CN107202731B - An ultra-fast multi-exit laser ablation cell - Google Patents

An ultra-fast multi-exit laser ablation cell Download PDF

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CN107202731B
CN107202731B CN201710338858.2A CN201710338858A CN107202731B CN 107202731 B CN107202731 B CN 107202731B CN 201710338858 A CN201710338858 A CN 201710338858A CN 107202731 B CN107202731 B CN 107202731B
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cell
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CN107202731A (en
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胡兆初
陈力飞
史光予
罗涛
张文
宗克清
刘勇胜
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China University of Geosciences
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44Sample treatment involving radiation, e.g. heat
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/626Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using heat to ionise a gas
    • G01N27/628Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using heat to ionise a gas and a beam of energy, e.g. laser enhanced ionisation

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Abstract

本发明提供一种超快速多出口激光剥蚀池,包括样品室壳体和快插式样品池,所述样品室壳体的上表面和下表面分别设有观察窗和透射光窗口,所述样品室壳体的左侧面开设有样品放置口,所述快插式样品池通过所述样品放置口固定于所述样品室壳体内的中空腔中,所述快插式样品池具有自其上表面下凹的样品容纳腔,所述快插式样品池的上表面和颈部与所述样品室壳体密封设置,所述样品室壳体的右侧面开设有多个并列设置的出气孔,所述样品室壳体的左侧面开设有一载气进气孔,所述出气孔和所述载气进气孔均向内延伸与所述样品容纳腔连通。本发明的有益效果:能够有效的遏制涡流的产生和减轻甚至消除记忆效应。

The invention provides an ultra-fast multi-outlet laser ablation cell, which includes a sample chamber shell and a quick-insert sample cell. The upper surface and the lower surface of the sample chamber shell are respectively provided with an observation window and a transmitted light window. The sample There is a sample placement port on the left side of the chamber housing, and the quick-insert sample cell is fixed in the hollow cavity in the sample chamber housing through the sample placement port, and the quick-insert sample cell has a The sample holding chamber with a concave surface, the upper surface and neck of the quick-insert sample cell are sealed with the sample chamber casing, and a plurality of air outlets arranged side by side are opened on the right side of the sample chamber casing , the left side of the sample chamber casing is provided with a carrier gas inlet hole, and both the gas outlet hole and the carrier gas inlet hole extend inward and communicate with the sample holding chamber. The beneficial effect of the present invention is that the generation of eddy current can be effectively restrained and the memory effect can be alleviated or even eliminated.

Description

一种超快速多出口激光剥蚀池An ultra-fast multi-exit laser ablation cell

技术领域technical field

本发明涉及激光剥蚀技术技术领域,尤其涉及一种超快速多出口激光剥蚀池。The invention relates to the technical field of laser ablation technology, in particular to an ultra-fast multi-exit laser ablation pool.

背景技术Background technique

激光剥蚀电感耦合离子体质谱(LA-ICP-MS)是产生于80年代中后期的一门固体分析新技术。LA-ICP-MS技术具有原位、实时、快速的分析优势以及较高灵敏度,较好的空间分辨率,多元素测定及可提供同位素比值信息的检测能力。该技术已在地球科学、材料科学、环境科学、核科学等领域得到了广泛的应用。现已成为主流常规的矿物微区元素和同位素分析仪器。Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) is a new technology for solid analysis that was born in the middle and late 1980s. LA-ICP-MS technology has the advantages of in-situ, real-time and rapid analysis, high sensitivity, good spatial resolution, multi-element determination and detection ability that can provide isotope ratio information. This technology has been widely used in earth science, material science, environmental science, nuclear science and other fields. It has become the mainstream conventional mineral micro-area element and isotope analysis instrument.

