CN107209150A - MS nitrogen safety supply monitor and nitrogen generating means - Google Patents
MS nitrogen safety supply monitor and nitrogen generating means Download PDFInfo
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- CN107209150A CN107209150A CN201580074151.4A CN201580074151A CN107209150A CN 107209150 A CN107209150 A CN 107209150A CN 201580074151 A CN201580074151 A CN 201580074151A CN 107209150 A CN107209150 A CN 107209150A
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- nitrogen
- water
- compressed air
- gas
- stop valve
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/04—Purification or separation of nitrogen
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
- G01N27/622—Ion mobility spectrometry
- G01N27/623—Ion mobility spectrometry combined with mass spectrometry
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- Spectroscopy & Molecular Physics (AREA)
- Molecular Biology (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
- Sampling And Sample Adjustment (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
MS nitrogen safety supply monitors are provided between compressed air maker and nitrogen separation device.The nitrogen discharged from nitrogen separation device is fed into the analytical equipments such as mass analyzer.MS nitrogen safety supply monitors have：Gas introduction port；Gas discharge outlet；Pipe arrangement, it links the gas introduction port and the gas discharge outlet；Stop valve, it is arranged on the midway of the pipe arrangement；Water filter, it is arranged at the midway of the pipe arrangement, and the moisture of the gas to being flowed in the pipe arrangement is filtered；Water sensor, it is detected to the water filtered out by the water filter；And control unit, it closes the stop valve when detecting water outlet by the sensor.The control unit can also be recorded to the date-time for closing the stop valve.MS nitrogen safety supplies monitor can also have notification unit, and the notification unit is notified the situation that the stop valve is closed by the control unit.
Description
Technical field
The present invention relates to MS (Mass Spectrometry：Mass spectrography) generated with nitrogen safety supply monitor and nitrogen
Device.
Background technology
In the past, for example as disclosed in Japanese Unexamined Patent Publication 2015-024408 publications, be known to compressor and
The gas generating device of gas separation membrane.In Japanese Unexamined Patent Publication 2003-159517 publications, show as one of gas separation membrane
Example records hollow fiber separating film module.Also, in Japanese Unexamined Patent Publication 2012-232281 publications, describe and be related to and will flow
The technology of the filter for installation of the removals such as the dust contained in body, especially in the 0114th section, describes following content：By
Moisture after filter separation accumulates in inner housing bottom and formed after the inner housing inner circumferential along filter is moved downwards
For condensed water.Also there is the record of similar filter for installation in Japanese Unexamined Patent Publication 2008-188489 publications.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2015-024408 publications
Patent document 2：Japanese Unexamined Patent Publication 2003-159517 publications
Patent document 3：Japanese Unexamined Patent Publication 2012-232281 publications
Patent document 4：Japanese Unexamined Patent Publication 2008-188489 publications
The content of the invention
Invent problem to be solved
After compressor is by the gas compression containing moisture, the pressure high temperature hot gas that is compressed by cooling down and produce condensation
Water.Condensed water is to become the product for turning to the water as liquid as the steam of gas., can as the countermeasure for isolating condensed water
The water filter of the function of moisture with filtering compressed air is arranged between compressor and gas separation membrane etc..However,
In the case of just in case water filter breaks down, it should which removed water especially water droplet can flow to the downstream of water filter
Go out.Preferably not such moisture reaches gas separation membrane, and preferably not such moisture is reached and is located under gas separation membrane
Analysis meter of trip etc..
One of object apparatus that will be such as the present application person the problem of associates and attentively worked out, with nitrogen
Gas generating means.Because nitrogen as inert gas carrys out function, therefore, it is possible to be directed to various analysis meters examples
Such as mass analyzer.Mass analyzer is known as Mass Spectrometry instrument, is also referred to as " MS ".Institute
It is required that nitrogen quality it is different according to the species of analysis meter etc., also have strict limit to nitrogen concentration and amount of moisture etc. sometimes
System.If nitrogen generating means with require that the analysis meter of high-quality drying nitrogen is connected in the case of, it would be desirable that prevent in nitrogen
Moisture containing a wee bit especially drop water in the nitrogen that gas generating means are discharged.Therefore, the present application person to how
The aspect away from the condensed water associated with the compressed gas of compressor such as protective gas seperation film or analysis meter attentively grind
Study carefully.
The present invention completes to solve problem as described above, being capable of protective gas separation its object is to provide
MS the nitrogen safety supply monitor and nitrogen generating means away from runny gas such as film or analysis meter.
Means for solving the problems
The MS nitrogen safety supply monitors of the present invention have:Gas introduction port；Gas discharge outlet；Pipe arrangement, it is by institute
State gas introduction port and the gas discharge outlet links；Stop valve, it is arranged on the midway of the pipe arrangement；Water filter, it sets
Put in the midway of the pipe arrangement, the moisture of the gas to being flowed in the pipe arrangement is filtered；Water sensor, it is to by described
The water that water filter is filtered out is detected；And control unit, it is detecting more than predetermined amount by the water sensor
Water when close the stop valve.
The control unit can also be recorded to the date-time for closing the stop valve.The MS is supplied safely with nitrogen
Can also have a case that to closing the notification unit that the stop valve notify by the control unit to monitor.It is described
Notification unit can also be the luminescence unit for carrying out visual notification, the phonation unit for carrying out audible notification etc..The notification unit
It is connected with the control unit, the control unit makes notification unit work when closing the stop valve.
The control unit can also be recorded to the date-time that power supply disconnects.In MS nitrogen safety supply monitors
In be provided with receive operation power switch.When being switched by operation power and switch on power, execution system startup processing, this
When previously generate program so as to by this system start processing time execution date be stored in the memory in control unit.This
Sample, the historical information that the control unit can also disconnect to power on is that system either on or off historical information is recorded.
The MS nitrogen safety supply monitor can also have：Pressure sensor, it is arranged at the pipe arrangement；Humidity
Sensor, it is arranged at the pipe arrangement；And temperature sensor, its atmosphere temperature to MS nitrogen safety supply monitors enters
Row measurement.The control unit often can also record the pressure sensor, the humidity sensor and institute by the scheduled time
State the respective sensor output value of temperature sensor.Thus, above-mentioned MS nitrogen safety supply monitor can also be as " number
According to tape deck " and the device of function.
The MS also has the potentiometer measured to supply voltage, the control unit with nitrogen safety supply monitor
It can also be every structure just recorded by the predetermined time to the measured value of the potentiometer.
As a specific example, the control unit can also include input/output interface (I/OIF), arithmetic processing apparatus
(CPU), memory and timer.The control unit can also perform the startup date-time and time end date to system
The program stored.
The control unit can also perform control process, and the control process has：1st step, Startup time is recorded
In the memory；Second step, opens the stop valve；Third step, is determined whether by the measurement of the timer
The predetermined stipulated time is have passed through from the baseline moment, is made in the case where not being judged to have passed through the defined time
Processing is standby until by the defined time；4th step, it is defeated in the case where being judged to have passed through the defined time
Enter sensor output signal and record in the memory；Whether the 5th step, to detecting water and judging, do not examining
The power supply for making processing jump to the 8th step described later in the case of measuring water, which disconnects, to be judged；6th step, is detecting the situation of water
It is lower to close the stop valve；7th step, is notified by making notification unit work；8th step, to the presence or absence of power supply
Opening operation is judged, processing cycle is entered to the process to the defined time in the case of in the absence of power supply opening operation
The third step that row judges；And the 9th step, the stop valve is remained in the case where there is power supply opening operation
Closed mode and time end date is stored.
