CN107262906A - A kind of Miniature lathe - Google Patents
A kind of Miniature lathe Download PDFInfo
- Publication number
- CN107262906A CN107262906A CN201710438988.3A CN201710438988A CN107262906A CN 107262906 A CN107262906 A CN 107262906A CN 201710438988 A CN201710438988 A CN 201710438988A CN 107262906 A CN107262906 A CN 107262906A
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- China
- Prior art keywords
- fib
- workpiece
- sem
- main shaft
- miniature
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/0026—Auxiliary equipment
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Turning (AREA)
Abstract
The present invention discloses a kind of Miniature lathe, workpiece is processed using FIB/SEM double-beam systems for being integrated in the vacuum chamber of FIB/SEM double-beam systems, there is x including only there is the pedestal of t axle rotary freedoms and be fixedly mounted on the pedestal, y, the multi-shaft precise mobile station of the axle frees degree of z tri-, division board is installed in the multi-shaft precise mobile station, bearing block is installed on the division board, the sliding bearing with automatic centering function is provided with the bearing block is used for supports main shaft, one end of the main shaft has the ER collet structures for being used for clamping cylindrical work, the main shaft passes through belt transmission using stepper motor；The FIB/SEM double-beam systems include the FIB pole shoes and the SEM pole shoes for online observation workpiece in situ to workpiece turnery processing.The present invention is simple in construction, reliable and stable, and the on-line monitoring of miniature axial workpiece process can be achieved.
Description
Technical field
The present invention relates to Miniature lathe technical field, and in particular to a kind of use focused ion beam is miniature to work processing
Lathe.
Background technology
With the development of new and high technology, the field such as semiconductor, Aero-Space and national defence is to characteristic size in micron order to milli
The miniature axial workpiece of meter level has increasingly extensive demand.
At present, miniature axial workpiece be typically on super precision lathe under conventional conditions turning form.Due to processing chi
Degree is in micro-nano magnitude, and traditional turnery processing has, clamping process difficult to knife, and contact processing is held
Workpiece stress deformation is easily caused, machining accuracy is influenceed.In addition, the workpiece of traditional turning when characterizing its crudy offline
Uncertain factor may be additionally introduced, including air oxidation, dust pollution etc., to the Ultra-precision Turning of miniature axial workpiece still
Have some limitations.
Focused ion beam is with its nanoscale accuracy of manufacture, direct write processing, the advantage such as flexibility is good, in recent years in micro-nano system
The field of making is widely applied.Therefore, a kind of lathe of utilization focused ion beam to work processing is developed, to realize to miniature
The ultra-precision non-contact type processing of axial workpiece, has great importance.
The content of the invention
In view of the technical drawbacks of the prior art, it is an object of the present invention to provide one kind uses focused ion beam pair
The Miniature lathe that workpiece is processed.
To realize that the technical scheme that the purpose of the present invention is used is：
A kind of Miniature lathe, FIB/SEM double-beam systems pair are utilized for being integrated in the vacuum chamber of FIB/SEM double-beam systems
Workpiece is processed, including only with t axle rotary freedoms pedestal and be fixedly mounted on the pedestal have x, y, z
It is provided with division board, the division board and installs in the multi-shaft precise mobile station of the three axle frees degree, the multi-shaft precise mobile station
Have and the sliding bearing with automatic centering function is installed for supports main shaft in bearing block, the bearing block, the main shaft
One end has the ER collets for being used for clamping cylindrical work, and the main shaft passes through belt transmission using stepper motor；It is described
FIB/SEM double-beam systems include the FIB pole shoes and the SEM pole shoes for online observation workpiece in situ to workpiece turnery processing.
The stepper motor is arranged on the division board by electric machine support, the main shaft by cog belt and belt wheel with
The motor shaft connection of the stepper motor.
The sliding bearing is two groups, is separately mounted to the two side ends of the bearing block, sliding bearing described in every group includes
Convex hemispherical axle journal and recessed hemispherical bearing shell.
