This application claims U.S. Non-provisional Patent application No.13/570 is enjoyed, 154 rights and interests, its requirement enjoys in August, 2011
The U.S. Provisional Application No.61/521 submitted for 9th, 604 rights and interests, it is fully incorporated in herein by reference.
Embodiment
According to the various embodiments of this religious doctrine, gas bearing system includes shell, and it has side wall, and side wall is including outer
Surface and inner surface.Side wall defines internal cavities, and it is configured to receive print module component.Inner surface may terminate at top,
Bottom or both on, and define the opening for leading to internal cavities.Internal cavities can form the through hole through shell, Huo Zheke
Can only have single opening at one end.Side wall can also have the end face being located between its outer surface and its inner surface, and end face
It may include more than first hole and more than second hole.More than first fluid passage can be included in the wall of side, and can be from more than first hole
Extend in the wall of side, and fluid communication is in the first manifold.More than second fluid passage can be included in the wall of side, and can be from
More than two hole is extended in the wall of side, and is in fluid communication with the second manifold.First manifold and the second manifold can independent status
Can in the inside of side wall, the outside of side wall or both of which.First manifold can be for example, by first port with shell outside
Environment be in be in fluid communication,.Second manifold can connect with the environment of the outside of shell for example, by second port in fluid
It is logical,.Conduit, such as pipeline can be in each manifold to be in fluid communication, and can be connected further to supplying, very for gas-pressurized
Empty source or both on.More than first hole and more than second hole may be configured as the opening for surrounding internal cavities.Internal cavities
There can be a certain shape of cross section, it is square, rectangle, circular or any other shape.Hole can be in two sides, three sides
Face, four sides or at least five sides surround the opening for leading to internal cavities.
In certain embodiments, the end face of side wall may also include the 3rd many fluid passages, and it is extended in the wall of side, and with
3rd manifold is connected, and the 3rd manifold is different from the first manifold and the second manifold.3rd manifold can for example, by the 3rd port with
The environment of the outside of shell, which is in, to be in fluid communication,.3rd manifold can with pressurized-gas source, vacuum source or both in fluid connect
It is logical.The identical pressurized-gas source that 3rd manifold can connect with the first manifold fluid is in fluid communication, or from it is different
Pressurized-gas source, which is in, to be in fluid communication.The hole that each Kong Keyu in more than first hole and more than second hole is adjacent is spaced apart about
0.5mm to about 20mm average distance, such as about 1.0mm to about 10mm, about 2.0mm to about 8.0mm or about
3.0mm to about 6.0mm average distance.Each hole in more than first hole and more than second hole may have about 0.001 inch
To about 0.1 inch of average diameter, such as about 0.003 inch to about 0.075 inch, about 0.005 inch to about
0.05 inch or about 0.01 inch to about 0.04 inch of average diameter.In certain embodiments, more than first hole can have
There is about 0.005 inch to about 0.025 inch of average diameter, and more than second hole may have about 0.030 inch extremely
About 0.090 inch of average diameter.
According to various embodiments, more than first fluid passage can be in pressurized-gas source to be in fluid communication, and more than second
Individual fluid passage can be in vacuum source to be in fluid communication.Pressurized-gas source may include pressurization inert gas source, such as source nitrogen,
Rare gas source or its combination.
In certain embodiments, shell may include multiple components, such as substrate, the manifold chamber on substrate and installation
Panel on manifold.In a kind of typical configuration, panel includes end face.Substrate may include first port and second port,
And manifold chamber may include the first manifold and the second manifold.In certain embodiments, substrate includes the 3rd port, and manifold chamber
Including the 3rd manifold.In certain embodiments, substrate may include first port, second port and the 3rd port, and manifold chamber
It may include the first manifold, the second manifold and the 3rd manifold.In certain embodiments, manifold chamber or wherein one or more manifolds can
Including wherein one or more ports.Connector flange is attached on substrate, and is configured to connect to support and actuator
In wherein at least one.Wherein one or more components can limit side wall or partly limit side wall, for example, one folded includes panel
Component can limit jointly side wall, internal cavities or both.
In certain embodiments, shell can provide the second opening for leading to internal cavities.Second opening can be positioned on and the
The opposite position of one opening so that internal cavities may include the through hole through whole shell.At least one print module component can
In internal cavities.In some cases, at least one print module component may include at least one ink jet-print head or
At least one thermal printer head, it has at least one transitional surface and is in thermal communication extremely with least one described transitional surface
A few heater.In certain embodiments, the second opening allows to discharge waste gas from internal cavities.Second opening can make impression block
Block assembly from the top of system, the bottom of system or both loaded.It should be understood that the orientation of gas bearing system can be sent out
Changing, and it is this top and bottom it is specified be it is relative, it is and nisi.In certain embodiments, feature is anti-
To so that the second opening can be such that print module component is loaded from the bottom of system.
