CN107317565B - Layout design method of BAW ladder filter - Google Patents

Layout design method of BAW ladder filter Download PDF

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CN107317565B
CN107317565B CN201710408763.3A CN201710408763A CN107317565B CN 107317565 B CN107317565 B CN 107317565B CN 201710408763 A CN201710408763 A CN 201710408763A CN 107317565 B CN107317565 B CN 107317565B
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bawr
layout
design
ladder filter
series
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CN107317565A (en
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张大鹏
贾乐
周禄雄
王天雄
胡政东
韩超
王显波
文数文
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Sichuan Santai Crystal Electronic Co ltd
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezo-electric or electrostrictive material
    • H03H9/58—Multiple crystal filters

Abstract

The invention discloses a layout design method of a BAW ladder filter, which comprises the following steps: presetting each BAWR shape according to the effective area of each BAWR; arranging BAWR according to the BAW ladder filter circuit structure; compressing layout, and reducing layout area of the BAW ladder filter; apodizing, trimming or rotating BAWRs; wiring BAWR and G-S-G pads; detecting whether the layout meets the design criteria; performing acoustic-electromagnetic joint simulation on the BAW ladder filter, and detecting a layout design result; the layout design flow has simplified steps, can improve the design efficiency of the BAW ladder filter layout, and combines the design criterion to optimize the layout area of the BAW ladder filter to the maximum extent; the design criterion can ensure the performance of the BAW ladder filter and reduce the interference such as electromagnetic coupling; for different BAW ladder filter layout designs, only the parameters of the design criteria need to be modified, so that the universality is enhanced, and the repeated labor is reduced.

Description

Layout design method of BAW ladder filter
Technical Field
The invention belongs to the field of micro-electromechanical system devices, and particularly relates to a layout design method of a bulk acoustic wave (BAW, bulk Acoustic Wave) ladder filter.
Background
With the rapid popularization of wireless communication devices and the continuous expansion of user demands, handheld mobile communication products are advancing toward miniaturization and portability, while with the decrease of product size, product price is continuously reduced, and the requirements for functions thereof are gradually increased. In hand-held mobile communication products, radio frequency filters have become one of the bottlenecks in miniaturization and integration of electronic systems.
Currently, BAW filters are widely accepted in the market, and are mainly constructed by connecting a plurality of BAW resonators (BAWR, bulk Acoustic Wave Resonators) in series and parallel. Compared with the traditional surface acoustic wave (SAW, surface Acoustic Wave) filter and the dielectric ceramic filter, the BAW filter has the advantages of high working frequency, small volume, high quality factor, low production cost, convenience in integration and the like. To further reduce the filter size, BAWRs can be arranged more compactly in layout, in addition to using a BAW filter that is small in size. However, as the filter layout decreases, interference, such as electromagnetic coupling, may occur, thereby affecting the filter performance. On the premise of ensuring the performance of the filter, the layout area of the filter is reduced to the maximum extent, and the area utilization rate of the layout is improved.
Among the prior published Chinese patent documents, the publication number is CN103455683A, and the publication date is Chinese patent document of 12 months and 18 days in 2013, which is made by the applicant: "a design and layout method of piezoelectric acoustic wave filter", disclosed by the North microsystem limited, the technical scheme proposes a layout mode of resonators in a series stage; wherein the filter comprises: a plurality of series stages in series, each series stage comprising at least one resonator; parallel stages between every two adjacent series stages, wherein each parallel stage comprises at least one resonator; wherein a distributed capacitance exists between the resonators in each series stage and the resonators in non-adjacent series stages, and the distributed capacitance between the resonators having a larger number of stages than the series stage is smaller than the distributed capacitance between the resonators having a smaller number of stages than the series stage. The scheme is to determine the relative size of distributed capacitance between resonators in different serial stages through the serial stage numbers in the piezoelectric acoustic wave filter, so as to design layout of resonators in the piezoelectric acoustic wave filter, but only design layout modes of series resonators in the filter, and not design layout methods of parallel resonators and the whole filter.
