CN107309476A - Micro-nano hollow diamond bit and preparation method thereof - Google Patents
Micro-nano hollow diamond bit and preparation method thereof Download PDFInfo
- Publication number
- CN107309476A CN107309476A CN201710352919.0A CN201710352919A CN107309476A CN 107309476 A CN107309476 A CN 107309476A CN 201710352919 A CN201710352919 A CN 201710352919A CN 107309476 A CN107309476 A CN 107309476A
- Authority
- CN
- China
- Prior art keywords
- micro
- diamond
- nano
- drill bit
- nano hollow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B51/00—Tools for drilling machines
- B23B51/04—Drills for trepanning
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B2251/00—Details of tools for drilling machines
- B23B2251/40—Flutes, i.e. chip conveying grooves
- B23B2251/408—Spiral grooves
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses micro-nano hollow diamond bit and preparation method thereof, the micro-nano hollow diamond bit is thin-wall circular tubulose, and outer surface is provided with thread groove, and rear end is fixed with the connector being connected with external device (ED), and front end is the serrate blade of distribution.The preparation method is：Step one, the backing material that can be used as cvd diamond substrate is processed into drill bit mold；Step 2, is ground using Nano diamond powder or Nano diamond emulsion to drill bit mold；Step 3, is handled drill bit mold using chemical vapour deposition technique so that drill bit mold surface uniform deposition diamond film；Step 4, the blade that the drill bit mold for having diamond film is deposited to surface carries out processing of putting the first edge on a knife or a pair of scissors, and the backing material of blade is exposed；Step 5, is corroded using the corrosive liquid of corrodible backing material to the backing material on drill bit mold, finally obtains micro-nano hollow diamond bit, and the present invention provides instrument for micro-nano machining.
Description
Technical field
The present invention relates to a kind of micro-nano hollow diamond bit of micro-nano-scale.The invention further relates to the drill bit
Preparation method.
Background technology
Micro-nano device, micro-nano processing are the booming advanced manufacture product in advanced one, manufacture field and side
Method, the deep life style for changing the mankind of nano chips of nanometer technique manufacture, micromachine, Miniature machine tool,
MAV, super light material application of micro nano structure etc. are increasingly come into the middle of ordinary people's life.
Photoetching, 3D printing, ion beam or electron beam lithography etc. are that current micro nano structure processes topmost method.But
Be, the technology such as currently used photoetching, ion beam etching, 3D printing that equipment cost is high, technology difficulty is big, processing efficiency and
Speed is low, it is impossible to meet more large batch of micro-nano process requirements, adapts to the arriving in micro-nano epoch.Realize large scale quantities
Production, micro-meter scale of receiving machining should have similar macroscopical electronic product processing key position residing in machining and
Effect.
Through looking into, there is no micro-nano hollow diamond bit in current micro-nano processing, without micro-nano hollow diamond yet
Drill bit processing method.
The content of the invention
First technical problem to be solved by this invention, is just to provide a kind of micro-nano hollow diamond bit.
Second technical problem to be solved by this invention, is just to provide the making of above-mentioned micro-nano hollow diamond bit
Method.
It is that micro-nano machinery adds using the method and the micro-nano hollow diamond bit for the high intensity produced of the present invention
Work provides instrument, and required equipment cost is low, technique simple, processing efficiency and speed are high, can meet completely large batch of
Micro-nano process requirements.
Above-mentioned first technical problem is solved, the technical solution adopted by the present invention is as follows：
A kind of micro-nano hollow diamond bit, it is characterized in that：For thin-wall circular tubulose, outer surface is provided with thread groove, rear end
The connector being connected with external device (ED) is fixed with, front end is the serrate blade of distribution.
The front end as blade of the micro-nano hollow diamond bit is closed, and the sawtooth is distributed in the blind end
End face on, be provided with the end face of the blind end for allow corrosive liquid penetrate into corrosion inner foundation material infiltration hole.
