CN107359226A - A kind of single-photon source device of high emission speed, high collection efficiency - Google Patents

A kind of single-photon source device of high emission speed, high collection efficiency Download PDF

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Publication number
CN107359226A
CN107359226A CN201710764081.6A CN201710764081A CN107359226A CN 107359226 A CN107359226 A CN 107359226A CN 201710764081 A CN201710764081 A CN 201710764081A CN 107359226 A CN107359226 A CN 107359226A
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China
Prior art keywords
photon source
rod
source device
metallic film
collection efficiency
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CN201710764081.6A
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黄锋
李沫
陈飞良
张晖
李倩
张健
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Institute of Electronic Engineering of CAEP
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Institute of Electronic Engineering of CAEP
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/04Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction

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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
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Abstract

The invention discloses the single-photon source device of a kind of high emission speed, high collection efficiency, including:Substrate, metallic film, medium strip, metal nano-rod and single-photon source, in substrate, medium strip is deposited on metallic film deposit metal films;Metallic film and medium strip form medium load-bearing surface phasmon waveguide, and the medium load-bearing surface phasmon waveguide is used to collect the photon that single-photon source emits;Metal nano-rod is located at the inside of medium load-bearing surface phasmon waveguide, and single-photon source is between metal nano-rod and metallic film;Metallic film and metal nano-rod form gap phasmon micro-cavity structure, and the gap phasmon micro-cavity structure is used to form gap phasmon, to strengthen the emission rate of single-photon source.The advantage of the invention is that:The emission rate of single-photon source can greatly be strengthened, improve the collection efficiency of single photon, and can realize that the orientation of pattern in waveguide excites.The present invention has huge application value in fields such as quantum information, integrated photonic devices.