Disclosure of Invention
In order to solve the technical defects, the invention provides a layout design method of a BAW ladder filter, which provides design criteria and design flow, can effectively design the layout of the BAW ladder filter on the premise of ensuring the performance of the filter, furthest reduces the layout area and improves the area utilization rate of the filter layout.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the layout design method of the BAW ladder filter is characterized by comprising the following steps:
the method comprises the steps of firstly, presetting each BAWR shape according to the effective area of each BAWR;
secondly, arranging BAWR according to the circuit structure of the BAW ladder filter;
thirdly, compressing layout, namely reducing layout area of the BAW ladder filter to realize compressed layout;
fourth, adjusting BAWR; the adjustment mode comprises one, two or three of apodization, fine adjustment and rotation, namely, according to the design criteria of the layout, whether the BAWR is apodized, fine adjustment or rotation is determined, and apodization, fine adjustment or other adjustment combination modes are also needed at the same time;
fifthly, wiring BAWR and G-S-G bonding pads;
sixth, detecting whether the layout meets the design criteria;
and seventhly, carrying out sound-electromagnetic joint simulation on the BAW ladder filter, and detecting a layout design result.
The design criteria are to limit the shape and position of a single BAW resonator (BAWR), the distance parameters between BAWRs and pads and the interconnection lines, respectively, in order to ensure the performance of the BAW ladder filter and reduce interference such as electromagnetic coupling.
The flow of the layout design is simplified, the design efficiency of the BAW ladder filter layout is improved, the layout design is divided into 7 steps, and the layout area of the BAW ladder filter is optimized to the maximum extent by combining with the design criterion.
For layout design criteria, further comprising:
any two sides of each BAWR are not parallel, and the BAWR is an irregular convex quadrilateral, or any convex pentagon, or other convex polygon. Because BAWRs are excited by longitudinal waves while transverse waves are excited. The transverse wave is reflected back and forth in the electrode to generate parasitic resonance, and if the transverse waves at any two points at the edge of the BAWR have the same resonance frequency, the BAWR parasitic resonance can be enhanced, so that the band interpolation loss of the filter is increased. Therefore, parasitic resonance can be reduced by using a trapezoid instead of a regular quadrilateral.
The shape of each BAWR is close to a regular quadrangle or a regular pentagon, and an excessively small acute angle or an excessively large obtuse angle should be avoided. Because in the convex quadrangle, an excessively large obtuse angle can make one of the acute angles excessively small; too small an acute angle can result in too short an incident and reflected path when a transverse wave is reflected back and forth within the electrode, resulting in too high a BAWR parasitic resonant frequency, affecting filter performance.
When the area of a single BAWR is relatively large, pentagons are adopted as much as possible; when the area of a single BAWR is small, a quadrilateral is employed as much as possible. Because the area of the pentagon is larger than that of the quadrangle under the condition of the same circumference, the BAWR with relatively larger area adopts the pentagon, so that the layout of the design can be more compact.
The BAWRs connected in circuit are adjacent in layout. Because shorter wiring can reduce signal transmission loss and electromagnetic interference.
The included angles of two opposite sides of the two corresponding BAWRs on the layout are theta, and theta is more than or equal to 0 and less than or equal to 15 degrees. The opposite sides of two adjacent BAWRs are parallel as much as possible but not parallel. Since the opposite sides are parallel, the layout area can be saved, but the parallel opposite sides can increase the interference such as electromagnetic coupling.
The included angle of the opposite sides of the BAWR adjacent to the G-S-G pad corresponding to the layout is theta, and theta is more than or equal to 0 and less than or equal to 15 degrees. So that the opposite edge of the BAWR adjacent to the G-S-G pad is as nearly parallel as possible to the G-S-G pad edge. Since the opposite sides are parallel, the layout area can be saved, but the parallel opposite sides can increase the interference such as electromagnetic coupling.
The distance between adjacent BAWRs should be greater than G neighboring ，G neighboring Is the minimum spacing of adjacent BAWRs. Non-adjacent BAWR series (BAWR series BAWR in series) should be greater than G nonadjacent ，G nonadjacent For non-adjacent BAWR series Is provided for the minimum pitch of (a).
In a circuit, BAWR at an input series BAWR with output series The minimum distance between them is G first-last (general G) first-last ≥G nonadjacent ≥G neighboring )。
The spacing between BAWR and G-S-G pad should be greater than G BAWR-Pad ，G BAWR-Pad Is the minimum spacing of BAWR from the G-S-G pads.
