CN107301977A - A kind of optical window structure making process of metal and crystal air-tight packaging - Google Patents
A kind of optical window structure making process of metal and crystal air-tight packaging Download PDFInfo
- Publication number
- CN107301977A CN107301977A CN201710466234.9A CN201710466234A CN107301977A CN 107301977 A CN107301977 A CN 107301977A CN 201710466234 A CN201710466234 A CN 201710466234A CN 107301977 A CN107301977 A CN 107301977A
- Authority
- CN
- China
- Prior art keywords
- crystal
- metal
- optical window
- forming part
- making process
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Joining Of Glass To Other Materials (AREA)
Abstract
The invention discloses a kind of metal and the optical window structure making process of crystal air-tight packaging, its manufacture method includes:(1) there is the metal forming part of cavity:Oil removing cleaning, nickel plating, drying；(2) crystal optic Local treatment：Mask, chemical method corrosion roughening, roughening position polarization, chemical nickel plating, electrotinning, drying, cutting burst；(3) fixture：According to parts size precision clamp for machining；(4) sealing-in：Metal forming part and crystal optic are placed on fixture, 250 300 degrees Celsius of bakings form finished product in 15 20 minutes in sintering furnace.(5) test：Test bond strength, the air-tightness of finished product.Present invention employs by the local mask of crystal optic, corrosion roughening, electric plating method formation intermediate metal, then by the method for low temperature soldering, the method for the pipe cap or cavity melting welding of crystal optical window and metal forming part is reached into Leakless sealing.So as to effectively prevent because of many technological difficulties that material expand coefficients match problem is brought.
Description
Technical field
The invention belongs to photoelectron air-tight packaging field, the light of specifically a kind of metal and crystal air-tight packaging
Window construction manufacture method.
Background technology
In photoelectron air-tight packaging field, have a class product be by crystalline material such as CaF2, MgF2, quartz crystal,
The optical lens or eyeglass of the crystalline materials such as ZnS manufacture need to combine with metal pipe cap or metallic cavity, form a use
In the optical window structure of air-tight packaging.Because semiconductor chip is to ambient moisture, the sensitiveness of harmful gas and pollutant, institute
The encapsulation of air-tightness is generally required with this device, in ultraviolet and mid infrared region, conventional optical glass material is due to its light
The limitation of performance is learned, tends not to meet the requirement of light transmittance, therefore, in ultraviolet region, generally using quartz glass as saturating
Luminescent material；In mid infrared region, generally light transmissive material is used as using various non-oxidized substance crystal.
Because the coefficient of expansion of quartz glass is than metal material order of magnitude lower, non-oxidized substance crystalline material usually due to
Than relatively low phase transition temperature or a variety of thermal coefficient of expansions, it is difficult to be completed by way of the direct sealing-in of glass, institute
With current main solution completed by the way of being combined using organic viscose glue (such as epoxy resin), and organic viscose glue by
In non-refractory, easy aging and the grade that vacuum tight can not be reached, therefore the reliability of package parts is reduced, use the longevity
Life is generally shorter.
The content of the invention
Technical problem to be solved：Present invention aims at solve crystalline material and gold by a kind of new preparation method
Belong to the problem of material Leakless sealing reliability.
Technical scheme
A kind of optical window structure making process of metal and crystal air-tight packaging, its manufacture method includes:
(1) there is the metal forming part of cavity:Oil removing cleaning, nickel plating, drying；
(2) crystal optic Local treatment：Mask, chemical method corrosion roughening, roughening position polarization, chemical nickel plating, electrotinning,
Drying, cutting burst；
(3) fixture：According to parts size precision clamp for machining；
(4) sealing-in：Metal forming part and crystal optic are placed on fixture, the 250-300 degrees Celsius of baking in sintering furnace
Form finished product within roasting 15-20 minutes.
