CN107385382A - Hot wall type ion nitriding and its application method in glow ion nitriding - Google Patents
Hot wall type ion nitriding and its application method in glow ion nitriding Download PDFInfo
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- CN107385382A CN107385382A CN201710776211.8A CN201710776211A CN107385382A CN 107385382 A CN107385382 A CN 107385382A CN 201710776211 A CN201710776211 A CN 201710776211A CN 107385382 A CN107385382 A CN 107385382A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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Abstract
The invention discloses hot wall type ion nitriding in a kind of glow ion nitriding.It includes furnace tube, stratie, interior hot wall；Interior hot wall is in a ring, interior hot wall is located in furnace tube, interior hot wall internal diameter is more than negative electrode dish external diameter, three or more interior hot walls for axially overlapping placement form hot wall component in one group, interior hot wall component is located in furnace tube, the upper end of interior hot wall component is located above the side of stratie upper end, the lower end of interior hot wall component is located at the side-lower of stratie lower end, cathode disc is located in the annular region that interior hot wall component surrounds, and parts to be processed is located on cathode disc and in the annular region that interior hot wall component surrounds；Stratie is located on the outside of interior hot wall component.With reducing inside and outside workspace and the advantages of upper and lower temperature difference.The invention also discloses application method of the described aura from hot wall type ion nitriding in nitriding.
Description
Technical field
The present invention relates to metal material thermo-chemical treatment field, and more specifically it is that hot wall type is true in glow ion nitriding
Empty ion-nitriding furnace.The invention further relates to the application method of hot wall type ion nitriding in glow ion nitriding.
Background technology
Traditional glow ion nitriding furnace uses cold wall formula vacuum furnace body mostly, generally use double-decker, uses Q235
It is cold to need continuously to be passed through in water flowing layer, production process that 30-50 mm in width interlayer is left among steel plate welding fabrication, two-layered steel plates
But water (cooling water can be recycled after heat exchanger), for cooling vacuum nitriding body of heater ensure seal it is long-term at low temperature
Use, the body of heater has simple in construction, makes the advantages that cheap maintaining is simple using low carbon steel plate, answers extensively
Glow discharge nitriding device fabrication for metal parts.
Traditional vacuum body of heater is cold wall furnace structure, many defects in use be present, and main performance is in-furnace temperature
Field serious metal parts, especially top and the bottom uneven, effectively placed in process of production inside vacuum furnace body in workspace
With the portion temperature such as the Internal and external cycle of cathode disc can uneven, part carry out nitriding processing in stove when temperature typically 520
DEG C or so but lower regions part, the Internal and external cycle part temperature difference of part are big in stove, the part that processes can be because temperature
Deviation causes case hardness and nitride layer depth uneven；The method improved at present mainly has：(1) by adjusting putting for part
Position, increase auxiliary cathode, visually the temperature of part goes to improve processed zero in stove to adjust the means such as the spacing of part
The temperature homogeneity of part；(2) heater meanses are aided in improve in-furnace temperature uniformity by increasing resistance in nitriding furnace, but should
Auxiliary is heated to be unidirectionally controlled pattern (one-way heating without refrigeration), when in stove because structure and placing part position and ion
The power output of heating power supply the reason such as lays particular stress on because the surface area of part is different, can make certain section of temperature in resistance wire no power
In the state of heating, the measurement temperature in the region is still higher than the design temperature controlled and dead band temperature occurs and can not adjust.
The content of the invention
The first object of the present invention is to provide hot wall type ion nitriding in a kind of glow ion nitriding, adjusts body of heater
Interior bulk temperature, reduce that workspace is inside and outside and upper and lower temperature difference, improve vacuum furnace body inner heating zones temperature homogeneity.
The second object of the present invention is to provide the use of hot wall type ion nitriding in described glow ion nitriding
Method, the temperature of three sections or multistage hot wall in automatic separately adjustable interior hot wall stove, realization automatically adjusts to be treated in ion nitriding furnace body
The temperature of the upper, middle and lower section of parts to be processed in machining area, make the uniform purpose of nitriding Part temperature in stove so as to reach.
