CN107168015A - A kind of immersion liquid limiting mechanism and temperature compensation - Google Patents
A kind of immersion liquid limiting mechanism and temperature compensation Download PDFInfo
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- CN107168015A CN107168015A CN201610113097.6A CN201610113097A CN107168015A CN 107168015 A CN107168015 A CN 107168015A CN 201610113097 A CN201610113097 A CN 201610113097A CN 107168015 A CN107168015 A CN 107168015A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
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Abstract
The invention discloses a kind of immersion liquid limiting mechanism and temperature compensation, the immersion liquid limiting mechanism includes submergence head, supply chamber is sequentially provided with submergence head from outside to inside and gas-liquid reclaims chamber, supply chamber is connected with the first air feed equipment, for being formed to the sealed gas curtain of immersion liquid, gas-liquid reclaims inner chamber body and the outer chamber that chamber includes being coaxially disposed from the inside to the outside, inner chamber body is connected by exhaust pipe with gas-liquid reclaimer, for pump drainage gas-liquid mixture, outer chamber is connected by air inlet pipe with the second air feed equipment, the gas that second air feed equipment is provided and inner chamber body outer wall, heat release is condensed after the contact of outer chamber inwall.The present invention by be passed through in outer chamber condensed gas inner chamber body is carried out can comprehensively thermal compensation, and thermal compensation is directly carried out on inner layer wall, reduces thermal resistance, increase thermal compensation area, improve efficiency；Inner chamber body is thermally isolated outer chamber with other positions simultaneously, reduces the refrigeration work consumption that refrigeration " low-temperature receiver " is acted on remaining position.
Description
Technical field
The present invention relates to photoetching machine technique field, and in particular to a kind of immersion liquid limiting mechanism and temperature compensation.
Background technology
Modern lithographic equipment is based on optical lithography, and it is accurate the figure on mask plate using optical system
Ground projection exposure is on the substrate (such as substrate) of coated photoresist.Liquid immersion lithography refer to exposure cameras with
It is corresponding in conventional dry photoetching technique to replace full of water (or immersion liquid of higher refraction) between substrate
Air.Because the refractive index of water is bigger than air, it can increase the numerical aperture of lens group, and then can obtain
Smaller characteristic line breadth.
The structure of existing immersed photoetching machine is as shown in figure 1, in the apparatus, the support of main frame 1 ' one is illuminated
A base for scribbling light sensitive photoresist is placed in system 2 ', a projection objective 4 ' and a base station 8 ', base station 8 '
Bottom 7 '.Immersion liquid (such as water) 5 is filled in gap between projection objective 4 ' and substrate 7 ' by the immersed photoetching machine
It is interior.During work, base station 8 ' drives substrate 7 ' to make the scanning of high speed, stepwise operation, immersion liquid limiting mechanism bag
The motion state according to base station 8 ' is included, there is provided a stable immersion liquid in the field range of projection objective 4 '
Flow field, while ensureing that apparatus soaking liquid flow field is hedged off from the outer world, it is ensured that liquid is not leaked.Integrated circuit on mask plate 3 '
Figure by way of illuminator 2 ', projection objective 4 ' and apparatus soaking liquid flow field are with Imagewise exposure, be transferred to painting
Have in the substrate 7 ' of light sensitive photoresist, complete exposure process.The immersion system work that the immersed photoetching machine is related to
Make principle as shown in Fig. 2 by the submergence first 6 ' in immersion liquid limiting mechanism, immersion liquid 5 ' is limited in into projection thing
Between mirror 4 ' and substrate 7 ' in gap.Liquid supply equipment 9 ' is also set up in the immersed photoetching machine, to submergence first 6
Supply immersion liquid 5 '.Fluid pressure, flow controlling unit, the pressure that immersion liquid is supplied are provided with liquid supply equipment 9 '
Power, flow restriction are within the specific limits；Water pollution processing unit is set in liquid supply equipment 9 ' in addition, by water
Middle pollution handle to meet immersion liquid pollution requirement；Temperature control unit is additionally provided with liquid supply equipment 9 ', will be supplied water
Processing is required to dip temperature is met.Air feed equipment 10 ' is additionally provided with the immersed photoetching machine and gas-liquid is reclaimed and set
Standby 11 ', reclaimed for the compensation of ultra-clean humid air and gas-liquid.In air feed equipment 10 ' and gas-liquid reclaimer 11 '
In be provided with ultra-clean humid air pressure, flow controlling unit, by the pressure of supply, flow control in certain model
Within enclosing；Gas-liquid pressure recovery, flow control list are additionally provided with air feed equipment 10 ' and gas-liquid reclaimer 11 '
Member, the pressure that gas-liquid is reclaimed and flow control are within limits；Reclaimed in air feed equipment 10 ' and gas-liquid
Ultra-clean humid air pollution control unit is additionally provided with equipment 11 ', by pollution processing in ultra-clean humid air to symbol
Close and require；Ultra-clean humid air temperature and humidity is additionally provided with air feed equipment 10 ' and gas-liquid reclaimer 11 '
Control unit, by ultra-clean humid air handle to meet temperature and humidity requirement.