(5) test：The bond strength of finished product is tested, and air-tightness is tested in helium leak detector, in thermal shock and cold and hot
Testing reliability in loop test instrument.
The metal forming part material is kovar alloy.
The crystal optic is silica glass material.
The fixture uses graphite material.
1-5 microns of the metal forming part nickel plating thickness.
Crystal optic 1-10 microns of nickel plating after local mask, printing, corrosion polarization, it is then tin plating 1-10 microns.
It is described that metal forming part and crystal optic are placed on fixture 300 degrees Celsius of bakings, 20 minutes shapes in sintering furnace
Into finished product.
Beneficial effect：Present invention employs the local mask of crystal optic, corrosion roughening, electric plating method are formed into metal mistake
Layer is crossed, then by the method for low temperature soldering, the method for the pipe cap or cavity melting welding of crystal optical window and metal forming part is reached
To Leakless sealing.
1st, the present invention does not use traditional glass-sealed method, so as to effectively prevent because material expand coefficients match is asked
Inscribe many technological difficulties brought.
2nd, the present invention is locally printed and metallization technology using crystal optic so that a variety of materials can avoid height
Warm process, because the optical performance degradation for the material that pyroprocess is likely to result in.
3rd, the present invention completes the sealing connection of metal and crystal optic using solder technology, and can flexibly select soft pricker
Wlding material, to adapt to the requirement of different use environments.
Brief description of the drawings
Fig. 1 is metal forming part front view of the present invention.
Fig. 2 is metal forming part left view of the present invention.
Fig. 3 is crystal optic front view of the present invention.
Fig. 4 is crystal optic left view of the present invention.
Fig. 5 is front view of the present invention.
Fig. 6 is left view of the present invention.
Fig. 7 is that the present invention is put into schematic diagram in fixture.
Embodiment
In order that the objects, technical solutions and advantages of the present invention are more concise, present invention specific examples below
Illustrate, but the present invention is only limitted to absolutely not these examples.As described below is only the present invention preferably embodiment, is used only for retouching
State the present invention, it is impossible to be interpreted as limiting the scope of the present invention.It should be pointed out that it is all the spirit and principles in the present invention it
Interior done any modifications, equivalent substitutions and improvements etc., should be included in the scope of the protection.Therefore, it is of the invention
The protection domain of patent should be determined by the appended claims.
In the prior art 1 is shown in Table using the experimental result of low temperature glass or epoxy encapsulation：
See Fig. 1-7, label 1 represents metal forming part, and 2 represent optical window through hole, and 3 represent crystal optic, and 4 represent crystal optic
Local treatment, 5 represent solderable material, and 6 represent fixture, and 7 represent cavity.
Metal and the optical window structure making process of crystal air-tight packaging include:
(1) there is the metal forming part of cavity:Oil removing cleaning, nickel plating, drying；
(2) crystal optic Local treatment：Mask, the roughening of chemical method local corrosion, roughening position polarization, chemical nickel plating, electricity
Tin plating, drying, cutting burst；
(3) fixture：According to parts size precision clamp for machining；
(4) sealing-in：Metal forming part and crystal optic are placed on fixture, the 250-300 degrees Celsius of baking in sintering furnace
It is roasting 15-20 minutes, sealing-in formation finished product is completed under certain protective atmosphere.
(5) test：The bond strength of finished product is tested, and air-tightness is tested in helium leak detector, in thermal shock and cold and hot
Testing reliability in loop test instrument.
In one embodiment, the metal forming part material is kovar alloy.
In one embodiment, the crystal optic is silica glass material.
In one embodiment, the fixture uses graphite material.
In one embodiment, 1-5 microns of the metal forming part nickel plating thickness.
In one embodiment, local 1-10 microns of the nickel plating after mask, printing, corrosion polarization of the crystal optic, so
It is tin plating 1-10 microns afterwards.
In one embodiment, it is described metal forming part and crystal optic are placed on fixture in sintering furnace 300 to take the photograph
Family name's degree toasts 20 minutes and forms finished product.