Nitrogen generating means of the present invention have：Compressed air maker, it has：Air intake；Compressor,
It generates compressed air by the air imported from the air intake；Gas cooler, its compression to the compressor is empty
Gas is cooled down；And first water filter, its to being cooled down by the gas cooler after the moisture of compressed air carry out
Filtering, the compressed air maker discharges the compressed air that moisture has been filtered by first water filter；Nitrogen point
From device, it has：Nitrogen seperation film, it generates nitrogen by the compressed air generated by the compressed air maker；And nitrogen goes out
Mouthful, it is used to discharge the nitrogen isolated by the nitrogen seperation film；Stop valve, its be arranged on the compressed air maker with
Between the nitrogen separation device or the nitrogen separation device the nitrogen exit；Second water filter, it is arranged on the pressure
Between contracting air generator and the nitrogen separation device or the nitrogen separation device the nitrogen exit；Water sensor, its is right
The water filtered out by second water filter is detected；And control unit, it is detected by the water sensor
The stop valve is closed during more than predetermined amount water.
The stop valve can also be arranged on the midway of the gas path between the water filter and the compressor.Institute
State the midway for the gas path that stop valve can also be arranged between the nitrogen seperation film and the water filter.The stop valve
It can also be arranged between nitrogen outlet and nitrogen seperation film.
Various changes are contemplated in the construction of the stop valve.Magnetic valve, motor-driven valve can also for example be used
Or hydraulic valve.
Various changes are contemplated in the construction of the water filter.As an example, it can also include：Cylinder
Shape housing, it is made up of translucent material and two ends are blocked；Two openings, they are arranged on the side of the tubular shell；With
And filter membrane (diaphragm element), it collects the moisture of gas when gas is by the two open flows in tubular shell.
Various changes are contemplated in the construction and detection mode of the water sensor.It can convert in public affairs
The technology used in the various moisture meters known, the various moisture meters that can also have converted practical.For example, it may be utilizing electricity
Detection mode or the detection mode using light.
As an example, the compressed air maker can also have the storage connected with the discharge opening of the compressor
Gas container and the first air cleaner connected with the air container.The compressed air of first air cleaner is passed through
It is flowed into the gas cooler.Also, active carbon filter can also be set in the position than the first water filter downstream
With micro mist filter.Also, it can also set in the pressure of the discharge opening side of the compressor specifically air container
The pressure sensor that pressure is detected.The pressure in the discharge opening side of the compressor, which can also be provided for, becomes abnormal high
When work and bleed off the safety valve of compressed gas.As preferred mode, if the pressure in air container reach it is predetermined upper
Limit value, then can also the compressor be automatically stopped operating.
Invention effect
By by the present invention MS with nitrogen safety supply monitor between compressed air maker and nitrogen seperation film
Or between nitrogen seperation film and analytical equipment, it is possible to increase the water security of analytical equipment etc..When the detection in compressed air
When going out the drop water more than a certain amount of, valve can be closed and close pipe arrangement.It can prevent from being connected down with gas discharge outlet
The nitrogen seperation film of trip side breaks down because of the harmful effect of water.
According to the nitrogen generating means of the present invention, water filter and water sensor can be made between the pressure of generation compressed air
Between contracting machine and nitrogen seperation film.When detecting the drop water more than a certain amount of in compressed air, can shutoff valve and cut off
Gas circulates.As a result, can prevent from expecting the harmful effect by water such as analytical equipment of nitrogen from nitrogen outlet.For example
When the downstream connection of the arrival of drop water and nitrogen seperation film should receive analytical equipment of high-purity nitrogen etc., it may cause
Action is bad, but can prevent such situation.
Brief description of the drawings
Fig. 1 is MS the nitrogen safety supply monitor and the frame of nitrogen generating means for showing embodiments of the present invention
Figure.
Fig. 2 is the MS perspective views above nitrogen safety supply monitor for showing embodiments of the present invention.
Fig. 3 is the side perspective view for the MS nitrogen safety supply monitors for showing embodiments of the present invention.
Fig. 4 is the stream for control contents of the MS performed by nitrogen safety supply monitor for showing embodiments of the present invention
One example of journey figure.
Fig. 5 is the stream for control contents of the MS performed by nitrogen safety supply monitor for showing embodiments of the present invention
Other examples of journey figure.
Fig. 6 is the block diagram of the variation for the nitrogen generating means for showing embodiments of the present invention.
Embodiment
Fig. 1 is MS nitrogen safety supply monitor 20 and the nitrogen generating means 1 for showing embodiments of the present invention
Block diagram.Nitrogen generating means 1 have compressed air maker 10, MS nitrogen safety supply monitor 20 and nitrogen separation device
70.Nitrogen generating means 1 are connected with outside power supply 4.Power supply 4 is such as commercial ac power source.It is used as an example, nitrogen life
Into device 1 to mass analyzer (Mass Spectrometry：MS) the dry high-purity nitrogen of 2 supplies.But this is only one
Example, can also utilize nitrogen generation in various analytical equipments and measurement apparatus in addition to mass analyzer 2 etc.
Device 1.
(mass analyzer)
The general principle of mass analyzer 2 is that substance ion is isolated to its ion, by detector from isolating
Ion in detect the ion number (intensity) of mass-to-charge ratio (m/z), so as to carry out qualitative and quantitative analysis.Mass analyzer 2
It is applied in combination with the chromatography for material to be separated.For example, it may be using LC-MS (the high-speed liquid chromatography method matter of liquid
Measure analysis) or using the GC-MS (gas chromatography quality analysis) of gas.As in LC-MS by material (solution)
The mode of ionization use electrospray ionization method (ESI more：Electrospray ionization), atmospheric pressure chemical ion
Change method (APCI：Atmospheric pressure chemical ionization) etc. be referred to as atmospheric pressure ionization method
(API：Atmospheric pressure ionization) method.
Mass analyzer 2 uses nitrogen when by substance ion.Because nitrogen is inert, therefore risen in ionization
To the effect for avoiding unnecessary reaction.As the condition required by the nitrogen used, high-purity, drying, stably are included
Certain pressure and stable certain flow.When the purity of nitrogen relatively low (specifically, being mixed into other gases such as oxygen) or contain
It during moisture, will not normally be ionized, be occurred in analysis result abnormal.Also, the pressure or instability of flow of gas
Can similarly occur in analysis result abnormal.
(compressed air maker)
Compressed air maker 10 has：Air intake；Compressor 12, it is given birth to by the air imported from air intake
Into compressed air；Gas cooler 14, it cools down the compressed air of compressor 12；And second air cleaner 18 and micro mist mistake
Filter 15, they filter by gas cooler 14 cool down after compressed air in moisture.Compressed air is by micro mist filter
15 and second air cleaner 18 by after moisture filter, discharged from compressed air maker 10.Micro mist filter 15 and second
Air cleaner 18 is equivalent to " the first water filter " in the means for solving above-mentioned problem.
