CN107167874A - Acceptor of energy - Google Patents
Acceptor of energy Download PDFInfo
- Publication number
- CN107167874A CN107167874A CN201710441872.5A CN201710441872A CN107167874A CN 107167874 A CN107167874 A CN 107167874A CN 201710441872 A CN201710441872 A CN 201710441872A CN 107167874 A CN107167874 A CN 107167874A
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- Prior art keywords
- metal
- acceptor
- energy
- continuity
- optical waveguide
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12126—Light absorber
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
A kind of acceptor of energy, including：Dielectric optical waveguide, for transmitting photon；And metal carbonyl coat, including Metal absorption structure, in the Metal absorption structure, metal level coats the dielectric optical waveguide completely.
Description
Technical field
The present invention relates to integrated optics technique field, more particularly to a kind of acceptor of energy.
Background technology
Traditional acceptor of energy, it is many that elimination reflection is realized using resonator scheme and is transmitted, but use, it is desirable to it is humorous
The chamber that shakes must operate under conditions of Critical Coupling, require very high to the structural parameters of chamber, the absorption spectra of resonator is Lorentz
Line style, spectrum width is relatively low, and the resonance centre wavelength versus temperature of resonator is very sensitive, after work a period of time, intracavitary storage
Energy temperature can be caused to raise, so as to bring unstability, stable vibration is set up in resonator needs the time, so
It is unfavorable for the related application of ultrafast pulse, especially, in integrated optical circuit, energy is typically the pattern of specific polarization, for same
One cavity resonator structure, its formant is typically different, and is difficult to realize while polarization to two and is absorbed.
The content of the invention
In view of the problem of existing scheme is present, in order to overcome the shortcomings of above-mentioned prior art, the present invention proposes one
Acceptor of energy is planted, can be used to eliminate the noise that veiling glare and strong light are brought to information process in integrated optics chip
Deng.
According to an aspect of the invention, there is provided a kind of acceptor of energy, including：Dielectric optical waveguide, for transmitting
Photon；And metal carbonyl coat, including Metal absorption structure, in the Metal absorption structure, metal level cladding completely is described
Dielectric optical waveguide.
In some embodiments of the invention, the metal carbonyl coat also includes metal heat insulation structure, the metal heat insulation
Coat the dielectric optical waveguide, on the direction of the photon transmission, the metal heat insulation structure setting exists structural insulation
Before the Metal absorption structure.
In some embodiments of the invention, the metal heat insulation structure includes an at least continuity curved-surface structure, described
Direction of the continuity curved surface of continuity curved-surface structure along the photon transmission moves closer to the dielectric optical waveguide until institute
State continuity curved surface and the dielectric optical waveguide is tangent.
In some embodiments of the invention, the continuity curved surface is arc surface, parabola or hyperboloid.
In some embodiments of the invention, the continuity curved-surface structure is two, described two continuity curved surface knots
Structure is located at the both sides of the dielectric optical waveguide respectively.
In some embodiments of the invention, described two continuity curved-surface structures are symmetrical arranged relative to optical waveguide,
The continuity curved surface of the continuity curved-surface structure is arc surface.
In some embodiments of the invention, continuity surface curvature is bigger, and the reflectivity of the photon is lower.
In some embodiments of the invention, the length of the Metal absorption structure is longer, and the absorption efficiency is higher.
In some embodiments of the invention, the length of the Metal absorption structure is more than spread length L, wherein propagating length
It is that photon is propagated when the strength retrogression of metal and the surface plasmon mode of dielectric interface is the 1/e of initial value to spend L
Distance.
In some embodiments of the invention, the metal heat insulation structure is provided adjacent to the Metal absorption structure, and
Both are integrally formed.
In some embodiments of the invention, the dielectric optical waveguide is silica-based waveguides.
It can be seen from the above technical proposal that the invention has the advantages that：
Using Metal absorption structure, resonance condition is not present in energy absorption process, wavelength, polarization for photon to be absorbed
Deng not requiring, bandwidth of operation can be very wide；
Using metal heat insulation structure, reflectivity can be down to less than 0.1%, so being had little to no effect to preposition light path；
Acceptor of energy structure design in the present invention is simple, metal heat insulation structure, compared with resonant cavity type structure, it is allowed to
Than larger mismachining tolerance, to the less demanding of processing technology.