It is as follows to present invention experiment：
Table 2：Material is constituted
Table 3, the performance indications reached according to army of U.S. table MIL-STD-883E requirement
As shown in Figure 1, 2, the material that metal forming part is used is square kovar alloy (Kovar 4J29) framework, specification
For SMD5050, square 5 millimeters of the length of side, 1.5 millimeters of height is completed by the method for precision stamping.
As shown in Figure 3,4, crystal optic uses silica glass material, 0.3 millimeter of thickness, and the size of full wafer is 100*
60mm rectangular matrix, by local mask, chemistry roughening, parcel plating nickel and tin, is shown in that Fig. 3 crystal optics Local treatment 4 is marked
Number marked, final burst is into individual pieces of the specification for the 4.0*4.0 millimeters of standard.
As shown in fig. 7, fixture uses common graphite, fixture is dimensioned to as requested.
Experimental facilities：
Printing machine, coating machine, plating line, sintering furnace, thrust meter, ultraviolet spectrometer, ultraviolet irradiation instrument, thermal shock instrument is cold
Heat circulator, helium leak detector etc..
Technical process：
(1) after metal forming part is cleaned through oil removing, 1~5 micron of nickel plating thickness, dry for standby.
(2) crystal optic 1~10 micron of nickel plating after mask, printing, corrosion polarization, then tin plating 1~10 micron, drying
It is standby afterwards.
(3) by graphite fixture, 300 degrees Celsius are toasted in sintering furnace after metal forming part and crystal optic combination
20 minutes, finished product of the present invention is obtained, as shown in Figure 5,6.
Properties of product test obtained above, obtained result such as table 4：
Conclusion：The optical window with quartz crystal air-tight packaging is cut down by properties test using produced by the present invention,
Performance is satisfied by design requirement.
The present invention is it is emphasised that a kind of innovation performance lifting for the product that thus process is brought, it is not limited to certain
Certain material, shapes and sizes and use which kind of process equipment.
It is obvious to a person skilled in the art that the invention is not restricted to the details of above-mentioned one exemplary embodiment, Er Qie
In the case of without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, embodiment all should be regarded as exemplary, and be nonrestrictive, the scope of the present invention is by appended power
Profit is required rather than described above is limited, it is intended that all in the implication and scope of the equivalency of claim by falling
Change is included in the present invention.
Moreover, it will be appreciated that although the present specification is described in terms of embodiments, not each embodiment is only wrapped
Containing an independent technical scheme, this narrating mode of specification is only that for clarity, those skilled in the art should
Using specification as an entirety, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
It may be appreciated other embodiment.
Claims (7)
1. the optical window structure making process of a kind of metal and crystal air-tight packaging, it is characterised in that manufacture method includes:
(1) there is the metal forming part of cavity:Oil removing cleaning, nickel plating, drying；
(2) crystal optic Local treatment：Mask, chemical method corrosion roughening, roughening position polarization, chemical nickel plating, electrotinning, baking
Dry, cutting burst；
(3) fixture：According to parts size precision clamp for machining；
(4) sealing-in：Metal forming part and crystal optic are placed on fixture, the 250-300 degrees Celsius of baking 15- in sintering furnace
Form finished product within 20 minutes.
(5) test：The bond strength of finished product is tested, and air-tightness is tested in helium leak detector, in thermal shock and cold cycling
Testing reliability in tester.
2. a kind of optical window structure making process of the metal and crystal air-tight packaging described in a root claim 1, its feature exists
In：The metal forming part material is kovar alloy.
3. a kind of optical window structure making process of the metal and crystal air-tight packaging described in a root claim 1, its feature exists
In：The crystal optic is silica glass material.
4. a kind of optical window structure making process of the metal and crystal air-tight packaging described in a root claim 1, its feature exists
In：The fixture uses graphite material.
