CN107186648A - A kind of jewel battery lead plate flying probe vacuum adsorption fixture - Google Patents
A kind of jewel battery lead plate flying probe vacuum adsorption fixture Download PDFInfo
- Publication number
- CN107186648A CN107186648A CN201710563639.4A CN201710563639A CN107186648A CN 107186648 A CN107186648 A CN 107186648A CN 201710563639 A CN201710563639 A CN 201710563639A CN 107186648 A CN107186648 A CN 107186648A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- jewel
- battery lead
- lead plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
Abstract
The invention discloses a kind of jewel battery lead plate flying probe vacuum adsorption fixture, vacuum sealing cavity is constituted by vacuum cavity plate up and down, in vacuum cavity Surface Machining vacuum suction hole array, vacuum cavity is evacuated by Vacuum exhaust tube, so that fixed test sample.The advantage of the structure is to make full use of backlight illumination jewel battery lead plate to avoid the problem of gold-plated figure of positive light irradiation has strong reflection.The structure for vacuum suction jig is prepared using light transmissive material, make test sample can be with backlight illumination, the gold-plated figure of high density on jewel battery lead plate can clearly be differentiated, and test sample is fixed using vacuum suction mode and do not result in sample surfaces pollution and surface damage.The vacuum adsorption fixture of the structure is simple in construction, is easily worked, and is particularly suitable for the fixation of sample during the jewel battery lead plate flying needle electrical testing of high-density electrode wiring.
Description
Technical field
The invention discloses a kind of jewel battery lead plate vacuum adsorption fixture, particularly a kind of jewel for high-density wiring
Battery lead plate flying probe vacuum adsorption fixture.
Background technology
Infrared detector module is the core parts of IRDS, widely should be had in the field such as space flight and military affairs
With.Most of component needs to be operated in low temperature, in order to eliminate the stress between detector chip and substrate, it is general using with it is infrared
The thermally matched material of detector chip carries out signal extraction, sapphire have low gas efficiency and with material for detector Stress match
Advantage, is a kind of most lead baseplate material of current infrared detector module application.With the scale of infrared detector module
Increasing, jewel battery lead plate wiring density is increasing, lead spacing already less than 100 μm, electrode layer gold interconnection short circuit and
Chromium residues have had influence on the yield rate of jewel battery lead plate, can not meet highly dense using universal meter test and sediments microscope inspection
The screening of degree wiring jewel battery lead plate yield rate.Flying probe equipment is a kind of break-make relation of each network node inside pcb board,
And between internal network built-in capacity, resistance, inductance value, diode, triode conventional detection means, due to its test effect
Rate is high, test process without the high advantage of impression and positioning precision, can be particularly suitable for the break-make detection of jewel battery lead plate.Flying needle is set
The problem of high-density wiring battery lead plate selective mechanisms are in the presence of two aspects is ready for use on, one is the fixation of jewel battery lead plate, jewel electricity
Polar plate area it is smaller and it is middle there is hole, there is problem in the stable absorption of general vacuum adsorption fixture, while using bonding
There is pollution in mode；Two be the clear positioning of jewel battery lead plate, and jewel battery lead plate is used inside gold-plated electrode layer, slave unit just
There is strong reflection in light irradiation, CCD can not clearly differentiate electrode pattern.The clear positioning of jewel battery lead plate fixes straight with reliable
The positioning precision and repeatability for being related to probe are connect, so that the measuring accuracy and reliability of jewel battery lead plate are influenceed, in high density
Connect up particularly important during jewel battery lead plate flying probe.The present invention is directed to this problem, it is proposed that a kind of jewel battery lead plate flying needle
Test vacuum adsorption fixture.
The content of the invention
The technical problem of solution of the present invention is：One is the fixation of jewel battery lead plate, and jewel electrode plate suqare is smaller with
Between there is hole, there is problem in the stable absorption of general vacuum adsorption fixture, while being polluted using existing by the way of bonding；Two are
The clear positioning of jewel battery lead plate, jewel battery lead plate uses the positive light irradiation inside gold-plated electrode layer, slave unit to exist strongly
Reflection, CCD can not clearly differentiate electrode pattern.
