CN107219248A - A kind of heating box structure and application method for being used to observe piezoelectric device temperature distortion - Google Patents
A kind of heating box structure and application method for being used to observe piezoelectric device temperature distortion Download PDFInfo
- Publication number
- CN107219248A CN107219248A CN201710457956.8A CN201710457956A CN107219248A CN 107219248 A CN107219248 A CN 107219248A CN 201710457956 A CN201710457956 A CN 201710457956A CN 107219248 A CN107219248 A CN 107219248A
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- Prior art keywords
- plate
- fixed
- heater box
- heating
- piezoelectric
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
Abstract
The invention discloses a kind of heating box structure and application method for being used to observe piezoelectric device temperature distortion, device includes pedestal, it is arranged at the heater box body on pedestal, for an independent closed casing with movable upper lid, it is arranged at the piezoelectric device fixed plate on the inside of heater box body, it is arranged at the heating plate beside piezoelectric device fixed plate, heater box housing cover upper end, the laser measuring head corresponding with the printing opacity hole site that upper lid is set are arranged at, and is arranged at the intrinsic temperature-measuring module of heater box;Piezoelectric laminated beams in heater box body or device are heated by heating plate, under the insulation effect of heater box body, the vertical deformation displacement of temperature-measuring module monitoring case body temperature, laser measuring head outgoing laser beam detection piezoelectric laminated beams or device, to realize observation.
Description
Technical field
The present invention relates to a kind of heating box structure and application method for being used to observe piezoelectric device temperature distortion.
Background technology
The creativity of the mankind is continued to develop along with scientific and technical and industrial technology, is not only achieved in traditional field
Great successes, and the application value out of the ordinary equally obtained in microscopic fields.In recent years, the intelligence of ultraprecise it is micro-/receive device
Part has progressively turned into the core technology of the emerging industries such as information is stored, precision optical machinery is manufactured, accurate imaging, semiconductor equipment, because
The appearance of the SERVO CONTROL driver of this any accurate or ultraprecise will all produce huge scientific research value and economic valency
Value.
Piezoelectric, as a kind of due to the material with excellent stress-electric coupling characteristic, is often applied to intelligent device
Design.These devices are widely used in health detection, the water of many precise observations instruments, civil engineering or component structural
Collection of energy of detection and positioning, natural environment or vibration source of lower target etc..
Piezoelectric laminated structures, it is in addition special with excellent mechanical-electric coupling because preparation technology is simple, rigidity and intensity are higher
Property, gradually favored in the development and application of novel intelligent device.However, for the concrete application ring of Piezoelectric Laminated driver
The research of each field coupling under border is relatively fewer, such as research of high temperature field Laminated Piezoelectric Plates Under beam.Therefore, design a kind of available
In the heater box of observation Laminated Beams temperature distortion, for the research of stress-electric coupling characteristic of the piezoelectric laminated beams under temperature field, tool
There is very high significance of scientific research.
Traditional heater box is essentially closed, and measuring instrument can neither be placed in temperature field, can not swash detection
Light beam is accurately radiated on tested piezoelectric laminated beams or other devices, it is impossible to realize piezoelectric laminated beams or other device under tests by
The detection of thermal deformation.
The content of the invention
The present invention is in order to solve the above problems, it is proposed that a kind of heating box structure for being used to observe piezoelectric device temperature distortion
And application method, measuring instrument is placed on the outside of temperature field by the present invention, while detection laser beam to be accurately radiated to tested piezoelectricity
On Laminated Beams or device, the detection of piezoelectric laminated beams or other device under test temperature distortions can be realized.
To achieve these goals, the present invention is adopted the following technical scheme that:
A kind of heating box structure for being used to observe piezoelectric device temperature distortion, including:
Pedestal,
The heater box body on pedestal is arranged at, is an independent closed casing with movable upper lid,
The piezoelectric device fixed plate on the inside of heater box body is arranged at,
The heating plate beside piezoelectric device fixed plate is arranged at,
Heater box housing cover upper end, the laser measuring head corresponding with the printing opacity hole site that upper lid is set are arranged at,
And it is arranged at the intrinsic temperature-measuring module of heater box;
Piezoelectric laminated beams in heater box body or device are heated by heating plate, made in the insulation of heater box body
Under, temperature-measuring module monitoring case body temperature, laser measuring head outgoing laser beam detection piezoelectric laminated beams or device it is perpendicular
Straight deformation displacement, to realize observation.
Further, the heater box body includes vertical foreboard, vertical back plate, the first side plate, the second side plate and upper lid
Plate, described, vertical foreboard, the first side plate, vertical back plate and the second side plate are sequentially connected and connect, and are each perpendicular on pedestal, form square
Shape space, upper cover plate is arranged at the coffin upper end.
Further, first side plate includes fixed upper plate and fixed lower plate, and the fixed upper plate and fixed lower plate are same
When be fixed on vertical foreboard and vertical back plate.
Further, the heating plate includes two pieces, and heating plate is symmetrically solid vertically with fixed upper plate and fixed lower plate respectively
It is fixed, while thermocouple sensor is carried in heating plate, for output temperature signal.
Further, the upper cover plate is fixed on casing the top, mutually solid with vertical foreboard, vertical back plate and fixed upper plate
It is fixed, and loophole, the injection for laser measuring head laser beam are provided with upper cover plate.
Further, the temperature-measuring module is middle thermocouple, is fixed in vertical back plate, for measuring heater box
The temperature of middle part Piezoelectric anisotropy beam or device.
Further, the piezoelectric device fixed plate is arranged with backing plate, with supporting device fixed plate and the tested device of regulation
The height of part.
Further, the heater box outer body is provided with fixed support, fixed support include front and rear fixed support and
Left and right fixed support, front and rear fixed support is used to adjust laser measuring head front and back position, and left and right fixed support is used to adjust laser
Measurement head right position, common regulation fixed laser measurement head position.
It is preferred that, the laser measuring head is laser interferometer measurement head, and piezoelectric laminated beams or device can be measured in real time
Vertical deformation displacement.
Multiple insulation joint blocks are provided with the substrate.
Based on the application method of above-mentioned heating box structure, by heating plate to piezoelectric laminated beams or device in heater box body
Heated, under the insulation effect of heater box body, temperature-measuring module monitoring case body temperature, regulation laser measuring head
Angle so that its outgoing laser beam detects the vertical deformation displacement of piezoelectric laminated beams or device, to realize observation.
Compared with prior art, beneficial effects of the present invention are:
1. the present invention is heated using two pieces of vertical fixed heating plates to box house, heating plate carries thermocouple, can
For monitoring the specific heating-up temperature of heating plate, and medium temperature is by middle thermocouple monitoring.
2nd, the present invention had both ensured the thermal deformation measurement of measured device by the way of perforate above casing, ensured measurement again
Instrument is placed on heater box, it is to avoid temperature influences.
3rd, the present invention, can be by measurement essence using measuring instrument of the laser interferometer as tested piezoelectric laminated beams or device
Degree brings up to nanoscale.
4th, the present invention uses assembled casing, and part easy processing, manufacturing cost are low, interchangeability is high, are easy to secondary finishing.
Brief description of the drawings
The Figure of description for constituting the part of the application is used for providing further understanding of the present application, and the application's shows
Meaning property embodiment and its illustrate be used for explain the application, do not constitute the improper restriction to the application.
Fig. 1 is structure shaft side figure of the invention;
Fig. 2 is inside configuration view of the invention;
Wherein, 1 pedestal, 2 fix fixed support before and after lower plate, 3, and 4 fix upper plate, 5 or so fixed supports, 6 laser measurements
Head, 7 upper cover plates, the vertical ceramic tagblock of foreboard 8,9,10 middle thermocouples, 11 vertical back plates, 12 heating plates, 13 tested piezoelectricity
Laminated Beams or device, 14 piezoelectricity fixed plates, 15 backing plates.
Embodiment:
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
It is noted that described further below is all exemplary, it is intended to provide further instruction to the application.Unless another
Indicate, all technologies used herein and scientific terminology are with usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative
It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag
Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
In the present invention, term as " on ", " under ", "left", "right", "front", "rear", " vertical ", " level ", " side ",
The orientation or position relationship of instructions such as " bottoms " are based on orientation shown in the drawings or position relationship, only to facilitate describing this hair
Bright each part or component structure relation and the relative determined, not refer in particular to either component or element in the present invention, it is impossible to understand
For limitation of the present invention.
In the present invention, term such as " affixed ", " connected ", " connection " should be interpreted broadly, and expression can be fixedly connected,
Can also be integrally connected or be detachably connected;Can be joined directly together, can also be indirectly connected to by intermediary.For
The related scientific research of this area or technical staff, the concrete meaning of above-mentioned term in the present invention can be determined as the case may be,
It is not considered as limiting the invention.
As background technology is introduced, it is essentially closed to there is traditional heater box in the prior art, can neither be by
Measuring instrument is placed in temperature field, and detection laser beam can not be accurately radiated to tested piezoelectric laminated beams or other devices
On, it is impossible to the deficiency of piezoelectric laminated beams or the detection of other device under test temperature distortions is realized, in order to which the technology solved as above is asked
Measuring instrument, can be placed on the outside of temperature field, while detection laser beam is accurately radiated at tested by topic present applicant proposes one kind
Novel heating box basic structure on piezoelectric laminated beams or device.
As shown in figure 1, the present invention is internally heated using two symmetrical vertical arrangement heating plates to casing.
Vertical foreboard 8 and vertical back plate 11 by bolt distinguish vertical fixation with pedestal 1, fixed lower plate 2 and it is fixed on
Plate 4 is fixedly connected with vertical foreboard 8 and vertical back plate 11 simultaneously, upper cover plate 7 in casing the top, by bolt and fixed upper plate 4,
Vertical foreboard 8 and vertical back plate 11 are fixedly connected with.
Front and rear fixed support 3 is secured by bolts on pedestal 1, and left and right fixed support 5 is also by bolt and front and rear fixation
Support 3 is fixedly connected with, and common to adjust the position all around of laser measuring head 6, it is fixed that laser measuring head 6 is secured by bolts in left and right
On support 5.
Ceramic tagblock 9 is secured by bolts on pedestal 1, for connecting heating plate and thermocouple wire.
As shown in Fig. 2 the interior views of the heating box structure provided by the present invention for observation piezoelectric device temperature distortion.
Heating plate 12 is fixed between fixed upper plate 4 and fixed lower plate 2.
Backing plate 15 is fixed on pedestal 1, and device (piezoelectricity) fixed plate 14 is fixed on the top of backing plate 15, for fixing 13 piezoelectricity
Laminated Beams or device.
The present invention is by being individually fixed in fixed upper plate and fixing two pieces of vertical heating plates of lower plate, to piezoelectric layer in casing
Close beam or device is heated, middle thermocouple monitoring case body temperature, and the laser beam detection projected using laser measuring head
The vertical deformation displacement of piezoelectric laminated beams or device.Measuring instrument can not be placed in temperature field so as to solve traditional heating case
In, detection laser beam can not be accurately radiated to the deficiency on tested piezoelectric laminated beams or other devices.And use upper lid
Plate perforate, by the use of laser interferometer as the measuring instrument of tested piezoelectric laminated beams or device, can bring up to measurement accuracy
Nanoscale.Overall heater box uses assembled, and part easy processing, manufacturing cost are low, interchangeability is high.
The preferred embodiment of the application is the foregoing is only, the application is not limited to, for the skill of this area
For art personnel, the application can have various modifications and variations.It is all within spirit herein and principle, made any repair
Change, equivalent substitution, improvement etc., should be included within the protection domain of the application.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, not to present invention protection model
The limitation enclosed, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not
Need to pay various modifications or deform still within protection scope of the present invention that creative work can make.
Claims (10)
1. a kind of heating box structure for being used to observe piezoelectric device temperature distortion, it is characterized in that:Including:
Pedestal,
The heater box body on pedestal is arranged at, is an independent closed casing with movable upper lid,
The piezoelectric device fixed plate on the inside of heater box body is arranged at,
The heating plate beside piezoelectric device fixed plate is arranged at,
Heater box housing cover upper end, the laser measuring head corresponding with the printing opacity hole site that upper lid is set are arranged at,
And it is arranged at the intrinsic temperature-measuring module of heater box;
Piezoelectric laminated beams in heater box body or device are heated by heating plate, in the insulation effect of heater box body
Under, temperature-measuring module monitoring case body temperature, laser measuring head outgoing laser beam detection piezoelectric laminated beams or device it is vertical
Deformation displacement, to realize observation.
2. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Heater box body includes vertical foreboard, vertical back plate, the first side plate, the second side plate and upper cover plate, described, vertical foreboard, first
Side plate, vertical back plate and the second side plate are sequentially connected and connect, and are each perpendicular on pedestal, form coffin, and upper cover plate is arranged at this
Coffin upper end.
3. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
First side plate includes fixed upper plate and fixed lower plate, and the fixed upper plate and fixed lower plate are fixed on vertical foreboard and vertical simultaneously
In back plate.
4. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Heating plate includes two pieces, and heating plate is symmetrically fixed vertically with fixed upper plate and fixed lower plate respectively, while carrying heat in heating plate
Thermocouple sensor, for output temperature signal.
5. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Temperature-measuring module is middle thermocouple, is fixed in vertical back plate, for measuring Piezoelectric anisotropy beam or device in the middle part of heater box
Temperature.
6. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Piezoelectric device fixed plate is arranged with backing plate, with supporting device fixed plate and adjusts the height of measured device.
7. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Heater box outer body is provided with fixed support, and fixed support includes front and rear fixed support and left and right fixed support, front and rear fixation
Support is used to adjust laser measuring head front and back position, and left and right fixed support is used to adjust laser measuring head right position, common to adjust
Save fixed laser measurement head position.
8. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Laser measuring head is laser interferometer measurement head, and the vertical deformation displacement of piezoelectric laminated beams or device can be measured in real time.
9. a kind of heating box structure for being used to observe piezoelectric device temperature distortion as claimed in claim 1, it is characterized in that:It is described
Multiple insulation joint blocks are provided with substrate.
10. based on the application method of the heating box structure any one of claim 1-9, it is characterized in that:Pass through heating plate
Piezoelectric laminated beams in heater box body or device are heated, under the insulation effect of heater box body, temperature-measuring module
Monitoring case body temperature, adjusts the angle of laser measuring head so that its outgoing laser beam detects the perpendicular of piezoelectric laminated beams or device
Straight deformation displacement, to realize observation.
Priority Applications (1)
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CN201710457956.8A CN107219248A (en) | 2017-06-16 | 2017-06-16 | A kind of heating box structure and application method for being used to observe piezoelectric device temperature distortion |
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CN201710457956.8A CN107219248A (en) | 2017-06-16 | 2017-06-16 | A kind of heating box structure and application method for being used to observe piezoelectric device temperature distortion |
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Citations (9)
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US4924477A (en) * | 1989-01-24 | 1990-05-08 | Eastman Kodak Company | Assembly and method for determining the coefficient of thermal expansion of a workpiece |
JP2003302358A (en) * | 2002-04-09 | 2003-10-24 | Mitsubishi Electric Corp | Apparatus for measuring coefficient of linear expansion |
CN1936558A (en) * | 2005-09-22 | 2007-03-28 | 富士康(昆山)电脑接插件有限公司 | Thermal-deformation detection apparatus |
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CN102890097A (en) * | 2012-10-31 | 2013-01-23 | 上海交通大学 | System and method for detecting thermal deformation of precision forging die |
CN103257152A (en) * | 2012-02-21 | 2013-08-21 | 中国科学院金属研究所 | Small-size solid sample thermal expansion measuring device |
CN204881543U (en) * | 2015-05-26 | 2015-12-16 | 温州亚大双金属元件有限公司 | Crooked test equipment of metal |
CN105717154A (en) * | 2016-05-05 | 2016-06-29 | 东旭科技集团有限公司 | Device and method for measuring shrinking percentage of panels |
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2017
- 2017-06-16 CN CN201710457956.8A patent/CN107219248A/en active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
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US4924477A (en) * | 1989-01-24 | 1990-05-08 | Eastman Kodak Company | Assembly and method for determining the coefficient of thermal expansion of a workpiece |
JP2003302358A (en) * | 2002-04-09 | 2003-10-24 | Mitsubishi Electric Corp | Apparatus for measuring coefficient of linear expansion |
CN1936558A (en) * | 2005-09-22 | 2007-03-28 | 富士康(昆山)电脑接插件有限公司 | Thermal-deformation detection apparatus |
CN101063603A (en) * | 2006-04-24 | 2007-10-31 | 贝尔-热分析有限公司 | Furnace for performing dilatometric assays |
CN201141843Y (en) * | 2007-10-23 | 2008-10-29 | 北京科技大学 | Double-beam laser interferometry instrument for material heat expansibility |
CN103257152A (en) * | 2012-02-21 | 2013-08-21 | 中国科学院金属研究所 | Small-size solid sample thermal expansion measuring device |
CN102890097A (en) * | 2012-10-31 | 2013-01-23 | 上海交通大学 | System and method for detecting thermal deformation of precision forging die |
CN204881543U (en) * | 2015-05-26 | 2015-12-16 | 温州亚大双金属元件有限公司 | Crooked test equipment of metal |
CN105717154A (en) * | 2016-05-05 | 2016-06-29 | 东旭科技集团有限公司 | Device and method for measuring shrinking percentage of panels |
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