The general structure of existing immersion liquid limiting mechanism as shown in Fig. 2 the outline form of submergence first 6 ' differs,
But in-profile is substantially the pyramidal structure with lens geometry form fit.The immersion liquid 5 ' that liquid supply equipment 9 ' is supplied
By filling gap between projection objective 4 ' and substrate 7 ', leaching after the immersion liquid supply channel outflow in submergence first 6 '
Liquid 5 ' is reclaimed after runner outflow by the immersion liquid in submergence first 6 ', is reclaimed by gas-liquid reclaimer 11 '.Immersion liquid 5 '
Apparatus soaking liquid flow field is formed in slit between projection objective 4 ' and substrate 7 ', it is desirable to which the liquid in apparatus soaking liquid flow field is in
Composition, pressure field, velocity field, temperature field transient state and the stable state of constant flow state, no backflow, and liquid
Change is respectively less than certain limit.
As seen from Figure 2, there is the gap of certain altitude between the lower surface and substrate 7 ' of submergence first 6 ', in order to
Prevent the immersion liquid 5 ' in apparatus soaking liquid flow field from being leaked from this gap, air feed equipment 10 ' is by supply air line 622 ' to leaching
The not supply compressed air of supply chamber 621 ' in first 6 ', as shown in Fig. 2 compressed air is in supply chamber 621 '
After buffering, sprayed by the air supply opening 620 ' for supplying the bottom of chamber 621 ', form " air knife " towards substrate surface.
" air knife " forms the gas " curtain " for stopping that immersion liquid 5 ' is leaked in apparatus soaking liquid flow field, and the gas-liquid at apparatus soaking liquid flow field edge is mixed
Compound is reclaimed in chamber 631 ' by gas-liquid 630 ' pump drainages of pump drainage mouthful to gas-liquid, and gas-liquid mixture reclaims chamber in gas-liquid
After being buffered in 631 ', submergence first 6 ' is pumped out through pump drainage pipeline 632 ' by gas-liquid reclaimer 11 ', so as to realize
The sealing effectiveness of apparatus soaking liquid flow field.
In order to ensure sealing effectiveness, " air knife " air demand and gas-liquid pump drainage negative pressure are larger, pump drainage flow and flow velocity
Same larger, because " air knife " air demand is larger, the gas in gas-liquid mixture is in undersaturated condition,
Because pump drainage flow velocity is larger, gas-liquid mixture reclaims chamber 631 ' and the flowing of the inside vortex of pump drainage pipeline 632 ' in gas-liquid,
Big drop in gas-liquid mixture constantly can mutually collide or be reclaimed with gas-liquid the wall of chamber 631 ' during pump drainage
Face is collided, and the big drop in collision process in gas-liquid mixture is converted into droplet, and droplet keeps
Mutually collision, part droplet can be atomized to direct evaporation, and some droplet keeps and gas-liquid
Reclaim the collision with wall of chamber 631 ' and reclaim the wall formation liquid film of chamber 631 ' in gas-liquid, thin liquid film is in pump drainage
During continue evaporate.Due to the palpus sustainable supply of immersion liquid 5 ' and pump drainage, so reclaiming the interior of chamber 631 ' in gas-liquid
Liquid evaporation persistently occurs for portion's wall.Immersion liquid 5 ' must constantly absorb the latent heat of vaporization during evaporative phase-change；Example
Such as, at one atm, 1kg water, which becomes steam, will absorb 2256kJ heat.
The continuous evaporation endothermic of immersion liquid will make the first 6 ' temperature drop of submergence, through experiment, be mended without temperature
When repaying, the sweat cooling in gas-liquid removal process can cause more than 1 DEG C of the first 6 ' temperature drop of submergence, local temperature
Declining can be more than 2 DEG C.The temperature stability of immersion liquid 5 ' can be influenceed after the first 6 ' temperature drop of submergence, so as to influence leaching
The refractive index of liquid 5 ', and then final influence equipment exposure performance.
In view of the above-mentioned problems, existing method arranges some resistance type heaters or electricity in the structure of submergence head
Heater or temperature sensor etc. carry out temperature control and compensation.But at least there is following a few sides in such scheme
Face problem：One is not have enough spaces to be used for arranging enough heaters, temperature sensor on submergence head
And its lead；Two be that single heater only can control submergence head " single-point " temperature, it is difficult to realizes that submergence is whole
Temperature uniformity；Three be that preferably can not isolate low-temperature receiver (i.e. gas-liquid reclaims chamber) with other parts, difficult
To prevent " cold draining "；Four be that thermal resistance is larger between heater and gas-liquid reclaim the wall of chamber, it is difficult to is realized direct
Temperature-compensating, thermal compensation inefficiency.
The content of the invention
The invention provides a kind of immersion liquid limiting mechanism and temperature compensation, to solve above-mentioned technical problem.
In order to solve the above-mentioned technical problem, the technical scheme is that：A kind of immersion liquid limiting mechanism, is located at
Between projection objective and substrate, including submergence head, be sequentially provided with from outside to inside on the submergence head supply chamber and
Gas-liquid reclaims chamber, and the supply chamber is connected with the first air feed equipment, for being formed to the sealed gas of the immersion liquid
Curtain, the gas-liquid reclaims inner chamber body and the outer chamber that chamber includes being coaxially disposed from the inside to the outside, and the inner chamber body is led to
Cross exhaust pipe to connect with gas-liquid reclaimer, for pump drainage gas-liquid mixture, the outer chamber passes through air inlet pipe
Connected with the second air feed equipment, the gas that second air feed equipment is provided and the inner chamber body outer wall, exocoel
Heat release is condensed after internal wall contact.
Further, the air inlet pipe is sheathed on the exhaust pipe periphery.
Further, second air feed equipment includes compressed air supply arrangement, the humidifier being sequentially connected
And regulating valve, the compressed air after humidification is passed through in the outer chamber.
Further, escape pipe is additionally provided with the outer chamber, the escape pipe connects described by negative pressure valve
Gas-liquid reclaimer.
Further, second air feed equipment includes condensed gas supply arrangement and the regulating valve being sequentially connected,
Condensed gas is passed through in the outer chamber.
Further, escape pipe is additionally provided with the outer chamber, the escape pipe connects described by negative pressure valve
Condensed gas supply arrangement.
Further, the air inlet pipe and escape pipe are spaced apart.
Further, the supply rounded or square or rectangle of opening or oblong or triangle, described
The diameter or width of supply opening is 0.1~0.2mm.
Further, some fins are provided between the inwall of the outer wall of the inner chamber body and the outer chamber, are
The inner chamber body provides radial support.
Further, the fin is distributed along the axis direction parallel to the inner chamber body or is twist distributed.
Further, the condensed gas is vapor, hydrocarbon vapour, the mixture of hydrocarbon steam or ammonia steam.
Further, the circular in cross-section or polygon of the submergence head.
Further, the circular in cross-section or polygon of the supply chamber.
Further, the supply chamber is provided with the supply slit connected with the submergence head bottom surface, and gas is from institute
State and blown out in supply slit, gas curtain is formed between the submergence head and the substrate, the supply gap
Width is 0.1~0.2mm.
Further, the supply chamber is provided with some supply openings connected with the submergence head bottom surface, adjacent
The distance between described supply opening is 0.2~0.3mm.
Further, the longitudinal section of the inner chamber body and outer chamber is rounded or polygon.
Further, the cross section of the inner chamber body and outer chamber is rounded or polygon.
Further, the inner chamber body is provided with the pump drainage slit connected with the submergence head bottom surface, the pump drainage
The width in gap is more than 0.2mm.
Further, the inner chamber body is provided with some pump drainage openings connected with the submergence head bottom surface, described
Pump drainage opening is rounded or square or rectangle or oblong or triangle, the diameter or width of the pump drainage opening
Degree is more than 0.3mm.
Further, the submergence head is made up of aviation aluminium or Steel material.
The present invention also provides a kind of temperature compensation of immersion liquid limiting mechanism, for extracting gas-liquid mixture
Pump drainage chamber outside be arranged condensation chamber, gas is passed through in condensation chamber, makes the gas and the pump drainage chamber
Heat release is condensed after outer wall, the inwall contact of the condensation chamber.
Further, the flow direction of the condensation intracavity gas and the stream of the pump drainage intracavitary gas-liquid mixture
It is dynamic in opposite direction, form countercurrent flow.
Further, the gas is the compressed air after humidification.
Further, the gas is condensed gas.
Further, the condensed gas is vapor, hydrocarbon vapour, the mixture of hydrocarbon steam or ammonia steam.
The present invention provides a kind of immersion liquid limiting mechanism and temperature compensation, exists compared with prior art following
Advantage：
(1) gas-liquid for including inner chamber body and outer chamber by setting reclaims chamber, and inner chamber body is used for gas-liquid mixture
Pump drainage, outer chamber is supplied for condensed gas, by condensing the method for heat release to occurring sweat cooling phenomenon
Inner chamber body carry out thermal compensation, outer chamber cladding inner chamber body, can to inner chamber body carry out can comprehensively thermal compensation,
The area of thermal compensation is increased, thermal compensation efficiency is improved；
(2) inner chamber body is thermally isolated outer chamber with other positions, reduces refrigeration " low-temperature receiver " (i.e.
