CN107321998A - The preparation method of copper gallium alloy powder - Google Patents

The preparation method of copper gallium alloy powder Download PDF

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Publication number
CN107321998A
CN107321998A CN201710605714.9A CN201710605714A CN107321998A CN 107321998 A CN107321998 A CN 107321998A CN 201710605714 A CN201710605714 A CN 201710605714A CN 107321998 A CN107321998 A CN 107321998A
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Prior art keywords
alloy powder
gallium alloy
preparation
copper gallium
crucible
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CN201710605714.9A
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CN107321998B (en
Inventor
胡智向
朱刘
黄宇彬
王波
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Vital Thin Film Materials Guangdong Co Ltd
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Qingyuan Xiandao Materials Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/02Making metallic powder or suspensions thereof using physical processes
    • B22F9/06Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B22F2009/0844Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid in controlled atmosphere
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00Aspects linked to processes or compositions used in powder metallurgy

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  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)

Abstract

The present invention relates to a kind of preparation method of copper gallium alloy powder, prepared using vacuum high-pressure atomization plant, preparation method comprises the following steps:S1, dispensing;S2, vacuumize after, protective gas protection under, heat up and be incubated cause raw materials melt mixing;S3, atomization are alloyed powder;S4, normal temperature is naturally cooling to, obtains obtained copper gallium alloy powder.The preparation method of copper gallium alloy powder of the present invention prepares the high copper gallium alloy powder of good flowing properties, low oxygen content, purity using powder by atomization method, dispensing can be carried out to the ratio requirement of copper gallium alloy powder according to different application demand, the purity of preparation-obtained copper gallium alloy powder reaches 6N.

Description

The preparation method of copper gallium alloy powder
Technical field
The present invention relates to a kind of preparation field of alloy powder, more particularly to a kind of preparation method of copper gallium alloy powder.
Background technology
CIGS(CuIn1-xGaxSe, CIGS)Thin-film solar cells has low cost, performance stabilization, radioresistance energy The advantages of power is strong, spectral response range is wide.Preparing CIGS at present mainly has two kinds of thinkings:Polynary substep evaporation and metal top set Selenizing after layer.Implementation method mainly has vapour deposition method, magnetron sputtering, molecular beam epitaxy technique, spray pyrolysis and flash set technology Deng.Wherein magnetically controlled sputter method has the advantages that composition is controllable, raw material availability is high, film compactness is good, uniform film thickness, is mesh The preceding most promising method for preparing CIGS films.Sputtering prepares CIG precursor thin films, because indium and gallium are all that fusing point is relatively low Metal, it is impossible to directly prepare that performance is stable, the CIG alloy target materials of even structure, therefore preparing CIG precursor thin films When, while using copper gallium alloy target and indium target or copper gallium alloy target and copper-indium alloy target sputtering sedimentation.In addition, During sputtering, the defect inside target can cause arc discharge, and influence CIGS absorbs the structure and quality of layer film. In order that the proportioning of gallium is controllable in CIGS thin-film and reduction causes the defect of arc discharge, it is necessary to make in sputter procedure Standby high-quality copper gallium alloy target, the copper gallium alloy powder prepared at present by conventional methods such as ball millings is because pattern is irregular And poor mobile performance, and amount of oxidation is up to more than 2000ppm, production efficiency is extremely low, simultaneously because being the life of multiple operation distinct device Production, it is impossible to produce the alloy split of high-purity 6N and the above, so the copper gallium alloy target relative density of production is relatively low, can only achieve 95% or so, oxygen content is higher in target, it is impossible to meets requirement of the high-quality CIGS thin-film to copper gallium target, and prepares stream It is the key factor for preparing high-quality copper gallium alloy target to move the high high-quality copper gallium alloy powder of good performance, low oxygen content, purity.
Thus, it is necessary to design a kind of preparation method of new copper gallium alloy powder to solve above-mentioned technical problem.
The content of the invention
The high high-quality copper gallium conjunction of good flowing properties, low oxygen content, purity is prepared it is an object of the invention to provide a kind of The preparation method of bronze.
To realize object defined above, the present invention is adopted the following technical scheme that:A kind of preparation method of copper gallium alloy powder, using true Prepared by outage pressure atomization plant, the atomization plant includes a smelting system, an atomization system, a pumped vacuum systems, a source of the gas Supply system, an integrated control system, the smelting system include a crucible, and the atomization system includes a spray chamber, described Spray chamber is built-in with an atomizer and the tundish above atomizer, and preparation method comprises the following steps:
S1, by two kinds of raw materials of high purity copper and high purity gallium according to ratio requirement carry out dispensing after, raw material is put into the earthenware of smelting system In crucible;
S2, vacuumize after, under protective gas protection so that crucible temperature is warming up to 1150 ~ 1450 DEG C, the heating-up time is 25 ~ Raw materials melt in 35min, crucible is incubated 20 ~ 40min into copper gallium alloy liquid, and crucible is slowly waved so that molten metal is abundant It is well mixed;
S3, molten metal are injected into the tundish on atomizer, and molten metal is flowed out by tundish bottom leakage eye, It is atomized by being met during atomizer with high velocity air or current as fine drop, atomized drop is fast in the spray chamber of closing Speed is frozen into alloy powder;
S4, be naturally cooling to normal temperature, toward atomization plant in be filled with protective gas to normal pressure and can open atomization plant and be made Copper gallium alloy powder.
As a further improvement on the present invention, the smelting system includes being arranged on the agitating paddle above crucible.
As a further improvement on the present invention, the rocking tendency of the crucible is ± 60 °.
As a further improvement on the present invention, the protective gas is inert gas or nitrogen.
As a further improvement on the present invention, the purity of obtained copper gallium alloy powder be 6N and more than.
As a further improvement on the present invention, the purity of the high purity copper be 5N and more than.