5. a kind of optical window structure making process of the metal and crystal air-tight packaging described in a root claim 1, its feature exists
In：1-5 microns of the metal forming part nickel plating thickness.
6. a kind of optical window structure making process of the metal and crystal air-tight packaging described in root root claim 1, its feature exists
In：Crystal optic 1-10 microns of nickel plating after local mask, printing, corrosion polarization, it is then tin plating 1-10 microns.
7. a kind of optical window structure making process of the metal and crystal air-tight packaging described in a root claim 1, its feature exists
In：It is described metal forming part and crystal optic are placed on fixture 300 degrees Celsius of bakings in sintering furnace to be formed within 20 minutes
Product.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710466234.9A CN107301977B (en) | 2017-06-19 | 2017-06-19 | A kind of optical window structure making process of metal and crystal air-tight packaging |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710466234.9A CN107301977B (en) | 2017-06-19 | 2017-06-19 | A kind of optical window structure making process of metal and crystal air-tight packaging |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107301977A true CN107301977A (en) | 2017-10-27 |
| CN107301977B CN107301977B (en) | 2018-12-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710466234.9A Active CN107301977B (en) | 2017-06-19 | 2017-06-19 | A kind of optical window structure making process of metal and crystal air-tight packaging |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111360434A (en) * | 2019-12-30 | 2020-07-03 | 西南技术物理研究所 | Method for manufacturing pipe cap welded by using glass solder |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102983245A (en) * | 2011-09-06 | 2013-03-20 | 青岛杰生电气有限公司 | Packaging structure for ultraviolet luminous diode |
| CN103515327A (en) * | 2013-09-30 | 2014-01-15 | 安徽华东光电技术研究所 | Kovar metal structure for laser seal welding and laser welding method |
| CN103972378A (en) * | 2014-05-29 | 2014-08-06 | 中山市秉一电子科技有限公司 | LED light-emitting device and packaging method thereof |
| CN204991720U (en) * | 2015-08-11 | 2016-01-20 | 中国电子科技集团公司第四十四研究所 | Take miniature metal attachment of optical window |
| CN105689833A (en) * | 2016-03-24 | 2016-06-22 | 株洲天微技术有限公司 | Brazing sealing covering method and structure for shell and cover plate of microcircuit module |
-
2017
- 2017-06-19 CN CN201710466234.9A patent/CN107301977B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102983245A (en) * | 2011-09-06 | 2013-03-20 | 青岛杰生电气有限公司 | Packaging structure for ultraviolet luminous diode |
| CN103515327A (en) * | 2013-09-30 | 2014-01-15 | 安徽华东光电技术研究所 | Kovar metal structure for laser seal welding and laser welding method |
| CN103972378A (en) * | 2014-05-29 | 2014-08-06 | 中山市秉一电子科技有限公司 | LED light-emitting device and packaging method thereof |
| CN204991720U (en) * | 2015-08-11 | 2016-01-20 | 中国电子科技集团公司第四十四研究所 | Take miniature metal attachment of optical window |
| CN105689833A (en) * | 2016-03-24 | 2016-06-22 | 株洲天微技术有限公司 | Brazing sealing covering method and structure for shell and cover plate of microcircuit module |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111360434A (en) * | 2019-12-30 | 2020-07-03 | 西南技术物理研究所 | Method for manufacturing pipe cap welded by using glass solder |
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| CN107301977B (en) | 2018-12-21 |
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Effective date of registration: 20190531 Address after: 519000 Research Building, No. 10 Jinzhou Road, Tangjiawan Town, Zhuhai High-tech Zone, Guangdong Province, 2nd Floor Patentee after: Guangdong Gastight Hermetical Component Co., Ltd. Address before: 516000 No. 82, Huizhou Avenue, Huizhou City, Guangdong Province, No. 07, 15th floor of Xinhe Building Patentee before: Huizhou Hongye new materials Co. Ltd. |