在激光剥蚀等离子体质谱分析中,首先需要把待测样品放在激光剥蚀池里面,激光剥蚀样品表面产生的样品气溶胶由载气带入等离子体质谱进行元素和同位素分析。不同激光剥蚀池的设计将对元素分析信号强度、信号稳定性、元素分馏以及做样的效率产生重大的影响。传统的激光剥蚀池侧边的位置容易产生涡流,从而导致较严重的元素分馏和记忆效应,最终影响气溶胶的传输和分析结果的准确性。传统的激光剥蚀池还存在的问题是换样时间长,换样过程中容易混入空气导致等离子体熄火。In the laser ablation plasma mass spectrometry analysis, the sample to be tested needs to be placed in the laser ablation cell first, and the sample aerosol generated on the surface of the laser ablation sample is brought into the plasma mass spectrometer by the carrier gas for element and isotope analysis. The design of different laser ablation cells will have a significant impact on the elemental analysis signal strength, signal stability, element fractionation and sample preparation efficiency. The position on the side of the traditional laser ablation pool is prone to eddy currents, resulting in serious element fractionation and memory effects, which ultimately affect the transmission of aerosols and the accuracy of analysis results. The problem still exists in the traditional laser ablation cell is that it takes a long time to change the sample, and it is easy to mix air during the sample change process to cause the plasma to go out.

传统激光剥蚀池只有一个出气口,跟进气口相对应,水平贯穿样品室侧面。这样在出气的过程中,只有剥蚀池中间及靠近出气口位置的气溶胶容易被传输。由于只能单一出气口出气,所以很多边角位置的气溶胶不能很好被传输,容易产生涡流,最终影响分析结果的稳定性。另外由于样品室放置的样品数量有限,导致换样繁琐、频繁、工作效率较低。The traditional laser ablation cell has only one gas outlet, which corresponds to the gas inlet and runs horizontally through the side of the sample chamber. In this way, only the aerosol in the middle of the erosion pool and near the gas outlet is easily transported during the gas outlet process. Since only a single gas outlet is available, the aerosols at many corners cannot be transported well, and eddy currents are likely to occur, which ultimately affects the stability of the analysis results. In addition, due to the limited number of samples placed in the sample chamber, sample replacement is cumbersome, frequent, and work efficiency is low.

传统激光剥蚀池进气口管道内径一般大于0.5mm,进气口管道内径越大,在载气流量一定的情况下,气体流速越低。低的气体流速导致气溶胶在剥蚀池待的时间越长,从而导致较严重的记忆效应。激光剥蚀点位置气体流速越低也会导致激光剥蚀产生的固体气溶胶颗粒尺寸越大,固体气溶胶颗粒尺寸越大在等离子体中越容易离子化不完全,从而产生元素分馏。The inner diameter of the air inlet pipe of the traditional laser ablation pool is generally greater than 0.5mm. The larger the inner diameter of the air inlet pipe, the lower the gas flow rate when the carrier gas flow rate is constant. Low gas flow rates result in longer aerosols staying in the ablation cell, leading to more severe memory effects. The lower the gas flow rate at the laser ablation point, the larger the size of the solid aerosol particles produced by laser ablation. The larger the size of the solid aerosol particles, the easier it is to ionize incompletely in the plasma, resulting in elemental fractionation.

发明内容Contents of the invention

有鉴于此,本发明的实施例提供了一种有效的能够遏制涡流的产生和减轻甚至消除记忆效应的超快速多出口激光剥蚀池。In view of this, the embodiments of the present invention provide an ultra-fast multi-exit laser ablation cell that can effectively suppress the generation of eddy currents and reduce or even eliminate the memory effect.

本发明的实施例提供了一种超快速多出口激光剥蚀池,包括样品室壳体和快插式样品池,所述样品室壳体的上表面和下表面分别设有观察窗和透射光窗口,所述样品室壳体的左侧面开设有样品放置口,所述快插式样品池通过所述样品放置口固定于所述样品室壳体内的中空腔中,所述快插式样品池具有自其上表面下凹的样品容纳腔,所述快插式样品池的上表面和颈部与所述样品室壳体密封设置,所述样品室壳体的右侧面开设有多个并列设置的出气孔,所述样品室壳体的左侧面开设有一载气进气孔,所述出气孔和所述载气进气孔均向内延伸与所述样品容纳腔连通。An embodiment of the present invention provides an ultra-fast multi-outlet laser ablation cell, including a sample chamber housing and a quick-insert sample cell, the upper surface and the lower surface of the sample chamber housing are respectively provided with an observation window and a transmitted light window , the left side of the sample chamber housing is provided with a sample placement port, and the quick-insert sample cell is fixed in the hollow cavity in the sample chamber housing through the sample placement port, and the quick-insert sample cell It has a sample holding cavity concaved from its upper surface, the upper surface and neck of the quick-insert sample cell are sealed with the sample chamber casing, and a plurality of parallel chambers are arranged on the right side of the sample chamber casing. The air outlet hole is provided, and a carrier gas inlet hole is provided on the left side of the sample chamber housing, and both the air outlet hole and the carrier gas inlet hole extend inward to communicate with the sample holding chamber.

进一步地,一载气进气接头的一端穿过所述样品室壳体的前侧面或者后侧面,并与所述载气进气孔垂直连通,所述载气进气孔靠近外界的一端被封堵,以堵阻止载气外溢。Further, one end of a carrier gas inlet joint passes through the front side or the rear side of the sample chamber casing, and is vertically communicated with the carrier gas inlet, and the end of the carrier gas inlet near the outside is closed Plug to prevent carrier gas from escaping.

进一步地,所述载气进气孔的孔径为0.2~0.3mm。Further, the diameter of the carrier gas inlet hole is 0.2-0.3 mm.

进一步地,所述快插式样品池的上表面具有快插式样品池顶部密封圈槽,其内放置有氟胶O型密封圈,所述快插式样品池的上表面通过该氟胶O型密封圈与所述样品室壳体的顶部密封。Further, the upper surface of the quick-insert sample cell has a top sealing ring groove of the quick-insert sample cell, and a fluorine rubber O-ring is placed in it, and the upper surface of the quick-insert sample cell passes through the fluorine rubber O-ring groove. A type seal seals with the top of the sample chamber housing.

进一步地,所述快插式样品池的颈部具有快插式样品池颈部密封圈槽,其内放置有氟胶O型密封圈,所述快插式样品池的颈部通过该氟胶O型密封圈与所述样品室壳体的左端区域密封。Further, the neck of the quick-insert sample cell has a quick-insert sample cell neck sealing ring groove, and a fluorine rubber O-ring is placed in it, and the neck of the quick-insert sample cell passes through the fluorine rubber An O-ring is sealed with the left end area of the sample chamber housing.

进一步地,所述样品室壳体上表面凹设有观察窗收容腔,所述观察窗的侧边四周设有观察窗密封圈槽,其内放置有氟胶O型密封圈,所述观察窗的侧边四周通过该氟胶O型密封圈与所述观察窗收容腔的侧壁密封。Further, the upper surface of the sample chamber housing is concavely provided with an observation window accommodating cavity, and an observation window sealing ring groove is arranged around the side of the observation window, and a fluorine rubber O-ring sealing ring is placed in it, and the observation window The surrounding side of the fluorine rubber O-ring is sealed with the side wall of the observation window accommodating cavity.

进一步地,所述观察窗收容腔的开口端的一侧边上设有多个半圆形沉槽。Further, a plurality of semicircular sinking grooves are provided on one side of the opening end of the viewing window accommodation chamber.

进一步地,还包括一出气帘接头,所述出气帘接头具有多个与所述出气孔对接的对接孔,所述样品室壳体的右侧面还设有一排气阀。Further, it also includes an air outlet curtain joint, the air outlet curtain joint has a plurality of docking holes connected with the air outlet holes, and an exhaust valve is also provided on the right side of the sample chamber housing.

进一步地,所述出气孔为3~6个,每一所述出气孔的内径为1~3mm。Further, there are 3 to 6 air outlets, and the inner diameter of each air outlet is 1 to 3 mm.

进一步地,所述样品放置口的开口端设有倒角,还包括圆头手柄,所述快插式样品池的左侧面开设有与所述圆头手柄配合的圆头手柄螺丝孔。Further, the opening end of the sample placement port is provided with a chamfer, and also includes a round-end handle, and a round-end handle screw hole matching the round-end handle is provided on the left side of the quick-plug type sample cell.