Inner chamber body) act on the refrigeration work consumption submerged on remaining position of head；
(3) the condensation entrance of outer chamber is corresponding with the outlet port of inner chamber body, makes condensed gas in outer chamber
Flow direction and inner chamber body in gas-liquid mixture flow direction on the contrary, form countercurrent flow, realize in non-
Equally distributed thermal compensation power correspondence greatly improves whole submergence head in the refrigeration work consumption of non-uniform Distribution
Temperature controlled uniformity；
(4) thermal compensation is directly carried out on inner layer wall, reduces the thermal resistance on thermal compensation path, greatly improve
Thermal compensation efficiency；
(5) electrical equipments such as multiple heaters and its lead are not used, improve the reliable of immersion liquid limiting mechanism
Property.
Brief description of the drawings
Fig. 1 is the structural representation of existing immersed photoetching machine；
Fig. 2 is the structural representation of existing immersion liquid limiting mechanism；
Fig. 3 is the structural representation of the immersion liquid limiting mechanism of the embodiment of the present invention 1；
Fig. 4 is the sectional view at Fig. 3 A-A；
Fig. 5 a, 5b are the structural representation that the gas-liquid of the embodiment of the present invention 1 reclaims chamber respectively；
Fig. 6 is the gas flow schematic diagram of gas-liquid recovery intracavitary in the embodiment of the present invention 1；
Fig. 7 is the gas flow schematic diagram of gas-liquid recovery intracavitary in the embodiment of the present invention 2.
Shown in Fig. 1-2：1 ', main frame；2 ', illuminator；3 ' mask plates；4 ', projection objective；5’、
Immersion liquid；6 ', head is submerged；620 ', air supply opening；621 ', chamber is supplied；622 ', supply air line；630 ', gas
Liquid pump drainage mouthful；631 ', gas-liquid reclaims chamber；632 ', pump drainage pipeline；7 ', substrate；8 ', base station；9 ', supply
Liquid equipment；10 ', air feed equipment；11 ', gas-liquid reclaimer；
Shown in Fig. 3-7：4th, projection objective；5th, immersion liquid；6th, head is submerged；62nd, chamber is supplied；621st, supply
Gas port；63rd, gas-liquid reclaims chamber；631st, inner chamber body；632nd, outer chamber；633rd, gas-liquid pump drainage mouthful；634、
Condensate outlet；635th, entrance is condensed；636th, inner layer wall；637th, outer wall；638th, fin；7th, substrate；
8th, the second air feed equipment；9th, gas-liquid reclaimer；10th, exhaust pipe；11st, air inlet pipe；12nd, humidifier；
13rd, regulating valve；14th, negative pressure valve；15th, condensed gas supply arrangement；16th, condensate liquid reclaimer.
Embodiment
The present invention is described in detail below in conjunction with the accompanying drawings.
Embodiment 1
As shown in Figure 3-4, the present invention provides a kind of immersion liquid limiting mechanism, located at projection objective 4 and substrate 7
Between, according to the motion state of base station, in the field range of projection objective 4, there is provided a stable leaching
Liquid flow field, while ensureing that apparatus soaking liquid flow field is hedged off from the outer world, it is ensured that liquid is not leaked.This immersion liquid limiting mechanism bag
Include submergence first 6, it is preferred that in the circular in cross-section or polygon of the submergence first 6, the present embodiment, leaching
Not first 6 cross section is square, as shown in Figure 4.Confession is sequentially provided with from outside to inside in the submergence first 6
Air cavity 62 and gas-liquid reclaim chamber 63, i.e. gas-liquid and reclaim the periphery that chamber 63 is located at supply chamber 62, the supply chamber
62 and first air feed equipment (not marked in figure) outlet, and with it is described submergence first 6 underrun
Some air supply openings 621 are connected, for being formed to the sealed gas curtain of the immersion liquid；The gas-liquid reclaims chamber 63 and wrapped
The inner chamber body 631 and outer chamber 632 being coaxially disposed in including to outsourcing, wherein inner chamber body 631 is by inner layer wall 636
Surround, outer chamber 632 is surrounded by outer wall 637, the inner chamber body 631 is returned by exhaust pipe 10 and gas-liquid
Receiving unit 9 is connected, and for pump drainage gas-liquid mixture, the outer chamber 632 is supplied by air inlet pipe 11 and second
Gas equipment 8 is connected, the gas that second air feed equipment 8 is provided and the outer wall of inner chamber body 631, exocoel
Heat release is condensed after the contact of the inwall of body 632.Specifically, inner chamber body 631 and the quantity of outer chamber 632 can be
It is one or more, separate between inner chamber body 631, each outer chamber 632 and 631 pairs of an inner chamber body
Should, the outside of inner chamber body 631 is coated on, includes the gas-liquid of inner chamber body 631 and outer chamber 632 by setting
Chamber 63 is reclaimed, pump drainage and the condensed gas supply of gas-liquid mixture, the method by condensing heat release is respectively used to
Thermal compensation is carried out to occurring the inner chamber body 631 of sweat cooling phenomenon, the cladding inner chamber body 631 of outer chamber 632 can
With to inner chamber body 631 carry out can comprehensively thermal compensation, increase the area of thermal compensation, improve thermal compensation imitate
Rate.
