CN106987801A - A kind of preparation method of titanium chromium nitride plated film steel alloy screw tap - Google Patents
A kind of preparation method of titanium chromium nitride plated film steel alloy screw tap Download PDFInfo
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- CN106987801A CN106987801A CN201710259877.6A CN201710259877A CN106987801A CN 106987801 A CN106987801 A CN 106987801A CN 201710259877 A CN201710259877 A CN 201710259877A CN 106987801 A CN106987801 A CN 106987801A
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- screw tap
- steel alloy
- plated film
- alloy screw
- arc
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
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- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
A kind of preparation method of titanium chromium nitride plated film steel alloy screw tap, is related to a kind of preparation method of metal working tools, method includes successively：1）The determination of deposition technique；2）Target and arc source determination of amount；3）The selection and pre-treatment of steel alloy screw tap；4）The placement of steel alloy screw tap；5）The determination of coating process；This method prepares titanium chromium nitride plated film steel alloy screw tap using multi sphere ion plating technology, a whole set of special coated film deposition technique is determined, make the titanium chromium nitride plated film steel alloy screw tap of preparation compared with uncoated steel alloy screw tap, with the characteristics of adhesive force is strong, hardness is high, service life is long.
Description
Technical field
The present invention relates to a kind of preparation method of metal working tools, more particularly to a kind of titanium chromium nitride plated film alloy
The preparation method of steel wire cone.
Background technology
Multi-arc ion coating be it is a kind of provided with it is multiple can while the vacuum PVD technology in the cathode vaporation source evaporated,
With the distinguishing feature such as deposition velocity is fast, morphology is fine and close, adhesive force is strong, uniformity is good.The technology is applied to nitride film
The preparation of layer, and in TiN, (Ti, Al) N, (Ti, Cr) N, what is succeeded in terms of the preparation of layer of nitride film such as (Ti, Zr) N should
With.
And the adhesive force of hard reaction film and alloy steel matrix is poor the problem of be one universal, although in alloy steel matrix
Multicomponent nitride reaction film layer prepared by upper use multi sphere ion plating technology, adhesive force is generally capable of up to 30-70N, still difficult
The need for meeting as the wear-resisting film layer of screw tap.
As hard reaction film, hardness is undoubtedly an important indicator.The titanium nitride film hardness generally used can be
Between HV1600-2200, not only hardness number is relatively low, while fluctuation range is larger, it is difficult to ensure stability and repeatability.
The content of the invention
It is an object of the invention to provide a kind of preparation method of titanium chromium nitride plated film steel alloy screw tap, this method is used
Multi sphere ion plating technology prepares titanium chromium nitride plated film steel alloy screw tap, it is determined that a whole set of special coated film deposition technique, makes
The titanium chromium nitride plated film steel alloy screw tap of preparation is compared with uncoated steel alloy screw tap, with adhesive force is strong, hardness is high, make
The characteristics of using long lifespan.
The purpose of the present invention is achieved through the following technical solutions：
A kind of preparation method of titanium chromium nitride plated film steel alloy screw tap, methods described includes following：
The determination of target, different height and not is placed in as cathode arc source target and alternately using 2 pure titanium targets and 2 pure chromium targets
With the plated film locular wall arc source position in orientation, target purity reaches while ensure 4 arc sources always in 99.95%, coating process
Start；
The selection and pre-treatment of steel alloy screw tap, the commercial common alloy steel screw tap of selection are being put into coating chamber as plated film matrix
Carry out before plated film, using metal detergent screw tap is carried out it is conventional deoil, decontamination processing, and carry out surface fine polishing,
Finally carry out ultrasonic wave with acetone, ethanol respectively to clean, be placed in drying box in 200 DEG C of drying in case deposition；
The placement of steel alloy screw tap, keeps steel alloy screw tap to be in the cylindrical region that 4 cathode arc source targets are surrounded and rotates
On formula work rest, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches 25 centimetres, in plating
In membrane process, work rest rotation is always maintained at, rotating speed is 6 revs/min；
The determination of coating process, when coating chamber back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 240 ~ 300 DEG C, by coating chamber
Argon gas is filled with, its pressure is reached 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, time
For 15 minutes, bombardment bias was reduced to 300 volts from 400V average rates；Reduction is biased into 120V, keeps 4 arc source arc currents to put respectively
It is constant in 55A, carry out transition zone and deposit 8 ~ 10 minutes；It is that 120V is constant to keep 4 arc source arc currents to be respectively placed in 55A, bias,
It is gradually uniform to reduce argon flow amount, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×10-1
Handkerchief, when 50 ~ 55 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±
0.1）×10-1Handkerchief.
Advantages of the present invention is with effect：
The present invention can obtain above-mentioned titanium chromium nitride plated film steel alloy screw tap, and the titanium chromium nitride plated film steel alloy screw tap can
Ensure high adhesion force（≥150N）, high rigidity（≥HV2800）, and have the advantages that service life is long.
Present invention determine that multi-arc ion coating is determined as the technology of preparing for preparing titanium chromium nitride plated film steel alloy screw tap,
Target and arc source quantity is determined, it is determined that the selection and pre-treatment of steel alloy screw tap, it is determined that the placement of steel alloy screw tap
Mode, it is determined that coating process, so as to ensure that the continuous change of the superficial film composition of titanium chromium nitride plated film steel alloy screw tap
Change, reduce the internal stress of film layer, so that realized while ensure that high adhesion force, high rigidity, long life, and with good
Good stability.
Embodiment
With reference to embodiment, the present invention is described in detail.
The method that the present invention prepares titanium chromium nitride plated film steel alloy screw tap using multi sphere ion plating technology includes successively：1）
The determination of deposition technique；2）Target and arc source determination of amount；3）The selection and pre-treatment of steel alloy screw tap；4）Alloy-steel wire
The placement of cone； 5）The determination of coating process.The determination of deposition technique, refers to present invention determine that multi-arc ion coating is as preparing titanium
The technology of preparing of chromium nitride plated film steel alloy screw tap.The determination of target, refers to use 2 pure titanium targets and 2 pure chromium target conducts
Cathode arc source target and the plated film locular wall arc source position for being alternately placed in different height and different azimuth, target purity reach
99.95%, ensure to start while 4 arc sources always in coating process.The selection and pre-treatment of steel alloy screw tap, refer to selection
Commercial common alloy steel screw tap before coating chamber progress plated film is put into, is entered as plated film matrix using metal detergent to screw tap
Row routine is deoiled, decontamination processing, and carries out surface fine polishing, and finally carrying out ultrasonic wave with acetone, ethanol respectively cleans,
Drying box is placed in 200 DEG C of drying in case deposition.The placement of steel alloy screw tap, refers to keep steel alloy screw tap to be in 4 negative electrodes
On the cylindrical region internal rotation type work rest that arc source target is surrounded, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap
Distance between two tips plated film locular wall reaches 25 centimetres, in coating process, is always maintained at work rest rotation, and rotating speed is 6 revs/min.Plating
The determination of membrane process, refers to obtain the coating process that titanium chromium nitride plated film steel alloy screw tap is used.The first step, works as plated film
Room back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 240 ~ 300 DEG C, coating chamber is filled with argon gas, make its pressure reach 2 ×
10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes, and bombardment is biased from 400V
Average rate is reduced to 300 volts；Second step, reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in 55A constant, carried out
Layer is crossed to deposit 8 ~ 10 minutes；3rd step, it is that 120V is constant to keep 4 arc source arc currents to be respectively placed in 55A, bias, gradually uniformly
Argon flow amount is reduced, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×10-1Handkerchief, until
At 50 ~ 55 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±0.1）×10-1
Handkerchief.
Embodiment 1
The preparation of titanium chromium nitride plated film 9SiCr steel alloy screw taps, its method is,
1）The determination of deposition technique, determines multi-arc ion coating as the system for preparing titanium chromium nitride plated film 9SiCr steel alloy screw taps
Standby technology.
2）The determination of target, using 2 pure titanium targets and 2 pure chromium targets are as cathode arc source target and are alternately placed in different height
The plated film locular wall arc source position of degree and different azimuth, target purity reaches ensures 4 arc sources always in 99.95%, coating process
While start.
3）The selection and pre-treatment of steel alloy screw tap, selection 9SiCr steel alloys screw tap are being put into plated film as plated film matrix
Room is carried out before plated film, 9SiCr alloy-steel wire coning rows is routinely deoiled using metal detergent, decontamination processing, and carries out surface
Fine polishing, finally carries out ultrasonic wave with acetone, ethanol respectively and cleans, and is placed in drying box in 200 DEG C of drying in case deposition.
4）The placement of steel alloy screw tap, keeps 9SiCr steel alloys screw tap to be in the cylinder that 4 cathode arc source targets are surrounded
On the internal rotation type work rest of region, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches
25 centimetres, in coating process, work rest rotation is always maintained at, rotating speed is 6 revs/min.
5）The determination of coating process, refers to obtaining the plating that titanium chromium nitride plated film 9SiCr steel alloy screw taps are used
Membrane process.The first step, when coating chamber back end vacuum reaches 1 × 10-3When handkerchief, temperature reach 260 DEG C, coating chamber is filled with argon gas,
Its pressure is set to reach 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes,
Bombardment bias is reduced to 300 volts from 400V average rates；Second step, reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in
55A is constant, carries out transition zone and deposits 8 minutes；3rd step, keeps 4 arc source arc currents to be respectively placed in 55A, bias as 120V not
Become, gradually uniform reduction argon flow amount, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×
10-1Handkerchief, when 50 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±
0.1）×10-1Handkerchief.
The titanium chromium nitride plated film 9SiCr steel alloy screw taps prepared using the above method, hardness reaches HV2900, processing
45# steel nuts reach 3200, and 5 times are improved than the life-span before non-plated film.
Embodiment 2：The preparation of the steel alloy screw tap of titanium chromium nitride plated film 6542
1）The determination of deposition technique, determines multi-arc ion coating as the preparation for preparing the steel alloy screw tap of titanium chromium nitride plated film 6542
Technology.
2）The determination of target, using 2 pure titanium targets and 2 pure chromium targets are as cathode arc source target and are alternately placed in different height
The plated film locular wall arc source position of degree and different azimuth, target purity reaches ensures 4 arc sources always in 99.95%, coating process
While start.
3）The selection and pre-treatment of steel alloy screw tap, 6542 steel alloy screw taps of selection are being put into plated film as plated film matrix
Room is carried out before plated film, 6542 alloy-steel wire coning rows is routinely deoiled using metal detergent, decontamination processing, and carries out surface essence
Fine polishing is handled, and finally carrying out ultrasonic wave with acetone, ethanol respectively cleans, and is placed in drying box in 200 DEG C of drying in case deposition.
4）The placement of steel alloy screw tap, keeps 6542 steel alloy screw taps to be in the cylinder that 4 cathode arc source targets are surrounded
On the internal rotation type work rest of region, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches
25 centimetres, in coating process, work rest rotation is always maintained at, rotating speed is 6 revs/min.
5）The determination of coating process, refers to obtaining the plated film that the steel alloy screw tap of titanium chromium nitride plated film 6542 is used
Technique.The first step, when coating chamber back end vacuum reaches 1 ' 10-3When handkerchief, temperature reach 280 DEG C, coating chamber is filled with argon gas, makes it
Pressure reaches 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, and arc current is respectively placed in 55A, and the time is 15 minutes, bombardment
Bias is reduced to 300 volts from 400V average rates；Second step, reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in 55A
It is constant, carry out transition zone and deposit 10 minutes；3rd step, it is that 120V is constant to keep 4 arc source arc currents to be respectively placed in 55A, bias,
It is gradually uniform to reduce argon flow amount, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×10-1
Handkerchief, when 55 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±0.1）×
10-1Handkerchief.
