CN107238954A - Sealing door device - Google Patents
Sealing door device Download PDFInfo
- Publication number
- CN107238954A CN107238954A CN201710403933.9A CN201710403933A CN107238954A CN 107238954 A CN107238954 A CN 107238954A CN 201710403933 A CN201710403933 A CN 201710403933A CN 107238954 A CN107238954 A CN 107238954A
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- Prior art keywords
- sealing door
- gear
- bevel gear
- driving screw
- substrate
- Prior art date
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- Pending
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- 238000007789 sealing Methods 0.000 title claims abstract description 107
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 230000007246 mechanism Effects 0.000 claims abstract description 16
- 230000008676 import Effects 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 22
- 230000008859 change Effects 0.000 claims description 4
- 230000007704 transition Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 7
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 238000013461 design Methods 0.000 description 5
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000006978 adaptation Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Power-Operated Mechanisms For Wings (AREA)
Abstract
The present invention provides a kind of sealing door device, closed for the substrate import and export progress to precision length measurement machine, including：One hermatic door, is attached at plane where substrate is imported and exported, and translatable to substrate import and export；And drive mechanism, include motor, gear and be connected to the drive screw at hermatic door two ends；Wherein, motor connection gear, the drive screw positioned at hermatic door at least one end is socketed on the center of gear, drives drive screw to be rotated by axle of its center line by gear so that hermatic door is moved in drive screw；Have the beneficial effect that：Integrated sealing door provided by the present invention, is attached at body surface setting, has preferably sealing effectiveness when closed, and hermatic door and driving mechanism structure are simple, are easy to unpick and wash；Cavity seal effect can be influenceed by solving the Track desigh of double-door type hermatic door, cause chamber indoor temperature unstable, and then influence the technical problem of measurement accuracy.
Description
Technical Field
The invention relates to the field of manufacturing of liquid crystal display panels, in particular to a sealing door of liquid crystal display panel measuring equipment.
Background
With the development of liquid crystal display technology toward high-end and fine direction, for LTPS (Low Temperature Poly-silicon) products, the line width of the black matrix is from 10um to 4-5 um at present, the specification requirement is increasingly fine, and the requirements of the shape accuracy and the position accuracy of the exposure mask are from 4-5 um to 1.5-2 um at present. The precision requirement on the detection equipment is higher, the line width detection precision is within 0.05um, and the precision requirement on the precision length measuring machine is within 0.3um, so that the equipment is required to be subjected to vibration prevention and precision calibration of a measuring lens, and most importantly, a measuring substrate is required to be placed in a closed constant temperature and humidity chamber, the temperature requirement on the equipment is +/-0.1 ℃, and the temperature is prevented from bringing great influence on the measurement error of the precision length measuring machine.
Usually, the temperature of a dust-free chamber is controlled to be 23 +/-0.5 ℃, during the measurement of the precision length measuring machine, a sealing door is opened, a mechanical arm conveys the glass substrate into a cavity of the precision length measuring machine, the cavity is communicated with the outside in the process, and if the sealing door is not closed tightly, the precision of the precision length measuring machine is always influenced by the change of the outside temperature.
The precision length measuring machine of the prior art for the sealing door of closed cavity is two designs of opening the door, and need set up the track on the surface of precision length measuring machine, has the gap in the track, is difficult to realize the inseparable closure to the cavity, and, sealing door is opening and the in-process of closing, two door relative motion, air flow rate accelerates between two doors, thereby the inside and outside air exchange of cavity has been accelerated, lead to the indoor temperature instability, further influence the measurement accuracy of precision length measuring machine.
Disclosure of Invention
The invention provides a sealing door device which is an integrated sealing door and can well seal a cavity of a precision length measuring machine, so that the technical problem that the track design of a double-door sealing door can influence the sealing effect of the cavity, so that the temperature in the cavity is unstable, and the measurement precision is further influenced is solved.