As an example, as shown in figure 1, compressed air maker 10 can also have the discharge opening with compressor 12 to connect
Logical air container 19 and the first air cleaner 17 connected with air container 19.First air cleaner 17 and gas cooling
Device 14 is connected.Gas cooler 14 is, for example, heat exchanger, more particularly can be radiator.Can also with gas cooling
The downstream for the second air cleaner 18 that device 14 is connected sets active carbon filter.Further, it is also possible to set to compressor 12
The pressure sensor 13 that the pressure (the specifically pressure in air container 19) of discharge opening side is detected.It can also set
The safety valve of compressed gas is worked and bled off when high for the pressure anomaly in the discharge opening side of compressor 12.It is used as preferred side
Formula or, if the pressure in air container 19 reaches higher limit set in advance, compressor 12 is automatically stopped fortune
Turn.The power supplys 4 such as power circuit 11 and commercial ac power source are connected, and form the driving power supply of compressor 12.
When the air containing moisture is compressed, become the compressed air of HTHP.When the compression of the HTHP is empty
When gas is cooled down by gas cooler 14, water droplet (so-called condensed water) can be produced.In order to remove the water droplet, the second air is set
Filter 18 and micro mist filter 15.Second air cleaner 18 and micro mist filter 15 have the cartridge type shell as shell respectively
Body and condensed water output mechanism.In embodiments, the second air cleaner 18, micro mist filter 15 and water filter 41 are made
Illustrated for the device with like configurations.But, these filters can complete moisture mistake in mode different from each other
Filter or specific shape and construction are different from each other.
I.e. 10 pairs of air air imported from air intake of compressed air maker are compressed.Pass through compressor
12 compress and the pressure and temperature of air is increased, therefore the saturated steam in compressed air is more.Therefore, when passing through gas
When cooler 14 is cooled down, condensed water is produced in the form of water droplet.In order to by the water contained in compressed air, oil and foreign matter etc.
Remove, the first air cleaner 17, the second air cleaner 18, activated carbon are set gradually from the upstream of compressed air towards downstream
Filter 18a and micro mist filter 15.
On the first air cleaner 17, the second air cleaner 18, active carbon filter 18a and micro mist filter 15
Detailed concrete structure, using known various filter for installations, for example, can also be utilized in Japanese Unexamined Patent Publication 2012-
Filter for installation described in No. 232281 publications or Japanese Unexamined Patent Publication 2008-188489 publications.Therefore, saying more than it is omitted
It is bright.
(nitrogen separation device)
Nitrogen separation device 70 has compressed air inlet, nitrogen seperation film 74 and nitrogen outlet 75.In embodiments, as excellent
The mode of choosing, is also provided with the downstream of nitrogen seperation film 74 for making the nitrogen regulator 71 and the pressure to nitrogen of pressure stability
Value measures the pressure gauge 72 of display.Compressed air inlet and the gas discharge outlet 24 of MS nitrogen safety supply monitors 20
Connect and receive compressed air.Nitrogen seperation film 74 generates nitrogen from the compressed air generated by compressed air maker 10.It is used as nitrogen
One example of seperation film 74, can also be utilized in the doughnut separation described in Japanese Unexamined Patent Publication 2003-159517 publications
Film module.The downstream of nitrogen regulator 71 is connected via flowmeter 73 with mass analyzer 2.Nitrogen outlet 75 is to be used to discharge by nitrogen
The hole for the nitrogen that seperation film 74 is isolated.The compressed air generated by compressed air maker 10 is supplied safely via MS with nitrogen
Nitrogen separation device 70 is supplied to monitor 20.Dry nitrogen can be taken out by making compressed air pass through nitrogen seperation film 74
Gas.
(MS nitrogen safety supply monitors)
Hereinafter, also referring to Fig. 2 and Fig. 3 to knots of the MS described in the block diagram in Fig. 1 with nitrogen safety supply monitor 20
Structure is illustrated.Fig. 2 is the MS volume renderings above nitrogen safety supply monitor 20 for showing embodiments of the present invention
Figure.Fig. 3 is the side perspective view for the MS nitrogen safety supply monitors 20 for showing embodiments of the present invention.MS nitrogen
Gas safety supply monitor 20 has：Framework 5, it is approximately parallelepiped body shape on the whole and inside is hollow；Front shroud 6；Gas
Body introducing port 22；Gas discharge outlet 24；And introduce gas into the pipe arrangement 26 that mouth 22 links with gas discharge outlet 24.Gas is imported
Mouthfuls 22 and gas introduction port 24 via outside pipe arrangement (not shown) respectively with compressed air maker 10 and nitrogen separation device 70
Connection.Pipe arrangement 26 is made up of at these three positions pipe arrangement 26a, 26b, 26c.MS nitrogen safety supplies monitor 20 has：Cut-out
Valve 44, it is arranged at pipe arrangement 26c midway (specifically outlet end)；Water filter 41, it is arranged in pipe arrangement 26c
On the way, the moisture of the gas to being flowed in pipe arrangement 26c is filtered；Water sensor 38, it is to being filtered out by water filter 41
Water is detected；And control unit 50, it closes stop valve 44 when water sensor 38 detects water outlet.MS is supplied safely with nitrogen
Also have to monitor 20 and be arranged at pipe arrangement 26a pressure sensor 30, be arranged at pipe arrangement 26b humidity sensor 32 and right
The temperature sensor 34 that MS is measured with the atmosphere temperature of nitrogen safety supply monitor 20.It is provided with the top of front shroud 6
Recess, being arranged in the recess has gas introduction port 22 and gas discharge outlet 24.Formed according to by said structure integration
MS nitrogen safety supply monitors 20, with can be simply installed between compressed air maker 10 and nitrogen separation
Convenience between device 70.And, it may have the compressed air maker 10 and nitrogen set is easily provided in afterwards
Advantage between separator 70.In addition, though not set in MS with nitrogen safety supply monitor 20, but it is used as deformation
Example, can also be by setting to temperature sensor that the temperature of the gas in pipe arrangement 26 is measured to the temperature of compressed air
Measure.
MS also has power circuit 48 and power switch 28 with nitrogen safety supply monitor 20.Power circuit 48 is via electricity
Source switch 28 is connected with outside power supply 4.One example is illustrated, power circuit 48 can also be inside it containing known
Change-over circuit, by the commercial ac voltage from power supply 4 be converted to DC voltage and formed MS with nitrogen safety supply monitor
Device 20 built-in each structure dc source.Power switch 28 is to receive the manually operated structure from user, its shape
Do not limit.28 can be switched by user's operation power connect on and off to switch the power supply of MS nitrogen safety supplies monitor 20
Open.When power switch 28 is operating as connecting, this is gone code and is also delivered to control unit 50, and control unit 50 is cut by opening
Disconnected valve 44 and open pipe arrangement 26.When power switch 28 is operating as disconnecting, the open command is also delivered to control unit 50,
Stop valve 44 is forcibly switched to closed mode and blocks pipe arrangement 26 by control unit 50.If enumerating specific example, here
" the going code ", " open command " said is actually the switching signal for the handover operation for representing power switch 28, be take it is high and
The signal of the two low values.
In the embodiment shown in Fig. 1, stop valve 44 be arranged on compressed air maker 10 and nitrogen separation device 70 it
Between.In the midway of the gas path of outlet 75 from compressed air maker 10 to nitrogen, specifically in nitrogen seperation film 74 and water mistake
Stop valve 44 is provided between filter 41.What 41 pairs of water filter flowed between compressed air maker 10 and nitrogen seperation film 74
The moisture of gas is filtered.When closing stop valve 44, the circulation quilt of the gas between nitrogen seperation film 74 and water filter 41
Block.Water sensor 38, water filter 41, condensation water cover 42 and stop valve 44 constitute gas safety supply unit 40.
MS nitrogen safety supplies monitor 20 can afterwards and can releasably between generation compressed air compression
Between machine 12 and nitrogen seperation film 74.When detecting the drop more than a certain amount of in the compressed air imported from gas introduction port 22
During water, close stop valve 44 and block pipe arrangement 26.The nitrogen seperation film in downstream being connected with gas discharge outlet 24 can be prevented
74 break down because of the harmful effect of water.Also, when drop water reach should with the downstream connection of nitrogen seperation film 74 and receive
During analytical equipment of high-purity nitrogen etc., there is possibility and cause the problem of action is bad, but the problem of can also prevent such
Occur.
As preferred mode, the date-time of 50 pairs of closing stop valves 44 of control unit is recorded.Performing the record
In the specific example of the means of action, the mode of program of the record in memory 56 is performed comprising control unit 50.
As preferred mode, also have a case that to by control unit 50 close that stop valve 44 notify it is " logical
Know unit ".In embodiments, as an example of notification unit, there is provided carrying out the lamp 46 of visual notification.Lamp 46 and control
Portion 50 processed is connected, and these lamps 46 is worked and is lighted when control unit 50 closes stop valve 44.But it is also possible to instead of lamp 46,
Or buzzer for carrying out audible notification etc. is also set up in addition to lamp 46.Or or control unit 50 pass through additional nothing
Line communication unit sends the structure of caution signal or warning message to various terminals used in user.Realizing these notification actions
Means specific example in, be previously recorded in journey in memory 56 included in needing in the case of notifying control unit 50 to perform
The mode of sequence.
As preferred mode, control unit 50 is to dates of the MS with the bleeding power on of nitrogen safety supply monitor 20
Time is recorded.When making power on by operation power switch 28, execution system startup processing is now previously generated
Program so as to by this system start processing time execution date be stored in the memory 56 in control unit 50.So control
Portion 50 is recorded to the i.e. system opening and closing historical information of the historical information being switched on and off of power supply.Realizing historical information note
In the specific example of the means of record action, the mode for the program being previously recorded in memory 56 is performed comprising control unit 50.
As preferred mode, MS nitrogen safety supplies monitor 20 at least has one to for evaluating in pipe arrangement 26
Gas physical state the sensor that measures of physical quantity.In embodiments, as the specific of such sensor
Example, MS nitrogen safety supplies monitor 20, which has, to be arranged at the pressure sensor 30 of pipe arrangement 26, is arranged at the wet of pipe arrangement 26
Degree sensor 32 and the temperature sensor 34 measured to MS with the atmosphere temperature of nitrogen safety supply monitor 20.Pressure
Sensor 30 and humidity sensor 32 can be using the gases in pipe arrangement 26 as object, more particularly with from compressed air maker
The compressed air of 10 supplies is object, and its pressure value and humidity are measured.As preferred mode, control unit 50 often passes through
Time set in advance just records lower pressure sensor 30, humidity sensor 32 and the respective value of temperature sensor 34.And make
For preferred mode, MS has the potentiometer 36 of measurement supply voltage with nitrogen safety supply monitor 20.Potentiometer 36 is specific
For can be connected with power circuit 48, the size for the DC voltage that can also be generated to power circuit 48 is measured.Separately
Outside, in embodiments, for the purpose of simplifying the description, the above-mentioned pressure that there is MS nitrogen safety supplies monitor 20 sometimes
Sensor 30 etc. is referred to as " each sensor ".
As preferred mode, control unit 50 often just records the measured value of potentiometer 36 by the time set in advance,
So as to produce the advantage that.Power circuit 48 is connected with power supply 4, the power circuit 11 as power supply of compressed air maker 10
Similarly it is connected with power supply 4.Due to the voltage of power supply 4 become it is unstable in the case of the unstable influence of the power supply can involve
Both power circuit 48 and power circuit 11, therefore the unstable action compression also to compressed air maker 10 of power supply 4
The action of machine 12 is impacted.A unstable example of power supply 4 is instantaneous power failure (so-called wink stops).If compressor 12
Action becomes unstable, then also the pressure and flow of compressed air is impacted, finally to via nitrogen point on quality and quantity
The nitrogen generated from device 70 is impacted.The matter of nitrogen refers to purity (nitrogen density) etc., and the amount of nitrogen is finger pressure and flow.
This respect, can be to carrying out by recording the voltage determined by potentiometer 36 in power supply 4 with the presence or absence of unstable action
Confirm afterwards.As a result, the reason for nitrogen is changed into unsure state in matter or amount can worked out afterwards.
In embodiments, the output to the MS sensors having with nitrogen safety supply monitor 20 is recorded
Specifically control unit 50 performs the means of the program recorded in memory 56 to means.
As shown in figure 3, control unit 50 has circuit board body 51.It is provided with circuit board body 51 Fig. 1's
Each component parts specifically illustrated in block diagram.That is, control unit 50 has input and output (I/O) interface 52, arithmetic processing apparatus
(CPU) 54, nonvolatile memory 56 (below, also referred to as memory 56), timer 58 and A/D (analog/digital) conversions
Circuit 53.These parts are arranged in circuit board body 51.
Input/output interface 52 includes the input connector for being provided with input terminal (pin) and is provided with lead-out terminal (pipe
Pin) out connector etc..Input/output interface 52 is for the outside progress data-signal input and output with control unit 50
Set.Input/output interface 52 and above-mentioned pressure sensor 30, humidity sensor 32, temperature sensor 34, potentiometer 36
Connected with water sensor 38.Also, input/output interface 52 is also connected with stop valve 44 and lamp 46.
The simulation output of each sensors such as the pressure sensor 30 being connected with control unit 50 is believed by A/D change-over circuits 53
Number it is converted into digital value.
CPU 54 is connected with input/output interface 52, memory 56, A/D change-over circuits 53 and timer 58.CPU 54 is passed through
Electronic data is obtained by input/output interface 52, A/D change-over circuits 53 and memory 56.CPU 54 is by performing in memory
The program that is stored in 56 and calculation process is implemented to the electronic data.The operation result is stored in memory 56 by CPU 54,
Or exported from input/output interface 52 to outside.For example also comprising the sensor output from each sensor in the electronic data
Signal is converted into the information of digital value, to whether lamp being lighted to the lamp set lighting mark, to stop valve 44 is closed
Close and still open threshold switch mark for being set etc..