In layout design, BAWR series Has a significant impact on the performance of the filter, in particular the BAWR at the input series BAWR with output series The distance between them plays a decisive role in the influence of the filter. To reduce interference such as electromagnetic coupling, non-adjacent BAWR needs to be specified series BAWR of input terminal, between adjacent BAWR series BAWR with output series Minimum distance between BAWR and G-S-G pad. For different performance indexes and different circuit designs, the spacing parameter can be adjusted according to the actual self.
The width of the interconnection line between each BAWR and the interconnection line between the BAWR and the bonding pad is at least larger than one side length of the connected BAWR; as the power of the transmission signal can be increased.
The BAW ladder filter is rectangular in layout (without G-S-G pads) and is as close to square as possible; in the manufacturing process, the wafer is conveniently cut.
The beneficial effects of the invention are as follows:
according to the invention, for different BAW ladder filter layout designs, only the parameters of the design criteria are required to be modified, so that the universality is enhanced, and the repeated labor is reduced; meanwhile, the invention can ensure the performance of the BAW ladder filter, optimize the layout area to the maximum extent and improve the number of BAW ladder filter chips on the wafer.
Drawings
FIG. 1 is a flow chart of the design of the present invention.
Fig. 2 is a schematic circuit diagram of a 5-order BAW ladder filter of the present invention.
Fig. 3 (a) -3 (b) are BAWR circumscribed circles in the 5 th order BAW ladder filter of the present invention.
Fig. 4 (a) -4 (d) are layout design steps of the 5 th order BAW ladder filter of the present invention.
Fig. 5 (a) -5 (b) are layout simulation results of the 5 th order BAW ladder filter of the present invention.
Detailed Description
The invention is described in detail below with reference to the attached drawing figures:
as shown in fig. 1, the design flow is to simplify the design process, improve the design efficiency of the BAW ladder filter layout, divide into 7 steps and combine with the design criteria to optimize the BAW ladder filter layout area to the maximum.
Case 1: taking an application of a 5-order BAW ladder filter as an example, fig. 2 is a schematic circuit diagram of the 5-order BAW ladder filter in the present invention, where the 5-order BAW ladder filter includes: five BAWRs series And five BAWRs parallel . Five BAWRs series All have the same structure, five BAWRs parallel The structures are all the same. The connection relationship of BAWRs in a BAW filter, seen from the input port 1 to the output port 6, is: first BAWR parallel 8. First BAWR series 2. Second BAWR parallel 9. Second BAWR series 2. Third BAWR parallel 10. Third BAWR series 3. Fourth BAWR parallel 11. Fourth BAWR series 4. Fifth BAWR parallel 12 and fifth BAWR series 5。
Table 1 shows the area of each BAWR in the present invention, where BAWR series 2 has the smallest area among the BAWRs connected in series series 2、34, 5 and BAWR parallel 8 are substantially equivalent in area and less than BAWR series 2.5 times the area; BAWR (binary arithmetic and random access memory) series 6 and BAWR parallel 9. 10, 11, 12 are substantially equivalent in area to greater than BAWR series 2.5 times the area.
TABLE 1 area and preset shape of each BAWR
Figure GDA0004213015650000051
Firstly, according to a design criterion II, the shape of the BAWR is as close as possible to a regular quadrangle or a regular pentagon, and an excessively small acute angle or an excessively large obtuse angle is avoided; design criterion three, area is larger than BAWR series BAWR 2 area 1.5 times series 106 and BAWR parallel 9. 10, 11, 12 are pentagonal with an area smaller than BAWR series BAWR 2 area 1.5 times series 2. 3, 4, 5 and BAWR parallel 8, adopting a quadrilateral; therefore, the BAWR is preset series 106 and BAWR parallel 9. 10, 11, 12 are regular pentagons and BAWR series 2. 3, 4, 5 and BAWR parallel 8 adopts a regular quadrangle.