In order to realize first purpose of the invention described above, the technical scheme is that：Hot wall type in glow ion nitriding
Ion nitriding, including furnace tube, cathode disc, stratie, it is characterised in that：Also include interior hot wall；Interior hot wall
In a ring, interior hot wall is located in furnace tube, lower end flushes with cathode disc lower end, and interior hot wall internal diameter is more than negative electrode dish external diameter, three
Or multiple interior hot walls for axially overlapping placement form hot wall component in one group, interior hot wall component is located in furnace tube, cathode disc
In the annular region surrounded positioned at interior hot wall component and it is located at furnace tube interior lower end Middle face, parts to be processed is located at negative electrode
On disk and in the annular region that interior hot wall component surrounds；Stratie is circumferentially evenly arranged in furnace tube inwall
On, the cylindrical structure of furnace tube inwall, stratie is located on the outside of interior hot wall component and corresponding with interior hot wall component；
Tracheae includes high pressure draught air inlet pipe, high pressure draught blast pipe；
Water clad is located at furnace tube upper end on body of heater, and embedded O-ring seal is located at water clad and furnace tube upper end on body of heater
Between, wind scooper is located at below cathode disc and is located at stratie side-lower, and blast fan is located in wind scooper and position
Directly over three phase electric machine, water bag is located at furnace tube lower end under body of heater, and embedded O-ring seal is located at water bag and furnace tube under body of heater
Between lower end；Three phase electric machine is located under body of heater immediately below water bag, and bushing is arranged under body of heater in the middle part of water bag, on motor stationary bushing
Lower both ends difference connecting bushing lower end and three phase electric machine upper end, shaft coupling is located in motor stationary bushing and electricity is fixed in one end
Machine stationary bushing upper end；Fan shaft lower end is connected on three phase electric machine, and fan shaft top axial sequentially passes through shaft coupling, electricity upwards
Machine stationary bushing, bushing, the axial centre of blast fan, fan shaft upper end stretch out blast fan and in wind scoopers upwards；
Resistance heating electrodes fairlead is arranged on vacuum furnace body outer wall and with being connected inside furnace tube, resistance heating
Thermocouple fairlead is arranged on vacuum furnace body outer wall and with being connected inside furnace tube；Resistance heating electrodes fairlead and electricity
Resistance heating thermocouple fairlead is located at vacuum furnace body both sides respectively.
In the above-mentioned technical solutions, it is correspondingly arranged resistance heating member on the outside of any interior hot wall in one group in hot wall component
Part；High pressure draught air inlet pipe and high pressure draught blast pipe are provided with any interior hot wall in one group in hot wall component；One group
Any interior hot wall in interior hot wall component can be completed to heat, freeze double-direction control function.
In the above-mentioned technical solutions, the material of interior hot wall is stainless steel or carbon steel, and the heating-up temperature of interior hot wall is less than or waited
In 600 DEG C.
In the above-mentioned technical solutions, interior hot wall is in hollow structure, high pressure draught air inlet pipe and the equal position of high pressure draught blast pipe
In in interior hot wall, wind isolation board is welded in interior hot wall and between high pressure draught air inlet pipe and high pressure draught blast pipe, high pressure
Air-flow air inlet pipe and high pressure draught blast pipe are respectively arranged at the both ends in interior hot wall；High pressure draught air inlet pipe and high pressure draught row
The lower end of tracheae is located in interior hot wall, upper end stretches out embedded O-ring seal water clad from body of heater and extends to vacuum upwards successively
On the outside of body of heater, the air inlet of high pressure draught air inlet pipe connects with vortex fan, the exhaust outlet of high pressure draught blast pipe and big gas phase
Connection.
In the above-mentioned technical solutions, thermocouple set is located at interior hot wall outer wall, and thermocouple is inserted in thermocouple set.
In the above-mentioned technical solutions, in addition to air-cooled anode assembly.
