CN107340614A - Detection or correction position system and its method - Google Patents
Detection or correction position system and its method Download PDFInfo
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- CN107340614A CN107340614A CN201610284346.8A CN201610284346A CN107340614A CN 107340614 A CN107340614 A CN 107340614A CN 201610284346 A CN201610284346 A CN 201610284346A CN 107340614 A CN107340614 A CN 107340614A
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- telltale mark
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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Abstract
The invention discloses one kind detection or correction position system and its method, the detection or correction position system include：One pedestal；One vision measurement unit, it is located at the pedestal, and the vision measurement unit is provided with a telltale mark；And a control unit, it is electrically connected with the vision measurement unit；Wherein, the pedestal carries a determinand, and the determinand is provided with multiple tested points；The detection or correction position system perform a correction program or a detection program；When the correction program is performed, an at least precalculated position is set in the determinand, the vision measurement unit is sequentially moved to the respectively precalculated position, when the vision measurement unit is moved to each precalculated position, the vision measurement unit captures an image information, and send the image information to the control unit, the control unit calculates the distance between tested point of the telltale mark and the closest telltale mark in the image information, so as to produce to should precalculated position a compensating value, and maked corrections and recorded.
Description
Technical field
The present invention relates to one kind detection or correction position system and its method, espespecially one kind can
Shorten time of measuring and the method and system of lifting measurement precision.
Background technology
Thin Film Transistor-LCD (Thin film transistor liquid crystal
Display, hereinafter referred to as TFT-LCD) it has been widely used in daily life,
TFT-LCD needs to measure in manufacturing process, after confirming that TFT-LCD can be carried out
Continuous manufacturing process.
But TFT-LCD measurements unavoidably have gantry, probe or cantilever, or
There is deformation in moving process, so as to cause mechanism offset so that when probe addresses
Position produce it is abnormal.And then cause the inaccuracy of measurement.
, be to TFT-LCD each transistor one if carrying out probe positioning manually
One is positioned, and can reach the requirement of accuracy, but manual type often expends greatly again
The man-hour of amount, thus the accuracy that measurement how is lifted within a short period just have it is discussible
Space.
The content of the invention
In view of above mentioned problem, it is an object of the invention to provide one kind detection or correction position
System and method, determinand is divided into multiple precalculated positions, the measurement of vision measurement unit by it
A small amount of precalculated position, and correction action is carried out after each measurement, during shortening measurement
Between, and lift the precision of measurement.
In order to achieve the above object, detect or make corrections the invention provides one kind position system,
It includes：
One pedestal；
One vision measurement unit, it is located at the pedestal, and the vision measurement unit is provided with a positioning
Mark；And
One control unit, it is electrically connected with the vision measurement unit；
Wherein, the pedestal carries a determinand, and the determinand is provided with multiple tested points；The inspection
Survey or correction position system performs a correction program or a detection program；In the execution correction journey
During sequence, an at least precalculated position is set in the determinand, the vision measurement unit sequentially moves
To the respectively precalculated position, when the vision measurement unit is moved to each precalculated position, this is regarded
Feel that measuring unit captures an image information and sends the image information to the control unit, should
What control unit calculated the telltale mark in the image information and the closest telltale mark should
The distance between tested point, so as to produce to should precalculated position a compensating value, and give
Correction and record；When the detection program is performed, the control unit controls according to the compensating value
The position of the vision measurement unit.
In an embodiment, the control unit has an algorithm module, a compensating module and one
Logging modle, the calculation unit receive the image information, with calculate the telltale mark with most
The distance between tested point of the neighbouring telltale mark, and send the distance to the compensation
Module, to produce the compensating value, the compensating module sends the compensating value to the vision measurement
Unit and the logging modle, the logging modle store the compensating value；The determinand is one to be measured
Substrate or a measured panel, when the determinand is substrate to be measured, the tested point is a crystal
Pipe；When the determinand is measured panel, the tested point is a pixel.
