CN107331590B - Plesiochronous laser package system and method - Google Patents
Plesiochronous laser package system and method Download PDFInfo
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- CN107331590B CN107331590B CN201610284183.3A CN201610284183A CN107331590B CN 107331590 B CN107331590 B CN 107331590B CN 201610284183 A CN201610284183 A CN 201610284183A CN 107331590 B CN107331590 B CN 107331590B
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- 230000008859 change Effects 0.000 claims abstract description 48
- 239000011521 glass Substances 0.000 claims description 44
- 238000004806 packaging method and process Methods 0.000 claims description 42
- 238000007789 sealing Methods 0.000 claims description 40
- 238000009529 body temperature measurement Methods 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 230000033001 locomotion Effects 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 13
- 230000007246 mechanism Effects 0.000 claims description 10
- 230000009467 reduction Effects 0.000 claims description 4
- 239000005357 flat glass Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 14
- 239000006059 cover glass Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
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- 229910052760 oxygen Inorganic materials 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 239000006121 base glass Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
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Abstract
The present invention provides a kind of plesiochronous laser package system and method, the system comprises: controller module, laser module, laser scanning module, Temperature Measure Control module and host computer；It is modified by the laser power control signal that controller module exports Temperature Measure Control module in the single scan period, the hermetically sealed requirement of OLED display can not only be met, and the change of laser output power can be controlled within the single sweep operation period, improve the temperature uniformity of seal line corner, enable the more uniform Synchronous Heating of frit, realizes the accurate control of frit temperature curve.
Description
Technical Field
The invention relates to the technical field of semiconductors, in particular to a quasi-synchronous laser assembly system and a method.
Background
Optoelectronic semiconductor devices have been widely used in various fields of life. The OLED has the characteristics of good color ratio, wide viewing angle, high response speed and the like, and becomes a hotspot of research, so that the OLED has good application prospect. However, the electrodes and organic layers in the OLED display are very sensitive to oxygen and moisture, and the oxygen and moisture permeating into the OLED device from the external environment may seriously shorten the life span of the OLED device. It is therefore important to provide an effective hermetic seal for OLED devices.
The factors influencing the hermetic sealing of the OLED device mainly include:
the hermetic seal should provide oxygen (10)-3Centimeter3Rice/rice2Day) and water (10)-6Gram/meter2A day);
the size of the hermetic seal should be as small as possible (e.g., less than 2mm) so that it does not adversely affect the size of the OLED display;
the temperatures generated during the sealing process should not damage the materials (e.g., electrodes and organic layers) in the OLED display. For example, the first pixel of an OLED in an OLED display, which is about 1-2 mm from the seal, should not be heated to a temperature above 100 ℃ during the sealing process;
the gas released in the sealing process should not pollute the substances in the OLED display;
the hermetic seal should allow point connection components (e.g., thin film chromium electrodes) to enter the OLED display.
In recent years, a sealing method using frit-assisted laser heating is applied to the sealing of OLED displays. Wherein the frit doping is a material having a high absorption rate for a specific wavelength of light, which has a characteristic of a low melting point. A high energy laser is used to heat and soften the frit, which is typically about 0.7 mm to 1 mm wide and 6mm to 100 microns thick, to form a hermetic seal between the cover glass on which the frit is located and the substrate glass on which the OLEDs are located. In a method for sealing an OLED display using a laser quasi-synchronous approach, a laser outputs controllable laser energy to sequentially irradiate sealing lines coated with frit at high speed, and a plurality of scanning cycles are repeated to heat and soften the frit nearly simultaneously to form a hermetic seal. In this scanning mode, the temperature of a fixed point or a plurality of points in each scanning period is acquired by adding a pyrometer, so that the encapsulation temperature control which changes according to the scanning period can be realized. The closed-loop quasi-synchronous heating glass frit mode is limited by the frequency of temperature sampling and control, and cannot realize complete temperature control on a packaging line under a high-speed condition, so that the laser control power cannot be changed between temperature sampling points, and uneven temperature distribution can be formed at the corner part of the sealing line. Such an uneven temperature distribution within the frit can lead to the development of cracking, residual stress or delamination problems, which can prevent or impair the hermetic connection between the cover glass and the substrate glass.
Therefore, how to improve the problem of uneven temperature distribution inside the glass frit in the prior art has become a technical problem to be solved urgently by those skilled in the art.
Disclosure of Invention
The invention aims to provide a quasi-synchronous laser packaging system and a quasi-synchronous laser packaging method, which solve the problem of uneven temperature field distribution during closed-loop quasi-synchronous packaging of glass material and are beneficial to improving the packaging quality of an OLED display.
To achieve the above and other related objects, the present invention provides a quasi-synchronous laser packaging system for sealing a glass package including a cover glass, a frit, a substrate glass, an OLED layer, and an electrode, the laser packaging system comprising: the device comprises a controller module, a laser scanning module, a temperature measurement control module and an upper computer; wherein,
the laser module is used for emitting laser beams and transmitting the laser beams to the laser scanning module;
the laser scanning module is used for projecting the laser beam on the frit and scanning the frit along a sealing line;
the temperature measurement control module is used for measuring the temperature of the corresponding glass material at one or more moments when the laser light spots irradiate and outputting a laser power control signal to the controller module;
the controller module is used for synchronously controlling the laser module and the laser scanning module, correcting the laser power control signal and outputting the corrected laser power control signal to the laser module to realize synchronization of laser power adjustment operation and laser moving scanning operation, and correcting the laser scanning speed control signal and outputting the corrected laser scanning speed control signal to the laser scanning module to realize synchronization of laser scanning speed adjustment operation and laser moving scanning operation.
Optionally, the controller module is a single controller, or a control system formed by combining a plurality of controllers, or a control board card integrally installed in the upper computer.
Optionally, the laser scanning module includes a servo motion mechanism for changing a direction of the laser beam to deflect the laser beam at an angle in any direction with a fixed shaft as a reference.
Optionally, the deflection direction and the deflection angle of the laser beam are controlled by a control signal sent to the laser scanning module by the controller module.
Optionally, the output power of the laser beam and the turning on and off of the laser module are controlled by a control signal sent to the laser module by the controller module.
Optionally, the controller module matches the output power of the laser beam and the turning on and off of the laser module with the movement of the servo-moving mechanism.
The invention also provides a quasi-synchronous laser packaging method, which comprises the following steps:
providing a laser beam to project onto a frit, scanning the frit for one circle by the laser beam along a sealing line, and simultaneously collecting the temperature of the frit corresponding to the laser spot irradiation position at one or more moments, wherein one circle is a scanning period;
step two, comparing and calculating the acquired temperature value with a set temperature value to obtain a laser power control signal, adjusting the laser beam according to the laser power control signal in the next scanning period to enable the laser beam to generate a preset change at a preset position, so that each point on the sealing line can obtain uniform temperature rise in one scanning period, and acquiring the temperature of the corresponding glass material at one or more moments when the laser spot is irradiated;
and step three, repeating the step two until the glass frit obtains enough energy, and connecting the cover plate glass and the substrate glass together to form a hermetic seal.
Optionally, the predetermined position includes a fixed position and a non-fixed position, the fixed position includes an electrode region on the substrate glass and a corner of the sealing line, and the non-fixed position is a straight line segment in the sealing line.
Optionally, the temperature acquisition point corresponding to one or more time instants is a fixed position on the scanning path or an unfixed position on the scanning path.
Optionally, the adjusting the laser beam according to the laser power control signal to make the laser beam generate a predetermined change at a predetermined position includes:
synchronizing the laser power control signal with a laser movement scanning operation, for an unsecured position in the scanning path, controlling the laser power of the laser beam at the unsecured position with the acquired laser power control signal; and for a fixed position in the scanning path, correcting the laser power control signal according to a preset power curve, and enabling the laser power control signal to generate linear or nonlinear change so as to control the laser power of the laser beam at the fixed position by the corrected laser power signal.
Optionally, the adjusting the laser beam according to the laser power control signal to make the laser beam generate a predetermined change at a predetermined position includes:
and synchronizing the laser power control signal and the scanning speed of the laser beam with the laser moving scanning operation, controlling the laser power of the laser beam during scanning by using the acquired laser power control signal, correcting the scanning speed of the laser beam according to a speed-scanning track control curve by using the laser power control signal as a reference during scanning the fixed position, so that the scanning speed is linearly or nonlinearly changed, and controlling the scanning speed of the laser beam at the fixed position by using the corrected scanning speed.
Optionally, the adjusting the laser beam according to the laser power control signal to make the laser beam generate a predetermined change at a predetermined position includes:
synchronizing the laser power control signal, the scanning speed of the laser beam and the laser moving scanning operation, and controlling the laser power of the laser beam at the non-fixed position by the collected laser power control signal for the non-fixed position in the scanning path; and for a fixed position in the scanning path, correcting the laser power control signal according to a preset power curve to enable the laser power control signal to generate linear or nonlinear change, controlling the laser power of the laser beam at the fixed position by using the corrected laser power signal, and correcting the scanning speed of the laser beam according to a speed-scanning track control curve by taking the laser power control signal as a reference to enable the scanning speed to generate linear or nonlinear change, so as to control the scanning speed of the laser beam at the fixed position by using the corrected scanning speed.
Optionally, a region before the start point of the scanning cycle is selected as a start region of laser scanning, and when the start region is scanned, the scanning speed of the laser beam in the start region is corrected according to a preset start region temperature curve by using the laser power control signal as a reference, so that the rise of the frit temperature in the start region matches with the change of the scanning speed.