本发明的实施例提供的技术方案带来的有益效果是:本发明的一种超快速多出口激光剥蚀池,其上的样品室壳体的右侧面开设有多个并列设置的出气孔,能同时传输激光剥蚀池中间和边角的气溶胶,从而能够有效的遏制因产生的涡流而出现的较严重的元素分馏和记忆效应,通过提高气溶胶的传输速率来提高分析结果的准确性。The beneficial effects brought by the technical solution provided by the embodiments of the present invention are: an ultra-fast multi-exit laser ablation cell of the present invention, on which a plurality of air outlets arranged side by side are opened on the right side of the sample chamber shell, The aerosol in the middle and corners of the laser ablation pool can be transmitted at the same time, so that the serious element fractionation and memory effect caused by the eddy current can be effectively curbed, and the accuracy of the analysis results can be improved by increasing the transmission rate of the aerosol.

附图说明Description of drawings

图1是本发明超快速多出口激光剥蚀池的一整体结构示意图;Fig. 1 is a schematic diagram of an overall structure of an ultra-fast multi-outlet laser ablation pool of the present invention;

图2是图1的超快速多出口激光剥蚀池中的样品室壳体的结构示意图;Fig. 2 is a schematic structural view of the sample chamber housing in the ultra-fast multi-exit laser ablation cell of Fig. 1;

图3是图1的超快速多出口激光剥蚀池中的快插式样品池的结构示意图;Fig. 3 is a schematic structural view of the quick-insert sample cell in the ultra-fast multi-outlet laser ablation cell of Fig. 1;

图4是图1的超快速多出口激光剥蚀池中的观察窗的结构示意图;Fig. 4 is the structural representation of the observation window in the ultrafast multi-exit laser ablation cell of Fig. 1;

图5是图1的超快速多出口激光剥蚀池中的底板的结构示意图。Fig. 5 is a schematic structural view of the bottom plate in the ultra-fast multi-exit laser ablation cell of Fig. 1 .

具体实施方式Detailed ways

为使本发明的目的、技术方案和优点更加清楚,下面将结合附图对本发明实施方式作进一步地描述。In order to make the purpose, technical solution and advantages of the present invention clearer, the embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

请参考图1,本发明的实施例提供了一种超快速多出口激光剥蚀池,主要包括:样品室空壳1,设于所述样品室空壳1的快插式样品池2和观察窗3以及固定所述样品室空壳1的底板4。Please refer to Fig. 1, an embodiment of the present invention provides an ultra-fast multi-outlet laser ablation cell, which mainly includes: a sample chamber shell 1, a quick-insert sample cell 2 and an observation window located in the sample chamber shell 1 3 and the bottom plate 4 that fixes the empty shell 1 of the sample chamber.

请参考图2,所述样品室壳1体为中空结构,即内部具有中空腔,所述中空腔用于收容所述快插式样品池。所述样品室壳体的上表面和下表面分别设有观察窗3和透射光窗口20,通过所述观察窗3可以观察所述中空腔内的情况,激光可以透过所述透射光窗口20进入所述中空腔。Please refer to FIG. 2 , the sample chamber casing 1 is a hollow structure, that is, there is a hollow cavity inside, and the hollow cavity is used to accommodate the quick-insert sample cell. The upper surface and the lower surface of the sample chamber housing are respectively provided with an observation window 3 and a transmitted light window 20, the situation in the hollow cavity can be observed through the observation window 3, and the laser light can pass through the transmitted light window 20 into the hollow cavity.

所述样品室壳体1的左侧面开设有样品放置口13,所述样品放置口13的开口端设有倒角12,所述快插式样品池2通过所述样品放置口13固定于所述样品室壳体1内的中空腔中。所述样品室壳体1的右侧面开设有多个并列设置的出气孔9,本实施例中,所述出气孔9的数量为3~6个,优选为5个。每一所述出气孔9的内径为1~3mm,优选其内径为2mm。所述样品室壳体1的右侧面还具有一出气帘接头6,所述出气帘接头6具有多个与所述出气孔9对接的对接孔,该对接孔与对应的所述出气孔9一一对接,其数量也优选为5个。所述出气孔9用于将所述中空腔中的气溶胶汇集于所述出气帘接头6,使气溶胶最终被所述出气帘接头6传输走。所述样品室壳体的右侧面还具有一排气阀7,当放置所述快插式样品池2时,松开所述排气阀7,将所述中空腔内的空气排出,当所述快插式样品池2放置到位后,关闭排气阀7,防止气溶胶从所述排气阀7流出。The left side of the sample chamber housing 1 is provided with a sample placement port 13, and the opening end of the sample placement port 13 is provided with a chamfer 12, and the quick-insert sample cell 2 is fixed on the sample placement port 13. In the hollow cavity in the sample chamber housing 1 . The right side of the sample chamber casing 1 is provided with a plurality of air outlet holes 9 arranged side by side. In this embodiment, the number of the air outlet holes 9 is 3-6, preferably 5. The inner diameter of each air outlet hole 9 is 1-3 mm, preferably 2 mm. The right side of the sample chamber housing 1 also has an air outlet curtain joint 6, and the air outlet curtain joint 6 has a plurality of docking holes docked with the air outlet holes 9, and the butt joint holes are connected to the corresponding air outlet holes 9. For one-to-one docking, the number is also preferably five. The air outlet hole 9 is used to collect the aerosol in the hollow cavity at the air outlet curtain joint 6 , so that the aerosol is finally transported away by the air outlet curtain joint 6 . The right side of the sample chamber housing also has an exhaust valve 7. When placing the quick-insert sample cell 2, loosen the exhaust valve 7 to discharge the air in the hollow cavity. After the quick-insert sample cell 2 is put in place, the exhaust valve 7 is closed to prevent the aerosol from flowing out from the exhaust valve 7 .

所述样品室壳体1的左侧面开设有一载气进气孔11,所述载气进气孔11设置于距离所述样品室壳体1上表面向下1mm处,所述载气进气孔11的内径小于0.5mm,具体为0.2~0.3mm,优选其内径为0.3mm。一载气进气接头5的一端穿过所述样品室壳体1的前侧面或者后侧面,并与所述载气进气孔11垂直连通,所述载气进气孔11的左侧端被环氧树脂封堵,使载气只能从所述载气进气孔11的右侧端流出。The left side of the sample chamber casing 1 is provided with a carrier gas inlet hole 11, and the carrier gas inlet hole 11 is arranged at a distance of 1 mm downward from the upper surface of the sample chamber casing 1, and the carrier gas inlet The inner diameter of the pores 11 is less than 0.5 mm, specifically 0.2-0.3 mm, preferably 0.3 mm. One end of a carrier gas inlet joint 5 passes through the front side or rear side of the sample chamber housing 1, and communicates vertically with the carrier gas inlet 11, and the left side of the carrier gas inlet 11 It is blocked by epoxy resin so that the carrier gas can only flow out from the right end of the carrier gas inlet hole 11 .

所述出气孔9和所述载气进气孔11均向内延伸与所述中空腔连通。Both the air outlet hole 9 and the carrier gas inlet hole 11 extend inward and communicate with the hollow cavity.

请参考图2和图4,所述样品室壳体1上表面向下凹设有观察窗收容腔,所述观察窗3的侧边四周设有观察窗密封圈槽17,其内放置有氟胶O型密封圈,所述观察窗3的侧边四周通过该氟胶O型密封圈与所述观察窗收容腔的侧壁密封。所述观察窗3安装有高透镜片18,所述高透镜片18的厚度为0.4~1mm,其光透过率在90%以上,有助于减小激光剥蚀能量的损失。所述观察窗3大致为长方形。Please refer to Fig. 2 and Fig. 4, the upper surface of the sample chamber housing 1 is concavely provided with an observation window accommodating cavity, the sides of the observation window 3 are provided with an observation window sealing ring groove 17, and fluorine is placed therein. A glue O-ring, the side of the observation window 3 is sealed with the side wall of the observation window accommodating cavity through the fluorine rubber O-ring. The observation window 3 is equipped with a high lens sheet 18, the thickness of the high lens sheet 18 is 0.4-1mm, and its light transmittance is above 90%, which helps to reduce the loss of laser ablation energy. The observation window 3 is roughly rectangular.

