CN207584139U - A kind of gate valve of adjustable flow and nano material making apparatus - Google Patents
A kind of gate valve of adjustable flow and nano material making apparatus Download PDFInfo
- Publication number
- CN207584139U CN207584139U CN201721665380.6U CN201721665380U CN207584139U CN 207584139 U CN207584139 U CN 207584139U CN 201721665380 U CN201721665380 U CN 201721665380U CN 207584139 U CN207584139 U CN 207584139U
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- Prior art keywords
- valve
- adjustable flow
- gate valve
- plate
- shaft
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Abstract
A kind of gate valve of adjustable flow, including motor, shaft coupling, shaft, leading screw, nut, valve plate, valve body and cylinder, the output shaft of the motor drives shaft to rotate by shaft coupling, the shaft is connect with leading screw, the leading screw is connect with nut thread, and the nut is fixedly connected with valve plate, and the valve plate is slideably positioned in valve body, the output terminal of the cylinder is connected with shaft, and the one end of the nut far from leading screw is located in valve plate.Any position is moved in valve body thus by motor control valve plate, cylinder carries out position and lock when valve plate is moved to the one end of valve body far from motor and pipeline is completely enclosed, it so can not only realize the closing and unlatching of pipeline, can also adjust flow, suitable for different operating modes.The utility model also provides a kind of nano material making apparatus.
Description
Technical field
The utility model is related to Material Field, the gate valve of particularly a kind of adjustable flow and nano material making apparatus.
Background technology
The mode that sputtering method makes nano material has：Magnetron sputtering, bias sputtering and reactive sputtering etc..Wherein magnetron sputtering
Principle be：Electronics collides during accelerating to fly to substrate under the action of electric field with ar atmo, ionizes out a large amount of
Argon ion and electronics, electronics fly to substrate.Argon ion accelerates to bombard target under the action of electric field, and it is former to sputter a large amount of target
Son, the target atom being in neutrality are deposited on substrate and form a film.Secondary electron is during accelerating to fly to substrate by magnetic field Lip river logical sequence
The influence of magnetic force is bound in the heating region of target surface, and plasma density is very high in the region, secondary electron
It is circled under the influence of a magnetic field around target surface.
In the manufacturing process of nano material, need to supply argon gas and cooling fluid etc..Argon gas or cooling fluid are in the duct
Break-make is controlled by gate valve.Existing gate valve can only switch in standard-sized sheet and fully closed two states, it is impossible to adjust argon gas or dissipate
The uninterrupted of hydrothermal solution.And different operating modes needs the argon gas or cooling fluid of different flow, in the prior art, in different operating modes
Lower to use different nano material making apparatus, different nano material making apparatus has the gate valve of different size.
Utility model content
In view of this, the utility model provide a kind of adjustable flow, suitable for different operating modes adjustable flow plate
Valve and nano material making apparatus, to solve the above problems.
A kind of gate valve of adjustable flow, the gate valve of the adjustable flow include motor, shaft coupling, shaft, leading screw,
Nut, valve plate, valve body and cylinder, the output shaft of the motor drive shaft to rotate by shaft coupling, the shaft and silk
Thick stick connects, and the leading screw is connect with nut thread, and the nut is fixedly connected with valve plate, and the valve plate is slideably positioned in valve body
Interior, the output terminal of the cylinder is connected with shaft, and the one end of the nut far from leading screw is located in valve plate.
Further, the motor is servo motor, is connect with external controller.
Further, the inside outer wall of the valve body is equipped with groove, and the both sides of the valve plate are respectively positioned in the groove of valve body.
Further, the shape of the valve body and valve plate is rectangle.
Further, the valve plate has the outside plate and inner panel that can be slided relatively, and the gate valve of the adjustable flow also wraps
Trigger member is included, the trigger member is connect with outside plate.
Further, the gate valve of the adjustable flow further includes slide post and spring, and the outside plate is sheathed on slide post
Upper and can be slided with respect to slide post, slide post is fixedly connected with inner panel, the spring pocket on slide post and be located at outside plate and
Between inner panel.
Further, be additionally provided with four-bar linkage structure between the outside plate and inner panel, four-bar linkage structure include first connecting rod and
The first end of second connecting rod, first connecting rod and second connecting rod is rotatablely connected with outside plate, and the second of first connecting rod and second connecting rod
End is rotatablely connected with inner panel.
The utility model also provides a kind of nano material making apparatus, and the nano material making apparatus includes as described above
Adjustable flow gate valve and pipeline, the gate valve of the adjustable flow is positioned partially in the pipeline.
Compared with prior art, the gate valve of the adjustable flow of the utility model and nano material making apparatus pass through motor
Control valve plate is moved to any position in valve body, and cylinder carries out positioning lock when valve plate is moved to the one end of valve body far from motor
Determine and pipeline is completely enclosed, so can not only realize the closing and unlatching of pipeline, can also adjust flow, suitable for different
Operating mode.
Description of the drawings
The embodiment of the utility model is described below in conjunction with attached drawing, wherein：
Fig. 1 is the front schematic view of the gate valve of the adjustable flow of the utility model embodiment.
Fig. 2 is the enlarged diagram of part A in Fig. 1.
Fig. 3 is the side schematic view of the gate valve of the adjustable flow of the utility model embodiment.
Fig. 4 is the enlarged diagram of part B in Fig. 3.
Fig. 5 is status diagram of the part B when cylinder locks in Fig. 1.
Specific embodiment
Specific embodiment of the utility model is further elaborated below based on attached drawing.It should be understood that
The explanation of the utility model embodiment is not used to herein to limit the scope of protection of the utility model.
It please refers to Fig.1, the front schematic view of the gate valve of adjustable flow provided for the utility model embodiment.It is adjustable
The gate valve of flow is positioned partially in a pipeline, realizes the break-make and flow-rate adjustment of pipeline.It is pipeline at the dotted line of label 10
Shape and gate valve sealing area.
The gate valve for the adjustable flow that the utility model embodiment provides includes motor 100, shaft coupling 200, shaft
300th, leading screw 400, nut 500, valve plate 600, valve body 700 and cylinder 800.
The output shaft of motor 100 drives shaft 300 to rotate by shaft coupling 200, and shaft 300 is connect with leading screw 400,
Leading screw 400 is threadedly coupled with nut 500, and nut 500 is fixedly connected with valve plate 600, and valve plate 600 is slideably positioned in valve body 700,
The output terminal of cylinder 800 is connected with shaft 300.The one end of nut 500 far from leading screw 400 is located in valve plate 600.
Part of the valve body 700 far from motor 100 is located in pipeline, and valve plate 600 is movable to outside pipeline or in pipeline.
Fig. 2 is please also refer to, valve plate 600 has outside plate 640 and inner panel 650.
Nut 500 has nut pedestal 510, and the both sides of nut pedestal 510 are respectively equipped with the lead parallel with leading screw 400
520, lead 520 is extend into valve plate 600, i.e., is connect across outside plate 640 and with inner panel 650.It is arranged on lead 520 slow
Spring 530 is rushed, buffer spring 530 is between outside plate 640 and inner panel 650.
In present embodiment, motor 100 is servo motor, is connect with external controller, such as PLC controller passes through
PLC controller can set the amount of spin of motor 100, so as to adjust the displacement distance of valve plate 600.
In present embodiment, valve body 700 is a rectangle frame, and inside outer wall is equipped with groove；The shape of valve plate 600 is also square
Shape, both sides are respectively positioned in the groove of valve body 700, valve body 700 towards the side of motor 100 and far from motor 100 side
It can alternatively be located in the groove of valve body 700.
The course of work of the gate valve of adjustable flow is divided into two stages：
First stage, motor 100 start, and shaft 300 and leading screw 400 are driven to rotate, leading screw 400 rotates so that nut
500 opposite axial movements of the leading screw 400 along leading screw 400, so that valve plate 600 moves in valve body 700 along the axial direction of leading screw 400
It is dynamic.
Second stage, when valve plate 600 is moved to the one end of valve body 700 far from motor 100, motor 100 is stopped,
Cylinder 800 works simultaneously, and gas is sent in valve plate 600 by cylinder 800 by shaft 300 and leading screw 400, in the work of gas
Under, valve body 700 will be expanded in thickness direction so that the both sides of valve plate 600 and the groove tight clamping fit of valve body 700 are realized
Position and lock and pipeline is completely enclosed.
It please refers to Fig.2, the gate valve of adjustable flow further includes two trigger member 610, slide post 632 and spring 634, touches
Outbox 610 is connect with outside plate 640, and outside plate 640 is sheathed on slide post 632 and can be slided with respect to slide post 632, slide post 632
It is fixedly connected with inner panel 650, spring 634 is sheathed on slide post 632 and between outside plate 640 and inner panel 650.Valve body 700
The inside of one end far from motor 100 is equipped with a raised line 710.
It please refers to Fig.4 and Fig. 5, there are gaps between outside plate 640 and inner panel 650.Between outside plate 640 and inner panel 650 also
Equipped with four-bar linkage structure, four-bar linkage structure includes first connecting rod 660 and second connecting rod 670, first connecting rod 660 and second connecting rod
670 first end is rotatablely connected with outside plate 640, the second end of first connecting rod 660 and second connecting rod 670 with 650 turns of inner panel
Dynamic connection.When cylinder 800 does not work, the angle between first connecting rod 660, second connecting rod 670 and outside plate 640 or inner panel 650 is
Acute angle.
Fig. 5 is please referred to, when valve plate 600 is moved to the one end of valve body 700 far from motor 100, motor 100 is stopped,
Cylinder 800 works simultaneously, and compressed gas is sent in valve plate 600 by cylinder 800 by shaft 300 and leading screw 400, is being compressed
Under the action of gas, push trigger member 610 and outside plate 640 that the elastic force of spring 634 is overcome to move down, until trigger member 610 is supported
Raised line 710 is touched, at this point, trigger member 610 and outside plate 640 are forced to stop movement；As the air pressure in valve plate 600 increases, due to four
Link mechanism causes inner panel 650 that can move up a certain distance with respect to outside plate 640 so that first connecting rod 660, second connecting rod
670 is vertical with inner panel 650 or outside plate 640, so that the thickness between inner panel 650 and outside plate 640 increases, so that valve
The both sides of plate 600 and the groove tight clamping fit of valve body 700 realize position and lock and pipeline are completely enclosed.
When needing to release position and lock, cylinder 800 is stopped, the compressed gas reflux in valve plate 600, pressure drop
Low, spring 634 pulls trigger member 610 and outside plate 640 to reset, and 600 thickness of valve plate reduces, so as to release position and lock.
When needing to realize flow-rate adjustment to pipeline, the gate valve of adjustable flow can only carry out the first stage, i.e.,：Motor
100 start, and shaft 300 and leading screw 400 are driven to rotate, leading screw 400 rotates so that nut 500 is with respect to leading screw 400 along leading screw
400 axial movement so that valve plate 600 in the valve body 700 along the axial movement of leading screw 400, when valve plate 600 be moved to it is pre-
If during position (i.e. partly), motor 100 is stopped.
The utility model also provides a kind of nano material making apparatus of the gate valve with above-mentioned adjustable flow.
Compared with prior art, the plate of the adjustable flow of the utility model and nano material making apparatus pass through motor
100 driving shafts 300 rotate, and shaft 300 is connect with leading screw 400, and leading screw 400 is threadedly coupled with nut 500, nut 500
It is fixedly connected with valve plate 600, the output terminal of cylinder 800 is connected with shaft 300.Motor 100 can control valve plate 600 in valve body
Any position is moved in 700, cylinder 800 is positioned when valve plate 600 is moved to the one end of valve body 700 far from motor 100
It locks and pipeline is completely enclosed, so can not only realize the closing and unlatching of pipeline, can also adjust flow, suitable for difference
Operating mode.
It these are only the preferred embodiment of the utility model, be not used to limitation the scope of protection of the utility model, it is any
Modification, equivalent replacement or improvement within the spirit of the present invention etc. are all covered in the right of the utility model.
Claims (8)
1. a kind of gate valve of adjustable flow, it is characterised in that：The gate valve of the adjustable flow includes motor, shaft coupling, one
Body axis, leading screw, nut, valve plate, valve body and cylinder, the output shaft of the motor drives shaft to rotate by shaft coupling, described
Shaft is connect with leading screw, and the leading screw is connect with nut thread, and the nut is fixedly connected with valve plate, and the valve plate slip is set
It is placed in valve body, the output terminal of the cylinder is connected with shaft, and the one end of the nut far from leading screw is located in valve plate.
2. the gate valve of adjustable flow as described in claim 1, it is characterised in that：The motor is servo motor, and outer
The controller connection in portion.
3. the gate valve of adjustable flow as described in claim 1, it is characterised in that：The inside outer wall of the valve body is equipped with recessed
Slot, the both sides of the valve plate are respectively positioned in the groove of valve body.
4. the gate valve of adjustable flow as claimed in claim 3, it is characterised in that：The shape of the valve body and valve plate is square
Shape.
5. the gate valve of adjustable flow as described in claim 1, it is characterised in that：The valve plate is outer with that opposite can slide
Plate and inner panel, the gate valve of the adjustable flow further include trigger member, and the trigger member is connect with outside plate.
6. the gate valve of adjustable flow as claimed in claim 5, it is characterised in that：The gate valve of the adjustable flow further includes
Slide post and spring, the outside plate are sheathed on slide post and can be slided with respect to slide post, and slide post is fixedly connected with inner panel, institute
Spring pocket is stated on slide post and between outside plate and inner panel.
7. the gate valve of adjustable flow as claimed in claim 5, it is characterised in that：Four are additionally provided between the outside plate and inner panel
Link mechanism, four-bar linkage structure include first connecting rod and second connecting rod, and the first end of first connecting rod and second connecting rod is and outside plate
The second end of rotation connection, first connecting rod and second connecting rod is rotatablely connected with inner panel.
8. a kind of nano material making apparatus, it is characterised in that：The nano material making apparatus includes claim 1-7 such as and appoints
The gate valve and pipeline of adjustable flow described in one, the gate valve of the adjustable flow are positioned partially in the pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721665380.6U CN207584139U (en) | 2017-12-04 | 2017-12-04 | A kind of gate valve of adjustable flow and nano material making apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721665380.6U CN207584139U (en) | 2017-12-04 | 2017-12-04 | A kind of gate valve of adjustable flow and nano material making apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207584139U true CN207584139U (en) | 2018-07-06 |
Family
ID=62735285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721665380.6U Expired - Fee Related CN207584139U (en) | 2017-12-04 | 2017-12-04 | A kind of gate valve of adjustable flow and nano material making apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207584139U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111609164A (en) * | 2020-06-12 | 2020-09-01 | 蓝晶晶 | Steel gate valve |
| CN111765261A (en) * | 2020-05-29 | 2020-10-13 | 成都中科唯实仪器有限责任公司 | Vacuum valve with locking function |
-
2017
- 2017-12-04 CN CN201721665380.6U patent/CN207584139U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111765261A (en) * | 2020-05-29 | 2020-10-13 | 成都中科唯实仪器有限责任公司 | Vacuum valve with locking function |
| CN111609164A (en) * | 2020-06-12 | 2020-09-01 | 蓝晶晶 | Steel gate valve |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180706 Termination date: 20211204 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |