CN107262449B - Manipulator cleaning equipment - Google Patents

Manipulator cleaning equipment Download PDF

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Publication number
CN107262449B
CN107262449B CN201710324159.2A CN201710324159A CN107262449B CN 107262449 B CN107262449 B CN 107262449B CN 201710324159 A CN201710324159 A CN 201710324159A CN 107262449 B CN107262449 B CN 107262449B
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CN
China
Prior art keywords
box body
manipulator
cleaning
upper box
bevel gear
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Active
Application number
CN201710324159.2A
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Chinese (zh)
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CN107262449A (en
Inventor
沈琛林
胡国辉
降宇波
窦远
周冠辰
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China Nuclear Power Engineering Co Ltd
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China Nuclear Power Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201710324159.2A priority Critical patent/CN107262449B/en
Publication of CN107262449A publication Critical patent/CN107262449A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00Accessories or details of general applicability for machines or apparatus for cleaning
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02Cleaning by the force of jets or sprays
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B21/00Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manipulator (AREA)

Abstract

The invention relates to a manipulator cleaning device, which comprises an upper box body and a lower box body which are communicated with each other, wherein a transmission mechanism is arranged in the upper box body, the transmission mechanism comprises a bevel gear disc and a bevel gear which are meshed with each other, the bevel gear disc is rotatably arranged at the bottom of the upper box body, and the bevel gear is connected with a driving system arranged outside the upper box body through a transmission shaft; the disc surface of the conical fluted disc is provided with a supporting device for supporting the manipulator; and a cleaning decontamination system for cleaning the manipulator is arranged in the lower box body. According to the cleaning equipment, according to the slender structure characteristics of the mechanical arm, the cleaning equipment is arranged in the upper box and the lower box in the gravity vertical direction according to a mechanical arm cleaning process, the upper box mainly completes the dismantling of a mechanical arm protective sleeve and the tightening of the mechanical arm, and the lower box mainly completes the cleaning of a contaminated arm and a clamp at the lower end of the severely contaminated arm, so that the relative isolation of functions is achieved, and the effective cleaning of the mechanical arm is realized; compact structure, convenient operation and maintenance and personnel safety guarantee.