Above-mentioned second technical problem is solved, the technical solution adopted by the present invention is as follows：
The preparation method of the micro-nano hollow diamond bit, it is characterised in that comprise the following steps：
Step one：The backing material that can be used as cvd diamond substrate is processed into drill bit mold, drill bit mold with it is described micro-
The structure of nano-hollow diamond bit is identical；
Step 2：Drill bit mold is ground using Nano diamond powder or Nano diamond emulsion；
Step 3：Drill bit mold is handled using chemical vapour deposition technique so that drill bit mold surface uniformly sinks
Product diamond film；
Step 4：The blade that the drill bit mold for having diamond film is deposited to surface carries out processing of putting the first edge on a knife or a pair of scissors, and causes blade
Backing material exposes；
Step 5：The backing material on drill bit mold is corroded using the corrosive liquid of corrodible backing material, most
After obtain micro-nano hollow diamond bit.
Preferably, the diameter of the drill bit mold is 100~500000nm, described backing material is silicon, molybdenum or
One kind in quartz glass.
Preferably, the processing in the step one refers to machining or laser engraving.
Preferably, the lapping mode in the step 2 is ultrasonic grinding, mechanical lapping or hand lapping.
Preferably, the thickness of the diamond film deposited in the step 3 is 300~300000nm；Further, step
Chemical vapour deposition technique in three is hot-wire chemical gas-phase deposition, electric arc chemical vapor deposition or microwave plasma chemical gas
Mutually deposit.
Preferably, the mode of the processing of putting the first edge on a knife or a pair of scissors in the step 4 is that laser is put the first edge on a knife or a pair of scissors or machinery is combined with chemical reaction and opened
Sword.
The necessary substantially uniformity of micron drill bit substrate of receiving is in the plasma space required for depositing, preferably in plasma
Body has rotary motion in space, it is ensured that uniform deposition.
Compared with prior art, the invention has the advantages that：
1st, micro-nano hollow diamond bit of the invention provides instrument for micro-nano machining.
2nd, when being drilled from blade one end for micro-nano hollow diamond bit close, to be covered with sawtooth, its
The material of drill hole is blended, it is to avoid massive material flies out, destroy the part of surrounding, or hurt workman itself, the material blended
Material can easily be cleared up with cleaning tools such as vacuum cleaners；When from blade one end for opening, a circle sawtooth is only distributed with it is micro-
When nano-hollow diamond bit is drilled, it splits the material monoblock of drill hole, prevents powdered as far as possible
Waste material float in air.It can be seen that, the present invention can be handled preferably drilling.
Brief description of the drawings
Fig. 1 is the positive structure diagram of the micro-nano hollow diamond bit of the present invention；
Fig. 2 is one of cross section structure diagram of micro-nano hollow diamond bit of the present invention, is shown micro-nano hollow
One end as blade of diamond bit is blind end；
Fig. 3 is the schematic diagram of the blade of the micro-nano hollow diamond bit of Fig. 2 signals；
Fig. 4 be Fig. 2 signal micro-nano hollow diamond bit in manufacturing process, its middle part backing material do not corrode also
Sectional structure when falling；
Fig. 5 is the two of the cross section structure diagram of the micro-nano hollow diamond bit of the present invention, is shown micro-nano hollow
One end as blade of diamond bit is opening；
Fig. 6 is the schematic diagram of the blade of the micro-nano hollow diamond bit of Fig. 5 signals；
Fig. 7 be Fig. 5 signal micro-nano hollow diamond bit in manufacturing process, its middle part backing material do not corrode also
Sectional structure when falling；
Fig. 8 is the positive structure diagram for the micro-nano hollow diamond bit that root is corroded.
Reference implication in figure：
1- blades；2- circular arcs side wall；3- thread grooves；4- roots；5- is hollow；6- backing materials；7- sawtooth；8- penetrates into hole.
Embodiment
The present invention is further described with reference to embodiment.
