CN107192337A - The method for measuring micro-displacement using CCD based on Slit Diffraction - Google Patents
The method for measuring micro-displacement using CCD based on Slit Diffraction Download PDFInfo
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- CN107192337A CN107192337A CN201710417296.0A CN201710417296A CN107192337A CN 107192337 A CN107192337 A CN 107192337A CN 201710417296 A CN201710417296 A CN 201710417296A CN 107192337 A CN107192337 A CN 107192337A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
A kind of method for measuring micro-displacement using CCD based on Slit Diffraction, pass through two parallel single seams, one is calibration slit (known to slit width), another is measuring slit (slit width is variable), two single seam difference diffraction, then the different diffraction image that two slits are obtained can be acquired on the focal plane that convex lens converge to lens by CCD device.The analysis that image transmitting carries out next step into software is calculated, and finally calculates the conversion of slit width, that is, small displacement.It is easy to operate, automatic measurement is realized, while measuring displacement using diffraction system, its measurement accuracy is high, and automation, intelligent, high-precision measurement small displacement are realized in the measurements.
Description
Technical field
The present invention relates to ranging field, and in particular to a kind of method that utilization ccd image processing measures micro-displacement.
Background technology
At this stage, the development of domestic and international micro-displacement measurement technology, measurement distance becomes less and less, so micro-displacement
Measurement become more and more important.The instrument of measurement micro-displacement also becomes intelligent, automation, and the precision of measurement is very high, surveys
The dynamic range of amount also develops to wider field, and the dimension of measurement is also in change, from the one-dimensional measurement to two dimension to various dimensions
Field is developed.In the last few years, the method for generating many measurement micro-displacements, such as optics, electromagnetism, Mechanics of Machinery are all multi-party
Method, but can substantially be divided into two major classes, a class is non-optical method, and a class is optical method.Non-optical method has：
Based on linear adjustable differential transformer measurement, Digital Image Processing measurement, ELECTROMAGNETIC LAUNCH TECHNOLOGY measurement, current vortex displacement sensing
Device measurement, magnetic field measurement technology, microscopic techniques, amesdial and dial gauge mensuration, sensor mensuration etc..Optics
Measuring method also have many, include the measurement of laser scanning displacement, grating fringe displacement measurement, optical lever method, the dry of light are penetrated
Method, the diffraction approach of light, infrared technique displacement measurement, optical imagery displacement etc..No matter traditional displacement measurement method is non-light
The drawbacks of there is not high measurement accuracy or measurement complex operation in method or optical method.
The content of the invention
The present invention in order to overcome the shortcomings of above technology there is provided it is a kind of it is simple to operate, realize automatic measurement and measurement
The high method for measuring micro-displacement using CCD based on Slit Diffraction of precision.
The technical scheme that the present invention overcomes its technical problem to be used is：
A kind of method for being measured micro-displacement using CCD based on Slit Diffraction, is comprised the following steps：
A) two wavelength identical LASER Light Sources, the light path of two light sources is parallel, wherein the light that a LASER Light Source is projected
Line passes through and thinkling sound's standing grain fraunhofer-diffraction is produced after calibration slit, and the light that another LASER Light Source is projected passes through generation thinkling sound's standing grain after variable gap to take
Light path after diffraction, two diffraction passes through and forms two width diffraction images on the back focal plane that convex lens are focused on after convex lens, moves
The gap width of variable gap changes therewith during the displacement of animal body；
B) before micro-displacement occurs for mobile object, two width diffraction images are recorded and are converted into digital information by CCD camera
Preserve to computer；
C) two width diffraction images are read using MATLAB, ash is carried out to the image read using rgb2gray function commands
Angle value is changed；
D) transmission function processing is carried out to the image for being converted to gray value using Butterworth LPF, makes its image
Smothing filtering；
E) image after two width smothing filterings is changed into stripe pattern by Fourier transformation；
F) the primary maximum width Delta x of the stripe pattern of the diffraction produced by calibration slit is calculated using MATLABIt is fixed, utilize
MATLAB calculates the primary maximum width Delta x of the stripe pattern of the diffraction produced by variable gapBecome；
G) formula is passed throughCalculate the width a of variable gapBecome, whereinF is convex lens in formula
Focal length, λ be LASER Light Source wavelength；
H) after micro-displacement occurs for mobile object, the width of variable gap changes, and CCD camera spreads out two width after displacement
Image is penetrated to record and be converted into Preserving Electronic Information to computer；
I) two width diffraction images are read using MATLAB, ash is carried out to the image read using rgb2gray function commands
Angle value is changed；
G) transmission function processing is carried out to the image for being converted to gray value using Butterworth LPF, makes its image
Smothing filtering；
K) image after two width smothing filterings is changed into stripe pattern by Fourier transformation；
L) the primary maximum width Delta x of the stripe pattern of the diffraction produced by calibration slit is calculated using MATLABIt is fixed, utilize
MATLAB calculates the primary maximum width Delta x of the stripe pattern of the diffraction produced by the variable gap after displacementBecome′；
M) formula is passed throughIt is calculated as the width a of later variable gapBecome′
N) pass through | aBecome-aBecome' | calculate the displacement of mobile object.