In an embodiment, detection or correction position system also comprising one first travel mechanism,
One second travel mechanism, one the 3rd travel mechanism and a microscope carrier, first travel mechanism are located at
The pedestal can simultaneously move relative to the determinand in first direction, and second travel mechanism is located at
First travel mechanism, second travel mechanism can move relative to the determinand in second direction
Dynamic, the 3rd travel mechanism is located at second travel mechanism, and the 3rd travel mechanism can be relative
In the determinand in third direction move, the 3rd travel mechanism, second travel mechanism with
First travel mechanism is electrically connected with the control unit；The microscope carrier is located at the pedestal, the microscope carrier
Set for the determinand.
In an embodiment, the vision measurement unit also has a probe module, the probe mould
Block is located at the 3rd travel mechanism.
In an embodiment, the vision measurement unit also has a vision acquisition module, and this is regarded
Feel that acquisition module is located at the 3rd travel mechanism.
In an embodiment, detection or correction position system also have a vision multiplication modules,
The vision multiplication modules are located at the 3rd travel mechanism.
Present invention also offers one kind detection or correction location method, this method is used to perform one
Correction program, the correction program comprise the steps of：
Moving-vision to precalculated position, a vision measurement unit is provided with a telltale mark, and one treats
Surveying thing has multiple tested points, and the determinand is set with multiple precalculated positions, each precalculated position
With the tested point；
Multiple precalculated positions are selected, there is a preset distance between selected each precalculated position,
The preset distance is multiple precalculated positions apart from summation；The vision measurement unit moves at random
Move to the top in any precalculated position, the vision measurement unit captures the to be measured of the precalculated position
The image information of point and the telltale mark, the image information send a control unit to, so that
The control unit can set this and determine tested point in the position of the telltale mark；
The tested point of the nearest telltale mark of selection, the vision measurement unit capture an image
Information, the image information have the telltale mark and the closest telltale mark this is to be measured
Point, the image information send a control unit to and select the closest positioning mark by control unit
The tested point of note；
The distance between the telltale mark and the tested point is calculated, the control unit is according to the shadow
As information calculate between the telltale mark and the tested point of the closest telltale mark away from
From, and produce a compensating value according to the distance；And
Record and correction are performed, the vision measurement unit is dynamic according to the correction of compensating value progress one
Make, the control unit records the compensating value.
In an embodiment, in addition to the step of one detection program of selection progress, the control list
First compensating value according to caused by the correction program controls the position of the vision measurement unit.
Present invention also offers another kind detection or correction location method, this method is used to perform
One detection program, the detection program comprise the steps of：
One control unit compensating value according to caused by a correction program controls a vision measurement unit
Position.
In an embodiment, in addition to the step of selection one correction program of progress, the step bag
Containing following sub-step：
Moving-vision to precalculated position, vision measurement unit is provided with a telltale mark, and one treats
Surveying thing has multiple tested points, and the determinand is set with multiple precalculated positions, each precalculated position
With the tested point；Multiple precalculated positions are selected, are had between selected each precalculated position
One preset distance, the preset distance can be multiple precalculated positions apart from summation；The vision
For measuring unit random movement to the top in any precalculated position, the vision measurement unit captures should
The tested point in precalculated position and the image information of the telltale mark, the image information send this to
Control unit, so that the control unit, which can set this, determines tested point in the position of the telltale mark；
The tested point of the nearest telltale mark of selection, the vision measurement unit capture an image
Information, the image information have the telltale mark and the closest telltale mark this is to be measured
Point, the image information send the control unit to, and the closest positioning is selected by control unit
The tested point of mark；
The distance between the telltale mark and the tested point are calculated, the control unit is according to the shadow
As information calculates the distance between the telltale mark and the tested point, and produced according to the distance
One compensating value；And
Record and correction are performed, the vision measurement unit is dynamic according to the correction of compensating value progress one
Make, the control unit records the compensating value.
