CN107301977B - A kind of optical window structure making process of metal and crystal air-tight packaging - Google Patents
A kind of optical window structure making process of metal and crystal air-tight packaging Download PDFInfo
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- CN107301977B CN107301977B CN201710466234.9A CN201710466234A CN107301977B CN 107301977 B CN107301977 B CN 107301977B CN 201710466234 A CN201710466234 A CN 201710466234A CN 107301977 B CN107301977 B CN 107301977B
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract
The invention discloses the optical window structure making process of a kind of metal and crystal air-tight packaging, manufacturing method includes: the metal forming part that (1) has cavity: oil removing cleaning, nickel plating, drying；(2) crystal optic Local treatment: exposure mask, chemical method corrosion roughening, roughening position polarization, chemical nickel plating, electrotinning, drying on crystal optic periphery cut fragment；(3) fixture: according to parts size precision clamp for machining；(4) sealing-in: metal forming part and crystal optic are placed on fixture, the 15-20 minutes formation finished products of 250-300 degrees Celsius of baking in sintering furnace.(5) it tests: testing bond strength, the air-tightness of finished product.Present invention employs crystal optic part exposure mask, corrosion roughening, electric plating method are formed intermediate metal, then passes through the method for low temperature soldering, the method for the pipe cap or cavity melting welding of crystal optical window and metal forming part is reached into Leakless sealing.To effectively prevent because of many technological difficulties of material coefficient of expansion matching problem bring.
Description
Technical field
The invention belongs to photoelectron air-tight packaging field, the light of specifically a kind of metal and crystal air-tight packaging
Window construction manufacturing method.
Background technique
In photoelectron air-tight packaging field, a kind of product be by crystalline material such as CaF2, MgF2, quartz crystal,
The optical lens or eyeglass of the crystalline materials such as ZnS manufacture need to combine with metal pipe cap or metal cavity, form a use
In the optical window structure of air-tight packaging.Since semiconductor chip is to ambient moisture, the sensibility of harmful gas and pollutant, institute
The encapsulation that air-tightness is generally required with this device, in ultraviolet and mid infrared region, conventional optical glass material is due to its light
The limitation for learning performance, tends not to the requirement for meeting light transmittance, therefore, in ultraviolet region, generallys use quartz glass as saturating
Luminescent material；In mid infrared region, various non-oxidized substance crystal are generallyd use as translucent material.
Due to the coefficient of expansion of quartz glass an order of magnitude lower than metal material, non-oxidized substance crystalline material usually due to
Relatively low phase transition temperature or a variety of different thermal expansion coefficients are difficult to complete by way of the direct sealing-in of glass, institute
Be by current main solution completed in conjunction in a manner of using organic viscose glue (such as epoxy resin), and organic viscose glue by
In non-refractory, it is easy aging and the grade of vacuum tight cannot be reached, therefore reduce the reliability of package parts, use the longevity
Life is usually shorter.
Summary of the invention
Technical problem to be solved: present invention aims at solve crystalline material and gold by a kind of new preparation method
Belong to the problem of material Leakless sealing reliability.
Technical solution
A kind of optical window structure making process of metal and crystal air-tight packaging, manufacturing method include:
(1) with the metal forming part of cavity: oil removing cleaning, nickel plating, drying；
(2) crystal optic Local treatment: exposure mask, chemical method corrosion roughening, the polarization of roughening position, change on crystal optic periphery
Nickel plating, electrotinning, drying are learned, fragment is cut；
(3) fixture: according to parts size precision clamp for machining；
(4) sealing-in: metal forming part and crystal optic are placed on fixture, the 250-300 degrees Celsius of baking in sintering furnace
Bake 15-20 minutes formation finished products.
(5) it tests: testing the bond strength of finished product, and test air-tightness in helium leak detector, in thermal shock and cold and hot
Testing reliability in loop test instrument.
The metal forming part material is kovar alloy.
The crystal optic is silica glass material.
The fixture uses graphite material.
1-5 microns of the metal forming part nickel plating thickness.
Crystal optic nickel plating 1-10 after local exposure mask, printing, chemical method corrosion roughening, the polarization of roughening position is micro-
Rice, it is then 1-10 microns tin plating.
It is described that metal forming part and crystal optic are placed on fixture 300 degrees Celsius of bakings, 20 minutes shapes in sintering furnace
At finished product.
The utility model has the advantages that present invention employs crystal optic part exposure mask, corrosion roughening, electric plating method are formed metal mistake
Layer is crossed, then passes through the method for low temperature soldering, the method for the pipe cap or cavity melting welding of crystal optical window and metal forming part is reached
To Leakless sealing.