Brief description of the drawings
Fig. 1 is the acceptor of energy structural representation in one embodiment of the invention；
Fig. 2 is optical mode and the effective refractive index curve map of surface plasmon mode；
Fig. 3 is the spread length of surface plasmon mode and the graph of relation of incident wavelength；
Fig. 4 is the Fourier transformation spectrogram and the reflectivity of acceptor of energy of metal heat insulation structure in an experimental example of the invention
With the graph of a relation of metal arc surface radius of curvature；
Fig. 5 is the Fourier transformation spectrogram of Metal absorption structure in an experimental example of the invention；
Fig. 6 is the graph of a relation of acceptor of energy reflectivity, transmissivity and lambda1-wavelength in an experimental example of the invention.
Embodiment
Certain embodiments of the invention will be done with reference to appended accompanying drawing in rear and more comprehensively describe to property, some of but not complete
The embodiment in portion will be illustrated.In fact, various embodiments of the present invention can be realized in many different forms, and it should not be construed
To be limited to this several illustrated embodiment；Relatively the present invention is caused to meet applicable legal requirement there is provided these embodiments.
In this manual, following various embodiments for being used to describe the principle of the invention are explanation, should not be with any
Mode is construed to the scope of limitation invention.Referring to the drawings described below is used to help comprehensive understanding by claim and its equivalent
The exemplary embodiment of the invention that thing is limited.It is described below to help to understand including a variety of details, but these details should
Think what is be merely exemplary.Therefore, it will be appreciated by those of ordinary skill in the art that not departing from scope and spirit of the present invention
In the case of, embodiment described herein can be made various changes and modifications.In addition, for clarity and brevity,
Eliminate the description of known function and structure.In addition, through accompanying drawing, same reference numerals are used for identity function and operation.
For the object, technical solutions and advantages of the present invention are more clearly understood, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
One embodiment of the invention provides a kind of acceptor of energy, including：Dielectric optical waveguide, for transmitting photon；And
Metal carbonyl coat, including Metal absorption structure, in the Metal absorption structure, metal level coats the Medium Optics ripple completely
Lead.
For a dielectric optical waveguide, photon is propagated in the form of optical mode wherein；Around Medium Wave Guide
During by metallic cover, photon will be transmitted in the form of surface plasmon mode, and the embodiment of the present invention utilizes surface phasmon
To the absorption loss of electromagnetic field, dissipated photon energy absorption and in the form of heat energy, fully eliminate transmission.Fig. 1 is this
Invent dielectric optical waveguide in the acceptor of energy structural representation in an embodiment, the embodiment of the present invention using silica-based waveguides as
Example, as shown in figure 1, dielectric optical waveguide 1 is arranged in silicon-based substrate 2, photon is along the z directions in Fig. 1 along Medium Optics ripple
1 propagation is led, metal carbonyl coat 3 includes metal absorption layer 31, and metal absorption layer 31 is arranged in silicon-based substrate 2, and cladding is situated between completely
The rectangular cross-section of dielectric optical waveguide 1 in matter optical waveguide 1, the present embodiment, sectional dimension is 300nm × 400nm, and cladding is situated between
The section of the metal absorption layer 31 of matter optical waveguide 1 is also rectangle.
Because the energy predominant local of optical mode is inside waveguide, and the energy predominant local of surface plasmon mode
In medium and the interface of metal, so, the effective refractive index difference of optical mode and surface plasmon mode is very big.Fig. 2
For optical mode and the effective refractive index curve map of surface plasmon mode, with silica-based waveguides (sectional dimension in the present embodiment
For 300nm × 400nm) exemplified by, any light field can be decomposed into the H-Mode vibrated in the horizontal direction photon and along vertical side
To the V-Mode of vibration photon, the optical mode of H-Mode photon and V-Mode photon is obtained respectively (i.e. in Fig. 2
Optical_H and Optical_V) and the effective refractive index of surface plasmon mode (i.e. SPP_H and SPP_V in Fig. 2) enter
Row contrast, as shown in Fig. 2 for wavelength is 1400nm-1700nm photon, the folding of the optical mode of V-Mode photon
Penetrate that rate is bigger than surface plasmon mode, the refractive index of the optical mode of H-Mode photon and the folding of surface plasmon mode
The gap penetrated between rate is bigger.The difference of the effective refractive index, it is meant that when optical mode and the direct coupling of surface plasmon mode
Impedance mismatch during conjunction, has very big reflection.