In an embodiment, further comprise that one decides whether to the step in next precalculated position
Suddenly, if it has not, then to terminating；If it has, then the moving-vision is back to precalculated position
The step of, to produce another compensating value, the control unit records another compensating value, and this is regarded
Feel that measuring unit carries out another location correction action；The determinand is that a substrate to be measured or one treat
Panel is surveyed, when the determinand is substrate to be measured, the tested point is a transistor；When this is treated
When survey thing is measured panel, the tested point is a pixel.
In an embodiment, also include a setting tested point in the step of the position of telltale mark
Suddenly, the tested point is selected in the position of the telltale mark, is treated with setting the telltale mark with this
The distance of measuring point, the setting send the control unit to, and the control unit records the setting.
In an embodiment, in the step of calculating the distance between telltale mark and tested point,
One algorithm module according to the measurement result calculate between the telltale mark and the tested point away from
From the distance sends a compensating module to produce a compensating value, and the compensating value sends this to
Vision measurement unit and a logging modle.Summary, detection or correction provided by the invention
Position system and its method, it makes the pre-determined bit of a small amount of determinand of vision measurement unit measurement
Put, after each measurement, you can the action of correction is immediately performed, to shorten time of measuring,
And lift the accuracy of measurement.
Brief description of the drawings
Fig. 1 is the schematic diagram of a determinand；
Fig. 2 is the schematic diagram of detection or correction position system provided by the invention；
Fig. 3 is the schematic diagram of detection or correction position system provided by the invention；
Fig. 4 is the schematic flow sheet of detection or correction location method provided by the invention；
Fig. 5 is the schematic diagram of telltale mark and tested point；
Fig. 6 is the schematic diagram of telltale mark and the tested point of the neighbouring telltale mark；
Fig. 7 is the schematic diagram of the top in the precalculated position that telltale mark is located at determinand.
Description of reference numerals：1- determinands；10- tested points；11- precalculated positions；2- visions are surveyed
Measure unit；20- pedestals；The travel mechanisms of 21- first；The travel mechanisms of 22- the 3rd；23- visions are picked
Modulus block；230- telltale marks；24- probe modules；The travel mechanisms of 25- second；26- microscope carriers；
27- aligns vision acquisition module；3- control units；30- algorithm modules；31- compensating modules；
32- logging modles；S1~S6- steps.
Embodiment
Illustrate embodiments of the present invention, affiliated technology below by way of particular specific embodiment
This can be understood easily by content disclosed in the present specification by having usually intellectual in field
Other advantages and effect of invention.
As shown in Figure 2 and Figure 3, detect or make corrections the invention provides one kind position system,
It is used to perform a detection program or a correction program, and the detection or correction position system include
There are a pedestal 20, a vision measurement unit 2, a mobile unit, a microscope carrier 26 and a control
Unit 3.
Microscope carrier 26 is located at pedestal 20.Microscope carrier 26 is set for a determinand 1.Such as Fig. 1 to figure
Shown in 3, determinand 1 has multiple tested points 10, and tested point 10 is arranged with Dm × Dn matrixes
Row, m, n are constant, and m, n can change according to the size of actual determinand 1, therefore unlimited
It is fixed.Determinand 1 is set with multiple precalculated positions 11, and each precalculated position 11 is to be measured with one
Point 10.The determinand 1 is a substrate to be measured or a measured panel, when the determinand 1 is to treat
When surveying substrate, the tested point 10 is a transistor；When the determinand 1 is measured panel,
The tested point 10 is a pixel.
Vision measurement unit 2 have a vision acquisition module 23, a probe module 24 with extremely
Few contraposition vision acquisition module 27, the vision acquisition module 23 and the probe module 24 it
Spacing distance is existing known technology, therefore not in this more discussion, special first Chen Ming.
Mobile unit has one first travel mechanism 21, one second travel mechanism 25 and one the
Three travel mechanisms 22.
First travel mechanism 21 is slidedly arranged on the top of pedestal 20, and relative to determinand 1 in
First direction moves.
Second travel mechanism 25 is located at the first travel mechanism 21, and relative to determinand 1 in
Second direction moves.
3rd travel mechanism 22 is located at the second travel mechanism 25, and relative to determinand 1 in
Third direction moves.
Vision acquisition module 23 is located at the 3rd travel mechanism 22, as shown in figure 5, vision is picked
Modulus block 23 has a telltale mark 230.Probe module 24 is located at the 3rd travel mechanism 22.
For example, above-mentioned first travel mechanism 21, the second travel mechanism 25 and the 3rd move
Motivation structure can carry out mobile above-mentioned first direction, second direction movement or third direction movement,
Until vision acquisition module 23 be moved to precalculated position 11 or probe module 23 be moved to it is pre-
Positioning puts 11.
Vision acquisition module 23 captures an image information, and the image information includes telltale mark
230 with the tested point 10 of the neighbouring telltale mark 230, as shown in Figure 6.Probe module 24
Tested point 10 is measured, because of the emphasis of 24 non-this case of probe module, therefore no longer enters one
Step is discussed, special first Chen Ming.
Because probe module 24 can decide whether to set probe module 24 according to actual demand.
If being not provided with probe module 24, probe module 24 can be replaced with a vision multiplication modules, should
Vision multiplication modules coordinate vision acquisition module 23, so that staff operates, and amplify and treat
The image of measuring point 11, to carry out artificial visual inspection.
At least side that vision acquisition module 27 is located at microscope carrier 26 is aligned, in the present embodiment,
Align the both sides that vision acquisition module 27 is located at microscope carrier 26.Contraposition vision acquisition module 25 is picked
Fetch bit captures the image to confirm that determinand 1 is located in the image of the determinand 1 of microscope carrier 26
Position set by microscope carrier 26, if by judging that determinand 1 has the situation of off normal in the image,
Determinand 1 can be adjusted.To avoid the off normal of determinand 1.
Control unit 3 is electrically connected with the pedestal 20 and vision measurement unit 2.Control unit 3
With an algorithm module 30, a compensating module 31 and a logging modle 32.
Calculate unit 30 and receive the image information, to calculate telltale mark 230 and tested point
The distance between 10, and send the distance to compensating module 31, to produce a compensating value,
Compensating module 31 sends the compensating value to vision measurement unit 2 and logging modle 32, note
Record module 32 and store the compensating value, vision measurement unit 2 carries out a correction according to the compensating value
Action, correction action can be considered a correction program.The control unit 3 coordinate compensating value and
The position of vision measurement unit 2 is controlled, it can be considered a detection program.
As shown in Figures 1 to 4, detection or correction location method provided by the invention, the party
Method is used to perform a correction program, and the detection or correction location method comprise the steps of：
S1, setting tested point is in the position of telltale mark, as shown in figure 5, vision captures mould
Block 23 is provided with telltale mark 230, as described above with shown in Fig. 1, determinand 1 be provided with it is multiple
Precalculated position 11, for convenience of description, therefore precalculated position 11 with Fig. 1 D1 to Dn or
D1 to Dm is represented.
If D3, D6, D9 are selected to D3X, or D2, D4, D6 are to D2X.X is
Constant.As it was previously stated, having preset distance between selected each precalculated position 11, this is pre-
Set a distance can be the unlimited apart from summation, the quantity in precalculated position 11 of multiple precalculated positions 11
It is fixed, set by its staff according to scene.
For example, when selecting precalculated position 11, be considered as mobile unit has in moving process
Machine error may be produced, vision measurement unit 2 makes a reservation for move to D9 originally, but because of machinery
The margin of error is excessive, it is possible to D8 or D10 is moved to, so the mobile unit is above-mentioned in movement
The machine error value apart from summation be less than the size of tested point 10, it is mobile single to avoid
Vision measurement unit 2 is moved to the position for deviateing selected precalculated position 11 by member.