In order to solve the above problems, the technical scheme provided by the invention is as follows:
the invention provides a sealing door device, which is used for sealing an inlet and an outlet of a substrate of a precision length measuring machine, and is characterized by comprising the following components:
the sealing door is attached to the plane where the substrate inlet and the substrate outlet are located and can be translated to the substrate inlet and the substrate outlet; and
the driving mechanism comprises a driving motor, a gear and driving screws connected to two ends of the sealing door; wherein,
the driving motor is connected with the gear, the driving screw rod positioned at least one end of the sealing door is sleeved at the center of the gear, and the driving screw rod is driven by the gear to rotate by taking the center line of the driving screw rod as an axis, so that the sealing door moves on the driving screw rod.
According to a preferred embodiment of the present invention, the sealing door moves vertically on a plane on which the substrate access opening is located.
According to a preferred embodiment of the present invention, one end of the sealing door is screwed with a first driving screw, the other end of the sealing door is screwed with a second driving screw, the first driving screw and the second driving screw are parallel to each other, and the first driving screw and the second driving screw are both perpendicular to the bottom of the precision length measuring machine.
According to a preferred embodiment of the present invention, the output shaft of the driving motor is connected to a first gear, the first driving screw is sleeved at the center of a second gear, and the first gear is meshed with the second gear.
According to a preferred embodiment of the present invention, the first driving screw is connected to the second driving screw through a transmission mechanism; wherein
The transmission mechanism includes:
the first bevel gear is sleeved on the first driving screw rod;
a second bevel gear engaged with the first bevel gear to change a transmission direction of the first bevel gear;
the third bevel gear is sleeved on the second driving screw rod;
a fourth bevel gear meshed with the third bevel gear to drive the third bevel gear to rotate; and
and the transmission connecting rod is perpendicular to the first driving screw and the second driving screw, one end of the transmission connecting rod is connected with the second bevel gear, and the other opposite end of the transmission connecting rod is connected with the fourth bevel gear.
According to a preferred embodiment of the present invention, a first baffle is disposed at one end of the stroke of the sealing door on the plane of the inlet/outlet of the base plate, a first cushion pad is disposed inside the first baffle, a second baffle is disposed at the other end of the stroke of the sealing door, and a second cushion pad is disposed inside the second baffle.
According to a preferred embodiment of the present invention, a stop sensor is disposed on a plane where the substrate inlet and the substrate outlet are located, an identifier matched with the stop sensor is disposed on the sealing door, and the stop sensor is electrically connected to the driving mechanism.
According to a preferred embodiment of the present invention, a connection sleeve is disposed at an end of the sealing door, a thread is formed on an inner surface of the connection sleeve, and the connection sleeve is sleeved on the driving screw and is screwed with the driving screw.
According to a preferred embodiment of the present invention, an end of the sealing door facing the substrate access opening is formed with a slope facing an outside of the substrate access opening.
According to a preferred embodiment of the present invention, the junction between the inclined surface of the end of the sealing door and the outer surface of the sealing door forms a circular arc transition surface.
The invention has the beneficial effects that: compared with the existing sealing door, the integrated sealing door provided by the invention is attached to the surface of the machine body, has a better sealing effect when being sealed, and is simple in structure and convenient to disassemble and wash; the technical problem of two open door formula sealing door's track design can influence the sealed effect of cavity, lead to temperature instability in the cavity, and then influence measurement accuracy is solved.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural view of a sealing door device according to the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
The invention aims at the technical problem that the design of the track of the existing double-door type sealing door can influence the sealing effect of the chamber, so that the temperature in the chamber is unstable, and the measurement precision is further influenced.
The invention provides a sealing door device, comprising: the sealing door is used for sealing a substrate inlet and a substrate outlet of the precision length measuring machine, the substrate inlet and the substrate outlet are arranged on one side surface of the precision length measuring machine, and the substrate inlet and the substrate outlet are used for the entry and the exit of a substrate; the sealing door is attached to the plane where the substrate inlet and the substrate outlet are located, and can be attached to the plane and translated to the substrate inlet and the substrate outlet; the driving mechanism comprises a driving motor, a gear and driving screws connected to two ends of the sealing door; the driving motor is connected with the gear, the driving screw rod positioned at least one end of the sealing door is sleeved at the center of the gear, and the driving screw rod is driven to rotate by taking the central line of the driving screw rod as an axis through the gear, so that the sealing door moves on the driving screw rod.
