CN107331794A - Compliant conductive structure, its preparation method, flexible display panels and display device - Google Patents
Compliant conductive structure, its preparation method, flexible display panels and display device Download PDFInfo
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- CN107331794A CN107331794A CN201710635932.7A CN201710635932A CN107331794A CN 107331794 A CN107331794 A CN 107331794A CN 201710635932 A CN201710635932 A CN 201710635932A CN 107331794 A CN107331794 A CN 107331794A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/40—OLEDs integrated with touch screens
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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Abstract
The invention discloses a kind of compliant conductive structure, its preparation method, flexible display panels and display device, the compliant conductive structure, including：Underlay substrate, and at least two layers graphene layer and at least one layer of flexible metal conductive layer on underlay substrate；Wherein, each flexible metal conductive layer is located between any two graphene layer.Compliant conductive structure provided in an embodiment of the present invention, because graphene layer has preferable flexibility, flexible metal conductive layer is arranged between any two graphene layer, the compliant conductive structure can be made, with preferable flexibility and with good electric conductivity, further, it is also possible to avoid the metallic atom in the conductive layer of flexible metal from being diffused into other film layers, for example in insulating barrier, so as to prevent pollution impurity diffusion.
Description
Technical field
The present invention relates to display technology field, espespecially a kind of compliant conductive structure, its preparation method, flexible display panels and
Display device.
Background technology
Tin indium oxide (Indium tin oxide, ITO) and graphene are conventional transparent conductive materials, wherein, ITO materials
Material has relatively low sheet resistance and higher transmitance, in liquid crystal display (Liquid Crystal Display, LCD), often
Public electrode or touch control electrode etc. are made with ITO materials, in organic electroluminescent (Organic Light-Emitting
Diode, OLED) in display, commonly use ITO materials and make luminous anode in bottom etc..
Crushed however, the film layer made by ITO is very easy to fracture in case of bending, and in OLED display, by
Driven in OLED display by electric current so that the resistance of ito film layer is larger, therefore, flexible display technologies are the popular of future
Display Technique, ITO obviously can not meet the requirement of the electrode material of touch-control structure and ray structure.Although in addition, graphene has
There is preferable characteristic of semiconductor, and the transparent characteristic and flexible nature of graphene are very excellent, but existing technique can not be produced
The graphene of better performances so that the graphene film layer made has many defects, such as resistance ratio is larger.
Therefore, how to provide a kind of preferable compliant conductive structure of electric conductivity is the technical problem for being badly in need of solving.
The content of the invention
The embodiment of the present invention provides a kind of compliant conductive structure, its preparation method, flexible display panels and display device, uses
The problem of to solve not providing the preferable compliant conductive structure of electric conductivity present in prior art.
The embodiments of the invention provide a kind of compliant conductive structure, including：Underlay substrate, and positioned at the underlay substrate
On at least two layers graphene layer and at least one layer of flexible metal conductive layer；Wherein,
Each flexible metal conductive layer is located between graphene layer described in any two.
It is described soft in above-mentioned compliant conductive structure provided in an embodiment of the present invention in a kind of possible implementation
Property conductive structure be organic elctroluminescent device negative electrode or anode；Or,
The compliant conductive structure is public electrode or pixel electrode；Or,
The compliant conductive structure is touch control electrode.
It is described soft in above-mentioned compliant conductive structure provided in an embodiment of the present invention in a kind of possible implementation
Property metal conducting layer is made up of metal nano material.
The embodiment of the present invention additionally provides a kind of flexible display panels, including：It is soft as described in claim any one of 1-3
Property conductive structure.
It is described soft in above-mentioned flexible display panels provided in an embodiment of the present invention in a kind of possible implementation
Property display panel be organic EL display panel or liquid crystal display panel.
It is described soft in above-mentioned flexible display panels provided in an embodiment of the present invention in a kind of possible implementation
Property display panel be touch-control display panel.
The embodiment of the present invention additionally provides a kind of preparation method of above-mentioned compliant conductive structure, at least includes：
Layer graphene layer is formed on the underlay substrate；
Flexible metal conductive layer is formed on the graphene layer；
One layer of graphene layer is re-formed on the flexible metal conductive layer.
In a kind of possible implementation, in above-mentioned preparation method provided in an embodiment of the present invention, the graphene
Layer makes by the following method：
One layer of graphene layer is made on sacrifice layer；
Transfer support body layer is formed on the surface of the graphene layer；
Remove the sacrifice layer；
There is the side of the graphene layer to fit on the underlay substrate transfer support body layer；
Remove the transfer support body layer.
In a kind of possible implementation, in above-mentioned preparation method provided in an embodiment of the present invention, the flexible gold
Category conductive layer is made up of metal nano material；
The formation flexible metal conductive layer on the graphene layer, including：
The metal nano material is dissolved in macromolecule polymer solution；
The macromolecule polymer solution is coated on the graphene layer；
The substrate is dried, to obtain the flexible metal conductive layer.
The embodiment of the present invention additionally provides a kind of display device, including：Above-mentioned flexible display panels.
The present invention has the beneficial effect that：
The embodiments of the invention provide a kind of compliant conductive structure, its preparation method, flexible display panels and display device,
The compliant conductive structure, including：Underlay substrate, and at least two layers graphene layer and at least one layer on underlay substrate are soft
Property metal conducting layer；Wherein, each flexible metal conductive layer is located between any two graphene layer.It is provided in an embodiment of the present invention
Compliant conductive structure, because graphene layer has preferable flexibility, any two graphene is arranged at by flexible metal conductive layer
Between layer, the compliant conductive structure can be made, with preferable flexibility and with good electric conductivity, further, it is also possible to
The metallic atom in the conductive layer of flexible metal is avoided to be diffused into other film layers, such as insulating barrier, so as to prevent pollution miscellaneous
Matter spreads.
Brief description of the drawings
Fig. 1 a and Fig. 1 b are the structural representation of compliant conductive structure provided in an embodiment of the present invention；
Fig. 2 is the anode that above-mentioned compliant conductive structure provided in an embodiment of the present invention is organic elctroluminescent device
Schematic diagram；
Fig. 3 is the structural representation that above-mentioned compliant conductive structure provided in an embodiment of the present invention is touch control electrode；
Fig. 4 is the flow chart of the preparation method of above-mentioned compliant conductive structure provided in an embodiment of the present invention；
Fig. 5 is the flow chart of making graphene layer in the embodiment of the present invention；
Fig. 6 a- Fig. 6 e are the structural representation of making graphene layer in the embodiment of the present invention；
Wherein, 10, compliant conductive structure；100th, underlay substrate；101st, graphene layer；102nd, flexible metal conductive layer；
201st, array base palte；202nd, luminescent layer；203rd, cover plate；301st, display panel；302nd, separation layer；303rd, protective layer；600th, sacrifice
Layer；601st, supporting layer is shifted.
Embodiment
The problem of for that can not provide the preferable compliant conductive structure of electric conductivity present in prior art, the present invention is real
Apply a kind of compliant conductive structure of example, its preparation method, flexible display panels and display device.
Below in conjunction with the accompanying drawings, to compliant conductive structure provided in an embodiment of the present invention, its preparation method, flexible display panels
And the embodiment of display device is described in detail.The thickness and shape of each film layer do not reflect true ratio in accompanying drawing
Example, purpose is schematically illustrate present invention.
The embodiments of the invention provide a kind of compliant conductive structure, as illustrated in figs. 1A and ib, including：Underlay substrate 100,
And at least two layers graphene layer 101 and at least one layer of flexible metal conductive layer 102 on underlay substrate 100；Wherein,
Each flexible metal conductive layer 102 is located between any two graphene layer 101.
Compliant conductive structure 10 provided in an embodiment of the present invention, because graphene layer 101 has preferable flexibility, by flexibility
Metal conducting layer 102 is arranged between any two graphene layer 101, can make the compliant conductive structure 10, with preferable
It is flexible and with good electric conductivity, further, it is also possible to avoid the metallic atom in flexible metal conductive layer 102 from being diffused into
In other film layers, such as insulating barrier, so as to prevent pollution impurity diffusion.
Reference picture 1a, includes two layers of graphene layer 101 and positioned at two layers of graphene layer 101 with above-mentioned compliant conductive structure 10
Between one layer of flexible metal conductive layer 102 exemplified by, due to graphene layer 101 have it is preferable flexible, in two layers of graphene layer
One layer of flexible metal conductive layer 102 is set between 101, on the one hand, two layers of graphene layer 101 and one layer of flexible metal conductive layer
102 this three layers of conducting films constitute the relation of parallel connection, thus the all-in resistance of the compliant conductive structure 10 is less than one layer of any of which
Conducting film, thus the compliant conductive structure 10 has preferable electric conductivity and preferably flexible；On the other hand, making flexible
It is general using deposition, sputtering or metal material is dissolved in organic solvent to be coated in underlay substrate during metal conducting layer 102
On 100, inevitably cause metallic atom or organic solvent to pollute other film layers in manufacturing process, such as it is golden
Belong to atoms permeating into insulating barrier, therefore, flexible metal conductive layer 102 is arranged between two layers of graphene layer 101, can be to prevent
Only flexible metal conductive layer 102 is polluted to other film layers, moreover, conduction of the graphene layer 101 compared to simple metal material
Film layer, adhesion is stronger, therefore, and the stability of the compliant conductive structure 10 of formation is more preferable.
Above-mentioned compliant conductive structure 10 in the embodiment of the present invention illustrated in Fig. 1 a have two layers of graphene layer 101 and
One layer of flexible metal conductive layer 102, is the preferred embodiment of the embodiment of the present invention, in the specific implementation, above-mentioned compliant conductive
Structure 10 can include multiple graphene layers 101 and layer flexible metal conducting layer 102, such as compliant conductive shown in Fig. 1 b
Structure 10, can include three layer graphenes layer 101 and two sheets of flexible metal conducting layer 102, in addition, it can include four layers of stone
Black alkene layer 101 and two sheets of flexible metal conducting layer 102, or, four layer graphenes layer 101 and three layers of flexible metal conductive layer
102 etc., herein the quantity not to graphene layer 101 and flexible metal conductive layer 102 be defined, can be according to actual needs
The quantity and the thickness of each film layer of graphene layer 101 and flexible metal conductive layer 102 are set, only flexible metal conductive layer need to be met
102 are located between any two layers of graphene layer 101.
In the specific implementation, above-mentioned flexible metal conductive layer 102 is preferably using flexible preferably material, such as copper or gold
Metal nanometer material etc., is not defined this time to the material of above-mentioned flexible metal conductive layer 102.
In actual applications, above-mentioned compliant conductive structure 10 provided in an embodiment of the present invention can apply to various displays
In part, for example, compliant conductive structure 10 can be the negative electrode or anode of organic elctroluminescent device；Or,
Compliant conductive structure 10 can be public electrode or pixel electrode；Or,
Compliant conductive structure 10 can be touch control electrode.
Reference picture 2, is illustrated by taking bottom emitting organic elctroluminescent device as an example, can be by above-mentioned compliant conductive knot
Structure 10 as the organic elctroluminescent device anode, specifically, above-mentioned compliant conductive structure 10 can be arranged on into battle array
Between row substrate 201 and luminescent layer 202, cover plate 203 is additionally provided with away from the side of array base palte 201 in luminescent layer 202, in order to
Realize that the exiting surface of the organic light emitting display is located at the flexibility in the side of array base palte 201, the compliant conductive structure 10
Metal conducting layer 102 can be adopted as the preferable material of light transmission rate.When the compliant conductive structure 10 is applied to other kinds of
In organic elctroluminescent device, principle is similar, and this is repeated no more.When the compliant conductive structure 10 is applied to liquid crystal display
In panel 301, during as public electrode or pixel electrode, and applied to similar in organic electroluminescence device, i.e., corresponding to
The position of film layer makes each film layer of above-mentioned compliant conductive structure 10 where public electrode or pixel electrode, and then flexibility is led again
Electric structure 10 is performed etching, to obtain the figure of public electrode or pixel electrode.