Above-mentioned LASER Light Source uses 650nm red-light source.
Primary maximum width Delta x in step f)It is fixedComputational methods be：
F-1.1 the gray scale of the stripe pattern of the diffraction produced in MATLAB software extraction steps d) by calibration slit) is utilized
Value matrix, extracts the maximum of gray value in each columns group in gray scale value matrix, and the maximum of each gray value constitutes single seam
The Fraunhofer diffraction surface of intensity distribution；
F-1.2 the address of all minimums in single seam Fraunhofer diffraction surface of intensity distribution) is found using MATLAB softwares,
Gray value minimum is defined as the address of dark fringe；
F-1.3 the address of light intensity maximum in single seam Fraunhofer diffraction surface of intensity distribution) is found using MATLAB softwares,
The address of light intensity maximum is defined as the address at primary maximum center；
F-1.4 a filaments of sun minimum in all dark fringe addresses more than primary maximum center) are found using MATLAB softwares
Line, the address of the dark fringe is defined as the address of positive one very dark fringe center；
F-1.5 a filaments of sun maximum in all dark fringe addresses more than primary maximum center) are found using MATLAB softwares
Line, the address of the dark fringe is defined as the address of the very dark fringe center of negative one；
F-1.6) the spacing between the address of the positive very dark fringe center of calculating and the address for being the very dark fringe center of negative one,
The spacing is primary maximum width Delta xIt is fixed。
Primary maximum width Delta x in step f)BecomeComputational methods be：
F-2.1 the gray scale of the stripe pattern of the diffraction produced in MATLAB software extraction steps d) by variable gap) is utilized
Value matrix, extracts the maximum of gray value in each columns group in gray scale value matrix, and the maximum of each gray value constitutes single seam
The Fraunhofer diffraction surface of intensity distribution；
F-2.2 the address of all minimums in single seam Fraunhofer diffraction surface of intensity distribution) is found using MATLAB softwares,
Gray value minimum is defined as the address of dark fringe；
F-2.3 the address of light intensity maximum in single seam Fraunhofer diffraction surface of intensity distribution) is found using MATLAB softwares,
The address of light intensity maximum is defined as the address at primary maximum center；
F-2.4 a filaments of sun minimum in all dark fringe addresses more than primary maximum center) are found using MATLAB softwares
Line, the address of the dark fringe is defined as the address of positive one very dark fringe center；
F-2.5 a filaments of sun maximum in all dark fringe addresses more than primary maximum center) are found using MATLAB softwares
Line, the address of the dark fringe is defined as the address of the very dark fringe center of negative one；
F-2.6) the spacing between the address of the positive very dark fringe center of calculating and the address for being the very dark fringe center of negative one,
The spacing is primary maximum width Delta xBecome。
The beneficial effects of the invention are as follows：The measuring method of traditional micro-displacement compares, with obviously advantage.
In the angle of physical Design, using high-resolution CCD equipment and MATLAB softwares, thing is calculated using the gray value of image
The micro-displacement of body, with higher innovative and breakthrough.Possess advantages below on metering system：
(1) convenient operation：Experimental provision is simple, and operating procedure is simple, and human intervention is fewer.