Optionally, a backward region from the end point of the scanning period is selected as an end region of laser scanning, and when the end region is scanned, the scanning speed of the laser beam in the end region is corrected according to a preset end region temperature curve by taking the laser power control signal as a reference, so that the reduction of the frit temperature in the end region is matched with the change of the scanning speed.
Compared with the prior art, the quasi-synchronous laser packaging system and method provided by the invention have the following beneficial effects:
1. according to the invention, the controller module is used for correcting the laser power control signal output by the temperature acquisition control module in a single scanning period, so that the requirement of airtight sealing of the OLED display can be met, the change of the laser output power can be controlled in the single scanning period, the temperature uniformity at the corner of a sealing line is improved, the glass frit can be uniformly and synchronously heated, and the accurate control of the glass frit temperature curve is realized;
2. according to the invention, the preset temperature curves are set in the laser scanning start and end areas, so that the temperature change of the glass material in the start area and the end area is matched with the scanning speed change, the temperature distribution of the laser start point and the stop point can be improved in the closed-loop packaging process, and the over-burning phenomenon is prevented.
Drawings
Fig. 1 is a schematic structural diagram of a quasi-synchronous laser packaging system according to an embodiment of the present invention.
Fig. 2 is a top view of a frit-sealed OLED display according to an embodiment of the present invention.
Fig. 3 is a flowchart of a method for quasi-synchronous laser packaging according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a quasi-synchronous laser packaging system according to a second embodiment of the present invention.
Fig. 5 is a schematic diagram of a frit pattern of an OLED display according to a second embodiment of the present invention.
Fig. 6 is a schematic diagram of a modified power-scan trajectory curve according to a second embodiment of the present invention.
Fig. 7 is a diagram illustrating a curve of a power-scan trajectory after modification according to a second embodiment of the present invention.
Fig. 8 is a schematic diagram of a power-scan trajectory curve in multiple scan cycles according to a second embodiment of the present invention.
Fig. 9 is a schematic diagram of a laser power control curve outputted by a pyrometer controller according to a second embodiment of the present invention.
Fig. 10 is a schematic diagram of a modified power control curve according to a second embodiment of the present invention.
Fig. 11 is a block diagram of a control system according to a second embodiment of the present invention.
Fig. 12 is a schematic diagram of a predetermined speed-scanning trajectory control curve according to a second embodiment of the present invention.
Detailed Description
In order to make the contents of the present invention more clearly understood, the contents of the present invention will be further described with reference to the accompanying drawings. The invention is of course not limited to this particular embodiment, and general alternatives known to those skilled in the art are also covered by the scope of the invention.
The present invention is described in detail with reference to the drawings, and for convenience of explanation, the drawings are not enlarged partially according to the general scale, and should not be construed as limiting the present invention.
The core idea of the invention is as follows: the laser power control signal output by the temperature measurement control module in a single scanning period is corrected by the controller module, so that the requirement of airtight sealing of the OLED display can be met, the change of the laser output power can be controlled in the single scanning period, the temperature uniformity at the corner of a sealing line is improved, glass frit can be synchronously heated uniformly, and the accurate control of the temperature curve of the glass frit is realized.
[ EXAMPLES one ]
Fig. 1 is a schematic structural diagram of a quasi-synchronous laser packaging system according to an embodiment of the present invention. The quasi-synchronous laser packaging system is used for sealing a glass packaging body, and as shown in fig. 1, the quasi-synchronous laser packaging system comprises: the system comprises a controller module 110, a laser module 111, a laser scanning module 112, a temperature measurement control module 113 and an upper computer 114; the laser module 111 is used for emitting a laser beam 103 and transmitting the laser beam to the laser scanning module 112; the laser scanning module 112 is configured to project the laser beam 103 onto the frit 122 and scan the frit along a sealing line; the temperature measurement control module 113 is configured to measure the temperature of the frit 122 corresponding to the laser spot irradiation position at one or more moments, and output a laser power control signal 104 to the controller module 110; the controller module 110 is configured to synchronously control the laser module 111 and the laser scanning module 112, modify the laser power control signal 104 and output the modified laser power control signal to the laser module 111, so as to achieve synchronization between laser power adjustment operation and laser moving scanning operation, modify the laser scanning speed control signal and output the modified laser scanning speed control signal to the laser scanning module 112, and achieve synchronization between laser scanning speed adjustment operation and laser moving scanning operation.
