CN107167080A - Moire frange signal of grating reconstructing method - Google Patents
Moire frange signal of grating reconstructing method Download PDFInfo
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- CN107167080A CN107167080A CN201710402052.5A CN201710402052A CN107167080A CN 107167080 A CN107167080 A CN 107167080A CN 201710402052 A CN201710402052 A CN 201710402052A CN 107167080 A CN107167080 A CN 107167080A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of moire frange signal of grating reconstructing method, comprise the following steps：A. Signal Pretreatment：Photoelectric conversion is carried out to optical grating Moire fringe, passes through the sine voltage signal for filtering with about 90 ° of two paths of signals difference being obtained after calculation processWith；B. the linearisation reconstruct of signal：To the signal obtained in step aWithLinearisation reconstruct is carried out, and introduces auxiliary function, it is finally reconstructed to obtain linearized function；C. the metering of displacement：Number N complete cycle of Moire fringe change is recorded using cycle rate counter, is for pitchIncrement type optical grid line displacement sensor, be by the obtained shift value x of its metering.By the above-mentioned means, moire frange signal of grating reconstructing method of the present invention, enables to the amplitude of signal reconstruction function pair primary signal to change insensitive, and realize with the good linearity and finally displacement measurement.
Description
Technical field
The present invention relates to photoelectric measurement field, more particularly to a kind of moire frange signal of grating reconstructing method.
Background technology
Grating displacement sensor is widely used in displacement monitoring in recent years, is become using Moire fringe as reason
The most typically of the e measurement technology of opinion is represented.Grating displacement sensor must be surveyed comprising a pair of optical grating pairs, one of grating scale
Measure benchmark to use, the chi is referred to as scale grating（Or key light grid）, another piece of grating scale then be referred to as indication grating.When two pieces of grating faces
Opposite overlap, Moire fringe will be produced, when two gratings along performed relative motion perpendicular to grid line direction when, Moire fringe just along
Correspondingly moved with grid line direction identical direction.The light intensity of change is converted into the electric signal of change using photoelectric cell, and
By the filter shape and calculation process of electronic component, corresponding shift value just can be obtained.Generally, in order to realize
Sensing and further subdivision, it is necessary to which, the moire frange signal changed by photoelectric cell, being processed into two-way phase difference is about
90 ° of sine voltage signal.
At present, domestic foreign minister's grating pitch is mostly more than 4 μm, in actual applications, only relies on grating pitch in itself
Resolution ratio, is generally unable to reach the requirement of accurate measurement.That is, it is necessary to which light is improved using the subdivision technology of Moire fringe
The resolution ratio of grid measuring system.
If however, directly carrying out sampling subdivision to original two-way sinusoidal signal, can have problems with, to signal
Sampling is carried out when comparing, due to just, the linearity of cosine signal it is bad, in a cycle, the electricity corresponding to same displacement difference
Pressure amplitude value difference is different, particularly when voltage magnitude is close to peak value, and grating scale needs a mobile larger displacement just to produce one
Individual small voltage change, so primary signal must be reconstructed.
Conventional restructing algorithm is mainly linearisation restructing algorithm, including arc tangent algorithm, sine and cosine are definitely subtracted each other（Approximately
Triangular wave）, sine and cosine it is absolute after be divided by（The absolute value of tangent, approximate triangular wave）And 8 close classifications（Utilize sine and cosine proximal line
The partial reconstructed signal of property）.Although these algorithms can obtain linear reconstruction function, the amplitude generally all to signal changes
More the sensitive and linearity has much room for improvement.
The content of the invention
The present invention solves the technical problem of a kind of moire frange signal of grating reconstructing method is provided, enable to
The amplitude change of signal reconstruction function pair primary signal is insensitive, and realizes with the good linearity and finally displacement measurement.