(2) automatic measurement：This experiment is based on CCD acquisition systems and MATLAB image processing systems are measured, substantially
There is no manual operation, fully achieve automatic measurement.
(3) unique structure：Contrast slit diffraction system is a kind of diffraction system of autonomous Design, and structure is novel, measurement essence
Degree is high.
(4) metering system is simple.
(5) error is small：Due to Comparison study slit diffraction, when image comparison is handled, unrelated parameter and instrument are missed
Difference is divided out, and removes the inaccurate influence brought with instrument variation of parameter.
The method is based on MATLAB optical image security technologies, and appliance computer experiment with computing data, can realize certainly
Dynamicization, intelligentized measurement possesses many incomparable advantages in this approach.The contrast for being based especially on single slit diffraction is narrow
The diffraction system of seam, the IMAQ of high resolution CCD camera and the optical image security technical method based on MATLAB, are these
The item topmost several spotlights of subject study, therefore can realize that automation, intelligent, high-precision measurement are small in the measurements
Displacement.
Embodiment
The present invention will be further described below.
A kind of method for being measured micro-displacement using CCD based on Slit Diffraction, is comprised the following steps：
A) two wavelength identical LASER Light Sources, the light path of two light sources is parallel, wherein the light that a LASER Light Source is projected
Line passes through and thinkling sound's standing grain fraunhofer-diffraction is produced after calibration slit, and the light that another LASER Light Source is projected passes through generation thinkling sound's standing grain after variable gap to take
Light path after diffraction, two diffraction passes through and forms two width diffraction images on the back focal plane that convex lens are focused on after convex lens, moves
The gap width of variable gap changes therewith during the displacement of animal body；
B) before micro-displacement occurs for mobile object, two width diffraction images are recorded and are converted into digital information by CCD camera
Preserve to computer；
C) two width diffraction images are read using MATLAB, ash is carried out to the image read using rgb2gray function commands
Angle value is changed；
D) transmission function processing is carried out to the image for being converted to gray value using Butterworth LPF, makes its image
Smothing filtering；
E) image after two width smothing filterings is changed into stripe pattern by Fourier transformation；
F) the primary maximum width Delta x of the stripe pattern of the diffraction produced by calibration slit is calculated using MATLABIt is fixed, utilize
MATLAB calculates the primary maximum width Delta x of the stripe pattern of the diffraction produced by variable gapBecome；
G) formula is passed throughCalculate the width a of variable gapBecome, whereinF is convex lens in formula
Focal length, λ be LASER Light Source wavelength；
H) after micro-displacement occurs for mobile object, the width of variable gap changes, and CCD camera spreads out two width after displacement
Image is penetrated to record and be converted into Preserving Electronic Information to computer；
I) two width diffraction images are read using MATLAB, ash is carried out to the image read using rgb2gray function commands
Angle value is changed；
G) transmission function processing is carried out to the image for being converted to gray value using Butterworth LPF, makes its image
Smothing filtering；
K) image after two width smothing filterings is changed into stripe pattern by Fourier transformation；
L) the primary maximum width Delta x of the stripe pattern of the diffraction produced by calibration slit is calculated using MATLABIt is fixed, utilize
MATLAB calculates the primary maximum width Delta x of the stripe pattern of the diffraction produced by the variable gap after displacementBecome′；
M) formula is passed throughIt is calculated as the width a of later variable gapBecome′
N) pass through | aBecome-aBecome' | calculate the displacement of mobile object.
By two parallel single seams, one is calibration slit (known to slit width), and another is measuring slit (slit width is variable),
Two single seam difference diffraction, the different diffraction image that two slits are obtained can be on the focal plane that convex lens converge to lens, so
It is acquired afterwards by CCD device.The analysis that image transmitting carries out next step into software is calculated, and finally calculates the change of slit width
Change, that is, small displacement.Test laser by calibrating diffraction image that slit diffraction is obtained with being obtained by measuring slit
To diffraction image be analyzed, calculate after the width of measuring slit, the width of measuring slit to be changed, then carry out
Diffractometry, finally gives micro-displacement.The micro-displacement measurement method traditional with laboratory is comparatively, based on single slit diffraction
The measurement structure of principle is fairly simple, and is possessed and can not much be compared based on the optical image security technology that computer calculates measurement
The advantage of plan, this method can realize automation, and intelligentized measurement is based especially on the higher CCD camera of resolution ratio
The method of optical image security technology, can realize high-precision measurement in the measurements.
