CN107238620A - A kind of XRF diffraction integrated analysis instrument of rotatable sample - Google Patents
A kind of XRF diffraction integrated analysis instrument of rotatable sample Download PDFInfo
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- CN107238620A CN107238620A CN201710620594.XA CN201710620594A CN107238620A CN 107238620 A CN107238620 A CN 107238620A CN 201710620594 A CN201710620594 A CN 201710620594A CN 107238620 A CN107238620 A CN 107238620A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/205—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials using diffraction cameras
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
- G01N2223/0561—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction diffraction cameras
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/10—Different kinds of radiation or particles
- G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
- G01N2223/1016—X-ray
Abstract
The present invention provides a kind of XRF diffraction integrated analysis instrument of rotatable sample, including X-ray emitter, X-ray diffraction analysis component and fluorescent probe, also include the Double layer rotating platform that it is respectively for two layers fluorescent samples pallet and diffraction sample pallet up and down, fluorescent samples pallet is provided with some fluorescence analysis sample cells and some light holes, diffraction sample pallet is provided with passes through a swingle connected double-layer turntable with the one-to-one some diffraction analysis sample cells of some light holes, a stepper motor；X-ray diffraction analysis component includes collimation adjustment module and diffracted probe module, diffraction sample pallet is located between collimation adjustment module and diffracted probe module, fluorescent probe is located between X-ray emitter and fluorescent samples pallet, and fluorescence analysis sample cell is set towards fluorescent probe.Beneficial effects of the present invention：Integrate x-ray fluorescence analysis and X-ray diffraction analysis and can disposably accommodate several samples.
Description
Technical field
The present invention relates to X-ray analysis technical field, more particularly to a kind of XRF diffraction of rotatable sample are integrated
Analyzer.
Background technology
X-ray is that a kind of wavelength is extremely short, energy very big electromagnetic wave, when it is radiated at when object shows can be while occurring many
Effect is planted, different purposes are may be used as.Such as X-ray has stronger penetration, and this effect can be used for shooting X-ray
Piece, or for industrial flaw detection etc..
Fluorescence analysis is to send fluorescence using excitation of X-rays sample, is received by detector after fluorescence to its energy and intensity
The technology analyzed, the energy produced due to the fluorescence that different elements are excited and intensity and the close phase of type and content of element
Close, therefore qualitative and quantitative analysis can be carried out.
Diffraction analysis is, by atomic scattering, the photon of diffraction reinforcement to be obtained on some specific directions using X-ray,
The corresponding diffraction number of photons of X-ray of incidence angles degree is received by detector, the diffraction photon of this special angle is reflected
The spatial structural form of material atom, can carry out the technology based on material phase analysis, can also carry out quantitative and semi-quantitative point
Analysis.
Although fluorescence and diffraction analysis are similar in function and usage, it can not replace mutually completely each other, fluorescence analysis side
The type and content of element are overweighted, and diffraction analysis lays particular emphasis on the spatial arrangement of atom, if both, which are combined, to complete
More comprehensive and perfect analysis, possesses wider purposes.
The commercial apparatus comparative maturity independently researched and developed currently for XRF and diffraction analysis, but be provided simultaneously with glimmering
Light and the instrument of diffraction analysis function are seldom.Generally when the analysis of two kinds of difference in functionalitys of needs, user is needed respectively to difference
Equipment operated, inefficiency；And plurality of devices buying expenses is high, especially X-ray diffraction analysis equipment takes up an area body
Product is big, is unfavorable for the use of site environment.Therefore a kind of fluorescence and the equipment of diffraction analysis function of collecting has before application well
Scape and value.Conventional fluorescence, diffraction analysis instrument can only be once analyzed a kind of sample simultaneously, analyzed a kind of sample
After need artificially to change sample, when there is multiple samples to be analyzed, frequently change sample both spent time and artificial energy, again
The damage of instrument protective door is easily caused, the closed performance of instrument is influenceed.Therefore a kind of loading for accommodating several samples is needed
Device realizes that one-time pad several samples carry out the target of various analysis.
The instrument analyzed for XRF in the market and diffraction combination function is few, while conventional instrument can only
Loading sample once is analyzed once, the problem of inefficiency, and the present invention proposes a kind of rotatable Multi-example carrying apparatus, and will be glimmering
Light and diffraction analysis function are combined, and form a kind of XRF diffraction integrated analysis instrument of rotatable sample.