The present invention's comprises the following steps：
Step one：That moulding is carried out to the structure of micro-nano hollow diamond bit, according to structure the need for, will can be used as
The backing material of cvd diamond substrate by machining or rapid laser carving into drill bit mold, the bit blank processed
The diameter of tire is 100~500000nm, and backing material can be the material such as silicon, molybdenum or quartz glass, drill bit mold with it is micro-
The structure of nano-hollow diamond bit is identical, the drill bit mold that backing material is processed, and is the micro-nano hollow gold of final products
The template of diamond bit.For the selection of backing material, according in subsequent step to the chemical gas used in the deposition of diamond film
The difference of phase deposition technique can select to generally select in different materials, such as microwave plasma CVD technology
Silicon, heat resistant glass, it is any to be used as chemical vapour deposition technique using molybdenum, copper etc. more than electric arc chemical vapour deposition technique
The base material of middle diamond film deposition, can as micro-nano hollow diamond bit backing material.
Step 2：Forming core pretreatment is carried out, using Nano diamond powder or Nano diamond emulsion to drill bit mold
Uniformly ground, lapping mode is ultrasonic grinding, mechanical lapping or hand lapping.
Step 3：Drill bit mold is handled using chemical vapour deposition technique so that drill bit mold surface uniformly sinks
Product diamond film, the thickness of the diamond film deposited is 300~300000nm, and chemical vapour deposition technique can be heated filament
Learn vapour deposition, electric arc chemical vapor deposition or microwave plasma CVD or remaining chemical vapor deposition
Any one of product technology.For the technological parameter of specific chemical vapour deposition technique, according to the chemical gas of actual use
The difference of phase deposition technique, required diamond thicknesses of layers, specific backing material etc. is selected, but in operating process
In, the necessary substantially uniformity of drill bit mold is in the plasma space required for depositing, and is preferably had in plasma space
Rotary motion, it is ensured that uniform deposition.
Step 4：Put the first edge on a knife or a pair of scissors laser or machinery is combined with chemical reaction by way of putting the first edge on a knife or a pair of scissors, have diamond to surface deposition
The blade of the drill bit mold of film carries out processing of putting the first edge on a knife or a pair of scissors, and the backing material of blade is exposed, and machinery is combined with chemical reaction and opened
The mode of sword is such as：Hot iron plate is ground.To drill bit mold put the first edge on a knife or a pair of scissors processing on the one hand so that blade obtains more excellent boring capacity, separately
On the one hand the backing material of the inside is exposed.
Step 5：The backing material on drill bit mold is corroded using the corrosive liquid of corrodible backing material, most
After obtain micro-nano hollow diamond bit.Corrosive liquid is selected according to the characteristic of backing material, in corrosion process, typically
Retain the backing material of root 4, it is ensured that good fixation when being connected with drilling machine.
The present embodiment detailed process is as follows：
The present embodiment from thickness 1cm high purity silicon as backing material, using accurate digital control machining obtain with
The structure identical drill bit mold of micro-nano hollow diamond bit.The length of its bit part be 5mm, a diameter of 50 microns,
Root 4 is length of side 4mm cube, and thread groove is additionally provided with the side of bit part.
In the nano-diamond powder emulsion that the drill bit mold processed by high purity silicon is vacantly inserted to particle diameter 100nm, profit
With ultrasonic grinding 15 minutes, complete after grinding, alcohol spray is clean stand-by.
Drill bit mold after ultrasonic grinding is cleaned is put into the chamber of microwave plasma CVD system
Interior, notices that drill bit mold is placed vertically, the ground connection support of root 4, and bit part is upward.Microwave plasma CVD
Parameter be：Operating pressure 10kPa, working gas and its ratio are H2/CH4=100/3, microwave power 2kW, sedimentation time 10
Hour, last gained diamond thickness is 3 microns.
The blade 1 that the mode put the first edge on a knife or a pair of scissors using laser deposits the drill bit mold for having diamond film to surface carries out processing of putting the first edge on a knife or a pair of scissors,
And expose in backing material silicon, the liquid HF acid that drill bit mold is inserted to concentration 5%, blade 1 gos deep into liquid HF acid 3mm,
Corrosion is completed after 24 hours, the hollow depth 3mm, 3 microns of diamond film thickness, the micro-nano sky of 56 microns of diameter of centre is obtained
Heart diamond bit.
