CN107234494B - 一种磁流变浮动抛光装置与方法 - Google Patents
一种磁流变浮动抛光装置与方法 Download PDFInfo
- Publication number
- CN107234494B CN107234494B CN201710556013.0A CN201710556013A CN107234494B CN 107234494 B CN107234494 B CN 107234494B CN 201710556013 A CN201710556013 A CN 201710556013A CN 107234494 B CN107234494 B CN 107234494B
- Authority
- CN
- China
- Prior art keywords
- electromagnet
- polishing
- magnetorheological fluid
- workpiece
- magnetic field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000005498 polishing Methods 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title description 9
- 239000012530 fluid Substances 0.000 claims abstract description 26
- 239000007921 spray Substances 0.000 claims abstract description 13
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 238000005507 spraying Methods 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
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CN201710556013.0A CN107234494B (zh) | 2017-06-30 | 2017-06-30 | 一种磁流变浮动抛光装置与方法 |
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CN201710556013.0A CN107234494B (zh) | 2017-06-30 | 2017-06-30 | 一种磁流变浮动抛光装置与方法 |
Publications (2)
Publication Number | Publication Date |
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CN107234494A CN107234494A (zh) | 2017-10-10 |
CN107234494B true CN107234494B (zh) | 2024-01-16 |
Family
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Family Applications (1)
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CN201710556013.0A Active CN107234494B (zh) | 2017-06-30 | 2017-06-30 | 一种磁流变浮动抛光装置与方法 |
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CN (1) | CN107234494B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107791107B (zh) * | 2017-11-16 | 2019-06-07 | 东北大学 | 一种钛合金管内壁磁流变抛光方法及装置 |
CN109249283B (zh) * | 2018-09-29 | 2019-09-27 | 大连理工大学 | 一种用于小型复杂曲面零件的浮动抛光装置及方法 |
Citations (13)
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---|---|---|---|---|
CN1222430A (zh) * | 1997-11-05 | 1999-07-14 | 阿普莱克斯公司 | 带有用于支承抛光垫的密封流体腔的抛光工具 |
US6561874B1 (en) * | 2000-11-22 | 2003-05-13 | Qed Technologies, Inc | Apparatus and method for abrasive jet finishing of deeply concave surfaces using magnetorheological fluid |
CN100999061A (zh) * | 2006-12-31 | 2007-07-18 | 广东工业大学 | 基于磁流变效应的研磨抛光方法及其抛光装置 |
CN101238552A (zh) * | 2005-08-05 | 2008-08-06 | 裴城焄 | 化学机械抛光设备 |
CN201261159Y (zh) * | 2008-10-11 | 2009-06-24 | 周海波 | 组合式弹性抛光磨头 |
CN102172866A (zh) * | 2011-02-18 | 2011-09-07 | 厦门大学 | 一种局部压力可控的平面光学元件抛光装置 |
CN103192297A (zh) * | 2012-08-24 | 2013-07-10 | 广东工业大学 | 一种单晶碳化硅晶片的化学集群磁流变复合加工方法 |
CN103273385A (zh) * | 2013-06-09 | 2013-09-04 | 湖南大学 | 一种匀强磁场的面接触磁流变平面抛光装置及方法 |
CN104191369A (zh) * | 2014-08-28 | 2014-12-10 | 广东工业大学 | 一种集群磁流变抛光垫性能测试装置及其方法 |
CN104191318A (zh) * | 2014-09-01 | 2014-12-10 | 浙江师范大学 | 一种磁流变抛光方法及抛光工具 |
CN204805404U (zh) * | 2015-03-26 | 2015-11-25 | 六盘水师范学院 | 磁流变液气液缓冲器 |
CN105619198A (zh) * | 2015-12-31 | 2016-06-01 | 肖世文 | 一种柔性瓷砖打磨机 |
CN106826522A (zh) * | 2017-03-31 | 2017-06-13 | 上海应用技术大学 | 一种新型磁流变阻尼可控高速玻璃抛光机 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6746310B2 (en) * | 2002-08-06 | 2004-06-08 | Qed Technologies, Inc. | Uniform thin films produced by magnetorheological finishing |
US6935929B2 (en) * | 2003-04-28 | 2005-08-30 | Micron Technology, Inc. | Polishing machines including under-pads and methods for mechanical and/or chemical-mechanical polishing of microfeature workpieces |
-
2017
- 2017-06-30 CN CN201710556013.0A patent/CN107234494B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1222430A (zh) * | 1997-11-05 | 1999-07-14 | 阿普莱克斯公司 | 带有用于支承抛光垫的密封流体腔的抛光工具 |
US6561874B1 (en) * | 2000-11-22 | 2003-05-13 | Qed Technologies, Inc | Apparatus and method for abrasive jet finishing of deeply concave surfaces using magnetorheological fluid |
CN101238552A (zh) * | 2005-08-05 | 2008-08-06 | 裴城焄 | 化学机械抛光设备 |
CN100999061A (zh) * | 2006-12-31 | 2007-07-18 | 广东工业大学 | 基于磁流变效应的研磨抛光方法及其抛光装置 |
CN201261159Y (zh) * | 2008-10-11 | 2009-06-24 | 周海波 | 组合式弹性抛光磨头 |
CN102172866A (zh) * | 2011-02-18 | 2011-09-07 | 厦门大学 | 一种局部压力可控的平面光学元件抛光装置 |
CN103192297A (zh) * | 2012-08-24 | 2013-07-10 | 广东工业大学 | 一种单晶碳化硅晶片的化学集群磁流变复合加工方法 |
CN103273385A (zh) * | 2013-06-09 | 2013-09-04 | 湖南大学 | 一种匀强磁场的面接触磁流变平面抛光装置及方法 |
CN104191369A (zh) * | 2014-08-28 | 2014-12-10 | 广东工业大学 | 一种集群磁流变抛光垫性能测试装置及其方法 |
CN104191318A (zh) * | 2014-09-01 | 2014-12-10 | 浙江师范大学 | 一种磁流变抛光方法及抛光工具 |
CN204805404U (zh) * | 2015-03-26 | 2015-11-25 | 六盘水师范学院 | 磁流变液气液缓冲器 |
CN105619198A (zh) * | 2015-12-31 | 2016-06-01 | 肖世文 | 一种柔性瓷砖打磨机 |
CN106826522A (zh) * | 2017-03-31 | 2017-06-13 | 上海应用技术大学 | 一种新型磁流变阻尼可控高速玻璃抛光机 |
Non-Patent Citations (1)
Title |
---|
磁流变材料测试方法与力学模型的研究进展;林锐;张永亮;刘艳勇;周渊;;材料导报(S2);全文 * |
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Inventor after: He Xinsheng Inventor after: Zheng Qiang Inventor after: Gao Chunfu Inventor after: Wang Zhishen Inventor after: Wu Ming Inventor after: Zhou Changying Inventor before: Gao Chunfu Inventor before: Zheng Qiang Inventor before: He Xinsheng Inventor before: Wang Zhishen Inventor before: Wu Ming Inventor before: Zhou Changying |
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