所述观察窗收容腔的开口端的一侧边上设有多个半圆形沉槽10,优选所述半圆形沉槽10数量为两个,两个所述半圆形沉槽10主要用于方便拆卸或者更换所述高透镜片18,从而方便对所述观察窗3的进行维护和清洗。One side of the opening end of the observation window housing cavity is provided with a plurality of semicircular sinking grooves 10, preferably the number of said semicircular sinking grooves 10 is two, and the two semicircular sinking grooves 10 are mainly used for It is convenient to disassemble or replace the high lens sheet 18, so as to facilitate the maintenance and cleaning of the observation window 3.

请参考图3,所述快插式样品池2具有自其上表面下凹的样品容纳腔,所述样品容纳腔用于容纳样品。所述样品容纳腔处于所述观察窗3的正下方,透过所述观察窗3可以观察到所述样品容纳腔内的情况。Please refer to FIG. 3 , the quick-insert sample cell 2 has a sample holding chamber recessed from its upper surface, and the sample holding chamber is used to hold a sample. The sample holding chamber is directly below the observation window 3 , and the situation in the sample holding chamber can be observed through the observation window 3 .

所述快插式样品池2的上表面具有快插式样品池顶部密封圈槽15,所述样品容纳腔被所述快插式样品池顶部密封圈槽15圈围,位于所述快插式样品池顶部密封圈槽15的内侧。所述快插式样品池顶部密封圈槽15内放置有氟胶O型密封圈,所述快插式样品池2的上表面通过该氟胶O型密封圈与所述样品室壳体1的顶部密封。The upper surface of the quick-insert sample cell 2 has a top seal ring groove 15 of the quick-insert sample cell, and the sample holding chamber is surrounded by the top seal ring groove 15 of the quick-insert sample cell, and is located at the top of the quick-insert sample cell. The inner side of the sealing ring groove 15 on the top of the sample cell. A fluorine rubber O-ring seal is placed in the top seal ring groove 15 of the quick-insert sample cell, and the upper surface of the quick-insert sample cell 2 passes through the fluorine rubber O-ring seal and the sample chamber housing 1. Top seal.

所述快插式样品池2的颈部具有快插式样品池颈部密封圈槽14,其内放置有氟胶O型密封圈,所述快插式样品池2的颈部通过该氟胶O型密封圈与所述样品室壳体1的左端区域密封。The neck of the quick-insert sample cell 2 has a quick-insert sample cell neck sealing ring groove 14, in which a fluorine rubber O-ring is placed, and the neck of the quick-insert sample cell 2 passes through the fluorine rubber The O-ring is sealed with the left end area of the sample chamber housing 1 .

所述快插式样品池2的颈部和其上表面采用安装氟胶0型密封圈的设计,使其通入的载气不会流向两侧只能流入所述出气帘接头6,减小了剥蚀池的有效体积。所述超快速多出口激光剥蚀池的右侧端加入了排气阀7,当换样时松开所述排气阀7,换样过程混入的空气可快速从所述排气阀7排出,避免了常规繁琐耗时的排气流程和混入空气导致的仪器熄火问题,显著提高了工作效率。The neck of the quick-plug type sample cell 2 and its upper surface adopt the design of installing a fluorine rubber O-shaped sealing ring, so that the carrier gas introduced into it will not flow to both sides and can only flow into the outlet curtain joint 6, reducing the effective volume of the denudation pool. An exhaust valve 7 is added to the right end of the ultra-fast multi-outlet laser ablation cell, and the exhaust valve 7 is loosened when the sample is changed, and the air mixed in the sample change process can be quickly discharged from the exhaust valve 7, It avoids the conventional tedious and time-consuming exhaust process and the flameout of the instrument caused by air mixing, and significantly improves the work efficiency.

请参考图1和图3,所述超快速多出口激光剥蚀池还包括圆头手柄18,所述快插式样品池2的左侧面开设有与所述圆头手柄18配合的圆头手柄螺丝孔16。所述圆头手柄18通过所述圆头手柄螺丝孔16固定于所述快插式样品池2,通过拉动所述圆头手柄18,可以轻松的将所述快插式样品池2从所述样品室壳体1中取出。Please refer to Figure 1 and Figure 3, the ultra-fast multi-outlet laser ablation cell also includes a round handle 18, and the left side of the quick-insert sample cell 2 is provided with a round handle that matches the round handle 18 16 screw holes. The round handle 18 is fixed to the quick-insert sample cell 2 through the round-end handle screw hole 16, and by pulling the round-end handle 18, the quick-insert sample cell 2 can be easily removed from the Take out the sample chamber housing 1.

