CN107256047B - Solid-state atomic spin sensor is without magnetic temperature control system - Google Patents
Solid-state atomic spin sensor is without magnetic temperature control system Download PDFInfo
- Publication number
- CN107256047B CN107256047B CN201710367588.8A CN201710367588A CN107256047B CN 107256047 B CN107256047 B CN 107256047B CN 201710367588 A CN201710367588 A CN 201710367588A CN 107256047 B CN107256047 B CN 107256047B
- Authority
- CN
- China
- Prior art keywords
- diamond
- magnetic
- temperature control
- colour center
- pdms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
Abstract
The present invention relates to quantum sensory fields, specifically a kind of solid-state atomic spin sensor is without magnetic temperature control system, including diamond substrate, diamond NV colour center waveguide (4) is machined in the diamond substrate, the diamond substrate is equipped with the porous magnetic PDMS film (3) of the covering waveguide of diamond NV colour center (4), diamond substrate lower surface two sides are machined with micro-strip antenna array (2), and the micro-strip antenna array (2) is connected with microwave source.The present invention is prepared for concentration greater than 10 using MPCVD magnetic, electric constrained procedure18cm‑1Nitrogen-doping diamond lattic structure, diamond colour center structure is prepared for using micro-nano technology process, realize excitation and the phosphor collection of NV colour center structure, the coplanar manufacture of microwave antenna is realized in combination with electron beam process method, and the detection of magnetic field variation signal high s/n ratio is carried out by timing control method, it realizes temperature modulation magnetic fields, carries out magnetic noise and effectively inhibit, reach no magnetic temperature control purpose.
Description
Technical field
The present invention relates to quantum sensory field, it is specifically a kind of based on diamond nitrogen vacancy colour center without magnetic temperature control system.
Background technique
In recent years, with the continuous development of Atomic Physics, quantum physics technology, the continuous conventional measurement of Precise physical measuring technique
Technological limit is measured, based on the Larmor precession magnetic resonance effect under atomic energy level magnetic fields, so that physical quantity is gradually forced
Nearly theoretical limit is horizontal, however the basic structural unit of atom, quantum can just show the signal-to-noise ratio of superelevation at low ambient temperatures,
With the rising of temperature, the structures such as electronics, photon become active, and lead to physical measurement signal-to-noise ratio degradation, while for heat
The intervening atom of atom technology, the physical quantity technology of atomic spin need extremely stable temperature environment also to realize atom
High s/n ratio detection.
However conventional temperature control technology mostly uses the technologies such as electric heating, laser heating, generates serious magnetic in temperature control process
Noise will necessarily cause the second order Zeemen effect of atomic energy level, introduce phase noise, while cause to survey based on intervening atom effect
The fluctuation of mechanism atomic coherent states is measured, causes measurement sensitivity to decline, therefore, for the superhigh precision physical measurement skill of quantum techniques
The application development demand of art, the ability for needing no magnetic temperature techniques quantum techniques are continuously improved to physical quantity.
Summary of the invention
It is a kind of based on porous copolymers, diamond object of the present invention is to propose using room temperature single spin magnetic control technology is based on
Colour center, the diamond colour center temperature monitoring of microwave flat antenna and magnetic compensation system.
The present invention is achieved by the following technical scheme:
A kind of solid-state atomic spin sensor without magnetic temperature control system, including diamond substrate, in the diamond substrate plus
Work has diamond NV colour center waveguide, and the porous magnetic PDMS that the diamond substrate is equipped with covering diamond NV colour center waveguide is thin
Film, diamond substrate lower surface two sides are machined with micro-strip antenna array, and the micro-strip antenna array is connected with microwave source；Institute
It states and is equipped with object lens below diamond substrate, spectroscope is equipped with below the object lens, is equipped with long wave pass filter below the spectroscope
Piece, the long wave pass filter piece lower section are equipped with photodiode；The spectroscope receives the pulse issued from laser and swashs
Light passes through the NV colour center waveguide on object lens directive diamond.
Without magnetic temperature control principle: using the porous copolymers structure of nano magnetic structure composite in temperature changing process magnetic field with
Variation characteristic, by setting temperature regulate and control magnetic field coefficient, offset due to the magnetic noise in constant temperature system control process, to inhibit
Magnetic noise in temperature control process.
When work, the laser pulse for being got laser by spectroscope is through object lens optically focused directive diamond nitrogen vacancy color
The heart, laser are energized into excitation state from ground state through the electronics of NV colour center.Micro-strip antenna array, which generates microwave by microwave source, makes Buddha's warrior attendant
The changes of magnetic field that stone NV colour center experiences porous magnetic PDMS film issues different fluorescence, passes through spectroscope and long wave pass filter
Piece will receive the fluorescence that excitation generates and be sent into photodiode, the fluorescence letter that photodiode collection filters by long wave pass filter piece
Number it is changed into electric signal, by electric signal transmission dampness display apparatus.For NV colour center, in only outer plus microwave without adding magnetic outside
When, only 1 peak fluorescence intensity, after externally-applied magnetic field, due to Zeemen effect and electron spin, the energy level of NV colour center can occur
Division, to 2 peak fluorescence intensities occur, and the difference of two microwave frequencies corresponding to the peak value of two fluorescence intensities
There is certain linear relationship with magnetic field strength, can be obtained by the microwave frequency difference between two peak fluorescence intensities of measurement
To the magnetic field strength of externally-applied magnetic field, applied field strengths provide after experiencing ambient temperature by porous magnetic PDMS film.
Laser issues 532nm laser, and actual temp read method is as follows:
The laser light object lens of power stability are radiated on the NV colour center of diamond, cause the NV in NV colour center—From ground state
Transition, spin state are polarised to bright mS=0 state, and at this time plus the scanning microwave from 2.8GHz-2.95GHz, make NV—Occur
Spin resonance, spin energy level mS=|0>→mS=| when ± 1 > transition, cloth inning is redistributed between two energy levels, and fluorescence counts
Decline.It can be seen that an abscissa is frequency sweep microwave frequency, ordinate is radiation on the oscillograph of connection photodetector
One curve of the intensity of fluorescence, referred to as optical detection magnetic resonance spectrum (ODMR) after adding magnetic field near NV colour center, cause NV
The zero-field splitting of colour center, it can be seen that fluorescence intensity has apparent decaying on two points of microwave.Two troughs of ODMR spectrum
The distance between can intuitively show the variation of magnetic field strength, in actual use, the ODMR of different temperatures situation is composed
Trough distance measure calibration, in actual use can according to ODMR compose trough under available current environment
Temperature conditions.
Detailed description of the invention
Fig. 1 indicates the principle of the present invention figure.
In figure: 1- laser, 2- micro-strip antenna array, 3- porous magnetic PDMS film, 4- diamond NV colour center waveguide, 5-
Object lens, 6- spectroscope, 7- long wave pass filter piece, 8- photodiode.
Specific embodiment
Specific embodiments of the present invention are described in detail with reference to the accompanying drawing.
A kind of solid-state atomic spin sensor without magnetic temperature control system, including diamond substrate, in the diamond substrate plus
Work has diamond NV colour center waveguide 4, and the diamond substrate is equipped with the porous magnetic PDMS of covering diamond NV colour center waveguide 4
Film 3, diamond substrate lower surface two sides are machined with micro-strip antenna array 2, and the micro-strip antenna array 2 is connected with microwave
Source；It is equipped with object lens 5 below the diamond substrate, spectroscope 6 is equipped with below the object lens 5, is equipped with length below the spectroscope 6
Wave pass filter piece 7 is equipped with photodiode 8 below the long wave pass filter piece 7；The spectroscope 6 is received from laser 1
The pulse laser of sending passes through the NV colour center waveguide 4 on 5 directive diamond of object lens.
Laser 1 issues on the NV colour center that pulse laser passes through on 6 directive diamond of spectroscope, more due to temperature difference
The expansion rate of hole magnetism PDMS film is different, and then magnetic field strength is different, the microwave that micro-strip antenna array 2 is generated by microwave source
The changes of magnetic field for making diamond NV colour center experience porous magnetic PDMS film 3 issues different fluorescence, passes through spectroscope and length
Wave pass filter piece will receive the fluorescence that excitation generates and be sent into photodiode 8, and photodiode 8 is collected to be filtered by long wave pass filter piece
The fluorescence signal of light.
Wherein, porous magnetic PDMS film 3 is uniformly to be mixed with Fe3O4Porous PDMS film.Specific preparation method is such as
Under:
(1) PDMS and curing agent are mechanically mixed in the ratio of 10:1, and is stirred with stirring rod, until tiny
Stopping when foam is evenly distributed on each section of the PDMS with curing agent mixed liquor, is then evacuated to 1 × 10 in vacuum tank-3
It is placed after torr and removes within 1 hour or more a large amount of existing fine foams in original liquid, obtained uniformly without pure existing for gas
Gluey PDMS- curing agent mixing material；
(2), by Fe3O4Nano particle and glue PDMS- curing agent mixing material according to required ratio (under normal circumstances,
Fe3O4Mass ratio with gluey PDMS- curing agent mixing material is 1:4) uniformly mixed, and be vacuum-treated again；
(3), by PDMS film at 60 DEG C, the CO of 20MPa22h is placed in autoclave, by high pressure in the case where constant pressure
Kettle is cooled to 0 DEG C in ice-water bath, is then unloaded with the rate of 0.5MPa/min and is depressed into normal pressure, obtains porous magnetic PDMS film.
The present embodiment temperature sensor has fabricated high concentration in diamond surface using micro-nano manufacturing process first
Colour center waveguiding structure develops chip grade diamond colour center temperature sensor by the coplanar integrated micro aerial array of compatible technology,
Specific solution is as follows:
1, using MEMS processing technology, diamond colour center waveguide is prepared
1.1, using MPCVD epitaxy technique and electron beam irradiation technology, high quality is formed on the substrate after the high-temperature anneal
NV colour center film layer, detailed process is as follows:
1.1.1, high concentration diamond colour center preparation process: prepared using prepared by microwave plasma chemical vapor deposition (MPCVD) technology dense
Degree is higher than 1018cm-1Diamond colour center；Use High Purity N2Gas source (99.99%) and high inner wall clean cleanliness tracheae, gas source
Enter accent and carries out micronic dust, purification gas using 12500 mesh filter screens；In ultrahigh vacuum (10-7Torr using high-pressure microwave etc. under)
Ionize CH4、H2、N2Three kinds of gases, inspire C, N atom, using atomic magnetic moment interaction effect, using magnetic, electric constraint side
Method accurately manipulates C, N atomic ratio, realizes that the concentration of superelevation uniformity is higher than 1018cm-1Nitrogen controllably manufacture high concentration
Diamond colour center.
1.1.2,5 hours spokes NV colour center activating process: are carried out to diamond substrate using high energy 10MeV electron beam irradiation
According to the carbon carried out in electronics and lattice in situ collides, and generates vacancy；Under ultra-high vacuum environment, short annealing drives carbon
Element is mobile to surface, eliminates distortion of lattice and residual stress, then anneal under 850 DEG C of high temperature 2h under vacuum, sends out vacancy
Raw migration, and electronics is captured, form NV colour center film layer.
1.2, it is polished using upper and lower surface of the multiple polishing technology to diamond substrate.
1.3, one layer of silicon oxide masking film layer 200nm of surface epitaxial growth on a diamond substrate.
1.4, using lithography and etching technology, diamond NV colour center waveguide picture structure is prepared in image conversion transfer.
1.5, diamond body structure etching is carried out using dry etching technology, forms diamond NV in the middle part of diamond substrate
Colour center waveguide.
2, porous magnetic PDMS film is prepared, porous magnetic PDMS film is compound on a diamond substrate, and cover gold
Hard rock NV colour center waveguide.
3, chip-scale Planar integration and manufacture
The integrated processing of microwave antenna array is carried out in the diamond substrate lower surface of processing, the specific steps are as follows:
1), using electron beam evaporation technique, the Ti/Pt/ of one layer of 800 ~ 850nm is prepared in the diamond substrate processed
Au, wherein Ti is about 50nm ~ 100nm with a thickness of 100nm ~ 200nm, Pt thickness, and Au is with a thickness of 300nm ~ 600nm；
2), using IBE lithographic technique, microstrip antenna array array structure is etched, microstrip antenna is 250 microns long, wide and a height of
40 microns.
The present invention is prepared for concentration greater than 10 using MPCVD magnetic, electric constrained procedure18cm-1Nitrogen-doping diamond knot
Structure is prepared for diamond colour center structure using micro-nano technology process, realizes excitation and the phosphor collection of NV colour center structure,
The coplanar manufacture of microwave antenna is realized in combination with electron beam process method, and changes of magnetic field is carried out by timing control method
The detection of signal high s/n ratio, realizes temperature modulation magnetic fields, carries out magnetic noise and effectively inhibits, reaches no magnetic temperature control purpose.
The above is only specific embodiments of the present invention, and however, it is not limited to this.It is any to be solved substantially based on the present invention
Identical technical problem, or realize essentially identical technical effect, made ground simple change, equivalent replacement or modification etc.,
In all belonging to the scope of protection of the present invention.
Claims (5)
1. a kind of solid-state atomic spin sensor is without magnetic temperature control system, it is characterised in that: including diamond substrate, the diamond
Diamond NV colour center waveguide (4) is machined on substrate, the diamond substrate is equipped with the covering waveguide of diamond NV colour center (4)
Porous magnetic PDMS film (3), diamond substrate lower surface two sides are machined with micro-strip antenna array (2), the micro-strip day
Linear array (2) is connected with microwave source；Object lens (5) are equipped with below the diamond substrate, spectroscope is equipped with below the object lens (5)
(6), it is equipped with long wave pass filter piece (7) below the spectroscope (6), is equipped with two pole of photoelectricity below the long wave pass filter piece (7)
It manages (8)；The spectroscope (6) receives to be passed through on object lens (5) directive diamond from the pulse laser that laser (1) issues
NV colour center waveguide (4).
2. solid-state atomic spin sensor according to claim 1 is without magnetic temperature control system, it is characterised in that: the porous magnetic
Property PDMS film (3) is uniformly to be mixed with Fe3O4Porous PDMS film.
3. solid-state atomic spin sensor according to claim 2 is without magnetic temperature control system, it is characterised in that: the porous magnetic
Property PDMS film (3) the preparation method is as follows:
(1) PDMS and curing agent are mechanically mixed and stirred in the ratio of 10:1, until fine foam is uniformly distributed
Stop in each section of PDMS and curing agent mixed liquor, 1 × 10 is then evacuated in vacuum tank-31 is placed after torr
Hour or more remove a large amount of existing fine foams in original liquid, obtain uniformly consolidating without pure glue PDMS- existing for gas
Agent mixing material；
(2) by Fe3O4Nano particle is uniformly mixed with glue PDMS- curing agent mixing material according to the ratio that mass ratio is 1:4
It closes, and is vacuum-treated again；
(3) by PDMS film at 60 DEG C, the CO of 20MPa22h is placed in autoclave, by autoclave in ice in the case where constant pressure
It is cooled to 0 DEG C in water-bath, is then unloaded with the rate of 0.5MPa/min and is depressed into normal pressure, obtains porous magnetic PDMS film.
4. solid-state atomic spin sensor according to claim 1 is without magnetic temperature control system, it is characterised in that: the micro-strip day
The specification of microstrip antenna in linear array (2) are as follows: it is 250 microns long, it is wide and it is high be 40 microns.
5. solid-state atomic spin sensor according to claim 1 is without magnetic temperature control system, it is characterised in that: the laser
(1) 532nm laser pulse is issued.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710367588.8A CN107256047B (en) | 2017-05-23 | 2017-05-23 | Solid-state atomic spin sensor is without magnetic temperature control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710367588.8A CN107256047B (en) | 2017-05-23 | 2017-05-23 | Solid-state atomic spin sensor is without magnetic temperature control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107256047A CN107256047A (en) | 2017-10-17 |
| CN107256047B true CN107256047B (en) | 2019-01-04 |
Family
ID=60028200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710367588.8A Active CN107256047B (en) | 2017-05-23 | 2017-05-23 | Solid-state atomic spin sensor is without magnetic temperature control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107256047B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020239172A1 (en) * | 2019-05-25 | 2020-12-03 | Bernd Burchard | Device and method for using diamond nanocrystals having nv colour centres in cmos circuits |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107807142A (en) * | 2017-10-26 | 2018-03-16 | 北京航空航天大学 | A kind of measuring system and measuring method of solid impurities concentration |
| CN108844987A (en) * | 2018-03-13 | 2018-11-20 | 中北大学 | Micro-displacement measuring system and method based on diamond NV colour center spin-magnetic resonance effect |
| CN108957376B (en) * | 2018-05-18 | 2020-05-22 | 中北大学 | Chip type atom spin magnetic sensor |
| CN109238505B (en) * | 2018-10-09 | 2020-11-03 | 南京昆腾科技有限公司 | High-sensitivity high-resolution contact type three-dimensional temperature field imaging system and method |
| CN110398300A (en) * | 2019-06-24 | 2019-11-01 | 中北大学 | A kind of temperature sensor based on cluster NV colour center diamond |
| CN112180303B (en) * | 2020-09-30 | 2022-12-13 | 中国科学技术大学 | Magnetometer probe and magnetic field measurement method |
| CN113064106B (en) * | 2021-03-18 | 2023-02-21 | 北京卫星环境工程研究所 | Be applied to NV color center ensemble magnetometer fluorescence collection device's microwave antenna |
| CN113281683A (en) * | 2021-05-11 | 2021-08-20 | 国网安徽省电力有限公司电力科学研究院 | Microwave antenna for diamond film magnetic imaging device and manufacturing method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201449563U (en) * | 2009-07-22 | 2010-05-05 | 张建武 | Intelligent temperature monitoring device for 220KV switch box in electric power substation |
| US20130344612A1 (en) * | 2012-06-20 | 2013-12-26 | The Research Foundation Of State University Of New York | Ultrasensitive, superfast, and microliter-volume differential scanning nanocalorimeter for direct charactization of biomolecular interactions |
| CN205158161U (en) * | 2015-09-08 | 2016-04-13 | 青岛歌尔声学科技有限公司 | Temperature control system of camera module |
| CN106092074A (en) * | 2016-06-03 | 2016-11-09 | 中北大学 | Single-chip grade diamond colour center spin gyroscope and preparation method |
| CN106227257A (en) * | 2016-07-01 | 2016-12-14 | 沈阳东软医疗系统有限公司 | A kind of temperaturecontrol sensor and protection circuit |
-
2017
- 2017-05-23 CN CN201710367588.8A patent/CN107256047B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201449563U (en) * | 2009-07-22 | 2010-05-05 | 张建武 | Intelligent temperature monitoring device for 220KV switch box in electric power substation |
| US20130344612A1 (en) * | 2012-06-20 | 2013-12-26 | The Research Foundation Of State University Of New York | Ultrasensitive, superfast, and microliter-volume differential scanning nanocalorimeter for direct charactization of biomolecular interactions |
| CN205158161U (en) * | 2015-09-08 | 2016-04-13 | 青岛歌尔声学科技有限公司 | Temperature control system of camera module |
| CN106092074A (en) * | 2016-06-03 | 2016-11-09 | 中北大学 | Single-chip grade diamond colour center spin gyroscope and preparation method |
| CN106227257A (en) * | 2016-07-01 | 2016-12-14 | 沈阳东软医疗系统有限公司 | A kind of temperaturecontrol sensor and protection circuit |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020239172A1 (en) * | 2019-05-25 | 2020-12-03 | Bernd Burchard | Device and method for using diamond nanocrystals having nv colour centres in cmos circuits |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107256047A (en) | 2017-10-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107256047B (en) | Solid-state atomic spin sensor is without magnetic temperature control system | |
| JP6352293B2 (en) | Synthetic diamond materials for quantum optical applications and methods of making the same | |
| EP3071728B1 (en) | Methods of fabricating synthetic diamond materials using microwave plasma actived chemical vapour deposition techniques and products obtained using said methods | |
| Zhao et al. | Growth of ZnO nanostructures by vapor–liquid–solid method | |
| EP2616829B1 (en) | A microfluidic cell and a spin resonance device | |
| CN107314833B (en) | The temperature noise superhigh precision test calibration system of atomic spin sensor | |
| CN108844987A (en) | Micro-displacement measuring system and method based on diamond NV colour center spin-magnetic resonance effect | |
| CN106092074B (en) | Single-chip grade diamond colour center spin gyroscope and preparation method | |
| CN110243501B (en) | Quantum pressure sensor with diamond nitrogen vacancy color center and preparation method | |
| Hruszkewycz et al. | Strain annealing of SiC nanoparticles revealed through Bragg coherent diffraction imaging for quantum technologies | |
| Breev et al. | Stress-controlled zero-field spin splitting in silicon carbide | |
| Li et al. | High‐Performance and Self‐Powered X‐Ray Detectors Made of Smooth Perovskite Microcrystalline Films with 100 μm Grains | |
| Zhang et al. | High-quality diamond microparticles containing SiV centers grown by chemical vapor deposition with preselected seeds | |
| Cheng et al. | Precursor solution-dependent secondary phase defects in CsPbBr 3 single crystal grown by inverse temperature crystallization | |
| Potdevin et al. | Structural, morphological and scintillation properties of Ce3+-doped Y3Al5O12 powders and films elaborated by the sol–gel process | |
| Chen et al. | Electrospray prepared flexible CsPbBr 3 perovskite film for efficient X-ray detection | |
| Dascalu et al. | Magnetic measurements of RE-Doped cobalt ferrite thin films | |
| Lund et al. | Recent progress in lead iodide X-ray spectrometer development | |
| CN101665911A (en) | Method for preparing giant magnetoresistance films by vacuum vapor deposition method | |
| CN113493898B (en) | Ferromagnetic insulating material and preparation method and application thereof | |
| Wang et al. | ${\rm Lu} _ {2}{\rm SiO} _ {5}:{\rm Ce} $ Optical Ceramic Scintillator for PET | |
| Shcherbina et al. | Structure and properties of luminescent ceramics GdNbO4 obtained by usual technology and by hot pressing | |
| Jingjian et al. | Wafer-scale fabrication of isolated luminescent silicon quantum dots using standard CMOS technology | |
| RU2798040C1 (en) | Method for determining local deformation in diamond crystal using optically detected magnetic resonance nv-defects | |
| Zhu et al. | Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |