CN107289325A - A kind of sulfur hexafluoride automatic recovery processing device - Google Patents

A kind of sulfur hexafluoride automatic recovery processing device Download PDF

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Publication number
CN107289325A
CN107289325A CN201710656640.1A CN201710656640A CN107289325A CN 107289325 A CN107289325 A CN 107289325A CN 201710656640 A CN201710656640 A CN 201710656640A CN 107289325 A CN107289325 A CN 107289325A
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CN
China
Prior art keywords
pressure
vacuum
valve
gas
sulfur hexafluoride
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Granted
Application number
CN201710656640.1A
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Chinese (zh)
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CN107289325B (en
Inventor
李建清
管建新
李蕴文
李雷
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Nantong Hung Machinery Equipment Co Ltd
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Nantong Hung Machinery Equipment Co Ltd
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Priority to CN201710656640.1A priority Critical patent/CN107289325B/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C7/00Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
    • F17C7/02Discharging liquefied gases
    • F17C7/04Discharging liquefied gases with change of state, e.g. vaporisation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/002Details of vessels or of the filling or discharging of vessels for vessels under pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/02Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/04Arrangement or mounting of valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03Orientation
    • F17C2201/032Orientation with substantially vertical main axis
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05Size
    • F17C2201/056Small (<1 m3)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323Valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323Valves
    • F17C2205/0326Valves electrically actuated
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323Valves
    • F17C2205/0335Check-valves or non-return valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341Filters
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00Handled fluid, in particular type of fluid
    • F17C2221/01Pure fluids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107Single phase
    • F17C2223/013Single phase liquid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/038Subatmospheric pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107Single phase
    • F17C2225/0123Single phase gaseous, e.g. CNG, GNC
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01Propulsion of the fluid
    • F17C2227/0128Propulsion of the fluid with pumps or compressors
    • F17C2227/0135Pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01Propulsion of the fluid
    • F17C2227/0128Propulsion of the fluid with pumps or compressors
    • F17C2227/0157Compressors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03Heat exchange with the fluid
    • F17C2227/0302Heat exchange with the fluid by heating
    • F17C2227/0304Heat exchange with the fluid by heating using an electric heater
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03Heat exchange with the fluid
    • F17C2227/0367Localisation of heat exchange
    • F17C2227/0388Localisation of heat exchange separate
    • F17C2227/0393Localisation of heat exchange separate using a vaporiser
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04Methods for emptying or filling
    • F17C2227/045Methods for emptying or filling by vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06Controlling or regulating of parameters as output values
    • F17C2250/0605Parameters
    • F17C2250/0626Pressure
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00Purposes of gas storage and gas handling
    • F17C2260/04Reducing risks and environmental impact
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00Applications
    • F17C2270/05Applications for industrial use

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

The invention provides a kind of sulfur hexafluoride automatic recovery processing device, it is characterised in that:Including the caisson in support meanss, filtration system, compressibility, pipe-line system, electric control system;The filtration system includes particulate filter, ingress filter device;The compressibility includes compressor, recovery pump;The pipe-line system includes connecting the pipeline between each device and the control valve on pipeline;The electric control system includes sensor, electric controling element, meter displaying device.After the present invention is using oil-free lubrication, No leakage nonmetal isolating sleeve magnetic coupling power transmission compressor, the gas of recovery is free of oil content, very simple and easy to apply for the regeneration treatment of gas, and equipment is not leaked, and the influence to environment is preferably minimized.Meanwhile, repair simple and easy to do, cost reduction, maintenance is faster.

Description

A kind of sulfur hexafluoride automatic recovery processing device
Technical field
Returned automatically the present invention relates to the SF6 applied technical fields such as electric power, metallurgy, space flight, more particularly to a kind of sulfur hexafluoride Receive processing unit.
Background technology
Sulfur hexafluoride gas is a kind of excellent insulation and arc extinguishing gases, is widely used in various electrical equipments.For Ensure generally Seal Oil SF6 gases, and keep certain pressure in the normal operation of equipment, equipment.SF6 gases are nontoxic in itself, But its analyte is to the very harmful of environment, contain in the catabolite for being mainly manifested in it acidic materials, particularly HF, SO2, with toxicity and corrosivity, not only influences the service life of equipment, also pollutes the environment, endangers personal security and cause money The waste in source.When equipment works, can have the reasons such as leakage, electric discharge causes air-loss, at this moment needs to carry out tonifying Qi to equipment Safeguard, also need to sometimes to gas recycling.
Chinese patent 201210399570.3 provides a kind of sulfur hexafluoride gas test apparatus device for recovering tail gas, bag Include:External air accumulator, device for recovering tail gas main body;Device for recovering tail gas main body includes air source inlet to be checked;Source of the gas to be checked enters Mouthful be provided with mass flow controller between instrument air inlet, and with surge tank, air pump, check valve, recharge pipeline, external storage Gas tank is tightly connected, and finally the sulfur hexafluoride tail gas after reclaiming compression is delivered in external air accumulator and stored.Should Invention can realize that sulfur hexafluoride gas tests the zero-emission of tail gas, strong, applied widely with good portability, recovery ability Advantage.
Chinese patent 201620886421.3 discloses a kind of sulfur hexafluoride gas filtering and reclaims the device of integration, bag Vacuum system, compressibility, cleaning system, stocking system and condenser system are included, vacuum system includes oilless vacuum pump, purification system System includes oil removal filter, regeneration device for drying and filtering and solid particle filter, and stocking system includes holding vessel, compressibility Including SF 6 high-voltage compressor, the external cleaning system of high pressure compressor, cleaning system connects the condenser in condenser system; Magnetic valve is provided between condenser and holding vessel, electromagnetic valve outlet end is provided with self-sealing joint, high-pressure compressor outlet and is provided with Electro connecting pressure gauge.The prior art, which simplifies high-pressure liquefaction and low pressure condensation liquefaction two ways, is fused into high pressure condensate liquid Change, reduce process, reach high efficiency, the effect of low cost.
There is also following defect for above-mentioned prior art:There is lubricating oil in compressor, can enter in compression process is reclaimed Enter in gas recovery, cause gas secondary pollution, be difficult regeneration treatment, even across processing, expend larger, loss is big, is difficult Control, oil removal filter short life, replacing pollutes discharge.By environmental protection requirement, SF6 can not be leaked, but have oil lubrication Compressor, its design feature determines that it does not accomplish to be fully sealed, in compression process, gas leakage again causes environment Pollution.
The content of the invention
To overcome gaseous contamination and the compression leakage problem present in prior art caused by lubricating oil, the present invention is provided A kind of sulfur hexafluoride automatic recovery processing device.
The technical scheme is that:
A kind of sulfur hexafluoride automatic recovery processing device, it is characterised in that:Including the gas storage dress in support meanss Put, filtration system, compressibility, pipe-line system, electric control system;The filtration system includes particulate filter, moisture content mistake Filter;The compressibility includes oilless (oil free) compressor, recovery pump;The pipe-line system include connecting pipeline between each device and Control valve on pipeline;The electric control system includes sensor, electric controling element, meter displaying device;The compression Device uses oil-free lubrication, in the absence of lubricating oil.
On this basis, described sulfur hexafluoride automatic recovery processing device also includes pumped vacuum systems, described to vacuumize System include be sequentially connected by pipeline vavuum pump, the coaxial control valve of piston type of vacuum power source, vacuum pressure sensor, Vacuum breaker ball valve;The piston type vacuum coaxial valve of the vacuum power source, can effectively prevent lubricant grease from flowing back into recovery dress In the product put and be evacuated.