The content of the invention
In view of this, several samples and collection XRF can disposably be accommodated The embodiment provides one kind
With X diffraction analysis in the XRF diffraction integrated analysis instrument of the rotatable sample of one.
Embodiments of the invention provide a kind of XRF diffraction integrated analysis instrument of rotatable sample, including X-ray hair
Raw device, X-ray diffraction analysis component and fluorescent probe, in addition to its up and down two layers be respectively fluorescent samples pallet and diffraction sample
The Double layer rotating platform of product pallet, the fluorescent samples pallet divides provided with some fluorescence analysis sample cells and with some fluorescence
Analyse some light holes of the spaced setting of sample cell, the diffraction sample pallet is provided with and a pair of some light holes 1
Some diffraction analysis sample cells answered a, stepper motor connects the Double layer rotating platform to drive the bilayer by a swingle
Turntable is rotated；The X-ray diffraction analysis member parallel is adjusted in the vertical installation of X-ray light path, including collimation setting up and down
Save module and diffracted probe module, the diffraction sample pallet be located at the collimation adjustment module and the diffracted probe module it
Between, the fluorescent probe occurs perpendicular to the horizontal installation of the X-ray light path, the fluorescent probe positioned at the X-ray
Between device and the fluorescent samples pallet, the face that the fluorescence analysis sample cell places fluorescent samples is inclined plane, the inclination
Set facing to the fluorescent probe.
Further, the quantity of the fluorescence analysis sample cell and the light hole is respectively three, the fluorescence analysis sample
Position angle between product groove and the adjacent light hole is 60 °.
Further, in addition to horizontally disposed 4th installing plate, the stepper motor is installed on the 4th installing plate,
One vertical umbrella wheel is connected with the stepper motor to be stood under the driving of the stepper motor to rotation, and the swingle passes through one
The center of horizontal umbrella wheel and the 4th installing plate is installed on by a step, the horizontal umbrella wheel is consolidated with the swingle
Fixed contact, and the grinding tooth intermeshing of the vertical umbrella wheel and the horizontal umbrella wheel.
Further, in addition to horizontally disposed the second installing plate above the 4th installing plate, bearing peace
Dress seat hang on second installing plate by what four screw mandrels were fixed, and the upper end of the swingle passes through the fluorescent samples pallet
The bearing mounting base is installed on by a top chock afterwards.
Further, in addition to it is horizontally disposed be located between second installing plate and the 4th installing plate the 3rd
Installing plate, the collimation adjustment module includes micrometer displacement platform and the pin-hole collimation located at the micrometer displacement platform active face
The lower surface of the 3rd installing plate is fixed in device, the upper surface of the micrometer displacement platform, and the pinhole collimator is located at institute
The lower surface of micrometer displacement platform is stated, there is the micrometer displacement platform X to be set to release handle and with the X to release handle is vertical
The Y-direction release handle put, the X is connected to adjust the active face to release handle and the Y-direction release handle with the active face
In X upwards or, to the coordinate in vertical Y-direction, the X is each perpendicular to vertical direction to the Y-direction with the X.
Further, in addition to horizontally disposed the first installing plate above second installing plate, the X-ray
Generator is fixed on the lower surface of first installing plate by corner brace.
Further, the fluorescent probe is fixed on the lower surface of second installing plate, and positioned at the described second peace
Fill between plate and the bearing mounting base.
Further, the fluorescent samples pallet and the diffraction sample pallet pass through the lock positioned at respective upper and lower surface
Tight nut is fixed on the swingle.
Further, in addition to horizontally disposed the 5th installing plate below the 4th installing plate, the described 4th
A through hole is offered on installing plate, the diffracted probe module includes being arranged in the through hole and is held downwardly in the 5th peace
The vacuum chamber and the ccd detector in the vacuum chamber of plate are filled, the upper surface of the vacuum chamber can be passed through provided with X-ray
Beryllium window, the ccd detector is located at the underface of the beryllium window, and the bottom wall of the vacuum chamber is provided with aviation socket, the CCD
Detector is connected by the aviation socket of the bottom wall located at the vacuum chamber with system control unit.
Further, the back of the ccd detector is connected by red copper block with the bottom wall of the vacuum chamber, the vacuum
The outside of the bottom wall of chamber is provided with radiator fan.
The beneficial effect brought of technical scheme that embodiments of the invention are provided is：The X of the rotatable sample of the present invention is penetrated
Line fluorescence diffraction integrated analysis instrument, because with parallel to the vertical installation of X-ray light path the X-ray diffraction analysis component and hang down
Directly in the horizontal installation fluorescent probe of the X-ray light path, and integrate X diffraction analysis and XRF, not only side
Just the sample of different analysis demands is analyzed, and advantageously reduces analysis cost.Above and below the Double layer rotating platform
It is respectively equipped with some fluorescence analysis sample cells and some diffraction analysis sample cells two layers, by rotating the Double layer rotating platform, i.e.,
Sample in different sample cells can be analyzed, it is to avoid the wave of time and manpower caused by frequently changing sample
Take, and the loss of equipment can be reduced.
Brief description of the drawings
Fig. 1 is the stereogram of the outside of the XRF diffraction integrated analysis instrument of rotatable sample of the invention；
Fig. 2 is the stereogram of the inside of the XRF diffraction integrated analysis instrument of rotatable sample of the invention；
Fig. 3 is the outer front view of the inside of the XRF diffraction integrated analysis instrument of rotatable sample of the invention；
Fig. 4 is the stereogram of the Double layer rotating platform of the XRF diffraction integrated analysis instrument of rotatable sample of the invention；
Fig. 5 is the upward view of the micrometer displacement platform of the XRF diffraction integrated analysis instrument of rotatable sample of the invention.
Embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing to embodiment party of the present invention
Formula is further described.
Fig. 2 and Fig. 3 are refer to, The embodiment provides a kind of XRF diffraction of rotatable sample is integrated
Analyzer, for fluorescent samples and diffraction sample to be done with x-ray fluorescence analysis and X-ray diffraction analysis, including X-ray hair respectively
Raw device 3, X-ray diffraction analysis component and fluorescent probe 4, in addition to it is respectively fluorescent samples pallet 51 and spreads out for two layers up and down
Penetrate the Double layer rotating platform of sample tray 52.
Fig. 1 is refer to, there is the XRF diffraction integrated analysis instrument of rotatable sample of the present invention protection to make
Symmetrical provided with the handle puted forth effort when conveniently moving in shell, the opposite sides of the shell, the shell is hollow knot
Structure, wherein cavity are sample room, the front side of the shell provided with sample room door 1, the sample room door 1 provided with being easy to open and
Close the boss handle 11 of the sample room door.
It refer to Fig. 1 and Fig. 2, the roof and bottom wall of the housing are respectively the first installing plate 21 and the 5th installing plate 25,
The second installing plate 22, the 3rd installing plate 23 and the 4th installing plate 24, described are also sequentially provided with the sample room from top to bottom
The installing plate 25 of one installing plate 21 to the 5th is mutually parallel and horizontally disposed.
Fig. 2 and Fig. 3 are refer to, the X-ray emitter 3 is located at first installing plate 21 and second installing plate 22
Between, and be fixed on by corner brace on the lower surface of first installing plate 21, second installing plate 22 and offer a perforation
Through the upper and lower surface of second installing plate 22, the X-ray that the X-ray emitter 3 is sent is passed through from the perforation.
Refer to Fig. 2 and Fig. 3, a bearing mounting base 26 be located at second installing plate 22 and the 3rd installing plate 23 it
Between, the bearing mounting base 26 hang on second installing plate 22 by what four screw mandrels were fixed.
Fig. 2, Fig. 3 and Fig. 4 are refer to, a swingle 53 runs through the fluorescent samples pallet 51 and the diffraction sample pallet
52 central area, and the fluorescent samples pallet 51 and the diffraction sample pallet 52 are by positioned at respective upper and lower surface
Locking nut 533 is fixed on the swingle 53, so that the swingle 53 rotates, and the fluorescent samples pallet 51 and described spreads out
Penetrate the concomitant rotation of sample tray 52.
It refer to Fig. 2, Fig. 3 and Fig. 4, a stepper motor 54 is horizontal to be installed on the 4th installing plate 24, a vertical umbrella wheel
541 are connected with the stepper motor 54 to be stood under the driving of the stepper motor 54 to rotation, the lower end of the swingle 53
The 4th installing plate 24, the horizontal umbrella wheel are installed on through the center of a horizontal umbrella wheel 534 and by a step 532
534 contact with the swingle 53 fixation, so that the horizontal umbrella wheel 534 rotates, the concomitant rotation of swingle 53.And it is described
The grinding tooth intermeshing of vertical umbrella wheel 541 and the horizontal umbrella wheel 534, the horizontal umbrella wheel 534 is with the vertical umbrella wheel 541
Rotate and rotate.The upper end of the swingle 53 is installed on after passing through the fluorescent samples pallet 51 by a top chock 531
The bearing mounting base 26.