In order to reduce caused by impedance mismatch reflection, it is necessary to which optical mode adiabatically to be changed into surface phasmon mould
Formula.Another embodiment of the present invention is additionally arranged metal heat insulation structure on the basis of a upper embodiment, and the metal heat insulation structure is exhausted
Thermally coat dielectric optical waveguide.As shown in figure 1, on the direction of the photon transmission, the metal heat insulation structure 32 is set
Before the Metal absorption structure 31, both are provided adjacent to.In the present embodiment, metal heat insulation structure 32 connects including at least one
Continuous property curved-surface structure, for example, two, the direction of the continuity curved surface of continuity curved-surface structure along the photon transmission is gradually leaned on
The nearly dielectric optical waveguide 1 is until continuity curved surface and the dielectric optical waveguide 1 are tangent, and two continuity curved-surface structures divide
Not Wei Yu the dielectric optical waveguide both sides and be symmetrical arranged relative to optical waveguide 1, the continuity of continuity curved-surface structure
Curved surface can be arc surface.Be so designed that, the optical mode in dielectric optical waveguide can adiabatically be changed into surface etc. from
Reflected caused by polariton modes, reduction impedance mismatch.In the present embodiment, metal heat insulation structure and Metal absorption structure can be with one
Body is formed.
The metal structure of adiabatic change is utilized in the above-described embodiments, and the optical mode in Medium Wave Guide is adiabatically converted
Surface plasmon mode into dielectric-metal hybrid waveguide, while absorption efficiency is improved, by mirror field to original optical path
Influence substantially eliminate.
In other embodiments, metal heat insulation structure can also be using other continuity curved-surface structures, as long as can be real
The medium mode in dielectric optical waveguide is adiabatically now changed into surface plasmon mode, for example can be using continuous
Property curved surface be parabola or hyperboloid etc. continuity curved-surface structure so that speed of the metal heat insulation structure close to Medium Wave Guide
It is slow enough.
In the above-described embodiments, in the presence of metal heat insulation structure 32 above, the optical mode in dielectric optical waveguide 1
Formula is converted to surface plasmon mode completely, it is to avoid the reflection of photon, changes into the photon of surface plasmon mode
By close to Metal absorption structure 31 absorb, it is to avoid the transmission of photon.Now, the intensity of the photon of surface plasmon mode with
The form of index decays along the direction of propagation, defines the energy attenuation of photon of surface plasmon mode to the 1/ of primary condition
The distance propagated during e is L, referred to as spread length, and spread length is related to incident wavelength, and Fig. 3 is surface phasmon mould
The spread length of formula and the graph of relation of incident wavelength, as shown in figure 3, no matter for SPP_H patterns or SPP_V patterns,
In the range of wavelength is 1400nm to 1700nm, wavelength is longer, and the spread length L of surface plasmon mode is bigger.In order to
Absorption efficiency is improved, the length of Metal absorption structure is greater than spread length L, and Metal absorption structure is longer, assimilation effect
Better.
Experimental example 1
An acceptor of energy is devised using such scheme, the length for making Metal absorption structure 31 is l=20 μm, metal
Material is used golden (Au), and the square-section size of Metal absorption structure is 0.8 μm of 1.5 μ m.
Any propagation field in dielectric optical waveguide is considered as the linear superposition of all eigen modes, and it is similar in form
In Fourier space, each of which eigen mode proportion shared in total electric field is denoted as C (ni), referred to as weight factor, niFor this
The effective refractive index of eigen mode.Total electric field E (z) on waveguide core axle is subjected to Fourier transformation, each is just can obtain originally
Levy the weight factor of mould, wherein niThe direction of propagation of energy of symbology above.
Fig. 4 is the Fourier transformation spectrogram and the reflectivity of acceptor of energy of metal heat insulation structure in an experimental example of the invention
With the graph of a relation of metal arc surface radius of curvature, (a) shows metal heat insulation structure (shown in reference picture 1, along z-axis side in Fig. 4
To 0≤z≤l) typical Fourier transform spectrum, the peak of positive and negative semiaxis represents the positive, optical mode of backpropagation respectively
Weight factor, can obtain reflectivity expression formula be R=| C (- ni)/C(+ni)|2Wherein niEffective refractive index is represented, and
Give radius of curvature be respectively 0,10 μm, 20 μm of different situations.(b) shows reflectivity on circular arc curvature half in Fig. 4
The relation in footpath, Cx(neff)=Cx(ni), to H-mode, circular arc curvature radius is bigger, and reflectivity is smaller.To V-mode, work as circular arc
When radius of curvature is smaller, reflectivity reduces with the increase of radius；When radius is larger, reflectivity is no longer with the increase of radius
Monotone decreasing, reduction trend tends to saturation, sees on the whole, and reflectivity is related to the radius of curvature of metal arc surface, and radius is bigger,
Illustrate that metal is more adiabatic during close to Medium Wave Guide, therefore reflectivity is lower.
Similarly, the electric field E (z) of Metal absorption structure (shown in reference picture 1, along the z-axis direction, l≤z≤2l) can be carried out
Discrete Fourier transform.Fig. 5 is the Fourier transformation spectrogram of Metal absorption structure, H-mode electric field, and its polarization direction is along Fig. 1
Middle reference axis x directions；V-mode electric field, it is polarized along reference axis y directions, and Cx, Cy in Fig. 5 (a), (b) are represented respectively
With H-mode, V-mode photon it is incident when, the weight factor of the pattern of each in waveguide.As shown in figure 5, in Fourier transform spectrum
In, ni>Different peaks are occurred in that in 0 interval, different surface phasmon eigen modes are represented respectively, and ni<0 interval
Interior no peak, illustrates there was only the surface plasmon mode of forward-propagating in the waveguide of Metal absorption structure.For Metal absorption
The selection of structure length, the longer the better,
Acceptor of energy in this experimental example 1 can effectively be worked in communication band.(a), (b) are respectively in Fig. 6
The graph of a relation of acceptor of energy reflectivity, transmissivity and lambda1-wavelength in experimental example 1 of the present invention, as shown in fig. 6, using experiment
Acceptor of energy in example 1, in the range of 1400nm~1700nm, either H-mode or V-mode photon, energy is inhaled
The reflectivity for receiving device is respectively less than 10-3, the transmissivity of acceptor of energy is respectively less than 5*10-3.The absorption efficiency of acceptor of energy can be with
It is maintained at more than 99.5%.
The embodiment of the present invention can be used for the elimination of veiling glare or heavy pumping light useless on integrated optics chip, according to choosing
The radius of curvature of the arc surface of the metal heat insulation structure taken, reflectivity can be reduced to less than 0.1%；Inhaled according to the metal of selection
The length of structure is received, transmitance can also be down to less than 0.1%.Acceptor of energy in the embodiment of the present invention, to machining accuracy
Requirement it is lower, bandwidth of operation is wider, can eliminate on integrated optics chip in information process by making an uproar that veiling glare is brought
Sound.
It should be noted that in accompanying drawing or specification text, the implementation for not illustrating or describing is affiliated technology
Form known to a person of ordinary skill in the art, is not described in detail in field.In addition, the above-mentioned definition to each element and method is simultaneously
Various concrete structures, shape or the mode mentioned in embodiment are not limited only to, those of ordinary skill in the art can carry out letter to it
Singly change or replace.
Particular embodiments described above, has been carried out further in detail to the purpose of the present invention, technical scheme and beneficial effect
Describe in detail bright, it should be understood that the foregoing is only the present invention specific embodiment, be not intended to limit the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvements done etc. should be included in the protection of the present invention
Within the scope of.
Claims (11)
1. a kind of acceptor of energy, wherein, including：
Dielectric optical waveguide, for transmitting photon；And
Metal carbonyl coat, including Metal absorption structure, in the Metal absorption structure, metal level coats the medium light completely
Learn waveguide.
2. acceptor of energy according to claim 1, wherein, the metal carbonyl coat also includes metal heat insulation structure, institute
Coat the dielectric optical waveguide with stating metal heat insulation structural insulation, on the direction of the photon transmission, the metal heat insulation
Structure setting is before the Metal absorption structure.