Micro-nano hollow diamond bit as shown in Figure 8, its root is corroded.
The micro-nano hollow gold made by the preparation method of the micro-nano hollow diamond bit as shown in Figure 1
Diamond bit, its side wall is circular arc side wall 2, and circular arc side wall 2 is thin-walled, and in circular arc side, the outer surface of wall 2 is provided with axially extending
Thread groove 3, thread groove 3 has the functions such as chip removal, and one end of micro-nano hollow diamond bit is the blade 1 that sawtooth 7 is distributed with, separately
One end is the connector being connected with external tool, and the root 4 for being easy to be connected with drilling machine is remained with connector position, micro-nano hollow
One end as blade 1 of diamond bit can be blind end, or opening.
As shown in Figures 2 and 3, one end as blade 1 of micro-nano hollow diamond bit is blind end, in the closing
Infiltration hole 8 is provided with the end face at end, infiltration hole 8 is outputed in step 4, hole 8 is penetrated into and backing material 6 is exposed, walked
When rapid five, corrosive liquid is penetrated into inside from hole 8 is penetrated into, and internal backing material 6 is corroded, and finally causes diamond
Drill bit internal forms hollow 5, and sawtooth 7 is distributed on the end face of the blind end by rule, and its regularity of distribution is multiple concentric to be formed
Round formal distribution, the material of drill hole can be blended by being covered with the blade of sawtooth 7, it is to avoid massive material flies out, around destruction
Part, or workman itself is hurt, the material blended can easily be cleared up with cleaning tools such as vacuum cleaners.Fig. 4 is shown in system
During work, sectional view when also backing material 6 is not corroded, its middle part is filled with backing material 6.
As shown in Figure 5 and Figure 6, one end as blade 1 of micro-nano hollow diamond bit is opening, sawtooth 7 along this
The arc-shaped edges at end are uniformly distributed, and sawtooth surrounds one circular, and the diamond bit of the blade 1 with the structure, can be by drilling
The material monoblock of drill hole is split, and prevents that powdered waste material floats in air as far as possible.Fig. 7, which is shown, to be made
Cheng Zhong, sectional view when also backing material 6 is not corroded, its middle part is filled with backing material 6.
To the selection of above-mentioned micro-nano hollow diamond bit during for using, it can be selected according to service condition, example
Such as：Drilled in the closing space with dust pelletizing system, it is micro-nano close, to be covered with sawtooth that can select blade one end
The hollow diamond bit of rice, the waste material blended is easily cleaned out by dust pelletizing system；And drilled in open space, then examine
Consider micro-nano hollow diamond bit that selection blade one end is opening, that a circle sawtooth is only distributed with, thus be avoided that generation powder
The waste material of last shape floats in air.
Make embodiment one：
Select thickness 1cm HIGH-PURITY SILICON as raw material, obtain miniature shown in Fig. 2 using Precision NC machine center processing
Drill bit, bit operation region 1a length 5mm, there is length of side 4mm cube 4 50 microns of diameter, root.
The micro- brill of silicon is vacantly inserted in particle diameter 100nm nano-diamond powder emulsion, ultrasonic grinding 15min, alcohol spray
It is clean stand-by.
The micro- brill of silicon after ultrasonic grinding is cleaned is put into the chamber of microwave plasma CVD diamond deposition system, is noted
The micro- brill of silicon of anticipating is vertical to be placed, root 4a ground connection supports.
Operating pressure 10kPa, working gas and its ratio are H2/CH4=100/3, microwave power 2kW, sedimentation time 10
Hour, analysis display gained diamond thickness is 3 microns.
Otch is carried out to the blade 3 of the micro- brill of diamond film using laser beam, exposes base material silicon；By the micro- brill of diamond film
In the liquid HF acid for inserting concentration 5%, liquid level position is that corrosion is completed after blade 3mm, 24 hours, obtains hollow depth
3mm, 3 microns of diamond film thickness, the micro- brill of hollow diamond of 56 microns of diameter.