Micro-displacement more can accurately be measured by this experimental provision, and experimental result is applied to all kinds of correlations
In experiment, for example, expansion of metal coefficient is measured, determine the related experiments such as Young's modulus.
The metering system that the present invention is designed is compared with the measuring method for the micro-displacement that laboratory is traditional, with very bright
Aobvious advantage.In the angle of physical Design, we employ the single slit diffraction mode of autonomous Design, using high-resolution
CCD equipment and MATLAB softwares, three is perfectly combined, and the small position of object is calculated using the gray value of image
Move, with higher innovative and breakthrough.
Possess advantages below on metering system：
(1) convenient operation：Experimental provision is simple, and operating procedure is simple, and human intervention is fewer.
(2) automatic measurement：This experiment is based on CCD acquisition systems and MATLAB image processing systems are measured, substantially
There is no manual operation, fully achieve automatic measurement.
(3) unique structure：Contrast slit diffraction system is a kind of diffraction system of autonomous Design, and structure is novel, measurement essence
Degree is high.
(4) metering system is simple.
(5) error is small：Due to Comparison study slit diffraction, when image comparison is handled, unrelated parameter and instrument are missed
Difference is divided out, and removes the inaccurate influence brought with instrument variation of parameter.
The method is based on MATLAB optical image security technologies, and appliance computer experiment with computing data, can realize certainly
Dynamicization, intelligentized measurement possesses many incomparable advantages in this approach.The contrast for being based especially on single slit diffraction is narrow
The diffraction system of seam, the IMAQ of high resolution CCD camera and the optical image security technical method based on MATLAB, are these
The item topmost several spotlights of subject study, therefore can realize that automation, intelligent, high-precision measurement are small in the measurements
Displacement.
Further, LASER Light Source can use 650nm red-light source.
Primary maximum width Delta x in step f)It is fixedComputational methods be：
Using the gray scale value matrix of the stripe pattern of the diffraction produced in MATLAB software extraction steps d) by calibration slit,
[dlm]=max (d13) command statement is utilized, the maximum of gray value in each columns group in gray scale value matrix is extracted, by them
Rearrange and constitute new array [dlm], the image that [dlm] array is constituted is exactly that the maximum of each gray value constitutes single seam
The Fraunhofer diffraction surface of intensity distribution；
F-1.2 the lives of [d1jxd]=find (diff (sign (diff (d1m)))==2)+1) are utilized in MATLAB softwares
Sentence is made to find the address of all minimums in single seam Fraunhofer diffraction surface of intensity distribution, gray value minimum is defined as the filaments of sun
The address of line, address is stored in [d1jxd]；
F-1.3 utilization [d1Bd]=find (d1m==max (max (d1m))) order language) is utilized in MATLAB softwares
Sentence finds the address of light intensity maximum in single seam Fraunhofer diffraction surface of intensity distribution, and the address of light intensity maximum is defined as main pole
The address at big center, address is stored in [d1Bd]；
F-1.4 [d1z1]=min (d1jxd (find (d1jxd ＞ d1Bd))) command statement) is utilized in MATLAB softwares
A dark fringe minimum in all dark fringe addresses more than primary maximum center is found, the address of the dark fringe is defined as a positive pole
The address at dark fringe center, address is deposited in [d1z1]；
F-1.5 [d1f1]=max (d1jxd (find (d1jxd ＜ d1Bd))) command statement) is utilized in MATLAB softwares
A dark fringe maximum in all dark fringe addresses more than primary maximum center is found, the address of the dark fringe is defined as negative one pole
The address at dark fringe center, address is deposited in [d1f1]；
F-1.6 [d1x]=d1z1-d1f1 command statements) are utilized to calculate the address of a positive very dark fringe center with being negative one
Spacing between the address of very dark fringe center, is stored in [d1x], and the spacing is fixed for primary maximum width Delta x.