According to various embodiments there is provided a kind of printing interval control system, it includes gas carrying system described here
System, and include the substrate of the first flat surfaces.System can be arranged so that end face is located in the first plane, at least one transfer
Surface is located in the second plane, and the first planar substrate surface is located in the 3rd plane.First plane, the second plane and the 3rd
Plane is probably what is be substantially parallel to each other, i.e., deflection parallel to each other or relative to each other is less than 10 ° or less than 5 °.Gas carries gap
It can be limited by the distance between the first plane and the 3rd plane.Printing interval can be between the second plane and the 3rd plane away from
From limiting.Wherein at least one surface after end face, ink jet-print head in transitional surface and the first planar substrate surface is can
Adjustment so that control the size of printing interval, gas carrying gap size or both.Printing interval can be by independently
Control, and/or controlled by controlling gas to carry the size in gap.Gas bearing system can be positioned on the upper of substrate
Face, below, or above and below.Gas bearing system may include or operationally associated with one or more actuators,
So as to enable gas bearing system to be adjusted relative to substrate and/or relative to the position of one or more ink jet-print heads.
Second gas bearing system can be provided towards first gas bearing system so that substrate is positioned at first gas and held
Between loading system and second gas bearing system.Second gas bearing system may also include multiple pressurized gas passages and optional
Multiple vacuum passages.Pressurized gas passage and vacuum passage may be configured as any required form.In certain embodiments, every
One fluid passage or alternate fluid passage include pressurization passageway and vacuum passage.Second gas carrying can be arranged on chuck
In, it can provide temperature control for substrate.That is, in addition to providing active force for substrate, second gas carrying can be
Substrate transmits heat back and forth, to realize the heating and/or cooling of substrate.Same and heating element heater, for example, heat chuck and directly contact
Compare, this thermal control is probably favourable.Heating passage and cooling duct may be configured as any required form.In some realities
Apply in example, may include heating passage or cooling duct every a fluid passage.In certain embodiments, alternate fluid passage
Including heating passage, cooling duct, heating passage, cooling duct etc..Thermal control can be additionally used in the size for controlling substrate, because
Heat can tend to make substrate expansion, and cooling down can tend to make substrate contracts.The maintenance of constant dimensions is favourable.Hot size
Change is probably especially important for big substrate, for example, hot change in size is for the 8th generation dimension glass (2.2m multiplies 2.5m)
It is critically important.The thermal change of uncontrolled substrate may be moved due to the black water-laid level on substrate and/or vertically
Position and product quality is had a negative impact.In certain embodiments, printing interval may have about +/- 10 μm, +/- 7 μm
Or +/- 5 μm of tolerance.
According to the various embodiments of this religious doctrine there is provided a kind of method, it includes making print module component relative to substrate
Positioning, and by using print module component by file printing to substrate.Positioning can utilize gas carrying system described here
System, such as system including shell is completed, and wherein shell defines internal cavities.Side wall can have outer surface and inner surface,
And print module component may be housed in internal cavities.Inner surface, which may terminate at, to lead in the opening of internal cavities, and should
Method may include print module component being arranged in internal cavities.Side wall, which can also have, to be located between outer surface and inner surface
End face, and end face may include more than first hole and more than second hole.This method may include pressurized gas supply and through
More than one hole, and be evacuated by more than second hole.Side wall may also include more than first fluid passage, and it is from more than first hole
Extend in the wall of side, and connected with the first manifold.In addition, side wall may include more than second fluid passage, it is from more than second hole
Extend in the wall of side, and connected with the second manifold.This method may include by the manifold of pressurized gas supply first, and in the second manifold
On be evacuated.First manifold can be in for example, by first port with the environment of the outside of shell to be in fluid communication, and the
Two manifolds can be in for example, by second port with the environment of the outside of shell to be in fluid communication.Pipeline, tubulature or other conduits
First manifold and the second manifold can be connected with pressurized-gas source and vacuum source respectively.In certain embodiments, more than first
Individual hole and more than second hole enclose the opening for leading to internal cavities.
