CN107355681A - A kind of feeder and air supply method for the calibration of multiple working medium gas micro - Google Patents
A kind of feeder and air supply method for the calibration of multiple working medium gas micro Download PDFInfo
- Publication number
- CN107355681A CN107355681A CN201710729353.9A CN201710729353A CN107355681A CN 107355681 A CN107355681 A CN 107355681A CN 201710729353 A CN201710729353 A CN 201710729353A CN 107355681 A CN107355681 A CN 107355681A
- Authority
- CN
- China
- Prior art keywords
- pressure
- gas
- calibration
- working medium
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D3/00—Arrangements for supervising or controlling working operations
- F17D3/01—Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Control Of Fluid Pressure (AREA)
Abstract
The invention discloses a kind of feeder and air supply method for the calibration of multiple working medium gas micro, the gas storage system that the feeder is formed in parallel by multiple gas cylinders is used to provide a variety of calibration gas, using the teaching of the invention it is possible to provide the calibration gas being consistent with working medium real gas；The inlet and outlet pressure of calibration gas is ensured by electric circuit converter and voltage-stabilizing system so that the calibration gas of offer is consistent with Working medium gas actual pressure, more conforms to actual condition, Working medium gas micrometeor is calibrated more accurate.The present invention can provide the calibration gas being consistent with working medium real gas, while the calibration gas pressure provided is consistent with Working medium gas actual pressure；Air supply method simple possible, it is easy to operate.
Description
Technical field
The present invention relates to supply technology field, and in particular to feeder and confession for the calibration of multiple working medium gas micro
Gas method.
Background technology
Five Platform communication satellites of China east, XY-2 manned space stations test satellite and LEO gravity gradient satellite have been opened
Begin to study and use dynamical system of the electric propulsion technology as satellite, realize the accurate control of the attitude of satellite and track.Pushed away in electricity
Working medium gas micrometeor accurately measures specific impulse and the power for being related to electric propulsion system during entering system development, so as to influence to navigate
Gross mass, power consumption, life-span, bearing capacity and financial cost of its device etc..At present, electric propulsion system Working medium gas micrometeor supplies
The calibration gas pressure and Working medium gas that device has the calibration gas of supply and working medium real gas is not inconsistent, pressure stabilizing chamber provides are real
The problems such as border pressure is inconsistent, the calibration gas purity of supply can not meet alignment requirements, in DFH-5 Platform Satellite development processes
In, thruster research institute and storage occur, to the calibration of Working medium gas micrometeor, deviation is larger shows for subsystem development unit
As；In XY-2 test satellite tasks, there is the problem of Working medium gas micrometeor is with thrust inverting flow deviation 20%,
The determination of electric propulsion system parameter and the development of follow-up scientific research model task are had a strong impact on.Analyzed through electric propulsion research institute former
Because after, Working medium gas micrometeor inaccuracy causes the problem, therefore is badly in need of developing the confession of electric propulsion system Working medium gas micrometeor
To device, for carrying out electric propulsion system Working medium gas micrometeor ACCURATE CALIBRATION research.
The content of the invention
In view of this, the invention provides a kind of feeder for the calibration of multiple working medium gas micro and supply side
Method, the feeder can provide the calibration gas being consistent with working medium real gas, while the calibration gas pressure and work provided
Matter gas actual pressure is consistent；Air supply method simple possible, it is easy to operate.
Specific embodiments of the present invention are as follows：
A kind of feeder for the calibration of multiple working medium gas micro, the feeder include gas storage system, electric circuit
Converter, voltage-stabilizing system, calibration system and evacuation unit；
The gas storage system is used to provide a variety of calibration gas；Electric circuit converter is used to ensure the gas into voltage-stabilizing system
Body reaches default inlet pressure；Voltage-stabilizing system is used for the calibration gas for providing up default outlet pressure；The evacuation unit
For being vacuumized to feeder；
Gas storage system is connected by pipeline with voltage-stabilizing system, electric circuit converter and inlet valve be located at gas storage system with
On pipeline between voltage-stabilizing system, voltage-stabilizing system is connected with calibration system, gas mass flow controller be located at voltage-stabilizing system with
On pipeline between calibration system, the evacuation unit is located on the pipeline of electric circuit converter and inlet valve.
