CN107287574B

CN107287574B - Universal substrate frame and application method thereof

Info

Publication number: CN107287574B
Application number: CN201710673483.5A
Authority: CN
Inventors: 戴秀海; 余海春; 马淑莹; 朱争强
Original assignee: Optorun Shanghai Co Ltd
Current assignee: Optorun Shanghai Co Ltd
Priority date: 2017-08-09
Filing date: 2017-08-09
Publication date: 2023-03-28
Anticipated expiration: 2037-08-09
Also published as: CN107287574A

Abstract

The invention relates to the technical field of vacuum coating equipment, in particular to a universal substrate frame and an application method thereof, which are characterized in that: annular grooves are respectively formed in the surfaces of the upper base plate and the lower base plate, and the hook base is connected with the annular grooves through connecting pieces and can slide or be fixed in the annular grooves through the connecting pieces. The invention has the advantages that: the carrier of the film-coated workpiece with different sizes can be compatible, and the compatibility advantage is very great; the base plate disc is very convenient to cut and reform, and time and labor are saved.

Description

Universal substrate frame and application method thereof

Technical Field

The invention relates to the technical field of vacuum coating equipment, in particular to a universal substrate frame and an application method thereof.

Background

In the sputtering coating process, a substrate and other coating workpieces need to be placed on a carrier, and the carrier is fixedly erected on a cylindrical drum-shaped substrate frame through a connecting piece. Along with the rotation of the substrate frame, the sputtering source performs sputtering coating on the coating workpiece carried on the carrier.

At present, due to the diversity of substrates, the sizes of carriers are different, so that the corresponding substrate racks need to be adapted according to the specific sizes of the carriers to complete loading. However, in the course of practical use, there are the following problems: 1) The existing cylindrical drum-shaped substrate frame is fixedly divided, only a carrier with one width can be installed, the size of the adaptive substrate has limitation, when the carrier is frequently replaced, the corresponding substrate frame needs to be replaced, the time consumed by replacement is longer, and the process is more troublesome; 2) The existing substrate plate has too many positioning holes, has different cutting sizes, has no universality and takes time for installation; 3) The existing cylindrical drum-shaped substrate frame is fixedly divided, substrate frame structures such as substrate discs need to be replaced when the division number is changed, and the labor and material consumption is large.

Disclosure of Invention

The present invention provides a universal base plate frame and an application method thereof, wherein the hook base can slide on the upper and lower base plate discs to adjust the position by arranging ring grooves on the upper and lower base plate discs and matching with corresponding connecting pieces, thereby adapting to different carrier widths and enabling the upper and lower base plate discs to have different division numbers.

The purpose of the invention is realized by the following technical scheme:

the utility model provides a general type base plate frame, includes upper and lower base plate dish, carrier and a plurality of couple base at least, wherein upper and lower base plate dish passes through the connecting rod and connects fixed constitution integratively, the carrier is used for bearing the coating film work piece be provided with respectively on the upper and lower base plate dish the couple base, and the couple base that is located on the upper base plate dish and the couple base one-to-one that is located on the lower base plate dish and two corresponding couple bases are in same horizontal plane, the carrier through its both ends with on the upper and lower base plate dish be connected between the couple base and fix hang in the outer fringe of upper and lower base plate dish, its characterized in that: annular grooves are respectively formed in the surfaces of the upper base plate and the lower base plate, and the hook base is connected with the annular grooves through connecting pieces and can slide or be fixed in the annular grooves through the connecting pieces.

The annular groove is an annular dovetail groove.

Go up the base plate dish with be provided with a plurality of leak protection membrane blend stops between the lower base plate dish, leak protection membrane blend stop arranges adjacently between the carrier, the fixed rod of leak protection membrane blend stop passes through the connecting piece with the annular is connected and the accessible the connecting piece is in slide or fixed in the annular.

The connecting piece is the bolt, the head of bolt is the rhombus and arranges in the annular, the screw rod of bolt passes to be seted up the spread groove on the couple base is fastened through the nut.

The hook base is provided with at least two hooks for connecting and fixing the carrier, and the distance between the hooks is matched with the distance between the hook holes on the carrier in a matching way.

An application method related to the universal substrate holder is characterized in that: the hook base slides in the annular groove through the connecting piece, so that the positions of the hook base on the upper base plate and the lower base plate are adjusted; enabling one hook base on the upper substrate disc and one hook base on the lower substrate disc to correspond to each other and be located in the same horizontal plane to form a hook base group; and sequentially adjusting the positions of the hook bases on the upper and lower substrates to form a plurality of hook base groups, wherein the distance between every two adjacent hook base groups meets the requirement of hanging the carrier.