In certain embodiments, printing may include hot print, and such as hot print includes utilizing impression block after inkjet printing
Block assembly carries out solid transfer printing by the liter or evaporation of solid.Hot print and impression block according to workable for this religious doctrine
The example of block assembly include such as U.S. Patent Application Publication No.US2008/0308307A1, US2008/0311307A1,
Example described in US2008/0311289A1 and US2006/0115585A1, it is fully incorporated in herein by reference.
Print module component may include printhead transitional surface and/or ink-jet spray orifice, and substrate may include first surface, and printhead turns
Moving surface and/or ink-jet spray orifice can be spaced apart from each other towards substrate first surface, and by printing interval.Printhead transfer table
Face can receive ink deposition by inkjet printing from such as inkjet printing subsystem.In certain embodiments, it is one or more to beat
Head transitional surface is printed by rotation, to receive ink, and/or by rotation with towards there is substrate to be printed.Some
In embodiment, one or more ink jet-print heads are by rotation, so that ink is transferred into one or more printhead transfer tables
On face.During printing, gas bearing system and/or printhead transitional surface can be positioned on above substrate, below, Huo Zheshang
Face and following.In certain embodiments, printing may include direct inkjet printing to substrate.In such an embodiment, impression block
Block assembly may include ink jet-print head.For example, print module component may include SAMBA printhead modules, (California is holy
Carat draws Fujiphoto Dimatix companies of city).During printing, gas bearing system and/or ink jet-print head can be positioned on lining
Above bottom, below, or above and below.
Positioning of the gas bearing system relative to substrate may include by control through the first manifold and the second manifold its
In at least one manifold fluid flow so as to controlling the size of printing interval.In certain embodiments, positioning may include to keep
The positive flow of fluid from the first manifold and through more than first fluid passage, and it is maintained into more than second fluid passage simultaneously
Through the minus flow of the fluid of the second manifold.Positioning may include to adjust the flow of gas-pressurized, vacuum or both, so as to control
The size of printing interval, gas carrying gap or both.Control unit can be used for realize pressurized-gas source, vacuum source or this two
The control of person.
In certain embodiments, printing interval can be defined as about 5 μm to about 100 μm of distance, such as about 20 μ
M to about 30 μm or about 25 μm.This method can be for example, by making inert gas in about 10psig to about 200psig, big
More than first stream is flowed through under about 30psig to about 90psig, about 50psig to about 70psig or about 60psig pressure
Body passage is so as to keep or provide printing interval.Positioning may additionally include about -3.0psig to about -13psig, about -
It is evacuated under 5.0psig to about -10psig or about -7.5psig negative pressure by more than second fluid passage.At certain
In the case of a little, printing may include to print on the first surface of substrate, and wherein substrate has second table opposite with first surface
Face, and this method is also including second gas bearing system is positioned near the second surface of substrate, and held with first gas
The opposite position of loading system.Second gas bearing system, which can be configured to, positions the first surface of substrate, and beating needed for holding
Print gap.Substitute or second gas bearing system is it is also possible to use in addition to first gas bearing system.
The various embodiments of this religious doctrine are related to for being kept and being controlled printing interval using air bearing and control environment
Apparatus and method, environment deposition-print procedure.For example, ink deposition can be performed in non-oxidizing atmosphere.At certain
In a little embodiments, printhead is arranged in gas load-carrying covering so that setting gap is fixed on a certain apart from upper, its possible basis
Actual demand and close to zero mm.Gap is set equivalent between the end face of the transitional surface of printhead and gas load-carrying covering
Distance.Gas carrying gap is to be located at the distance between end face and substrate.When substrate is moved and/or printed below printhead
When head is moved above substrate, under either type, there is relative motion between printhead and substrate.By being carried to gas
The fluid passage of shell is pressurizeed, and gas flows out from the opening in shell, and between gas load-carrying covering end face and substrate
Keep gas carrying gap.By this method, printing interval becomes gas carrying gap and setting gap sum so that printing
Gap is controlled by these two other gaps.Printing interval can be done by the gas pressure changed in gas load-carrying covering
Go out slight change, the change of such as micron level.Air-flow from gas load-carrying covering to blast pipe is created to be filled out with bearing gas
The environment filled.If ink is to oxygen sensitive, then non-oxidized gas and/or inert gas such as nitrogen can be used for providing
Non-oxidizing atmosphere.The process that liquid ink is evaporated in printhead or on printhead is likely to result in the generation of solvent vapour.Exhaust
Mouth allows to remove the nitrogen injected by gas bearing system, and removes the solvent vapour released during the evaporation of liquid ink.