Further, the gas storage system is formed in parallel by multiple gas cylinders by pipeline, and each gas cylinder connects
Connect an electric circuit converter.
Further, the voltage-stabilizing system includes pressure stabilizing chamber, pressure gauge and outlet valve, and pressure stabilizing chamber is connected with pressure gauge,
Outlet valve is located on the pipeline of pressure stabilizing chamber outlet；Each pressure stabilizing chamber and a kind of pressure gauge phase corresponding with pipeline of Working medium gas
Even.
Further, the pressure stabilizing chamber is provided with vent valve, passes through the gas pressure in Waste gate pressure stabilizing chamber；Exist simultaneously
Evacuate and filter is set on the pipeline between unit and valve, for when vent valve is opened, filtering to be miscellaneous into the gas of pipeline
Matter.
Further, the volume of the pressure stabilizing chamber designs according to preset pressure value, and pressure stabilizing chamber selects stainless steel, in pressure stabilizing chamber
Wall is handled to reduce deflation rate.
Further, the internal diameter of the pipeline and length are determined by the preset pressure of voltage-stabilizing system and the pumping speed of evacuation unit
It is fixed.
Further, when the calibration gas of supply is helium, helium mass spectrometer leak detector is connected on feeder to device
Hunted leak.
A kind of air supply method for the calibration of multiple working medium gas micro, concrete operation step are as follows：
Step 1: opening inlet valve and outlet valve, pumping unit is opened, the pressure in pressure stabilizing chamber is read using pressure gauge
Power, when pressure reaches 10Pa magnitudes, inlet valve and outlet valve are closed, be then shut off being evacuated unit；
Step 2: opening electric circuit converter, inlet valve is opened, when the calibration gas in pipeline reaches default entrance
During pressure, calibration gas enters pressure stabilizing chamber via electric circuit converter and inlet valve, treats that the pressure in pressure stabilizing chamber reaches default
Inlet pressure when, close inlet valve, observe and record the pressure value of pressure gauge, until pressure stabilizing chamber in pressure reach default
Outlet pressure and holding stabilization；
Step 3: opening outlet valve, gas mass flow controller is opened, adjusts the stream of gas mass flow controller
Value, the calibration gas of satisfaction requirement is set to be calibrated into calibration system；
Step 4: repeat step one~tri-, by opening electric circuit converter corresponding to different calibration gas and corresponding
Inlet valve and outlet valve, that is, obtain needing the calibration gas for calibrating different Working medium gas.
Further, the step 1 further comprises, when the pressure in pressure stabilizing chamber is more than default inlet pressure
Or more than local atmospheric pressure, open vent valve and directly deflate the gas reduced in pressure stabilizing chamber.
Further, when pressure stabilizing chamber pressure change be less than 1%, that is, reach steady pressure.
Beneficial effect：
1st, the gas storage system that the present invention is formed in parallel by multiple gas cylinders is used to provide a variety of calibration gas, using the teaching of the invention it is possible to provide
The calibration gas being consistent with working medium real gas；Meanwhile research is found, calibration gas pressure differs with Working medium gas actual pressure
Cause is larger to Working medium gas micrometeor calibration deviation, and ensures entering for calibration gas by electric circuit converter and voltage-stabilizing system
Outlet pressure so that the calibration gas of offer is consistent with Working medium gas actual pressure, more conforms to actual condition, to Working medium gas
Micrometeor calibration is more accurate.
2nd, the present invention is provided with vent valve and filter, is easy to adjust voltage stabilizing room pressure while prevents from polluting steam line,
Ensure that the calibration gas purity of supply meets alignment requirements.
3rd, the volume of pressure stabilizing chamber of the present invention designs according to preset pressure value, and pressure stabilizing chamber selects stainless steel, and voltage stabilizing chamber interior walls are entered
Row processing reduces deflation rate.
4th, pressure stabilizing chamber of the present invention meets that pressure change is less than 1%, can when reaching default outlet pressure and keeping stable
Ensure the stability of gas mass flow controller inlet pressure.