The motor side of the bearing block is provided with back-up ring, and the cylindrical of the back-up ring is secured by bolts in the bearing block
On, the inner circle of the back-up ring to carrying out axially position installed in the recessed hemispherical bearing shell of motor side, other side it is recessed hemispherical
Bearing shell is secured by bolts on bearing block.
The rotation angle range of the pedestal is -10 °~52 °.
The focused ion beam line of the FIB pole shoes formation is 1pA~20nA, and accelerating potential is 1keV~30keV.
X, y directional run of the multi-shaft precise mobile station are ± 20mm, and z directional runs are 10mm, and mobile accuracy is 1
μm。
The ER collets are equipped with the tapered cup nut for making the ER collets clamp workpiece.
The sliding bearing is made using brass, and the main shaft makes to be formed using stainless steel material.
The electric machine controller of the stepper motor is placed in the atmosphere outside of FIB/SEM double-beam systems, passes through flange
Disk is connected the motion control realized to the stepper motor with the stepper motor.
The present invention is simple in construction, reliable and stable, and the on-line monitoring of miniature axial workpiece process can be achieved.It can be applied to
The focused ion beam FIB processing of the miniature axial workpiece of typical case, and convenient mounting and clamping, easily to knife, and processing effect can be significantly improved
Rate and machining accuracy.
Brief description of the drawings
Fig. 1 is the structural representation of Miniature lathe of the present invention；
Fig. 2 is the exploded view of Miniature lathe spindle drive part；
Fig. 3 is miniature axial workpiece process schematic diagram；
Fig. 4 is FIB machining areas schematic diagram on workpiece；
In figure：1 pedestal；2 multi-shaft precise mobile stations；3 division boards；4 workpiece；5FIB pole shoes；6SEM pole shoes；7 stepper motors；
8 electric machine supports；9 cog belts and belt wheel；10 back-up rings；11 bearing blocks；12 bearing shells；13 axle journals；14 main shafts；15 clamp nuts；16 cones
Shape nut；17ER collets；50 Focused Ion Beams；41FIB machining areas.
Embodiment
The present invention is described in further detail below in conjunction with the drawings and specific embodiments.It should be appreciated that described herein
Specific embodiment only to explain the present invention, be not intended to limit the present invention.
As Figure 1-4, a kind of Miniature lathe, FIB/ is utilized for being integrated in the vacuum chamber of FIB/SEM double-beam systems
SEM double-beam systems are processed to workpiece, including only have the pedestal 1 of t axle rotary freedoms, and are fixedly mounted on the base
Division board 3 is installed in the multi-shaft precise mobile station 2 with the axle free degree of x, y, z three on seat, the multi-shaft precise mobile station,
It is provided with the division board and the sliding bearing with automatic centering function is installed in bearing block 11, the bearing block 11 is used for
Supports main shaft 14, one end of the main shaft has the ER collets 17 for being used for clamping cylindrical work 4, and the main shaft utilizes step
Stepper motor 7 includes FIB (the Focused ion to workpiece turnery processing by belt transmission, the FIB/SEM double-beam systems
Beam) pole shoe 5 and the SEM pole shoes 6 for online observation workpiece in situ.
During processing, under the real-time monitored of SEM pole shoes 6, workpiece 4 is moved to work area to be added by multi-shaft precise mobile station 2 rapidly
Domain, and pedestal is made into the perpendicular relation of axis of FIB pole shoes 5 and workpiece 4 for 52 ° along the rotation of t axles, to be substituted using FIB pole shoes 5
Lathe tool is realized to be removed to the material of the micro-nano magnitude of workpiece 4.
Specifically, the stepper motor 7 is arranged on the division board 3 by the electric machine support 8 of " L " type, the main shaft
It is connected by cog belt and belt wheel 9 with the motor shaft of the stepper motor 7.Wherein, division board 3 is fixed on multi-shaft precise mobile station
On 2, " L " type electric machine support 8 and bearing block 11 are fixed on division board by screw, and the effect of division board is to avoid electric machine support
8 and bearing block 11 be directly connected and cause the damage of multi-shaft precise mobile station with multi-shaft precise mobile station 2.