Description

A kind of single-photon source device of high emission speed, high collection efficiency
Technical field
The present invention relates to single-photon source technology, phasmon photonic propulsion, quantum information field, in particular to a kind of high emission The single-photon source device of speed, high collection efficiency.
Background technology
Single-photon source refers to that synchronization only launches the light source of a photon, and it has important work in quantum information field With, such as the distribution of quantum key, linear optics quantum calculation, quantum cryptography and quantum information processing etc..It is in addition, single Photon source also has significant application value in the field such as accurate measurement and biological fluorescent labelling imaging.Often it is used to produce single photon Material includes semiconductor-quantum-point, fluorescence molecule and diamond NV colour centers etc..Generally, single-photon source in free space spontaneous Rate of irradiation is relatively low, and launches single photon and do not have directionality, causes collection efficiency very low, and limiting their reality should With.
In order to improve the emission rate of single-photon source, increase it and launch the collection efficiency of single photon, strengthen single-photon source Quality, single-photon source can be placed in the micro-nano structure such as photonic crystal and medium microcavity.Based on Purcell effect, that is, pass through The electromagnetic field local density of state changed around single-photon source can strengthen its spontaneous emission rate, can utilize above-mentioned micro-nano structure Improve the quantum efficiency of single photon emission.It can also regulate and control the luminous direction of single-photon source by designing micro-nano structure, improve single The collection efficiency of photon source.But the Purcell enhancer of photonic crystal and medium microcavity increase single-photon source generally only has Tens times, it is impossible to fully meet application request.
The content of the invention
It is an object of the invention to the above-mentioned the deficiencies in the prior art of customer service, there is provided a kind of and medium load-bearing surface phasmon The integrated single-photon source device of waveguide, it is possible to increase the emission rate of single-photon source, and utilize medium load-bearing surface phasmon Waveguide high efficiency collects the photon that single-photon source is launched.
To achieve the above object, the technical solution adopted by the present invention is as follows:
A kind of single-photon source device of high emission speed, high collection efficiency, including:Substrate, metallic film, medium strip, metal are received Rice rod and single-photon source, in substrate, medium strip is deposited on metallic film the deposit metal films;The metallic film and Medium strip forms medium load-bearing surface phasmon waveguide;The metal nano-rod is located at the medium load-bearing surface phasmon The inside of waveguide, the length direction of metal nano-rod are consistent with the length direction of medium strip;The single-photon source is received positioned at metal Between rice rod and metallic film;The metallic film and metal nano-rod form gap phasmon micro-cavity structure.
The medium load-bearing surface phasmon waveguide, the photon emitted for collecting single-photon source.
The gap phasmon micro-cavity structure, for forming gap phasmon, improve the emission rate of single-photon source.
For above-mentioned single-photon source device architecture, wherein:
The material of the substrate is but is not limited to Si, SiO2Or Al2O3;The material of the metallic film include but is not limited to gold, Silver, platinum, aluminium or copper, the thickness of metallic film is 100 ~ 200nm.
The material of the medium strip includes but is not limited to SiO2, PMMA and Si3N4;The cross section of the medium strip is rectangle, Or it is semicircle, or half elliptic, or triangle.
The material of the metal nano-rod includes but is not limited to gold, silver, platinum, aluminium or copper, its section is circular, ellipse, Triangle, hexagon or rectangle;A diameter of 10 ~ 100nm of the metal nano-rod, length are 10 ~ 300nm.
The distance between the metal nano-rod and metallic film are 5 ~ 50nm.
The single-photon source is semiconductor-quantum-point, diamond colour center or fluorescence molecule, but it is several to be not limited to this;
The single-photon source device architecture applicable wavelengths are near ultraviolet, visible ray near infrared range.
During using the present invention, have the advantages that:
The single-photon source device because with metal nano-rod, it can form dipole photon under incident light irradiation so that The gap phasmon micro-cavity structure formed by metal nano-rod and metallic film forms gap plasmon resonance, has hundreds of Again to thousands of times of field enhancement effect;
Single-photon source is placed in the phasmon micro-cavity structure of gap, passes through the phase interaction of gap phasmon and single-photon source With using Purcell effect, the emission rate of single-photon source being effectively improved, solved in the prior art due to single-photon source The problem of relatively low practical application of emission rate is restricted;
Metal nano-rod and single-photon source are arranged in medium load-bearing surface phasmon waveguide so that medium load-bearing surface etc. The photon that can be launched from excimer waveguide with very high efficiency collection single-photon source;
Medium load-bearing surface phasmon waveguide is a kind of to can be used for integrated waveguiding structure, therefore monochromatic light disclosed by the invention Component device has huge application value in fields such as integrated photonic devices;
By changing position of the single-photon source in phasmon micro-cavity structure, make the light field in the phasmon micro-cavity structure of gap In asymmetric distribution, it can also realize that the light energy that different directions are collected into medium load-bearing surface phasmon waveguide is different, So as to realize asymmetric the exciting of medium load-bearing surface phasmon waveguide mode.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the overlooking the structure diagram of single-photon source device architecture in Fig. 1.
Fig. 3 is the left view structural representation of single-photon source device architecture in Fig. 1.
Fig. 4 is that the relation that the Purcell enhancers calculated value of the present invention changes with metal nano-rod length change is shown It is intended to.
Wherein, reference is:1 is substrate;2 be metallic film;3 be medium strip;4 be metal nano-rod;5 be single photon Source;6 be incident light.
Embodiment
For present disclosure, technical scheme and advantage is more clearly understood, below in conjunction with the accompanying drawings to the tool of the present invention Body embodiment elaborates.
Embodiment 1
As shown in accompanying drawing 1,2,3, the invention provides one kind to be based on gap phasmon and medium load-bearing surface phasmon ripple The high emission speed led, the single-photon source device of high collection efficiency, the single-photon source device include SiO2Substrate 1, medium carrying Surface plasmon waveguide, gap phasmon microcavity and quantum dot 5.
The gap phasmon microcavity is made up of metallic film 2 and metal nano-rod 4, for forming gap etc. from sharp Member;Wherein:Metallic film 2 is gold thin film, and metal nano-rod 4 is gold nanorods.
In the gap phasmon microcavity that quantum dot 5 is located at gold thin film 2 and gold nanorods 4 form;Medium load-bearing surface etc. Include gold thin film 2 and SiO from excimer waveguide2Medium strip 3, the photon launched for collecting quantum dot 5.Gold nanorods 4 and gold The distance between film 2 is 10nm, and quantum dot 5 is located at the centre of gap phasmon microcavity, the distance with the upper surface of gold thin film 2 For 5nm, a diameter of 45nm, SiO of gold nanorods 42The cross section length and width of medium strip 3 are 240nm, and the thickness of gold thin film 2 is 200nm。
The preparation method of the single-photon source device is as follows:
1)In SiO2Gold thin film 2 in substrate 1 by thermal evaporation or electron-beam evaporation thickness for 200nm;
2)Pass through thermal evaporation deposition 5nm thickness SiO in gold thin film 22Film;
3)In SiO2Spin coating quantum dot solution on film;
4)Pass through the thick SiO of thermal evaporation redeposition 5nm2Film;
5)Gold nanorods 4 are prepared by chemical method or micro-nano manufacturing method;
6)In step 1)To 4)Spin coating gold nanorods monodisperse liquor on the multilayer membrane sample of preparation;
7)Using the position of the adjustment gold nanorods 4 such as nano-machine hand or AFM, the upper of quantum dot 5 is located at Side;
8)SiO thick thermal evaporation deposition 230nm2Film;
9)SiO by photoetching and dry etching by total thickness for 240nm2Processing film into it is wide also be 240nm medium strip 3.
Fig. 4 be for launch wavelength be 680nm based on gap phasmon and medium load-bearing surface phasmon waveguide Single-photon source device calculate Purcell enhancers with gold nanorods length change relation, when the length of gold nanorods is At 100 nanometers, high Purcell enhancer reaches maximum for 3320 times, wherein quantum dot 5 launch optically coupling to medium Efficiency in load-bearing surface phasmon waveguide is 41.45%.By adjusting single-photon source in gold thin film/gold nanorods gap etc. From the position of excimer microcavity, it can also realize that the asymmetric of pattern excites in medium load-bearing surface phasmon waveguide.Optimization knot Fruit is that, when quantum dot is located at gold thin film/gold nanorods gap phasmon microcavity left end, waveguide or so both direction is collected into The energy ratio of light is 1:16.
Embodiment 2
A kind of high emission speed based on gap phasmon and medium load-bearing surface phasmon waveguide, high collection efficiency monochromatic light Component device, as shown in Figure 1, 2, 3, the single-photon source device include Si substrates 1, Ag films 2, Si3N4Medium strip 3, gold nanorods 4 and fluorescence molecule 5.
Ag films 2 and gold nanorods 4 form gap phasmon microcavity, for forming gap phasmon;Fluorescence molecule 5 In the gap phasmon microcavity formed positioned at Ag films 2 and gold nanorods 4;Ag films 2 and Si3N4Medium strip 3 forms medium and held Carry surface plasmon waveguide, the photon launched for collecting fluorescence molecule 5.
The distance between gold nanorods 4 and Ag films 2 are 10nm, and fluorescence molecule 5 is located in the phasmon microcavity of gap Between, the distance with the upper surface of Ag films 2 is 5nm, a diameter of 30nm, Si of gold nanorods3N4The cross section of medium strip 3 is long and wide It is 220nm, the thickness of Ag films 2 is 150nm.
By being calculated when gold nanorods length is 48nm, it is 3786 that high Purcell enhancer, which reaches maximum, What wherein fluorescence molecule 5 was launched is 43.02% optically coupling to the efficiency in medium load-bearing surface phasmon waveguide.
Above case study on implementation is only the preferred case of the present invention, and the interest field that the present invention is advocated is not limited to the implementation Case, any modification for not departing from the spirit and scope of the present invention, deformation should all belong to protection scope of the present invention.