Brief description of the drawings
Fig. 1 is overall structure diagram of the present invention.
Wherein, 1- gas cylinders I, 2- gas cylinders II, 3- gas cylinders III, 4- gas cylinders IV, 5- gas cylinders V,
6- circuit converters I, 7- circuit converters II, 8- circuit converters III, 9- filters, 10- inlet valves I, 11- inlet valves
II, 12- inlet valve III, 13- pressure gauges I, 14- pressure gauges II, 15- pressure gauges III, 16- pressure stabilizing chambers I, 17- pressure stabilizing chambers II,
18- pressure stabilizing chambers III, 19- vent valves I, 20- outlet valves I, 21- vent valves II, 22- outlet valves II, 23- vent valves III, 24-
Outlet valve III, 25- gas mass flow controllers, 26- calibration systems, 27- is anti-to return valve, 28- valves V, 29- dry pumps, 30-
Valve IV.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The invention provides a kind of feeder for the calibration of multiple working medium gas micro, the feeder includes multiplexing
Matter gas circuit converting system, voltage-stabilizing system, calibration system 26 and evacuation unit.Multiple working medium gas circuit converting system include gas storage system and
Electric circuit converter.
Gas storage system is used to provide a variety of calibration gas；The gas that electric circuit converter is used to ensure into voltage-stabilizing system reaches
To default inlet pressure；Voltage-stabilizing system is used for the calibration gas for providing up default outlet pressure；Unit is evacuated to be used for supplying
Device of air vacuumizes.
Gas storage system is connected by pipeline with voltage-stabilizing system, electric circuit converter and inlet valve be located at gas storage system with
On pipeline between voltage-stabilizing system, voltage-stabilizing system is connected with calibration system 26, and gas mass flow controller 25 is located at voltage stabilizing system
On pipeline between system and calibration system 26, evacuate unit and be located on the pipeline of electric circuit converter and inlet valve.Pipeline
Internal diameter and length are determined by the preset pressure of voltage-stabilizing system and the pumping speed of evacuation unit.
Gas storage system is formed in parallel by multiple gas cylinders by pipeline, and each gas cylinder is all connected with an electric circuit and turned
Parallel operation, as shown in figure 1, gas cylinder I 1, gas cylinder II 2, gas cylinder III 3, gas cylinder IV 4, gas cylinder V 5 are distinguished
For providing Xe, Kr, He, Ar, N2Five kinds of high-purity gas, the series circuit converter I 6 of gas cylinder I 1, gas cylinder II 2 are connected
Circuit converter II 7, gas cylinder III 3, gas cylinder IV 4 and the parallel connection of gas cylinder V 5 are gone here and there with circuit converter III 8 simultaneously
Connection.He、Ar、N2Three kinds of gas required precisions are not high, can share an outlet pipe and be connected with circuit converter III 8.
Voltage-stabilizing system includes pressure stabilizing chamber, pressure gauge and outlet valve, and pressure stabilizing chamber is connected with pressure gauge, and outlet valve is located at surely
On the pipeline of pressure chamber outlet；Each pressure stabilizing chamber and pressure gauge are corresponding with a kind of pipeline of Working medium gas to be connected.Pressure stabilizing chamber is selected
Stainless steel, voltage stabilizing chamber interior walls are handled to reduce deflation rate.The volume of pressure stabilizing chamber designs according to preset pressure value, pressure stabilizing chamber
When pressure change is less than 1%, that is, reach steady pressure, such as following formula：
In formula, VwThe minimum volume of pressure stabilizing chamber is represented, V represents the volume of Working medium gas constant volume chamber, and Δ P represents constant volume chamber
Pressure, P represent the inlet pressure of pressure stabilizing chamber.
As shown in figure 1, pressure stabilizing chamber I 16 is connected with pressure gauge I 13, the pipeline of outlet is provided with outlet valve I 20；Pressure stabilizing chamber
II 17 connect with pressure gauge II 14, and the pipeline of outlet is provided with outlet valve II 22；Pressure stabilizing chamber III 18 is connected with pressure gauge III 15,
The pipeline of outlet is provided with outlet valve III 24.High-grade pressure gauge is employed, accurately measures pressure stabilizing chamber pressure change.