The controller module 110 is a single controller, or a control system formed by combining a plurality of controllers, or a control board card integrally installed in the upper computer. The laser scanning module 112 includes a servo motion mechanism, which has a function of changing the direction of the laser beam 103, so that the laser beam 103 is deflected by an angle θ in any direction with a fixed spatial axis as a reference. The deflection direction and the polarization angle of the laser beam 103 are controllable, and the variation rule is controlled by the control signal 101 sent by the controller module 110 to the laser scanning module 112. The servo motion mechanism can rapidly and accurately change the deflection posture of the laser beam 103, and can control the deflection motion characteristics of the laser beam 103 in the changing process, such as angular velocity, angular acceleration and the like, according to the control signal 101 sent to the laser scanning module 112 by the controller module 110.
The laser module 111 can generate laser light with a specific wavelength and transmit the light energy to the laser scanning module 112 with a certain power. The laser energy with certain power is adjustable in real time. The laser output power is controlled by the laser power control signal, and the laser module 111 can change the power of the output laser in a short time in response to the power control signal. The output power of the laser beam 103 and the switching on and off of the laser module 111 are controlled by the control signal 102 sent by the controller module 110 to the laser module 111.
The laser scanning module 112 projects a laser beam 103 onto the frit 122. The laser beam 103 forms a spot 105 having a particular topography and size on the surface of the frit 122. The frit 122 is located on the cover glass 121 of the glass package 120. A typical example of the glass encapsulation body 120 is an OLED display, whose main structure includes a cover glass 121, a frit 122, a substrate glass 123, an OLED layer 125, and an electrode 124. The cross-sectional view is shown in fig. 1 and the top view is shown in fig. 2. The frit 122 is pre-cured on the cover glass 121 through a screen printing, pre-sintering step to form a rounded rectangular sealing line having a certain thickness. The OLED layer 125 on the glass substrate 123 is located inside the frit sealing line, while the electrodes 124 connecting the inside and outside of the OLED display are present on the glass substrate 123, as shown in fig. 1.
The temperature measurement control module 113 can measure the temperature of the frit at the position of the light spot 105 in a non-contact manner with limited time/spatial resolution, and forms a closed-loop control loop with the laser power control signal 104, and feeds the closed-loop control loop back to the controller module 110, thereby realizing the closed-loop control of the target temperature.
The controller module 110 can synchronously control the laser module 111 and the laser scanning module 112, so as to control the on and off of the laser module 111 and the output power of the laser beam, and enable the on and off of the laser module 111 and the adjustment of the laser power to be matched with the movement of the servo movement mechanism in the laser scanning module 112. Alternatively, the controller module 110 can control the laser power control signal of the laser module 111 at a higher resolution than the control resolution of the laser scanning module 112 and match the control of the two. The controller module 110 can collect and process the laser power control signal output by the temperature measurement control module 113 with sufficient resolution, and change the laser power control signal with a predetermined rule and resolution, wherein the control resolution is higher than the temperature collection control resolution; while the controller module 110 is capable of controlling the laser scanning module 112 and laser module 111 with a control resolution higher than that of the temperature closed loop control loop. The controller module 110 can control the temperature measurement control module 113 and the laser scanning module 112 to match the temperature sampling point with the laser scanning trajectory.
Please refer to fig. 3, which is a flowchart illustrating a quasi-synchronous laser packaging method according to an embodiment of the present invention. As shown in fig. 3, the quasi-synchronous laser packaging method includes the following steps:
providing a laser beam to project onto a frit, scanning the frit for one circle by the laser beam along a sealing line, and simultaneously collecting the temperature of the frit corresponding to the laser spot irradiation position at one or more moments, wherein one circle is a scanning period;
step two, comparing and calculating the acquired temperature value with a set temperature value to obtain a laser power control signal, adjusting the laser beam according to the laser power control signal in the next scanning period to enable the laser beam to generate a preset change at a preset position, so that each point on the sealing line can obtain uniform temperature rise in one scanning period, and acquiring the temperature of the corresponding glass material at one or more moments when the laser spot is irradiated;
step three, repeating the step two until
The frit gains sufficient energy to join the cover glass and the base glass together to form a hermetic seal.
Referring to fig. 3, and referring to fig. 1, a quasi-synchronous laser packaging method according to the present invention is described in detail:
in the first step: the controller module 110 controls the laser module 111 and the laser scanning module 112 to project the laser beam 103 onto the frit 122 such that the laser beam 103 scans the frit along the sealing line. One scan cycle is completed from the beginning of the laser beam 103 projection onto the frit 122 to the end of the laser beam 103 scanning back to the point along the seal line. In one scanning period, the temperature of the frit 122 corresponding to the irradiation position of the laser spot 105 at one or more time is collected by the temperature measurement control module 113.
In the second step, the temperature measurement control module 113 obtains the laser power control signal 104 by comparing and calculating the collected temperature value with a set temperature value, and in the next scanning period, adjusts the laser beam 103 according to the laser power control signal 104 to make the laser beam 103 generate a predetermined change at a predetermined position, so as to realize that each point on the sealing line obtains a uniform temperature rise in one scanning period, and collects the temperature of the frit 122 corresponding to the laser spot irradiation position at one or more moments while scanning.