Nonvolatile memory 56 is not limited to RAM (Random Access Memory：Random access memory) or ROM
(Read Only Memory：Read-only storage), the EEPROM such as can also use flash memory (FLASH EEPROM)
(Electric Erasable Programmable Read Only Memory：EEPROM).Separately
Outside, can be with order that setting volatile memory for the purposes of calculation process.Also, auxiliary storage can also be set to fill
(storage device) is put, data can also be stored in the auxilary unit.By memory and auxilary unit generality
In the case that ground is expressed as " memory cell ", CPU 54 is transported by exchanging for electronic data between the memory cell
Calculate processing and record etc..
Timer 58 is the timer for carrying out time measurement.In the program that CPU 54 should be performed, held in program
The process step that presence should separate intervals and periodically carry out in row.For example, for above-mentioned pressure biography
Processing and often pass through the time set in advance that sensor 30, humidity sensor 32 and the respective value of temperature sensor 34 are recorded
Just the processing of the measured value of recording voltmeter 36.Often water sensor 38 is just recorded alternatively, it is also possible to set by the predetermined time
Measured value processing.CPU 54 can separate correct time interval by referring to the time measured value from timer 58
To perform such process step.
The output valve that each sensor of digital value is converted to by A/D change-over circuits 53 is handled by CPU 54.In CPU
In program performed by 54, comprising the output valve of each sensor is chased after every certain time set in advance (such as each minute)
Plus it is stored in the process step of the regulation storage region of memory 56.Thus, MS nitrogen safety supply monitor 20 also can
The function as " data recording equipment ".
MS has USB (USB) connector 60 with nitrogen safety supply monitor 20.USB connector 60 and control
Portion 50 processed is connected, and can read the electronic information being stored in memory 56.Thereby, it is possible to outside eventually by personal computer etc.
Hold and the electronic data taken out by USB connector 60 is read, processed or edited and effectively utilized.Also, if deposit
Routine data in reservoir 56 can rewrite record, then memory 56 can be accessed by USB connector 60, so as to enter to program
Row amendment, processing.Record can be rewritten and refer to that program is deposited for example in the case where nonvolatile memory 56 includes ROM and RAM
The situation of storage in RAM etc..USB connector 60 plays work(as " electronic information retrieval unit " as described herein
Energy.Supervised accordingly it is also possible to which " the electronic information retrieval unit " in addition to USB connector 60 is arranged at into MS with nitrogen safety supply
Visual organ 20.It is for instance possible to use the various Generalized Communication Interfaces in addition to USB, as long as connector shape is come according to each standard
Setting.Also, communication mode is not limited to wired, wireless communication unit can also be set, need not be connected in this case
Connect device.
A variety of changes are contemplated in each structure of embodiment.Its some change is illustrated below.
Various changes are contemplated in the construction of stop valve 44.Magnetic valve can also for example be used.Magnetic valve
It is referred to as solenoid valve, it, which has, makes plunger motion by using the magnetic force of electromagnet to carry out the mechanism of threshold switch, quilt
Using in the open and close controlling in the pipe arrangement 26 passed through for fluid.Magnetic valve has the advantage that in the speed of response, is passed in water
Sensor 38 can block preferred magnetic valve on the point of pipe arrangement 26 at once after entering water-filling detection.Also, can also in addition to magnetic valve
The motor-driven valve driven using motor (motor).Also, it is not limited in the mode of electricity, fluid pressure type etc. can also be used.No matter
Which kind of type of drive, stop valve 44 can be provided with mechanical schemes, as long as can be according to the electric signal from control unit 50 at least
To standard-sized sheet and fully closed switch over.In addition, as variation, stop valve 44 can standard-sized sheet and it is fully closed between continuously enter
Row aperture is adjusted, and can also use discontinuously can switch to i.e. multiple stages the stop valve of aperture.In such variation
Aperture adjustment is reached also according to the control signal from control unit 50.
Various changes are contemplated in the construction of water filter 41.In embodiments, as an example, bag
Contain：Tubular shell 41a, its two ends are blocked；Two openings, they are arranged on relative two of tubular shell 41a sides
Position；And filter membrane (diaphragm element), it collects the moisture of gas in tubular shell 41a.It is arranged at tubular shell 41a's
One opening is connected with pipe arrangement 26c, and another opening for being arranged at tubular shell 41a is connected with stop valve 44.Gas is from pipe arrangement
26c is flowed into tubular shell 41a, after the moisture included in gas is by filtering membrane filtration, completes the gas of moisture filter
It is open and is flowed out to stop valve 44 from another.It is water droplet to be accumulated by the moisture of filtering membrane filtration in tubular shell 41a bottom.
Tubular shell 41a bottom is provided with the condensation water hole as osculum, and is provided with manual unlocking and closes the condensation
The condensation water cover 42 in water hole.On more specific structure, for example, due to that can use in Japanese Unexamined Patent Publication 2012-232281
Filter for installation described in publication or Japanese Unexamined Patent Publication 2008-188489 publications, or utilize its appropriate deformation
Device, therefore omit the explanation more than it.
In addition, in the present embodiment, tubular shell 41a is formed by translucent resin or glass.As described later, this is
Because water sensor 38 is the structure of optical detection mode in the present embodiment.However, sometimes due to the inspection of water sensor 38
Survey mode is mode of electricity etc., therefore tubular shell 41a, also without translucency, tubular shell 41a can also in this case
It is opaque.Also, the mechanism (so-called Auto-drainage) that condensation water cover is opened when having accumulated a certain amount of water can also be arranged on,
In this case, the pipe that can also be discharged the water with the outside export of nitrogen safety supply monitor 20 to MS.
Various changes are contemplated in the construction and detection mode of water sensor 38.In the present embodiment, make
For an example, it will be utilized for carrying out the photodetector of optical detection as water sensor 38.Photodetector is for example
Include the illuminating part 38b and optical detection part (photoelectric detector) 38a being made up of photodiode etc..Optical detection part 38a receive from
Illuminating part 38b passes through the light that water filter 41 is transmitted.The water sensor 38 of optical mode can utilize light corresponding with amount of moisture
Trap difference and light reception intensity according to optical detection part 38a etc. the presence or absence of moisture and amount of moisture are detected.
The technology used in the various moisture meters having been known in addition, water filter 41 can convert, can convert reality
With the various moisture meters changed.For example, being not limited to the moisture meter or the moisture meter using electricity using light.Electrically
Water sensor can detect the presence or absence of moisture by determining the change of resistance value corresponding with amount of moisture or the change of electric capacity
And amount of moisture.Also, microwave moisture meter etc. can also be used in the case where large-scale sensor can be carried.Even in using
In the case of the water sensor of mode in addition to these optical modes, also as described above by advance storing measured value
Set in advance a certain amount of detect whether is reached to the water in water filter 41 in memory 56.
In the present embodiment, it is used as closing using whether the water of liquid accumulates certain water in the inside of water filter 41
The determinating reference of stop valve 44.It is preferred that " certain water " is as previously mentioned the half in tubular shell 41a, 1/3,1/5 or
The amount of 1/10 grade, rather than a small amount of water droplet.Its reason is illustrated, the script of nitrogen seperation film 74 is for by the gas flowed into
The moisture separation of body, the film for removing and generating drying nitrogen.Therefore, it is in even if nitrogen seperation film 74 is humidity in allowed band
Vapor flows into the film that will not also break down at once.On the other hand, when directly closing cut-out because detecting a small amount of moisture
During valve 44, understand often to the compressed air supply belt under stable flow and pressure to disturb, thus it is not preferred.Therefore, in reality
Apply in mode, when the water of the liquid accumulated in the tubular shell 41a of water filter 41 reaches amount set in advance, control unit 50
Close stop valve 44.Therefore, in embodiments, pre- can also only have been accumulated inside water filter 41 to the water of liquid in advance
The output signal of water sensor 38 (specifically optical detection part 38a) during the water first set is measured, as
It is stored in advance in for the decision content of the judgment of clogging of stop valve 44 in the memory 56 of control unit 50." predetermined water " for example
Refer to fill half, 1/3,1/5 or 1/10 of state etc..Water detection process (step S108) in flow chart described later is carried out
When, it is compared between the output signal of the optical detection part 38a in water sensor 38 and the light reception intensity prestored.By
This, the water being capable of detecting when in water filter 41 reaches predetermined amount.
Installation site to stop valve 44 also contemplates various changes.Stop valve 44 can be arranged on empty from compression
Gas maker 10 exports any part of the midway of 75 gas path or the downstream of nitrogen outlet 75 to nitrogen.Specifically, in Fig. 1
In embodiment shown in~Fig. 3, stop valve 44 is arranged between nitrogen seperation film 74 and water filter 41.By closing stop valve
44, it can prevent runny compressed air from flowing into arrive nitrogen seperation film 74, and accumulation internally can also be had to the water of water
Blocked between filter 41 and nitrogen seperation film 74.Therefore, it is possible to reliably prevent the storage water in water filter 41 from reaching nitrogen point
From the situation of film 74.Also, stop valve 44 can also be arranged in the gas path between water filter 41 and compressor 12
Way is any place of pipe arrangement 26.Thereby, it is possible to prevent runny compressed air is flowed into from arriving nitrogen seperation film 74.Also, cut-out
Valve 44 can also be as be described hereinafter Fig. 5 variation be arranged at like that nitrogen outlet 75.Thus, runny nitrogen can at least be prevented
Gas is discharged from nitrogen generating means 1.Water filter 41 may not be adjacent with stop valve 44, can also separate configuration, in water filter
Can also be across other sensors between 41 and stop valve 44.In the MS nitrogen safety supply monitors 20 of embodiment
In, it is inadequate that stop valve 44, which can only carry out simple flow adjustment,.In MS with nitrogen safety supply monitor 20, from true
From the viewpoint of water conservation safety, stop valve 44 is at least before mass analyzer 2 is reached, preferably in the compression than nitrogen seperation film 74
Any part of air intake position by the upstream, when necessary completely plugged pipe arrangement 26.
Fig. 4 is control contents of the MS performed by nitrogen safety supply monitor 20 for showing embodiments of the present invention
One of flow chart.The program according to the flow chart generation shown in Fig. 4 is previously stored with the memory 56 of control unit 50.
54 couples of CPU makes MS be rung with the situation of the power on of nitrogen safety supply monitor 20 by the operation of power switch 28
Should, read the program from memory 56 and perform.
In program shown in flow chart in Fig. 4, first, control unit 50 performs the process step of record Startup time
(S100).Control unit 50 then performs the process step (S102) for opening stop valve 44.
Control unit 50 then performs following process step (S104)：Determined whether by the measurement of timer 58 from counting
Reference instant have passed through the defined time.The process step is the processing for measuring predetermined time interval, time interval example
Such as can be 1 minute (namely 60 seconds), can also be shorter than 1 minute or longer than 1 minute.Control unit 50 is controlled to timer 58
System, thus timer 58 carrys out time of measuring using the baseline moment as Fixed Initial Point.If the time of measuring of timer 58 reaches 60
Second, then process step S104 decision condition is affirmative.Here, if first judgement after just starting, then the counting base
Punctual carve is Startup time, and when have passed through the predetermined time from Startup time, the result of determination of the process step is affirmative.Such as
Fruit be not after firm start, and the process step result of determination for the time being for affirmative in the case of, respond affirmative judgement and make
The time measured value of timer 58 is reset to zero, as the newest baseline moment at the time of this judges certainly.Thus, whenever
Process step S104 result of determination for certainly when, the time measurement of timer 58 is reset, whenever reaching predetermined time (example
Such as 60 seconds) when, process step S104 decision condition is affirmative, thus, it is possible to enter after carry out sensor signal it is defeated
Process step entered etc..In addition, process step S104 described herein processing is an example, as long as measure predetermined
Between the program that is spaced, then specific processing do not limit.
In the case where not being judged to have passed through the defined time from the baseline moment, processing returns to process step
S104, and processing is in holding state until have passed through the defined time.Control unit 50 is being judged to passing through from the baseline moment
In the case of having spent the defined time, then perform the sensor output signal of the grade of input pressure sensor 30 and record in storage
Process step (S106) in device 56.Control unit 50, which is then performed, determines whether the process step (S108) for detecting water.At this
In step, control unit 50 is judged in water filter 41 according to the output signal of the optical detection part 38b receptions from water sensor 38
Water whether reached predetermined water, when water has reached predetermined water by result of determination be set to affirmative.In step S108
Result of determination for affirmative in the case of, control unit 50 then perform in the case where detecting water close stop valve 44 processing
Step (S110).Control unit 50 further performs the process step (S112) by lighting and being notified lamp 46.
In the case that control unit 50 does not detect water in step S108, processing is set to jump to power-off judgement
(S114)。
Control unit 50 performs process step (S114), to making power-off with the presence or absence of operation power switch is closed
Instruction is judged.In the case where being operated in the absence of power-off, control unit 50 makes what processing cycle was passed through to the stipulated time
Determination processing step.In the case where there is power-off operation, control unit 50 performs process step (S116), by stop valve 44
Remain off closed state and processing is entered system stopping processing, system time end date is recorded.Then, this time
Routine terminate, and system stop.
When to MS the nitrogen safety supply monitor 20 and the effect of nitrogen generating means 1 of embodiments described above
When summarizing, for example, illustrate in such a way.
When carrying out quality analysis, with (the Mass Spectrometer of mass analyzer 2：Mass spectrograph) sample import
And need nitrogen.The nitrogen is provided by nitrogen generating means 1.Because in compressed air, moisture accumulates in compressed air generation
In device 10, therefore enter to be about to the action that the moisture is discharged to the outside automatically sometimes.Pass through the second air cleaner 18 and micro mist mistake
The automatic drainage function that filter 15 has realizes the Auto-drainage.
In the case that the second air cleaner 18 or micro mist filter 15 in compressed air maker 10 break down,
Excess moisture gas flows out from compressed air maker 10.When the current are fashionable, the possibility that nitrogen seperation film 74 breaks down compared with
Height, when a failure occurs it, will change high nitrogen seperation film 74.Therefore, the water mistake for the leading portion for being arranged at nitrogen seperation film 74 is utilized
Filter 41, water sensor 38 and stop valve 44, stop valve 44 is closed when detecting moisture, cuts off the compression from compressor 12
Air.In addition, in embodiments, after blocking pipe arrangement 26 by closing stop valve 44, the discharge opening side of compressor 12
Pressure rise, pressure sensor 30 perceive the pressure rise so that compressor 12 is automatically stopped operating.
Also, when the water for having passed through nitrogen seperation film 74 is flowed into mass analyzer 2, analysis that can be to mass analyzer 2
Or the internal structure of mass analyzer 2 has undesirable effect as a result.Also, when the voltage instability timing of power supply 4, the pressure of nitrogen
Or flow can change, analysis precision reduction.On this point, because the MS nitrogen safety supplies monitor 20 of embodiment is also made
Played a role for data recording equipment, thus also can all the time to as generate close stop valve 44 situation the reason for
Key element (abnormity of power supply, environment temperature, humidity or pressure) is recorded.MS nitrogen safety supplies monitor 20 can be used MS
During the date that date-time, the water sensor of the power on of nitrogen safety supply monitor 20 detect water and cut off
Between and pressure, humidity, temperature, the periodic information of supply voltage recorded., can be after by recording these information
With reference to the record result.By referring to the record as a result, it is possible to help to understand fully that abnormal, mass analyzer 2 occurs in analysis result
The reason for producing failure etc..The content recorded by USB connector 60 or can pass through wireless transmission to outside (such as electric
Brain), it can also be played a role in operation management.
Fig. 5 is control contents of the MS performed by nitrogen safety supply monitor 20 for showing embodiments of the present invention
Other examples of flow chart.When detecting water in the step S108 illustrated by Fig. 4, control unit 50 can also performed successively
Close stop valve 44 process step (S110) and lamp 46 light process step (S110) after, at compulsory execution power-off
Manage (S200), routine terminates and system stops.
Alternatively, it is also possible to not in MS with setting data recording function in nitrogen safety supply monitor 20, and only set by
Water sensor 38, stop valve 44 and control the compositions such as their control unit 50 water detect when tripping protection function.In the situation
Under, pressure sensor 30, humidity sensor 32, temperature sensor 34 and potentiometer 36 can also be omitted, Fig. 4 flow chart is omitted
In step S104 and S106 processing.Also, MS nitrogen safety supplies monitor 20 can also be without data record dress
Function is put, and be can be only fitted between mass analyzer 2 and nitrogen separation device 70.
In addition, there is provided by water filter 41, water sensor 38, stop valve 44 and pressure sensor 30 in embodiments
The MS nitrogen safety supply monitors 20 of the inside of framework 5 are collected in Deng component parts.But, embodiment is being provided
Nitrogen generating means 1 aspect, it is not necessary to component parts is collected in a framework 5.That is, MS is supplied safely with nitrogen
It can also be configured that there is provided have embodiment on the whole according to part unit to each component parts in monitor 20
The nitrogen generating means 1 of the MS functions of nitrogen safety supply monitor 20.
Fig. 6 is the block diagram of the nitrogen generating means 101 for the variation for showing embodiments of the present invention.In the variation
In, MS nitrogen safety supplies monitor 20 is replaced as tape deck 120, and added MS nitrogen safety supply monitors
140.MS is connected with nitrogen safety supply monitor 140 with nitrogen outlet 75 in the variation, in other words, MS is pacified with nitrogen
Full supply monitor 140 is arranged between mass analyzer 2 and nitrogen separation device 70.On the structure beyond these differences,
Because nitrogen generating means 101 are identical with the nitrogen generating means 1 described in Fig. 1~Fig. 3, therefore corresponding structural element is marked with
Identical label, is omitted the description.Nitrogen generating means 101 will undertake the function that MS nitrogen safety supplies monitor 20 has
In water detection cutting function hardware components MS nitrogen safety supplies monitor 140 extract out and be arranged on nitrogen generation dress
Put 101 downstream.That is, this is that the gas safety supply unit 40 in Fig. 1 is arranged under nitrogen generating means 101
Swim the structure of side.On the other hand, the stop valve 41 undertaken in the function that MS nitrogen safety supplies monitor 20 has is set
Control etc. and data recording function tape deck 120.In the variation, as shown in fig. 6, using being built in tape deck
120 control unit 50 is controlled to MS nitrogen safety supplies monitor 140, but it is also possible to is further deformed Fig. 6, will be controlled
" other control units " for the open and close controlling that the output signal based on water sensor 38 in portion 50 processed carries out stop valve 41 is built in
MS nitrogen safety supply monitors 140.Should " other control units " at least perform Fig. 4 and Fig. 5 in step S102, S108,
S110 processing, also, it is also preferred that the valve for carrying out step S116 blocks control.Also, nitrogen safety supply can also be used in MS
The grade notification unit of lamp 46 is set on monitor 140, the place that " other control units " also carries out step S112 is preferably somebody's turn to do in this case
Reason.
, can also alternatively, it is also possible to make the device of above-mentioned embodiment be deformed to other devices different from embodiment
By the part conversion of the structure of embodiment in other purposes.Hereinafter, deformation conversion is illustrated.
Alternatively, it is also possible to which embodiment is converted in the gas generating device beyond nitrogen.I.e. it is capable to will be above-mentioned
MS converted and the gas containing moisture such as air be compressed and from the compressed gas with nitrogen safety supply monitor 20
In the dry gas generating means for generating dry gas.Condensed water can be produced when by compressor compresses gas because of condensation.
When the excess moisture gas containing the condensed water is supplied to seperation film, undesirable feelings are contemplated for seperation film
Condition.Also, for the grade device of mass analyzer 2 for the downstream position for being arranged on seperation film, also not preferred excess moisture gas.By
In such situation, other gas separation membranes can also be set to replace the nitrogen separation positioned at the inside of nitrogen generating means 1
Film 74.As an example of practical nitrogen seperation film, with make use of the doughnut of polyimides than in air
Nitrogen is easier the nitrogen seperation film of the property through oxygen.When compressed air flows in the inner side of nitrogen seperation film (doughnut), oxygen
Film is selectively passed through, as a result, becoming that in hollow-fibre membrane outlet the mechanism of nitrogen-rich gas can be obtained.Also contemplate this
The film for the selectively passing through oxygen conversion of sample is oxygen separation membrane, and in this case, not preferred excess moisture gas is flowed into the oxygen
Seperation film.It is same with the situation that not preferred excess moisture gas is flowed into nitrogen seperation film 74.For example in Japanese Unexamined Patent Publication 2003-
Recorded in No. 159517 publications " the hollow fiber separating film module that at least one gas is selectively passed through from mixed gas "
" it is used to separate the arbitrary gas in nitrogen-rich air, oxygen-enriched air, dry air, carbon dioxide, hydrogen or organic vapor
The hollow fiber separating film module of recovery ".According to known technology, can also by " mixed gas seperation film " or " to nitrogen-rich air,
The gas separation membrane that arbitrary gas in oxygen-enriched air, dry air, carbon dioxide, hydrogen or organic vapor are separated " is replaced
For nitrogen seperation film 74.In this case, " the nitrogen separation device " of embodiment is simply by otherwise known as the species for not limiting gas
" gas separator ".