In order to facilitate the pressure in regulation pressure stabilizing chamber, pressure stabilizing chamber sets vent valve, passes through the gas in Waste gate pressure stabilizing chamber
Body pressure, as shown in figure 1, pressure stabilizing chamber I 16 is connected with vent valve I 19, pressure stabilizing chamber II 17 is connected with vent valve II 21, pressure stabilizing chamber III
18 connect with vent valve III 23.
Simultaneously to prevent from polluting steam line, ensure that the calibration gas purity of supply meets alignment requirements, in pressure stabilizing chamber
Filter is set on inlet duct, for when vent valve is opened, filtering to enter the gaseous impurity of pipeline, such as Fig. 1 circuit conversions
Device I 6, circuit converter II 7 are connected with after the parallel connection of circuit converter III 8 by being connected filter 9 with voltage-stabilizing system, and in voltage stabilizing
Inlet porting valve I 10 on the inlet duct of room I 16, the inlet porting valve II 11 on the inlet duct of pressure stabilizing chamber II 17,
Inlet porting valve III 12 on the inlet duct of pressure stabilizing chamber III 18.
Preferably, when the calibration gas of supply is helium, connection helium mass spectrometer leak detector enters to device on feeder
Row leak detection.
Evacuate unit and employ dry pump 29 and the anti-air suction mode for returning the linkage of valve 27, the anti-valve 29 that returns is used to prevent dry pump from returning oil
Or suck-back, pumping unit can be eliminated and polluted to caused by pipeline and pressure stabilizing chamber, improve supply purity.As shown in figure 1, dry pump 29
In connecting valve V 28 and the anti-outlet conduit for returning valve 27 while gas system, on the pipeline that evacuation unit is connected with inlet valve
Provided with valve IV 30, valve IV 30 is in parallel with filter 9.
All inlet valves, outlet valve and valve V 28, valve IV 30 select electromagnet cut off valve, for connect or every
Body of dying passes in and out.
Concrete operation step is as follows：
Step 1: open inlet valve I 10, inlet valve II 11, inlet valve III 12, valve IV 30, valve V 28, anti-
Valve 27 and outlet valve I 20, outlet valve II 22 and outlet valve III 24 are returned, dry pump 29 is opened, is read respectively using pressure gauge
Pressure in corresponding pressure stabilizing chamber, when pressure reaches 10Pa magnitudes, close inlet valve I 10, inlet valve II 11, inlet valve
III 12, valve IV 30, valve V 28, it is anti-return valve 27 and outlet valve I 20, outlet valve II 22 and outlet valve III 24, then
Close dry pump 29；When the pressure in pressure stabilizing chamber is more than default inlet pressure or more than local atmospheric pressure, vent valve is opened
Directly deflation reduces the gas in pressure stabilizing chamber；
Step 2: opening electric circuit converter I 6, inlet valve I 10 is opened, when the calibration gas in pipeline reaches default
Inlet pressure when, calibration gas via electric circuit converter I 6, filter 9 and inlet valve I 10 enter pressure stabilizing chamber I 16, treat
When pressure in pressure stabilizing chamber I 16 reaches default inlet pressure, inlet valve I 10 is closed, observes and records the pressure of pressure gauge I 13
Force value, until pressure reaches default outlet pressure and keeps stable in pressure stabilizing chamber I 16；Malleation is remained in pressure stabilizing chamber I 16
State, when the pressure change of pressure stabilizing chamber I 16 is less than 1%, that is, reach steady pressure, generally, inlet pressure for (0.2~
0.5) MPa, outlet pressure are (100Pa-0.2MPa)；
Step 3: opening outlet valve I 20, gas mass flow controller 25, regulation gas mass flow control are opened
The flow value of device 25, the calibration gas of satisfaction requirement is set to be calibrated into calibration system 26；
Step 4: repeat step one~tri-, by opening electric circuit converter corresponding to different calibration gas and corresponding
Inlet valve and outlet valve, i.e. circuit converter II 7 or circuit converter III 8 replace electric circuit converter I 16, inlet valve
Door II 11 or inlet valve III 12 replace inlet valve I 10, and outlet valve II 22 or outlet valve III 24 replace outlet valve
Door I 20, pressure gauge II 14 or pressure gauge III 15 replace pressure gauge I 13, and pressure stabilizing chamber II 17 or pressure stabilizing chamber III 18 replace voltage stabilizing
Room I 16, finally give the calibration gas for needing to calibrate different Working medium gas.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., it should be included in the present invention's
Within protection domain.