Claims (10)

1. the single-photon source device of a kind of high emission speed, high collection efficiency, including:Substrate(1), metallic film(2), medium strip (3), metal nano-rod(4), single-photon source(5), the metallic film(2)It is deposited on substrate(1)On, medium strip(3)It is deposited on Metallic film(2)On;The metallic film(2)And medium strip(3)Form medium load-bearing surface phasmon waveguide, the medium The waveguide of load-bearing surface phasmon is used to collect the photon that single-photon source emits;The metal nano-rod(4)Positioned at described Inside medium load-bearing surface phasmon waveguide, metal nano-rod(4)Length direction and medium strip(3)Length direction one Cause;The single-photon source(5)Positioned at metal nano-rod(4)And metallic film(2)Between;The metallic film(2)Received with metal Rice rod(4)Gap phasmon micro-cavity structure is formed, the gap phasmon micro-cavity structure is used to form gap phasmon, To strengthen the emission rate of single-photon source.
2. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Substrate(1)Material be Si, or SiO2, or Al2O3
3. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Metallic film(2)Material be gold, or silver, or platinum, or aluminium, or copper;The metallic film(2)Thickness be 100 ~ 200nm.
4. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Medium strip(3)Material be SiO2, or PMMA, or Si3N4;The medium strip(3)Cross section be rectangle, it is or semicircle, or half Ellipse, or triangle.
5. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Metal nano-rod(4)Material be gold, or silver, or platinum, or aluminium, or copper.
6. the single-photon source device of high emission speed according to claim 5, high collection efficiency, it is characterised in that:It is described Metal nano-rod(4)Section be circle, or ellipse, or triangle, or hexagon, or rectangle.
7. the single-photon source device of the high emission speed, high collection efficiency according to claim 5 or 6, it is characterised in that:Institute State metal nano-rod(4)A diameter of 10 ~ 100nm, length is 10 ~ 300nm.
8. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Metal nano-rod(4)With metallic film(2)The distance between be 5 ~ 50nm.
9. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Single-photon source(5)For semiconductor-quantum-point, or diamond colour center, or fluorescence molecule.
10. the single-photon source device of high emission speed according to claim 1, high collection efficiency, it is characterised in that:It is described Single-photon source device architecture applicable wavelengths are near ultraviolet, visible ray near infrared range.
CN201710764081.6A 2017-08-30 2017-08-30 A kind of single-photon source device of high emission speed, high collection efficiency Pending CN107359226A (en)

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CN107919604A (en) * 2017-12-20 2018-04-17 中国工程物理研究院电子工程研究所 Day blind ultraviolet single-photon source and preparation method thereof
CN108365517A (en) * 2018-01-03 2018-08-03 中山大学 The preparation method of dual-color single photon source structure and the structure of preparation
CN109540858A (en) * 2018-11-26 2019-03-29 中国科学技术大学 The measurement method and system of carrier concentration
CN110018534A (en) * 2019-04-19 2019-07-16 国家纳米科学中心 A kind of phasmon nano-cavity and the preparation method and application thereof generating biexction
CN111029446A (en) * 2019-12-12 2020-04-17 电子科技大学 Quantum dot single photon source and preparation method thereof
CN112038882A (en) * 2020-08-21 2020-12-04 北京大学 Integrated structure of single photon emitter and metal waveguide, preparation method thereof and quantum loop
CN112928452A (en) * 2021-01-27 2021-06-08 南开大学 Wideband spontaneous radiation enhanced tetramer metal nano antenna structure and manufacturing method and application thereof

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Cited By (11)

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Publication number Priority date Publication date Assignee Title
CN107919604A (en) * 2017-12-20 2018-04-17 中国工程物理研究院电子工程研究所 Day blind ultraviolet single-photon source and preparation method thereof
CN107919604B (en) * 2017-12-20 2023-06-16 中国工程物理研究院电子工程研究所 Solar blind ultraviolet single photon source and preparation method thereof
CN108365517A (en) * 2018-01-03 2018-08-03 中山大学 The preparation method of dual-color single photon source structure and the structure of preparation
CN108365517B (en) * 2018-01-03 2020-12-29 中山大学 Preparation method of bicolor single photon source structure and prepared structure
CN109540858A (en) * 2018-11-26 2019-03-29 中国科学技术大学 The measurement method and system of carrier concentration
CN110018534A (en) * 2019-04-19 2019-07-16 国家纳米科学中心 A kind of phasmon nano-cavity and the preparation method and application thereof generating biexction
CN111029446A (en) * 2019-12-12 2020-04-17 电子科技大学 Quantum dot single photon source and preparation method thereof
CN111029446B (en) * 2019-12-12 2022-05-27 电子科技大学 Quantum dot single photon source and preparation method thereof
CN112038882A (en) * 2020-08-21 2020-12-04 北京大学 Integrated structure of single photon emitter and metal waveguide, preparation method thereof and quantum loop
CN112928452A (en) * 2021-01-27 2021-06-08 南开大学 Wideband spontaneous radiation enhanced tetramer metal nano antenna structure and manufacturing method and application thereof
CN112928452B (en) * 2021-01-27 2022-04-22 南开大学 Wideband spontaneous radiation enhanced tetramer metal nano antenna structure and manufacturing method and application thereof

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Application publication date: 20171117