3. acceptor of energy according to claim 2, wherein, the metal heat insulation structure includes an at least continuity curved surface
Structure, the direction of the continuity curved surface of the continuity curved-surface structure along the photon transmission moves closer to the Medium Optics ripple
Lead until the continuity curved surface and the dielectric optical waveguide are tangent.
4. acceptor of energy according to claim 3, wherein, the continuity curved surface is arc surface, parabola or double
Curved surface.
5. acceptor of energy according to claim 4, wherein, the continuity curved-surface structure is two, described two companies
Continuous property curved-surface structure is located at the both sides of the dielectric optical waveguide respectively.
6. acceptor of energy according to claim 5, wherein, described two continuity curved-surface structures are relative to optical waveguide
It is symmetrical arranged, the continuity curved surface of the continuity curved-surface structure is arc surface.
7. according to any described acceptor of energy in claim 3-6, wherein, continuity surface curvature is bigger, described
The reflectivity of photon is lower.
8. according to any described acceptor of energy in claim 1-6, wherein, the length of the Metal absorption structure is longer,
The absorption efficiency is higher.
9. acceptor of energy according to claim 8, wherein the length of the Metal absorption structure is more than spread length L,
Wherein spread length L is photon in 1/ that the strength retrogression of metal and the surface plasmon mode of dielectric interface is initial value
The distance propagated during e.
10. according to any described acceptor of energy in claim 2-6, wherein, the metal heat insulation structure and the metal
Absorbing structure is provided adjacent to, and both are integrally formed.
11. according to any described acceptor of energy in claim 1-6, wherein, the dielectric optical waveguide is silica-based waveguides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710441872.5A CN107167874B (en) | 2017-06-13 | 2017-06-13 | Acceptor of energy |
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| CN201710441872.5A CN107167874B (en) | 2017-06-13 | 2017-06-13 | Acceptor of energy |
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| CN107167874A true CN107167874A (en) | 2017-09-15 |
| CN107167874B CN107167874B (en) | 2019-11-22 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113740961A (en) * | 2021-08-26 | 2021-12-03 | 赛丽科技(苏州)有限公司 | Optical absorber and optical absorption chip of integrated medium optical waveguide |
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| CN1109970A (en) * | 1993-11-30 | 1995-10-11 | 日本钢管株式会社 | Temperature measuring device |
| CN1493892A (en) * | 2002-08-09 | 2004-05-05 | 伊斯曼柯达公司 | Optical wave guide and its preparation method |
| US20160216446A1 (en) * | 2015-01-28 | 2016-07-28 | Electronics And Telecommunications Research Institute | Apparatus for monitoring optical signal |
| CN106207326A (en) * | 2016-09-12 | 2016-12-07 | 厦门大学 | A kind of surface phasmon notch filter |
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2017
- 2017-06-13 CN CN201710441872.5A patent/CN107167874B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1109970A (en) * | 1993-11-30 | 1995-10-11 | 日本钢管株式会社 | Temperature measuring device |
| CN1493892A (en) * | 2002-08-09 | 2004-05-05 | 伊斯曼柯达公司 | Optical wave guide and its preparation method |
| US20160216446A1 (en) * | 2015-01-28 | 2016-07-28 | Electronics And Telecommunications Research Institute | Apparatus for monitoring optical signal |
| CN106207326A (en) * | 2016-09-12 | 2016-12-07 | 厦门大学 | A kind of surface phasmon notch filter |
Non-Patent Citations (1)
| Title |
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| CAI YONG-JING 等: "Waveguide Mode Splitter Based on Multi-mode Dielectric Dielectric-Loaded Surface Plasmon Polariton Waveguide", 《CHIN.PHYS.LETT.》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113740961A (en) * | 2021-08-26 | 2021-12-03 | 赛丽科技(苏州)有限公司 | Optical absorber and optical absorption chip of integrated medium optical waveguide |
| CN113740961B (en) * | 2021-08-26 | 2022-10-21 | 赛丽科技(苏州)有限公司 | Optical absorber and optical absorption chip of integrated medium optical waveguide |
| WO2023024466A1 (en) * | 2021-08-26 | 2023-03-02 | 赛丽科技(苏州)有限公司 | Light absorber integrated with dielectric optical waveguide, and light absorption chip |
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| CN107167874B (en) | 2019-11-22 |
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