In order to solve the above technical problems, one aspect of the present invention is：A kind of optical grating Moire fringe letter is provided
Number change reconstructing method, comprise the following steps：
A. Signal Pretreatment：Photoelectric conversion is carried out to optical grating Moire fringe, by obtaining two paths of signals after filtering and calculation process
The sine voltage signal that about 90 ° of differenceWith；
B. the linearisation reconstruct of signal：To the signal obtained in step aWithLinearisation reconstruct is carried out, line is constructed
Property function,, and
Introduce auxiliary function,, it is finally reconstructed to obtain linear
Change function,；
C. the metering of displacement：Number N complete cycle of Moire fringe change is recorded using cycle rate counter, for grid
Away from forIncrement type optical grid line displacement sensor, be by the obtained shift value x of its metering, wherein。
In a preferred embodiment of the present invention, voltage signal in the step aWith, it is resonable
Think to be expressed as under situation, it is expressed as in the case of physical presence error is obtained, the wherein amplitude of A representation signals, B represents letter
Number phase, the DC component of C representation signals.
In a preferred embodiment of the present invention, the sgn functions in the step b, are sign function, for sgn functions,
Have
For symbol, represent a kind of nonequivalence operation, i.e., forIf Y is identical with Z value, and result of calculation is 1,
If Y is different with Z value, result of calculation is 0, for linearized function, it is inclined with real ideal linearity triangular wave
Difference is the theoretical error of the restructing algorithm, is defined as,For ideal triangular ripple, have, theoretical maximum error is。
In a preferred embodiment of the present invention, in the c, its unit is rad（Radian）, for d and x, its unit
It is（Micron）.
The beneficial effects of the invention are as follows：Moire frange signal of grating reconstructing method of the present invention, enables to signal reconstruction
The amplitude change of function pair primary signal is insensitive, and realizes with the good linearity and finally displacement measurement.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, makes required in being described below to embodiment
Accompanying drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the present invention, for
For those of ordinary skill in the art, on the premise of not paying creative work, it can also obtain other according to these accompanying drawings
Accompanying drawing, wherein：
Fig. 1 is the operation principle schematic flow sheet of moire frange signal of grating reconstructing method of the present invention；
Fig. 2 is the signal waveforms of the present invention；
Fig. 3 is Fig. 2 Lisaru circle figure；
Fig. 4 is the oscillogram of the grating positive movement of the present invention；
Fig. 5 is the heterodromous oscillogram of grating of the present invention.
Embodiment
The technical scheme in the embodiment of the present invention will be clearly and completely described below, it is clear that described implementation
Example is only a part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, this area is common
All other embodiment that technical staff is obtained under the premise of creative work is not made, belongs to the model that the present invention is protected
Enclose.
Referring to Fig. 1, a kind of moire frange signal of grating reconstructing method, comprises the following steps：
A. the pretreatment of signal：The signal input signal pretreatment circuit board that grating scale is exported is filtered, and is adopted with data
Two-way voltage signal of the truck PCI-8757 collections by pretreatment.
B. the linearisation reconstruct of signal：Such as figure one, by data collecting card PCI-8757 and Labview software, will be gathered
To magnitude of voltage input the voltage value sequence that server obtains two paths of signals in real timeWith.Call what is woven
Labview programs, the voltage value sequence inputted with equation below Real-time ReconstructionWith, form new reconstruct letter
Number：
The function reconstructed, as shown in Figure 2.
C. the metering of displacement：Number N complete cycle of Moire fringe change is recorded using labview software programmings, and with such as
Lower formula real time measure goes out shift value,
In formula,,Unit be radian（rad）.
Further, when being by the data collecting card PCI-8757 two paths of signals collected：
When
For the theoretical maximum error of this restructing algorithm, have
Regulated and controled by using server and labview, and in practice in order to improve speed, FPGA and correlation can also be used
Corollary equipment, the pitch of used increment type optical grid line displacement sensor is 20 microns, can also be to smaller or greater
The grating of pitch carries out linearisation reconstruct and metering, and other specific equipment also can be according to required setting.