On this basis, described sulfur hexafluoride automatic recovery processing device also includes inflation system, the inflation system Including external heating type evaporator, pressure reducer, check valve, moisture content particulate filter, control valve, pressure sensor;The external-heat steams Device is sent out when being used to inflate to liquid SF6 heating and gasifyings.
On this basis, described sulfur hexafluoride automatic recovery processing device, whole operation process is automatic using PLC program Change control:Input reclaims end pressure value and realizes recovery autostop on control terminal;The blowing pressure is set on control terminal Carry out automatic constant pressure inflation;Vacuum values are set on control terminal and realize that vacuumizing autostop and setting delay time makes vacuum It is more thorough.
The control terminal is touch-screen or industrial PC.
On this basis, described sulfur hexafluoride automatic recovery processing device, its gas recovery recovery process is:
1) by sulfur hexafluoride waste gas to be recycled by particulate filter, specific pollutants are removed;
2) in two kinds of situation:When waste gas is less than atmospheric pressure value, delivered gas to by recovery pump in compressor, when When exhaust gas pressure is more than atmospheric pressure value, waste gas is first passed through to be entered in compressor after pressure reducer;
3) gas after compressing is by moisture particulate filter arrangement, subsequently into caisson.
Recycled automatically present invention also offers a kind of sulfur hexafluoride comprising using vacuum as the coaxial valve of power source Device, its technical scheme is as follows:
A kind of sulfur hexafluoride automatic recovery processing device, including including caisson, filtration system, compressibility, pipeline System, electric control system, pumped vacuum systems, it is characterised in that:The pumped vacuum systems is provided with vavuum pump front end pipeline With coaxial valve of the vacuum as power source, for protecting vavuum pump not encroached on by normal pressure.
On this basis, the piston type vacuum coaxial valve using vacuum as power gas source includes coaxial valve portion and electricity Magnet valve part, the coaxial valve portion is using vacuum as power source, including piston valve core, cylinder barrel, briquetting, sealing block, sealing Circle, seal valve seat, the electromagnetism valve portion include electromagnetic control apparatus;The piston valve core is tubular, is sleeved on cylinder barrel It is interior and can move back and forth;The side wall of the cylinder barrel has passage, and the two ends of the cylinder barrel are provided with sealing block, uses Packaging clearance between sealing piston formula valve element and cylinder barrel;The sealing block outer end is provided with briquetting, for compressing sealing Block;Seal valve seat is also equipped with the port of export of the piston valve core, for the port of sealing piston formula valve element;The electromagnetism Control device is connected by pipeline one end with cylinder barrel side wall, and the other end is connected with the briquetting outside seal valve seat;The sealing ring Contacting with each other on face between each part.
The outer wall of the piston valve core, which has, has annular ditch groove, the annular ditch groove on circular step, the step Embedded to be cased with piston packing, the inwall of the piston packing and cylinder barrel is in sealing contact;In piston valve core entrance point Side wall on be cased with spring, the spring one end is against on sealing block section, and the other end is against on circular step side.
Cylinder barrel side wall has two passages, and two passages are respectively communicated with and piston valve core circular step two The passage in the space of side, wherein entrance point is connected by pipeline with electromagnetic control apparatus, the passage of the port of export and big gas phase Connection.
The sealing block is middle porose round pie, and the outer wall of the cake has ring-shaped groove, and the groove is embedded Elastic seal ring is cased with, the elastic seal ring is resilient contacting sealing with briquetting inwall;The inwall of the interstitial hole has ring Shape groove, the groove is nested with flexible sealing ring, and the sealing block is sleeved on the outer wall at the piston valve core two ends, The elastic seal ring is resilient contacting sealing with plunger valve outer core;The section of the sealing block and the port phase of cylinder barrel Support;The edge of the sealing block of the port of export also has the flanging stretched out.
The briquetting, which is located inside the outside of the sealing block, the briquetting, has cylindrical fluid passage, the briquetting Inside has step, constitutes into the cylindrical channel of 2-3 sections of different-diameters;The cylinder barrel, sealing block are sleeved on briquetting In barrel dliameter;The inner most step of briquetting of the entrance point and the port of piston valve core offset;The briquetting side of the port of export Wall has stomata, is connected by pipeline with electromagnetic control apparatus;Fastening is bolted between the left and right briquetting block.
The seal valve seat is at round pie, its section edges and the flanging end face of sealing block offsets, in round pie section Center has circular elastic sealing gasket, has a diameter larger than or equal to the diameter of piston valve core, and with piston valve core The port of export constitutes elastic packing;As a kind of optional embodiment of the present invention, described elastic sealing gasket is round pie, and its is straight Footpath is more than the external diameter of piston valve core;As another optional embodiment of the present invention, described elastic sealing gasket is annulus Shape, the section of its ring cross-section covering piston valve core port;The seal valve seat is also distributed at the outer rim of elastic sealing gasket There are some through holes, the through hole correspondence is distributed between piston valve core and cylinder barrel on annular cross section.
The piston valve core port of export is inner conical, and the edge of a knife is formed at the fascia edge of port, constitutes annular seal The elastic sealing gasket in knife, the annular seal knife and seal valve seat center, which offsets, is resilient sealing.
The electromagnetic control apparatus includes:Two-bit triplet magnetic valve, magnetic valve spring, valve core of the electromagnetic valve;Described two three Three-way electromagnetic valve Single port is connected with air, and Single port is connected with the passage at cylinder barrel entrance point end, one end and the port of export The passage connection of briquetting.
When the coaxial valve is opened, the passage of the cylinder barrel port of export is by pipeline, two-bit triplet magnetic valve with going out The briquetting connection at mouth end;When the coaxial valve is closed, the passage of the cylinder barrel entrance point passes through pipeline, two-bit triplet electromagnetism Valve and atmosphere.
The fluid that the gas or other media possess in two-way flow control, entrance point pipeline is positive pressure or vacuum Negative pressure;When the valve is closed, vacuum and positive pressure pressure can be born without leakage, while vavuum pump stops suddenly in positive vacuum Only, vacuum power source coaxial valve loses vacuum power, automatic to close, and effectively prevents vavuum pump reverse differential pressure and returns pumping fluid The problem of stream.
Recycled automatically present invention also offers a kind of sulfur hexafluoride of the oilless (oil free) compressor comprising magnetic force hitch bar Device, its technical scheme is as follows:
A kind of sulfur hexafluoride automatic recovery processing device, including caisson, filtration system, compressibility, pipe-line system, Electric control system;It is characterized in that:Oil-free lubrication, the magnetic of nonmetal isolating sleeve seal isolation are employed in the compressibility Couple powerdriven compressor.
On this basis,
The compressor includes eccentric axle box, high-pressure cylinder, low-pressure cylinder, piston, power transmission shaft, eccentric shaft, bearing axle, magnetic Power coupling device;The compressor has three cylinders, and a high-pressure cylinder is distributed in the top of eccentric axle box, two low pressure gas Cylinder is is distributed in eccentric shaft lower box part both sides, and the high-pressure cylinder and low-pressure cylinder use the structure distribution of falling Y-shaped, three cylinders Mutually stagger in 120 ° of angles, and do not arrange at grade;The piston is connected by connecting rod with eccentric shaft, three pistons it Between be mutually 120 angles and stagger;The two ends of the eccentric shaft are connected with power transmission shaft and support shaft respectively;The magnetic couple device band Dynamic power transmission shaft motion.
There is no in lubricating oil, eccentric axle box all running parts in the eccentric axle box all without lubricating oil.
The entrance of the low-pressure cylinder is connected with eccentric axle box, and the outlet of the low-pressure cylinder and the entrance of high-pressure cylinder are logical Cross pipeline connection.
Without lubricant medium between the high-pressure cylinder, low-pressure cylinder and piston, the piston ring is using self-lubricating Nonmetallic materials are made, and the nonmetallic materials are by matrix of polytetrafluoroethylene (PTFE), add carbon fiber and polyimides mixing system Into.
The magnetic couple device uses associated mode magnetic coupling transmission, comprising internal magnetic circuit and external magnetic circuit, the eccentric axle box Between ambient atmosphere by nonmetal isolating sleeve carry out it is hermetically sealed isolate, and the nonmetal isolating sleeve is by the internal magnetic circuit Keep apart with the external magnetic circuit.
The nonmetal isolating sleeve is to add the separation sleeve that glass fibre is molded as main material using nylon.
The compression process uses two stages of compression, and two low-pressure cylinder carries out one stage of compression, the high pressure gas to gas Cylinder further carries out two-stage compression to gas.
The discharge capacity of the high-pressure cylinder of the oil-free gas compressor is 6-60M3/ h, output pressure is more than 6MPa.
The gas enters inside eccentric axle box from the entrance of pneumatic cylinder, and is taken away in flow process in eccentric axle box Bearing heat, entered by the outlet of low-pressure cylinder in high-pressure cylinder.
Low-pressure cylinder and the high-pressure cylinder outer wall has the fin of some wing structures;Outside the high and low pressure cylinder Wall has cooling device;The cooling device is to use fan air blast cooling.
The two ends of the eccentric shaft have inertia balance wheel, and are connected respectively with support shaft, power transmission shaft by inertia balance wheel Connect;There is balancing patch, the low-pressure cylinder and high-pressure cylinder are located at the centre of two inertia balance wheels on the inertia balance wheel;Institute State and spacer ring is installed between eccentric shaft and inertia balance wheel.
Compared with prior art, the beneficial effects of the invention are as follows:
1) after the present invention is using oil-free lubrication, No leakage nonmetal isolating sleeve magnetic coupling power transmission compressor, recovery Gas is free of oil content, very simple and easy to apply for the regeneration treatment of gas, and equipment is not leaked, the influence drop to environment To minimum.When this compressor occurs abrasion even in rotatable parts after ultra-long time is run and causes failure simultaneously, in motor Be not stopped in the case of, further damage of the magnetic coupling power transmission slip without causing compressor head parts makes It must repair simple and easy to do, cost reduction, maintenance is faster.
2) in the inventive solutions, vacuum function not only can also be vacuumized to equipment itself to being recovered product. The present invention is used for before vavuum pump using vacuum as the coaxial valve of power source so that vavuum pump is able to when pipeline is in normal pressure Protection, when having normal pressure in pump intake, this valve is closed automatically, and can not be opened, and protects the safety of pump.In entrance without just Under pressure state, after vacuum pump startup, vacuum power is provided to this valve, now valve is automatically opened up, processed product Connected with the vacuum line of equipment, complete vacuum function.
3) present invention is using coaxial valve of the vacuum as power source, it is not necessary to power gas source.The valve also has one particularly Advantage, once vavuum pump stops, it is either intentional or beyond it is out of service, vacuum power source will lose, and valve is all At once automatic it can close, it is to avoid cause pumping fluid to enter processed product because of vacuum under stopped status, protect product From pollution, the oily pollution for otherwise handling interiors of products is extremely complex, somewhat expensive.On this point, existing other skills are contrasted Art, no matter using electromagnetic type coaxial valve, or motor-driven valve, let alone manual ball valve, can not all accomplish under bursty state from It is dynamic to close protection.In the prior art, once solenoid valve failure or it is artificial forget to close valve, as long as stopping vavuum pump, pump oil will Product is flowed back into rapidly, consequence is hardly imaginable.Moreover, problems happen occasionally.
4) present invention accomplishes not shut down in gas removal process, electromagnetism is only momentarily closed by PLC and pressure sensor Valve control valve again after sensor determines pressure and setting pressure ratio relatively, by the design of program, in the bound model of design Enclose it is interior carry out multiple automatic measurement and compare, until the pressure value of setting is just automatically stopped retracting device, it is to avoid during gas recovery, Staff's gas caused by operation is inaccurate reclaims control failure.And the equipment of prior art is all defeated without parameter setting Enter, only operate shutdown, or an only final pressure value of acquiescence again by personal observations, reach equipment after this value and stop automatically Machine, it is impossible to which end pressure is reclaimed in any setting.It is very big using limitation.
5) automatic recovery processing device of the invention possesses level pressure aerification function, is entered using PLC program setting the blowing pressure Row automatic constant pressure is inflated, even if the blowing pressure value of product requires not of uniform size, as long as the charged value that setting needs, equipment can be by The flow that program is finished makees level pressure inflation.The advantage of the level pressure aerification function of the present invention is:
A, the blowing pressure infinitely approach setting value, but not exceed, the inflation for particularly having differential pressure requirement in some products Place, can effectively protect product not cause deformation because of differential pressure.And on this point, there is the product of differential pressure requirement, existing skill In art, the pressure reducer charger adjusted manually nearly all can not do.
B, the explosive-proof protector film that product will not be destroyed.Product often has rupture pressure disc protection, in inflation, and inflation requires instantaneous Otherwise pressure influence properties of product or directly wash out rupture pressure disc, destroy product no more than explosion-proof film pressure.And existing set It is standby all to be inflated manually by adjusting pressure regulator manually, pressure it is difficult to ensure that, when have the thing for washing out product, even if When known operative employee is also sure about bad again.
6) present invention is vacuumized autostop and is made vacuum more by setting delay time using PLC program setting vacuum values Thoroughly.Because when vacuumizing due to inner-walls of duct to air-flow by resistance, when instrument is shown to up to vacuum values, can be found after shutdown Numerical value rebounds rising always, and this is mainly what vapour lock was caused, and this is accomplished by operating personnel's equipment on duty, and constantly opens repeatedly Dynamic equipment reaches the vacuum values of needs.And the equipment of the present invention is by the program write in advance, in non-stop-machine feelings Under condition, an automatic shutter valve carrys out measurement of vacuum numerical value, the vacuum ability automatic hold function until meeting needs.
With the contrast of prior art, there are under this function two features to need elaboration:
A, for have differential pressure requirement product vacuumize, can not be controlled by traditional equipment, it is easy to cause Product exceedes differential pressure range and deformed, and influences product quality.
B, for vacuum requirement very high product, equipment of the invention adds automatic time delay stopping function in a program, According to the product of different volumes, delay time calculates input, and the vacuum requirement of product is met to greatest extent after delay, and And without human attendance.Traditional equipment human users and must make on duty, if carelessness is likely to equipment because of long time running And the potential risks such as high temperature ageing, failure.
7) to liquid SF6 heating and gasifyings when the present invention is used to inflate using external heating type evaporator, external-heat heating is employed, So that heater heating is more uniformly distributed, localized hyperthermia's situation, therefore gas homogeneous heating are reduced, rapid spatial expansion will not be caused And causing heater pressure to raise rapidly, whole process heating is gentle stable, safe and reliable.Simultaneously because of outer encompassing heating, dimension Shield maintenance is very convenient, it is not necessary to remove pipeline and related seals, economic and practical.And traditional evaporator is added using interior heating tube Hot mode, heating tube face temperature is very high, and slow away from the remote position heating of heating tube, so temperature and pressure has mutation, stability is not It is good.Again because being installed in sealed evaporator, sealing is difficult to do, easily leakage, if heating tube failure, it is necessary to opens and steams Hair device could be repaired or changed, and expensive, difficult sealing is done, and the cycle is longer.