It is preferred that, the circular in cross-section or polygon of the supply chamber 62 in the present embodiment, supply chamber 62
Circular in cross-section, some air supply openings 621 are continuous type air supply opening, and in the submergence first 6
Bottom surface forms circular or polygonal gap, is as shown in Figure 4 circular gap, the width in the gap is
0.1~0.2mm.Some air supply openings 621 can also be between discrete type air supply opening, adjacent air supply opening 621
Distance be 0.2~0.3mm, some air supply openings 621 are rounded or square or rectangle or oblong or three
Angular, the diameter or width of the air supply opening 621 is 0.1~0.2mm.Specifically, the first air feed equipment is to leaching
The supply gas of supply chamber 62 in not first 6, the gas is preferably compressed air, and compressed air is in supply chamber
After being buffered in 62, sprayed by the air supply opening 621 for supplying bottom of chamber portion, form " air knife " towards substrate surface,
Stop that the immersion liquid 5 in apparatus soaking liquid flow field is leaked.
It is preferred that, the cross section of the inner chamber body 631 and outer chamber 632 is rounded or polygon, this reality
Apply in example, the cross section of inner chamber body 631 and outer chamber 632 is rounded, inner chamber body 631 and outer chamber 632
Longitudinal section is rounded or polygon, be square in the present embodiment, as shown in Figure 5 a, and inner chamber body 631
Sectional area it is constant with the ratio between the sectional area of outer chamber 632, to ensure that inner chamber body 631 has with outer chamber 632
There are identical circulation path and continuous flow to run through.As shown in figure 3, the lower section of inner chamber body 631 is provided with gas-liquid
Pump drainage mouthful 633, the gas-liquid mixture at first 6 edge is submerged for pump drainage.It is preferred that, the gas-liquid pump drainage mouthful
633 can be continuous type gas-liquid pump drainage mouthful, such as gap, and form circular or many in the bottom surface of the submergence first 6
The gap of side shape, is as shown in Figure 3 circular gap, and the width in the gap is more than 0.2mm.The gas
Liquid pump drainage mouthful 633 can also be some rounded or square or rectangle or oblong or the opening of triangle,
The diameter or width of the opening is more than 0.3mm.
With continued reference to Fig. 6, further, the outlet of the inner chamber body 631 and the entrance of gas-liquid reclaimer 9
Connected by exhaust pipe 10, the condensation entrance 635 of the outer chamber 632 is with the second air feed equipment 8 by entering
Tracheae 11 is connected, and the air inlet pipe 11 is sheathed on the periphery of exhaust pipe 10, and certain air inlet pipe 11 can also be set
In the side of the exhaust pipe 10, it is preferred that between second air feed equipment 8 and the air inlet pipe 11
Also it is sequentially connected with humidifier 12 and regulating valve 13.It is additionally provided with and condenses between entrance 635 on the outer chamber 632
Every the condensate outlet 634 of distribution, the condensate outlet 634 is provided with escape pipe, and the escape pipe passes through negative pressure valve
The 14 connection gas-liquid reclaimers 9.Specifically, 13 pairs of gases from the second air feed equipment 8 of humidifier
By entering after the adjusted regulation of valve 13 flow of Wet Compression air after (being preferably compressed air) humidification, humidification
Tracheae 11 supplies the compressed air that humidified to outer chamber 632, the wet compressed air side of flowing as shown in Figure 6
Discharged to condensate outlet 634 is flow to after the regulation of negative pressure valve 14 into gas-liquid reclaimer 9.
As shown in Figure 5 b, some fins 638 are provided between the inner layer wall 636 and outer wall 637, are interior
Layer wall 636 provides radial support, and some fins 638 are in the axis direction point parallel to inner chamber body 632
Cloth is twist distributed.It should be noted that structure described in the present embodiment is removed using tradition machinery processing side
Method processing is outer, and can also be made that Conventional machining methods are difficult to of 3D printing technique is increasingly complex
Internal structure.