In certain embodiments, pressure source and vacuum source are employed in the printing interval needed for restriction.Implement some
There is provided vacuum source and nitrogen pressure source in example.These sources are provided at the passage corresponding with gas load-carrying covering
In fluid communication, for example, be arranged on around printhead, and thus can set up gas carrying gap.Printing interval can be relative to bearing
Shell and change.Gas load-carrying covering and printhead may be provided at substrate, the vicinity of such as glass.Printhead can sink on substrate
Shallow lake thin-film material, such as ink, including the film-moulding material being dissolved or suspended in carrier fluid.In certain embodiments,
Substrate is supported by the chuck with gas lift system or gas bearing system.In certain embodiments, substrate by with substrate phase
The vacuum chuck of contact is supported.
As mentioned above, the gas bearing system of this religious doctrine can individually or jointly one or more additional gas
Bearing system is used.Additional gas bearing system can utilize any gas or the mixture of gas.Additional gas bearing system
Identical or different gas or admixture of gas can be used, it is included in gas package system, for example, encapsulate hot print operation
System.In certain embodiments, air bearing uses inert gas, such as nitrogen, one or more rare gas or its group
Close.Workable gas bearing system and the method and system of correlation include can be from the new way of Pennsylvania Aston
Those of machine parts company acquisition.They can individually or jointly described in this religious doctrine gas bearing system use.For
Device, system, the methods and applications used about gas bearing system can combine this religious doctrine to use, including such as United States Patent (USP)
No.US7, described in 908,885B2, it is fully incorporated in herein by reference.Can be from the Yoqneam of Israel core
Gas bearing system that heart stream science solution Co., Ltd obtains and the method and system of correlation can also individually or knot
The gas bearing system described in this religious doctrine is closed to use.The dress for the relevant gas bearing system that may also be combined with this religious doctrine to use
Put, system, methods and applications may include such as United States Patent (USP) No.US7,857,121B2, US7,604,439B2, US7,603,
028B2, and US7, described in 530,778B2, it is fully incorporated in herein by reference.
For example, the aspect of this religious doctrine can combine U.S. Patent Application Publication No.US2008/0311307A1, US2008/
0311289A1、US2006/0115585A1、US2010/0188457A1、US2011/0008541A1、US2010/0171780A1
With the US2010/0201749A1 and U.S. Patent application No.61/ of entitled " thermal jet printing device downwards and method "
Religious doctrine in 521,631 is put into practice, and it is fully incorporated in herein by reference.
Fig. 1 is the cross-sectional view of the gas bearing system 20 of the various embodiments according to this religious doctrine.Gas bearing system 20
Including shell 22, it includes side wall 24.Side wall 24 includes outer surface 26 and inner surface 28.Inner surface 28 defines internal cavities
30, it is configured to receive print module component 32.Inner surface 28 is terminated on the cavities open 34 of internal cavities 30.End face 36 is set
Put between inner surface 28 and outer surface 26.With annular end 38 by contrast of end face 36, it includes the second cavities open 40.The
Two cavities opens 40 may include through hole 42.First hole 44 and the second hole 46 can be positioned on end face 36.Extend from the first hole 44
What is come is probably first fluid passage 48, and it is extended in the side wall 24 of shell 22.Second fluid passage 50 can be from the second hole 46
In the side wall 24 for extending to shell 22.
As seen in Figure 1, print module component 32 may include transitional surface 52, can therefrom transfer material into substrate 56
On, more specifically on substrate surface 57, so as to form deposition materials 54.Printing interval 58 is defined as transitional surface 52 and lining
The distance between basal surface 57.Gas carrying gap 60 is defined as the distance between end face 36 and substrate surface 57.Between setting
Gap 62 is defined as the difference between gas bearing system gap 60 and printing interval 58, and it is between transitional surface 52 and end face 36
Distance be identical.
Fig. 2 is the schematic cross section of the gas bearing system 120 of the various embodiments according to this religious doctrine.Gas carrying system
System 120 includes shell 122, and it then includes side wall 124.Side wall 124 includes outer surface 126 and inner surface 128, and which defines inside
Cavity 130.Internal cavities 130 are configured to receive print module component 132 by cavities open 134.Positioned at outer surface 126 and interior
Between surface 128 is end face 136.Second cavities open 138 can be positioned on the position opposite with cavities open 134.End face 136
It may include the first hole 140 and the second hole 142.First fluid passage 144 can extend to the side wall 124 of shell 122 from the first hole 140
In.In the side wall 124 that second fluid passage 146 can extend to shell 122 from the second hole 142.