Brief description of the drawings
Fig. 1 is the functional sequence description figure of the sulfur hexafluoride automatic recovery processing device of the present invention;
Fig. 2 is the structural representation of the vacuum power coaxial valve of the sulfur hexafluoride automatic recovery processing device of the present invention;Fig. 2 Middle reference is as follows:Electromagnetism valve portion A and coaxial valve portion B, two-bit triplet electromagnetic valve coil 201, two-bit triplet magnetic valve Spring 202, two-bit triplet valve core of the electromagnetic valve 203, left briquetting 204, left sealing block 205, sealing block inner seal ring 206, sealing block Exterior seal ring 207, briquetting sealing ring 208, valve core spring 209, cylinder barrel 210, piston valve core 211, piston packing 212, Sealing gasket 213, right sealing block 216, seal valve seat 217, connecting bolt 218, right briquetting 219.
Fig. 3 is the cross-section structure signal of the oil-free gas compressor of the sulfur hexafluoride automatic recovery processing device of the present invention Figure;
Fig. 4 is the cross section structure signal of the oil-free gas compressor of the sulfur hexafluoride automatic recovery processing device of the present invention Figure;
Reference is as follows in Fig. 3, Fig. 4:Eccentric axle box 301, counter flange 302, eccentric shaft cover plate 303, low pressure gas Cylinder 304, high-pressure cylinder 305, the first spacer ring 306, inertia balance wheel 307, eccentric wheel 308, power transmission shaft 309, support shaft 310, every From set geometrical clamp 311, the second spacer ring 312, high pressure cylinder bolt 313, low pressure cylinder bolt 314, fastening bolt 315, connecting rod 316th, high pressure piston 317, balancing patch 318, internal magnetic circuit 320, sealed bearings 321, cover plate bolt 325, straight pin 328, flange are close Seal washer 334, flat key 336, trip bolt 337, ventilating joint 338, cylinder seal packing ring 340, high pressure valve block 342, high pressure cylinder Lid 345, gateway joint 350, temperature sensor joint 352, low pressure valve block 354, low pressure cylinder cap 357, separation sleeve seal washer 359th, separation sleeve 360, external magnetic circuit 361, motor connection cylinder 362, hole shelves 364.
Fig. 5 is the operation principle flow chart of the compression process of the oil-free gas compressor of the present invention.
Embodiment
Below in conjunction with drawings and examples, the present invention will be described in further detail.It should be appreciated that described herein Specific embodiment only to explain the present invention, is not intended to limit the present invention.
Embodiment 1
A kind of sulfur hexafluoride automatic recovery processing device, including caisson in support meanss, filtration system, Compressibility, pipe-line system, electric control system;Wherein, filtration system includes particulate filter, ingress filter device;Compression system System includes compressor, recovery pump;Pipe-line system includes connecting the pipeline between each device and the solenoid electric valve on pipeline;Electrically Control system includes sensor, electric controling element, meter displaying device;Annexation and operation principle such as Fig. 1 of each part It is shown.Compression set uses oil-free lubrication, in the absence of lubricating oil.
Caisson is storage tank or gas cylinder, to the gas reclaimed and after particle filtering, ingress filter, analyte filtering Body carries out liquid storage.Caisson is fixed on support frame.Support frame is a steel frame construction, and provided with the fork for being easy to handling The deflecting roller and fast pulley that can be checked are also equipped with Che Kong, support frame.
In addition, the sulfur hexafluoride automatic recovery processing device also includes pumped vacuum systems, pumped vacuum systems is included by pipe Vavuum pump that road is sequentially connected, the coaxial control valve of vacuum power source, vacuum pressure sensor, vacuum breaker ball valve;The vacuum moving The coaxial control valve in power source, can effectively prevent lubricant grease from flowing back into retracting device with the product being evacuated, make vacuum system Pumping fluid backflow phenomenon is not present in system.
The sulfur hexafluoride automatic recovery processing device also includes inflation system, and inflation system includes external heating type evaporator, subtracted Depressor, check valve, moisture content particulate filter, control valve, pressure sensor;External heating type evaporator is used for when inflating to liquid SF6 Heating and gasifying.
The sulfur hexafluoride automatic recovery processing device that the present invention is provided, whole operation process automates control using PLC program System:Input reclaims end pressure value and realizes recovery autostop on touch-screen or industrial PC;On touch-screen or industrial PC Set the blowing pressure and carry out automatic constant pressure inflation;Vacuum values realization is set on touch-screen or industrial PC and vacuumizes autostop Make vacuum more thorough with setting delay time.
The sulfur hexafluoride automatic recovery processing device that the present invention is provided, its gas recovery recovery process is:
1) by sulfur hexafluoride waste gas to be recycled by particulate filter, specific pollutants are removed;
2) in two kinds of situation:When waste gas is less than atmospheric pressure value, delivered gas to by recovery pump in compressor, when When exhaust gas pressure is more than atmospheric pressure value, waste gas is first passed through to be entered in compressor after pressure reducer;
3) gas after compressing is by moisture particulate filter arrangement, subsequently into caisson.
In the inventive solutions, recovery pump is dry-running and absolute oil-free is operated, and it is by pressure switch, pressure Detector, electromagnetism valve protection, to avoid the occurrence of the condition of work not allowed.Air chamber can be evacuated to less than pa 1mbar by recovery pump (absolute pressure).When pressure is about Pe=0.1-0.2bar, recovery pump will automatically turn on.Reclaim pump output terminal on pressure by Pressure sensor is controlled, and the regulating valve on input can avoid causing too high output pressure due to the obstruction of inlet valve.Return The regulating valve received in the output end of pump can be adjusted output pressure to about pa1000-1050mbar, to avoid on recovery vehicle The too low negative pressure suction of compressor, influences compressor operating.
Solenoid electric valve and pipeline are controlled for gas flow.Vavuum pump only to air-operated, air chamber can be vacuumized and Equipment itself is safeguarded.
Outer hot vaporizer is used to carry out heating and gasifying to the SF6 of storage in liquid, reaches the purpose of inflation.Because in gas cylinder When liquid sulfur hexafluoride is filled with high-tension apparatus, sulfur hexafluoride is changed into gaseous state, it is necessary to absorb amount of heat from liquid, if without outside heat Source is continuously replenished heat to liquid gas, and most sulfur hexafluorides will be remained in gas cylinder to discharge, and cause the waste of gas.This In embodiment, mode of heating is external-heat, the liquid SF6 gases in gas cylinder is flowed in the evaporator of multigroup heating collar and carried out Uniform heating, while gas pressure is automatically controlled and shown using pressure, is made gas be constant at a certain setting pressure, prevents gas Pressurization is excessive, causes evaporator failure etc..
Filtration system includes particulate filter, ingress filter device, first to the particle filtering in gas, again in gas Moisture content, catabolite filtering, then to after filtering gas carry out liquid storage.Purifying regeneration is reached by the filtering of two steps The effect of SF6 gases.
Electric control system includes the automatically controlled component devices such as touch-screen, PLC, and function selection operation is carried out on the touchscreen With setting data input, control program is write in PLC, the purpose of function set by equipment is reached.Reached by appliance component Operation to whole components/devices is controlled.
After the present invention is using oil-free lubrication, No leakage nonmetal isolating sleeve magnetic coupling power transmission compressor, the gas of recovery Body is free of oil content, very simple and easy to apply for the regeneration treatment of gas, and equipment is not leaked, and the influence to environment is dropped to It is minimum.When this compressor occurs abrasion even in rotatable parts after ultra-long time is run and causes failure simultaneously, in motor In the case of not being stopped, further damage of the magnetic coupling power transmission slip without causing compressor head parts so that Maintenance is simple and easy to do, cost reduction, and maintenance is faster.
Embodiment 2
As shown in figure 1, a kind of sulfur hexafluoride automatic recovery processing device, including with lower component:Support frame, compressor, return Receive pump, vavuum pump, vacuum power source coaxial valve, outer hot vaporizer, air accumulator, dust filter unit, dry filter, multiple electromagnetism The automatically controlled components such as pipeline, touch-screen and the PLC of valve and connection all parts.The 26S Proteasome Structure and Function be the same as Example 1 of all parts. The sulfur hexafluoride automatic recovery processing device includes automatic vacuum system, inflation system, reclaims compressibility.
For pumped vacuum systems, with reference to Fig. 1, its operation principle and operating path are:It will please carry before operation from sealing-in 11 mouthfuls of the pipeline access device of head, other end access needs the equipment vacuumized.By touch-screen The curtain rises dynamic automatic vacuum, Setting needs to be extracted into the numerical value of vacuum and vacuumizes delay time.When the product for having differential pressure requirement vacuumizes parameter setting, prolong When the time should be 0.Vacuum bounce-back value quilt can also be shown on the touchscreen, and the value to product for leaking hunting, when function refers to When showing arrival setting value, equipment can close magnetic valve isolated product and vavuum pump, and the vacuum in several seconds in product can be anti-rapidly Bullet.3 detections are secured in PLC device program, if 3 times still above setting value, it is believed that being taken out product has Leakage is, it is necessary to check pipeline and product.Vacuum bounce-back value typically requires to calculate by leakage rate per year.
In the inventive solutions, vacuum pump startup has pressure protection, is higher than if taken out and had in product or pipeline 0.2bar pressure, vavuum pump can not start, and pump initial vacuum power source coaxial valve can not be opened, and only first remove after pressure It can start.Vacuum reaches setup parameter, and equipment is automatically stopped, and vacuum values can be observed on the touchscreen.
As shown in figure 1, the direction of automatic vacuum gas flow is:From pipeline, 11 mouthfuls sense to vacuum line, vacuum pressure Device, control valve V1, most afterwards through vavuum pump to air.
For automatic pressure recovery system, with reference to Fig. 1, its operation principle and operating path are:Before operation please will be self-styled 11 mouthfuls of the pipeline access device of joint, other end access needs the product reclaimed, and empty gas storage special cylinder or storage tank are accessed 21 mouthfuls, steel cylinder is preferably placed in the equipment of weighing device, is easy to observe weight, storage license amount is not exceeded, for storage Gas tank, it is proposed that be with weighing device.The end pressure value to be reclaimed is set by touch-screen and delay time is reclaimed:Below 0 gauge pressure Pressure, hereinafter referred to as absolute pressure, 0-1bar of absolute pressure unit is mbar, and input range is 1-999mbar;It is more than 0 gauge pressure Pressure, hereinafter referred to as relative pressure, 0-9bar of relative pressure unit is bar, and input range is 0.01-9.99bar.Reclaim Delay time is that, in order to solve after reclaiming and shutting down, compressor, which has a small amount of return-air and causing to actually enter value, may rebound more than setting Definite value, therefore allow, to reclaiming delay certain time, there is the suggestion of differential pressure sets requirement to more accurately reach setting value It is set to 0.
In the inventive solutions, gas recovery process:From 11 mouthfuls to particulate filter, pipeline, sensor, V6 valves (when below atmospheric pressure, V6 is closed, and gas passes through V8, recovery pump, V7 valves, compressor, V2 valves, with more than atmospheric pressure one after V2 valves Sample), voltage-stablizer, compressor, V2 valves, moisture content particulate filter, V4 valves to 21 mouthfuls, into air accumulator or bottle.
For dynamic gas pressure system, with reference to Fig. 1, its operation principle and operating path are:Before operation please be by with self-styled 11 mouthfuls of the pipeline access device of joint, other end access needs the product that vacuumizes, by the gas storage special cylinder for having SF6 or Storage tank accesses 21 mouthfuls.
Inflation button is started by touch-screen, the blowing pressure is set.The blowing pressure is relative pressure, and unit is bar, 0 table The pressure of the pressure above is directly inputted, such as 0.5bar.If the blowing pressure inputs "-" below 0 gauge pressure, such as working as needs inflation , it is necessary to calculate input during absolute pressure 400mbar:Absolute 400mbar correspondences relative pressure is -600mbar, by that analogy, is needed By unit conversion into bar (kg).
After the setting of the blowing pressure value finishes carriage return, automatic inflating bound numerical value is automatically generated.On general automatic inflating The maximum upper limit threshold values that proportional numbers is setting value is limited, lower proportion ratio number is the smallest limit threshold values of setting value, actual the blowing pressure In the range of bound, program identifies oneself inflation and met the requirements, and now V9 valves are closed on flow chart, valve rear line face Color restores to the original state, while pressure is indicated in the range of setting, it is believed that inflation terminates.It can quit a program or directly move pipeline Continue to inflate to next product, as long as parameter is identical, avoid the need for change setting.
Above-mentioned gas replenishment process can set completion automatically by PLC program, can also be manually operated completion.Aerated flow Journey is relevant with liquid gas, only after evaporation gasification reaches certain pressure, just has gas and is filled with.If from automatic inflating Pattern, when storage gas flow not enough, cause inflation slow and pressure filling not on, can now be opened manually operated by compressor It is dynamic, reach the effect of air-breathing supercharging.
In technical solution of the present invention, inflation flow and associated components relation:Liquid SF6 arrives V5 valves, evaporator through 21 mouthfuls (heating and gasifying), to check valve, moisture content particulate filter, V3 valves, pressure reducer, V9 valves, pressure sensor, to 11 mouthfuls to be inflated Product.
The present invention accomplishes not shut down in gas removal process, magnetic valve is only momentarily closed by PLC and pressure sensor The control valve again after sensor determines pressure and setting pressure ratio relatively, by the design of program, in the bound scope of design It is interior carry out multiple automatic measurement and compare, until the pressure value of setting is just automatically stopped retracting device, it is to avoid during gas recovery, work Make personnel's gas caused by operation is inaccurate and reclaim control failure.
The automatic recovery processing device of the present invention possesses level pressure aerification function, is carried out using PLC program setting the blowing pressure Automatic constant pressure is inflated, even if the blowing pressure value of product requires not of uniform size, as long as the charged value that setting needs, equipment can be by journey The flow that sequence is finished makees level pressure inflation.
The present invention is vacuumized autostop and is made vacuum more thorough by setting delay time using PLC program setting vacuum values Bottom.The equipment of the present invention is by the program write in advance, and in the case of non-stop-machine, an automatic shutter valve carrys out measurement of vacuum Numerical value, the vacuum ability automatic hold function until meeting needs.
Embodiment 3
A kind of sulfur hexafluoride automatic recovery processing device, including with lower component:Support frame, compressor, recovery pump, vacuum Pump, vacuum power source coaxial valve, outer hot vaporizer, air accumulator, dust filter unit, dry filter, multiple magnetic valves and connection The automatically controlled component such as pipeline, touch-screen and the PLC of all parts.The 26S Proteasome Structure and Function be the same as Example 1 of all parts.This is lithium Sulphur automatic recovery processing device includes automatic vacuum system, inflation system, reclaims compressibility.
In the technical scheme of the present embodiment, pumped vacuum systems is provided with vacuum before vacuum pump inlet as power source Coaxial valve, for protecting vavuum pump not encroached on by normal pressure, while isolating control as detection vavuum pump and product air chamber.