Continue referring to Fig. 6, the outlet of the inner chamber body 631 and the condensation entrance 635 of the outer chamber 632
Two are equipped with, is arranged along X-axis, and between the outlet of two inner chamber bodies 631 and two described outer
It is symmetrical respectively about Y-axis between the condensation entrance 635 of cavity 632, the condensation of the outer chamber 632
Outlet 634 also is provided with two, is arranged along Y-axis, and symmetrical on X-axis.Condensed gas is from the left and right sides
Condense entrance 635 and enter outer chamber 632, vertically both sides, which are flowed to, is expelled to gas-liquid time after condensate outlet 634
In receiving unit 9；Gas-liquid mixture enters after inner chamber body 631 along the left and right sides from gas-liquid pump drainage mouthful 633 simultaneously
Flow to behind the outlet of inner chamber body 631 by the pump drainage of exhaust pipe 10 into gas-liquid reclaimer 9.Due to inner chamber
The liquid evaporation refrigeration work consumption persistently occurred on body 631 and inner layer wall 636 is smaller further away from exporting, evaporation system
Cold power is in uneven distribution, and the saturation degree of the condensed gas in outer chamber 632 is further away from condensation entrance 635
It is smaller, cause condensation heat release power gradually to reduce, therefore condensation heat release power is equally in uneven distribution.By
It is corresponding with the condensation entry position of outer chamber 632 in the outlet port of inner chamber body 631, therefore outer chamber 632
Interior compressed air flowing direction is with the gas-liquid mixture flow direction in inner chamber body 631 on the contrary, forming adverse current
Heat exchange, i.e., exactly correspond to be distributed in the heating power gradually reduced in the refrigeration work consumption distribution gradually reduced；
The refrigeration work consumption of non-uniform Distribution is compensated with the thermal compensation power correspondence of non-uniform Distribution, greatly improved whole
Submerge a temperature controlled uniformity.
It is preferred that, the submergence first 6 is made up of aviation aluminium or Steel material, therefore the thermal conductivity of submergence first 6 is remote
Much larger than the thermal conductivity of the compressed gas in the outer chamber 632 of inner chamber body 631, therefore outer chamber 632
The refrigeration work consumption for serving gas-liquid mixture in adiabatic heat-blocking action well, wrapped inner chamber body 631 is difficult
With " leakage " to the other positions for submerging first 6, be conducive to having to the bulk temperature uniformity of submergence first 6
Effect control.Specifically, the thermal resistance of outer chamber 631 is as described in following formula：
In formula, RThermal resistanceRepresent the thermal resistance between inner layer wall 636 and outer wall 637, unit DEG C/W；D represents internal layer
Distance between wall 636 and outer wall 637, unit m；A is represented between inner layer wall 636 and outer wall 637
Heat transfer area, unit m2；λ represents the coefficient of heat conduction between inner layer wall 636 and outer wall 637, unit
W/m℃.If being submergence head equivalent to coefficient of heat conduction λ at the position of outer chamber 632 without outer chamber 632
The coefficient of heat conduction of 6 material such as aviation aluminium or steel etc., generally 100-200W/m DEG C or 20-50W/m DEG C.
And in outer chamber 632 of the present invention based on Wet Compression air, its thermal conductivity factor is less than 0.5W/m DEG C.It can be seen that,
R after outer chamber 632 is setThermal resistanceWill increase hundred times even more than, around inner chamber body 631 formation outer chamber 632
Play a very good insulation effect, prevent the refrigeration work consumption " leakage " in inner chamber body 631, be conducive to submergence
Effective control of first 6 bulk temperature uniformity.
Embodiment 2
As shown in fig. 7, as different from Example 1, in the present embodiment, the outlet of the inner chamber body 631
Connected with the entrance of gas-liquid reclaimer 9 by exhaust pipe 10, the condensation entrance 635 of the outer chamber 632
It is connected with condensed gas supply arrangement 15 by air inlet pipe 11, the air inlet pipe 11 is sheathed on the exhaust pipe
10 periphery, the condensate outlet 634 is connected by escape pipe with the entrance of condensate liquid reclaimer 16, i.e.,
Individually set up condensed gas supply arrangement 15 and provide condensed gas for outer chamber 632, it is preferred that the condensation
Gas is vapor, hydrocarbon vapour, the mixture of hydrocarbon steam or ammonia steam, while setting single condensate liquid
Reclaimer 16 is reclaimed to the condensate liquid in outer chamber 632, the condensed gas supply arrangement 15 with
Regulating valve 13, the condensate outlet 634 and condensate liquid reclaimer 16 are also connected between the air inlet pipe 11
Entrance between be additionally provided with negative pressure valve 14.Specifically, the condensed gas in condensed gas supply arrangement 15 is through adjusting
It is passed into after the section regulation flow of valve 13 by air inlet pipe 11 in outer chamber 632, condensed gas is as shown in Figure 7
Flow direction flow to condensate outlet 634, and is recycled to through negative pressure valve 14 in condensate liquid reclaimer 16.It is preferred that
, condensed gas enters outer chamber 632 from the condensation entrance 635 of the left and right sides, and vertically both sides flow to cold
Behind solidifying outlet 634, it is expelled to by escape pipe in condensate liquid reclaimer 16；Gas-liquid mixture is from gas simultaneously
Liquid pump drainage mouthful 633 enters behind the outlet for flowing to inner chamber body 631 after inner chamber body 631 along the left and right sides by taking out
The pump drainage of comb 10 is into gas-liquid reclaimer 9.Due to what is persistently occurred in inner chamber body 631 and inner layer wall 636
Liquid evaporation refrigeration work consumption is smaller further away from exporting, and sweat cooling power is in uneven distribution, and outer chamber 632
The saturation degree of interior condensed gas is smaller further away from condensation entrance 635, causes condensation heat release power gradually to reduce,
Therefore condensation heat release power is equally in uneven distribution.Outlet port and outer chamber 632 due to inner chamber body 631
Condensation entry position it is corresponding, therefore compressed air flowing direction and inner chamber body 631 in outer chamber 632
Interior gas-liquid mixture flow direction is on the contrary, form countercurrent flow, i.e., in the refrigeration work consumption distribution gradually reduced
Exactly correspond in the heating power distribution gradually reduced；Compensated with the thermal compensation power correspondence of non-uniform Distribution
The refrigeration work consumption of non-uniform Distribution, greatly improves a whole submergence temperature controlled uniformity.