As a further improvement on the present invention, the purity of the high purity gallium be 5N and more than.
As a further improvement on the present invention, the crucible uses high purity graphite crucible or alumina crucible.
As a further improvement on the present invention, the pressure of the atomizer is 6.8 ~ 10.4MPa.
As a further improvement on the present invention, the atomization plant also include a powder collection system, a cooling water system, A support for supporting atomization system.
The preparation method of copper gallium alloy powder of the present invention prepares good flowing properties, low oxygen content, purity using powder by atomization method High copper gallium alloy powder, can carry out dispensing according to different application demand to the ratio requirement of copper gallium alloy powder, prepared to obtain The purity of copper gallium alloy powder reach 6N.
Brief description of the drawings
Fig. 1 is microcosmic for the preparation-obtained copper gallium alloy powder of preparation method embodiment 2 of copper gallium alloy powder of the present invention Shape appearance figure.
Embodiment
Technical scheme is clearly and completely described below in conjunction with the embodiment of the present invention, it is clear that described implementation Example only a part of embodiment of the invention, rather than whole embodiments.Based on the embodiment in the present invention, this area is common The every other embodiment that technical staff is obtained under the premise of creative work is not made, belongs to the model that the present invention is protected Enclose.
The preparation method of copper gallium alloy powder of the present invention is prepared using vacuum high-pressure atomization plant, and atomization plant includes a melting System, an atomization system, a pumped vacuum systems, a source of the gas supply system, an integrated control system, smelting system include an earthenware Crucible, atomization system includes a spray chamber, and spray chamber is built-in with an atomizer and the tundish above atomizer, In certain embodiments of the present invention, atomization plant also includes a powder collection system, a cooling water system, for supporting atomization One support of system.
Using above-mentioned atomization plant, the preparation method of copper gallium alloy powder comprises the following steps:
S1, by two kinds of raw materials of high purity copper and high purity gallium according to ratio requirement carry out dispensing after, raw material is put into smelting system crucible It is interior;High purity copper is solid-state, can be any forms such as particle, bar-shaped, sheet, ingot shape;High purity gallium can be liquid or Solid Gallium Block;
S2, vacuumize after, under protective gas protection so that crucible temperature is warming up to 1150 ~ 1450 DEG C, the heating-up time is 25 ~ Raw materials melt in 35min, crucible is incubated 20 ~ 40min into copper gallium alloy liquid, and crucible is slowly waved so that molten metal is abundant It is well mixed;
S3, molten metal are injected into the tundish on atomizer, and molten metal is flowed out by tundish bottom leakage eye, It is atomized by being met during atomizer with high velocity air or current as fine drop, atomized drop is fast in the spray chamber of closing Speed is frozen into alloy powder;
S4, be naturally cooling to normal temperature, toward atomization plant in be filled with protective gas to normal pressure and can open atomization plant and be made Copper gallium alloy powder.
In certain embodiments of the present invention, smelting system includes being arranged on the agitating paddle above crucible, and agitating paddle is used In the uniform mixing for accelerating molten metal.
In certain embodiments of the present invention, the rocking tendency of the crucible is ± 60 °, is driven by craft or motor Crucible can be achieved continuously to wave in the range of ± 60 °, agitating paddle can be shaken during insulation is melted, by the alloy of melting Liquid stirs.
In certain embodiments of the present invention, the protective gas is inert gas or nitrogen.
In certain embodiments of the present invention, the purity of obtained copper gallium alloy powder be 6N and more than.
In certain embodiments of the present invention, the purity of the high purity copper be 5N and more than.
In certain embodiments of the present invention, the purity of the high purity gallium be 5N and more than.
In certain embodiments of the present invention, the crucible uses high purity graphite crucible or alumina crucible.
In certain embodiments of the present invention, the pressure of the atomizer is 6.8 ~ 10.4MPa.
Embodiment 1.