As shown in Fig. 2 the present invention sulfur hexafluoride automatic recovery processing device used using vacuum as power gas source Piston type vacuum coaxial valve, including electromagnetism valve portion A and coaxial valve portion B:Electromagnetism valve portion includes electromagnetic control apparatus;Coaxially Valve portion is using vacuum as power source, including piston valve core 211, cylinder barrel 210, left briquetting 204, right briquetting 219, left sealing block 205th, right sealing block 216, sealing ring, seal valve seat 217.Wherein, piston valve core 211 is tubular, is sleeved in cylinder barrel 210 And it can realize and move back and forth;The two ends of cylinder barrel 210 are provided with sealing block, left and right each one, respectively left sealing block 205, Right sealing block 216, the packaging clearance that sealing block is used between sealing piston formula valve element and cylinder barrel;Sealing block outer end is also equipped with Briquetting, left and right each one, respectively left briquetting 204, right briquetting 219, for compressing sealing block;In the outlet of piston valve core 211 End is also equipped with seal valve seat 217, for the port of sealing piston formula valve element 211;Electromagnetic control apparatus by pipeline one end with The side wall connection of cylinder barrel 210, the other end is connected with the briquetting outside seal valve seat.
The outer wall of piston valve core 211, which has, has annular ditch groove on circular step, step, annular ditch groove is embedded to be cased with living The inwall of plug sealing ring 212, piston packing 212 and cylinder barrel 210 is in sealing contact;In the entrance point of piston valve core 211 Valve core spring 209 is cased with the wall of side, the one end of valve core spring 209 is against on the section of left sealing block 204, and the other end is against piston type On the side of the circular step of valve element 211.
The side wall of cylinder barrel 210 has two passages, and two passages are respectively communicated with and the circular step of piston valve core 211 The passage in the space of both sides, wherein entrance point is connected by pipeline with electromagnetic control apparatus, the passage and air of the port of export It is connected.
Sealing ring contacting with each other on face between each part, is mainly distributed on several contact surfaces:Piston valve core Sealing block inner seal ring 206 in contact surface between 211 outer wall and the inwall of sealing block, such as figure, left and right each one;Sealing block Sealing block exterior seal ring 207 in contact surface between outer wall and briquetting inwall, such as figure, left and right each one;The outer wall of cylinder barrel 210 With the contact surface between briquetting inwall, the briquetting sealing ring 208 in such as figure, left and right each one.The sealed mode of sealing ring uses ring The mode that shape groove and annular seal ring are combined.
Sealing block is left and right each one, and both are slightly different, and sealing block is middle porose round pie, and the outer wall of cake has Ring-shaped groove, groove is nested with flexible sealing ring, and elastic seal ring is resilient contacting sealing with briquetting inwall;Interstitial hole it is interior Wall has ring-shaped groove, and groove is nested with flexible sealing ring, and sealing block is sleeved on the outer wall at piston valve core two ends, elasticity Sealing ring is resilient contacting sealing with plunger valve outer core;The section of sealing block and the port of cylinder barrel offset;The port of export The edge of sealing block also has the flanging stretched out.
Briquetting, which is located inside the outside of sealing block, briquetting, has cylindrical fluid passage, has step inside briquetting, constitutes Into the cylindrical channel of 2-3 sections of different-diameters;Cylinder barrel 210, left sealing block 205, right sealing block 216 are sleeved on the cylinder of briquetting In footpath;The port of the inner most step of left briquetting 204 and piston valve core 211 of entrance point offsets;The right briquetting 219 of the port of export Side wall has stomata, is connected by pipeline with electromagnetic control apparatus;Connected and fastened by bolt 218 between the briquetting block of left and right.
Seal valve seat 217 is at round pie, its section edges and the flanging end face of sealing block offsets, in round pie section There is circular elastic sealing gasket 213, elastic sealing gasket 213 is round pie, is had a diameter larger than or equal to piston valve core at the heart 211 diameter, and constitute elastic packing with the port of export of piston valve core 211;The port of export of piston valve core 211 is inner conical, The edge of a knife is formed at the fascia edge of port, annular seal knife, annular seal knife and the elastic packing in seal valve seat center is constituted Pad, which offsets, is resilient sealing.
Electromagnetic control apparatus includes:Two-bit triplet magnetic valve, magnetic valve spring, valve core of the electromagnetic valve;Two-bit triplet magnetic valve Single port is connected with air, and Single port is connected with the passage at cylinder barrel entrance point end, the briquetting of one end and the port of export it is logical Stomata is connected.
When coaxial valve is opened, the pressure that the passage of the cylinder barrel port of export passes through pipeline, two-bit triplet magnetic valve and the port of export Block is connected;When coaxial valve is closed, the passage of cylinder barrel entrance point passes through pipeline, two-bit triplet magnetic valve and atmosphere.
It is that positive pressure or vacuum are negative that gas or other media, which possess the fluid in two-way flow control, entrance point pipeline, Pressure;When the valve is closed, vacuum and positive pressure pressure can be born without leakage.
Schematic diagram when Fig. 2 is coaxial valve opening, its principle is:When right briquetting 219 passes through pipe with vavuum pump in figure Road is connected, and when starting vavuum pump, negative pressure of vacuum is produced in right briquetting cavity, is opened while two-bit triplet magnetic valve is in State, a mouthfuls of two-bit triplet magnetic valve is communicated with p mouthfuls, the negative pressure of vacuum in right briquetting cavity is passed by two-bit triplet magnetic valve Being delivered to the left side of piston valve core 211 has in the cavity of valve core spring 209, due to being in atmospheric pressure on the right side of piston valve core all the time State, and this left side cavity is under vacuum, both sides produce differential pressure, when the power produced by differential pressure is more than spring force, piston Formula valve element 211 is moved to the left, so that the edge of a knife of piston valve core 211 leaves the rubber gasket 213 of seal valve seat 217, when The inner side step spacing place of 204 left briquettings is moved to the left to, piston valve core stops movement, so that coaxial valve is in open shape State, under the vacuum action of right side, left side air-flow flows to vavuum pump by the circular hole in the middle of piston valve core, makes the left institute of briquetting 204 The pipeline of connection or other cavitys formation vacuum.
When two-bit triplet closed electromagnetic valve, two-bit triplet magnetic valve a is communicated with r, and a is obstructed with p, so that plunger valve Cavity is communicated with air on the left of core, becomes atmospheric pressure.It reclaims Fig. 1 state again.
When coaxial valve closed mode, right briquetting 219 is connected by pipeline with vavuum pump and starts vavuum pump in Fig. 2 When, negative pressure of vacuum is produced in the right cavity of briquetting 219, while when two-bit triplet magnetic valve is closed, negative pressure of vacuum without Method, which is delivered to the left side of piston valve core 211, to be had in the cavity of 209 springs.Now two-bit triplet closed electromagnetic valve, a mouthfuls with r mouthfuls Communicate, a mouthfuls obstructed with p mouthfuls, so that the left side cavity of piston valve core 211 is communicated with air, become atmospheric pressure, then pass through valve The spring force of core spring 209 makes the rubber gasket 213 of the sealing edge of a knife and seal valve seat 217 on the right side of piston valve core 211 Compress, so that coaxial valve sealing is closed.
The present invention is using coaxial valve of the vacuum as power source, without external connection power source of the gas, it is not necessary to power gas source.The valve Also one particular advantage, once vavuum pump stops, it is either intentional or beyond it is out of service, vacuum power source is just It can lose, valve can all be closed automatically at once, it is to avoid cause oil to enter processed product, protection because of vacuum under stopped status Product is from pollution.