As shown in Figure 2, first fluid passage 144 and second fluid passage 146 can connect with the first manifold 148 in fluid
It is logical.End face 136 may also include the 3rd hole 150, the 4th hole 152, the 5th hole 154 and the 6th hole 156.3rd fluid passage 158,
Four fluid passages 160, the 5th fluid passage 162 and the 6th fluid passage 164 can be respectively from the 3rd hole 150, the 4th hole 152,
Five holes 154, and the 6th hole 156 are extended in the side wall 124 of shell 122.3rd fluid passage 158, the 4th fluid passage 160,
5th fluid passage 162 and the 6th fluid passage 164 can be in the second manifold 166 to be in fluid communication.In certain embodiments, plus
Press the manifold 148 of gas source 168 and first to be in be in fluid communication.In certain embodiments, at the manifold 166 of vacuum source 170 and second
In fluid communication.The transitional surface 172 of print module component 132 can be configured to material, and such as film-moulding material is deposited to
On substrate.Deposition materials 174 can be positioned on substrate 176, more specifically on substrate surface 178.Printing interval 180 is defined
For the distance between transitional surface 172 and substrate surface 178.Gas bearing system gap can be defined as end face 136 and substrate
The distance between surface 178.Setting gap can be defined as the distance between end face 136 and transitional surface 172.Implement some
There is provided second gas bearing system 186 in example.Second gas bearing system 186 may include (not show with multiple fluid passages
Show) in the multiple holes 188 being in fluid communication.Hole 188 can towards substrate 176 the second substrate surface 190.
Fig. 3 is the exploded view of the gas bearing system 220 of the various embodiments according to this religious doctrine.Gas bearing system 220
It may include multiple fasteners 222, it fixes panel 224, manifold component lid 226, manifold component base portion 228 and substrate 230
Together.Fastener 222 may include the first fastener 232, the second fastener 234, the 3rd fastener 236 and the 4th fastener
238.Panel 224 may include end face 240.End face 240 can receive fastener 222.Being extended to from end face 240 in panel 224 to carry
For the first fastener hole part 242, the second fastener hole part 244, the 3rd fastener hole part 246 and the 4th fastener hole portion
Divide 248.Panel 224 may include outer surface 250 and inner surface 252.Inner surface 252 can limit inner cavity part 254 and
One internal cavities opening 255.Multiple fluid access ports 256 may be provided in panel 224, positioned at inner surface 252 and outer surface
Between 250.Each fluid access port 256 may terminate at (not shown) at the corresponding hole on the end face of panel 224.
Manifold component lid 226 may include the first fastener hole part 258, the second fastener hole part 260, the 3rd fastening
The fastener hole part 264 of part bore portion 262 and the 4th.Fastener hole part may be provided at the outer surface of manifold component lid 226
Between 266 and inner surface 268.Inner surface 268 can limit inner cavity part 270.Included in complementary manifold portion 274
Multiple fluid access ports may be provided between inner surface 268 and outer surface 266.
Manifold component base portion 228 may include the first fastener hole part 276, the second fastener hole part 278, the 3rd fastening
The fastener hole part 282 of part bore portion 280 and the 4th.The fastener hole part of manifold component base portion 228 can be positioned on manifold group
Between the outer surface 284 of part base portion 228 and inner surface 286.Inner surface 286 can limit inner cavity part 288.Outer surface 284
Multiple fluid access ports being located in complementary manifold portion 292 can also be limited between them with inner surface 286.Port is received
Hole 294 can extend from outer surface 284.
Substrate 230 may include first port 296, the port 300 of second port 298 and the 3rd.First fluid pipeline 302 can connect
It is connected in first port 296.Second fluid pipeline 304 is attached in second port 298.3rd fluid line 306 can be connected
On the 3rd port 300.Panel 230 may include main substrate part 308.Main substrate part 308 may include inner cavity part 310
And the second internal cavities opening 312.Inner bottom surface 314 can be towards manifold component base portion 228.The outside bottom surface 316 of substrate 230
It can face out in a similar manner, but it is opposite with the end face 240 of panel 224.Multiple print module component adjusting screws are received
Hole may be provided in outside bottom surface 316.These may include the first print module component adjusting screw receiver hole 318 and the second printing
Modular assembly adjusting screw receiver hole 320.Other adjusting screw receiver holes can be provided on print module component, be, for example, each
Adjusting screw provides a receiver hole.Substrate 230 may also include flange 326.Flange 326, which can be configured to for example to be connected to, to be actuated
On device, mechanical arm, rotary actuator, support member etc..Flange 326 may include that the first flange fastener receiver hole 328, second is convex
Edge fastener receiver hole 330, the flange fastener receiver hole 334 of third lip fastener receiver hole 332 and the 4th.
