CN107245696A - A kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap - Google Patents
A kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap Download PDFInfo
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- CN107245696A CN107245696A CN201710259879.5A CN201710259879A CN107245696A CN 107245696 A CN107245696 A CN 107245696A CN 201710259879 A CN201710259879 A CN 201710259879A CN 107245696 A CN107245696 A CN 107245696A
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- screw tap
- steel alloy
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- alloy screw
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap, it is related to a kind of preparation method of alloy screw tap, determination including target, the plated film locular wall arc source position of different height and different azimuth is placed in as cathode arc source target and alternating using 2 titanium-aluminum alloy targets and 2 titanium-niobium alloy targets, the selection of steel alloy screw tap and pre-treatment, the placement of steel alloy screw tap, the determination of coating process, when coating chamber back end vacuum reaches 1 × 10‑3When handkerchief, temperature reach 240 ~ 300 DEG C, coating chamber is filled with argon gas, its pressure is reached 2 × 10‑1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes, and bombardment bias is reduced to 300 volts from 400V average rates；Reduction is biased into 120V.Present invention determine that a whole set of special coated film deposition technique, making the plating titanium aluminium niobium nitride film steel alloy screw tap of preparation has that adhesive force is strong, hardness is high, service life is long.
Description
Technical field
The present invention relates to a kind of preparation method of steel alloy screw tap, more particularly to a kind of plating titanium aluminium niobium nitride film is closed
The preparation method of golden steel wire cone.
Background technology
Multi-arc ion coating be it is a kind of provided with it is multiple can while the vacuum PVD technology in the cathode vaporation source evaporated,
With the distinguishing feature such as deposition velocity is fast, morphology is fine and close, adhesive force is strong, uniformity is good.The technology is applied to nitride film
The preparation of layer, and in TiN, (Ti, Al) N, (Ti, Cr) N, what is succeeded in terms of the preparation of layer of nitride film such as (Ti, Zr) N should
With.
And the adhesive force of hard reaction film and alloy steel matrix is poor the problem of be one universal, although in alloy steel matrix
Multicomponent nitride reaction film layer prepared by upper use multi sphere ion plating technology, adhesive force is generally capable of up to 30-70N, still difficult
The need for meeting as the wear-resisting film layer of screw tap.
As hard reaction film, hardness is undoubtedly an important indicator.The titanium nitride film hardness generally used can be
Between HV1600-2200, not only hardness number is relatively low, while fluctuation range is larger, it is difficult to ensure stability and repeatability.
The content of the invention
It is an object of the invention to provide a kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap, this method
Plating titanium aluminium niobium nitride film steel alloy screw tap is prepared using multi sphere ion plating technology, it is determined that 2 aluminum titanium alloy targets and 2 titaniums
Niobium alloy target is used as cathode arc source target；A whole set of special coated film deposition technique is determined, the plating titanium aluminium niobium of preparation is nitrogenized
Thing film steel alloy screw tap has that adhesive force is strong, hardness is high, service life is long.
The purpose of the present invention is achieved through the following technical solutions：
A kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap, methods described includes：
The determination of target, using 2 titanium-aluminum alloy targets and 2 titanium-niobium alloy targets are as cathode arc source target and are alternately placed in difference
The plated film locular wall arc source position of height and different azimuth, target purity reaches ensures 4 arcs always in 99.95%, coating process
Start while source；
The selection and pre-treatment of steel alloy screw tap, the commercial common alloy steel screw tap of selection are being put into coating chamber as plated film matrix
Carry out before plated film, using metal detergent screw tap is carried out it is conventional deoil, decontamination processing, and carry out surface fine polishing,
Finally carry out ultrasonic wave with acetone, ethanol respectively to clean, be placed in drying box in 200 DEG C of drying in case deposition；
The placement of steel alloy screw tap, keeps steel alloy screw tap to be in the cylindrical region that 4 cathode arc source targets are surrounded and rotates
On formula work rest, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches 25 centimetres, in plating
In membrane process, work rest rotation is always maintained at；
The determination of coating process, the coating process for obtaining plating titanium aluminium niobium nitride film steel alloy screw tap and using, works as coating chamber
Back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 240 ~ 300 DEG C, coating chamber is filled with argon gas, its pressure is reached 2 × 10-1
Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes, and bombardment is biased from 400V average rates
It is reduced to 300 volts；Reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in 55A constant, carry out transition zone deposition 8 ~
10 minutes；It is that 120V is constant to keep 4 arc source arc currents to be respectively placed in 55A, bias, gradually uniform reduction argon flow amount, simultaneously
Gradually it is filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×10-1Handkerchief, when 50 ~ 55 minutes, argon gas
Flow is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±0.1）×10-1Handkerchief.
A kind of preparation method of described plating titanium aluminium niobium nitride film steel alloy screw tap, the aluminium of the titanium-aluminum alloy target with
The atomic percent of titanium is 55:45.
A kind of preparation method of described plating titanium aluminium niobium nitride film steel alloy screw tap, the titanium of the titanium-niobium alloy target with
The atomic percent of niobium is 65:35.
A kind of preparation method of described plating titanium aluminium niobium nitride film steel alloy screw tap, the rotating speed of the work rest rotation
For 6 revs/min.
Advantages of the present invention is with effect：
The present invention is to provide a kind of method that use multi sphere ion plating technology prepares plating titanium aluminium niobium nitride film steel alloy screw tap.
This method determines 2 aluminum titanium alloy targets and 2 titanium-niobium alloy targets as cathode arc source target；A whole set of special plated film is determined
Depositing operation, makes the plating titanium aluminium niobium nitride film steel alloy screw tap of preparation compared with uncoated steel alloy screw tap, with attached
Put forth effort strong（≥150N）, hardness it is high（≥HV3500）, service life it is long（Improve 4-8 times）The advantages of.
Present invention determine that determining that multi-arc ion coating is used as the preparation for preparing plating titanium aluminium niobium nitride film steel alloy screw tap
Technology, it is determined that target and arc source quantity, it is determined that the selection and pre-treatment of steel alloy screw tap, it is determined that steel alloy screw tap
Modes of emplacement, it is determined that coating process, so as to ensure that the superficial film composition of plating titanium aluminium niobium nitride film steel alloy screw tap
Consecutive variations, reduce the internal stress of film layer, so as to be realized while ensure that high adhesion force, high rigidity, long life,
And with good stability.
Embodiment
With reference to embodiment, the present invention is described in detail.
The method that the use multi sphere ion plating technology that the present invention is provided prepares plating titanium aluminium niobium nitride film steel alloy screw tap
Include successively：1）The determination of deposition technique；2）Target and arc source determination of amount；3）The selection of steel alloy screw tap and preceding place
Reason；4）The placement of steel alloy screw tap； 5）The determination of coating process.
The determination of deposition technique, refers to present invention determine that multi-arc ion coating is as plating titanium aluminium niobium nitride film alloy-steel wire
The technology of preparing of cone.The determination of target, refers to using 2 titanium-aluminum alloy targets（The atomic percent of aluminium and titanium is 55:45）With 2
Titanium-niobium alloy target（The atomic percent of titanium and niobium is 65:35）As cathode arc source target and alternately it is placed in different height and difference
The plated film locular wall arc source position in orientation, target purity reaches to be ensured to open while 4 arc sources always in 99.95%, coating process
It is dynamic.The selection and pre-treatment of steel alloy screw tap, refer to select commercial common alloy steel screw tap as plated film matrix, are being put into plated film
Room is carried out before plated film, using metal detergent screw tap is carried out it is conventional deoil, decontamination processing, and carry out at surface fine polishing
Reason, finally carries out ultrasonic wave with acetone, ethanol respectively and cleans, and is placed in drying box in 200 DEG C of drying in case deposition.Steel alloy screw tap
Placement, refer to keep steel alloy screw tap to be on the cylindrical region internal rotation type work rest that 4 cathode arc source targets are surrounded,
And screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches 25 centimetres, in coating process, one
Straight to keep work rest rotation, rotating speed is 6 revs/min.The determination of coating process, refers to close to obtain plating titanium aluminium niobium nitride film
The coating process that golden steel wire is bored and used.The first step, when coating chamber back end vacuum reaches 1 × 10-3Handkerchief, temperature reach 240 ~ 300
DEG C when, coating chamber is filled with argon gas, its pressure is reached 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, arc current point
55A is not placed in, and the time is 15 minutes, and bombardment bias is reduced to 300 volts from 400V average rates；Second step, reduction is biased into 120V, protects
Holding 4 arc source arc currents, to be respectively placed in 55A constant, carries out transition zone and deposits 8 ~ 10 minutes；3rd step, keeps 4 arc source arc electricity
It is that 120V is constant that stream, which is respectively placed in 55A, bias, gradually uniform reduction argon flow amount, while being gradually filled with reacting gas N2, keep
Coating chamber vacuum exists（2.5±0.1）×10-1Handkerchief, when 50 ~ 55 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches most
Greatly, coating chamber vacuum is remained as（2.5±0.1）×10-1Handkerchief.