In the inventive solutions, vacuum function not only can also be vacuumized to equipment itself to being recovered product.This Invention is used for before vavuum pump using vacuum as the coaxial valve of power source so that vavuum pump is protected when pipeline is in normal pressure Shield, when having normal pressure in pump intake, this valve is closed automatically, and can not be opened, and protects the safety of pump.In entrance without malleation Under power state, after vacuum pump startup, vacuum power is provided to this valve, now valve is automatically opened up, processed product and The vacuum line of equipment is connected, and completes vacuum function.
Technical scheme, using vacuum as power source, i.e., being opened without powerful solenoid controlled coaxial valve Open and close, but with low power two-bit triplet magnetic valve be controllable negative pressure of vacuum transmission whether, so as to realize coaxial The open and close of valve, consumption power is small, easy to operate.Set moreover, employing balance type structure between inlet and outlet Meter, the pipeline or other inner chambers that entrance point is connected can be positive pressure or negative pressure of vacuum.
Embodiment 4
A kind of sulfur hexafluoride automatic recovery processing device, including with lower component:Support frame, compressor, recovery pump, vacuum Pump, vacuum power source coaxial valve, outer hot vaporizer, air accumulator, dust filter unit, dry filter, multiple magnetic valves and connection The automatically controlled component such as pipeline, touch-screen and the PLC of all parts.The 26S Proteasome Structure and Function be the same as Example 1 of all parts.This is lithium Sulphur automatic recovery processing device includes automatic vacuum system, inflation system, reclaims compressibility.
In the technical scheme of the present embodiment, compressor uses oil-free lubrication, No leakage nonmetal isolating sleeve magnetic coupling Powerdriven compressor.
As shown in Figure 3 and Figure 4, the compressor that sulfur fluoride automatic recovery processing device of the invention is used is inverted Y-shaped complete Oil-free gas compressor, including eccentric axle box 301, low-pressure cylinder 304, low-pressure piston 365, high-pressure cylinder 305, high pressure piston 317th, connecting rod 316, power transmission shaft 309, support shaft 310, inertia balance wheel 307, eccentric shaft 308, flux coupled device;Wherein:Partially The one end of heart axle box 301 has eccentric shaft cover plate 3, and eccentric shaft cover plate 303 is fixed by cover plate bolt 325 with eccentric axle box to be connected Connect, lock washer is also cased with cover plate bolt 325.High-pressure cylinder 305 is one, is distributed in the top of eccentric axle box, low pressure gas Cylinder 304 is two, is distributed in eccentric shaft lower box part both sides, and high-pressure cylinder and low-pressure cylinder use the structure distribution of falling Y-shaped, three Cylinder mutually staggers, and do not arrange at grade in 120 ° of angles.Low-pressure piston 365 and high pressure piston 317 pass through connecting rod 316 It is connected with eccentric wheel 307, being also mutually 120 angles between three pistons staggers.Eccentric shaft 308 is located at support shaft 310 and power transmission shaft Between 309, two ends are attached thereto respectively.
Magnetic couple device includes:Internal magnetic circuit 320, separation sleeve 360, external magnetic circuit 361.Internal magnetic circuit 320 is a tubular structure, Two ends bore is not of uniform size, and more small-bore one end is arranged on power transmission shaft 309, and has correspondingly on internal diameter and power transmission shaft 309 Groove, flat key 336 is installed in groove, to facilitate dismounting to be coupled, to transmit torque, in the outer wall compared with small-caliber end, also had Trip bolt 337 is installed in some corresponding through holes, hole, to fasten coupling for internal magnetic circuit 320 and power transmission shaft 309.Isolation Set 360 is made up of nonmetallic materials, and separation sleeve 360 is a peviform structure, there is the flanging stretched out in the edge of bore, rolls over There is separation sleeve geometrical clamp 311, to fixed separation sleeve 360 at side;Lead between the port of separation sleeve 360 and counter flange 302 Cross separation sleeve seal washer 359 to be sealed, also there are some fastening bolts at flanging, to be fixedly connected with isolation 360 and mistake Cross flange 302.
Also there is motor connection cylinder 362 outside flux coupled device.
In the present embodiment, in order to ensure oil-free in compressor, without lubricating oil in eccentric axle box, and eccentric shaft Swivel bearing in case is used as lubricant medium using gas.
Compression process carries out one stage of compression using two-stage level compression, two low-pressure cylinders to gas, and high-pressure cylinder is further Two-stage compression is carried out to gas;Its operation principle is as shown in Figure 5:The entrance of low-pressure cylinder is connected with eccentric axle box, and outlet passes through Pipeline is connected with the entrance of high-pressure cylinder.Compressed in into the eccentric axle box of gas of low-pressure cylinder, then by low-pressure cylinder Outlet entered by outer pipeline in high-pressure cylinder, so complete one stage of compression.The inner chamber of high-pressure cylinder is divided into diameter not Two sections of same parts are constituted, and the diameter close to one section of inner chamber of piston is more than the diameter of another section of inner chamber, after one stage of compression Gas be introduced into high-pressure cylinder, be passed through after carry out two-stage compression in external equipment.
Sealed between the two sections of high-pressure cylinder by rounded washers, high pressure cylinder cap 345 and high-pressure cylinder 305 it Between have high pressure valve block 342 and elastic washer, entered between high pressure cylinder cap 345 and high-pressure cylinder 305 by high pressure cylinder bolt 313 Row is fixedly connected.
Low-pressure cylinder 304 is not segmented, and is overall one section.There is low pressure valve block between low pressure cylinder cap 357 and low-pressure cylinder 304 354 and elastic washer, it is fixedly connected between low pressure cylinder cap 357 and low-pressure cylinder 304 by low pressure cylinder bolt 314.It is low Air cylinder 304 and the outer wall of high-pressure cylinder 305 also have fin.
In eccentric axle box 301, the two ends of eccentric shaft 308 are provided with two inertia balance wheels 307, inertia eccentric wheel 307 Lateral surface there is circular cavity, the circular cavity of left end inertia eccentric wheel 307 is embedded to be cased with support shaft 310, right-hand member inertia eccentric wheel 307 circular cavity is embedded to be cased with power transmission shaft 309;Low-pressure cylinder 304 and high-pressure cylinder 305 are located at two inertia balance wheels 307 The center of circle of inertia balance wheel is deviateed in centre, the position of eccentric shaft 308, and the side away from eccentric shaft 8 on inertia balance wheel 307 is also Being provided with balancing patch 318, two inertia balance wheels 307 respectively has one, and fixes company by dormant bolt and inertia balance wheel 307 Connect.There is spacer ring between eccentric shaft 308 and inertia balance wheel 307, left and right each one, respectively the first spacer ring 306 and second every Ring 312, wherein the first spacer ring 306 is close to support shaft 310, the second spacer ring 312 is close to power transmission shaft 9.
Between the both ends of the surface and inertia balance wheel 307 of eccentric shaft 308, the end face of support shaft 310 and inertia balance wheel 307 it Between, between the end face of power transmission shaft 309 and inertia balance wheel 307, be fixed by straight pin 328;The end face of separation sleeve 360 It is fixedly connected between counter flange 302 also by straight pin 328.The end face center position of support shaft 310 also has tight Fixing bolt 315 and check washer, support shaft 310 and eccentric shaft 308 are linked together.In the circular cavity of inertia balance wheel 307 It is fixedly connected by bottom also by fastening bolt with check washer with eccentric shaft.
Between eccentric axle box 301 and eccentric shaft cover plate 303, between eccentric axle box 301 and counter flange 302, it is provided with Flange seal packing ring 334 is sealed.In high and low pressure cylinder and the eccentric junction of axle box 301, pass through cylinder seal packing ring 340 Sealed.
