CN107267382A - A kind of micro-fluidic chip based on dielectrophoresis and its preparation method and application - Google Patents
A kind of micro-fluidic chip based on dielectrophoresis and its preparation method and application Download PDFInfo
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- CN107267382A CN107267382A CN201710620172.2A CN201710620172A CN107267382A CN 107267382 A CN107267382 A CN 107267382A CN 201710620172 A CN201710620172 A CN 201710620172A CN 107267382 A CN107267382 A CN 107267382A
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- 238000004720 dielectrophoresis Methods 0.000 title claims abstract description 31
- 238000002360 preparation method Methods 0.000 title claims abstract description 10
- 239000012530 fluid Substances 0.000 claims abstract description 35
- 239000011521 glass Substances 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims abstract description 5
- 239000007788 liquid Substances 0.000 claims description 31
- 239000006185 dispersion Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 26
- 239000007853 buffer solution Substances 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 12
- 229920002120 photoresistant polymer Polymers 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 6
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims description 6
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims description 6
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims description 6
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 239000003086 colorant Substances 0.000 claims description 5
- 239000000975 dye Substances 0.000 claims description 5
- 238000001215 fluorescent labelling Methods 0.000 claims description 5
- 239000003550 marker Substances 0.000 claims description 5
- 238000001259 photo etching Methods 0.000 claims description 4
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 3
- 238000001039 wet etching Methods 0.000 claims description 3
- 238000010146 3D printing Methods 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical class O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims description 2
- 229910021389 graphene Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 230000003111 delayed effect Effects 0.000 claims 1
- 238000011010 flushing procedure Methods 0.000 claims 1
- 239000003292 glue Substances 0.000 claims 1
- 238000010186 staining Methods 0.000 claims 1
- 210000004027 cell Anatomy 0.000 description 109
- 230000000052 comparative effect Effects 0.000 description 10
- 230000003139 buffering effect Effects 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000007910 cell fusion Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000005538 encapsulation Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000009182 swimming Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001476 gene delivery Methods 0.000 description 1
- 210000004754 hybrid cell Anatomy 0.000 description 1
- 238000009396 hybridization Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000338 in vitro Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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Abstract
The present invention relates to a kind of micro-fluidic chip based on dielectrophoresis and its preparation method and application, the micro-fluidic chip includes the planar shaped chip (16) of bottom and the fluid channel (13) at top, and the planar shaped chip has the four-layer structure being sequentially overlapped；The first Rotating fields (1) of the planar chip include electrode on the glass substrate, and the electrode is interdigital electrode (2)；The second Rotating fields (3) of the planar chip include microcavity array (8)；The third layer structure (4) of the planar chip includes conductive layer (10)；The four-layer structure (5) of the planar chip includes microcavity array (12) and micro- baffle plate (11) in microcavity array；Include microchannel (9) on second Rotating fields (3) and four-layer structure (5).Micro-fluidic chip of the present invention can realize high-throughout unicellular seizure and pairing.
Description
Technical field
The invention belongs to it is unicellular seizure with matching technology field, be related to a kind of micro-fluidic chip based on dielectrophoresis and
Its preparation method and application.
Background technology
Cell fusion, also referred to as cell hydridization, are, by the method such as induction and culture, to make two or more same
Source or heterologous cells form the process of hybrid cell in vitro.Have become at present in modern biotechnology research
An important means.Cell-fusion techniques are educated in science of heredity, immune medical science, Developmental Biology, medicine or gene delivery, hybridization
The research fields such as kind have extensive use.Accurately unicellular capture and pairing are the premises for carrying out cell fusion research, therefore
Need to design and build effective unicellular capture and pairing experiment porch.
Dielectrophoresis (Dielectrophoresis, DEP) be it is a kind of in inhomogeneous field according to the dielectric property of particulate
The technology manipulated to particulate.The conditions such as alive frequency are applied by changing, particulate can be controlled by positive dielectrophoresis force
Act on to high electric field or acted on by negative dielectrophoresis force and moved to existing fringing field, so as to realize the manipulation to particulate.Therefore, it is based on
DEP method can realize effective high-throughout Cell capture and the process of pairing.
The Yasukawa seminars of Hyogo,Japan university report a kind of vertical pairing cell based on dielectrophoresis method
Micro fluidic device, this device mainly using top ITO electrode and bottom patterning microelectrode produce positive dielectric electricity
Swimming power captures two kinds of cells in microcavity array successively, realizes the process of vertical high-flux cell pairing.Northeastern Japan is big
Matsue seminars report to be included in a kind of micro-fluidic chip of the cell pairing based on dielectrophoresis method, this chip
There is the microcavity array of miniature interdigital electrode and Pear-Shaped, the process of cell pairing is ITO electrode and bottom using top
The positive dielectrophoresis force that interdigital electrode is produced captures two kinds of cells successively, and then forms the process of cell pair.
The micro-fluidic chip of the current pairing of the high-flux cell based on DEP methods uses ITO electrode at top, micro-
Electrode produces DEP in the mode of bottom, and the shortcoming of this structure is：(1) dimethyl silicone polymer (PDMS) is micro-fluidic core
It is used for the most frequently used material prepared by fluid channel in piece, it is easy to be packaged with chip, and pass through simple card punch
Prepare the import and export of chip on PDMS, and ITO electrode is at top, the preparation of encapsulation process and import and export is all more bothered；
(2) process that DEP catches cell is to apply AC signal between electrode to produce inhomogeneous field and then cause the orientation of cell to be transported
Dynamic, during pairing, ITO is in common electrode of the top as two kinds of cell captures, when capturing the first cell, due to
The effect of induction field, the position for catching another cell can also be occupied by the first cell, the pairing effect of influence chip
Rate.