In order to realize second purpose of the invention described above, the technical scheme is that：In described glow ion nitriding
The application method of hot wall type ion nitriding, it is characterised in that：Comprise the following steps：
Step 1：Hot wall component in installation, water clad on the body of heater of ion nitriding furnace is opened, in the furnace tube of vacuum furnace body
Inside axially overlap and place hot wall component in three or more interior hot walls compositions, interior hot wall component covers whole nitriding work after placing
Make area；Thermocouple is installed, thermocouple is directly inserted into the thermocouple set of interior hot wall；
Step 2：Tracheae is installed, the upper end of the high pressure draught air inlet pipe of interior hot wall and high pressure draught blast pipe is upwardly extended
To outside vacuum furnace body, high pressure draught air inlet pipe air inlet is connected with the vortex fan outside vacuum furnace body, high pressure draught
Blast pipe exhaust outlet communicates with air；
Step 3：Parts to be processed is placed, parts to be processed is placed on cathode disc, then furnace tube is sling and covered on
Water is wrapped under body of heater；Parts to be processed is all covered inside vacuum furnace body；
Step 4：Implement glow discharge nitriding technique, start vavuum pump, start to vacuumize, start resistance heating journey after meeting condition
Sequence and glow discharge nitriding program, ion nitriding furnace are started working；During resistance heating, stratie adds in the outside of interior hot wall
Heat, heat are conducted to parts to be processed by interior hot wall, and the temperature of parts to be processed is raised；It is to be added during glow discharge nitriding
Work part is heated by Ions Bombardment mode；
Step 5：Interior hot wall adjusts parts to be processed partly or wholly temperature, by the thermocouple direct measurement stove of installation
Temperature variations, when thermocouple detects parts to be processed partly or wholly temperature is equal to design temperature when, stop to be added
Work parts locally or overall respective external resistance heating, while automatic start vortex fan, are flowed into by the high pressure gas of interior hot wall
Tracheae is passed through high pressure draught, make to cool rapidly with the interior hot wall of parts to be processed partly or wholly corresponding interior hot wall component,
And parts to be processed partly or wholly fast cooling is made by thermaltransmission mode, adjust parts to be processed partly or wholly temperature；
Step 6：It is carried out continuously glow discharge nitriding technique, parts to be processed is when partly or wholly temperature is less than design temperature, from
Dynamic to close vortex fan, starting parts to be processed, partly or wholly outside corresponding resistance heating program continues resistance and added
Heat, Fan Regulation temperature is automatically turned on when being heated to design temperature, interior hot wall is always held at design temperature all the time, until treating
Part glow discharge nitriding is processed to complete.
In the above-mentioned technical solutions, the heating-up temperature of interior hot wall is less than or equal to 600 DEG C.
The invention has the advantages that：
(1) bulk temperature in regulating stove body, reduce that workspace is inside and outside and upper and lower temperature difference, improve in glow discharge nitriding technical process
The temperature homogeneity of vacuum furnace body inner heating zones, part to be processed is set to complete nitriding process in uniform temperature field, obtain
To uniform nitriding layer hardness and nitrided case depth；
(2) increase on the basis of the common additional hot ion nitriding furnace of electricity, between stratie and nitridation part
Add the interior hot wall component with separately adjustable function；Interior hot wall component is axially stacking by three or more interior hot walls, common to complete
Bulk temperature regulatory function in body of heater；Each independent interior hot wall has independent automatic heating (section resistance heating member
Part heats) and independent air blast cooling function (hot wall is passed through high pressure draught cooling in the section), it can independently accomplish that interior hot wall adds
Hot and interior hot wall refrigeration, has active double-direction control regulatory function；Being capable of three sections or multistage in separately adjustable interior hot wall stove automatically
The temperature of interior hot wall, the temperature for the upper, middle and lower section for automatically adjusting part in area to be machined in ion nitriding furnace body is realized, so as to
Reaching makes the uniform purpose of nitriding Part temperature in stove；
(3) the temperature highest of interior hot wall can be heated to 600 DEG C, ensure being smoothed out for nitriding process.
Brief description of the drawings
Fig. 1 is an interior hot-wall structure schematic diagram of the invention.
Fig. 2 is schematic structural view of the invention.