请参考图5,所述底板4通过M3平头螺丝孔与所述样品室壳体1底部相对应位置螺丝孔固定,所述底板4大致为长方形,放置在激光剥蚀系统的移动滑台上。Please refer to FIG. 5 , the bottom plate 4 is fixed to the corresponding screw holes at the bottom of the sample chamber housing 1 through the M3 flat-head screw holes. The bottom plate 4 is roughly rectangular and placed on the moving slide of the laser ablation system.

本发明的实施例提供的技术方案带来的有益效果是:本发明的一种超快速多出口激光剥蚀池,其上的样品室壳体1的右侧面开设有多个并列设置的出气孔9,能同时传输激光剥蚀池中间和边角的气溶胶,从而能够有效的遏制因产生的涡流而出现的较严重的元素分馏和记忆效应,通过提高气溶胶的传输速率来提高分析结果的准确性。The beneficial effect brought by the technical solution provided by the embodiments of the present invention is: an ultra-fast multi-exit laser ablation cell of the present invention, on which the right side of the sample chamber housing 1 is provided with a plurality of air outlets arranged in parallel 9. It can transmit the aerosol in the middle and corner of the laser ablation pool at the same time, so that it can effectively curb the serious element fractionation and memory effect caused by the generated eddy current, and improve the accuracy of the analysis results by increasing the transmission rate of the aerosol sex.

在本文中,所涉及的前、后、上、下等方位词是以附图中零部件位于图中以及零部件相互之间的位置来定义的,只是为了表达技术方案的清楚及方便。应当理解,所述方位词的使用不应限制本申请请求保护的范围。In this article, the orientation words such as front, rear, upper, and lower involved are defined by the parts in the drawings and the positions between the parts in the drawings, just for the clarity and convenience of expressing the technical solution. It should be understood that the use of the location words should not limit the scope of protection claimed in this application.

在不冲突的情况下,本文中上述实施例及实施例中的特征可以相互结合。In the case of no conflict, the above-mentioned embodiments and features in the embodiments herein may be combined with each other.

以上所述仅为本发明的较佳实施例,并不用以限制本发明,凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the protection of the present invention. within range.

Claims (7)