The fixing rod of the leakage-proof film barrier strip is arranged between the adjacent hook base groups and used for fixedly installing the leakage-proof film barrier strip.

The invention has the advantages that: the carrier of the film-coated workpiece with different sizes can be compatible, and the compatibility advantage is very high; the base plate disc is very convenient to cut and reform, and time and labor are saved.

Drawings

FIG. 1 is a schematic view of the structure of the present invention;

FIG. 2 is a side view of FIG. 1;

FIG. 3 is a top view of FIG. 1;

FIG. 4 is a detailed view of the present invention.

Detailed Description

The features of the present invention and other related features are described in further detail below by way of example in conjunction with the following drawings to facilitate understanding by those skilled in the art:

as shown in fig. 1-4, reference numerals 1-14 in the drawings denote: lower base plate dish 1, couple base 2, carrier 3, couple 4, connecting piece 5, couple base 6, upper substrate dish 7, fixed rod 8, leak protection membrane blend stop 9, connecting rod 10, centre bore 11, dovetail 12, couple 13, spread groove 14.

The embodiment is as follows: as shown in fig. 1, the universal substrate holder main body in this embodiment is composed of a lower substrate tray 1, an upper substrate tray 7 and a connecting rod 10 disposed between the upper and

lower substrate trays

7, 1, wherein two ends of the connecting rod 10 are fixedly connected to the upper and

lower substrate trays

7, 1, respectively, so that the upper and

lower substrate trays

7, 1 can be connected into a whole through the connecting rod 10. As shown in fig. 3, a center hole 11 is opened at the center of the upper substrate plate 7, and the upper substrate plate 7 can be driven to rotate by providing a rotating mechanism at the position of the center hole 11; the lower base plate 1 is also provided with a central hole coaxial with the central hole 11.

Referring to fig. 1, 2 and 3, a hook base 2 is provided on a lower substrate plate 1, a hook base 6 is provided on an upper substrate plate 7, and the hook base 2 and the hook base 6 are connected to the corresponding substrate plates by connectors 5, respectively. The hook base 2 and the hook base 6 are both provided with a hook 13, the hook 13 is used for hanging and installing the carrier 3, and the carrier 3 is used for bearing a substrate or a substrate serving as a film-coating workpiece. Because the carrier 3 is generally flat, the hook base 2 on the lower substrate tray 1 and the hook base 6 on the upper substrate tray 7 correspond to each other and are in the same horizontal plane; through a set of

hook bases

2 and 6, the carrier 3 can be hung and fixed on the outer edges of the upper and lower substrate discs 7 and rotate along with the substrate discs during film coating.

As shown in fig. 4, which is a detailed structural diagram of the upper substrate disk 7, an annular dovetail groove 12 is formed on the surface of the upper substrate disk 7. The hook base 6 is L-shaped, the horizontal plane of the hook base is connected with the dovetail groove 12 through the connecting piece 5, and two hooks 13 are arranged on the vertical plane of the hook base. The connecting piece 5 comprises a bolt with a diamond-shaped head, the diamond-shaped head of the bolt is clamped in the dovetail groove 12 and can slide along the dovetail groove 12, and the screw rod of the bolt penetrates through a connecting groove 14 arranged on the horizontal plane of the hook base 6 to extend out and can be fastened and fixed through a matched nut. Therefore, the hook bases 6 can slide in the dovetail grooves 12 through the connecting pieces 5 to adjust the positions of the hook bases on the upper substrate disc 7, so that the distance between the adjacent hook bases 6 is changed to be compatible with carriers 3 with different sizes, and the improvement of the substrate frame division number is realized. Similarly, the hook base 2 provided on the lower substrate disk 1 is also arranged like the hook base 6, that is, connected in the annular dovetail groove 12 formed on the lower substrate disk 1 by the same connecting piece 5, so that the hook base 2 can be adjusted in position on the lower substrate disk 1 by the connecting piece 5.

As shown in fig. 2, 3 and 4, a leakage-proof film barrier strip 9 is arranged between adjacent carriers 3, the leakage-proof film barrier strip 9 is used for preventing the film material from entering the non-film-coating area, and the film coating quality of the film coating workpiece on the adjacent carriers 3 is reduced due to the interference of the film material. The leak-proof membrane barrier strips 9 are arranged at the outer edges of the upper and

lower substrate discs

7 and 1 through fixing rods 8. The two ends of the fixing rod 8 are respectively clamped in the dovetail grooves 12 of the upper and

lower substrates

7, 1 through the connecting pieces 5, so that the position of the fixing rod 8 on the upper and lower substrates 7 can be adjusted to adapt to the size of the carrier 3.