Claims (9)
1. micro-nano hollow diamond bit, it is characterised in that：The micro-nano hollow diamond bit is thin-wall circular tubulose, outside
Surface is provided with thread groove, and rear end is fixed with the connector being connected with external device (ED), and front end is the serrate blade of distribution.
2. micro-nano hollow diamond bit according to claim 1, it is characterised in that：The micro-nano hollow diamond
The front end as blade of drill bit is closed, and the sawtooth is distributed on the end face of the blind end, in the end face of the blind end
On be provided with for allow corrosive liquid penetrate into corrosion inner foundation material infiltration hole.
3. the preparation method of the micro-nano hollow diamond bit described in claim 1 or 2, it is characterised in that including following step
Suddenly：
Step one：The backing material that can be used as cvd diamond substrate is processed into drill bit mold, drill bit mold with it is described micro-nano
The structure of hollow diamond bit is identical；
Step 2：Drill bit mold is ground using Nano diamond powder or Nano diamond emulsion；
Step 3：Drill bit mold is handled using chemical vapour deposition technique so that drill bit mold surface uniform deposition gold
Diamond film；
Step 4：The blade that the drill bit mold for having diamond film is deposited to surface carries out processing of putting the first edge on a knife or a pair of scissors, and causes the substrate of blade
Material exposes；
Step 5：The backing material on drill bit mold is corroded using the corrosive liquid of corrodible backing material, finally
To micro-nano hollow diamond bit.
4. the preparation method of micro-nano hollow diamond bit according to claim 3, it is characterised in that：The bit blank
The diameter of tire is 100~500000nm, and described backing material is one kind in silicon, molybdenum or quartz glass.
5. the preparation method of micro-nano hollow diamond bit according to claim 4, it is characterised in that：The step one
In processing refer to machining or laser engraving.
6. the preparation method of micro-nano hollow diamond bit according to claim 5, it is characterised in that：The step 2
In lapping mode be ultrasonic grinding, mechanical lapping or hand lapping.
7. the preparation method of micro-nano hollow diamond bit according to claim 6, it is characterised in that：The step 3
The thickness of the diamond film of middle deposition is 300~300000nm.
8. the preparation method of micro-nano hollow diamond bit according to claim 7, it is characterised in that：The step 3
In chemical vapour deposition technique be hot-wire chemical gas-phase deposition, electric arc chemical vapor deposition or microwave plasma chemical gas phase
Deposition.
9. the preparation method of micro-nano hollow diamond bit according to claim 8, it is characterised in that：The step 4
In processing of putting the first edge on a knife or a pair of scissors mode put the first edge on a knife or a pair of scissors for laser or machinery with chemical reaction with reference to putting the first edge on a knife or a pair of scissors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710352919.0A CN107309476B (en) | 2017-05-18 | 2017-05-18 | Micro-nano hollow diamond bit and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710352919.0A CN107309476B (en) | 2017-05-18 | 2017-05-18 | Micro-nano hollow diamond bit and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107309476A true CN107309476A (en) | 2017-11-03 |
| CN107309476B CN107309476B (en) | 2019-07-26 |
Family
ID=60182028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710352919.0A Active CN107309476B (en) | 2017-05-18 | 2017-05-18 | Micro-nano hollow diamond bit and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107309476B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108179398A (en) * | 2017-12-29 | 2018-06-19 | 深圳市金洲精工科技股份有限公司 | A kind of diamond-coated drill and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04275812A (en) * | 1991-02-27 | 1992-10-01 | Sumitomo Electric Ind Ltd | Diamond coated micro drill |
| CN104827100A (en) * | 2015-05-26 | 2015-08-12 | 启东市吕四科技创业中心有限公司 | Rapid type hollow drill bit special for steel plates and capable of improving efficiency |