Tested point 10 is set when the position of telltale mark 230, vision acquisition module 23 selects
Fixed or random movement selectes the tested point 10 in the positioning to the top of a tested point 10
The position of mark 230.As shown in figure 5, the transistor (tested point 10) is selected in the positioning
The position of mark 230.Vision acquisition module 23 captures the tested point 10 and telltale mark 230
Image information, the image information sends control unit 3 to, so that control unit 3 can be set
Tested point 10 is determined in the position of telltale mark 230.
S2, moving-vision to precalculated position, above-mentioned mobile unit progress first direction movement,
Second direction is mobile or third direction moves, and makes a reservation for so that vision acquisition module 23 is moved to one
Position 11.
S3, the tested point of nearest telltale mark is selected, as described in step S2, vision captures mould
The telltale mark 230 of block 23 is located at the top in the precalculated position 11 of determinand 1, and vision is picked
Modulus block 23 capture an image information, the image information include telltale mark 230 with it is neighbouring
The tested point 10 of telltale mark 230, the image information send a control unit 3 to, so as to
Select the tested point 10 of closest telltale mark 230.If illustrating further, image letter
Breath should be telltale mark 230 and the tested point 10 of selected closest telltale mark 230
Image.
S4, the distance between telltale mark and tested point are calculated, the calculation in control unit 3
Module 30 is according to image information, to calculate telltale mark 230 and closest telltale mark
The distance between 230 tested point 10, the distance send compensating module 31 to, to produce one
Compensating value, compensating module 31 send compensating value to vision measurement unit 2 and logging modle
32。
S5, performs record and correction, and vision measurement unit 2 carries out a correction according to compensating value
Action, so that the telltale mark 230 of vision acquisition module 23 is located at the predetermined of determinand 1
The top of position 11, logging modle record compensating value, as shown in Figure 7.
S6, if to next precalculated position, if it has not, then to terminating；If it has, then
Step S2 is back to, to produce another compensating value, the system of control unit 3 records another compensating value,
Vision measurement unit 2 carries out another correction action.For example, if with above-mentioned D3, D6,
D9 to D3X illustrates that first precalculated position 11 can be D3, then next precalculated position
Can be sequentially D6, D9 to D3X.
A compensating value is respectively produced in above-mentioned D3, D6, D9 to D3X.
Correction program as described above, if performing above-mentioned correction program, can further it select
The step of carrying out a detection program, the control unit 3 is mended according to caused by the correction program
On the occasion of the position for controlling the vision measurement unit 2.
The invention also discloses one kind detection or correction location method, this method is used to perform one
Program is detected, the detection or correction location method comprise the steps of：
Control unit 3 improves compensating value control vision measurement unit 2 caused by a correction program
Position.
When vision measurement unit 2 is moved to precalculated position 11, vision measurement unit 2 because by
Maked corrections to above-mentioned compensating value, therefore telltale mark 230 can such as be schemed close to a tested point 10
Shown in 7, so that probe module 24 measures the tested point 10 closest to telltale mark 230.Or
Person coordinates vision multiplication modules to carry out detection program with vision acquisition module 23.
For example, if being illustrated with above-mentioned D3, D6, D9 to D3X, if in detection
When, vision acquisition module 23 or probe module 24 may be moved between D6 and D9, institute
With control unit selection D6 compensating value and D9 compensating value, and obtained by a mathematical operation
Go out a new compensating value, the new compensating value is supplied to vision measurement unit 2, so that vision
Measuring unit 2 carries out a position correction action, after the completion for the treatment of position correction action, then can enter
Row one detects program.
If illustrating further, if vision measurement unit 2 is moved in carrying out detection program
During non-predetermined position 11, the selection of control unit 3 is positioned at the previous pre- of the non-predetermined position 11
11 compensating value and the compensating value in latter precalculated position 11 are put in positioning, and by two compensating values
New compensating value is drawn by a mathematical operation, the new compensating value is supplied to vision measurement list
Member 2, so that vision measurement unit 2 carries out a position correction action, treat position correction action
After the completion of, then it can carry out a detection program.