The steel alloy screw tap of titanium chromium nitride plated film 6542 prepared using the above method, hardness reaches HV3180, processes 45#
Steel nut reaches 4300, and 4 times are improved than the life-span before non-plated film.
Claims (1)
1. a kind of preparation method of titanium chromium nitride plated film steel alloy screw tap, it is characterised in that methods described includes following：
The determination of target, different height and not is placed in as cathode arc source target and alternately using 2 pure titanium targets and 2 pure chromium targets
With the plated film locular wall arc source position in orientation, target purity reaches while ensure 4 arc sources always in 99.95%, coating process
Start；
The selection and pre-treatment of steel alloy screw tap, the commercial common alloy steel screw tap of selection are being put into coating chamber as plated film matrix
Carry out before plated film, using metal detergent screw tap is carried out it is conventional deoil, decontamination processing, and carry out surface fine polishing,
Finally carry out ultrasonic wave with acetone, ethanol respectively to clean, be placed in drying box in 200 DEG C of drying in case deposition；
The placement of steel alloy screw tap, keeps steel alloy screw tap to be in the cylindrical region that 4 cathode arc source targets are surrounded and rotates
On formula work rest, and screw tap is kept flat, perpendicular to garden cylinder, meanwhile, screw tap distance between two tips plated film locular wall reaches 25 centimetres, in plating
In membrane process, work rest rotation is always maintained at, rotating speed is 6 revs/min；
The determination of coating process, when coating chamber back end vacuum reaches 1 ' 10-3When handkerchief, temperature reach 240 ~ 300 DEG C, coating chamber is filled
Enter argon gas, its pressure is reached 2 × 10-1Handkerchief, starts 4 arc sources, carries out Ions Bombardment, arc current is respectively placed in 55A, and the time is
15 minutes, bombardment bias was reduced to 300 volts from 400V average rates；Reduction is biased into 120V, keeps 4 arc source arc currents to be respectively placed in
55A is constant, carries out transition zone and deposits 8 ~ 10 minutes；It is that 120V is constant to keep 4 arc source arc currents to be respectively placed in 55A, bias, by
It is gradually uniform to reduce argon flow amount, while being gradually filled with reacting gas N2, keep coating chamber vacuum to exist（2.5±0.1）×10-1
Handkerchief, when 50 ~ 55 minutes, argon flow amount is reduced to 0, and nitrogen flow reaches maximum, and coating chamber vacuum is remained as（2.5±
0.1）×10-1Handkerchief.
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| CN201710259877.6A CN106987801A (en) | 2017-04-20 | 2017-04-20 | A kind of preparation method of titanium chromium nitride plated film steel alloy screw tap |
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| CN201710259877.6A CN106987801A (en) | 2017-04-20 | 2017-04-20 | A kind of preparation method of titanium chromium nitride plated film steel alloy screw tap |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110872697A (en) * | 2019-12-16 | 2020-03-10 | 广东正德材料表面科技有限公司 | Method for improving performance of multi-arc ion plating coating by Cr ion bombardment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048539A (en) * | 2016-07-15 | 2016-10-26 | 沈阳大学 | Preparation method of titanium-aluminum metal nitride composite hard film |
| CN106048525A (en) * | 2016-07-15 | 2016-10-26 | 沈阳大学 | Preparation method of titanium-chromium metal nitride composite hard film with continuous change |
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2017
- 2017-04-20 CN CN201710259877.6A patent/CN106987801A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106048539A (en) * | 2016-07-15 | 2016-10-26 | 沈阳大学 | Preparation method of titanium-aluminum metal nitride composite hard film |
| CN106048525A (en) * | 2016-07-15 | 2016-10-26 | 沈阳大学 | Preparation method of titanium-chromium metal nitride composite hard film with continuous change |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110872697A (en) * | 2019-12-16 | 2020-03-10 | 广东正德材料表面科技有限公司 | Method for improving performance of multi-arc ion plating coating by Cr ion bombardment |
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Application publication date: 20170728 |
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