Wherein, hole is opened up on the electric machine support 8, motor shaft is stretched out motor branch when being easy to fix stepper motor 7
Frame, the motor shaft is connected by jackscrew with cog belt and belt wheel 9, and rotary motion and torque are passed into main shaft by V belt translation
14。
Specifically, the sliding bearing is two groups, using hemispheric sliding bearing, the two of the bearing block are separately mounted to
Side, is processed using super precision lathe, with automatic centering function, can improve spindle rotation accuracy.Wherein, described in every group
Sliding bearing includes convex hemispherical axle journal 13 and recessed hemispherical bearing shell 12.The convex semispherical structure of convex hemispherical axle journal 13 with
The recessed hemisphere of recessed hemispherical bearing shell 12 is engaged, and realization coordinates convex hemispherical axle journal 13 installed in described recessed hemispherical
In bearing shell 12, the recessed hemispherical bearing shell 12 is arranged on bearing block 11, and main shaft 14 is connected with the sliding bearing of both sides.
Wherein, the motor side of the bearing block is provided with the back-up ring 10 for compressing bearing shell, and the cylindrical of the back-up ring passes through
Bolt is fixed on the bearing block 11, and the inner circle of the back-up ring is carried out axially to the recessed hemispherical bearing shell installed in motor side
Positioning, the recessed hemispherical bearing shell 13 of other side is secured by bolts on bearing block 11.In assembling, first, by side
Bearing shell 12 be secured by bolts on bearing block 11, the back-up ring 10 that other side bearing shell 12 is bolted is fixed.
Then, a pair of axle journals 13 then by clamp nut 15 are fixed on master by main shaft 14 through the bearing shell 12 at bearing block 11 and two ends
On axle 13, positioned by the shaft shoulder of the both sides of main shaft 14.
In the present invention, the pedestal provides support for a whole set of Miniature lathe, can be controlled by configuring well known t axles rotation
Mechanism makes pedestal have t axle rotary freedoms, it is preferred that the t axles rotation angle range of the pedestal is -10 °~52 °.
It is preferred that, the focused ion beam line of FIB pole shoes formation is 1pA~20nA, accelerating potential be 1keV~
30keV。
In the present invention, described multi-shaft precise mobile station carries workbench stage for FIB/SEM double-beam systems, is fixed on
On pedestal, it can realize that t axles rotate with pedestal.In addition it is by itself having x, y to the horizontal free degree and z to vertical degree of freedom,
It can realize that level aspect is quick accurate to knife.
It is preferred that, x, y directional run of the multi-shaft precise mobile station are ± 20mm, and z directional runs are 10mm, mobile essence
Degree is 1 μm.
Wherein, the ER collets are equipped with the tapered cup nut 16 for making the ER collets clamp workpiece, with the ER
Collet is assemblied on main shaft 14.When to work pieces process, workpiece to be processed is placed in the ER collets of the one end of main shaft 14
In, then workpiece to be processed is fixed by tapered cup nut 16.
It is preferred that, the sliding bearing is made using H62 brass materials, and convex half is processed into using super precision lathe
Spherical axle journal and recessed hemispherical bearing shell, are so conducive to the automatic centering of sliding bearing, improve spindle rotation accuracy.It is described to slide
The axle journal of bearing and the contact surface of bearing shell are processed into mirror-quality, to reduce coefficient of friction.
It is preferred that, the main shaft uses stainless steel material, and ER collet structures are processed into one end, and utilize tapered cup nut
16 by Workpiece clamping on ER collets；The shaft end of main shaft uses integral structure with ER collets, is conducive to improving car
Bed rigidity, reduces mismatch error.
Specifically, the electric machine controller of the stepper motor is placed in the atmosphere outside of FIB/SEM double-beam systems, lead to
Cross ring flange and the motion control realized to the stepper motor is connected with the stepper motor.
It should be noted that in the present invention, described multi-shaft precise mobile station 2 itself has the axle free degree of x, y, z three, lead to
Workpiece can be moved to the central region of FIB/SEM double-beam systems by crossing x, y-axis, and it is contactless to control workpiece to move to FIB along in z-axis
The optimum height of processing (wherein, the distance of region to be processed and FIB pole shoes 5 is about 5mm).
Before FIB processing, workpiece is rotated 52 ° by t axles, makes FIB and the perpendicular relation of axis of workpiece, will according to processing
Summation FIB in site measurement scales, determine FIB machining areas 41.Fig. 3 is the process schematic diagram of workpiece, first, sets FIB
Accelerating potential is 30keV, and line is 3nA, and workpiece is carried out roughing to improve processing efficiency；Then FIB accelerating potentials are used
For 5keV, line is 0.1nA, and workpiece is finished to improve machining accuracy.
Lathe tool is substituted using FIB to carry out workpiece after " turning " processing, by t axles from 52 ° of rotations to 0 °, recycles SEM former
Position online observation function carries out high-resolution sign to removal amount, the crudy of workpiece, and then completes miniature axial workpiece
Focused ion beam Ultra-precision Turning.
Because the vacuum cavity space of FIB/SEM double-beam systems is limited, in the present invention, the transmission of the stepper motor and main shaft
Mode uses V belt translation, Miniature lathe is laid out in " U " type, compact conformation.
Outside FIB/SEM double-beam system vacuum environments, Miniature lathe rotating accuracy of the invention is entered using amesdial
Row test.Pass through the moderating process of controlled motor rotating speed and belt wheel transmission so that the Miniature lathe speed of mainshaft reaches 0.5r/min.
The spindle rotation accuracy of the Miniature lathe measured is 2 μm, shows that the spindle rotation accuracy of the present invention has reached processing request.
Utilization focused ion beam (FIB) proposed by the present invention substitutes the Miniature lathe of lathe tool, for realizing typical Minisize axial
The FIB processing of class part, compared with traditional lathe, with following significant advantage：
First：The present invention is applied to carry out material removal process under FIB/SEM double-beam system high vacuum environments, can be to adding
Work material realizes SEM high-resolution online observations, is easy to carry out in-situ characterization point to material removal amount and machined surface quality
Analysis, it is to avoid offline to characterize the extra uncertain factors such as introduced air oxidation, dust pollution.
Secondly：Using main shaft and chuck integral structure, be conducive to improving lathe rigidity, reduce mismatch error；Using half
Ball sliding bearing, with automatic centering function, is conducive to improving spindle rotation accuracy, and then improve the machining accuracy of workpiece.
In addition：Core component is carried out to knife process under SEM high-resolution on-line monitoring without ferromagnetism, precision it is high and
Operation is flexible, easy " to knife ", significantly improves the processing efficiency of workpiece；Moreover, by controlling focused ion beam energy and beam
The size of stream, can be achieved the controllable adjustment of material removing rate.
Described above is only the preferred embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications
Also it should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of Miniature lathe, it is characterised in that utilize FIB/SEM for being integrated in the vacuum chamber of FIB/SEM double-beam systems
Double-beam system is processed to workpiece, including is only had the pedestal of t axle rotary freedoms and be fixedly mounted on the pedestal
The multi-shaft precise mobile station with the axle free degree of x, y, z three, division board is installed in the multi-shaft precise mobile station, it is described every
The sliding bearing with automatic centering function is installed for supports main shaft from being provided with plate in bearing block, the bearing block,
One end of the main shaft has the ER collets for being used for clamping cylindrical work, and the main shaft passes through belt using stepper motor
Transmission；The FIB/SEM double-beam systems are included to the FIB pole shoes of workpiece turnery processing with being used for online observation workpiece in situ
SEM pole shoes.
2. Miniature lathe as claimed in claim 1, it is characterised in that the stepper motor by electric machine support be arranged on it is described every
From on plate, the main shaft is connected by cog belt and belt wheel with the motor shaft of the stepper motor.