By copper gallium mass ratio 75:25 weigh the high purity graphite that 5N copper particles 21kg, 5N Solid Gallium 7kg is put into atomization plant respectively In crucible, close unlatching pumped vacuum systems after atomization plant and make it that Absolute truth reciprocal of duty cycle is 450Pa in atomization plant, is filled with 5N high-purity Then nitrogen to normal pressure is again turned on pumped vacuum systems and vacuumizes until the Absolute truth reciprocal of duty cycle of atomization plant opens melting to 82Pa Intermediate frequency induction heating device in system, passes through the power of slow adjusting means so that the smelting temperature in crucible is warming up to 1450 DEG C and 35min is incubated, crucible is slowly waved in insulating process, swing angle is between ± 60 °, and is interrupted shake stirring Oar, it is ensured that aluminium alloy is full and uniform, after insulation terminates, is set to 10.4MPa by the pressure of atomizer, topples over molten alloy Liquid, enters tundish by drainage trough, is contacted finally by atomizer with high pressure draught, and molten alloy liquid is atomized to be tiny Drop and be quickly cooled in spray chamber formation alloy powder.Material closes atomization plant and sets atomization after the completion of being all atomized It is standby to be cooled to normal temperature, take out and the interval spherical copper gallium alloy powder of 6N of different-grain diameter is can obtain after alloy powder is sieved, lead to It is 142ppm to cross using oxygen content in LECO600 oxygen analysers detection and analysis powder.
Embodiment 2.
By copper gallium mass ratio 45:55 weigh 6N copper ingots 15kg, 6N liquid gallium 18.3kg respectively is put into the high-purity of atomization plant In graphite crucible, close unlatching pumped vacuum systems after atomization plant and make it that Absolute truth reciprocal of duty cycle is 430Pa in atomization plant, is filled with 5N Then high pure nitrogen to normal pressure is again turned on pumped vacuum systems and vacuumizes until the Absolute truth reciprocal of duty cycle of atomization plant is opened to 75Pa Intermediate frequency induction heating device in smelting system, passes through the power of slow adjusting means so that crucible for smelting temperature is warming up to 1150 DEG C and be incubated 30min, crucible is slowly waved in insulating process, rocking tendency is ± 45 °, during simultaneously uninterrupted shake Agitating paddle, it is ensured that aluminium alloy is full and uniform, after insulation terminates, opens high pressure draught control system, atomizer pressure is set to 6.8MPa, topples over the aluminium alloy of melting, enters tundish by drainage trough, contacted finally by atomizer with high pressure draught, Molten alloy liquid is atomized as tiny drop and is quickly cooled in atomisation tower room formation alloy powder.All atomization is completed material Atomization plant is closed afterwards and atomization plant is cooled to normal temperature, is taken out after alloy powder is sieved and be can obtain different-grain diameter area Between the spherical copper gallium alloy powder of 6N, by using LECO600 oxygen analysers test and analyze powder in oxygen content be 129ppm, copper gallium The pattern of alloyed powder is as shown in Figure 1.
Embodiment 3.
By copper gallium mass ratio 30:70 weigh the high purity graphite that 6N copper ingots 9kg, 6N liquid gallium 21kg is put into atomization plant respectively In crucible, close unlatching pumped vacuum systems after atomization plant and make it that Absolute truth reciprocal of duty cycle is 400Pa in atomization plant, is filled with 5N high-purity Then nitrogen to normal pressure is again turned on pumped vacuum systems and vacuumizes until the Absolute truth reciprocal of duty cycle of atomization plant opens melting to 60Pa Intermediate frequency induction heating device in system, passes through the power of slow adjusting means so that crucible for smelting temperature is warming up to 1250 DEG C And be incubated crucible in 25min, insulating process and slowly wave, rocking tendency is ± 25 °, during simultaneously uninterrupted shake stirring Oar, it is ensured that aluminium alloy is full and uniform, after insulation terminates, opens high pressure draught control system, atomizer pressure is set to 8.0MPa, topples over the aluminium alloy of melting, enters tundish by drainage trough, contacted finally by atomizer with high pressure draught, Molten alloy liquid is atomized as tiny drop and is quickly cooled in atomisation tower room formation alloy powder.All atomization is completed material Atomization plant is closed afterwards and atomization plant is cooled to normal temperature, is taken out after alloy powder is sieved and be can obtain different-grain diameter area Between the spherical copper gallium alloy powder of 6N, by using LECO600 oxygen analysers test and analyze powder in oxygen content be 133ppm.
The preparation method of copper gallium alloy powder of the present invention prepares good flowing properties, low oxygen content, purity using powder by atomization method High copper gallium alloy powder, can carry out dispensing according to different application demand to the ratio requirement of copper gallium alloy powder, prepared to obtain The purity of copper gallium alloy powder reach 6N.
Although for example purpose, having been disclosed for the preferred embodiment of the present invention, the ordinary skill people of this area Member will realize in the case of scope and spirit of the present invention disclosed in not departing from by appended claims, various to change It is possible for entering, increasing and replacing.