In summary, the present invention provides a kind of immersion liquid limiting mechanism and temperature compensation, with prior art phase
Than there is advantages below：
(1) gas-liquid for including inner chamber body 631 and outer chamber 632 by setting reclaims chamber 63, inner chamber body 631
For the pump drainage of gas-liquid mixture, outer chamber 632 is supplied for condensed gas, the method by condensing heat release
Thermal compensation is carried out to occurring the inner chamber body 631 of sweat cooling phenomenon, the cladding inner chamber body 631 of outer chamber 632 can
With to inner chamber body 631 carry out can comprehensively thermal compensation, increase the area of thermal compensation, improve thermal compensation imitate
Rate；
(2) inner chamber body 631 is thermally isolated outer chamber 632 with other positions, reduces refrigeration " cold
The refrigeration work consumption that source " is acted on first 6 remaining position of submergence；
(3) the condensation entrance 635 of outer chamber 632 is corresponding with the outlet port of inner chamber body 631, makes exocoel
In body 632 in the flow direction of condensed gas and inner chamber body 631 flow direction of gas-liquid mixture on the contrary, shape
Into countercurrent flow, the corresponding refrigeration work consumption in non-uniform Distribution of thermal compensation power in non-uniform Distribution is realized,
Greatly improve the whole first 6 temperature controlled uniformity of submergence；
(4) thermal compensation is directly carried out on inner layer wall 636, reduces the thermal resistance on thermal compensation path, significantly
Improve thermal compensation efficiency；
(5) electrical equipments such as multiple heaters and its lead are not used, improve the reliable of immersion liquid limiting mechanism
Property.
Although embodiments of the present invention are illustrated in specification, these embodiments are intended only as
Prompting, should not limit protection scope of the present invention.Various provinces are carried out without departing from the spirit and scope of the present invention
Slightly, displacement and change should be included within the scope of the present invention.
Claims (25)
1. a kind of immersion liquid limiting mechanism, between projection objective and substrate, including submergence head, the submergence
Supply chamber is sequentially provided with head from outside to inside and gas-liquid reclaims chamber, the supply chamber is connected with the first air feed equipment,
For being formed to the sealed gas curtain of the immersion liquid, it is characterised in that the gas-liquid, which reclaims chamber, to be included from the inside to the outside
The inner chamber body and outer chamber being coaxially disposed, the inner chamber body are connected by exhaust pipe with gas-liquid reclaimer, are used
In pump drainage gas-liquid mixture, the outer chamber is connected by air inlet pipe with the second air feed equipment, and described second supplies
The gas that gas equipment is provided condenses heat release after being contacted with the inner chamber body outer wall, outer chamber inwall.
2. immersion liquid limiting mechanism according to claim 1, it is characterised in that the air inlet pipe is sheathed on
The exhaust pipe periphery.
3. immersion liquid limiting mechanism according to claim 1, it is characterised in that second air feed equipment
Including the compressed air supply arrangement being sequentially connected, humidifier and regulating valve, the compressed air after humidification is led to
Enter in the outer chamber.
4. immersion liquid limiting mechanism according to claim 3, it is characterised in that also set on the outer chamber
There is escape pipe, the escape pipe connects the gas-liquid reclaimer by negative pressure valve.
5. immersion liquid limiting mechanism according to claim 1, it is characterised in that second air feed equipment
Including the condensed gas supply arrangement being sequentially connected and regulating valve, condensed gas is passed through in the outer chamber.
6. immersion liquid limiting mechanism according to claim 5, it is characterised in that the condensed gas is water
Steam, hydrocarbon vapour, the mixture of hydrocarbon steam or ammonia steam.
7. immersion liquid limiting mechanism according to claim 5, it is characterised in that also set on the outer chamber
There is escape pipe, the escape pipe connects the condensed gas supply arrangement by negative pressure valve.