The frit 122 absorbs the laser energy and is then heated in sequence during a scan cycle. Due to the faster scanning speed, it can be approximated that the frit 122 on the sealing line is heated simultaneously. The acquisition point of temperature for one or more moments in time is a fixed location on the scan path or an unsecured location on the scan path. The predetermined position includes a fixed position including an electrode region on the substrate glass and a corner of the seal line, and an unfixed position which is a straight line segment in the seal line.
The temperature measurement control module 113 obtains a specific laser power control signal 1 by comparing and calculating the acquired temperature value with a set temperature value. The controller module 110 corrects the laser power control signal 103 and outputs the corrected laser power control signal to the laser module 111, and the laser module 111 adjusts the laser beam 103 to enable the laser beam 103 to generate a predetermined change at a predetermined position, so that each point on the sealing line obtains uniform temperature rise in a scanning period, and the temperature of the frit corresponding to the laser spot irradiation position at one or more moments is acquired while scanning. In a scanning period, the controller module 110 obtains 1 or several laser power control signals, and adjusts the laser beam 103 according to the laser power control signal 104, so that the laser beam 103 generates a predetermined change at a predetermined position, specifically: synchronizing the laser power control signal 104 with a laser movement scanning operation, for an unsecured position in the scanning path, controlling the laser power of the laser beam at the unsecured position with a currently acquired laser power control signal 104; and for the fixed position in the scanning path, correcting the laser power control signal 104 according to a preset power control curve to enable the laser power control signal 104 to generate linear or nonlinear change, and controlling the laser power of the laser beam at the fixed position by the corrected laser power signal to realize laser power adjustment, so that the frit 122 on the sealing line can obtain relatively uniform energy and generate relatively uniform temperature rise, and the precise control of the frit temperature curve is realized. The controller module 110 controls the relative motion timing of the laser power control signal and the laser scanning module to synchronize the laser power adjustment operation and the laser moving scanning operation.
In step three, the controller module 110 controls the laser module 111 and the laser scanning module 112 to repeat the scanning cycle of the laser beam 103, and the laser scanning of a plurality of scanning cycles is used to obtain sufficient energy to the frit 122, so as to connect the cover glass 121 and the substrate glass 123 together to form a hermetic seal. The sufficient energy may be manifested as the temperature of the frit reaching and exceeding its softening point (melting point). The laser scanning in a plurality of scanning periods heats the glass material according to a preset temperature curve in a temperature feedback control mode, and finally reaches the target temperature.
An optimized control method is adopted for the start and stop areas of the laser scanning. For example: selecting a region before the starting point of the scanning period as a starting region of laser scanning, and correcting the scanning speed of the laser beam in the starting region according to a preset starting region temperature curve by taking the laser power control signal 104 as a reference when the starting region is scanned so as to enable the temperature rise of the glass frit in the starting region to be matched with the speed change of scanning; and selecting a backward section of area from the end point of the scanning period as an end area of laser scanning, and correcting the scanning speed of the laser beam in the end area according to a preset end area temperature curve by taking the laser power control signal as a reference when the end area is scanned, so that the reduction of the temperature of the frit in the end area is matched with the change of the scanning speed. Therefore, the temperature distribution of the laser starting point and the laser stopping point can be improved in the closed-loop packaging process, and the over-burning phenomenon is prevented.
In another embodiment of the present invention, after receiving the laser power control signal 104, the controller module 110 may further correct the scanning speed and output the corrected scanning speed to the laser scanning module 112, so as to synchronize the scanning speed adjustment operation and the laser movement scanning operation. Similarly, the scanning speed and the scanning power can be revised simultaneously to achieve the same purpose.
For example: adjusting the laser beam according to the laser power control signal to enable the laser beam to generate a predetermined change at a predetermined position, specifically: synchronizing the laser power control signal 104 and the scanning speed of the laser beam 103 with the laser moving scanning operation, controlling the laser power of the laser beam during scanning by the acquired laser power control signal 104, correcting the scanning speed of the laser beam 103 according to a speed-scanning track control curve by taking the laser power control signal 104 as a reference during scanning the fixed position, enabling the scanning speed to generate linear or non-linear change, and controlling the scanning speed of the laser beam at the fixed position by the corrected scanning speed.
Or, the laser beam 103 is adjusted according to the laser power control signal 104, so that the laser beam 103 generates a predetermined change at a predetermined position, specifically: synchronizing the laser power control signal 104 and the scanning speed of the laser beam 103 with the laser moving scanning operation, and controlling the laser power of the laser beam 103 at the non-fixed position by the collected laser power control signal 104 for the non-fixed position in the scanning path; and for a fixed position in the scanning path, correcting the laser power control signal 104 according to a preset power curve to enable the laser power control signal 104 to generate linear or nonlinear change, controlling the laser power of the laser beam at the fixed position by using the corrected laser power signal, and correcting the scanning speed of the laser beam 103 according to a speed-scanning track control curve by taking the laser power control signal 104 as a reference to enable the scanning speed to generate linear or nonlinear change, and controlling the scanning speed of the laser beam at the fixed position by using the corrected scanning speed.
[ example two ]
On the basis of the first embodiment, the present embodiment provides a more specific quasi-synchronous laser packaging system and method.
Fig. 4 is a schematic structural diagram of a quasi-synchronous laser packaging system according to a second embodiment of the present invention. As shown in fig. 4, the quasi-synchronous laser packaging system includes: a scanning controller 10, a laser 11, a pyrometer 12, a pyrometer controller 13, a scanning galvanometer 14, and a computer (PC) 15. The scan controller 10, the laser 11, the pyrometer 12, the pyrometer controller 13, the scanning galvanometer 14, and the computer (PC)15 are respectively equivalent to the subordinate concepts of the controller module, the laser module, the temperature measurement control module, the laser scanning module, and the upper computer 114 in the first embodiment. The laser 11 is connected to the scanning galvanometer 14 through an optical fiber, and the pyrometer 12 and the laser transmission path are coupled in the scanning galvanometer 14 through a special optical structure, so that the pyrometer 12 can detect the temperature at the laser beam irradiation spot. The laser 11 is directly connected to the scanning galvanometer 14 through an optical fiber. The sealed glass package 120 is an OLED display, and is shown in fig. 1 in a cross-sectional view and fig. 2 in a top view. A schematic diagram of the frit seal line structure on an OLED display is shown in fig. 5.
The quasi-synchronous laser packaging method provided by the second embodiment is explained in detail as follows, and comprises the following steps:
firstly, parameters such as target temperature or temperature curve, temperature acquisition and control frequency are issued to the pyrometer controller 13 through the PC15, and parameters such as scanning speed and trajectory are issued to the scanning controller 10.
Secondly, controlling the laser 11 and the scanning galvanometer 14 to project the laser beam onto the frit such that the laser beam moves along the frit pattern at a specific power and a high speed (e.g., 3 m/s); the laser 11 is controlled to make the laser beam irradiate on the frit at point a2 in fig. 5 with a certain shape and size of a spot, start outputting, and scan a circle along the sealing line to return to point a 2. The point a2 is an example point, and it is understood that the laser output start point is not limited to this position. The frit is heated in sequence after absorbing the laser energy during one scan cycle. Due to the fast scanning speed, it can be approximated that the frit on the sealing line is heated simultaneously.
In the above-described one scanning period, one scanning control manner is to set the temperature acquisition and control frequency of the pyrometer controller 13 to match the current scanning speed to a specific value. The temperature acquisition and control frequency may be implemented to acquire the temperature of a fixed or non-fixed point of the frit on the scan trajectory during one scan cycle, as shown at point s1 in fig. 5. Based on the currently acquired temperature and the target temperature, the pyrometer controller 13 calculates and outputs a laser power control signal at the next time in a short time.
In the current scanning period, the scanning controller 10 collects the laser power control signal output by the pyrometer controller 13. The laser power control signal is corrected at the corner with the signal as a reference to cause linear or nonlinear change. The actual laser power change occurs after the temperature acquisition point s1, and the corrected power-scanning track curve is shown in fig. 6 and 7. The corrected laser power control curve is not limited to the illustrated curve. The scanning controller 10 outputs a corrected laser power control signal to the laser 11, and synchronizes the corrected laser power control signal with the laser moving scanning operation by using an internal synchronization mechanism, so that the laser power is changed in a predetermined position, and each point on the sealing line obtains relatively uniform temperature rise in one scanning period.
Finally, the laser 11 and the scanning galvanometer 14 are controlled to repeat the scanning cycle of the laser beam, and the frit obtains enough energy by the laser scanning of a plurality of scanning cycles, so that the cover glass 121 and the base glass 123 are connected together to form a hermetic seal. The power-scan trajectory over multiple scan cycles is shown in fig. 8, but is not limited to fig. 8. The multi-scan mode may be a mode in which the pyrometer controller 13 is set to heat and cool the frit on the sealing line with a predetermined temperature profile.
And adopting an optimized control method for the starting and stopping areas of the laser scanning. In an optimization method, in a starting region, as shown as a1 point in fig. 4, a preset temperature curve of the pyrometer controller 13 is set, so that the temperature rise of the glass material from a1 point to a2 point is matched with the speed change of a scanning mechanism in the scanning galvanometer 14, and an overburning phenomenon is avoided; after all scanning periods are finished, the preset temperature curve of the pyrometer controller 13 is set, so that the reduction of the temperature of the frit from the point a2 to the point a3 is matched with the speed change of a scanning mechanism in the scanning galvanometer 14, the uniformity of a temperature field in a stop area is not influenced, the temperature distribution of a laser starting point and a laser stopping point can be improved in the closed-loop packaging process, and the overburning phenomenon is prevented.