Therefore, how facilitating chip encapsulation process, the problem of matching efficiency for improving chip is current in the urgent need to address.
The content of the invention
In view of the above-mentioned problems, it is a primary object of the present invention to develop a kind of micro-fluidic chip based on dielectrophoresis and
Its preparation method and application, the micro-fluidic chip are that " plane " structure not only makes chip package mistake by changing structure " up and down "
Journey simplifies, and can effectively improve the matching efficiency of chip.
For up to this purpose, the present invention uses following technical scheme：
The invention provides a kind of micro-fluidic chip based on dielectrophoresis, it is characterised in that the micro-fluidic chip bag
The planar shaped chip 16 of bottom and the fluid channel 13 at top are included, the planar shaped chip has the four-layer structure being sequentially overlapped；
First Rotating fields 1 of the planar chip include electrode on the glass substrate, and the electrode is interdigital electrode 2；
Second Rotating fields 3 of the planar chip include microcavity array 8, for Cell capture；
The third layer structure 4 of the planar chip includes conductive layer 10, the conductive region for forming interdigital electrode two ends；
The four-layer structure 5 of the planar chip includes microcavity array 12 and micro- baffle plate 11 in microcavity array, institute
State microcavity array 12 to match for cell, micro- baffle plate 11 is used for cells contacting；
Also include microchannel (9) on second Rotating fields (3) and four-layer structure (5), for after cell is matched
Cell in each microcavity array is flushed to the position of micro- baffle plate.
In the present invention, the interdigital electrode produces inhomogeneous field in the case where applying electric signal, and cell is situated between in forward direction
In the presence of electrophoretic force, electrode surface is caught in.
It is transparent conductive material according to the present invention, preferably ITO (indium tin oxide), AZO be (zinc oxide of aluminium doping
Transparent conducting glass) or graphene in any one or at least two combination, preferably ITO.
Preferably, the quantity of the interdigital electrode 2 is 2-10, for example, can be 2,3,4,5,6,7,8,9 or 10, is preferably
2。
In the present invention, the interdigital electrode is more than 2 sets, due to be subsequently two or more fluorecytes catch with
Pairing, the interdigital electrode is corresponding with the species of the fluorecyte, with can realize different fluorecytes from it is different
Interdigital electrode coordinates, so that seizure is implemented separately, is being matched.
Preferably, the width of the interdigital electrode (2) is 10-30 μm, for example can be 10 μm, 11 μm, 12 μm, 13 μm,
14μm、15μm、16μm、17μm、18μm、19μm、20μm、21μm、22μm、23μm、24μm、25μm、26μm、27μm、28μm、29
μm or 30 μm, preferably 15-25 μm, more preferably 20 μm.
Preferably, the spacing in the interdigital electrode (6) between two electrodes is 3-10 μm, for example can be 3 μm, 4 μm,
5 μm, 6 μm, 7 μm, 8 μm, 9 μm or 10 μm, preferably 6 μm.
Preferably, the spacing of the interdigital electrode (6) and interdigital electrode (7) is 5-50 μm, for example can be 5 μm, 6 μm, 7
μm、8μm、9μm、10μm、11μm、12μm、13μm、14μm、15μm、16μm、18μm、20μm、22μm、23μm、25μm、28μm、
30 μm, 32 μm, 33 μm, 35 μm, 38 μm, 40 μm, 42 μm, 45 μm, 48 μm or 50 μm, preferably 10 μm.
In the present invention, the length of the interdigital electrode can be adjusted according to the size of the planar shaped chip done.
In the present invention, sufficiently strong electric field can be produced using the interdigital electrode of above-mentioned size and then enough suctions are formed
Draw the dielectrophoresis force of individual cells, its depth and spacing are all associated, could only be realized within the scope of application
Single celled seizure and pairing.
According to the present invention, the material of second Rotating fields 3 is negtive photoresist, preferably SU-8 negtive photoresists.
Preferably, the diameter of the microcavity array 8 can be designed according to the size of individual cells, and the thickness of microcavity is with being situated between
Electrophoretic force size is related, and deeper dielectrophoretic force is smaller, and more shallow dielectrophoretic force is bigger, the diameter of heretofore described microcavity array 8
For 10-30 μm, for example can be 10 μm, 11 μm, 12 μm, 13 μm, 14 μm, 15 μm, 16 μm, 17 μm, 18 μm, 19 μm, 20 μm, 21
μm, 22 μm, 23 μm, 24 μm, 25 μm, 26 μm, 27 μm, 28 μm, 29 μm or 30 μm, preferably 15-25 μm, more preferably 20
μm。
Preferably, the depth of the microcavity array 8 is 1-20 μm, for example can be 1 μm, 2 μm, 3 μm, 4 μm, 5 μm, 6 μm,
7 μm, 8 μm, 9 μm, 10 μm, 11 μm, 12 μm, 13 μm, 14 μm, 15 μm, 17 μm, 17 μm, 18 μm, 19 μm or 20 μm, preferably 5-
15 μm, more preferably 10 μm.
According to the present invention, the material of the conductive layer 10 is copper, in silver, chromium or ITO any one or at least two
Combination, preferably copper.
Preferably, the thickness that the size of the conductive layer 10 is is 0.5-5 μm, for example, can be 0.5 μm, 0.6 μm, 0.7 μ
M, 0.8 μm, 1 μm, 1.5 μm, 2 μm, 2.5 μm, 3 μm, 3.5 μm, 4 μm, 4.5 μm or 5 μm, preferably 1 μm.
In the present invention, because conductive layer is located at third layer structure, and the second Rotating fields are negtive photoresist material, so in the second layer
Structure setting cavity is used for conductive layer and the first Rotating fields UNICOM, for conduction, the size of the cavity, art technology
Personnel need to only meet conductive layer and the UNICOM of the first Rotating fields is conductive, be not particularly limited herein.
Preferably, second Rotating fields 3 are corresponding with the position of microchannel 9 in four-layer structure 5, and size is identical.
In the present invention, the microchannel 9 in the four-layer structure 5 have passed through micro- baffle plate 11, after liquid punches cell
It can be spilt out from the position of micro- baffle plate.
Preferably, the width of the microchannel 9 is 3-15 μm, for example can be 3 μm, 4 μm, 5 μm, 6 μm, 7 μm, 8 μm,
9 μm, 10 μm, 11 μm, 12 μm, 13 μm, 14 μm or 15 μm, preferably 8 μm.
According to the present invention, the material of the four-layer structure 5 is negtive photoresist, preferably SU-8 negtive photoresists.
Preferably, a diameter of 130-200 μm of the microcavity array 12 for example can be 130 μm, 132 μm, 135 μm,
138μm、140μm、145μm、150μm、155μm、170μm、175μm、170μm、175μm、180μm、185μm、190μm、195μm
Or 200 μm, preferably 150-170 μm, more preferably 170 μm.
Preferably, the depth of the microcavity array 12 is 10-30 μm, for example can be 10 μm, 11 μm, 12 μm, 13 μm, 14
μm、15μm、17μm、17μm、18μm、19μm、20μm、21μm、22μm、23μm、24μm、25μm、26μm、27μm、28μm、29μm
Or 30 μm, preferably 15-25 μm, more preferably 20 μm.
Preferably, if micro- baffle plate 11 be shaped as the cell after pairing can be poured in microcavity array realize hide
It is all feasible to keep off micro- baffle plate of function, and those skilled in the art can be adjusted as needed, the application use semicircle,
In square or rectangular any one or at least two combination.
Preferably, the size of micro- baffle plate 11 is adjusted according to the size of fluid channel, and the size of micro- baffle plate is
The cell that microcavity array is poured from fluid channel can be blocked, those skilled in the art can be adjusted as needed, the application
The width of micro- baffle plate 11 is 30-50 μm, for example can be 30 μm, 31 μm, 32 μm, 33 μm, 35 μm, 36 μm, 38 μm, 40 μm,
41 μm, 43 μm, 45 μm, 48 μm or 50 μm, preferably 40 μm, the length of micro- baffle plate 11 is 50-70 μm, for example, can be 50
μm, 52 μm, 53 μm, 55 μm, 56 μm, 58 μm, 60 μm, 62 μm, 65 μm, preferably 68 μm or 70 μm, 60 μm.
According to the present invention, the material of the fluid channel 13 is transparent silica gel class material, preferably PDMS.
Preferably, the fluid channel 13 includes sample introduction runner 14, goes out sample runner 15 and platform flow channel 17.
Preferably, the sample introduction runner 14 is branch-like step by step with sample runner 15 is gone out.
Preferably, the depth of the sample introduction runner 14 is 100-500 μm, for example can be 100 μm, 102 μm, 103 μm,
105μm、110μm、115μm、120μm、125μm、130μm、132μm、135μm、138μm、140μm、145μm、150μm、160μ
m、170μm、180μm、200μm、220μm、250μm、260μm、280μm、300μm、320μm、350μm、380μm、400μm、420
μm, 450 μm, 480 μm or 500 μm, more preferably preferably 120-200 μm, 125 μm.
Preferably, it is described go out sample runner 15 depth be 100-500 μm, for example can be 100 μm, 102 μm, 103 μm,
105μm、110μm、115μm、120μm、125μm、130μm、132μm、135μm、138μm、140μm、145μm、150μm、160μ
m、170μm、180μm、200μm、220μm、250μm、260μm、280μm、300μm、320μm、350μm、380μm、400μm、420
μm, 450 μm, 480 μm or 500 μm, preferably 120-200 μm, more preferably preferably 120-130 μm, 125 μm.
Preferably, the depth of the platform flow channel 17 is 50-150 μm, for example can be 50 μm, 51 μm, 53 μm, 55 μm,
58μm、60μm、61μm、63μm、65μm、68μm、70μm、75μm、80μm、85μm、90μm、95μm、100μm、105μm、110μ
M, 115 μm, 120 μm, 125 μm, 130 μm, 135 μm, 140 μm, 145 μm or 150 μm, preferably 70-100 μm, further preferably
For 80 μm.
Second aspect, the present invention provides a kind of preparation method of micro-fluidic chip as described in relation to the first aspect, including as follows
Step：
(1) four-layer structure of planar shaped chip is prepared using the method for photoetching process, wet etching and magnetron sputtering；
(2) mould of fluid channel is prepared by the way of 3D printing, PDMS presomas are cast in mould, 50-80 DEG C
Preferably 55 DEG C heat dry 1-5h, preferably 3h, obtain the fluid channel；
(3) the flatness chip and fluid channel are assembled, obtains the micro-fluidic chip.