Seal shaft is installed between eccentric shaft cover plate 303 and support shaft 310, between sealing flange 302 and power transmission shaft 309 Hold 321;Between each piston rod 316 and eccentric shaft 308, it is attached by sealed bearings 321.The sealed bearings 321 can be Deep groove ball bearing.
Gateway joint 350 is fitted with high and low pressure cylinder, each cylinder there are two, and left and right each one, three cylinders are total to There are 6.Also there is ventilating joint 338 and temperature sensor joint 352 on high-pressure cylinder.
Oil-free gas compressor in technical solution of the present invention, using associated mode magnetic coupling transmission, cylinder, eccentric axle box Without any lubricating oil, by separation sleeve effectively by eccentric axle box, all cylinders of high low pressure and ambient atmosphere completely every From being truly realized hermetically sealed, the problem of being leaked in the absence of eccentric axle box power transmission shaft dynamic sealing.In the sealing of nonmetal isolating sleeve Under effect, even in condition of negative pressure, ambient atmos into compressor, can not effectively protect the pure of the gas of needs compression Degree.
Oil-free gas compressor in technical solution of the present invention, cylinder using Y-shaped structure, between three cylinders with 120 ° of angles stagger, and do not arrange at grade so that three row pistons make a concerted effort on same eccentric shaft, equilibrant force has reached Full balance, therefore operate steadily, muting function is good;And the desirable higher rotating speed of compressor, make using associated mode magnetic coupling into For may so that compressor efficiency is greatly improved.
Oil-free gas compressor in technical solution of the present invention, using eccentric shaft structure, without having as eccentric shaft Turn the transmission between number, therefore trunnion, eccentric shaft and connecting rod and use deep-groove ball sealed bearings, assembling is easy, efficiency high.And And, staggered between three pistons with 120 ° of angles, greatly improve and move back and forth the tremolo that machinery operation flex point is produced.
To liquid SF6 heating and gasifyings when being used to inflate using external heating type evaporator in technical solution of the present invention so that heating Device heating is more uniformly distributed, and is reduced localized hyperthermia's situation, will not be caused rapid spatial expansion and cause heater pressure to raise rapidly, Whole process heating is gentle stable, safe and reliable.Simultaneously because of outer encompassing heating, maintenance and repair is very convenient, it is not necessary to remove Pipeline and related seals, it is economic and practical.
The preferred embodiments of the present invention have shown and described in described above, as previously described, it should be understood that not office of the invention Be limited to form disclosed herein, be not to be taken as the exclusion to other embodiment, and available for various other combinations, modification and Environment, and can be changed in invention contemplated scope described herein by the technology or knowledge of above-mentioned teaching or association area It is dynamic., then all should be appended by the present invention and the change and change that those skilled in the art are carried out do not depart from the spirit and scope of the present invention In scope of the claims.

Claims (10)

1. a kind of sulfur hexafluoride automatic recovery processing device, it is characterised in that:Including the caisson in support meanss, Filtration system, compressibility, pipe-line system, electric control system;The filtration system includes particulate filter, ingress filter Device;The compressibility includes compressor, recovery pump;The pipe-line system includes connecting on pipeline and pipeline between each device Control valve;The electric control system includes sensor, electric controling element, meter displaying device;The compression set is adopted With oil-free lubrication, in the absence of lubricating oil.
2. sulfur hexafluoride automatic recovery processing device according to claim 1, it is characterised in that:Also it is including vacuumizing System, the pumped vacuum systems includes vavuum pump, control valve, vacuum pressure sensor, the vacuum breaker ball being sequentially connected by pipeline Valve;The piston type vacuum coaxial valve of vacuum power source has been used before the vavuum pump, has automatically prevented vavuum pump is oily when shutting down from returning Stream enters pipe-line system.
3. sulfur hexafluoride automatic recovery processing device according to claim 2, it is characterised in that:Also include inflation system, The inflation system includes external heating type evaporator, pressure reducer, check valve, moisture content particulate filter, control valve, pressure sensor; The external heating type evaporator is used for when inflating to liquid SF6 heating and gasifyings.
4. sulfur hexafluoride automatic recovery processing device according to claim 3, it is characterised in that:Whole operation process is used PLC program Automated condtrol:Input reclaims end pressure value and realizes recovery autostop on control terminal;Set on control terminal Determine the blowing pressure and carry out automatic constant pressure inflation;Vacuum values are set on control terminal and realize that vacuumizing autostop and setting is delayed Time makes vacuum more thorough.
5. the sulfur hexafluoride automatic recovery processing device according to claim any one of 1-3, it is characterised in that:Reclaim hexafluoro Changing sulphur gas recovery process is:
1) by sulfur hexafluoride waste gas to be recycled by particulate filter, specific pollutants are removed;
2) in two kinds of situation:When waste gas is less than atmospheric pressure value, is delivered gas to by recovery pump in compressor, work as waste gas When pressure is more than atmospheric pressure value, waste gas is first passed through to be entered in compressor after pressure reducer;
3) gas after compressing is by moisture particulate filter arrangement, subsequently into caisson.
6. a kind of sulfur hexafluoride automatic recovery processing device, including pumped vacuum systems, it is characterised in that:The pumped vacuum systems exists Vavuum pump front end pipeline is provided with the coaxial valve with vacuum as power source, for protecting vavuum pump not encroached on by normal pressure.
7. sulfur hexafluoride automatic recovery processing device according to claim 6, it is characterised in that:Described is using vacuum The piston type vacuum coaxial valve in strength source, including coaxial valve portion and electromagnetism valve portion, the coaxial valve portion are using vacuum Power source, including piston valve core, cylinder barrel, briquetting, sealing block, sealing ring, seal valve seat, the electromagnetism valve portion include electromagnetism Control device.
8. a kind of sulfur hexafluoride automatic recovery processing device, including caisson, filtration system, compressibility, pipe-line system, electricity Gas control system;It is characterized in that:Include oil-free lubrication, the magnetic coupling of nonmetal isolating sleeve seal isolation in the compressibility Close powerdriven compressor.
9. sulfur hexafluoride automatic recovery processing device according to claim 8, it is characterised in that:The compressor, including Eccentric axle box, high-pressure cylinder, low-pressure cylinder, piston, power transmission shaft, eccentric shaft, bearing axle, magnetic couple device;The eccentric shaft There is no lubricating oil in case;The compressor has the cylinder of three arrangements of mutually staggering in 120 ° of angles, and not at grade Arrangement;Between the eccentric axle box and ambient atmosphere by nonmetal isolating sleeve carry out it is hermetically sealed isolate, and it is described it is nonmetallic every The internal magnetic circuit and the external magnetic circuit are kept apart from set, while by gas in eccentric axle box and Inner magnetic parts completely and air Isolation, accomplishes No leakage.
10. sulfur hexafluoride automatic recovery processing device according to claim 9, it is characterised in that:In the eccentric axle box Swivel bearing using being recovered gas as heat eliminating medium;The compression process is using two-stage level compression, two low pressure gas Cylinder carries out one stage of compression to gas, and the high-pressure cylinder further carries out two-stage compression to gas;The low-pressure cylinder enters Mouth is connected with eccentric axle box, and the outlet of the low-pressure cylinder and the entrance of high-pressure cylinder pass through pipeline connection.
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CN113353892A (en) * 2021-05-28 2021-09-07 南通虹登机械设备有限公司 Gas purification system for SF6 gas station and purification method thereof
CN113996126A (en) * 2021-11-29 2022-02-01 国网江苏省电力有限公司检修分公司 SF6Recovery filtering and self-cleaning device and filtering method
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CN115493082A (en) * 2022-09-15 2022-12-20 四川红华实业有限公司 Electronic-grade chlorine trifluoride feeding system and method and material receiving system and method
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