Claims (10)
1. a kind of feeder for the calibration of multiple working medium gas micro, it is characterised in that the feeder includes gas storage system
System, electric circuit converter, voltage-stabilizing system, calibration system and evacuation unit；
The gas storage system is used to provide a variety of calibration gas；The gas that electric circuit converter is used to ensure into voltage-stabilizing system reaches
To default inlet pressure；Voltage-stabilizing system is used for the calibration gas for providing up default outlet pressure；The evacuation unit is used for
Feeder is vacuumized；
Gas storage system is connected by pipeline with voltage-stabilizing system, and electric circuit converter and inlet valve are located at gas storage system and voltage stabilizing
On pipeline between system, voltage-stabilizing system is connected with calibration system, and gas mass flow controller is located at voltage-stabilizing system and calibration
On pipeline between system, the evacuation unit is located on the pipeline of electric circuit converter and inlet valve.
2. the feeder for the calibration of multiple working medium gas micro as claimed in claim 1, it is characterised in that the gas storage
System is formed in parallel by multiple gas cylinders by pipeline, and each gas cylinder is all connected with an electric circuit converter.
3. the feeder for the calibration of multiple working medium gas micro as claimed in claim 1, it is characterised in that the voltage stabilizing
System includes pressure stabilizing chamber, pressure gauge and outlet valve, and pressure stabilizing chamber is connected with pressure gauge, and outlet valve is located at the pipe of pressure stabilizing chamber outlet
On road；Each pressure stabilizing chamber and pressure gauge are corresponding with a kind of pipeline of Working medium gas to be connected.
4. the feeder for the calibration of multiple working medium gas micro as claimed in claim 3, it is characterised in that the voltage stabilizing
Room is provided with vent valve, passes through the gas pressure in Waste gate pressure stabilizing chamber；Evacuating the pipeline between unit and valve simultaneously
Upper setting filter, for when vent valve is opened, filtering to enter the gaseous impurity of pipeline.
5. the feeder for the calibration of multiple working medium gas micro as claimed in claim 3, it is characterised in that the voltage stabilizing
The volume of room is designed according to preset pressure value, and pressure stabilizing chamber selects stainless steel, and voltage stabilizing chamber interior walls are handled to reduce deflation rate.
6. the feeder for the calibration of multiple working medium gas micro as claimed in claim 1, it is characterised in that the pipeline
Internal diameter and length by voltage-stabilizing system preset pressure and evacuate unit pumping speed determine.
7. the feeder for the calibration of multiple working medium gas micro as claimed in claim 1, it is characterised in that when supply
When calibration gas is helium, connection helium mass spectrometer leak detector is hunted leak to device on feeder.
8. a kind of air supply method for the calibration of multiple working medium gas micro, it is characterised in that using as claimed in claim 3
Feeder, concrete operation step are as follows：
Step 1: opening inlet valve and outlet valve, pumping unit is opened, the pressure in pressure stabilizing chamber is read using pressure gauge,
When pressure reaches 10Pa magnitudes, inlet valve and outlet valve are closed, is then shut off being evacuated unit；
Step 2: opening electric circuit converter, inlet valve is opened, when the calibration gas in pipeline reaches default inlet pressure
When, calibration gas enters pressure stabilizing chamber via electric circuit converter and inlet valve, treat the pressure in pressure stabilizing chamber reach it is default enter
During mouth pressure, inlet valve is closed, observes and records the pressure value of pressure gauge, until pressure reaches default outlet in pressure stabilizing chamber
Pressure and holding stabilization；
Step 3: opening outlet valve, gas mass flow controller is opened, adjusts the flow of gas mass flow controller
Value, the calibration gas of satisfaction requirement is set to be calibrated into calibration system；
Step 4: repeat step one~tri-, by opening electric circuit converter corresponding to different calibration gas and corresponding entrance
Valve and outlet valve, that is, obtain needing the calibration gas for calibrating different Working medium gas.
9. the air supply method for the calibration of multiple working medium gas micro as claimed in claim 7, it is characterised in that its feature exists
In the step 1 further comprises, when the pressure in pressure stabilizing chamber is more than default inlet pressure or big more than local
Air pressure, open vent valve directly deflate reduce pressure stabilizing chamber in gas.
10. the air supply method for the calibration of multiple working medium gas micro as claimed in claim 7, it is characterised in that work as voltage stabilizing
Chamber pressure change is less than 1%, that is, reaches steady pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710729353.9A CN107355681B (en) | 2017-08-23 | 2017-08-23 | A kind of feeder and air supply method for the calibration of multiple working medium gas micro |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710729353.9A CN107355681B (en) | 2017-08-23 | 2017-08-23 | A kind of feeder and air supply method for the calibration of multiple working medium gas micro |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107355681A true CN107355681A (en) | 2017-11-17 |
| CN107355681B CN107355681B (en) | 2019-09-10 |
Family
ID=60289098
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710729353.9A Active CN107355681B (en) | 2017-08-23 | 2017-08-23 | A kind of feeder and air supply method for the calibration of multiple working medium gas micro |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107355681B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111141458A (en) * | 2019-12-25 | 2020-05-12 | 兰州空间技术物理研究所 | Helium recovery device and recovery method for leak detection of high-pressure gas cylinder |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2593029Y (en) * | 2002-12-10 | 2003-12-17 | 北京晨光维中能源技术有限责任公司 | High-pressure gas multiple-pressure stepped output apparatus |
| CN2733315Y (en) * | 2004-09-22 | 2005-10-12 | 陈淮新 | Coal mine safety monitor sensor calibration apparatus |
| CN101419088A (en) * | 2008-11-28 | 2009-04-29 | 沈阳黎明航空发动机(集团)有限责任公司 | Calibration device for sonic nozzle gas flowmeter by positive-pressure method and application method |
| CN202075022U (en) * | 2011-04-22 | 2011-12-14 | 中国石油天然气股份有限公司 | On-line real-flow verification device for small natural gas flow meter |
| CN102538916A (en) * | 2012-02-06 | 2012-07-04 | 江苏东方航天校准检测有限公司 | Portable gas micro-flow calibration system and method thereof |
| CN102928172A (en) * | 2012-10-11 | 2013-02-13 | 卢耀文 | System and method capable of extending lower limit of gas micro-flow calibration to 10<-14> Pam<3>/s |
| CN103003766A (en) * | 2010-07-30 | 2013-03-27 | 株式会社富士金 | Calibration method and flow-rate measurement method for flow-rate controller of gas supplying apparatus |
| CN203363652U (en) * | 2013-05-15 | 2013-12-25 | 中国科学院等离子体物理研究所 | Quantitative gas supply system |
| CN103791985A (en) * | 2014-01-16 | 2014-05-14 | 宁波创盛仪表有限公司 | Static state standard cubic meter calibration device and calibration method of static state standard cubic meter calibration device |
| CN104236816A (en) * | 2014-09-04 | 2014-12-24 | 兰州空间技术物理研究所 | On-line calibration device and method for leakage detection instrument |
| CN106290744A (en) * | 2016-10-19 | 2017-01-04 | 舟山市质量技术监督检测研究院 | Exhaust analyzer calibrating installation |
-
2017
- 2017-08-23 CN CN201710729353.9A patent/CN107355681B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2593029Y (en) * | 2002-12-10 | 2003-12-17 | 北京晨光维中能源技术有限责任公司 | High-pressure gas multiple-pressure stepped output apparatus |
| CN2733315Y (en) * | 2004-09-22 | 2005-10-12 | 陈淮新 | Coal mine safety monitor sensor calibration apparatus |
| CN101419088A (en) * | 2008-11-28 | 2009-04-29 | 沈阳黎明航空发动机(集团)有限责任公司 | Calibration device for sonic nozzle gas flowmeter by positive-pressure method and application method |
| CN103003766A (en) * | 2010-07-30 | 2013-03-27 | 株式会社富士金 | Calibration method and flow-rate measurement method for flow-rate controller of gas supplying apparatus |