Embodiment 1
The preparation of plating titanium aluminium niobium nitride film 9SiCr steel alloy screw taps, its method is,
1）The determination of deposition technique, determines multi-arc ion coating as preparing plating titanium aluminium niobium nitride film 9SiCr steel alloy screw taps
Technology of preparing.
2）The determination of target, using 2 titanium-aluminum alloy targets（The atomic percent of aluminium and titanium is 55:45）Closed with 2 titanium niobiums
Gold target（The atomic percent of titanium and niobium is 65:35）It is placed in as cathode arc source target and alternately different height and different azimuth
Plated film locular wall arc source position, target purity reaches to be ensured to start while 4 arc sources always in 99.95%, coating process.
3）The selection and pre-treatment of steel alloy screw tap, selection 9SiCr steel alloys screw tap are being put into plated film as plated film matrix
Room is carried out before plated film, 9SiCr alloy-steel wire coning rows is routinely deoiled using metal detergent, decontamination processing, and carries out surface
Fine polishing, finally carries out ultrasonic wave with acetone, ethanol respectively and cleans, and is placed in drying box in 200 DEG C of drying in case deposition.
4）The placement of steel alloy screw tap, keeps 9SiCr steel alloys screw tap to be in the cylinder that 4 cathode arc source targets are surrounded
On the internal rotation type work rest of region, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches
25 centimetres, in coating process, work rest rotation is always maintained at, rotating speed is 6 revs/min.
5）The determination of coating process, refers to obtaining titanium aluminium niobium nitride plated film 9SiCr steel alloys screw tap and using
Coating process.The first step, when coating chamber back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 260 DEG C, coating chamber is filled with argon
Gas, makes its pressure reach 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 points
Clock, bombardment bias is reduced to 300 volts from 400V average rates；Second step, reduction is biased into 120V, keeps 4 arc source arc current difference
It is placed in 55A constant, carries out transition zone and deposit 8 minutes；3rd step, 4 arc source arc currents of holding are respectively placed in 55A, bias and are
120V is constant, gradually uniform reduction argon flow amount, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±
0.1）×10-1Handkerchief, when 50 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as
（2.5±0.1）×10-1Handkerchief.
The titanium aluminium niobium nitride plated film 9SiCr steel alloy screw taps prepared using the above method, hardness reaches HV3680, attachment
Power reaches 175N, and processing 45# steel nuts reach 3300,5.6 times are improved than the life-span before non-plated film.
Embodiment 2
The preparation of the steel alloy screw tap of plating titanium aluminium niobium nitride film 6542, its method is,
1）The determination of deposition technique, determines multi-arc ion coating as preparing the steel alloy screw tap of plating titanium aluminium niobium nitride film 6542
Technology of preparing.
2）The determination of target, using 2 titanium-aluminum alloy targets（The atomic percent of aluminium and titanium is 55:45）Closed with 2 titanium niobiums
Gold target（The atomic percent of titanium and niobium is 65:35）It is placed in as cathode arc source target and alternately different height and different azimuth
Plated film locular wall arc source position, target purity reaches to be ensured to start while 4 arc sources always in 99.95%, coating process.
3）The selection and pre-treatment of steel alloy screw tap, 6542 steel alloy screw taps of selection are being put into plated film as plated film matrix
Room is carried out before plated film, 6542 alloy-steel wire coning rows is routinely deoiled using metal detergent, decontamination processing, and carries out surface essence
Fine polishing is handled, and finally carrying out ultrasonic wave with acetone, ethanol respectively cleans, and is placed in drying box in 200 DEG C of drying in case deposition.
4）The placement of steel alloy screw tap, keeps 6542 steel alloy screw taps to be in the cylinder that 4 cathode arc source targets are surrounded
On the internal rotation type work rest of region, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches
25 centimetres, in coating process, work rest rotation is always maintained at, rotating speed is 6 revs/min.
5）The determination of coating process, refers to obtaining the plating that the steel alloy screw tap of titanium aluminium niobium nitride plated film 6542 is used
Membrane process.The first step, when coating chamber back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 280 DEG C, coating chamber is filled with argon gas,
Its pressure is set to reach 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes,
Bombardment bias is reduced to 300 volts from 400V average rates；Second step, reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in
55A is constant, carries out transition zone and deposits 10 minutes；3rd step, keeps 4 arc source arc currents to be respectively placed in 55A, bias as 120V not
Become, gradually uniform reduction argon flow amount, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×
10-1Handkerchief, when 55 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±
0.1）×10-1Handkerchief.
The steel alloy screw tap of titanium aluminium niobium nitride plated film 6542 prepared using the above method, hardness reaches HV3730, attachment
Power reaches 175N, and processing 45# steel nuts reach 6510,7 times are improved than the life-span before non-plated film.
Claims (4)
1. a kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap, it is characterised in that methods described includes：
The determination of target, using 2 titanium-aluminum alloy targets and 2 titanium-niobium alloy targets are as cathode arc source target and are alternately placed in difference
The plated film locular wall arc source position of height and different azimuth, target purity reaches ensures 4 arcs always in 99.95%, coating process
Start while source；
The selection and pre-treatment of steel alloy screw tap, the commercial common alloy steel screw tap of selection are being put into coating chamber as plated film matrix
Carry out before plated film, using metal detergent screw tap is carried out it is conventional deoil, decontamination processing, and carry out surface fine polishing,
Finally carry out ultrasonic wave with acetone, ethanol respectively to clean, be placed in drying box in 200 DEG C of drying in case deposition；
The placement of steel alloy screw tap, keeps steel alloy screw tap to be in the cylindrical region that 4 cathode arc source targets are surrounded and rotates
On formula work rest, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches 25 centimetres, in plating
In membrane process, work rest rotation is always maintained at；
The determination of coating process, the coating process for obtaining plating titanium aluminium niobium nitride film steel alloy screw tap and using, works as coating chamber
Back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 240 ~ 300 DEG C, coating chamber is filled with argon gas, its pressure is reached 2 ' 10-1
Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes, and bombardment is biased from 400V average rates
It is reduced to 300 volts；Reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in 55A constant, carry out transition zone deposition 8 ~
10 minutes；It is that 120V is constant to keep 4 arc source arc currents to be respectively placed in 55A, bias, gradually uniform reduction argon flow amount, simultaneously
Gradually it is filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×10-1Handkerchief, when 50 ~ 55 minutes, argon gas
Flow is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±0.1）×10-1Handkerchief.
2. a kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap according to claim 1, its feature exists
In the aluminium of the titanium-aluminum alloy target and the atomic percent of titanium are 55:45.
3. a kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap according to claim 1, its feature exists
In the titanium of the titanium-niobium alloy target and the atomic percent of niobium are 65:35.
4. a kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap according to claim 1, its feature exists
In the rotating speed of the work rest rotation is 6 revs/min.
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| CN201710259879.5A CN107245696A (en) | 2017-04-20 | 2017-04-20 | A kind of preparation method of plating titanium aluminium niobium nitride film steel alloy screw tap |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110331363A (en) * | 2019-08-19 | 2019-10-15 | 丹阳河工工具有限公司 | A kind of processing method in screw tap surface industrial titanizing |
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| CN101626861A (en) * | 2007-06-08 | 2010-01-13 | Osg株式会社 | Hard coat covers the manufacture method of screw tap and hard coat covering screw tap |
| CN103572220A (en) * | 2013-10-28 | 2014-02-12 | 沈阳大学 | Method for preparing nitrogen0gradient hard reaction membrane of titanium aluminum niobium nitride (TiAlNbN) |
| CN106011752A (en) * | 2016-07-15 | 2016-10-12 | 沈阳大学 | Preparation method of hard metal film |
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- 2017-04-20 CN CN201710259879.5A patent/CN107245696A/en active Pending
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| CN101210309A (en) * | 2006-12-30 | 2008-07-02 | 沈阳大学 | Method for preparing (TiAlZr)N ultra-hard coating by employing multiple arc ion plating |
| CN101626861A (en) * | 2007-06-08 | 2010-01-13 | Osg株式会社 | Hard coat covers the manufacture method of screw tap and hard coat covering screw tap |
| CN101230448A (en) * | 2008-01-31 | 2008-07-30 | 沈阳大学 | Method for preparing multi-arc ion plating aluminium titanium chrome silicon yttrium nitride multi-component ultra-hard reaction film |
| CN103572220A (en) * | 2013-10-28 | 2014-02-12 | 沈阳大学 | Method for preparing nitrogen0gradient hard reaction membrane of titanium aluminum niobium nitride (TiAlNbN) |
| CN106011752A (en) * | 2016-07-15 | 2016-10-12 | 沈阳大学 | Preparation method of hard metal film |
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| CN110331363A (en) * | 2019-08-19 | 2019-10-15 | 丹阳河工工具有限公司 | A kind of processing method in screw tap surface industrial titanizing |
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