Primary maximum width Delta x in step f)BecomeComputational methods be：
F-2.1 the gray scale of the stripe pattern of the diffraction produced in MATLAB software extraction steps d) by variable gap) is utilized
Value matrix, utilizes [dlm]=max (d13) command statement, extracts the maximum of gray value in each columns group in gray scale value matrix
Value, they are rearranged and constitutes new array [dlm], the image that [dlm] array is constituted is exactly the maximum of each gray value
Value constitutes single seam Fraunhofer diffraction surface of intensity distribution；
F-2.2 the lives of [d1jxd]=find (diff (sign (diff (d1m)))==2)+1) are utilized in MATLAB softwares
Sentence is made to find the address of all minimums in single seam Fraunhofer diffraction surface of intensity distribution, gray value minimum is defined as the filaments of sun
The address of line, address is stored in [d1jxd]；
F-2.3 utilization [d1Bd]=find (d1m==max (max (d1m))) order language) is utilized in MATLAB softwares
Sentence finds the address of light intensity maximum in single seam Fraunhofer diffraction surface of intensity distribution, and the address of light intensity maximum is defined as main pole
The address at big center, address is stored in [d1Bd]；
F-2.4 [d1z1]=min (d1jxd (find (d1jxd ＞ d1Bd))) command statement) is utilized in MATLAB softwares
A dark fringe minimum in all dark fringe addresses more than primary maximum center is found, the address of the dark fringe is defined as a positive pole
The address at dark fringe center, address is deposited in [d1z1]；
F-2.5 [d1f1]=max (d1jxd (find (d1jxd ＜ d1Bd))) command statement) is utilized in MATLAB softwares
A dark fringe maximum in all dark fringe addresses more than primary maximum center is found, the address of the dark fringe is defined as negative one pole
The address at dark fringe center, address is deposited in [d1f1]；
F-2.6 [d1x]=d1z1-d1f1 command statements) are utilized to calculate the address of a positive very dark fringe center with being negative one
Spacing between the address of very dark fringe center, is stored in [d1x], and the spacing is primary maximum width Delta xIt is fixed。
Claims (4)
1. a kind of method for measuring micro-displacement using CCD based on Slit Diffraction, it is characterised in that comprise the following steps：
A) two wavelength identical LASER Light Sources, the light path of two light sources is parallel, wherein the light that a LASER Light Source is projected is worn
Generation thinkling sound's standing grain fraunhofer-diffraction after calibration slit is crossed, the light that another LASER Light Source is projected passes through generation thinkling sound standing grain expense after variable gap to spread out
Penetrate, the light path after two diffraction passes through and forms two width diffraction images on the back focal plane that convex lens are focused on after convex lens, mobile
The gap width of variable gap changes therewith during the displacement of object；
B) before micro-displacement occurs for mobile object, two width diffraction images are recorded and are converted into Preserving Electronic Information by CCD camera
To computer；
C) two width diffraction images are read using MATLAB, gray value is carried out to the image read using rgb2gray function commands
Conversion；
D) transmission function processing is carried out to the image for being converted to gray value using Butterworth LPF, makes its image smoothing
Filtering；
E) image after two width smothing filterings is changed into stripe pattern by Fourier transformation；
F) the primary maximum width Delta x of the stripe pattern of the diffraction produced by calibration slit is calculated using MATLABIt is fixed, utilize MATLAB
Calculate the primary maximum width Delta x of the stripe pattern of the diffraction produced by variable gapBecome；
G) formula is passed throughCalculate the width a of variable gapBecome, whereinF is Jiao of convex lens in formula
Away from λ is the wavelength of LASER Light Source；
H) after micro-displacement occurs for mobile object, the width of variable gap changes, and CCD camera is by two width diffraction patterns after displacement
As recording and being converted into Preserving Electronic Information to computer；
I) two width diffraction images are read using MATLAB, gray value is carried out to the image read using rgb2gray function commands
Conversion；
G) transmission function processing is carried out to the image for being converted to gray value using Butterworth LPF, makes its image smoothing
Filtering；
K) image after two width smothing filterings is changed into stripe pattern by Fourier transformation；
L) the primary maximum width Delta x of the stripe pattern of the diffraction produced by calibration slit is calculated using MATLABIt is fixed, utilize MATLAB
Calculate the primary maximum width Delta x of the stripe pattern of the diffraction produced by the variable gap after displacementBecome′；
M) formula is passed throughIt is calculated as the width a of later variable gapBecome′
N) pass through | aBecome-aBecome' | calculate the displacement of mobile object.