3. Miniature lathe as claimed in claim 1, it is characterised in that the sliding bearing is two groups, is separately mounted to the axle
The two side ends of bearing, sliding bearing described in every group includes convex hemispherical axle journal and recessed hemispherical bearing shell.
4. Miniature lathe as claimed in claim 3, it is characterised in that the motor side of the bearing block is provided with back-up ring, the gear
The cylindrical of circle is secured by bolts on the bearing block, and the inner circle of the back-up ring is to the recessed hemispherical bearing shell installed in motor side
Axially position is carried out, the recessed hemispherical bearing shell of other side is secured by bolts on bearing block.
5. Miniature lathe as claimed in claim 1, it is characterised in that the rotation angle range of the pedestal is -10 °~52 °.
6. Miniature lathe as claimed in claim 1, it is characterised in that the focused ion beam line of the FIB pole shoes formation is 1pA
~20nA, accelerating potential is 1keV~30keV.
7. Miniature lathe as claimed in claim 1, it is characterised in that x, y directional run of the multi-shaft precise mobile station for ±
20mm, z directional run are 10mm, and mobile accuracy is 1 μm.
8. Miniature lathe as claimed in claim 1, it is characterised in that the ER collets are pressed from both sides equipped with making the ER collets
The tapered cup nut of clamping of workpieces.
9. Miniature lathe as claimed in claim 1, it is characterised in that the sliding bearing is made using brass, the main shaft is adopted
Make to be formed of stainless steel material.
10. Miniature lathe as claimed in claim 1, it is characterised in that the electric machine controller of the stepper motor is placed in FIB/SEM
In the atmosphere outside of double-beam system, the motion realized to the stepper motor is connected with the stepper motor by ring flange
Control.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710438988.3A CN107262906A (en) | 2017-06-12 | 2017-06-12 | A kind of Miniature lathe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710438988.3A CN107262906A (en) | 2017-06-12 | 2017-06-12 | A kind of Miniature lathe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107262906A true CN107262906A (en) | 2017-10-20 |
Family
ID=60066520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710438988.3A Pending CN107262906A (en) | 2017-06-12 | 2017-06-12 | A kind of Miniature lathe |
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| CN (1) | CN107262906A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101543901A (en) * | 2009-02-27 | 2009-09-30 | 天津大学 | Method for preparing micro cutter based on focused ion beam technology |
| CN102568989A (en) * | 2010-12-31 | 2012-07-11 | Fei公司 | Charged particle source with multiple selectable particle emitters |
| CN103878392A (en) * | 2014-03-28 | 2014-06-25 | 天津大学 | Nano cutting device based on SEM in-situ on-line observation |
| CN104103480A (en) * | 2013-04-03 | 2014-10-15 | Fei公司 | Low energy ion milling or deposition |
| CN106392233A (en) * | 2016-12-06 | 2017-02-15 | 兰州大学 | Nano-welding method based on combination of electron microscope in-situ heating device and welding flux |
-
2017
- 2017-06-12 CN CN201710438988.3A patent/CN107262906A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101543901A (en) * | 2009-02-27 | 2009-09-30 | 天津大学 | Method for preparing micro cutter based on focused ion beam technology |
| CN102568989A (en) * | 2010-12-31 | 2012-07-11 | Fei公司 | Charged particle source with multiple selectable particle emitters |
| CN104103480A (en) * | 2013-04-03 | 2014-10-15 | Fei公司 | Low energy ion milling or deposition |
| CN103878392A (en) * | 2014-03-28 | 2014-06-25 | 天津大学 | Nano cutting device based on SEM in-situ on-line observation |
| CN106392233A (en) * | 2016-12-06 | 2017-02-15 | 兰州大学 | Nano-welding method based on combination of electron microscope in-situ heating device and welding flux |
Non-Patent Citations (2)
| Title |
|---|
| 张少婧: "基于聚焦离子束技术的微刀具制造方法及关键技术的研究", 《中国博士学位论文全文数据库 工程科技Ⅰ辑》 * |
| 赵德本: "《机械工程师新技术手册》", 31 December 1991, 河北科学技术出版社 * |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20171020 |
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