In the present invention, specific first Rotating fields are prepared by way of photoetching process and wet etching are combined, the
Two-layer structure is prepared using photoetching process, and third layer structure is prepared using magnetron sputtering method, and four-layer structure uses light
It is prepared by lithography.
The third aspect, the micro-fluidic chip that the present invention provides as described in relation to the first aspect is used for unicellular seizure and pairing.
According to the present invention, described but Cell capture and pairing comprise the following steps：
1) the cell dispersion liquid of two kinds of different colours fluorescence labelings is prepared；
2) by the sample introduction runner 14 of the fluid channel 13 on green cells dispersion liquid micro-fluidic chip, sine is being applied
Inhomogeneous field is produced between the interdigital electrode A6 of AC signal so that cell captures one in the presence of positive dielectrophoresis force
In the microcavity array 8 of side, unnecessary cell is washed away with buffer solution, the seizure of green cells array is realized；
3) red fluorescent cell dispersion liquid is added in the sample introduction runner 14 of the fluid channel 13 on micro-fluidic chip, is being applied just
Inhomogeneous field is produced between the interdigital electrode B 7 of string AC signal, and then causes cell in the presence of positive dielectrophoresis force
In the microcavity array 8 for capturing opposite side, unnecessary cell is washed away with buffer solution, catching for red fluorescent cell array is realized
Catch, while two kinds of fluorecyte formation cell pairings；
4) fluid channel 13 is brought into close contact with fixture with planar shaped chip 16, buffer solution, buffering is introduced from sample introduction runner 14
Liquid is flowed into by microchannel 9, and two cells matched in each microcavity array 8 are flushed to micro- baffle plate 11 of microcavity array 12
On, realize the contact of cell.
Preferably, step 1) preparation of the cell dispersion liquid specifically includes：Dyed respectively with two kinds of fluorescent marker dyes
Cell, then will glow and two kinds of cells of green glow are dispersed in low electric conductivity buffer solution, obtain 2 × 105-2×107/ mL is preferred
For 2 × 106The dispersion liquid of/mL cell concentrations.
Preferably, step 2) described in flow velocity of the green cells dispersion liquid in sample introduction runner be 5-20 μ L/min,
For example can be 5 μ L/min, 6 μ L/min, 7 μ L/min, 8 μ L/min, 9 μ L/min, 10 μ L/min, 11 μ L/min, 12 μ L/min,
13 μ L/min, 14 μ L/min, 15 μ L/min, 17 μ L/min, 17 μ L/min, 18 μ L/min, 19 μ L/min or 20 μ L/min, preferably
For 10 μ L/min.
Preferably, step 2) described in seizure time be 1-10min, for example can be 1min, 2min, 3min, 4min,
5min, 6min, 7min, 8min, 9min or 10min, preferably 3-5min.
Preferably, step 3) described in flow velocity of the red fluorescent cell dispersion liquid in sample introduction runner be 5-20 μ L/min,
For example can be 5 μ L/min, 6 μ L/min, 7 μ L/min, 8 μ L/min, 9 μ L/min, 10 μ L/min, 11 μ L/min, 12 μ L/min,
13 μ L/min, 14 μ L/min, 15 μ L/min, 17 μ L/min, 17 μ L/min, 18 μ L/min, 19 μ L/min or 20 μ L/min, preferably
For 10 μ L/min.
Preferably, step 3) described in seizure time be 1-10min, for example can be 1min, 2min, 3min, 4min,
5min, 6min, 7min, 8min, 9min or 10min, preferably 3-5min.
Preferably, step 2) and step 3) described in sinusoidal ac signal be sine pulse alternating current, the alternating current
Voltage peak-to-peak value 5-20Vpp, for example can be 5Vpp, 6Vpp, 7Vpp, 8Vpp, 9Vpp, 10Vpp, 11Vpp, 12Vpp, 13Vpp,
14Vpp, 15Vpp, 16Vpp, 17Vpp, 18Vpp, 19Vpp or 20Vpp, preferably 12Vpp.
Preferably, the frequency 2-10MHz of the alternating current, for example can be 2MHz, 3MHz, 4MHz, 5MHz, 6MHz,
7MHz, 8MHz, 9MHz or 10MHz, preferably 4MHz.
The operation principle of micro-fluidic chip comprises the following steps：
1) the cell dispersion liquid of two kinds of different colours fluorescence labelings is prepared：Dyed respectively carefully with two kinds of fluorescent marker dyes
Born of the same parents, then will glow and two kinds of cells of green glow are dispersed in low electric conductivity buffer solution, obtain 2 × 105-2×107/ mL cells are dense
The dispersion liquid of degree；
2) by the sample introduction runner 14 of the fluid channel 13 on green cells dispersion liquid micro-fluidic chip, flow velocity is 5-20
μ L/min, produce inhomogeneous field so that cell is in positive dielectrophoresis force between the interdigital electrode 6 of sinusoidal ac signal is applied
In the presence of capture in the microcavity array 8 of side, catch 1-10min, washed away unnecessary cell with buffer solution, realize green
The seizure of fluorecyte array；
3) red fluorescent cell dispersion liquid is added in the sample introduction runner 14 of the fluid channel 13 on micro-fluidic chip, and flow velocity is 5-
20 μ L/min, produce inhomogeneous field, and then cause cell in positive dielectric between the interdigital electrode 7 of sinusoidal ac signal is applied
In the microcavity array 8 that opposite side is captured in the presence of electrophoretic force, 1-10min is caught, unnecessary cell is washed away with buffer solution,
The seizure of red fluorescent cell array is realized, while two kinds of fluorecyte formation cell pairings；
Wherein, the voltage peak-to-peak value 5-20Vpp of the alternating current for applying sinusoidal ac signal, the frequency of the alternating current
2-10MHz；
4) fluid channel 13 is brought into close contact with fixture with planar shaped chip 17, buffer solution, buffering is introduced from sample introduction runner 14
Liquid is flowed into by microchannel 9, and two cells matched in each microcavity array 8 are flushed to micro- baffle plate 11 of microcavity array 12
On, realize the contact of cell.