Description

Manipulator cleaning equipment
Technical Field
The invention belongs to the technical field of nuclear fuel post-treatment, and particularly relates to a manipulator cleaning device which can be used for cleaning and decontaminating the manipulator.
Background
In the nuclear field, laboratories and factories engaged in nuclear science research and production do not operate radioactive materials without a manipulator for nuclear use, and can operate by separating operators from a dangerous environment through appropriate biological shielding. The radioactive substance separating device aims to separate an operator from an operated object and operate the radioactive substance on the premise of ensuring the safety of the operator and the operation environment.
Since the manipulator works in a radioactive environment for a long time from the arm, in order to clean, overhaul and protect mechanical parts, a protective sleeve is usually arranged outside the metal structure of the arm except for the clamp, and the protective sleeve is detached during overhaul and then is cleaned for other parts. Due to the particularity of the radioactive environment, the cleaning system of the mechanical arm needs to consider the following points:
the whole cleaning process is carried out in a sealed and contained space to prevent the radioactive atmosphere from overflowing;
before cleaning the mechanical arm, the contaminated mechanical arm protective sleeve is detached and transported out;
the cleaning system is convenient for personnel to operate and has corresponding observation measures;
the cleaning process of the mechanical arm must be stable and reliable, and the mechanical arm is ensured to be cleaned safely, reliably and fully.
The invention provides a mechanical arm cleaning glove box which is used for cleaning a mechanical arm working in a radioactive environment.
Disclosure of Invention
In order to realize the isolation cleaning of the mechanical arm, the invention provides the mechanical arm cleaning equipment which can clean and decontaminate the mechanical arm working in a contaminated environment, realize the isolation of workers and an operated object and ensure the operation of the workers on radioactive substances in a safe environment; compact structure and convenient maintenance.
In order to achieve the above purposes, the invention adopts the technical scheme that: the manipulator cleaning equipment comprises an upper box body and a lower box body which are communicated with each other, wherein a transmission mechanism is arranged in the upper box body, the transmission mechanism comprises a bevel gear disc and a bevel gear which are meshed with each other, the bevel gear disc is rotatably supported at the bottom of the upper box body, and the bevel gear is connected with a driving system arranged outside the upper box body through a transmission shaft which is arranged on the side wall of the upper box body in a penetrating manner; the disc surface of the conical fluted disc is provided with a supporting device for fixing the manipulator; and a cleaning decontamination system for cleaning the manipulator is arranged in the lower box body.
Further, the supporting device comprises a clamping mechanism for clamping the manipulator and a manipulator hanger for supporting the manipulator; the clamping mechanism comprises a support and two telescopic clamping components symmetrically arranged on the support; the manipulator stores pylon includes manipulator stores pylon body, and the top of manipulator stores pylon body is equipped with the slot that is used for hanging the manipulator.
Further, the clamping component comprises a bottom plate and a fixed frame arranged on the bottom plate; a lead screw penetrates through the fixed frame and the bottom plate, the head end of the lead screw is provided with a clamping block, the tail end of the lead screw is provided with a hand wheel, and when the hand wheel is rotated, the lead screw drives the clamping block to move axially.
Furthermore, the cleaning decontamination system comprises a high-pressure water pipe and an ultrasonic cleaning pool, wherein the high-pressure water pipe is arranged at the upper part of the lower box body and used for cleaning the manipulator arm, and the ultrasonic cleaning pool is arranged at the bottom of the lower box body and used for cleaning the manipulator clamp.
Furthermore, the transmission shaft is installed on the upper box body through a shaft seat, and the shaft seat comprises a middle sleeve, a locking nut arranged at the outer end of the middle sleeve and a rolling bearing arranged at the inner end of the middle sleeve.
Furthermore, the awl fluted disc passes through adapting unit pivoted setting on last box, and adapting unit includes a set and awl tooth clamp plate, all is equipped with the ball between set and the awl fluted disc and between set and the awl tooth clamp plate.
Furthermore, peep maintenance systems are respectively arranged on the upper box body and the lower box body.
Furthermore, an air inlet and exhaust system is further arranged on the upper box body.
Furthermore, a movable flushing pipe for cleaning the inner wall of the upper box body is also arranged in the upper box body.
Furthermore, a compressed air pipe used for drying the washed manipulator arm is further arranged in the lower box body.
The invention has the beneficial technical effects that:
according to the manipulator cleaning equipment, according to the slender structure characteristics of the manipulator, the glove box is arranged in the gravity vertical direction according to the manipulator cleaning process, and is divided into an upper box and a lower box, the upper box can realize the dismantling of a manipulator protective sleeve and the fastening and fixing of the manipulator, the lower box mainly cleans the contaminated arm and the clamp with serious contamination, and when cleaning and decontaminating are carried out, the isolation of workers from an operated object is realized, the operation of the workers on radioactive substances in a safe environment is ensured, the relative isolation of functions is achieved, and the effective cleaning of the manipulator is realized; compact structure, convenient operation and maintenance and can ensure the safety of personnel at the same time.
Drawings
FIG. 1 is a schematic view of the construction of the robot cleaning apparatus of the present invention;
FIG. 2 is a top view of the support device of FIG. 1;
FIG. 3 is a top view of the clamping member of FIG. 2;
fig. 4 is an enlarged view of the drive system and transmission system of fig. 1.
In the figure:
1. an exhaust air filter; 2. an operation display panel; 3. a lighting fixture; 4. sealing a door of the feeding bag; 5. a peephole with a glove hole; 6. an upper box body; 7. an air intake filter; 8. an access door is sealed by a bag; 9. a movable flushing pipe; 10. a manipulator hanger; 11. a conical fluted disc; 13. a bevel gear pressing plate; 15. a sealing plate; 16. a ball bearing; 17. supporting a disc; 18. a support; 19. the lower box is provided with an upper peep window; 20. a glove hole; 21. a support leg; 22. compressing the air pipe; 23. a lower box lower peeping window; 24. a lower box body; 25. an ultrasonic cleaning pool; 26. a bag-closing access door is arranged; 27. a high pressure water pipe; 29. a motor bracket; 30. the lower box is provided with an upper peep window; 12. 14, 28, 31, 38, 43, 49, 50. screws; 32. a nut; 33. a bevel gear; 34. a key; 35. a rolling bearing; 36. a base plate; 37. a motor support; 39. a gear motor assembly; 40. locking the nut; 41. briquetting; 42. a gasket; 44. a compression pad; 45. a drive shaft; 46. a middle sleeve; 47. a jacket; 48. a support; 51. a clamping block; 52. 53. pins; 54. a screw rod; 55. a guide shaft; 56. a fixed mount; 57. a base plate; 58. hand wheel
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
As shown in FIG. 1, the robot cleaning apparatus according to the present invention comprises an upper tank 6 and a lower tank 24 which are connected to each other and are closed. A backing plate 36 is arranged between the upper box body 6 and the lower box body 24, the upper box body 6 is welded on the backing plate 36, and the lower box body 24 is connected with the backing plate 36 through a screw 31.
The upper box body 6 is provided with a transmission system, a driving system, a supporting device, a lighting system, an air inlet and exhaust system and an upper peeping maintenance system.
The transmission system comprises a pair of intermeshing bevel gears 33 and a bevel gear disc 11. The bevel gear 33 is rigidly connected with the driving system through a transmission shaft 45 arranged on the side wall of the upper box body in a penetrating way, so that the power outside the upper box body is transmitted to the inside of the upper box body, and the rotation reversing is realized. The transmission shaft 45 is mounted on the side wall of the upper box body through a shaft seat, the shaft seat comprises a middle sleeve 46 and an outer sleeve 47 arranged outside the middle sleeve 46, the outer sleeve 47 is welded with the upper box body 6, the middle sleeve 46 is connected with the outer sleeve 47 through a screw 43, and a pressing pad 44 is arranged at the joint of the middle sleeve 46 and the outer sleeve 47 to ensure the sealing performance of the upper box body. The middle sleeve 46 is of a hollow structure, the outer end of the middle sleeve is sealed with the transmission shaft 45 through the locking nut 40, the locking nut 40 is in threaded fit with the middle sleeve 46, and the pressing block 41 and the sealing gasket 42 are arranged between the inner end of the middle sleeve 46 and the locking nut 40, so that the inside and outside atmosphere of the box body at the position is sealed and isolated. The bevel gear 33 and the middle sleeve 46 are axially positioned through a rolling bearing 35, the bevel gear 33 is connected with a transmission shaft 45 through a key 34, and the end of the transmission shaft 45 fixes the bevel gear 33 on the transmission shaft through a nut 32, so that the bevel gear 33 is prevented from axially moving.