1- furnace tubes in figure, 2- cathode discs, 3- straties, hot wall in 4-, hot wall component in 5-, 6- to be processed zero
Part, water clad on 7- bodies of heater, 8- embed O-ring seal, 9- wind scoopers, 10- blast fans, 11- three phase electric machines, under 12- bodies of heater
Water bag, 13- bushings, 14- motor stationary bushings, 15- fan shafts, 16- shaft couplings, 17- resistance heating electrodes fairleads, 18- electricity
Resistance heating thermocouple fairlead, 19- wind isolation boards, 20- high pressure draught air inlet pipe, 21- high pressure draught blast pipes, 22- tracheaes, 23-
Air-cooled anode assembly.
Embodiment
The performance that the invention will now be described in detail with reference to the accompanying drawings, but they do not form limitation of the invention, only
It is for example.Make advantages of the present invention more clear by explanation simultaneously and be readily appreciated that.
Understood refering to accompanying drawing：Hot wall type ion nitriding in glow ion nitriding, including furnace tube 1, cathode disc 2,
Stratie 3, it is characterised in that：Also include interior hot wall 4；Interior hot wall 4 in a ring, interior hot wall 4 is located in furnace tube 1, under
End flushes with the lower end of cathode disc 2, and the interior internal diameter of hot wall 4 is more than the external diameter of cathode disc 2, and three or more axially overlap the interior heat of placement
Wall 4 forms hot wall component 5 in one group, and interior hot wall component 5 is located in furnace tube 1, and cathode disc 2 is located at what interior hot wall component 5 surrounded
In annular region and it is located at the interior lower end Middle face of furnace tube 1, parts to be processed 6 is located on cathode disc 2 and is located at interior hot wall
In the annular region that component 5 surrounds；Stratie 3 is circumferentially evenly arranged on the inwall of furnace tube 1, the inwall of furnace tube 1
Cylindrical structure, stratie 3 are on the outside of interior hot wall component 5 and corresponding with interior hot wall component 5；Tracheae 22 includes
High pressure draught air inlet pipe 20, high pressure draught blast pipe 21；
Water clad 7 is located at the upper end of furnace tube 1 on body of heater, and embedded O-ring seal 8 is located at water clad 7 and furnace tube 1 on body of heater
Between upper end, wind scooper 9 is located at the lower section of cathode disc 2 and is located at the side-lower of stratie 3, and blast fan 10 is located at wind-guiding
In cover 9 and directly over three phase electric machine 11, water bag 12 is located at the lower end of furnace tube 1 under body of heater, and embedded O-ring seal 8 is located at stove
Under body between water bag 12 and the lower end of furnace tube 1；Three phase electric machine 11 is located under body of heater immediately below water bag 12, and bushing 13 is arranged at body of heater
The lower middle part of water bag 12, the upper and lower ends of the motor stationary bushing 14 difference lower end of connecting bushing 13 and the upper end of three phase electric machine 11, shaft coupling
16 in motor stationary bushing 14 and the upper end of motor stationary bushing 14 is fixed in one end；The lower end of fan shaft 15 is connected to three-phase
On motor 11, the top axial of fan shaft 15 sequentially passes through shaft coupling 16, motor stationary bushing 14, bushing 13, blast fan upwards
10 axial centre, the upper end of fan shaft 15 stretch out blast fan 10 and in wind scoopers 9 upwards；
Resistance heating electrodes fairlead 17 is arranged on vacuum furnace body outer wall and with being connected inside furnace tube 1, each interior
The corresponding two extractions terminals of hot wall 4；Resistance heating thermocouple fairlead 18 is arranged on vacuum furnace body outer wall and and furnace tube
It is connected inside 1, each interior corresponding temperature thermocouple fairlead of hot wall 4；Resistance heating electrodes fairlead 17 and resistance add
Heat pipe-thermocouple fairlead 18 is located at vacuum furnace body both sides (as shown in Figure 2) respectively.
Any interior outside of hot wall 4 in one group in hot wall component 5 is correspondingly arranged stratie 3；Hot wall in one group
High pressure draught air inlet pipe 20 and high pressure draught blast pipe 21 are provided with any interior hot wall 4 in component 5；Hot wall group in one group
Any interior hot wall 4 in part 5 can complete heating, refrigeration double-direction control function.Realize hot wall individual conductive resistance heating in each
The heat of element is to parts to be processed.Realize by independent automatic heating (section stratie heating) and independent system
The temperature in hot wall region, makes parts to be processed one in cold means (hot wall is passed through high pressure draught cooling in the section) adjustment annular
Glow discharge nitriding technique processing is carried out under individual uniform environment, ensures that the case hardness of part and nitrided case depth are stable equal at one
In even scope.
The material of interior hot wall 4 is stainless steel or carbon steel, and the heating-up temperature of interior hot wall 4 is less than or equal to 600 DEG C.It is hot in guarantee
Wall can work at high temperature, complete as being heated automatically between stratie and parts to be processed or the heat catalysis that freezes
Work.
Interior hot wall 4 is in hollow structure, and interior hot wall is double-decker, inside and outside wall spacing 30-40 millimeters, high pressure draught air inlet pipe
20 and high pressure draught blast pipe 21 be respectively positioned in interior hot wall 4, wind isolation board 19 is welded in interior hot wall 4 and flowed into positioned at high pressure gas
Between the beeline of tracheae 20 and high pressure draught blast pipe 21, high pressure draught air inlet pipe 20 and high pressure draught blast pipe 21 are distinguished
The both ends being arranged in interior hot wall 4, high-pressure pipe and high-pressure exhaust pipe are all in interior hot wall and in interior hot wall displaypattern
Both ends, centre are separated with wind isolation board, ensure that high pressure draught must be after interior hot wall one week from high pressure after high-pressure pipe entrance
Blast pipe is discharged；I.e. high-pressure pipe and high-pressure exhaust pipe are located at the distalmost end of interior hot wall annulus expanded view, ensure high pressure respectively
Air-flow can annularly flow heat is taken away；The lower end of high pressure draught air inlet pipe 20 and high pressure draught blast pipe 21 is located at interior hot wall
In 4, the embedded water clad 7 from body of heater of O-ring seal 8 of stretching is extended on the outside of vacuum furnace body upwards successively for upper end, high pressure draught
The air inlet of air inlet pipe 20 connects with vortex fan, the exhaust outlet of high pressure draught blast pipe 21 is connected (as shown in Figure 1, Figure 2 with air
It is shown).The size of high pressure draught is according to the temperature automatic adjustment air quantity of setting, and often hot wall effluent stream passes through after can collecting in section
Exhaust outlet is unified to discharge, and this regulative mode makes interior hot wall be provided with active double-direction control regulatory function, can independently accomplish interior heat
Wall heats or the effect of refrigeration.
Thermocouple set is located at the interior outer wall of hot wall 4；Thermocouple is inserted in thermocouple set, and the installation of TC responds on interior hot wall
Fastest, specific installation site can determine according to actual conditions.
Also include air-cooled anode assembly 23.
Understood refering to accompanying drawing：The application method of hot wall type ion nitriding in described glow ion nitriding, it is special
Sign is：Comprise the following steps：
Step 1：Hot wall component in installation, water clad 7 on the body of heater of ion nitriding furnace is opened, in the furnace tube of vacuum furnace body
Axially overlapped in 1 and place three or more interior hot walls 4 and form interior hot wall component 5, interior hot wall component 5 covers after placing entirely to be oozed
Nitrogen workspace；Thermocouple is installed, thermocouple is directly inserted into the thermocouple set of interior hot wall 4；
Step 2：Install tracheae, by the upper end of the high pressure draught air inlet pipe 20 of interior hot wall 4 and high pressure draught blast pipe 21 to
On extend to outside vacuum furnace body, the air inlet of high pressure draught air inlet pipe 20 is connected with the vortex fan outside the vacuum furnace body,
The exhaust outlet of high pressure draught blast pipe 21 communicates with air；
Body of heater is lifted when interior the hot wall component and other fixtures of inside are all installed into an entirety, lifting
；
Step 3：Parts to be processed is placed, parts to be processed 6 is placed on cathode disc 2, furnace tube 1 is then sling into cover
Under body of heater on water bag 12；Parts to be processed 6 is all covered inside vacuum furnace body；
After connecting interior hot wall and external Fan pipeline according to above step, interior hot wall can be fixed by fixed support
On the upper water clad, parts to be processed is completed after only needing integrally to sling furnace tube during entering to come out of the stove later and enters to come out of the stove
Work；
Step 4：Implement glow discharge nitriding technique, start vavuum pump, start to vacuumize, start resistance heating journey after meeting condition
Sequence and glow discharge nitriding program, ion nitriding furnace are started working；During resistance heating, stratie 3 adds in the outside of interior hot wall 4
Heat, heat are conducted to parts to be processed 6 by interior hot wall 4, and the temperature of parts to be processed 6 is raised；During glow discharge nitriding, treat
Processing part 6 is heated by Ions Bombardment mode；
Step 5：Interior hot wall adjusts parts to be processed partly or wholly temperature, by the thermocouple direct measurement stove of installation
Temperature variations, when parts to be processed 6 when partly or wholly temperature is close or equal to design temperature it is (corresponding digital regulated
Device enters PID shaping modes, heating and the control of refrigeration control double loop, automatically adjusts the export ratio of heating and refrigeration, ensures
Nitriding Part temperature homogeneity in stove), stop the partly or wholly respective external resistance heating, while open automatically of parts to be processed 6
Dynamic vortex fan, is passed through high pressure draught by the high pressure draught air inlet pipe 20 of interior hot wall 4, makes local or whole with parts to be processed 6
The interior hot wall 4 of interior hot wall component 5 corresponding to body phase cools rapidly and makes parts to be processed 6 local or whole by thermaltransmission mode
Body fast cooling, adjust the partly or wholly temperature of parts to be processed 6；Make the temperature of interior hot wall with refrigeration modes regulation by heating
All the time it is constant in set temperature value scope；
Step 6：It is carried out continuously glow discharge nitriding technique, parts to be processed 6 is when partly or wholly temperature is less than design temperature, from
Dynamic to close vortex fan, starting parts to be processed 6, partly or wholly outside corresponding resistance heating program continues resistance and added
Heat, and reach and steady temperature is kept after design temperature, until the glow discharge nitriding of parts to be processed 6 is completed.
The heating-up temperature of interior hot wall 4 is less than or equal to 600 DEG C.Can be with according to the requirement of the concrete technology of part during use
Arbitrarily set different interior hot wall heating-up temperatures, ensure being smoothed out for nitriding process.
In step 5, interior hot wall regulation parts to be processed, can be by the temperature of hot wall in every section partly or wholly in temperature course
Degree needs to set according to technique, adjusts this section of regional temperature process and detects the zone temperatures by hot wall thermocouple in the section, passes through
Corresponding digital governer implements to heat and the refrigeration control PID regulation double loop way of outputs, in regulation in hot wall temperature control
Hot wall and the region all-the-time stable are in design temperature；It is hot in every section in hot wall type ion nitriding in glow ion nitriding
Wall has the digital governer corresponding with hot wall in this section to carry out PID regulation ((PID regulating) classical control theories
A kind of basic regulative mode of middle control system, it is a kind of linear regulation rule with ratio, integration and the differential action) and it is defeated
Go out control signal to adjust the size of vortex fan air quantity to frequency converter, by changing the output frequency of frequency converter, adjust exactly
The partly or wholly temperature of parts to be processed 6.
In order to more clearly illustrate hot wall type ion nitriding in glow ion nitriding of the present invention
And its application method compared with traditional glow ion nitriding furnace and its application method possessed by advantage, staff by this two
Kind technical scheme is contrasted, its comparing result such as following table：
As seen from the above table, hot wall type ion nitriding and its application method in glow ion nitriding of the present invention
Compared with traditional glow ion nitriding furnace and its application method, the nitriding layer hardness and thickness of institute's processed finished products are more uniform, tool
There is the function of heating and refrigeration double-direction control.
Other unaccounted parts belong to prior art.
Claims (8)
1. hot wall type ion nitriding in glow ion nitriding, including furnace tube (1), cathode disc (2), stratie
(3), it is characterised in that：Also include interior hot wall (4)；In a ring, interior hot wall (4) is located in furnace tube (1) interior hot wall (4), lower end
Flushed with cathode disc (2) lower end, interior hot wall (4) internal diameter is more than cathode disc (2) external diameter, and three or more axially overlap placement
Interior hot wall (4) forms hot wall component (5) in one group, and interior hot wall component (5) is located in furnace tube (1), and cathode disc (2) is located at interior heat
In the annular region that wall component (5) surrounds and it is located at furnace tube (1) interior lower end Middle face, parts to be processed (6) is located at negative electrode
On disk (2) and in the annular region that interior hot wall component (5) surrounds；Stratie (3) is circumferentially evenly arranged in stove
On cylinder (1) inwall, the cylindrical structure of furnace tube (1) inwall, stratie (3) be located on the outside of interior hot wall component (5) and
It is corresponding with interior hot wall component (5)；Tracheae (22) includes high pressure draught air inlet pipe (20), high pressure draught blast pipe (21)；
Water clad (7) is located at furnace tube (1) upper end on body of heater, and embedded O-ring seal (8) is located at water clad (7) and stove on body of heater
Between cylinder (1) upper end, wind scooper (9) is located at below cathode disc (2) and is located at stratie (3) side-lower, fan leaf
Wheel (10) is located in wind scooper (9) and directly over three phase electric machine (11), and water bag (12) is located under furnace tube (1) under body of heater
End, embedded O-ring seal (8) are located under body of heater between water bag (12) and furnace tube (1) lower end；Three phase electric machine (11) is located at body of heater
Immediately below lower water bag (12), bushing (13) is arranged under body of heater in the middle part of water bag (12), motor stationary bushing (14) upper and lower ends point
Other connecting bushing (13) lower end and three phase electric machine (11) upper end, shaft coupling (16) is located in motor stationary bushing (14) and one end
It is fixed on motor stationary bushing (14) upper end；Fan shaft (15) lower end is connected on three phase electric machine (11), fan shaft (15) upper end
Shaft coupling (16), motor stationary bushing (14), bushing (13), the axial centre of blast fan (10) are sequentially passed through axially upwards,
Fan shaft (15) upper end stretches out blast fan (10) and in wind scooper (9) upwards；
Resistance heating electrodes fairlead (17) is arranged on vacuum furnace body outer wall and with being connected inside furnace tube (1), resistance adds
Heat pipe-thermocouple fairlead (18) is arranged on vacuum furnace body outer wall and with being connected inside furnace tube (1)；Resistance heating electrodes draw
Portal (17) and resistance heating thermocouple fairlead (18) is located at vacuum furnace body both sides respectively.
2. hot wall type ion nitriding in glow ion nitriding according to claim 1, it is characterised in that：In one group
Stratie (3) is correspondingly arranged on the outside of any interior hot wall (4) in hot wall component (5)；In one group in hot wall component (5)
Any interior hot wall (4) in be provided with high pressure draught air inlet pipe (20) and high pressure draught blast pipe (21)；Hot wall group in one group
Any interior hot wall (4) in part (5) can complete heating, refrigeration double-direction control function.
3. hot wall type ion nitriding in glow ion nitriding according to claim 1 or 2, it is characterised in that：It is interior
The material of hot wall (4) is stainless steel or carbon steel, and the heating-up temperature of interior hot wall (4) is less than or equal to 600 DEG C.
4. hot wall type ion nitriding in glow ion nitriding according to claim 3, it is characterised in that：Interior hot wall
(4) it is in hollow structure, high pressure draught air inlet pipe (20) and high pressure draught blast pipe (21) are respectively positioned in interior hot wall (4), wind isolation board
(19) it is welded in interior hot wall (4) and between high pressure draught air inlet pipe (20) and high pressure draught blast pipe (21), high pressure gas
Flow into tracheae (20) and high pressure draught blast pipe (21) is respectively arranged at both ends in interior hot wall (4)；High pressure draught air inlet pipe
(20) and high pressure draught blast pipe (21) lower end be located in interior hot wall (4), embedded O-ring seal is stretched out in upper end upwards successively
(8) water clad (7) is extended on the outside of vacuum furnace body from body of heater, and the air inlet and vortex fan of high pressure draught air inlet pipe (20) connect
Connect, the exhaust outlet of high pressure draught blast pipe (21) is connected with air.