Claims (10)

1. a kind of preparation method of copper gallium alloy powder, it is characterised in that:Prepared using vacuum high-pressure atomization plant, the atomization is set It is described molten for a smelting system, an atomization system, a pumped vacuum systems, a source of the gas supply system, an integrated control system is included Refining system includes a crucible, and the atomization system includes a spray chamber, and the spray chamber is built-in with an atomizer and is located at A tundish above atomizer, preparation method comprises the following steps:
S1, by two kinds of raw materials of high purity copper and high purity gallium according to ratio requirement carry out dispensing after, raw material is put into the earthenware of smelting system In crucible;
S2, vacuumize after, under protective gas protection so that crucible temperature is warming up to 1150 ~ 1450 DEG C, the heating-up time is 25 ~ Raw materials melt in 35min, crucible is incubated 20 ~ 40min into copper gallium alloy liquid, and crucible is slowly waved so that molten metal is abundant It is well mixed;
S3, molten metal are injected into the tundish on atomizer, and molten metal is flowed out by tundish bottom leakage eye, It is atomized by being met during atomizer with high velocity air or current as fine drop, atomized drop is fast in the spray chamber of closing Speed is frozen into alloy powder;
S4, be naturally cooling to normal temperature, toward atomization plant in be filled with protective gas to normal pressure and can open atomization plant and be made Copper gallium alloy powder.
2. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The smelting system includes peace An agitating paddle above crucible.
3. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The rocking tendency of the crucible For ± 60 °.
4. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The protective gas is inertia Gas or nitrogen.
5. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:Obtained copper gallium alloy powder Purity be 6N and more than.
6. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The purity of the high purity copper is 5N and more than.
7. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The purity of the high purity gallium is 5N and more than.
8. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The crucible uses high-purity stone Black crucible or alumina crucible.
9. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The pressure of the atomizer For 6.8 ~ 10.4MPa.
10. the preparation method of the copper gallium alloy powder according to claim 1, it is characterised in that:The atomization plant also includes One powder collection system, a cooling water system, the support for supporting atomization system.
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108538532A (en) * 2018-03-29 2018-09-14 南京信息工程大学 A kind of composite magnetic and preparation method thereof
CN108962527A (en) * 2018-06-28 2018-12-07 南京信息工程大学 A kind of magnetic material and preparation method thereof
CN108962528A (en) * 2018-06-29 2018-12-07 南京信息工程大学 A kind of magnetic material and preparation method thereof with high-temperature stability
CN112517917A (en) * 2020-11-25 2021-03-19 河南东微电子材料有限公司 Preparation method of CrTiLa alloy powder for chromium-titanium target material

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CN102046836A (en) * 2009-07-27 2011-05-04 Jx日矿日石金属株式会社 Sintered Cu-Ga sputtering target and method for producing the target
CN102844134A (en) * 2010-04-09 2012-12-26 住友金属矿山株式会社 Method for producing cu-ga alloy powder, cu-ga alloy powder, method for producing cu-ga alloy sputtering target, and cu-ga alloy sputtering target
CN103421975A (en) * 2012-05-17 2013-12-04 广东先导稀材股份有限公司 Preparation method of copper and gallium alloy
CN106282941A (en) * 2015-05-21 2017-01-04 中国钢铁股份有限公司 Method for manufacturing copper-gallium alloy composite sodium target material

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JP2622117B2 (en) * 1987-07-17 1997-06-18 日本電信電話株式会社 Superconductor manufacturing method
CN102046836A (en) * 2009-07-27 2011-05-04 Jx日矿日石金属株式会社 Sintered Cu-Ga sputtering target and method for producing the target
CN102844134A (en) * 2010-04-09 2012-12-26 住友金属矿山株式会社 Method for producing cu-ga alloy powder, cu-ga alloy powder, method for producing cu-ga alloy sputtering target, and cu-ga alloy sputtering target
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CN106282941A (en) * 2015-05-21 2017-01-04 中国钢铁股份有限公司 Method for manufacturing copper-gallium alloy composite sodium target material

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108538532A (en) * 2018-03-29 2018-09-14 南京信息工程大学 A kind of composite magnetic and preparation method thereof
CN108962527A (en) * 2018-06-28 2018-12-07 南京信息工程大学 A kind of magnetic material and preparation method thereof
CN108962528A (en) * 2018-06-29 2018-12-07 南京信息工程大学 A kind of magnetic material and preparation method thereof with high-temperature stability
CN112517917A (en) * 2020-11-25 2021-03-19 河南东微电子材料有限公司 Preparation method of CrTiLa alloy powder for chromium-titanium target material

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