Compared with prior art, the present invention has the advantages that：
(1) plane-shaped structure of micro-fluidic chip of the present invention is easy to encapsulation, and flux is high；
(2) micro-fluidic chip of the invention carries out the unicellular seizure of high flux and pairing, and methods described matching efficiency is high, matches somebody with somebody
To efficiency up to 60%, local matching efficiency is up to 80%.
Brief description of the drawings
Fig. 1 is the structural representation of the micro-fluidic chip midplane shape chip based on dielectrophoresis of the present invention；Wherein, scheme
The middle Rotating fields of 1- first, 2- interdigital electrodes, the Rotating fields of 3- second, 4- third layer structures, 5- four-layer structures；
Fig. 2 is the structural representation of the first Rotating fields in planar shaped chip of the present invention；Wherein, 6- interdigital electrodes A, 7- in figure
Interdigital electrode B；
Fig. 3 is the structural representation of the second Rotating fields in planar shaped chip of the present invention；Wherein, 8- microcavity arrays, 9- in figure
Microchannel；
Fig. 4 is the structural representation of third layer structure in planar shaped chip of the present invention；Wherein, 10- conductive layers in figure；
Fig. 5 is the structural representation of four-layer structure in planar shaped chip of the present invention；Wherein, the micro- baffle plates of 11-, 12- in figure
Microcavity array；
Fig. 6 is the structural representation of the micro-fluidic chip based on dielectrophoresis of the present invention；Wherein, 13- fluid channels in figure,
14- sample introduction runners, 15- goes out sample runner, 16- planar shaped chips, 17- platform flow channels；
Fig. 7 is that cell of the present invention matches result figure.
Embodiment
Further to illustrate the technological means and its effect of the invention taken, below in conjunction with accompanying drawing and by specific real
Mode is applied to further illustrate technical scheme, but the present invention is not limited in scope of embodiments.
Embodiment 1：Micro-fluidic chip based on dielectrophoresis
As shown in fig. 6, being the schematic diagram of the micro-fluidic chip based on dielectrophoresis described in the embodiment of the present invention, the miniflow
Control the specific structure of chip as Figure 1-5, the micro-fluidic chip includes the planar shaped chip 16 of bottom and the miniflow at top
Road 13, the planar shaped chip has the four-layer structure being sequentially overlapped；
First Rotating fields 1 of the planar chip include ITO electrode on the glass substrate, and the ITO electrode is interdigital
Electrode 2, the quantity of the interdigital electrode 2 is 2-10, during the width of the interdigital electrode 2 is 10-30 μm, the interdigital electrode 6
Spacing between two electrodes is 3-10 μm, and the spacing of the interdigital electrode 6 and interdigital electrode 7 is 5-50 μm；
Second Rotating fields 3 of the planar chip are SU-8 negtive photoresists, and shown second Rotating fields 3 include microcavity array 8, are used for
Cell capture, a diameter of 10-30 μm of the microcavity array 8, the depth of the microcavity array 8 is 1-20 μm；
The third layer structure 4 of the planar chip includes copper conductive layer 10, the conduction region for forming interdigital electrode two ends
Domain, the thickness of the copper conductive layer 10 is 0.5-5 μm；
The four-layer structure 5 of the planar chip includes microcavity array 12 and micro- baffle plate 11 in microcavity array, institute
State microcavity array 12 to match for cell, micro- baffle plate 11 is used for cells contacting, a diameter of 130- of the microcavity array 12
200 μm, the depth of the microcavity array 12 is 10-30 μm, and micro- baffle plate 11 is shaped as semicircle, micro- baffle plate 11
Width is 30-50 μm, and the length of micro- baffle plate 11 is 50-70 μm.
Also include microchannel 9 on second Rotating fields 3 and four-layer structure 5, for inciting somebody to action each after cell is matched
Cell in microcavity array is flushed to the position of micro- baffle plate, and the width of the microchannel 9 is 3-15 μm；
The fluid channel 13 includes sample introduction runner 14, goes out sample runner 15 and platform flow channel 17；
The sample introduction runner 14 is branch-like step by step with sample runner 15 is gone out；
The depth of the sample introduction runner 14 be 100-500 μm, it is described go out sample runner 15 depth be 100-500 μm；
The depth of the platform flow channel 17 is 50-150 μm.