Reference picture 3, above-mentioned compliant conductive structure 10 can also be touch control electrode, i.e., the correspondence touch-control on display panel 301
At position where the film layer of induction electrode and touch-control driving electrodes, each film layer of above-mentioned compliant conductive structure 10 is made, then
Compliant conductive structure 10 is performed etching, to obtain the figure of touch-control sensing electrode and touch-control driving electrodes, and in touch-control sensing
Separation layer 302 is also set up between electrode and touch-control driving electrodes, and protection is additionally provided with the side away from display panel 301
Layer 303.In addition, in the specific implementation, above-mentioned compliant conductive structure 10 can also be applied in other devices, do not limited this time
It is fixed.
Further, in above-mentioned compliant conductive structure 10 provided in an embodiment of the present invention, flexible metal conductive layer 102 is preferred
To be made up of metal nano material.
Metal nano material refer in three dimensions it is at least one-dimensional in nanoscale or by them as substantially single
The metal material that member is constituted, i.e. metal nano material is made up of multiple nano wires, and nano wire is with being limited in the horizontal
The one-dimentional structure of less than 100 nanometers (longitudinal direction is not limited), the material of nano wire is generally copper, silver, nickel or iron etc..Metal nano
Material has relatively low resistivity and higher light transmission rate (up to more than 90%), but metal nano material is making flexible gold
, may separately as one layer of conductive layer, it is necessary to be dissolved in organic solvent during category conductive layer 102, therefore with potential pollution sources
It can be negatively affected, therefore, the flexible metal conductive layer being made up of metal nano material be wrapped up using two layers of graphene layer 101
102, the impurity such as metal nanometer line and organic solvent can be prevented to be diffused into other film layers (such as insulating barrier), therefore, by extremely
The compliant conductive structure 10 that few two layers of graphene layer 101 and at least one layer of flexible metal conductive material are constituted, with preferably leading
Electrical property, higher light transmission rate and higher pliability, and pollution impurity diffusion can be prevented, in addition, graphene layer
101 is also relatively good with the adhesions of other film layers.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of flexible display panels 301, including above-mentioned flexibility
Conductive structure 10.Because the principle that the flexible display panels 301 solve problem is similar to above-mentioned compliant conductive structure 10, therefore should
The implementation of flexible display panels 301 may refer to the implementation of above-mentioned compliant conductive structure 10, repeats part and repeats no more.
Further, in above-mentioned flexible display panels 301 provided in an embodiment of the present invention, above-mentioned flexible display panels 301
Can be organic EL display panel 301 or liquid crystal display panel 301.
Further, in above-mentioned flexible display panels 301 provided in an embodiment of the present invention, above-mentioned flexible display panels 301
It can be touch-control display panel 301.
Above-mentioned flexible display panels 301 can be organic EL display panel 301, liquid crystal display panel 301 or tactile
Display panel 301 is controlled, is the preferred embodiment of the embodiment of the present invention, it is in the specific implementation or other kinds of aobvious
Show panel 301, do not limit this time.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of making side of above-mentioned compliant conductive structure 10
Method, because the principle that the preparation method solves problem is similar to above-mentioned compliant conductive structure 10, therefore the implementation of the preparation method
The implementation of above-mentioned compliant conductive structure 10 is may refer to, part is repeated and repeats no more.