Present invention solves the technical problem that the technical scheme used is：Improved on the basis of traditional vacuum suction jig
Structure, by the size of vacuum suction aperture and the line space design into small and middle spy that there is hole of suitable jewel electrode plate suqare
Point, while vacuum suction aperture unnecessary after being placed using blue film cap jewel battery lead plate, blue film thickness is much smaller than jewel electrode
The thickness of plate, the problem of in the absence of striker, so as to realize the reliable fixation of jewel battery lead plate；Jewel electricity is irradiated using backlight mode
Pole plate, so as to avoid the strong reflection of positive light irradiation layer gold, vacuum adsorption fixture is processed using the high material of transparency, together
When reduce above and below vacuum cavity plate light transmission part thickness, LED is placed below in vacuum cavity, so as to realize jewel electrode backboard
Light irradiation, allows the figure of jewel battery lead plate clearly to differentiate, so as to solve the precision of jewel battery lead plate flying probe and reliable
Sex chromosome mosaicism.
The vacuum adsorption fixture structure of the present invention includes upper vacuum cavity plate 1, lower vacuum cavity plate 2 and Vacuum exhaust tube 3, vacuum
Suction jig is spirally connected by the upper vacuum cavity plate 1 and lower vacuum cavity plate 2 of transparent material by positioning hole 1-1 and positioning spiro pit 2-1
Into vacuum seal cavity, vacuum adsorption fixture is clamped in flying probe equipment by fixture fixed edge 1-3, jewel battery lead plate
Etc. the vacuum suction hole array 1-2 regions that test sample is placed on upper vacuum cavity plate 1, exposed vacuum suction hole array 1-2 is adopted
Covered with blue film, the lower inside hollow out of vacuum cavity 2 is hollow cavity 4, and processes vacuum vent holes 2-2 tight fit Vacuum exhaust tubes
3, the bleed-off passage of vacuum adsorption fixture is followed successively by lower Vacuum exhaust tube 3, vacuum vent holes 2-2, hollow cavity 4 and vacuum suction
Hole array 1-2, when test sample upper and lower surface formation pressure difference, test sample is just firmly adsorbed on test platform, tested
Cheng Hou, sample can be removed by stopping pumping.LED/light source incides lower vacuum cavity plate 2, is transmitted through hollow cavity 4 and upper vacuum
Cavity plate 1, to jewel battery lead plate formation backlight illumination, so that flying probe equipment is clearly positioned to the figure of jewel battery lead plate.
Described Vacuum exhaust tube 3 uses stainless steel material.
Described upper vacuum cavity plate 1 and lower vacuum cavity plate 2 are using FR-4 epoxy glass fibers plate, polycarbonate plate or PMMA
Poly (methyl methacrylate) plate light transmissive material.
Covered using blue film or PE preservative film materials in the region that described vacuum exhaust hole array 2-2 is not tested sample covering
Lid.
The beneficial effects of the invention are as follows：The break-make flying needle that the vacuum adsorption fixture of the structure can be used for jewel battery lead plate is surveyed
Examination.Vacuum adsorption fixture absorption test sample of the present invention does not result in sample surfaces pollution and surface damage, while vacuum suction
Fixture uses light transmissive material, test sample can be clearly differentiated to figure on jewel battery lead plate with backlight illumination.The structure
Vacuum adsorption fixture can be applied to the absorption of the various test samples such as jewel battery lead plate, ceramic substrate and pcb board, while can answer
The sample of the dimensional measurement of the optical devices such as electrical testing and 3-dimensional image instrument for flying probe system is fixed.
Brief description of the drawings
Fig. 1 is the vacuum adsorption fixture overall structure figure of the present invention.
Fig. 2 is the vacuum adsorption fixture sectional structure chart of the present invention.
In figure：1. on vacuum cavity plate, 2. times vacuum cavity plates, 3. Vacuum exhaust tubes, 4. hollow cavities, 1-1. positioning holes, 1-
2. vacuum suction hole array, 1-3. fixture fixed edges, 2-1. positioning spiro pits, 2-2. vacuum vent holes.
Embodiment：
The present invention is further described with example below in conjunction with the accompanying drawings, as can be seen that the present invention is one from Fig. 1 and Fig. 2
Jewel battery lead plate flying probe vacuum adsorption fixture is planted, the jewel battery lead plate for being particularly suitable for use in existing the gold-plated figure of high density flies
Pin is tested, and the structure for vacuum suction jig passes through positioning hole 1-1 and positioning spiro pit by upper vacuum cavity plate 1 and lower vacuum cavity plate 2
2-1 8 M3 screws are spirally connected into vacuum seal cavity, and cavity material uses the FR-4 epoxy glass fiber plates of printing opacity, vacuum chamber
Light transmission part sheet metal thickness is 3mm above and below body, the size of whole vacuum adsorption fixture for 200mm (length) × 200mm (width) ×
17mm (height).Vacuum adsorption fixture is clamped in flying probe equipment by fixture fixed edge 1-3, the test such as jewel battery lead plate
Sample is placed on the vacuum absorption holes 1-2 regions of vacuum cavity plate 1, and vacuum absorption holes 1-2 is diameter of phi 4mm, the 20 of spacing 7mm
× 15 arrays, exposed vacuum absorption holes 1-2 is using blue film covering, and the lower inside hollow out of vacuum cavity plate 2 is hollow cavity 4, and
Vacuum vent holes 2-2 tight fits Vacuum exhaust tube 3 is processed, the bleed-off passage of vacuum vacuum adsorption fixture is followed successively by KF16 vacuum row
Tracheae 3, vacuum vent holes 2-2, hollow cavity 4 and vacuum suction hole array 1-2, when test sample upper and lower surface formation pressure difference,
Test sample is just firmly adsorbed on test platform, after the completion of test, and sample can be removed by stopping pumping.LED/light source is incident
To lower vacuum cavity plate 2, hollow cavity 4 and upper vacuum cavity plate 2 are transmitted through, to jewel battery lead plate formation backlight illumination, so that
Flying probe equipment is clearly positioned to the figure of jewel battery lead plate.The vacuum adsorption fixture is simple in construction, it is possible to achieve test specimens
The backlight illumination of product, while fixing sample using suction type, exempts the installation and removal of test sample, will not be to test sample
Cause surface contamination and surface damage.
Claims (3)
1. a kind of jewel battery lead plate flying probe vacuum adsorption fixture, including upper vacuum cavity plate (1), lower vacuum cavity plate (2) and
Vacuum exhaust tube (3), it is characterised in that：
Described vacuum adsorption fixture passes through positioning hole by vacuum adsorption fixture by upper vacuum cavity plate (1) and lower vacuum cavity plate (2)
(1-1) and positioning spiro pit (2-1) are spirally connected into vacuum seal cavity, are pressed from both sides vacuum adsorption fixture by fixture fixed edge (1-3)
Hold in flying probe equipment, the test sample such as jewel battery lead plate is placed on the vacuum suction hole array (1- of vacuum cavity plate (1)
2) region, exposed vacuum suction hole array (1-2) is using blue film covering, and the internal hollow out of lower vacuum cavity (2) is hollow cavity
(4), and vacuum vent holes (2-2) tight fit Vacuum exhaust tube (3) is processed, the bleed-off passage of vacuum adsorption fixture is followed successively by lower true
Idle discharge tracheae (3), vacuum vent holes (2-2), hollow cavity (4) and vacuum suction hole array (1-2), when following table in test sample
Face forms pressure difference, and test sample is just firmly adsorbed on test platform, after the completion of test, and sample can be removed by stopping pumping.
2. a kind of jewel battery lead plate flying probe vacuum adsorption fixture according to claim 1, it is characterised in that：It is described
Vacuum exhaust tube (3) use stainless steel material.
3. a kind of jewel battery lead plate flying probe vacuum adsorption fixture according to claim 1, it is characterised in that：It is described
Upper vacuum cavity plate (1) and lower vacuum cavity plate (2) using FR-4 epoxy glass fibers plates, polycarbonate plate or PMMA lucite
Plate light transmissive material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710563639.4A CN107186648A (en) | 2017-07-12 | 2017-07-12 | A kind of jewel battery lead plate flying probe vacuum adsorption fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710563639.4A CN107186648A (en) | 2017-07-12 | 2017-07-12 | A kind of jewel battery lead plate flying probe vacuum adsorption fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107186648A true CN107186648A (en) | 2017-09-22 |
Family
ID=59882414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710563639.4A Pending CN107186648A (en) | 2017-07-12 | 2017-07-12 | A kind of jewel battery lead plate flying probe vacuum adsorption fixture |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107186648A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109375331A (en) * | 2018-11-21 | 2019-02-22 | 中国科学院上海技术物理研究所 | A kind of vertical solidification equipment of multi lens array optical axis |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10277863A (en) * | 1997-04-07 | 1998-10-20 | Hishiko:Kk | Permanent magnet type attraction device |
| TWM321831U (en) * | 2007-01-17 | 2007-11-11 | Yung-Tsai Shen | Vacuum absorbing device for a workbench |
| CN203245618U (en) * | 2013-03-29 | 2013-10-23 | 东莞市三文光电技术有限公司 | Circuit board vacuum adsorption clamp |
| CN103962860A (en) * | 2014-05-27 | 2014-08-06 | 中国电子科技集团公司第四十三研究所 | Vacuum pad |
| CN205057847U (en) * | 2015-09-15 | 2016-03-02 | 南京矽邦半导体有限公司 | Microscope is measurationed and is used vacuum chuck platform |
| CN206998695U (en) * | 2017-07-12 | 2018-02-13 | 中国科学院上海技术物理研究所 | Jewel battery lead plate flying probe vacuum adsorption fixture |
-
2017
- 2017-07-12 CN CN201710563639.4A patent/CN107186648A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10277863A (en) * | 1997-04-07 | 1998-10-20 | Hishiko:Kk | Permanent magnet type attraction device |
| TWM321831U (en) * | 2007-01-17 | 2007-11-11 | Yung-Tsai Shen | Vacuum absorbing device for a workbench |
| CN203245618U (en) * | 2013-03-29 | 2013-10-23 | 东莞市三文光电技术有限公司 | Circuit board vacuum adsorption clamp |
| CN103962860A (en) * | 2014-05-27 | 2014-08-06 | 中国电子科技集团公司第四十三研究所 | Vacuum pad |
| CN205057847U (en) * | 2015-09-15 | 2016-03-02 | 南京矽邦半导体有限公司 | Microscope is measurationed and is used vacuum chuck platform |
| CN206998695U (en) * | 2017-07-12 | 2018-02-13 | 中国科学院上海技术物理研究所 | Jewel battery lead plate flying probe vacuum adsorption fixture |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109375331A (en) * | 2018-11-21 | 2019-02-22 | 中国科学院上海技术物理研究所 | A kind of vertical solidification equipment of multi lens array optical axis |
| CN109375331B (en) * | 2018-11-21 | 2023-07-04 | 中国科学院上海技术物理研究所 | Multi-lens array optical axis vertical curing device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102379803B1 (en) | Polysensing bioelectronic test plate | |
| JP3953528B2 (en) | Device for carrying out examination of cell specimens and such | |
| CN102445437B (en) | Method and device for measuring turbidity | |
| US8679426B2 (en) | Microscope accessory and microplate apparatus for measuring phosphorescence and cellular oxygen consumption | |
| RU94024565A (en) | Device for stabilizing plasma layer | |
| US20150027885A1 (en) | Devices, systems and methods for high-throughput electrophysiology | |
| CN109596838A (en) | The unicellular interior multiple protein simultaneous quantitative detection system of one kind and method | |
| US9506870B2 (en) | Flow-channel device for detecting light emission | |
| CN102483375B (en) | Analysis device with transducer stiffening elements | |
| CN206998695U (en) | Jewel battery lead plate flying probe vacuum adsorption fixture | |
| CN103261875A (en) | SPR sensor cell and SPR sensor | |
| CN104458540A (en) | Flow chamber of blood analyzer | |
| TW558632B (en) | Measuring probe for light scattering | |
| CN107186648A (en) | A kind of jewel battery lead plate flying probe vacuum adsorption fixture | |
| CN108387504A (en) | Particle collector is closed in cohesion | |
| JP4364942B2 (en) | Electrode assembly | |
| CN107153049B (en) | A kind of material refractive index measuring device inhibiting stray light | |
| CN101487788A (en) | Multi-channel flowing counting pool | |
| CN215029011U (en) | Quick alignment bonding device of micro-fluidic chip | |
| CN212845040U (en) | Multi-wavelength colorimetric module with light convergence function | |
| ATE495437T1 (en) | MEASURING DEVICE FOR MEASURING AN ELECTRICAL SIGNAL EMITTED BY A BIOLOGICAL SAMPLE | |
| CN210198918U (en) | Detection device | |
| CN209280566U (en) | A kind of dry air formaldehyde in-situs tester | |
| CN110221083A (en) | A kind of excretion body identification apparatus and excretion body identification method | |
| CN107064039A (en) | A kind of detection method of ozone monitoring sensor and its ozone concentration based on phase lock amplifying technology |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170922 |
|
| WD01 | Invention patent application deemed withdrawn after publication |