2. the method according to claim 1 for being measured micro-displacement using CCD based on Slit Diffraction, its feature is existed
In：The LASER Light Source uses 650nm red-light source.
3. the method according to claim 1 for being measured micro-displacement using CCD based on Slit Diffraction, its feature is existed
In：Primary maximum width Delta x in step f)It is fixedComputational methods be：
F-1.1 the gray value square of the stripe pattern of the diffraction produced in MATLAB software extraction steps d) by calibration slit) is utilized
Battle array, extracts the maximum of gray value in each columns group in gray scale value matrix, and the maximum of each gray value constitutes single seam husband thinkling sound
The standing grain fraunhofer-diffraction surface of intensity distribution；
F-1.2 the address of all minimums in single seam Fraunhofer diffraction surface of intensity distribution, gray scale) are found using MATLAB softwares
Value minimum is defined as the address of dark fringe；
F-1.3 the address of light intensity maximum in single seam Fraunhofer diffraction surface of intensity distribution, light intensity) are found using MATLAB softwares
The address of maximum is defined as the address at primary maximum center；
F-1.4 a dark fringe minimum in all dark fringe addresses more than primary maximum center) is found using MATLAB softwares, should
The address of dark fringe is defined as the address of positive one very dark fringe center；
F-1.5 a dark fringe maximum in all dark fringe addresses more than primary maximum center) is found using MATLAB softwares, should
The address of dark fringe is defined as the address of the very dark fringe center of negative one；
F-1.6) the spacing between the address of the positive very dark fringe center of calculating and the address for being the very dark fringe center of negative one, between being somebody's turn to do
Away from for primary maximum width Delta xIt is fixed。
4. the method according to claim 1 for being measured micro-displacement using CCD based on Slit Diffraction, its feature is existed
In：Primary maximum width Delta x in step f)BecomeComputational methods be：
F-2.1 the gray value square of the stripe pattern of the diffraction produced in MATLAB software extraction steps d) by variable gap) is utilized
Battle array, extracts the maximum of gray value in each columns group in gray scale value matrix, and the maximum of each gray value constitutes single seam husband thinkling sound
The standing grain fraunhofer-diffraction surface of intensity distribution；
F-2.2 the address of all minimums in single seam Fraunhofer diffraction surface of intensity distribution, gray scale) are found using MATLAB softwares
Value minimum is defined as the address of dark fringe；
F-2.3 the address of light intensity maximum in single seam Fraunhofer diffraction surface of intensity distribution, light intensity) are found using MATLAB softwares
The address of maximum is defined as the address at primary maximum center；
F-2.4 a dark fringe minimum in all dark fringe addresses more than primary maximum center) is found using MATLAB softwares, should
The address of dark fringe is defined as the address of positive one very dark fringe center；
F-2.5 a dark fringe maximum in all dark fringe addresses more than primary maximum center) is found using MATLAB softwares, should
The address of dark fringe is defined as the address of the very dark fringe center of negative one；
F-2.6) the spacing between the address of the positive very dark fringe center of calculating and the address for being the very dark fringe center of negative one, between being somebody's turn to do
Away from for primary maximum width Delta xBecome。
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| CN112284917A (en) * | 2020-10-13 | 2021-01-29 | 青岛滨海学院 | Device and method for measuring Young modulus of metal wire by utilizing diffraction of light |
| US11380374B2 (en) * | 2019-07-02 | 2022-07-05 | Boe Technology Group Co., Ltd. | Shift register unit, driving method thereof, and device |
| CN114935310A (en) * | 2022-05-06 | 2022-08-23 | 北京航空航天大学 | Device and method for measuring micro displacement of liquid jet surface |
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| CN114935310A (en) * | 2022-05-06 | 2022-08-23 | 北京航空航天大学 | Device and method for measuring micro displacement of liquid jet surface |
| CN114935310B (en) * | 2022-05-06 | 2023-03-14 | 北京航空航天大学 | Device and method for measuring micro displacement of liquid jet surface |
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