In a specific application, the embodiment includes:

according to the size requirements of different carriers 3, the

hook bases

6 and 2 on the upper substrate disc 7 and the lower substrate disc 1 are moved through the connecting piece 5, and the positions of the hook bases on the substrate discs are adjusted, so that the collision of the adjacent carriers 3 is avoided. After moving in place, the hook base 6 and the hook base 2 are ensured to be in the same horizontal plane. The nut is screwed on the connecting piece 5 to fix the positions of the hook base 6 and the hook base 2. After the positions of the hook base 6 and the hook base 2 are fixed, the carrier 3 can be hung and fixed on the hook 13. In this way, the number of divisions of the upper and lower trays 7 is modified so as to be compatible with carriers 3 of different sizes. In order to adapt to carriers 3 with different sizes, the position of the fixing rod 8 is adjusted through the connecting piece 5, so that the leakage-proof film barrier strips 9 are positioned between the adjacent carriers 3, and the leakage-proof film barrier strips 9 are always arranged between the adjacent carriers 3.

In the embodiment, in specific implementation: as shown in fig. 4, the distance between two hooks 13 can be matched with the distance between the hook holes on the carrier 3. In general, the positions of the hook holes on the carriers 3 with different sizes are fixed, so that the distance between the hook base 2 and the hook 13 on the hook 6 can be fixed, and the distance between the hook 13 and the distance between the hook holes on the carriers 3 can be matched.

The connecting member 5 may be a one-piece type of diamond head bolt, or may be a combination of a section of screw and a diamond fixing block, as long as the hook base 6 and the hook base 2 can be slid and fixed in the respective dovetail grooves 12 through the connecting member.

Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, the description is not necessary here.

Claims

1. The utility model provides a general type base plate frame, includes upper and lower base plate dish, carrier and a plurality of couple base at least, wherein upper and lower base plate dish passes through the connecting rod and connects fixed constitution integratively, the carrier is used for bearing the coating film work piece be provided with respectively on the upper and lower base plate dish the couple base, and the couple base that is located on the upper base plate dish and the couple base one-to-one that is located on the lower base plate dish and two corresponding couple bases are in same horizontal plane, the carrier through its both ends with on the upper and lower base plate dish be connected between the couple base and fix hang in the outer fringe of upper and lower base plate dish, its characterized in that:

annular grooves are respectively formed in the surfaces of the upper base plate and the lower base plate, and the hook base is connected with the annular grooves through connecting pieces and can slide or be fixed in the annular grooves through the connecting pieces.

2. A universal substrate holder as claimed in claim 1, wherein: the annular groove is an annular dovetail groove.

3. A universal substrate holder as claimed in claim 1, wherein: go up the base plate dish with be provided with a plurality of leak protection membrane blend stops between the lower base plate dish, leak protection membrane blend stop arranges adjacently between the carrier, the fixed rod of leak protection membrane blend stop passes through the connecting piece with the annular is connected and the accessible the connecting piece is in slide or fixed in the annular.

4. A universal substrate holder according to claim 1 or 3, wherein: the connecting piece is the bolt, the head of bolt is the rhombus and arranges in the annular, the screw rod of bolt passes to be seted up the spread groove on the couple base is fastened through the nut.

5. A universal substrate holder as claimed in claim 1, wherein: the hook base is provided with at least two hooks for connecting and fixing the carrier, and the distance between the hooks is matched with the distance between the hook holes on the carrier in a matching way.

6. A method of use involving the universal substrate holder according to any one of claims 1 to 5, wherein: the hook base slides in the annular groove through the connecting piece, so that the positions of the hook base on the upper base plate and the lower base plate are adjusted; enabling one hook base on the upper substrate disc and one hook base on the lower substrate disc to correspond to each other and be located in the same horizontal plane to form a hook base group; and sequentially adjusting the positions of the hook bases on the upper and lower substrates to form a plurality of hook base groups, wherein the distance between every two adjacent hook base groups meets the requirement of hanging the carrier.

7. The method of claim 6, wherein the substrate holder comprises: the fixing rod of the leakage-proof film barrier strip is arranged between the adjacent hook base groups and used for fixedly installing the leakage-proof film barrier strip.