Fig. 4 is the bottom left perspective view of gas bearing system 220, and it is shown as assembling and positioned at print module component
Near 336.Show that the first fastener 232, the second fastener 234, the 3rd fastener 236 and the 4th fastener 238 are passed through in figure
Panel 224, manifold component lid 226, manifold component base portion 228 and substrate 230 are simultaneously fixed together by end face 240.Impression block
Block assembly 336 includes the printhead 338 positioned at its summit.Printhead 338 may include one or more transitional surfaces 340.Printing
Modular assembly 336 may include one or more print module component adjusting apparatus, such as Serial regulation screw.Fig. 4 shows
One print module component adjusting screw 342, the second print module component adjusting screw 344 and the 3rd print module component adjustment spiral shell
Nail 346.Any number of adjusting screw, such as three or four can be used.Serial regulation screw can be used for align printhead 338
θ x and θ y rotation, and/or the transitional surface 340 of printhead 338 is flushed with the end face 240 of gas bearing system 220,
Depression, it is parallel and/or extend somewhat over come.First print module component adjusting screw 342 and the adjustment of the second print module component
Screw 344 can be fixed, installed and/or be adjustably arranged in the first print module component base flange 350.3rd impression block
Block assembly adjusting screw 346 and one or more of the other print module component adjusting screw can fix, install and/or adjustably
It is arranged in the second print module base flange 352.
Print module component 336 can be using any various fasteners fixed on gas bearing system 220.In figure 3,
Show that two magnet 322 and 324 are arranged on the downside of substrate 230.Magnet 322 and 324 can be with phase on print module component 336
Corresponding magnet (not shown) alignment, or be aligned with magnetosensitive metal material, the material is one of print module component 336
Point, such as the base flange 350 and 352 shown in Fig. 4.Any number of magnet all can be used.
Internal cavities 354 can be produced by the assembling of gas bearing system 220, and it includes inner cavity part 254, inside
Cavities open 255, inner cavity part 288 (Fig. 3) and inner cavity part 310 (Fig. 3).Shown in figure and be arranged on end face
In 240, multiple holes 360 between outer surface 250 and inner surface 252.Multiple manifolds 362 are included in manifold component lid
226 and manifold component base portion 228 in.
Fig. 5 is the perspective view for the gas bearing system 220 for being inverted and being assembled with print module component 336.Print module group
Part 336 is had been placed in internal cavities 354, and utilizes the first print module component adjusting screw 342, the second print module
The print module component adjusting screw 346 of component adjusting screw 344 and the 3rd carries system to adjust print module component 336 and gas
Relative position between system 220.This form is by the first print module component base flange 350 and the second print module component base
Portion's flange 352 is pressed against on the outside bottom surface 316 of substrate 230.
Fig. 6 is the right bottom perspective view for the gas bearing system 220 and print module component 336 being under its assembled form.
Printhead 338 and transitional surface 340 are visible by the first internal cavities opening 255, and are arranged on end face 240
Multiple holes 360 are surrounded.
Fig. 7 is the perspective view of gas bearing system 220, and it is connected on actuator 364 by flange 326.Actuator 364
It may include actuator motor 366 and rotatable actuator panel 368.Flange 326 can be fixed on actuator panel 368.
Load-the lock-in feature and their methods of utilization that can be used according to the various embodiments of this religious doctrine are including for example
U.S. Patent Application Publication No.Described in US2010/0201749A1, it is fully incorporated in herein by reference.
All publications mentioned in this specification, patents and patent applicationss are all incorporated by reference herein
Herein, identical degree is specifically and individually pointed out that it passes through just as each single publication, patent or patent application
Quote and be incorporated herein.
Although having shown that herein and describing embodiment of the disclosure, those of skill in the art should understand
This embodiment is obtained to be merely possible to example to provide.Under conditions of the disclosure is not departed from, those of skill in the art
Many modifications, change and substitute will be expected now.It should be understood that the disclosure described here can be used when putting into practice the disclosure
Embodiment various alternatives.Following claims intended limitation the scope of the present disclosure, and thereby cover these rights will
The method and structure summed in its equivalent scope.