5. hot wall type ion nitriding in glow ion nitriding according to claim 4, it is characterised in that：Thermocouple
Set is located at interior hot wall (4) outer wall, and thermocouple is inserted in thermocouple set.
6. hot wall type ion nitriding in glow ion nitriding according to claim 5, it is characterised in that：Also include
Air-cooled anode assembly (23).
7. hot wall type vacuum ion-nitriding in the glow ion nitriding according to any one of claim 1 to 5 claim
The application method of stove, it is characterised in that：Comprise the following steps：
Step 1：Hot wall component in installation, water clad (7) on the body of heater of ion nitriding furnace are opened, in the furnace tube of vacuum furnace body
(1) axially overlapped in and place hot wall component (5) in three or more interior hot walls (4) compositions, interior hot wall component (5) is covered after placing
Cover whole nitriding workspace；Thermocouple is installed, thermocouple is directly inserted into the thermocouple set of interior hot wall (4)；
Step 2：Tracheae is installed, by the high pressure draught air inlet pipe (20) of interior hot wall (4) and the upper end of high pressure draught blast pipe (21)
Extend up to outside vacuum furnace body, high pressure draught air inlet pipe (20) air inlet connects with the vortex fan outside vacuum furnace body
Connect, high pressure draught blast pipe (21) exhaust outlet communicates with air；
Step 3：Parts to be processed is placed, parts to be processed (6) is placed on cathode disc (2), then sling furnace tube (1)
Cover under body of heater on water bag (12)；Parts to be processed (6) is all covered inside vacuum furnace body；
Step 4：Implement glow discharge nitriding technique, start vavuum pump, start to vacuumize, meet to start after condition resistance heating program and
Glow discharge nitriding program, ion nitriding furnace are started working；During resistance heating, stratie (3) adds in the outside of interior hot wall (4)
Heat, heat are conducted to parts to be processed (6) by interior hot wall (4), and the temperature of parts to be processed (6) is raised；Glow discharge nitriding
Cheng Zhong, parts to be processed (6) are heated by Ions Bombardment mode；
Step 5：Interior hot wall adjusts parts to be processed partly or wholly temperature, passes through the temperature in the thermocouple direct measurement stove of installation
Spend situation of change, when thermocouple detects parts to be processed (6) partly or wholly temperature is equal to design temperature when, stopping is to be processed
Part (6) partly or wholly respective external resistance heating, while automatic start vortex fan, passes through the high pressure gas of interior hot wall (4)
Flow into tracheae (20) and be passed through high pressure draught, make interior with parts to be processed (6) partly or wholly corresponding interior hot wall component (5)
Hot wall (4) cools rapidly and makes parts to be processed (6) partly or wholly fast cooling by thermaltransmission mode, adjusts to be processed
Part (6) partly or wholly temperature；
Step 6：It is carried out continuously glow discharge nitriding technique, parts to be processed (6) is when partly or wholly temperature is less than design temperature, automatically
Vortex fan is closed, starting parts to be processed (6), partly or wholly outside corresponding resistance heating program continues resistance and added
Heat, it is heated to automatic opening Fan Regulation temperature during design temperature, until parts to be processed (6) glow discharge nitriding is completed.
8. the application method of hot wall type ion nitriding in glow ion nitriding according to claim 7, its feature
It is：The heating-up temperature of interior hot wall (4) is less than or equal to 600 DEG C.
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| CN109972076A (en) * | 2017-12-28 | 2019-07-05 | 中核建中核燃料元件有限公司 | A kind of precision stainless steel tube surfaces ion Plasma Nitriding Treatment process |
| US10865473B2 (en) | 2018-01-03 | 2020-12-15 | Boe Technology Group Co., Ltd. | Mask plate and process for manufacturing the same |
| CN115612978A (en) * | 2022-10-25 | 2023-01-17 | 扬州大学 | Nitriding device for stainless steel marble |
| CN117968989A (en) * | 2024-04-02 | 2024-05-03 | 武汉武热研热处理科技有限公司 | Ion nitriding furnace fault detection device |
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