Label declaration
1、101：Nitrogen generating means；2：Mass analyzer；4：Power supply；5：Framework；6：Front shroud；10：Compressed air is generated
Device；11、48：Power circuit；12：Compressor；13、30：Pressure sensor；14：Gas cooler；15：Micro mist filter；17：
First air cleaner；18：Second air cleaner；18a：Active carbon filter；19：Air container；20、140：MS nitrogen
Safety supply monitor；22：Gas introduction port；24：Gas discharge outlet；26、26a、26b、26c：Pipe arrangement；28：Power switch；
30：Pressure sensor；32：Humidity sensor；34：Temperature sensor；36：Potentiometer；38：Water sensor；38a：Optical detection part；
38b：Illuminating part；40：Gas safety supply unit；41：Water filter；41a：Tubular shell；42：Condense water cover；44：Stop valve；
46：Lamp；48：Power circuit；50：Control unit；51：Circuit board body；52：Input/output interface；53：A/D change-over circuits；
54：CPU；56：Memory；58：Timer；60：Connector；70：Nitrogen separation device；71：Nitrogen regulator；72：Pressure gauge；
73：Flowmeter；74：Nitrogen seperation film；75：Nitrogen is exported；120：Tape deck.
Claims (8)
1. a kind of MS nitrogen safety supply monitors, the MS nitrogen safety supply monitors have：
Gas introduction port；
Gas discharge outlet；
Pipe arrangement, it links the gas introduction port and the gas discharge outlet；
Stop valve, it is arranged on the midway of the pipe arrangement；
Water filter, it is arranged on the midway of the pipe arrangement, and the moisture of the gas to being flowed in the pipe arrangement is filtered；
Water sensor, it is detected to the water filtered out by the water filter；And
Control unit, it closes the stop valve when detecting the water of more than predetermined amount by the water sensor.
2. MS according to claim 1 nitrogen safety supply monitors, wherein,
The control unit is recorded to the date-time for closing the stop valve.
3. MS according to claim 1 nitrogen safety supply monitors, wherein,
MS nitrogen safety supply monitors also have notification unit, and the notification unit by the control unit to closing institute
The situation for stating stop valve is notified.
4. MS according to claim 1 nitrogen safety supply monitors, wherein,
The control unit is recorded to the date-time of power on.
5. MS according to claim 1 nitrogen safety supply monitors, wherein,
The MS nitrogen safety supply monitors have：
Pressure sensor, it is arranged at the pipe arrangement；
Humidity sensor, it is arranged at the pipe arrangement；And
Temperature sensor, it is measured to the MS with the atmosphere temperature of nitrogen safety supply monitor,
The control unit often just records the pressure sensor, the humidity sensor and the temperature by the predetermined time
The respective sensor output value of sensor.
6. MS according to claim 1 nitrogen safety supply monitors, wherein,
The MS also has the potentiometer measured to supply voltage with nitrogen safety supply monitor,
The control unit often just records the measured value of the potentiometer by the predetermined time.
7. a kind of nitrogen generating means, the nitrogen generating means have：
Compressed air maker, it has：Air intake；Compressor, it is given birth to by the air imported from the air intake
Into compressed air；Gas cooler, its compressed air to the compressor is cooled down；And first water filter, its is right
The moisture of compressed air after being cooled down by the gas cooler is filtered, and the compressed air maker will be by described
First water filter has filtered the compressed air discharge of moisture；
Nitrogen separation device, it has：Nitrogen seperation film, it is generated by the compressed air generated by the compressed air maker
Nitrogen；And nitrogen outlet, it is used to discharge the nitrogen isolated by the nitrogen seperation film；
Stop valve, its be arranged between the compressed air maker and the nitrogen separation device or the nitrogen separation device institute
State nitrogen exit；
Second water filter, it is arranged between the compressed air maker and the nitrogen separation device or the nitrogen separation
The nitrogen exit of device；
Water sensor, it is detected to the water filtered out by second water filter；And
Control unit, it closes the stop valve when detecting the water of more than predetermined amount by the water sensor.
8. nitrogen generating means according to claim 7, wherein,
The stop valve is arranged between the nitrogen seperation film and second water filter.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2015/073403 WO2017029764A1 (en) | 2015-08-20 | 2015-08-20 | Nitrogen gas safe-feed monitor for mass spectrometer (ms) and nitrogen gas generation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107209150A true CN107209150A (en) | 2017-09-26 |
| CN107209150B CN107209150B (en) | 2020-02-21 |
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|---|---|---|---|
| CN201580074151.4A Active CN107209150B (en) | 2015-08-20 | 2015-08-20 | Monitor for safe supply of nitrogen gas for MS and nitrogen gas generating device |
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| Country | Link |
|---|---|
| JP (1) | JP6503466B2 (en) |
| KR (1) | KR20180041615A (en) |
| CN (1) | CN107209150B (en) |
| TW (1) | TW201722542A (en) |
| WO (1) | WO2017029764A1 (en) |
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| JP7305226B1 (en) | 2022-07-04 | 2023-07-10 | 株式会社フクハラ | Drain discharge structure in compressed air circuit |
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| KR20010096699A (en) * | 2001-07-25 | 2001-11-08 | 김인빈 | Nitrogen and dried air generator and inflator using air separation membrane |
| JP2005079294A (en) * | 2003-08-29 | 2005-03-24 | Nikon Corp | Exposure device, exposure system, and method for manufacturing device |
| JP2005320221A (en) * | 2004-05-06 | 2005-11-17 | Fukuhara Co Ltd | Method and apparatus for producing nitrogen gas |
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| CN101804972A (en) * | 2010-04-14 | 2010-08-18 | 天津凯德实业有限公司 | integrated nitrogen making machine |
| CN201815225U (en) * | 2010-10-20 | 2011-05-04 | 西梅卡亚洲气体系统成都有限公司 | Air membrane separation device adopting hollow fiber membrane drying technique |
| CN103534001A (en) * | 2011-05-09 | 2014-01-22 | Smc株式会社 | Filter apparatus |
| CN102936005A (en) * | 2012-11-27 | 2013-02-20 | 凯迈（洛阳）气源有限公司 | Nitrogen making machine and method |
| CN203333300U (en) * | 2013-05-23 | 2013-12-11 | 中国人民解放军总装备部军械技术研究所 | Full-automatic nitrogen charging device for photoelectric instruments |
| CN103466567A (en) * | 2013-09-29 | 2013-12-25 | 天津凯德实业有限公司 | Integrated membrane separation nitrogen generating equipment |
| CN203976402U (en) * | 2014-06-24 | 2014-12-03 | 杭州天利空分设备制造有限公司 | The rich nitrogen grain storage equipment of environment-friendly type hypoxemia |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107209150B (en) | 2020-02-21 |
| KR20180041615A (en) | 2018-04-24 |
| JPWO2017029764A1 (en) | 2018-05-31 |
| WO2017029764A1 (en) | 2017-02-23 |
| TW201722542A (en) | 2017-07-01 |
| JP6503466B2 (en) | 2019-04-17 |
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