1, the present invention does not use traditional glass-sealed method, to effectively prevent asking because the material coefficient of expansion matches
Inscribe many technological difficulties of bring.
2, the present invention is using the printing of crystal optic part and metallization technology, so that a variety of different materials can avoid height
Warm process, because of the optical performance degradation for the material that pyroprocess is likely to result in.
3, the present invention is connected using solder technology completion metal with the leakproofness of crystal optic, and can flexibly select soft pricker
Wlding material, to adapt to the requirement of different use environments.
Detailed description of the invention
Fig. 1 is metal forming part main view of the present invention.
Fig. 2 is metal forming part left view of the present invention.
Fig. 3 is crystal optic main view of the present invention.
Fig. 4 is crystal optic left view of the present invention.
Fig. 5 is main view of the present invention.
Fig. 6 is left view of the present invention.
Fig. 7 is that the present invention is put into schematic diagram in fixture.
Specific embodiment
In order to keep the objectives, technical solutions, and advantages of the present invention more concise, present invention following specific embodiments
It is illustrated, but the present invention is by no means limited to these examples.The following is only the preferred embodiment of the present invention, is used only for retouching
The present invention is stated, should not be understood as limiting the scope of the present invention.It should be pointed out that it is all the spirit and principles in the present invention it
Interior done any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention.Therefore, of the invention
The scope of protection shall be subject to the appended claims for patent.
1 is shown in Table using the experimental result that low temperature glass or epoxy resin encapsulate in the prior art:
See that Fig. 1-7, label 1 represent metal forming part, 2 represent optical window through-hole, and 3 represent crystal optic, and 4 represent crystal optic
Local treatment, 5 represent solderable material, and 6 represent fixture, and 7 represent cavity.
Metal and the optical window structure making process of crystal air-tight packaging include:
(1) with the metal forming part of cavity: oil removing cleaning, nickel plating, drying；
(2) crystal optic Local treatment: exposure mask, the roughening of chemical method local corrosion, roughening position pole on crystal optic periphery
Change, chemical nickel plating, electrotinning, drying, cutting fragment；
(3) fixture: according to parts size precision clamp for machining；
(4) sealing-in: metal forming part and crystal optic are placed on fixture, the 250-300 degrees Celsius of baking in sintering furnace
It is 15-20 minutes roasting, sealing-in, which is completed, under certain protective atmosphere forms finished product.
(5) it tests: testing the bond strength of finished product, and test air-tightness in helium leak detector, in thermal shock and cold and hot
Testing reliability in loop test instrument.
In one embodiment, the metal forming part material is kovar alloy.
In one embodiment, the crystal optic is silica glass material.
In one embodiment, the fixture uses graphite material.
In one embodiment, 1-5 microns of the metal forming part nickel plating thickness.
In one embodiment, the crystal optic is through local exposure mask, printing, chemical method corrosion roughening, roughening position pole
It is then 1-10 microns tin plating nickel plating 1-10 microns after change.
In one embodiment, described metal forming part and crystal optic are placed on fixture in sintering furnace 300 to take the photograph
Family name's degree toasts 20 minutes formation finished products.
It is as follows to present invention experiment:
Table 2: material composition
Table 3, the performance indicator reached according to the requirement of army of U.S. table MIL-STD-883E
As shown in Figure 1, 2, the material that metal forming part uses is rectangular kovar alloy (Kovar 4J29) frame, specification
For SMD5050,5 millimeters of square side length, 1.5 millimeters of height is completed by the method for precision stamping.
As shown in Figure 3,4, crystal optic is using silica glass material, and 0.3 millimeter of thickness, the size of full wafer is 100*
The rectangular matrix of 60mm is shown in that Fig. 3 crystal optic Local treatment 4 is marked by local exposure mask, chemistry roughening, parcel plating nickel and tin
Number marked, final fragment at the 4.0*4.0 millimeter that specification is standard individual pieces.
As shown in fig. 7, fixture uses common graphite, it is dimensioned to fixture as requested.
Experimental facilities:
Printing machine, coating machine, plating line, sintering furnace, thrust meter, ultraviolet spectrometer, ultraviolet irradiation instrument, thermal shock instrument are cold
Heat circulator, helium leak detector etc..
Technical process:
(1) metal forming part 1~5 micron of nickel plating thickness, is dried for standby after oil removing is cleaned.
(2) crystal optic nickel plating 1-10 after local exposure mask, printing, chemical method corrosion roughening, the polarization of roughening position
Micron, it is then 1-10 microns tin plating, it is spare after drying.
(3) it on graphite fixture, will be toasted for 300 degrees Celsius in sintering furnace after metal forming part and crystal optic combination
20 minutes, finished product of the present invention is obtained, as shown in Figure 5,6.
Properties of product test obtained above, obtained result such as table 4:
Conclusion: being tested with the optical window of quartz crystal air-tight packaging by properties using produced by the present invention cut down,
Performance is all satisfied design requirement.
The present invention is it is emphasised that a kind of innovation performance of process thus bring product is promoted, it is not limited to certain
Certain material, shapes and sizes and use which kind of process equipment.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (7)
1. the optical window structure making process of a kind of metal and crystal air-tight packaging, it is characterised in that manufacturing method includes:
(1) with the metal forming part of cavity: oil removing cleaning, nickel plating, drying；
(2) crystal optic Local treatment: exposure mask, chemical method corrosion roughening, the polarization of roughening position, chemical plating on crystal optic periphery
Fragment is cut in nickel, electrotinning, drying；
(3) fixture: according to parts size precision clamp for machining；
(4) sealing-in: metal forming part and crystal optic are placed on fixture, the 250-300 degrees Celsius of baking 15- in sintering furnace
20 minutes formation finished products；
(5) it tests: testing the bond strength of finished product, and test air-tightness in helium leak detector, in thermal shock and cold cycling
Testing reliability in tester.
2. the optical window structure making process of a kind of metal according to claim 1 and crystal air-tight packaging, feature exist
In: the metal forming part material is kovar alloy.
3. the optical window structure making process of a kind of metal according to claim 1 and crystal air-tight packaging, feature exist
In: the crystal optic is silica glass material.
4. the optical window structure making process of a kind of metal according to claim 1 and crystal air-tight packaging, feature exist
In: the fixture uses graphite material.
5. the optical window structure making process of a kind of metal according to claim 1 and crystal air-tight packaging, feature exist
In: 1-5 microns of the metal forming part nickel plating thickness.
6. the optical window structure making process of a kind of metal according to claim 1 and crystal air-tight packaging, feature exist
In: the crystal optic is 1-10 microns of nickel plating after local exposure mask, printing, chemical method corrosion roughening, the polarization of roughening position, then
It is 1-10 microns tin plating.
7. the optical window structure making process of a kind of metal according to claim 1 and crystal air-tight packaging, feature exist
In: it is described by metal forming part and crystal optic be placed on fixture in sintering furnace 300 degrees Celsius of bakings formed within 20 minutes at
Product.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710466234.9A CN107301977B (en) | 2017-06-19 | 2017-06-19 | A kind of optical window structure making process of metal and crystal air-tight packaging |
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| CN201710466234.9A CN107301977B (en) | 2017-06-19 | 2017-06-19 | A kind of optical window structure making process of metal and crystal air-tight packaging |
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| CN107301977B true CN107301977B (en) | 2018-12-21 |
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| CN111360434A (en) * | 2019-12-30 | 2020-07-03 | 西南技术物理研究所 | Method for manufacturing pipe cap welded by using glass solder |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102983245A (en) * | 2011-09-06 | 2013-03-20 | 青岛杰生电气有限公司 | Packaging structure for ultraviolet luminous diode |
| CN103515327B (en) * | 2013-09-30 | 2017-03-15 | 安徽华东光电技术研究所 | Kovar metal structure for laser seal welding and laser welding method |
| CN103972378A (en) * | 2014-05-29 | 2014-08-06 | 中山市秉一电子科技有限公司 | LED light-emitting device and packaging method thereof |
| CN204991720U (en) * | 2015-08-11 | 2016-01-20 | 中国电子科技集团公司第四十四研究所 | Take miniature metal attachment of optical window |
| CN105689833B (en) * | 2016-03-24 | 2018-02-23 | 株洲天微技术有限公司 | A kind of the sealed with brazing capping method and structure of microcircuit module housing and cover plate |
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Effective date of registration: 20190531 Address after: 519000 Research Building, No. 10 Jinzhou Road, Tangjiawan Town, Zhuhai High-tech Zone, Guangdong Province, 2nd Floor Patentee after: Guangdong Gastight Hermetical Component Co., Ltd. Address before: 516000 No. 82, Huizhou Avenue, Huizhou City, Guangdong Province, No. 07, 15th floor of Xinhe Building Patentee before: Huizhou Hongye new materials Co. Ltd. |