| CN202075022U (en) * | 2011-04-22 | 2011-12-14 | 中国石油天然气股份有限公司 | On-line real-flow verification device for small natural gas flow meter |
| CN102538916A (en) * | 2012-02-06 | 2012-07-04 | 江苏东方航天校准检测有限公司 | Portable gas micro-flow calibration system and method thereof |
| CN102928172A (en) * | 2012-10-11 | 2013-02-13 | 卢耀文 | System and method capable of extending lower limit of gas micro-flow calibration to 10<-14> Pam<3>/s |
| CN203363652U (en) * | 2013-05-15 | 2013-12-25 | 中国科学院等离子体物理研究所 | Quantitative gas supply system |
| CN103791985A (en) * | 2014-01-16 | 2014-05-14 | 宁波创盛仪表有限公司 | Static state standard cubic meter calibration device and calibration method of static state standard cubic meter calibration device |
| CN104236816A (en) * | 2014-09-04 | 2014-12-24 | 兰州空间技术物理研究所 | On-line calibration device and method for leakage detection instrument |
| CN106290744A (en) * | 2016-10-19 | 2017-01-04 | 舟山市质量技术监督检测研究院 | Exhaust analyzer calibrating installation |
Non-Patent Citations (1)
| Title |
|---|
| 董猛，等: "空间磁偏转质谱计校准装置设计及校准方法研究", 《真空》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111141458A (en) * | 2019-12-25 | 2020-05-12 | 兰州空间技术物理研究所 | Helium recovery device and recovery method for leak detection of high-pressure gas cylinder |
| CN111141458B (en) * | 2019-12-25 | 2022-01-21 | 兰州空间技术物理研究所 | Helium recovery device and recovery method for leak detection of high-pressure gas cylinder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107355681B (en) | 2019-09-10 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102023654B (en) | Large environment simulation laboratory pressure control system and control method thereof | |
| CN108196505B (en) | Normal-temperature gaseous working medium quantitative filling system and filling method thereof | |
| CN105539888A (en) | Low air pressure test device | |
| CN108087719B (en) | Inflating device for small-sized sealing products and inflating method thereof | |
| CN109752139B (en) | Device and method for calibrating vacuum leak of nitrogen-hydrogen mixed gas | |
| CN101709987B (en) | Device and method for measuring volume ratio of vacuum container by linear vacuometer | |
| CN106197902A (en) | A kind of air tightness detection apparatus and method of servo-controlling thereof | |
| CN102635559A (en) | Closed pipeline device of pump test system | |
| CN107355681A (en) | A kind of feeder and air supply method for the calibration of multiple working medium gas micro | |
| CN104949808A (en) | Method and system for detecting leakage rate | |
| CN105466806A (en) | Dynamic pressure-variable desorption experiment system for drilling cuttings | |
| CN110579423A (en) | Gas desorption experimental system under pressure and temperature changing conditions | |
| CN209247541U (en) | A kind of positive and negative pressure resistance and blasting integrated test macro | |
| CN114033965B (en) | Filling control system for single-component or multi-component gas | |
| CN116658819A (en) | SF6 recovery device and method with recovery rate measurement function | |
| CN111220326A (en) | Calibration device and method for calibrating vacuum gauge by using vacuum leak hole | |
| CN105757448A (en) | Accurate gas sub-packaging device | |
| CN109520681A (en) | A kind of adjustable leak rate calibration system of multimedium leak rate | |
| CN212476862U (en) | Vacuum pumping system applied to neodymium iron boron vacuum diffusion furnace | |
| CN111122151B (en) | Breather valve flow testing device and testing method thereof | |
| CN108516073A (en) | A kind of holding flexible container inside and outside differential pressure constant device | |
| CN112432687A (en) | Real-flow detection system and method for gas meter | |
| CN219104129U (en) | Automatic calibration equipment for flow of proportional valve | |
| CN205293120U (en) | Low air pressure test device | |
| CN220930849U (en) | SF6 air supplementing device based on real-time temperature locking technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |