterised in that：The heater element (3) is heating wire.
- 9. substrate hot drying equipment according to claim 8, it is characterised in that：The heating wire is made up of nickel chromium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710633363.2A CN107388785A (en) | 2017-07-28 | 2017-07-28 | Substrate hot drying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710633363.2A CN107388785A (en) | 2017-07-28 | 2017-07-28 | Substrate hot drying equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107388785A true CN107388785A (en) | 2017-11-24 |
Family
ID=60342446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710633363.2A Pending CN107388785A (en) | 2017-07-28 | 2017-07-28 | Substrate hot drying equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107388785A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6357140B1 (en) * | 2000-06-29 | 2002-03-19 | Fps Food Processing Systems B.V. | Apparatus for drying substantially ellipsoid products, such as for instance eggs |
| CN1840997A (en) * | 2005-03-30 | 2006-10-04 | 大日本网目版制造株式会社 | Substrate treatment device |
| CN201251350Y (en) * | 2008-07-19 | 2009-06-03 | 浙江永吉木业有限公司 | Drying device used for wood floor production |
| CN201935538U (en) * | 2011-01-16 | 2011-08-17 | 铜陵华源汽车内饰材料有限公司 | Dryer for heating composite fiber board |
| CN104315820A (en) * | 2014-09-30 | 2015-01-28 | 浙江瑞澄木业有限公司 | Automatic wooden floor drying device |
| CN205997514U (en) * | 2016-08-31 | 2017-03-08 | 海宁海橡集团有限公司 | A kind of footwear material imitates the ink solidification equipment of leather egative film |
-
2017
- 2017-07-28 CN CN201710633363.2A patent/CN107388785A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6357140B1 (en) * | 2000-06-29 | 2002-03-19 | Fps Food Processing Systems B.V. | Apparatus for drying substantially ellipsoid products, such as for instance eggs |
| CN1840997A (en) * | 2005-03-30 | 2006-10-04 | 大日本网目版制造株式会社 | Substrate treatment device |
| CN201251350Y (en) * | 2008-07-19 | 2009-06-03 | 浙江永吉木业有限公司 | Drying device used for wood floor production |
| CN201935538U (en) * | 2011-01-16 | 2011-08-17 | 铜陵华源汽车内饰材料有限公司 | Dryer for heating composite fiber board |
| CN104315820A (en) * | 2014-09-30 | 2015-01-28 | 浙江瑞澄木业有限公司 | Automatic wooden floor drying device |
| CN205997514U (en) * | 2016-08-31 | 2017-03-08 | 海宁海橡集团有限公司 | A kind of footwear material imitates the ink solidification equipment of leather egative film |
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Application publication date: 20171124 |
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