As shown in fig. 1, the sealing door apparatus according to the embodiment of the present invention includes an integrated sealing door 101, the sealing door 101 is attached to a side surface of a precision length measuring machine 102, and a substrate access 103 is opened on a side surface of the precision length measuring machine 102 and is located on the same side of the precision length measuring machine 102 as the sealing door 101; the sealing door 101 is attached to the surface of the precision length measuring machine 102 and translates; when the substrate access 103 is opened, the sealing door 101 is translated to one end of the substrate access 103, and when the substrate access 103 needs to be closed, the sealing door 101 is translated to the area where the substrate access 103 is located and covers the substrate access 103.
The sealing door 101 is driven to translate by a driving mechanism.
The drive mechanism includes: a first driving screw 104 located at one end of the sealing door 101 and connected to the sealing door 101 through a first fixing member 105, wherein the first fixing member 105 is screwed to the first driving screw 104; a second driving screw 106, located at the opposite end of the sealing door 101, connected to the sealing door 101 through a second fixing member 107; the second fixing member 107 is screwed to the second driving screw 106; the first driving screw 104 and the second driving screw 106 are parallel to each other, and the first driving screw 104 and the second driving screw 106 are perpendicular to the bottom of the precision length measuring machine 102; for example, the first driving screw 104 and the second driving screw 106 are located outside the edge of the precision length measuring machine 102, so as to avoid the driving screws from blocking the adhesion between the sealing door 101 and the plane where the substrate access 103 is located, and for example, the first driving screw 104 and the second driving screw 106 are located on the other side of the adhesion surface of the sealing door 101, so as to also solve the adhesion problem between the sealing door 101 and the plane where the substrate access 103 is located.
The first fixing piece 105 and the second fixing piece 107 are connecting sleeves fixed at the end parts of the sealing door 101, threads are formed on the inner surfaces of the connecting sleeves, and the connecting sleeves are sleeved on the driving screw and are in threaded connection with the driving screw.
The sealing door 101 can be moved by driving at least one of the first drive screw 104 and the second drive screw 106 to rotate; the thread of its inner surface is static state, and the outside of mounting with sealing door 101 fixed connection for the thread of mounting internal surface and the thread of driving screw surface form contradicting, and when driving screw rotated, the thread of driving screw surface was transmission state, forces the mounting to move on driving screw, and rotatory with the moving direction of control mounting through control driving screw to different directions, and then realizes the switching of sealing door 101 to base plate import and export 103.
The rotation of the first drive screw 104 is driven by a drive motor, which may be a servo motor 108; further, the output shaft of the servo motor 108 is connected to a first gear, the first gear is engaged with a second gear, the first driving screw 104 penetrates through the center of the second gear and is fixedly connected with the second gear, and the second gear is far away from the substrate inlet/outlet 103; the servo motor 108 drives the first gear to rotate, and the first gear drives the second gear to rotate, so that the first driving screw 104 rotates; the first gear and the second gear are located in the first gear box 109 for fixing the positions of the first gear and the second gear.
For example, the rotation of the second driving screw 106 can also be driven by a driving motor, and the specific structure and the operation principle are the same as the driving manner of the first driving screw 104, which is not described herein again.
For another example, the second drive screw 106 is driven by the power of the first drive screw 104; the second drive screw 106 is connected with the first drive screw 104 through a transmission mechanism; wherein the transmission mechanism comprises: a first bevel gear sleeved on the first drive screw 104; a second bevel gear engaged with the first bevel gear to change a transmission direction of the first bevel gear; a third bevel gear sleeved on the second drive screw 106; a fourth bevel gear meshed with the third bevel gear to drive the third bevel gear to rotate; a transmission link 112 perpendicular to the first and second driving screws 104 and 106, one end of the transmission link 112 being connected to the second bevel gear, and the opposite end of the transmission link 112 being connected to the fourth bevel gear; the first bevel gear and the second bevel gear are located in a second gearbox 110, and are used for fixing the positions of the first bevel gear and the second bevel gear; the third bevel gear and the fourth bevel gear are located in a third gear box 111, and are used for fixing the positions of the third bevel gear and the fourth bevel gear.
When the sealing door 101 is driven to move, the servo motor 108 drives the first driving screw 104 to rotate, so that the first bevel gear sleeved on the first driving screw 104 rotates, the first bevel gear drives the second bevel gear engaged with the first bevel gear to rotate, the second bevel gear drives the transmission connecting rod 112 to rotate, meanwhile, the transmission connecting rod 112 drives the fourth bevel gear located at the other end of the transmission connecting rod to rotate, the fourth bevel gear drives the third bevel gear engaged with the fourth bevel gear to rotate, the second driving screw 106 fixedly connected with the third bevel gear rotates, and then the connecting sleeve screwed on the second driving screw 106 is driven to move, so that the first driving screw 104 is matched with the second driving screw 106 to drive the sealing door 101 to move.
A first baffle plate is arranged on the plane of the substrate inlet/outlet 103 and positioned at one end of the stroke of the sealing door 101, a first cushion pad is arranged on the inner side of the first baffle plate, a second baffle plate is arranged at the other end of the stroke of the sealing door 101, and a second cushion pad is arranged on the inner side of the second baffle plate; a buffer pad is respectively arranged at the stop ends of the sealing door 101 in two directions to protect the edge of the sealing door 101 from being hit.
A stop sensor is arranged on the plane where the substrate inlet/outlet 103 is located, an identifier matched with the stop sensor is arranged on the sealing door 101, and the stop sensor is electrically connected with the driving mechanism; therefore, when the sealing door 101 rises to a position where the substrate access 103 can be closed, the identifier on the sealing door 101 is in close contact with the stop sensor to complete adaptation, the stop sensor sends adaptation information to the control end, and the control end stops the operation of the servo motor 108; when the substrate access 103 needs to be opened, the first driving screw 104 can be driven to rotate reversely, so that the sealing door 101 is lowered to the stop point.
One end of the sealing door 101 facing the substrate access 103 is set to be a slope, and the slope faces the outside of the substrate access 103, so that the influence of the sealing door 101 on the air flow rate during the movement process is reduced by reducing the area of the end of the sealing door 101, and the exchange of air inside and outside the chamber of the precision length measuring machine 102 is slowed down, so as to stabilize the temperature in the chamber.
Preferably, the junction of the inclined plane at the end of the sealing door 101 and the outer surface of the sealing door 101 forms a circular arc transition plane, and the air transition is smooth, so as to reduce the influence of the junction of the inclined plane and the outer surface of the sealing door 101 on the air flow speed.
The beneficial effects are that: compared with the existing double-door type sealing door, the integrated sealing door provided by the invention is attached to the surface of the machine body, has a better sealing effect when sealed, and is simple in structure and convenient to disassemble and wash; the technical problem of two open door formula sealing door's track design can influence the sealed effect of cavity, lead to temperature instability in the cavity, and then influence measurement accuracy is solved.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (10)
1. The utility model provides a sealing door device for it is airtight to advance the import and export of base plate of precision length measuring machine, its characterized in that includes:
the sealing door is attached to the plane where the substrate inlet and the substrate outlet are located and can be translated to the substrate inlet and the substrate outlet; and
the driving mechanism comprises a driving motor, a gear and driving screws connected to two ends of the sealing door; wherein,
the driving motor is connected with the gear, the driving screw rod positioned at least one end of the sealing door is sleeved at the center of the gear, and the driving screw rod is driven by the gear to rotate by taking the center line of the driving screw rod as an axis, so that the sealing door moves on the driving screw rod.
2. The sealing door apparatus of claim 1, wherein said sealing door moves vertically in a plane of said substrate access opening.
3. The sealing door apparatus of claim 2, wherein one end of the sealing door is threaded with a first drive screw, the opposite end of the sealing door is threaded with a second drive screw, the first and second drive screws are parallel to each other, and the first and second drive screws are perpendicular to the bottom of the precision length measuring machine.
4. The sealing door apparatus as claimed in claim 3, wherein the output shaft of the driving motor is connected to a first gear, the first driving screw is engaged with a center of a second gear, and the first gear is engaged with the second gear.
5. The sealing door apparatus of claim 4, wherein the first drive screw is coupled to the second drive screw via a transmission mechanism;
the transmission mechanism includes:
the first bevel gear is sleeved on the first driving screw rod;
a second bevel gear engaged with the first bevel gear to change a transmission direction of the first bevel gear;
the third bevel gear is sleeved on the second driving screw rod;
a fourth bevel gear meshed with the third bevel gear to drive the third bevel gear to rotate; and
and the transmission connecting rod is perpendicular to the first driving screw and the second driving screw, one end of the transmission connecting rod is connected with the second bevel gear, and the other opposite end of the transmission connecting rod is connected with the fourth bevel gear.
6. The sealing door apparatus according to claim 1, wherein the base plate inlet/outlet is provided with a first baffle plate at one end of the sealing door stroke, a first cushion pad is provided at an inner side of the first baffle plate, a second baffle plate is provided at the other end of the sealing door stroke, and a second cushion pad is provided at an inner side of the second baffle plate.
7. The sealing door device according to claim 1, wherein a stop sensor is disposed on a plane where the substrate inlet and the substrate outlet are located, an identifier matched with the stop sensor is disposed on the sealing door, and the stop sensor is electrically connected to the driving mechanism.
8. The sealing door apparatus as claimed in claim 1, wherein a connecting sleeve is provided at an end of the sealing door, a thread is formed on an inner surface of the connecting sleeve, and the connecting sleeve is sleeved on the driving screw and is threadedly engaged with the driving screw.
9. The sealing door apparatus of claim 1, wherein an end of the sealing door facing the substrate access opening is formed with a bevel facing an exterior of the substrate access opening.
10. The sealing door apparatus of claim 9, wherein the junction of the beveled surface of the sealing door end and the outer surface of the sealing door forms a radiused transition surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710403933.9A CN107238954A (en) | 2017-06-01 | 2017-06-01 | Sealing door device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710403933.9A CN107238954A (en) | 2017-06-01 | 2017-06-01 | Sealing door device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107238954A true CN107238954A (en) | 2017-10-10 |
Family
ID=59985274
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710403933.9A Pending CN107238954A (en) | 2017-06-01 | 2017-06-01 | Sealing door device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107238954A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113367114A (en) * | 2021-07-23 | 2021-09-10 | 杨国 | Equipment for spraying pesticide on greenhouse based on agriculture |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201987455U (en) * | 2011-04-19 | 2011-09-28 | 池泽山 | Device for cleaning fixed doors and windows |
| CN202325037U (en) * | 2011-11-27 | 2012-07-11 | 张卫 | Linkage double door |
| CN203160990U (en) * | 2013-03-06 | 2013-08-28 | 天河（保定）环境工程有限公司 | Pulley door structure of denitration catalyst drying room |
| CN103656695A (en) * | 2013-12-03 | 2014-03-26 | 山东新华医疗器械股份有限公司 | Circular sterilizer lifting dish-shaped door apparatus |
| CN105549239A (en) * | 2016-03-03 | 2016-05-04 | 武汉华星光电技术有限公司 | Shielding device for precise length measuring machine |
| CN206016536U (en) * | 2016-08-31 | 2017-03-15 | 山东新华医疗器械股份有限公司 | A kind of gear drive lifts door |
-
2017
- 2017-06-01 CN CN201710403933.9A patent/CN107238954A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201987455U (en) * | 2011-04-19 | 2011-09-28 | 池泽山 | Device for cleaning fixed doors and windows |
| CN202325037U (en) * | 2011-11-27 | 2012-07-11 | 张卫 | Linkage double door |
| CN203160990U (en) * | 2013-03-06 | 2013-08-28 | 天河（保定）环境工程有限公司 | Pulley door structure of denitration catalyst drying room |
| CN103656695A (en) * | 2013-12-03 | 2014-03-26 | 山东新华医疗器械股份有限公司 | Circular sterilizer lifting dish-shaped door apparatus |
| CN105549239A (en) * | 2016-03-03 | 2016-05-04 | 武汉华星光电技术有限公司 | Shielding device for precise length measuring machine |
| CN206016536U (en) * | 2016-08-31 | 2017-03-15 | 山东新华医疗器械股份有限公司 | A kind of gear drive lifts door |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113367114A (en) * | 2021-07-23 | 2021-09-10 | 杨国 | Equipment for spraying pesticide on greenhouse based on agriculture |
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Application publication date: 20171010 |
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