| CN104827580A (en) * | 2015-05-22 | 2015-08-12 | 启东市吕四科技创业中心有限公司 | Efficient fast-type hollow drill bit special for ceramic tiles |
| CN204747605U (en) * | 2015-06-19 | 2015-11-11 | 浙江欣兴工具有限公司 | Diamond thin wall bores |
| CN206824718U (en) * | 2017-05-18 | 2018-01-02 | 东莞市汇成真空科技有限公司 | A kind of micro-nano hollow diamond bit |
-
2017
- 2017-05-18 CN CN201710352919.0A patent/CN107309476B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04275812A (en) * | 1991-02-27 | 1992-10-01 | Sumitomo Electric Ind Ltd | Diamond coated micro drill |
| CN104827580A (en) * | 2015-05-22 | 2015-08-12 | 启东市吕四科技创业中心有限公司 | Efficient fast-type hollow drill bit special for ceramic tiles |
| CN104827100A (en) * | 2015-05-26 | 2015-08-12 | 启东市吕四科技创业中心有限公司 | Rapid type hollow drill bit special for steel plates and capable of improving efficiency |
| CN204747605U (en) * | 2015-06-19 | 2015-11-11 | 浙江欣兴工具有限公司 | Diamond thin wall bores |
| CN206824718U (en) * | 2017-05-18 | 2018-01-02 | 东莞市汇成真空科技有限公司 | A kind of micro-nano hollow diamond bit |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108179398A (en) * | 2017-12-29 | 2018-06-19 | 深圳市金洲精工科技股份有限公司 | A kind of diamond-coated drill and preparation method thereof |
| CN108179398B (en) * | 2017-12-29 | 2020-01-21 | 深圳市金洲精工科技股份有限公司 | Diamond coating drill bit and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107309476B (en) | 2019-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5619889A (en) | Method of making microstructural surgical instruments | |
| US5391422A (en) | Diamond- or Diamond-like carbon-coated hard materials | |
| Tang et al. | Enhancement of electrochemical discharge machining accuracy and surface integrity using side-insulated tool electrode with diamond coating | |
| US5976347A (en) | Micro cutting method and system | |
| CN105887042B (en) | Vibrate hot-filament chemical vapor deposition equipment and the purposes in Diamond coating deposition | |
| CN105764637B (en) | Diamond-coated hard alloy cutting element and its manufacture method | |
| US6517688B2 (en) | Method of smoothing diamond coating, and method of manufacturing diamond-coated body | |
| CN104191053A (en) | Method for manufacturing micro-electrolysis cathode movable template | |
| CN105451931A (en) | Cutting tool, manufacturing method for cutting tool, and method for manufacturing cut product using cutting tool | |
| CN111796121A (en) | Strong texture structure metal transmission electron microscopic characterization sample preparation method | |
| CN107309476A (en) | Micro-nano hollow diamond bit and preparation method thereof | |
| Katahira et al. | Micromilling characteristics and electrochemically assisted reconditioning of polycrystalline diamond tool surfaces for ultra-precision machining of high-purity SiC | |
| Cao et al. | Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM | |
| CN206824718U (en) | A kind of micro-nano hollow diamond bit | |
| JP2020526406A (en) | Polished articles including conformity coatings and polishing systems with them | |
| JP6850990B2 (en) | Diamond-coated cutting tool and its manufacturing method | |
| Wen et al. | Experimental research on micro mill-grinding AISI 1045 steel with a cold spraying compound micro cutting tool | |
| CN107675140B (en) | The preparation method of diamond cutter texture coating based on microcell barrier method | |
| CN115386856A (en) | Diamond thin film capacitor, manufacturing method thereof, vacuum gauge and manufacturing method thereof | |
| US20090208666A1 (en) | Diamond coated surfaces | |
| CN113522688B (en) | Plasma corrosion resistant component, preparation method thereof and plasma processing equipment | |
| KR100533070B1 (en) | Method for increasing wear-resistibility of metal products using plasma ion implantation method | |
| JP7251716B2 (en) | Diamond-coated tool and its manufacturing method | |
| JP2001179517A (en) | Diamond drill and method of manufacturing the same | |
| US8113917B2 (en) | Grinding structure having micro ball |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: Long road Dalingshan Town Industrial Zone Wu Yan Yan House Road 523838 Guangdong Dongguan City of Dongguan Province, No. 168 Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |
|
| CP03 | Change of name, title or address |