Fig. 2, Fig. 3 and Fig. 4 are refer to, the upper surface of fluorescent samples pallet 51 is provided with three fluorescence analysis sample cells 511
With three light holes 512 with the spaced setting of three fluorescence analysis sample cells 511, the fluorescence analysis sample cell
Position angle between 511 and the adjacent light hole 512 is 60 °.The diffraction sample pallet 52 is provided with three diffraction
Sample cell 521 is analyzed, three diffraction analysis sample cells 521 and the position of three light holes 512 spatially are one by one
Correspondence, X-ray can be irradiated to the diffraction analysis sample cell corresponding with the light hole 512 through the light hole 512
521.The fluorescence analysis sample cell 511 is used to place fluorescent samples, and the diffraction analysis sample cell 521 is used to place diffraction sample
Product, wherein the fluorescence analysis sample cell 512 is ladder structure of right angle, its inclined plane offers the accommodating groove for placing sample, and
The inclined plane is set towards the fluorescent probe 4.
Fig. 2 and Fig. 3 are refer to, the fluorescent samples pallet 51 is located at the bearing mounting base 26 and the 3rd installing plate
Between 23, the fluorescent probe 4 is installed perpendicular to the X-ray light path is horizontal, and the fluorescent probe 4 is located at described the
Between two installing plates 22 and the bearing mounting base 26, and the lower surface of second installing plate 22 is fixed on by corner brace, and
And surround by three fluorescence analysis sample cells 512.
The X-ray diffraction analysis member parallel is in the vertical installation of X-ray light path, including collimation adjustment mould setting up and down
Block and diffracted probe module, the diffraction sample pallet 52 be located at the collimation adjustment module and the diffracted probe module it
Between.
Fig. 5 is refer to, the collimation adjustment module includes micrometer displacement platform 61 and located at the micrometer displacement platform 61
The pinhole collimator 612 of active face 611, the micrometer displacement platform 6 has the cavity of a up/down perforation, the micrometer displacement
The lower surface of the 3rd installing plate 23 is fixed in the upper surface of platform 61, and the active face 611 is located at the micrometer displacement platform
61 lower surface and the pinhole collimator 612 are located at the lower section of the lower open end of the cavity, the micrometer displacement platform 61
With an X to release handle 614 and with the X to the vertically disposed Y-direction release handle 613 of release handle 614, the X is to release handle 614
Be connected with the Y-direction release handle 613 with the active face 611 with adjust the active face X upwards or with the X to
Coordinate in vertical Y-direction, the X is each perpendicular to vertical direction to the Y-direction.The X is adjusted to release handle and the Y-direction
Handle is micrometer structure.A mechanical shutter is provided with the upper end open of the cavity, the mechanical shutter controls single with system
Member 7 is connected, and being turned on or off for the mechanical shutter is controlled by the system control unit 7, so as to control diffraction sample
Time for exposure and exposure cycle.
It refer to and a through hole is offered on Fig. 2 and Fig. 4, the 4th installing plate 24, the diffracted probe module includes card
Located at the through hole and it is held downwardly in the vacuum chamber 62 of the 5th installing plate 25 and CCD in the vacuum chamber 62 is visited
Device is surveyed, the upper surface of the vacuum chamber 62 is provided with the beryllium window 621 that X-ray can be passed through, and the ccd detector is located at the beryllium window
621 underface, the bottom wall of the vacuum chamber 62 is provided with aviation socket, and the ccd detector passes through located at the vacuum chamber 62
The aviation socket of bottom wall be connected with the system control unit 7.The system control unit 7 connects with the stepper motor 54
Connect, to control the stepper motor 54 to rotate.In order to improve thermal diffusivity, the back of the ccd detector passes through red copper block and institute
The bottom wall connection of vacuum chamber 62 is stated, the outside of the bottom wall of the vacuum chamber is provided with radiator fan.Produced during the ccd detector work
Raw heat reaches the bottom wall of the vacuum chamber by the red copper block, and the radiator fan can accelerate the vacuum chamber 62
The radiating of bottom wall.
In use, the sample room door 1 is first turned on, in three fluorescence analysis samples of the fluorescent samples pallet 51
Three parts of same or different (being decided according to the actual requirements) fluorescent samples are placed in product groove 511, in the diffraction sample support
Three parts same or different (being decided according to the actual requirements) are placed in three diffraction analysis sample cells 521 of disk 52 to spread out
Penetrate sample；The sample room door 1 is then shut off, the X-ray emitter 3 and the system control unit 7 are opened, by described
System control unit 7 drives the vertical umbrella wheel 541 to rotate, and then drives the horizontal umbrella wheel 534 to rotate, and finally makes the rotation
Bull stick 53 is rotated, and then adjusts the fluorescence analysis sample on the fluorescent samples pallet 51 and the diffraction sample pallet 52
The position of groove 511 and the diffraction analysis sample cell 521.
To carry out x-ray fluorescence analysis, then fluorescence analysis sample cell 511 it will be rotated wherein described in one to the X-ray
In light path, it is irradiated by X-rays the fluorescent samples in the fluorescence analysis sample cell 511, now the spy of the fluorescent probe 4
Survey accommodating groove of the mouth just to the sample of the fluorescence analysis sample cell 511, the fluorescence in the accommodating groove of the sample
Secondary excitation produces fluorescent photon to sample under x-ray bombardment, and the fluorescent photon is detected by the fluorescent probe 4, institute
State fluorescent probe 4 and the optical signal detected be converted into electric signal, and by the electric signal reach the system control unit 7 with
X-ray fluorescence analysis is carried out by the system control unit 7.
To carry out X-ray diffraction analysis, then the Double layer rotating platform is rotated into 60 ° (clockwise, counterclockwise), made
Diffraction analysis sample cell 521 and the corresponding light hole 512 are rotated into the X-ray light path wherein described in one, are made
Diffraction sample in the diffraction analysis sample cell 521 is irradiated by X-rays, and now the micrometer displacement platform 61 is located at described spread out
Penetrate analysis sample cell 521 underface, as needed, the system control unit 7 by with the micrometer displacement platform 61
The coordinate of the active face 611 in the micrometer displacement platform 7 is connected and controls, to adjust the excessively described diffraction sample of x-ray bombardment
Enter the luminous flux of the ccd detector afterwards, the optical signal detected is converted into electric signal by the ccd detector, and should
Electric signal reaches the system control unit 7 to carry out X-ray diffraction analysis by the system control unit 7.
X-ray fluorescence analysis to carry out next fluorescent samples, then make the Double layer rotating platform rotate 60 ° again, with this
Analogize, by rotating the Double layer rotating platform, to carry out the correlation analysis of next sample (fluorescent samples or diffraction sample), no
Need frequently to open the sample room door 1 to change sample.
The beneficial effect brought of technical scheme that embodiments of the invention are provided is：The X of the rotatable sample of the present invention is penetrated
Line fluorescence diffraction integrated analysis instrument, because with parallel to the vertical installation of X-ray light path the X-ray diffraction analysis component and hang down
Directly in the horizontal installation fluorescent probe 4 of the X-ray light path, and integrate X diffraction analysis and XRF, not only
Conveniently to not analyzed the sample for analyzing demand or not, and advantageously reduce analysis cost.The Double layer rotating platform it is upper
Descend two layers and be respectively equipped with some fluorescence analysis sample cells 511 and some diffraction analysis sample cells 521, by rotating the double-deck rotation
Turntable, you can analyze the sample in different sample cells, it is to avoid time caused by frequently changing sample and
The waste of manpower, and the loss of equipment can be reduced.
Herein, the involved noun of locality such as forward and backward, upper and lower is to be located at parts in accompanying drawing in figure and zero
The position of part each other is intended merely to the clear of expression technology scheme and conveniently come what is defined.It should be appreciated that the noun of locality
Use should not limit the claimed scope of the application.
In the case where not conflicting, the feature in embodiment and embodiment herein-above set forth can be combined with each other.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit the invention, it is all the present invention spirit and
Within principle, any modification, equivalent substitution and improvements made etc. should be included in the scope of the protection.