The corrected power-scanning track curve can be regarded as being obtained by synthesizing a feedback control curve and a feedforward control curve, the control frequency of the traditional temperature closed-loop feedback control can only reach 5kHz at most, when the moving and scanning speed of a light spot reaches more than 3m/s, the spatial resolution corresponding to the closed-loop control is 1/5000 x 3-0.6 mm, and the packaging and scanning effect of the actual application is not ideal.In this embodiment, the temperature closed-loop control frequency can be set to ≧ 1/t1，t1The time taken for the spot to scan the frit pattern one week. When the closed loop control frequency is set to 1/t1During the process, the laser power only collects the temperature of the current spot once in each scanning period, the pyrometer controller 13 adjusts and changes the laser power control signal according to the comparison between the temperature and the target temperature, and a curve Pc of the laser power control signal output by the pyrometer controller 13 is shown in fig. 9. This signal is received by the scan controller 10, and a modified power control curve Po has been generated and stored in the scan controller 10 according to the current moving position of the light spot and predetermined special position information (e.g., corner region, electrode region), as shown in fig. 10. The value of the modified power control curve generally takes a negative value. The scanning controller 10 adds the values of the two control curves corresponding to the current time to obtain the power-scanning trajectory control curve Pset shown in fig. 8, the scanning controller 10 outputs the value of the obtained curve corresponding to the current time to the output power control end of the laser 11, and controls the change of the output power of the laser 11, so that the frit can be subjected to relatively uniform and sufficient temperature rise at each part, and finally a dense package is formed. Fig. 11 is a block diagram of a control system according to the present embodiment.
Similarly, for predetermined specific locations (e.g., corner regions, electrode regions) on the frit pattern, a change in scan speed can be used to achieve a temperature increase in the specific regions that is consistent with the temperature increase in other regions. Or, the scanning speed and the scanning power are simultaneously revised to achieve the same purpose. The way to change the scanning speed of the light spot is to use a predetermined speed-scanning track control curve, as shown in fig. 12.
In summary, according to the quasi-synchronous laser packaging system and method provided by the invention, the controller module corrects the laser power control signal output by the temperature measurement control module in a single scanning period, so that the requirement of hermetic sealing of the OLED display can be met, the change of the laser output power can be controlled in a single scanning period, the temperature uniformity at the corner of the sealing line is improved, the glass frit can be uniformly and synchronously heated, and the precise control of the glass frit temperature curve is realized; by setting the preset temperature curves in the laser scanning starting area and the laser scanning ending area, the temperature change of the glass material in the starting area and the glass material in the ending area are matched with the scanning speed change, so that the temperature distribution of a laser starting point and a laser stopping point can be improved in the closed-loop packaging process, and the over-burning phenomenon is prevented.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.
Claims (14)
1. A quasi-synchronous laser packaging system is used for sealing a glass packaging body, the glass packaging body comprises cover plate glass, glass frit, substrate glass, an OLED layer and electrodes, and the quasi-synchronous laser packaging system is characterized by comprising: the device comprises a controller module, a laser scanning module, a temperature measurement control module and an upper computer; wherein,
the laser module is used for emitting laser beams and transmitting the laser beams to the laser scanning module;
the laser scanning module is used for projecting the laser beam on the frit and scanning the frit along a sealing line;
the temperature measurement control module is used for measuring the temperature of the corresponding glass material at one or more moments when the laser light spots irradiate and outputting a laser power control signal to the controller module;
the controller module is used for synchronously controlling the laser module and the laser scanning module, correcting the laser power control signal according to the currently acquired laser power control signal or a preset power control curve, outputting the corrected laser power control signal to the laser module, and realizing synchronization of laser power adjustment operation and laser moving scanning operation.
2. The quasi-synchronous laser packaging system of claim 1, wherein the controller module is a single controller, or a control system formed by combining a plurality of controllers, or a control board card integrally installed in the upper computer.
3. The quasi-synchronous laser packaging system of claim 1, wherein the laser scanning module comprises a servo-motion mechanism for changing the direction of the laser beam to deflect the laser beam at an angle in any direction with respect to a fixed axis.
4. The quasi-synchronous laser packaging system of claim 3, wherein a deflection direction and a deflection angle of the laser beam are controlled by a control signal sent by the controller module to the laser scanning module.
5. The quasi-synchronous laser packaging system of claim 3, wherein the output power of the laser beam and the turning on and off of the laser module are controlled by a control signal sent to the laser module by the controller module.
6. The quasi-simultaneous laser packaging system of claim 5, wherein the controller module matches the output power of the laser beam and the turning on and off of the laser module to the movement of the servo-motion mechanism.
7. A quasi-synchronous laser packaging method is characterized by comprising the following steps:
providing a laser beam to project onto a frit, scanning the frit for one circle by the laser beam along a sealing line, and simultaneously collecting the temperature of the frit corresponding to the laser spot irradiation position at one or more moments, wherein one circle is a scanning period;
step two, in a scanning period, obtaining a laser power control signal by comparing and calculating the collected temperature value with a set temperature value, correcting the laser power control signal according to the laser power control signal or a preset power control curve, adjusting the laser beam by the corrected laser power control signal to realize the synchronization of the laser power adjustment operation and the laser moving scanning operation, correcting the laser scanning speed control signal by taking the corrected laser power control signal as a reference, adjusting the laser beam by the corrected laser scanning speed control signal to realize the synchronization of the laser scanning speed adjustment operation and the laser moving scanning operation, and adjusting the laser beam by the corrected laser power control signal and the corrected laser scanning speed control signal in the next scanning period, enabling the laser beam to generate preset change at a preset position, realizing that each point on the sealing line obtains uniform temperature rise in one scanning period, and acquiring the temperature of the corresponding glass material at the laser spot irradiation position at one or more moments while scanning;
and step three, repeating the step two until the glass frit obtains enough energy, and connecting the cover plate glass and the substrate glass together to form the airtight seal.
8. The method of claim 7, wherein the predetermined positions comprise fixed positions and non-fixed positions, the fixed positions comprise electrode regions on the substrate glass and corners of the seal line, and the non-fixed positions are straight line segments in the seal line.
9. The quasi-simultaneous laser packaging method of claim 8, wherein the temperature acquisition point corresponding to one or more time instants is a fixed position on the scanning path or an unsecured position on the scanning path.
10. The quasi-synchronous laser packaging method of claim 9, wherein the laser beam is adjusted according to the laser power control signal to cause a predetermined change of the laser beam at a predetermined position, specifically:
synchronizing the laser power control signal with a laser movement scanning operation, for an unsecured position in the scanning path, controlling the laser power of the laser beam at the unsecured position with the acquired laser power control signal; and for a fixed position in the scanning path, correcting the laser power control signal according to a preset power curve to enable the laser power control signal to generate linear or nonlinear change, and controlling the laser power of the laser beam at the fixed position by the corrected laser power control signal.
11. The quasi-synchronous laser packaging method of claim 8, wherein the laser beam is adjusted according to the laser power control signal to cause a predetermined change of the laser beam at a predetermined position, specifically:
and synchronizing the laser power control signal and the scanning speed of the laser beam with the laser moving scanning operation, controlling the laser power of the laser beam during scanning by using the acquired laser power control signal, correcting the scanning speed of the laser beam according to a speed-scanning track control curve by using the laser power control signal as a reference during scanning the fixed position, so that the scanning speed is linearly or nonlinearly changed, and controlling the scanning speed of the laser beam at the fixed position by using the corrected scanning speed.
12. The quasi-synchronous laser packaging method of claim 9, wherein the laser beam is adjusted according to the laser power control signal to cause a predetermined change of the laser beam at a predetermined position, specifically:
synchronizing the laser power control signal, the scanning speed of the laser beam and the laser moving scanning operation, and controlling the laser power of the laser beam at the non-fixed position by the collected laser power control signal for the non-fixed position in the scanning path; and for a fixed position in the scanning path, correcting the laser power control signal according to a preset power curve to enable the laser power control signal to generate linear or nonlinear change, controlling the laser power of the laser beam at the fixed position by using the corrected laser power control signal, and correcting the scanning speed of the laser beam according to a speed-scanning track control curve by taking the laser power control signal as a reference to enable the scanning speed to generate linear or nonlinear change, so as to control the scanning speed of the laser beam at the fixed position by using the corrected scanning speed.
13. The quasi-synchronous laser packaging method of claim 7, wherein a region before the starting point of the scanning period is selected as a starting region of laser scanning, and when the starting region is scanned, the scanning speed of the laser beam in the starting region is corrected according to a preset starting region temperature curve by taking the laser power control signal as a reference, so that the temperature of the glass material in the starting region is increased to match the change of the scanning speed.
14. The quasi-synchronous laser packaging method of claim 7 or 13, wherein a region after the end of the scanning period is selected as an end region of laser scanning, and when the end region is scanned, the scanning speed of the laser beam in the end region is corrected according to a preset end region temperature curve by taking the laser power control signal as a reference, so that the reduction of the frit temperature in the end region is matched with the change of the scanning speed.
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| CN112018269B (en) * | 2019-05-31 | 2021-11-12 | 上海微电子装备（集团）股份有限公司 | Laser packaging method |
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