CN107192897B - 一种压电半导体薄膜极化实验装置 - Google Patents
一种压电半导体薄膜极化实验装置 Download PDFInfo
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- CN107192897B CN107192897B CN201710574659.1A CN201710574659A CN107192897B CN 107192897 B CN107192897 B CN 107192897B CN 201710574659 A CN201710574659 A CN 201710574659A CN 107192897 B CN107192897 B CN 107192897B
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- 238000010438 heat treatment Methods 0.000 claims abstract description 24
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 10
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/22—Measuring piezoelectric properties
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2648—Characterising semiconductor materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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CN201710574659.1A CN107192897B (zh) | 2017-07-14 | 2017-07-14 | 一种压电半导体薄膜极化实验装置 |
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CN107192897A CN107192897A (zh) | 2017-09-22 |
CN107192897B true CN107192897B (zh) | 2023-05-23 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013018604A1 (ja) * | 2011-07-29 | 2013-02-07 | 株式会社村田製作所 | 圧電デバイス、および、圧電デバイスの製造方法 |
CN102942026A (zh) * | 2012-11-18 | 2013-02-27 | 苏州蓝王机床工具科技有限公司 | 输送机皮带的涨紧机构 |
CN106291142A (zh) * | 2016-09-19 | 2017-01-04 | 郑州大学 | 压电陶瓷及压电半导体试件多样性极化实验系统 |
CN206051868U (zh) * | 2016-09-19 | 2017-03-29 | 黄河科技学院 | 压电陶瓷片滑动夹持式极化装置 |
CN206990688U (zh) * | 2017-07-14 | 2018-02-09 | 郑州大学 | 一种压电半导体薄膜极化实验装置 |
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2017
- 2017-07-14 CN CN201710574659.1A patent/CN107192897B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013018604A1 (ja) * | 2011-07-29 | 2013-02-07 | 株式会社村田製作所 | 圧電デバイス、および、圧電デバイスの製造方法 |
CN102942026A (zh) * | 2012-11-18 | 2013-02-27 | 苏州蓝王机床工具科技有限公司 | 输送机皮带的涨紧机构 |
CN106291142A (zh) * | 2016-09-19 | 2017-01-04 | 郑州大学 | 压电陶瓷及压电半导体试件多样性极化实验系统 |
CN206051868U (zh) * | 2016-09-19 | 2017-03-29 | 黄河科技学院 | 压电陶瓷片滑动夹持式极化装置 |
CN206990688U (zh) * | 2017-07-14 | 2018-02-09 | 郑州大学 | 一种压电半导体薄膜极化实验装置 |
Non-Patent Citations (2)
Title |
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雷开卓 ; 左睿 ; 石秀华 ; 段维军 ; .压电陶瓷多试样同步极化装置.机械科学与技术.(第02期),全文. * |
雷开卓 ; 左睿 ; 石秀华 ; 郑卫民 ; .新型压电陶瓷极化装置设计和研究.压电与声光.(第01期),全文. * |
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Effective date of registration: 20220106 Address after: 450000 incubator 1, science and Technology Park, Henan National University, No. 11, Changchun Road, high tech Industrial Development Zone, Zhengzhou, Henan 717 Applicant after: Henan ganlian Intelligent Technology Co.,Ltd. Address before: No. 100, Kexue Avenue, high tech Development Zone, Zhengzhou City, Henan Province Applicant before: Zhengzhou University |
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Inventor after: Qin Guoshuai Inventor after: Fan Cuiying Inventor before: Qin Guoshuai Inventor before: Fan Cuiying Inventor before: Xu Guangtao Inventor before: Zhao Minghao |
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