FIG. 3 (a) shows a radius r by adding a circumscribed circle to a regular quadrilateral BAWR 1 The method comprises the steps of carrying out a first treatment on the surface of the And the radius of the circumscribing circle can be properly adjusted, for example, when the distance between two adjacent BAWRs is smaller than the distance parameter of the design rule, the circumscribing circle radius can be enlarged to r 2 Wherein r is 1 -r 2 ＝1/2G neighboring 。
Fig. 3 (b) is a graph of a radius r, with a circumscribed circle added to the BAWR of a regular pentagon; and the radius of the circumscribing circle can be properly adjusted, for example, when the distance between two adjacent BAWRs is smaller than the distance parameter of the design rule, the circumscribing circle radius can be enlarged to r 4 Wherein r is 3 -r 4 ＝1/2G neighboring 。
In a second step, FIG. 4 (a) shows BAWR for a 5 th order BAW ladder filter series Linear arrangement, BAWR series 2-3-4-5-6 are arranged in a straight line; layout of BAW filterThe side length in the X-axis direction was 79.84. Mu.m, and the side length in the Y-axis direction was 61.13. Mu.m; according to design criterion four, the connected BAWRs on the circuit are adjacent in layout parallel Divided into two columns, BAWR parallel 8-10-12 and BAWR parallel 9-11, respectively arranged in BAWR series 2-3-4-5-6.
Third, according to design rule six, the distance between adjacent BAWRs is larger than G neighboring ，G neighboring For minimum spacing of adjacent BAWRs, non-adjacent BAWRs series (BAWR series BAWR in series) should be greater than G nonadjacent ，G nonadjacent For non-adjacent BAWR series Is a minimum pitch of (2); design criterion seven, in the described circuit, BAWR at the input series BAWR with output series The minimum distance between them is G first-last (general G) first-last ≥G nonadjacent ≥G neighboring ) The method comprises the steps of carrying out a first treatment on the surface of the Design rule nine, the spacing between BAWR and G-S-G pad should be greater than G BAWR-Pad ，G BAWR-Pad Minimum spacing for BAWR and G-S-G pads; setting a spacing parameter G neighboring ＝G BAWR-Pad ＝20μm，G nonadjacent ＝25μm，G first-last =30μm; and properly adjusting the size of the circumscribed circle according to the interval parameter.
Meanwhile, in order to minimize the whole layout area, the layout of the BAW ladder filter is rectangular (without G-S-G pads) and is as close to square as possible according to the eleven design criteria; gradually 'compressing' the layout, and adjusting the positions of the BAWRs; FIG. 4 (b) BAWR for a 5 th order BAW ladder filter series Fold line arrangement, BAWR series 2-3-4-5-6 are arranged into a broken line. In fig. 3 (a), the layout of BAW filters has a longer side length in the X-axis direction than in the Y-axis direction. In the 5 th-order BAW filter, however, the side length in the X-axis direction is mainly defined by BAWR series 2-3-4-5-6, thereby compressing the side length along the X-axis direction and adjusting the BAWR series 2-3-4-5-6, so that the arrangement is changed into a zigzag arrangement.
Fourth step, fig. 4 (c) is a layout of a BAW ladder filter rotated and adjusted at 5 th order; according to a design rule I, any two sides of a single BAWR are not parallel and are irregular convex quadrangles, any convex pentagons or other convex polygons; design criterion two, the shape of a single BAWR is similar to a regular n-sided polygon (positive integer n is more than or equal to 4), the inner angle in the quadrangle is more than 80 degrees, and the inner angle in the (n+1) sided polygon is all obtuse angle; the design criterion is five, the included angle between two opposite sides of adjacent BAWR is theta, and theta is more than or equal to 0 and less than or equal to 15 degrees; the design criterion is eight, the included angle of the opposite sides of the BAWR adjacent to the G-S-G bonding pad is theta, and theta is more than or equal to 0 and less than or equal to 15 degrees; after each BAWR circumcircle is removed, each BAWR is apodized, so that each BAWR is irregularly shaped, the position of the BAWR is finely adjusted, the BAWR is rotated by the center of each BAWR circumcircle, and the opposite sides of the adjacent BAWR and the opposite sides adjacent to the G-S-G bonding pad meet the design criterion.
Fifth step, fig. 4 (d) shows the layout design result of the 5 th-order BAW ladder filter; according to design criteria 10, the width of the interconnect lines between the various BAWRs, the interconnect lines between the BAWRs and the pads is at least one side length greater than the connected BAWRs; the BAWR and the bonding pads are connected according to the circuit structure of the 5-order BAW ladder filter, the area utilization rate of the BAW filter layout is calculated, and the calculation formula is as follows:
Figure GDA0004213015650000061
the layout area utilization of the 5-step filter was obtained to be about 44%.
And sixthly, checking the layout design to ensure that the layout design meets the design criteria.