The driving system comprises a speed reducing motor assembly 39, and the speed reducing motor assembly 39 is connected with a transmission system transmission shaft 45 to drive the transmission system to rotate and reverse. The speed reducing motor assembly 39 is fixed on the backing plate 36 through a motor support 37, and the speed reducing motor assembly 39 is connected with the motor support 37 through a screw 38; a motor bracket 29 is arranged below the backing plate 36, one end of the motor bracket 29 is fixed on the lower box body, and the other end is fixed on the lower surface of the backing plate and is used for supporting the motor support 29.
The supporting device comprises a manipulator hanger 10 and a manipulator clamping mechanism which are both arranged on a bevel gear plate 11 and can rotate along with the rotation of the bevel gear plate. The manipulator hanger 10 comprises a hanger body, and the top of the hanger body is provided with an inclined groove for positioning and supporting the manipulator. The clamping mechanism comprises a bracket 48 and two telescopic clamping components symmetrically arranged on the bracket 48. Each clamping component comprises a bottom plate 57, a fixed frame 56 arranged on the bottom plate 57 and a screw rod device penetrating through the bottom plate 57 and the fixed frame 56. The screw rod device comprises a screw rod 54 and guide shafts 55 arranged on two sides of the screw rod 54, one ends of the screw rod 54 and the guide shafts 55 are provided with clamping blocks 51, the other end of the screw rod 54 is axially clamped through a nut 59, and a hand wheel 58 is arranged on the screw rod 54 at the end. The clamping block 51 is fixed on the screw rod and the guide shaft through a pin 53 and a pin 52, and the inner side surface of the clamping block 51 is provided with a shape matched with the outer side surface of the manipulator. The fixing frame 56 with screw holes and unthreaded holes is welded on the bottom plate 57, the guide shaft 55 can slide in the unthreaded hole of the fixing frame 56, the screw rod 54 is matched with the screw hole of the fixing frame 56, the other end of the screw rod 54 is milled into a square shape and is matched with the square hole of the hand wheel 58, and therefore the clamping block 51, the pin 52, the pin 53, the screw rod 54, the guide shaft 55, the bracket 56, the bottom plate 57, the hand wheel 58 and the nut 59 jointly form a clamping mechanism, as shown in fig. 2 and 3. In the embodiment, the clamping devices are 2 sets and are symmetrically arranged by taking the mechanical arm as an axis, and when the hand wheel 58 is rotated, the screw rod 54 drives the clamping block 51 to axially move under the limitation of the guide shaft 55. The manipulator hanger 10, the bracket 48 of the clamping mechanism and the base plate 57 are attached to the bevel disk 11 by screws 12, 49 and 50, respectively.
As shown in fig. 4, bevel disk 11 is rotatably supported on backing plate 36 by lower connecting members. The connecting part comprises a support 18 arranged on the backing plate 36, a support disc 17 arranged on the support 18 and a gear pressing plate 13 arranged on the outer side of the support disc 17. The bevel gear plate 11 is connected with the gear pressure plate 13 through a screw 14, and the supporting plate 17 is connected with the support 18 through a screw 28. Balls 16 are arranged between the bevel gear disc 11 and the supporting disc 17 and between the supporting disc 17 and the gear pressing plate 13, and sliding grooves are formed in the gear pressing plate 13, the screws 14 and the supporting disc 17, so that the balls 16 can roll in the sliding grooves conveniently. The balls 16 between the bevel gear plate 11 and the supporting plate 17 roll in the sliding grooves and play a supporting role in the vertical direction, so that the bevel gear plate 11 and the supporting plate 17 rotate relatively and the horizontal movement is limited. The bottom of the gear pressing plate 13 is provided with a sealing plate 15, which ensures the sealing of the sliding chute between the gear pressing plate 13 and the supporting disc 17.
The upper peeping and overhauling system comprises an upper peeping system and an upper overhauling system. The upper peeping system comprises a peeping window 5 with a glove hole, and the glove opening holes are formed in the upper position and the lower position of the elevation of the hand wheel 58, so that the operation is facilitated, and the rotation condition of the hand wheel 58 is observed. Go up the access system and include feeding bag sealing door 4 and go up bag sealing access door 8, robotic arm accessible feeding bag sealing door 4 gets into, and when last box produced the wastes material, bag sealing access door 8 transports out in the accessible, and the material business turn over of being convenient for is transported and is overhauld work.
The lighting system includes a lighting fixture 3 and a lighting fixture switch. The lighting lamp 3 is arranged in the upper box body above the peeping hole with the glove hole 5, so that the internal condition of the upper box body can be observed conveniently. The lighting lamp switch is arranged on the operation display panel 2 outside the upper box body and used for controlling the on-off of the lighting lamp 3.
The air inlet and exhaust system comprises an air inlet filter 7, an air exhaust filter 1 and a diaphragm capsule pressure gauge which is arranged on the operation display panel 2 and used for measuring the internal pressure of the equipment. Therefore, polluted atmosphere in the box body is discharged through the air inlet and exhaust system, contamination cannot be leaked, and the air inlet and exhaust system can control the direction of air flow.
Go up and still be equipped with movable flushing pipe 9 in the box 6, when the inner wall of last box 6 received to stain, the accessible takes glove hole peep hole 5 to operate movable flushing pipe 9 and wash to guarantee the clean environment in inside of last box 6.
The lower box body 24 is arranged on the supporting leg 21, the upper box body is supported by the supporting leg 21, and the supporting leg 21 is connected with the backing plate through a screw. A cleaning and decontamination system and a lower peeping and overhauling system are arranged in the lower box body 24. The cleaning and decontamination system comprises a high pressure water pipe 27 for cleaning the robot arm and an ultrasonic cleaning tank 25 for cleaning the head clamp of the robot arm. The mechanical arm is washed by high-pressure water of the high-pressure water pipe 27, and after washing is finished, the mechanical arm is ventilated and dried by the compressed air pipe 22 arranged in the lower box body 24, so that the cleanliness of the arm is guaranteed; the clamp portion is immersed in the ultrasonic cleaning tank 25 and cleaned by ultrasonic waves. The high-pressure water pipe can wash the inner wall of the lower box body while washing the arm, and the interior of the lower box body 24 is ensured to be in a clean atmosphere.
The peeping and overhauling system comprises a peeping system and a lower overhauling system. The lower peeping system comprises two lower box upper peeping windows 19 and 30 and a lower box lower peeping window 23, and is used for observing the internal situation of the box body while operating the mechanical arm. A glove hole 20 is arranged below the upper peeping window 19 of the lower box and used for auxiliary arm cleaning. The lower maintenance system comprises a lower bag sealing maintenance door 26 which is arranged on one side of the lower box body and used for maintaining the components in the lower box body and transferring wastes.
From this, go up box main part and be arranged in the strutting arrangement of manipulator through glove hole peep hole window auxiliary operation with the manipulator that gets into from feed bag sealing door, step up fixed manipulator through glove hole peep hole window operation and step up the mechanism, operate power drive system simultaneously and pass through the whole rotatory manipulator of transmission system, can demolish the manipulator protective sheath that stains to carry out it from last bag sealing access door. The lower box body is mainly used for cleaning the arms and the clamps of the manipulator.
In conclusion, after the mechanical arm enters the glove box from the feeding bag sealing door 4, the speed reduction motor assembly 39 is started to drive the conical fluted disc 11 to rotate, so that the mechanical arm supporting devices connected to the conical fluted disc 11 rotate together, the mechanical arm can be conveniently and smoothly placed on the mechanical arm hanger 10, the mechanical arm support 48 is used for realizing double-point supporting and stabilizing of the mechanical arm, then the mechanical arm protective sleeve with the contaminated outer surface is detached through the peephole window 5 with the glove hole and the glove hole 20, and the hand wheel 58 is manually rotated to realize the clamping and fixing of the clamping block 51 on the mechanical arm. At this time, the upper part of the robot arm is in the upper case 6, the middle-lower part of the robot arm is in the lower case 24, and the clamp falls into the ultrasonic cleaning bath 25. Injecting cleaning liquid into the ultrasonic cleaning pool 25 to clean the clamp, starting high-pressure water of the high-pressure water pipe 27 to wash the mechanical arm, additionally washing the inner wall of the lower box body 24, operating the movable washing pipe 9 to wash the possibly contaminated inner wall of the upper box body 6, ventilating and drying through the emptying pipe 22 after washing is finished, and ensuring that the glove box is in a clean atmosphere at the moment. To fully clean the arm, the gear motor assembly 39 may be driven to rotate the robot as a whole. After the mechanical arm is cleaned, the next station can be transported out from the feeding bag sealing door 4, and the cleaning process is finished.
The robot cleaning device of the present invention is not limited to the above-mentioned specific embodiments, and those skilled in the art can derive other embodiments according to the technical solution of the present invention, and the same shall fall into the technical innovation scope of the present invention.