1.一种超快速多出口激光剥蚀池,包括样品室壳体和快插式样品池,所述样品室壳体的上表面和下表面分别设有观察窗和透射光窗口,所述样品室壳体的左侧面开设有样品放置口,所述快插式样品池通过所述样品放置口固定于所述样品室壳体内的中空腔中,其特征在于:所述快插式样品池具有自其上表面下凹的样品容纳腔,所述快插式样品池的上表面和颈部与所述样品室壳体密封设置,所述样品室壳体的右侧面开设有多个并列设置的出气孔,所述样品室壳体的左侧面开设有一载气进气孔,所述出气孔和所述载气进气孔均向内延伸与所述样品容纳腔连通;所述载气进气孔的孔径为0.2~0.3mm;所述出气孔为3~6个,每一所述出气孔的内径为1~3mm;所述激光剥蚀池还包括一出气帘接头,所述出气帘接头具有多个与所述出气孔对接的对接孔,所述样品室壳体的右侧面还设有一排气阀。1. An ultra-fast multi-exit laser ablation cell, comprising a sample chamber housing and a quick-insert sample cell, the upper surface and the lower surface of the sample chamber housing are respectively provided with an observation window and a transmitted light window, and the sample chamber A sample placement port is opened on the left side of the housing, and the quick-insert sample cell is fixed in the hollow cavity in the sample chamber casing through the sample placement port, and it is characterized in that: the quick-insert sample cell has A sample holding chamber concaved from its upper surface, the upper surface and neck of the quick-insert sample cell are sealed with the sample chamber casing, and a plurality of side-by-side arrangements are opened on the right side of the sample chamber casing The air outlet hole, the left side of the sample chamber shell is provided with a carrier gas inlet hole, and the air outlet hole and the carrier gas inlet hole both extend inward and communicate with the sample holding chamber; the carrier gas The aperture of the air inlet hole is 0.2-0.3mm; the number of the air outlet holes is 3-6, and the inner diameter of each of the air outlet holes is 1-3mm; the laser ablation pool also includes an air outlet curtain joint, and the air outlet curtain The joint has a plurality of docking holes which are docked with the air outlet, and the right side of the sample chamber housing is also provided with an exhaust valve. 2.如权利要求1所述的超快速多出口激光剥蚀池,其特征在于:一载气进气接头的一端穿过所述样品室壳体的前侧面或者后侧面,并与所述载气进气孔垂直连通,所述载气进气孔靠近外界的一端被封堵,以堵阻止载气外溢。2. The ultra-fast multi-outlet laser ablation cell as claimed in claim 1, characterized in that: one end of a carrier gas inlet joint passes through the front side or the rear side of the sample chamber housing, and is connected with the carrier gas The inlet hole is connected vertically, and the end of the carrier gas inlet hole close to the outside is blocked to prevent the carrier gas from overflowing. 3.如权利要求1所述的超快速多出口激光剥蚀池,其特征在于:所述快插式样品池的上表面具有快插式样品池顶部密封圈槽,其内放置有氟胶O型密封圈,所述快插式样品池的上表面通过该氟胶O型密封圈与所述样品室壳体的顶部密封。3. The ultra-fast multi-outlet laser ablation cell as claimed in claim 1, characterized in that: the upper surface of the quick-insert sample cell has a top sealing ring groove for the quick-insert sample cell, and a fluorine rubber O-type A sealing ring, the upper surface of the quick-insert sample cell is sealed with the top of the sample chamber housing through the fluorine rubber O-ring. 4.如权利要求1所述的超快速多出口激光剥蚀池,其特征在于:所述快插式样品池的颈部具有快插式样品池颈部密封圈槽,其内放置有氟胶O型密封圈,所述快插式样品池的颈部通过该氟胶O型密封圈与所述样品室壳体的左端区域密封。4. The ultra-fast multi-outlet laser ablation cell as claimed in claim 1, characterized in that: the neck of the quick-insert sample cell has a quick-insert sample cell neck sealing ring groove, and fluorine rubber O is placed therein. O-shaped sealing ring, the neck of the quick-insert sample cell is sealed with the left end area of the sample chamber housing through the fluorine rubber O-shaped sealing ring. 5.如权利要求1所述的超快速多出口激光剥蚀池,其特征在于:所述样品室壳体上表面凹设有观察窗收容腔,所述观察窗的侧边四周设有观察窗密封圈槽,其内放置有氟胶O型密封圈,所述观察窗的侧边四周通过该氟胶O型密封圈与所述观察窗收容腔的侧壁密封。5. The ultra-fast multi-outlet laser ablation cell as claimed in claim 1, characterized in that: the upper surface of the sample chamber shell is concavely provided with an observation window accommodating cavity, and the sides of the observation window are provided with observation window seals A ring groove, in which a fluorine rubber O-ring is placed, and the sides of the observation window are sealed with the side walls of the observation window accommodating cavity by the fluorine rubber O-ring. 6.如权利要求5所述的超快速多出口激光剥蚀池,其特征在于:所述观察窗收容腔的开口端的一侧边上设有多个半圆形沉槽。6. The ultra-fast multi-outlet laser ablation cell according to claim 5, wherein a plurality of semicircular sinks are arranged on one side of the opening end of the observation window accommodation chamber. 7.如权利要求1所述的超快速多出口激光剥蚀池,其特征在于:所述样品放置口的开口端设有倒角,还包括圆头手柄,所述快插式样品池的左侧面开设有与所述圆头手柄配合的圆头手柄螺丝孔。7. The ultra-fast multi-outlet laser ablation cell according to claim 1, characterized in that: the opening end of the sample placement port is provided with a chamfer, and also includes a round handle, and the left side of the quick-insert sample cell A round head handle screw hole matched with the round head handle is opened on the surface.
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