CN107188112B - 一种基于硅基氮化物的可变光分布器件及其制备方法 - Google Patents
一种基于硅基氮化物的可变光分布器件及其制备方法 Download PDFInfo
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- CN107188112B CN107188112B CN201710244778.0A CN201710244778A CN107188112B CN 107188112 B CN107188112 B CN 107188112B CN 201710244778 A CN201710244778 A CN 201710244778A CN 107188112 B CN107188112 B CN 107188112B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/033—Comb drives
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
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CN201710244778.0A CN107188112B (zh) | 2017-04-14 | 2017-04-14 | 一种基于硅基氮化物的可变光分布器件及其制备方法 |
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CN201710244778.0A CN107188112B (zh) | 2017-04-14 | 2017-04-14 | 一种基于硅基氮化物的可变光分布器件及其制备方法 |
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CN107188112A CN107188112A (zh) | 2017-09-22 |
CN107188112B true CN107188112B (zh) | 2019-10-01 |
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Citations (10)
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US6686639B1 (en) * | 2002-09-30 | 2004-02-03 | Innovative Technology Licensing, Llc | High performance MEMS device fabricatable with high yield |
CN1749803A (zh) * | 2005-07-20 | 2006-03-22 | 华中科技大学 | 一种基于二维声光偏转器的激光扫描装置 |
WO2008075581A1 (ja) * | 2006-12-20 | 2008-06-26 | Rohm Co., Ltd. | 窒化物半導体発光素子およびその製造方法 |
CN101488550A (zh) * | 2009-02-27 | 2009-07-22 | 上海蓝光科技有限公司 | 高In组分多InGaN/GaN量子阱结构的LED的制造方法 |
CN101656260A (zh) * | 2009-09-08 | 2010-02-24 | 厦门市三安光电科技有限公司 | 一种抗静电氮化镓基发光器件及其制作方法 |
KR101528098B1 (ko) * | 2014-02-28 | 2015-06-10 | 전북대학교산학협력단 | 전자 빔 빗각 증착과 열처리를 이용하는 질화갈륨 계열 발광 다이오드 제조 방법 |
CN205151756U (zh) * | 2015-11-04 | 2016-04-13 | 南京邮电大学 | 一种基于氮化镓的静电梳状驱动式微镜 |
CN105590943A (zh) * | 2016-02-25 | 2016-05-18 | 厦门乾照光电股份有限公司 | 一种高压led及其制作工艺 |
CN105827892A (zh) * | 2016-04-14 | 2016-08-03 | 南京邮电大学 | 一种微扫描仪及其GaN基LED光源的制备方法 |
CN205984989U (zh) * | 2016-06-03 | 2017-02-22 | 华南理工大学 | 一种具有放大器的氮化镓发光二极管结构 |
-
2017
- 2017-04-14 CN CN201710244778.0A patent/CN107188112B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6686639B1 (en) * | 2002-09-30 | 2004-02-03 | Innovative Technology Licensing, Llc | High performance MEMS device fabricatable with high yield |
CN1749803A (zh) * | 2005-07-20 | 2006-03-22 | 华中科技大学 | 一种基于二维声光偏转器的激光扫描装置 |
WO2008075581A1 (ja) * | 2006-12-20 | 2008-06-26 | Rohm Co., Ltd. | 窒化物半導体発光素子およびその製造方法 |
CN101488550A (zh) * | 2009-02-27 | 2009-07-22 | 上海蓝光科技有限公司 | 高In组分多InGaN/GaN量子阱结构的LED的制造方法 |
CN101656260A (zh) * | 2009-09-08 | 2010-02-24 | 厦门市三安光电科技有限公司 | 一种抗静电氮化镓基发光器件及其制作方法 |
KR101528098B1 (ko) * | 2014-02-28 | 2015-06-10 | 전북대학교산학협력단 | 전자 빔 빗각 증착과 열처리를 이용하는 질화갈륨 계열 발광 다이오드 제조 방법 |
CN205151756U (zh) * | 2015-11-04 | 2016-04-13 | 南京邮电大学 | 一种基于氮化镓的静电梳状驱动式微镜 |
CN105590943A (zh) * | 2016-02-25 | 2016-05-18 | 厦门乾照光电股份有限公司 | 一种高压led及其制作工艺 |
CN105827892A (zh) * | 2016-04-14 | 2016-08-03 | 南京邮电大学 | 一种微扫描仪及其GaN基LED光源的制备方法 |
CN205984989U (zh) * | 2016-06-03 | 2017-02-22 | 华南理工大学 | 一种具有放大器的氮化镓发光二极管结构 |
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Application publication date: 20170922 Assignee: NANJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS INSTITUTE AT NANTONG Co.,Ltd. Assignor: NANJING University OF POSTS AND TELECOMMUNICATIONS Contract record no.: X2020980006914 Denomination of invention: A variable light distribution device based on silicon nitride and its preparation method Granted publication date: 20191001 License type: Common License Record date: 20201021 |