8. the immersion liquid limiting mechanism according to claim 4 or 7, it is characterised in that the air inlet pipe and
Escape pipe is spaced apart.
9. immersion liquid limiting mechanism according to claim 7, it is characterised in that the supply opening is in circle
Shape or square or rectangle or oblong or triangle, the diameter or width of the supply opening is
0.1~0.2mm.
10. immersion liquid limiting mechanism according to claim 1, it is characterised in that the inner chamber body
Some fins are provided between the inwall of outer wall and the outer chamber, radial support is provided for the inner chamber body.
11. immersion liquid limiting mechanism according to claim 10, it is characterised in that the fin edge is flat
Row is distributed in the axis direction of the inner chamber body or is twist distributed.
12. immersion liquid limiting mechanism according to claim 1, it is characterised in that the submergence head
Circular in cross-section or polygon.
13. immersion liquid limiting mechanism according to claim 1, it is characterised in that the supply chamber
Circular in cross-section or polygon.
14. immersion liquid limiting mechanism according to claim 1, it is characterised in that the supply chamber is set
There is the supply slit connected with the submergence head bottom surface, gas is blown out from the supply slit, in the leaching
Gas curtain is not formed between head and the substrate, the width in the supply gap is 0.1~0.2mm.
15. immersion liquid limiting mechanism according to claim 1, it is characterised in that the supply chamber is set
There are some supply openings connected with the submergence head bottom surface, the distance between the adjacent supply opening is
0.2~0.3mm.
16. immersion liquid limiting mechanism according to claim 1, it is characterised in that the inner chamber body and outer
The longitudinal section of cavity is rounded or polygon.
17. immersion liquid limiting mechanism according to claim 1, it is characterised in that the inner chamber body and
The cross section of outer chamber is rounded or polygon.
18. immersion liquid limiting mechanism according to claim 1, it is characterised in that the inner chamber body is set
There is the pump drainage slit connected with the submergence head bottom surface, the width in the pump drainage gap is more than 0.2mm.
19. immersion liquid limiting mechanism according to claim 1, it is characterised in that the inner chamber body is set
There are a some pump drainage openings connected with the submergence head bottom surface, the pump drainage opening is rounded or square or rectangle
Or oblong or triangle, the diameter or width of the pump drainage opening is more than 0.3mm.
20. immersion liquid limiting mechanism according to claim 1, it is characterised in that the submergence head is by navigating
Empty aluminium or Steel material are made.
21. a kind of temperature compensation of immersion liquid limiting mechanism, it is characterised in that mixed for extracting gas-liquid
Condensation chamber is arranged outside the pump drainage chamber of compound, gas is passed through in condensation chamber, makes the gas and the pump drainage
Heat release is condensed after the outer wall of chamber, the inwall contact of the condensation chamber.
22. the temperature compensation of immersion liquid limiting mechanism according to claim 21, it is characterised in that
The flow direction of the condensation intracavity gas is with the flow direction of the pump drainage intracavitary gas-liquid mixture on the contrary, shape
Into countercurrent flow.
23. the temperature compensation of immersion liquid limiting mechanism according to claim 21, it is characterised in that
The gas is the compressed air after humidification.
24. the temperature compensation of immersion liquid limiting mechanism according to claim 21, it is characterised in that
The gas is condensed gas.
25. the temperature compensation of immersion liquid limiting mechanism according to claim 24, it is characterised in that
The condensed gas is vapor, hydrocarbon vapour, the mixture of hydrocarbon steam or ammonia steam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610113097.6A CN107168015B (en) | 2016-02-29 | 2016-02-29 | A kind of immersion liquid limiting mechanism and temperature-compensation method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610113097.6A CN107168015B (en) | 2016-02-29 | 2016-02-29 | A kind of immersion liquid limiting mechanism and temperature-compensation method |
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| CN107168015A true CN107168015A (en) | 2017-09-15 |
| CN107168015B CN107168015B (en) | 2019-01-04 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113138541A (en) * | 2020-01-17 | 2021-07-20 | 浙江启尔机电技术有限公司 | Immersion fluid is supplied with and is retrieved device with novel pump drainage chamber |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7304715B2 (en) * | 2004-08-13 | 2007-12-04 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7414699B2 (en) * | 2004-11-12 | 2008-08-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7652746B2 (en) * | 2005-06-21 | 2010-01-26 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US8514365B2 (en) * | 2007-06-01 | 2013-08-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
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2016
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113138541A (en) * | 2020-01-17 | 2021-07-20 | 浙江启尔机电技术有限公司 | Immersion fluid is supplied with and is retrieved device with novel pump drainage chamber |
| CN113138541B (en) * | 2020-01-17 | 2022-02-01 | 浙江启尔机电技术有限公司 | Immersion fluid is supplied with and is retrieved device with novel pump drainage chamber |
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| Publication number | Publication date |
|---|---|
| CN107168015B (en) | 2019-01-04 |
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