The preparation method of above-mentioned compliant conductive structure 10 provided in an embodiment of the present invention, as shown in figure 4, at least including：
S401, form on underlay substrate 100 layer graphene layer 101；
S402, the formation flexible metal conductive layer 102 on graphene layer 101；
S403, re-form on flexible metal conductive layer 102 layer graphene layer 101.
In the specific implementation, when there is above-mentioned compliant conductive structure 10 multiple graphene layers 101 and layer flexible metal to lead
During electric layer 102, as long as repeating the above steps S401-S403, here is omitted.
Specifically, graphene layer is typically prepared using epitaxial growth method, chemical vapour deposition technique or graphene oxide method
101, and graphene need could be grown on specific substrate, graphene layer 101 typically makes by the following method, such as Fig. 5 with
And shown in Fig. 6 a-6e：
S501, layer graphene layer 101 is made on sacrifice layer 600 (such as Copper thin film), as shown in Figure 6 a；
S502, the surface formation transfer support body layer in graphene layer 101, as shown in Figure 6 b, general transfer supporting layer 601
Dimethyl silicone polymer (polydimethylsiloxane, PDMS), polymethyl methacrylate (polymethyl can be used
Methacrylate, PMMA) or polyethylene terephthalate (Polyethylene terephthalate, PET), wait poly-
Compound material；
S503, removal sacrifice layer 600, as fig. 6 c, can typically be removed Copper thin film by etching liquid；
S504, will transfer support body layer there is the side of graphene layer 101 to fit on underlay substrate 100, such as Fig. 6 d institutes
Show；
S505, removal transfer support body layer, such as Fig. 6 e can remove transfer supporting layer using glass or the method for dissolving
601。
In the specific implementation, flexible metal conductive layer 102 is made up of metal nano material；
Above-mentioned steps S402, can include：
Metal nano material is dissolved in macromolecule polymer solution (3,4- ethylenedioxy thiophenes (PEDOT：PSS in)),
PEDOT：PSS is made up of two kinds of materials of PEDOT and PSS, and PEDOT is the polymerization of EDOT (3,4-ethylene dioxythiophene monomer)
Thing, PSS is poly styrene sulfonate；
Macromolecule polymer solution is coated on graphene layer 101；
(temperature is 110 DEG C -200 DEG C) is dried to substrate, to obtain flexible metal conductive layer 102.
In actual applications, in above-mentioned preparation method provided in an embodiment of the present invention, it can also include：To compliant conductive knot
Each film layer of structure 10 is performed etching, and with the figure needed, need not be entered if the compliant conductive structure 10 is as face electrode
The step of row etching.
Based on same inventive concept, the embodiment of the present invention additionally provides a kind of display device, including above-mentioned Flexible Displays face
Plate 301, the display device can apply to mobile phone, tablet personal computer, television set, display, notebook computer, DPF, lead
Navigate any products or part with display function such as instrument.Because the display device solves the principle and above-mentioned Flexible Displays of problem
Panel 301 is similar, therefore the implementation of the display device may refer to the implementation of above-mentioned flexible display panels 301, repeat part not
Repeat again.
The embodiments of the invention provide a kind of compliant conductive structure, its preparation method, flexible display panels and display device,
The compliant conductive structure, including：Underlay substrate, and at least two layers graphene layer and at least one layer on underlay substrate are soft
Property metal conducting layer；Wherein, each flexible metal conductive layer is located between any two graphene layer.It is provided in an embodiment of the present invention
Compliant conductive structure, because graphene layer has preferable flexibility, any two graphene is arranged at by flexible metal conductive layer
Between layer, the compliant conductive structure can be made, with preferable flexibility and with good electric conductivity, further, it is also possible to
The metallic atom in the conductive layer of flexible metal is avoided to be diffused into other film layers, such as insulating barrier, so as to prevent pollution miscellaneous
Matter spreads.Because graphene layer has very high light transmission rate, when the flexible metal conductive layer is made up of metal nano material,
Above-mentioned compliant conductive structure also has higher light transmission rate.