Detection program as described above, it can further select to carry out correction program, the correction
Program in this as described above, therefore do not repeat.
Summary, detection provided by the invention or correction position system and its method, it will
Determinand 1 divides need to measure selected for multiple precalculated positions 11, vision measurement unit 2
Precalculated position 11, the quantity in precalculated position 11 can determine according to actual quantity, thus can in compared with
In the short time, you can vision measurement unit 2 is maked corrections.
In addition, detection or correction position system may be selected to carry out correction program or detection program,
It carries out detecting program and correction program according to substantial evidence demand setting detection or correction position system
Order or only perform one.
Specific embodiment described above is only used for example and releases the features of the present invention and effect, Er Feiyong
Implement category in the restriction present invention, spirit and the technology model taken off on without departing from the present invention
Under farmland, any equivalent change and modification completed with disclosed content, still
This case right is should be to be covered.
Claims (13)
1. one kind detection or correction position system, it is characterised in that include：
One pedestal；
One vision measurement unit, it is located at the pedestal, and the vision measurement unit is provided with a positioning
Mark；And
One control unit, it is electrically connected with the vision measurement unit；
Wherein, the pedestal carries a determinand, and the determinand is provided with multiple tested points；The inspection
Survey or correction position system performs a correction program or a detection program；In the execution correction journey
During sequence, an at least precalculated position is set in the determinand, the vision measurement unit sequentially moves
, should when the vision measurement unit is moved to each precalculated position to the respectively precalculated position
Vision measurement unit captures an image information and sends the image information to the control unit,
The control unit calculates the telltale mark and the closest telltale mark in the image information
The distance between the tested point, so as to produce to should precalculated position a compensating value, and give
To make corrections and record；When the detection program is performed, the control unit is according to the compensating value control
Make the position of the vision measurement unit.
2. detection according to claim 1 or correction position system, it is characterised in that
The control unit has an algorithm module, a compensating module and a logging modle, the calculation list
Member receives the image information, should with calculate the telltale mark and the closest telltale mark
The distance between tested point, and send the distance to the compensating module, to produce the correction
Value, the compensating module send the compensating value to the vision measurement unit and the logging modle,
The logging modle stores the compensating value；The determinand is a substrate to be measured or a measured panel,
When the determinand is substrate to be measured, the tested point is a transistor；When the determinand is to treat
When surveying panel, the tested point is a pixel.
3. detection according to claim 1 or correction position system, it is characterised in that
Also carried comprising one first travel mechanism, one second travel mechanism, one the 3rd travel mechanism with one
Platform, first travel mechanism is located at the pedestal and can be moved relative to the determinand in first direction
Dynamic, second travel mechanism is located at first travel mechanism, and second travel mechanism can be relative
Being moved in the determinand in second direction, the 3rd travel mechanism is located at second travel mechanism,
3rd travel mechanism can move relative to the determinand in third direction, the 3rd moving machine
Structure, second travel mechanism and first travel mechanism are electrically connected with the control unit；The load
Platform is located at the pedestal, and the microscope carrier is for setting the determinand.
4. detection according to claim 3 or correction position system, it is characterised in that
The vision measurement unit also has a probe module, and the probe module is located at the 3rd moving machine
Structure.
5. detection according to claim 3 or correction position system, it is characterised in that
The vision measurement unit also has a vision acquisition module, the vision acquisition module located at this
Three travel mechanisms.
6. detection according to claim 5 or correction position system, it is characterised in that
Also there are a vision multiplication modules, the vision multiplication modules are located at the 3rd travel mechanism.
7. one kind detection or correction location method, this method are used to perform a correction program, its
It is characterised by, the correction program comprises the steps of：
Moving-vision to precalculated position, a vision measurement unit is provided with a telltale mark, and one treats
Surveying thing has multiple tested points, and the determinand is set with multiple precalculated positions, each precalculated position
With the tested point；
Multiple precalculated positions are selected, there is a preset distance between selected each precalculated position,
The preset distance is multiple precalculated positions apart from summation；The vision measurement unit moves at random
Move to the top in any precalculated position, the vision measurement unit captures the to be measured of the precalculated position
The image information of point and the telltale mark, the image information send a control unit to, so that
The control unit can set this and determine tested point in the position of the telltale mark；
The tested point of the nearest telltale mark of selection, the vision measurement unit capture an image
Information, the image information have the tested point of the telltale mark and the neighbouring telltale mark,
The image information sends a control unit to, and the closest telltale mark is selected by control unit
Tested point；
The distance between the telltale mark and the tested point are calculated, the control unit is according to the shadow
As information calculate between the telltale mark and the tested point of the closest telltale mark away from
From, and produce a compensating value according to the distance；And
Record and correction are performed, the vision measurement unit carries out a position benefit according to the compensating value
Direct action, the control unit record the compensating value.
8. detection according to claim 7 or correction location method, it is characterised in that
Also include the step of selection carries out a detection program, the control unit is produced according to the correction program
Raw compensating value controls the position of the vision measurement unit.
9. one kind detection or correction location method, this method is used to perform a detection program, its
It is characterised by, the detection program comprises the steps of：
One control unit compensating value according to caused by a correction program controls a vision measurement unit
Position.
10. detection according to claim 9 or correction location method, it is characterised in that
Also include the step of selection carries out a correction program, the step includes following sub-step：
Moving-vision to precalculated position, vision measurement unit is provided with a telltale mark, and one treats
Surveying thing has multiple tested points, and the determinand is set with multiple precalculated positions, each precalculated position
With the tested point；Multiple precalculated positions are selected, are had between selected each precalculated position
One preset distance, the preset distance are multiple precalculated positions apart from summation；The vision is surveyed
Unit random movement is measured to the top in any precalculated position, it is pre- that the vision measurement unit captures this
The image information for the tested point and telltale mark put is positioned, the image information sends the control to
Unit processed, so that the control unit, which can set this, determines tested point in the position of the telltale mark；
The tested point of the nearest telltale mark of selection, the vision measurement unit capture an image
Information, the image information have the tested point of the telltale mark and the neighbouring telltale mark,
The image information sends the control unit to, and the closest telltale mark is selected by control unit
Tested point；
The distance between the telltale mark and the tested point are calculated, the control unit is according to the shadow
As information calculate between the telltale mark and the tested point of the closest telltale mark away from
From, and produce a compensating value according to the distance；And
Record and correction are performed, the vision measurement unit carries out a position benefit according to the compensating value
Direct action, the control unit record the compensating value.
11. detection or correction location method according to claim 7 or 10, its feature
It is, further comprises decide whether to next precalculated position the step of, if it has not,
Then to terminating；If it has, then the step of being back to the moving-vision to precalculated position, with production
Raw another compensating value, the control unit record another compensating value, and the vision measurement unit enters
The correction action of row another location；The determinand is a substrate to be measured or a measured panel, when this
When determinand is substrate to be measured, the tested point is a transistor；When the determinand is tested surface
During plate, the tested point is a pixel.
12. detection or correction location method according to claim 7 or 10, its feature
It is, also includes a setting tested point in the position of telltale mark the step of, selectes this and treat
Measuring point is in the position of the telltale mark, to set the distance of the telltale mark and the tested point,
The setting sends the control unit to, and the control unit records the setting.
13. detection or correction location method according to claim 7 or 10, its feature
It is, in the step of calculating the distance between telltale mark and tested point, an algorithm module
The distance between the telltale mark and the tested point are calculated according to the measurement result, the distance
A compensating module is sent to produce a compensating value, the compensating value sends the vision measurement list to
Member and a logging modle.
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| CN201610284346.8A CN107340614B (en) | 2016-04-29 | 2016-04-29 | System and method for detecting or correcting position |
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| CN201610284346.8A CN107340614B (en) | 2016-04-29 | 2016-04-29 | System and method for detecting or correcting position |
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