Moire frange signal of grating reconstructing method of the present invention, enables to the amplitude of signal reconstruction function pair primary signal
Change is insensitive, and realizes with the good linearity and finally displacement measurement.
Prior art is different from, moire frange signal of grating reconstructing method of the present invention enables to signal reconstruction function
Amplitude change to primary signal is insensitive, and realizes with the good linearity and finally displacement measurement.
Embodiments of the invention are the foregoing is only, are not intended to limit the scope of the invention, it is every to utilize this hair
Equivalent structure or equivalent flow conversion that bright description is made, or directly or indirectly it is used in other related technology necks
Domain, is included within the scope of the present invention.
Claims (4)
1. a kind of moire frange signal of grating reconstructing method, it is characterised in that comprise the following steps：
A. Signal Pretreatment：Photoelectric conversion is carried out to optical grating Moire fringe, by obtaining two paths of signals after filtering and calculation process
The sine voltage signal that about 90 ° of differenceWith；
B. the linearisation reconstruct of signal：To the signal obtained in step aWithLinearisation reconstruct is carried out, line is constructed
Property function,, and
Introduce auxiliary function,, it is finally reconstructed to obtain linear
Change function,；
C. the metering of displacement：Number N complete cycle of Moire fringe change is recorded using cycle rate counter, is for pitchIncrement type optical grid line displacement sensor, be by the obtained shift value x of its metering, wherein。
2. moire frange signal of grating reconstructing method according to claim 1, it is characterised in that electric in the step a
Press signalWith, it is expressed as in an ideal case, missed in physical presence
Difference is expressed as in the case of obtaining, wherein A representatives
The amplitude of signal, the phase of B representation signals, the DC component of C representation signals.
3. moire frange signal of grating reconstructing method according to claim 1, it is characterised in that in the step b
Sgn functions, are sign function, for sgn functions, are had
For symbol, represent a kind of nonequivalence operation, i.e., forIf Y is identical with Z value, and result of calculation is 1, if
Y is different with Z value, then result of calculation is 0, for linearized function, the deviation of itself and real ideal linearity triangular wave
For the theoretical error of the restructing algorithm, it is defined as,For ideal triangular ripple, have, theoretical maximum error is。
4. moire frange signal of grating reconstructing method according to claim 1, it is characterised in that in the c, its
Unit is rad（Radian）, for d and x, its unit is（Micron）.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112556734A (en) * | 2020-11-30 | 2021-03-26 | 中国科学院长春光学精密机械与物理研究所 | Moire fringe subdivision method for photoelectric encoder |
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| CN101813463A (en) * | 2010-04-20 | 2010-08-25 | 重庆理工大学 | Soft subdivision method of moire frange signal of grating |
| CN103604373A (en) * | 2013-11-20 | 2014-02-26 | 沈阳工业大学 | Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus |
| CN106556342A (en) * | 2016-11-11 | 2017-04-05 | 深圳市太赫兹科技创新研究院 | A kind of grating subdivision device and method based on FPGA |
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2017
- 2017-06-01 CN CN201710402052.5A patent/CN107167080B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813463A (en) * | 2010-04-20 | 2010-08-25 | 重庆理工大学 | Soft subdivision method of moire frange signal of grating |
| CN103604373A (en) * | 2013-11-20 | 2014-02-26 | 沈阳工业大学 | Raster Moire striped wavelet fine dividing method and raster displacement measuring apparatus |
| CN106556342A (en) * | 2016-11-11 | 2017-04-05 | 深圳市太赫兹科技创新研究院 | A kind of grating subdivision device and method based on FPGA |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112556734A (en) * | 2020-11-30 | 2021-03-26 | 中国科学院长春光学精密机械与物理研究所 | Moire fringe subdivision method for photoelectric encoder |
| CN112556734B (en) * | 2020-11-30 | 2021-09-28 | 中国科学院长春光学精密机械与物理研究所 | Moire fringe subdivision method for photoelectric encoder |
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