Obviously, those skilled in the art can carry out the essence of various changes and modification without departing from the present invention to the present invention
God and scope.So, if these modifications and variations of the present invention belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising including these changes and modification.
Claims (10)
1. a kind of compliant conductive structure, it is characterised in that including：Underlay substrate, and on the underlay substrate at least
Two layers of graphene layer and at least one layer of flexible metal conductive layer；Wherein,
Each flexible metal conductive layer is located between graphene layer described in any two.
2. compliant conductive structure as claimed in claim 1, it is characterised in that the compliant conductive structure is organic electroluminescent
The negative electrode or anode of display device；Or,
The compliant conductive structure is public electrode or pixel electrode；Or,
The compliant conductive structure is touch control electrode.
3. compliant conductive structure as claimed in claim 1 or 2, it is characterised in that the flexible metal conductive layer is received by metal
Rice material is constituted.
4. a kind of flexible display panels, it is characterised in that including：Compliant conductive structure as described in claim any one of 1-3.
5. flexible display panels as claimed in claim 4, it is characterised in that the flexible display panels are organic electroluminescent
Display panel or liquid crystal display panel.
6. the flexible display panels as described in claim 4 or 5, it is characterised in that the flexible display panels are that touch-control is shown
Panel.
7. the preparation method of a kind of compliant conductive structure as described in claim any one of 1-3, it is characterised in that at least wrap
Include：
Layer graphene layer is formed on the underlay substrate；
Flexible metal conductive layer is formed on the graphene layer；
One layer of graphene layer is re-formed on the flexible metal conductive layer.
8. preparation method as claimed in claim 7, it is characterised in that the graphene layer makes by the following method：
One layer of graphene layer is made on sacrifice layer；
Transfer support body layer is formed on the surface of the graphene layer；
Remove the sacrifice layer；
There is the side of the graphene layer to fit on the underlay substrate transfer support body layer；
Remove the transfer support body layer.
9. preparation method as claimed in claim 7, it is characterised in that the flexible metal conductive layer is by metal nano material structure
Into；
The formation flexible metal conductive layer on the graphene layer, including：
The metal nano material is dissolved in macromolecule polymer solution；
The macromolecule polymer solution is coated on the graphene layer；
The substrate is dried, to obtain the flexible metal conductive layer.
10. a kind of display device, it is characterised in that including：Flexible display panels as described in claim any one of 4-6.
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| CN108628052A (en) * | 2018-04-25 | 2018-10-09 | 江西沃格光电股份有限公司 | Electrochromism module and electrochomeric glass |
| CN108831306A (en) * | 2018-06-22 | 2018-11-16 | 武汉华星光电半导体显示技术有限公司 | Display panel and electronic equipment |
| CN110504384A (en) * | 2019-08-29 | 2019-11-26 | 京东方科技集团股份有限公司 | Organic electroluminescence device and display panel |
| CN110993820A (en) * | 2019-12-05 | 2020-04-10 | 京东方科技集团股份有限公司 | Display panel and manufacturing method thereof, and manufacturing method of electrode |
| CN112757724A (en) * | 2020-12-29 | 2021-05-07 | 宁波世一科技有限责任公司 | Flexible metal-based graphene electrothermal material and preparation method thereof |
| CN116575259A (en) * | 2023-02-20 | 2023-08-11 | 嘉兴学院 | Preparation method of magnetic graphene cellulose composite material and flexible light-emitting device |
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| CN110993820A (en) * | 2019-12-05 | 2020-04-10 | 京东方科技集团股份有限公司 | Display panel and manufacturing method thereof, and manufacturing method of electrode |
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| CN112757724A (en) * | 2020-12-29 | 2021-05-07 | 宁波世一科技有限责任公司 | Flexible metal-based graphene electrothermal material and preparation method thereof |
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| CN116575259A (en) * | 2023-02-20 | 2023-08-11 | 嘉兴学院 | Preparation method of magnetic graphene cellulose composite material and flexible light-emitting device |
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