The operation principle of micro-fluidic chip comprises the following steps：
1) the cell dispersion liquid of two kinds of different colours fluorescence labelings is prepared：Dyed respectively carefully with two kinds of fluorescent marker dyes
Born of the same parents, then will glow and two kinds of cells of green glow are dispersed in low electric conductivity buffer solution, obtain 2 × 105-2×107/ mL cells are dense
The dispersion liquid of degree；
2) by the sample introduction runner 14 of the fluid channel 13 on green cells dispersion liquid micro-fluidic chip, flow velocity is 5-20
μ L/min, produce inhomogeneous field so that cell is in positive dielectrophoresis force between the interdigital electrode 6 of sinusoidal ac signal is applied
In the presence of capture in the microcavity array 8 of side, catch 1-10min, washed away unnecessary cell with buffer solution, realize green
The seizure of fluorecyte array；
3) red fluorescent cell dispersion liquid is added in the sample introduction runner 14 of the fluid channel 13 on micro-fluidic chip, and flow velocity is 5-
20 μ L/min, produce inhomogeneous field, and then cause cell in positive dielectric between the interdigital electrode 7 of sinusoidal ac signal is applied
In the microcavity array 8 that opposite side is captured in the presence of electrophoretic force, 1-10min is caught, unnecessary cell is washed away with buffer solution,
The seizure of red fluorescent cell array is realized, while two kinds of fluorecyte formation cell pairings；
Wherein, the voltage peak-to-peak value 5-20Vpp of the alternating current for applying sinusoidal ac signal, the frequency of the alternating current
2-10MHz；
4) fluid channel 13 is brought into close contact with fixture with planar shaped chip 17, buffer solution, buffering is introduced from sample introduction runner 14
Liquid is flowed into by microchannel 9, and two cells matched in each microcavity array 8 are flushed to micro- baffle plate 11 of microcavity array 12
On, realize the contact of cell.
Embodiment 2：Micro-fluidic chip based on dielectrophoresis
The micro-fluidic chip includes the planar shaped chip 16 of bottom and the fluid channel 13 at top, the planar shaped chip tool
There is the four-layer structure being sequentially overlapped；
First Rotating fields 1 of the planar chip include ITO electrode on the glass substrate, and the ITO electrode is interdigital
Electrode 2, the quantity of the interdigital electrode 2 is 2, and the width of the interdigital electrode 2 is two electricity in 20 μm, the interdigital electrode 6
Spacing between pole is 6 μm, and the spacing of the interdigital electrode 6 and interdigital electrode 7 is 10 μm；
Second Rotating fields 3 of the planar chip are SU-8 negtive photoresists, and shown second Rotating fields 3 include microcavity array 8, are used for
Cell capture, a diameter of 20 μm of the microcavity array 8, the depth of the microcavity array 8 is 10 μm；
The third layer structure 4 of the planar chip includes copper conductive layer 10, the conduction region for forming interdigital electrode two ends
Domain, the thickness of the copper conductive layer 10 is 1 μm；
The four-layer structure 5 of the planar chip includes microcavity array 12 and micro- baffle plate 11 in microcavity array, institute
State microcavity array 12 to match for cell, micro- baffle plate 11 is used for cells contacting, a diameter of 170 μ of the microcavity array 12
M, the depth of the microcavity array 12 is 20 μm, and micro- baffle plate 11 is shaped as semicircle, the μ of width 40 of micro- baffle plate 11
M, the length of micro- baffle plate 11 is 60 μm；
Also include microchannel 9 between second Rotating fields 3 and third layer structure 4, for will be every after cell is matched
Cell in individual microcavity array is flushed to the position of micro- baffle plate, and the width of the microchannel 9 is 8 μm；
The fluid channel 13 includes sample introduction runner 14, goes out sample runner 15 and platform flow channel 17；
The sample introduction runner 14 is branch-like step by step with sample runner 15 is gone out；
The depth of the sample introduction runner 14 be 125 μm, it is described go out sample runner 15 depth be 125 μm；
The depth of the platform flow channel 17 is 80 μm.
Embodiment 3：The seizure and pairing of cell
Using the micro-fluidic chip based on dielectrophoresis described in embodiment 2, the seizure and pairing of cell, specific step are carried out
It is rapid as follows：
1) the cell dispersion liquid of two kinds of different colours fluorescence labelings is prepared：Dyed respectively carefully with two kinds of fluorescent marker dyes
Born of the same parents, then will glow and two kinds of cells of green glow are dispersed in low electric conductivity buffer solution, obtain 2 × 106Point of/mL cell concentrations
Dispersion liquid；
2) by the sample introduction runner 14 of the fluid channel 13 on green cells dispersion liquid micro-fluidic chip, flow velocity is 10 μ
L/min, produces inhomogeneous field so that cell is in positive dielectrophoresis force between the interdigital electrode 6 of sinusoidal ac signal is applied
In the presence of capture in the microcavity array 8 of side, catch 3-5min, washed away unnecessary cell with buffer solution, realize green
The seizure of fluorecyte array；
3) red fluorescent cell dispersion liquid is added in the sample introduction runner 14 of the fluid channel 13 on micro-fluidic chip, and flow velocity is 10
μ L/min, produce inhomogeneous field, and then cause cell in positive dielectric electricity between the interdigital electrode 7 of sinusoidal ac signal is applied
In the microcavity array 8 that opposite side is captured in the presence of swimming power, 3-5min is caught, unnecessary cell is washed away with buffer solution, it is real
The seizure of existing red fluorescent cell array, while two kinds of fluorecyte formation cell pairings；
Wherein, the voltage peak-to-peak value 12Vpp of the alternating current for applying sinusoidal ac signal, the frequency of the alternating current
4MHz；
4) fluid channel 13 is brought into close contact with fixture with planar shaped chip 17, buffer solution, buffering is introduced from sample introduction runner 14
Liquid is flowed into by microchannel 9, and two cells matched in each microcavity array 8 are flushed to micro- baffle plate 11 of microcavity array 12
On, realize the contact of cell.
The capturing efficiency of cell is detected with fluorescence microscope, green cells is first caught, is excited using blue laser green
Color fluorecyte sends green glow, records green cells image, then catches red fluorescent cell, is excited using green laser red
Color fluorecyte sends feux rouges, records red fluorescent cell image, then is merged together two kinds of fluorecyte pictures with software,
Calculate individual cells matching efficiency.
As a result as shown in fig. 7, being caught by individual cells after pairing, the cell matching efficiency of calculating is 80%.
Embodiment 4
Compared with Example 2, except the width of interdigital electrode 2 is 10 μm, in the interdigital electrode 6 between two electrodes
Spacing is 3 μm, and the spacing of the interdigital electrode 6 and interdigital electrode 7 is 5 μm, and miscellaneous part is same as Example 2.
Embodiment 5
Compared with Example 2, except the width of interdigital electrode 2 is 30 μm, in the interdigital electrode 6 between two electrodes
Spacing is 10 μm, and the spacing of the interdigital electrode 6 and interdigital electrode 7 is 50 μm, and miscellaneous part is same as Example 2.
Comparative example 1
Compared with Example 2, except the spacing between two electrodes in interdigital electrode 6 is 15 μm, miscellaneous part is with implementing
Example 2 is identical.
Comparative example 2
Compared with Example 2, except the spacing of interdigital electrode 6 and interdigital electrode 7 is 55 μm, miscellaneous part and embodiment 2
It is identical.
Comparative example 3
Compared with Example 2, except the spacing of interdigital electrode 6 and interdigital electrode 7 is 1 μm, miscellaneous part and the phase of embodiment 2
Together, interdigital electrode is separated by too near, it is impossible to form enough dielectrophoresis forces.
Comparative example 4
Compared with Example 2, except the depth of microcavity array 8 is 25 μm, miscellaneous part is same as Example 2.
Comparative example 5
Structure is same as Example 2, compared with Example 3, except the electricity of the alternating current of the application sinusoidal ac signal
Voltage crest peak value 2Vpp, miscellaneous part is same as Example 3, and dielectrophoresis force is too small, it is impossible to carry out Cell capture.
The result that embodiment 2, embodiment 4-5 and comparative example 1,2,4 are detected is as shown in table 1 below：
Table 1
| Embodiment 2 | Embodiment 4 | Embodiment 5 | Comparative example 1 | Comparative example 2 | Comparative example 4 | |
| Pairing rate | 80% | 68% | 65% | 48% | 43% | 40% |
As it can be seen from table 1 the pairing rate that the size of interdigital electrode is generated on matching efficiency in influence, embodiment 2 can
Up to 80%, and when interdigital electrode size not within the scope of this application when, it can not produce enough electric fields, it is impossible to formed foot
The dielectrophoresis force of enough attraction individual cells, and each size of interdigital electrode is to be mutually related, only the application's
In the range of interdigital electrode, single celled effective pairing can be realized.
Integrated embodiment and comparative example, micro-fluidic chip of the invention carry out the unicellular seizure of high flux and pairing, described
Method matching efficiency is high, and matching efficiency is up to more than 60%, and local matching efficiency is up to 80%.
Applicant states that the present invention illustrates the method detailed of the present invention, but not office of the invention by above-described embodiment
It is limited to above-mentioned method detailed, that is, does not mean that the present invention has to rely on above-mentioned method detailed and could implemented.Art
Technical staff it will be clearly understood that any improvement in the present invention, equivalence replacement and auxiliary element to each raw material of product of the present invention
Addition, selection of concrete mode etc., within the scope of all falling within protection scope of the present invention and being open.
Claims (10)
1. a kind of micro-fluidic chip based on dielectrophoresis, it is characterised in that the micro-fluidic chip includes the planar shaped of bottom
Chip (16) and the fluid channel (13) at top, the planar shaped chip have the four-layer structure being sequentially overlapped；
The first Rotating fields (1) of the planar chip include electrode on the glass substrate, and the electrode is interdigital electrode (2)；
The second Rotating fields (3) of the planar chip include microcavity array (8), for Cell capture；
The third layer structure (4) of the planar chip includes conductive layer (10), the conductive region for forming interdigital electrode two ends；
The four-layer structure (5) of the planar chip includes microcavity array (12) and micro- baffle plate (11) in microcavity array,
The microcavity array (12) is matched for cell, and micro- baffle plate (11) is used for cells contacting；
Also include microchannel (9) on second Rotating fields (3) and four-layer structure (5), for will be every after cell is matched
Cell in individual microcavity array is flushed to the position of micro- baffle plate.
2. micro-fluidic chip according to claim 1, it is characterised in that the material of the electrode is transparent conductive material,
Preferably in ITO, AZO or graphene any one or at least two combination, preferably ITO；
Preferably, the quantity of the interdigital electrode (2) is 2-10, preferably 2；
Preferably, the width of the interdigital electrode (2) is 10-30 μm, more preferably preferably 15-25 μm, 20 μm；
Preferably, the spacing in the interdigital electrode (6) between two electrodes is 3-10 μm, preferably 6 μm；
Preferably, the spacing of the interdigital electrode (6) and interdigital electrode (7) is 5-50 μm, preferably 10 μm.