Claims (10)
1. a kind of XRF diffraction integrated analysis instrument of rotatable sample, including X-ray emitter, X-ray diffraction analysis group
Part and fluorescent probe, it is characterised in that：It is respectively fluorescent samples pallet and diffraction sample pallet also including two layers above and below it
Double layer rotating platform, the fluorescent samples pallet provided with some fluorescence analysis sample cells and with some fluorescence analysis sample cells
Some light holes of spaced setting, the diffraction sample pallet is provided with some correspondingly with some light holes
Diffraction analysis sample cell a, stepper motor connects the Double layer rotating platform to drive the Double layer rotating platform to turn by a swingle
It is dynamic；The X-ray diffraction analysis member parallel is installed in X-ray light path is vertical, including collimation adjustment module setting up and down and
Diffracted probe module, the diffraction sample pallet is located between the collimation adjustment module and the diffracted probe module, described
Fluorescent probe is located at the X-ray emitter and described perpendicular to the horizontal installation of the X-ray light path, the fluorescent probe
Between fluorescent samples pallet, the face that the fluorescence analysis sample cell places fluorescent samples is inclined plane, and the inclined plane is towards institute
State fluorescent probe setting.
2. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 1, it is characterised in that：It is described glimmering
The quantity that light analyzes sample cell and the light hole is respectively three, the fluorescence analysis sample cell and the adjacent light hole it
Between position angle be 60 °.
3. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 1, it is characterised in that：Also include
Horizontally disposed 4th installing plate, the stepper motor is installed on the 4th installing plate, a vertical umbrella wheel and stepping electricity
Machine is connected to be stood under the driving of the stepper motor to rotation, and the swingle is through the center of a horizontal umbrella wheel and passes through one
Step is installed on the 4th installing plate, and the horizontal umbrella wheel is fixed with the swingle and contacted, and the vertical umbrella wheel
It is intermeshed with the grinding tooth of the horizontal umbrella wheel.
4. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 3, it is characterised in that：Also include
Horizontally disposed the second installing plate above the 4th installing plate a, bearing mounting base passes through hanging that four screw mandrels are fixed
In second installing plate, the upper end of the swingle is installed on institute after passing through the fluorescent samples pallet by a top chock
State bearing mounting base.
5. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 4, it is characterised in that：Also include
Horizontally disposed the 3rd installing plate being located between second installing plate and the 4th installing plate, the collimation adjustment module
Including micrometer displacement platform and located at the pinhole collimator of the micrometer displacement platform active face, the micrometer displacement platform it is upper
End face is fixed on the lower surface of the 3rd installing plate, and the pinhole collimator is located at the lower surface of the micrometer displacement platform,
The micrometer displacement platform has an X to release handle and with the X to the vertically disposed Y-direction release handle of release handle, and the X is to tune
Section handle and the Y-direction release handle be connected with the active face with adjust the active face X upwards or with the X to vertical
Coordinate in straight Y-direction, the X is each perpendicular to vertical direction to the Y-direction.
6. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 4, it is characterised in that：Also include
Horizontally disposed the first installing plate above second installing plate, the X-ray emitter is fixed on institute by corner brace
State the lower surface of the first installing plate.
7. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 4, it is characterised in that：It is described glimmering
Photo-detector is fixed on the lower surface of second installing plate, and positioned at second installing plate and the bearing mounting base it
Between.
8. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 3, it is characterised in that：It is described glimmering
Light sample tray and the diffraction sample pallet positioned at the locking nut of respective upper and lower surface by being fixed on the swingle.
9. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 3, it is characterised in that：Also include
A through hole is offered on horizontally disposed the 5th installing plate below the 4th installing plate, the 4th installing plate, institute
Stating diffracted probe module includes being arranged in the through hole and is held downwardly in the vacuum chamber of the 5th installing plate and positioned at described
Ccd detector in vacuum chamber, the upper surface of the vacuum chamber is provided with the beryllium window that X-ray can be passed through, the ccd detector position
In the underface of the beryllium window, the bottom wall of the vacuum chamber is provided with aviation socket, and the ccd detector passes through located at the vacuum
The aviation socket of the bottom wall of chamber is connected with system control unit.