Seventh, using sound-electromagnetism combined simulation to verify whether the performance of the 5-order BAW ladder filter reaches the design index; the simulation results are shown in fig. 5, where fig. 5 (a) is a comparison of the band interpolation loss (2400-2480 MHz) of the 5 th-order BAW ladder filter after the layout optimization and the 5 th-order BAW ladder filter after the layout non-optimization, and fig. 5 (b) is a comparison of the S21 parameter (100-7500 MHz) of the 5 th-order BAW ladder filter after the layout optimization and the 5 th-order BAW ladder filter after the layout non-optimization. It can be seen that the insertion loss and out-of-band rejection of the layout optimized 5-step filter are not only reduced, but are also improved compared to the layout un-optimized 5-step BAW ladder filter.

Claims (5)

  1. The layout design method of the BAW ladder filter is characterized by comprising the following steps:
    the method comprises the steps of firstly, presetting each BAWR shape according to the effective area of each BAWR; the BAWR refers to a BAW resonator;
    secondly, arranging BAWR according to the circuit structure of the BAW ladder filter;
    thirdly, compressing layout;
    fourth, adjusting BAWR; the adjusting mode comprises one, two or three of apodization, fine adjustment and rotation;
    fifthly, wiring BAWR and G-S-G bonding pads;
    sixth, detecting whether the layout meets the design criteria;
    seventh, performing sound-electromagnetic joint simulation on the BAW ladder filter, and detecting a layout design result;
    the first step must meet a second design criterion, which is: the shape of the single BAWR is required to be a positive n-sided shape, n is a positive integer, and n is more than or equal to 4; when the shape of the single BAWR is quadrilateral, the inner angle in the quadrilateral is larger than 80 degrees, and the inner angle in the n+1 polygon is all obtuse angle;
    the first step must meet a design criterion three: it is required that when the area of a single BAWR is greater than 1.5 times the minimum area in the series of BAWRs, an n+1 polygon should be used, n is a positive integer and n.gtoreq.4.
  2. 2. The BAW ladder filter layout design method of claim 1, wherein: the second step must meet a design criterion four: the circuit-connected BAWRs are required to be adjacent in layout.
  3. 3. The BAW ladder filter layout design method of claim 1, wherein:
    the third step must meet a design criterion six: requiring spacing between adjacent BAWRsThe separation should be greater thanG neighboring ，G neighboring Minimum spacing for adjacent BAWRs; non-adjacentBAWR series The distance between (a) should be greater thanG nonadjacent ，G nonadjacent Is non-adjacentBAWR series Is provided with a plurality of grooves, wherein the grooves are arranged on the surface of the substrate,BAWR series BAWRs are connected in series;
    the third step must meet the design criterion seven: in the circuit, at the inputBAWR series And the output endBAWR series The minimum distance between them isG first-last Wherein:G first-last ≥G nonadjacent ≥G neighboring ；
    the third step must meet a design criterion nine, which is: the spacing between BAWR and G-S-G pad on layout is required to be larger thanG BAWR-Pad ，G BAWR-Pad Minimum spacing for BAWR and G-S-G pads;
    the third step must meet a design criterion eleven: the BAW ladder filter is required to have a rectangular layout shape that does not include G-S-G pads.
  4. 4. The BAW ladder filter layout design method of claim 1, wherein: the fourth step must meet the first design criteria: requiring that any two sides of a single BAWR are not parallel, and designing the single BAWR into an irregular convex quadrilateral, or any convex pentagon or other convex polygons;
    the fourth step must meet design criterion two;
    the fourth step must satisfy a design criterion five: requiring the BAWR connected with the circuit, wherein the included angles of two opposite sides of the corresponding BAWR on the layout are theta, and theta is more than or equal to 0 and less than or equal to 15 degrees;
    the fourth step must meet the design criteria eight: the BAWR connected with the G-S-G pad on the circuit is required, and the included angle of the opposite sides of the corresponding BAWR adjacent to the G-S-G pad on the layout is theta, wherein theta is more than or equal to 0 and less than or equal to 15 degrees.
  5. 5. The BAW ladder filter layout design method of claim 1, wherein: the fifth step must meet the design criteria ten: the width of the interconnect lines between the individual BAWRs, the interconnect lines between the BAWRs and the pads, is required to be at least one side length greater than the connected BAWRs.
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