3. micro-fluidic chip according to claim 1 or 2, it is characterised in that the material of second Rotating fields (3) is negative
Glue, preferably SU-8 negtive photoresists；
Preferably, a diameter of 10-30 μm of the microcavity array (8), more preferably preferably 15-25 μm, 20 μm；
Preferably, the depth of the microcavity array (8) is 1-20 μm, more preferably preferably 5-15 μm, 10 μm.
4. the micro-fluidic chip according to any one of claim 1-3, it is characterised in that the material of the conductive layer (10)
For any one in copper, silver, chromium or ITO or at least two combination, preferably copper；
Preferably, the thickness of the conductive layer (10) is 0.5-5 μm, preferably 1 μm；
Preferably, second Rotating fields (3) are corresponding with microchannel (9) position in four-layer structure (5), and size is identical；
Preferably, the width of the microchannel (9) is 3-15 μm, preferably 8 μm.
5. the micro-fluidic chip according to any one of claim 1-4, it is characterised in that the four-layer structure (5)
Material is negtive photoresist, preferably SU-8 negtive photoresists；
Preferably, a diameter of 130-200 μm of the microcavity array (12), more preferably preferably 150-170 μm, 170 μ
m；
Preferably, the depth of the microcavity array (12) is 10-30 μm, more preferably preferably 15-25 μm, 20 μm；
Preferably, any one being shaped as in semicircle, square or rectangular or at least two of micro- baffle plate (11)
Combination；
Preferably, the width of micro- baffle plate (11) is 30-50 μm, preferably 40 μm；
Preferably, the length of micro- baffle plate (11) is 50-70 μm, preferably 60 μm.
6. the micro-fluidic chip according to any one of claim 1-5, it is characterised in that the material of the fluid channel (13)
For transparent silica gel class material, preferably PDMS；
Preferably, the fluid channel (13) includes sample introduction runner (14), goes out sample runner (15) and platform flow channel (17)；
Preferably, the sample introduction runner (14) and sample runner (15) is gone out for branch-like step by step；
Preferably, the depth of the sample introduction runner (14) is 100-500 μm, more preferably preferably 120-200 μm, 125 μ
m；
Preferably, it is described go out sample runner (15) depth be 100-500 μm, preferably 120-200 μm, more preferably 125 μ
m；
Preferably, the depth of the platform flow channel (17) is 50-150 μm, more preferably preferably 70-100 μm, 80 μm.
7. the preparation method of a kind of micro-fluidic chip as any one of claim 1-6, it is characterised in that including as follows
Step：
(1) four-layer structure of planar shaped chip is prepared using the method for photoetching process, wet etching and magnetron sputtering；
(2) mould of fluid channel is prepared by the way of 3D printing, PDMS presomas are cast in mould, 50-80 DEG C preferably
1-5h, preferably 3h are dried for 55 DEG C of heat, the fluid channel is obtained；
(3) the flatness chip and fluid channel are assembled, obtains the micro-fluidic chip.
8. the micro-fluidic chip according to any one of claim 1-6 is used for unicellular seizure and pairing.
9. application according to claim 8, it is characterised in that comprise the following steps：
1) the cell dispersion liquid of two kinds of different colours fluorescence labelings is prepared；
2) by the sample introduction runner (14) of the fluid channel (13) on green cells dispersion liquid micro-fluidic chip, sine is being applied
Inhomogeneous field is produced between the interdigital electrode A (6) of AC signal so that cell is captured in the presence of positive dielectrophoresis force
In the microcavity array (8) of side, unnecessary cell is washed away with buffer solution, the seizure of green cells array is realized；
3) red fluorescent cell dispersion liquid is added in the sample introduction runner (14) of the fluid channel (13) on micro-fluidic chip, is being applied just
Inhomogeneous field is produced between the interdigital electrode B (7) of string AC signal, and then causes cell in the presence of positive dielectrophoresis force
In the microcavity array (8) for capturing opposite side, unnecessary cell is washed away with buffer solution, catching for red fluorescent cell array is realized
Catch, while two kinds of fluorecyte formation cell pairings；
4) fluid channel (13) is brought into close contact with fixture with planar shaped chip (16), buffer solution is introduced from sample introduction runner (14), delayed
Fliud flushing is flowed into by microchannel (9), and two cells of pairing in each microcavity array (8) are flushed into the micro- of microcavity array (12)
On baffle plate (11), the contact of cell is realized.
10. application according to claim 9, it is characterised in that step 1) preparation of the cell dispersion liquid specifically includes：
Distinguish staining cells with two kinds of fluorescent marker dyes, then will glow and two kinds of cells of green glow are dispersed in low electric conductivity buffer solution
In, obtain 2 × 105-2×107/ mL is preferably 2 × 106The dispersion liquid of/mL cell concentrations；
Preferably, step 2) described in flow velocity of the green cells dispersion liquid in sample introduction runner be 5-20 μ L/min, preferably
For 10 μ L/min；
Preferably, step 2) described in seizure time be 1-10min, preferably 3-5min；
Preferably, step 3) described in flow velocity of the red fluorescent cell dispersion liquid in sample introduction runner be 5-20 μ L/min, preferably
For 10 μ L/min；
Preferably, step 3) described in seizure time be 1-10min, preferably 3-5min；
Step 2) and step 3) described in sinusoidal ac signal be sine pulse alternating current, the voltage peak-to-peak value 5- of the alternating current
20Vpp, preferably 12Vpp；
Preferably, the frequency 2-10MHz of the alternating current, preferably 4MHz.
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