Claims (9)

1. The utility model provides a manipulator cleaning equipment, includes last box (6) and lower box (24) that communicate each other, characterized by: a transmission mechanism is arranged in the upper box body (6), the transmission mechanism comprises a bevel gear disc (11) and a bevel gear (33) which are meshed with each other, the bevel gear disc (11) is rotatably arranged at the bottom of the upper box body (6), and the bevel gear (33) is connected with a driving system arranged outside the upper box body (6) through a transmission shaft (45) arranged on the side wall of the upper box body in a penetrating manner; the disc surface of the conical fluted disc (11) is provided with a supporting device for fixing the manipulator; a cleaning decontamination system for cleaning the manipulator is arranged in the lower box body (24); go up and be equipped with on box (6) and lower box (24) respectively and peep the maintenance system, go up the peep maintenance system of box and seal door (8) including taking glove hole peep hole (5), feeding bag, the manipulator passes through feeding bag and seals door (4) and get into, and the waste material that goes up the box production transports through last bag and seals access door (8).
2. The robot cleaning apparatus of claim 1, wherein: the supporting device comprises a clamping mechanism for clamping the manipulator and a manipulator hanger (10) for supporting the manipulator; the clamping mechanism comprises a bracket (48) and two telescopic clamping components symmetrically arranged on the bracket (48); the manipulator hanger (10) comprises a manipulator hanger body, and a groove for hanging the manipulator is formed in the top of the manipulator hanger body.
3. The robot cleaning apparatus of claim 2, wherein: the clamping component comprises a bottom plate (57) and a fixed frame (56) arranged on the bottom plate (57); a screw rod (54) penetrates through the fixed frame (56) and the bottom plate (57), the head end of the screw rod is provided with a clamping block (51), the tail end of the screw rod is provided with a hand wheel (58), and when the hand wheel (58) is rotated, the screw rod (54) drives the clamping block (51) to axially move.
4. The robot cleaning apparatus of claim 3, wherein: the cleaning decontamination system comprises a high-pressure water pipe (27) and an ultrasonic cleaning pool (25), wherein the high-pressure water pipe (27) is arranged on the upper part of the lower box body and used for cleaning the manipulator arm, and the ultrasonic cleaning pool (25) is arranged at the bottom of the lower box body and used for cleaning the manipulator clamp.
5. The robot cleaning apparatus of claim 4, wherein: the transmission shaft (45) is mounted on the upper box body through a shaft seat, and the shaft seat comprises a middle sleeve (46), a locking nut (40) arranged at the outer end of the middle sleeve (46) and a rolling bearing (35) arranged at the inner end of the middle sleeve (46).
6. The robot cleaning apparatus of claim 5, wherein: awl fluted disc (11) support at last bottom of the case portion through adapting unit pivoted, and adapting unit includes that a set (17) and awl tooth clamp plate (13), all is equipped with ball (16) between a set (17) and awl fluted disc (11) and between a set (17) and awl tooth clamp plate (13).
7. The robot cleaning apparatus of claim 1, wherein: and an air inlet and exhaust system is also arranged on the upper box body (6).
8. The robot cleaning apparatus of claim 7, wherein: and a movable flushing pipe (9) for cleaning the inner wall of the upper box body is also arranged in the upper box body (6).
9. The robot cleaning apparatus of claim 4, wherein: and a compressed air pipe (22) for drying the washed manipulator arm is also arranged in the lower box body (24).
CN201710324159.2A 2017-05-10 2017-05-10 Manipulator cleaning equipment Active CN107262449B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710324159.2A CN107262449B (en) 2017-05-10 2017-05-10 Manipulator cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710324159.2A CN107262449B (en) 2017-05-10 2017-05-10 Manipulator cleaning equipment

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CN107262449A CN107262449A (en) 2017-10-20
CN107262449B true CN107262449B (en) 2020-10-27

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114405892B (en) * 2022-03-29 2022-06-07 智程半导体设备科技(昆山)有限公司 Cleaning tank suitable for semiconductor wafer tank type cleaning manipulator

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DE4310267A1 (en) * 1993-03-30 1994-10-06 Schreiber Walter Dipl Ing Fh Device for cleaning articles
GB9700171D0 (en) * 1997-01-07 1997-02-26 Vapormatt Ltd Cleaning apparatus
CN2818076Y (en) * 2005-07-04 2006-09-20 哈尔滨量具刃具集团有限责任公司 Two-way adjustable work piece clamping mechanism
CN104123970A (en) * 2013-04-28 2014-10-29 南通中集罐式储运设备制造有限公司 Glove box and method for cleaning radioactive workpieces through glove box
CN103433236A (en) * 2013-08-19 2013-12-11 扬州嵘泰工业发展有限公司 Workpiece air blowing device
CN203991607U (en) * 2014-05-27 2014-12-10 安徽华盛科技控股股份有限公司 CIT radioactive substance operation purification exhaust case
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