10. the XRF diffraction integrated analysis instrument of rotatable sample as claimed in claim 9, it is characterised in that：It is described
The back of ccd detector is connected by red copper block with the bottom wall of the vacuum chamber, and the outside of the bottom wall of the vacuum chamber is provided with scattered
Hot-air fan.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108132484A (en) * | 2017-12-12 | 2018-06-08 | 中国计量科学研究院 | A kind of adjusting method of adjustable monocrystalline monochromator |
| CN108267467A (en) * | 2018-03-26 | 2018-07-10 | 中国地质大学（武汉） | A kind of portable multi-purpose X-ray analyzer |
| WO2022022115A1 (en) * | 2020-07-27 | 2022-02-03 | 上海交通大学 | Multi-physical field measurement device for metal solidification process and housing thereof, and measurement method |
| CN114935581A (en) * | 2022-07-26 | 2022-08-23 | 深圳市科誉仪器有限公司 | Automatic change intelligent integral type X ray fluorescence spectrum appearance |
| US11630095B2 (en) * | 2019-11-13 | 2023-04-18 | Monsanto Technology Llc | X-ray seed imaging system, cabinet x-ray device, and methods of evaluating seeds |
| US11673166B2 (en) | 2018-03-14 | 2023-06-13 | Monsanto Technology Llc | Seed imaging |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07128263A (en) * | 1993-11-02 | 1995-05-19 | Rigaku Ind Co | X-ray analyzing device |
| WO2007141868A1 (en) * | 2006-06-02 | 2007-12-13 | Hitachi, Ltd. | X-ray microscope and x-ray microscopic method |
| JP2008081692A (en) * | 2006-09-29 | 2008-04-10 | Toyo Ink Mfg Co Ltd | Block resin and process for producing the same |
| CN105181726A (en) * | 2015-10-19 | 2015-12-23 | 四川新先达测控技术有限公司 | Transmission-type X fluorescent device |
| CN106383134A (en) * | 2016-09-22 | 2017-02-08 | 福州大学 | Automatic sample changer for X-ray polycrystal diffractometer |
| CN207263670U (en) * | 2017-07-26 | 2018-04-20 | 中国地质大学（武汉） | A kind of x-ray fluorescence diffraction integrated analysis instrument of rotatable sample |
-
2017
- 2017-07-26 CN CN201710620594.XA patent/CN107238620B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07128263A (en) * | 1993-11-02 | 1995-05-19 | Rigaku Ind Co | X-ray analyzing device |
| WO2007141868A1 (en) * | 2006-06-02 | 2007-12-13 | Hitachi, Ltd. | X-ray microscope and x-ray microscopic method |
| JP2008081692A (en) * | 2006-09-29 | 2008-04-10 | Toyo Ink Mfg Co Ltd | Block resin and process for producing the same |
| CN105181726A (en) * | 2015-10-19 | 2015-12-23 | 四川新先达测控技术有限公司 | Transmission-type X fluorescent device |
| CN106383134A (en) * | 2016-09-22 | 2017-02-08 | 福州大学 | Automatic sample changer for X-ray polycrystal diffractometer |
| CN207263670U (en) * | 2017-07-26 | 2018-04-20 | 中国地质大学（武汉） | A kind of x-ray fluorescence diffraction integrated analysis instrument of rotatable sample |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108132484A (en) * | 2017-12-12 | 2018-06-08 | 中国计量科学研究院 | A kind of adjusting method of adjustable monocrystalline monochromator |
| US11673166B2 (en) | 2018-03-14 | 2023-06-13 | Monsanto Technology Llc | Seed imaging |
| CN108267467A (en) * | 2018-03-26 | 2018-07-10 | 中国地质大学（武汉） | A kind of portable multi-purpose X-ray analyzer |
| US11724287B2 (en) | 2018-06-11 | 2023-08-15 | Monsanto Technology Llc | Seed sorting |
| US11630095B2 (en) * | 2019-11-13 | 2023-04-18 | Monsanto Technology Llc | X-ray seed imaging system, cabinet x-ray device, and methods of evaluating seeds |
| WO2022022115A1 (en) * | 2020-07-27 | 2022-02-03 | 上海交通大学 | Multi-physical field measurement device for metal solidification process and housing thereof, and measurement method |
| CN114935581A (en) * | 2022-07-26 | 2022-08-23 | 深圳市科誉仪器有限公司 | Automatic change intelligent integral type X ray fluorescence spectrum appearance |
| CN114935581B (en) * | 2022-07-26 | 2023-01-17 | 深圳市科誉仪器有限公司 | Automatic change intelligent integral type X ray fluorescence spectrum appearance |
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