CN107162437A - A kind of HoSrMnZn is co-doped with bismuth ferrite superlattice film and preparation method thereof - Google Patents

A kind of HoSrMnZn is co-doped with bismuth ferrite superlattice film and preparation method thereof Download PDF

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CN107162437A
CN107162437A CN201710253963.6A CN201710253963A CN107162437A CN 107162437 A CN107162437 A CN 107162437A CN 201710253963 A CN201710253963 A CN 201710253963A CN 107162437 A CN107162437 A CN 107162437A
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谈国强
郭美佑
杨玮
刘云
任慧君
夏傲
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Shaanxi University of Science and Technology
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Abstract

Bismuth ferrite superlattice film and preparation method thereof is co-doped with the invention provides a kind of HoSrMnZn, is trigonal crystal structure with crystal structure, space group is R3c:H and R3m:The bismuth ferrite thin film for the different element dopings that R coexists prepares Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3/Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Superlattice film, i.e. HoSrMnZn are co-doped with bismuth ferrite superlattice film.The present invention uses sol gel process, and uses spin coating and layer by layer annealing method, and equipment requirement is simple, and film, and chemical constituent controllable precise are suitably prepared on big surface and surface in irregular shape, can improve BiFeO3The multi-ferrum property of film.

Description

A kind of HoSrMnZn is co-doped with bismuth ferrite superlattice film and preparation method thereof
Technical field
The invention belongs to field of functional materials, the FTO/glass substrate surfaces being related in functionalization prepare HoSrMnZn and are total to Mix bismuth ferrite superlattice film, specially Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3/ Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Superlattice film.
Background technology
BiFeO3It is one of a small number of single phase multi-iron materials, the perovskite structure (belonging to R3c point groups) with distortion, by standing A kind of oblique hexagonal structure for deviateing preferable perovskite structure formed by square structure along (111) direction stretching, at room temperature simultaneously With ferroelectric order and antiferromagnetic order, due to higher ferroelectric transition temperature (Tc=1103K) and magnetic phase transition temperature (TN =643K), in magnetoelectric transducer, spin electric device has wide practical use and paid close attention in terms of memory.But It is, BiFeO3The problem of being primarily present following several respects, such as leakage current are big, residual polarization is small, magnetic is weak, magnetoelectric effect It is weak etc., largely limit its application.
Superlattices are by the periodic structure of two or more different materials layered arrangement in a dimension, its cycle It is necessarily less than the mean free path of electronics, each layer of thickness only has several nanometers or tens nanometers, substantially atomic distance Magnitude, the number of plies is by several layers of to hundreds of layers.Wherein modulation doping superlattices are to mix various concentrations regularly in same material Impurity, in difference of the interface due to fermi level, charge migration can be produced, can band bend;Can be super by changing The surface chemistry environment of lattice film carrys out control interface structure, can significantly improve the electrical properties at interface.By using super crystalline substance The physical effect such as the stress of lattice film or strain, layer coupling, can obtain many iron that high-performance or single structure material do not have Performance.Superlattices can not only strengthen the property that its single constituent element has, and can also realize the property that single constituent element does not have. From the point of view of symmetry, though each constituent element is all centrosymmetric, but because interface both sides are different material constituent elements, It can provide inversion symmetry broken scarce condition, also, the strain of interface can provide or strengthen ferroelectricity sequence again.Enter one Step is said, the spin sequence of novelty may be obtained by the layer coupling at design interface.These are Development of Novel multiferroic superlattices Artificial material provides new possibility.
At present, also not on Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3/ Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3The relevant report of superlattice film and preparation method thereof.
The content of the invention
Bismuth ferrite superlattice film and preparation method thereof, the party are co-doped with it is an object of the invention to provide a kind of HoSrMnZn Method equipment requirement is simple, and experiment condition is easily reached, doping is easily controlled, and obtained HoSrMnZn is co-doped with bismuth ferrite superlattices Film is Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3/Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Superlattice film, BiFeO can be improved3The multi-ferrum property of base film.
To achieve these goals, the present invention is adopted the following technical scheme that:
A kind of HoSrMnZn is co-doped with bismuth ferrite superlattice film, if the HoSrMnZn be co-doped with bismuth ferrite superlattice film by The crystalline state Bi of the spaced arrangement of dried layer0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film is sequentially overlapped composition.
The crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film is water chestnut side's perovskite structure of distortion, tripartite Phase R3m:R and R3c:H space groups coexist;Crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film is the water chestnut side of distortion Perovskite structure, tripartite's phase R3m:R and R3c:H space groups coexist.
The crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3The number of plies of film is respectively 5~10 layers, per layer crystal state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3The thickness of film Spend for 30~40nm.
The gross thickness that HoSrMnZn is co-doped with bismuth ferrite superlattice film is 440~550nm.
Described HoSrMnZn is co-doped with the preparation method of bismuth ferrite superlattice film, comprises the following steps:
Step 1:It is 0.94 in molar ratio:0.08:0.03:0.96:0.03:0.01 by bismuth nitrate, holmium nitrate, strontium nitrate, Ferric nitrate, manganese acetate and zinc nitrate are dissolved in the mixed solution of ethylene glycol monomethyl ether and acetic anhydride, obtain precursor liquid A;
It is 0.94 in molar ratio:0.08:0.03:0.95:0.03:0.02 by bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, Manganese acetate and zinc nitrate are dissolved in the mixed solution of ethylene glycol monomethyl ether and acetic anhydride, obtain precursor liquid B;
Step 2:Precursor liquid A is spin-coated on FTO/glass substrates, obtained Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Wet film, wet film toasts to obtain dry film after spin coating at 190~220 DEG C, then at Annealed in atmosphere at 540~560 DEG C, obtain crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating Precursor liquid B, obtains Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film is toasted after spin coating at 190~220 DEG C Dry film is obtained, is annealed in atmosphere at 540~560 DEG C, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3It is thin Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and step 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Made on film It is standby go out crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3It is thin Film, so circulation obtain HoSrMnZn and are co-doped with bismuth ferrite superlattice film until reaching required thickness.
The total concentration of metal ion is 0.1~0.5mol/L in precursor liquid A and precursor liquid B in the step 1.
Ethylene glycol monomethyl ether and the volume ratio of acetic anhydride are (1~5) in the precursor liquid A and precursor liquid B:1.
The step 2 first cleans up FTO/glass substrates before carrying out, then irradiates under ultraviolet light, until FTO/ Glass substrate surfaces reach atomic cleanliness degree.
Spin coating rotating speed in the step 2 and step 3 during spin coating is 3800~4200r/min, spin coating time is 12~ 18s。
Baking time in the step 2 and step 3 after spin coating is 7~10min.
Annealing time in the step 2 and step 3 is 8~10min.
Relative to prior art, the invention has the advantages that:
The HoSrMnZn that the present invention is provided is co-doped with the preparation method of bismuth ferrite superlattice film, with bismuth nitrate, holmium nitrate, nitre Sour strontium, ferric nitrate, manganese acetate and zinc nitrate are raw material, and the mixed of ethylene glycol monomethyl ether and acetic anhydride is dissolved in respectively by certain mol ratio Close in solution, obtain the precursor liquid A and precursor liquid B of the stabilization of two kinds of difference Zn doping concentrations;It is first enterprising in substrate with precursor liquid A Row spin coating, prepares by annealing a layer crystal state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, on the basis of this film Spin coating is carried out with precursor liquid B again, second layer crystalline state Bi is prepared by annealing0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, such as This analogizes, and repeats spin coating precursor liquid A and precursor liquid B and anneals layer by layer, alternating prepares crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, i.e., Obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.The present invention uses sol-gel technology, passes through alkaline earth element Sr, rare earth Element Ho and the element codope of transition metal Mn and Zn tetra- prepare HoSrMnZn and are co-doped with bismuth ferrite superlattice film.Compared to Other prepare the method for film, and present device requirement is simple, and experiment condition is easily reached, with low cost, and reaction is easily carried out, Technical process temperature is low, and preparation process and doping are easily controlled, and is suitably made on big surface and surface in irregular shape Standby film, it is easy to mix some trace elements, the equal of atom or molecular level can be obtained in a short time equal and quantitative Even property, HoSrMnZn made from this method is co-doped with bismuth ferrite superlattice film uniformity preferably, and chemical constituent controllable precise.
The present invention prepares a kind of HoSrMnZn of successively alternating growth by sol-gel process and is co-doped with bismuth ferrite superlattices Film, ferroelectric superlattice be on the basis of the condition such as structure, composition, thickness (under nm yardsticks), lamination cycle of control material, The extension Ferroelectric Multilayers obtained by the different thin-film material alternating growth of two or more performance, due to composition superlattices Thin-film material lattice parameter difference, total can produce certain extension strain, so as to influence each layer and whole super The performance of lattice system.It can improve the performance of original film using this phenomenon or obtain the new work(that single film does not have Can, therefore ferroelectric superlattice material has important application prospect.Superlattice film can be each excellent by correlation function material Property organically coupled by interface, can by using the physical effect such as the stress of superlattice film or strain, layer coupling Obtain the multi-ferrum property that high-performance or single structure material do not have;By changing surface chemistry environment come control interface structure, The electrical properties at interface can be significantly improved;Ferroelectric superlattice results in big Jie compared to original ferroelectric thin film Electric constant, enhanced ferroelectric properties etc.;In addition, the interfacial effect inside superlattice film can hinder electronics or hole in electricity Transmission under field action, further improves the insulating properties of superlattice film, and further reduces leakage current density, improves film Multi-ferrum property.
It is by the crystalline state of two kinds of difference Zn doping concentrations that HoSrMnZn prepared by the present invention, which is co-doped with bismuth ferrite superlattice film, Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film is mutual The superlattice structure formed by is alternately prepared, than the BiFeO of single structure3Film has more superior multi-ferrum property, can Improve BiFeO3The multi-ferrum property of base film.
Further, the present invention uses the different component bismuth ferrite thin film group of the similar water chestnut side's perovskite structure of crystal structure Superlattice film is built, i.e., with tripartite's phase R3m:R and R3c:H space groups coexist Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and tripartite's phase R3m:R and R3c:H space groups coexist Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film alternate combinations construct HoSrMnZn and are co-doped with bismuth ferrite superlattice film, That is Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3/Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Superlattice film, can be with Improve BiFeO3The multi-ferrum property of base film.
Brief description of the drawings
Fig. 1 is the XRD that HoSrMnZn prepared by the present invention is co-doped with bismuth ferrite superlattice film;
Fig. 2 is the Raman figure that HoSrMnZn prepared by the present invention is co-doped with bismuth ferrite superlattice film.
Embodiment
The present invention is described further with currently preferred specific embodiment below in conjunction with the accompanying drawings, raw material is analysis It is pure.
Embodiment 1
Step 1:By raw material of bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate, (bismuth nitrate is excessive 5%) it is in molar ratio, 0.94:0.08:0.03:0.96:0.03:0.01 is dissolved in volume ratio for 3:1 ethylene glycol monomethyl ether and acetic acid In the mixed solution of acid anhydride, the precursor liquid A for the stabilization that metal ion total concentration is 0.3mol/L is obtained;
Using bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate as raw material (bismuth nitrate excessive 5%), press Mol ratio is 0.94:0.08:0.03:0.95:0.03:0.02 is dissolved in volume ratio for 3:1 ethylene glycol monomethyl ether and acetic anhydride it is mixed Close in solution, obtain the precursor liquid B for the stabilization that metal ion total concentration is 0.3mol/L;
Step 2:FTO/glass substrates are cleaned up, then irradiated under ultraviolet light, until FTO/glass substrate surfaces Atomic cleanliness degree is reached, then precursor liquid A is spin-coated on FTO/glass substrates, its spin coating rotating speed is 4000r/min, spin coating Time is 15s, obtains Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Wet film, wet film toasts 8min at 210 DEG C and obtains dry film, Anneal 9min in atmosphere at 550 DEG C again, produces crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating Precursor liquid B, its spin coating rotating speed is 4000r/min, and spin coating time is 15s, is obtained Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film toasts 8min at 210 DEG C and obtains dry film, then at 550 DEG C Anneal 9min in air, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Crystalline state is prepared on film Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Prepared on film Crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3 Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, until prepare each 7 layers every layer 30~ Spaced crystalline state Bi thick 40nm0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, that is, obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.
The thing phase composition structure that HoSrMnZn is co-doped with bismuth ferrite superlattice film is determined using x-ray diffractometer;Use FE- SEM determines the microscopic appearance that HoSrMnZn is co-doped with bismuth ferrite superlattice film;With Radiant Multiferroic instrument tests HoSrMnZn is co-doped with the ferroelectric properties of bismuth ferrite superlattice film, and bismuth ferrite is co-doped with Agilent B2901A tests HoSrMnZn The leakage current density of superlattice film.
Fig. 1 is the XRD that HoSrMnZn prepared by the embodiment of the present invention 1 is co-doped with bismuth ferrite superlattice film, and Fig. 1 a are in 2 θ Corresponding diffraction maximum at=22.42 °, 32.09 °, 39.50 °, 45.77 ° is tripartite's phase BiFeO3(JCPDS 74-2016's) (1-10), (100), (1-11), (200) crystal face.Illustrate in superlattice film Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Membrane structure is water chestnut side's perovskite structure of distortion, tripartite's phase R3m:R and R3c:H space groups coexist, and Fig. 1 b also occur in that tripartite's phase BiFeO at 2 θ=22.42 °, 32.09 °, 39.50 °, 45.77 °3 (1-10), (100), (1-11) of (JCPDS 74-2016), the diffraction maximum of (200) crystal face are corresponding, illustrate superlattice film Middle Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3The water chestnut side's perovskite structure of membrane structure also for distortion, tripartite's phase R3m:R And R3c:H space groups coexist, and two kinds of membrane structures do not change, but have stress between them, cause diffraction maximum Corresponding angle has deviation.
Fig. 2 is the Raman figure that HoSrMnZn prepared by the embodiment of the present invention 1 is co-doped with bismuth ferrite superlattice film, can by Fig. 2 a To find out Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film is in 135.2cm-1、157.1cm-1、214.3cm-1、278.8cm-1、392.3cm-1、487.8cm-1、535.5cm-1、623.3cm-1Vibration mould corresponds to A respectively1-1、A1-2、A1-3、E-3、E-6、 E-7, E-8 and E-9 vibrate mould, and can be seen that Bi by Fig. 2 b0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film A1-1、A1- 2、A1- 3, E-3, E-6, E-7, E-8 133.7cm corresponding with E-9 vibration moulds-1、155.4cm-1、209.6cm-1、280.5cm-1、 398.7cm-1、486.5cm-1、532.2cm-1、621.5cm-1Place's vibration mould, it can be seen that Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Vibration mould intensity enhancing at film low frequency, while vibration peak narrows.In height Frequency 621cm-1The intensity of the E-9 vibration moulds of left and right is remarkably reinforced, and is produced Jahn-Teller twisted effects, is further illustrated composition Superlattice film between can increase the distortion of structure.
Embodiment 2
Step 1:By raw material of bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate, (bismuth nitrate is excessive 5%) it is in molar ratio, 0.94:0.08:0.03:0.96:0.03:0.01 is dissolved in volume ratio for 1:1 ethylene glycol monomethyl ether and acetic acid In the mixed solution of acid anhydride, the precursor liquid A for the stabilization that metal ion total concentration is 0.1mol/L is obtained;
Using bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate as raw material (bismuth nitrate excessive 5%), press Mol ratio is 0.94:0.08:0.03:0.95:0.03:0.02 is dissolved in volume ratio for 1:1 ethylene glycol monomethyl ether and acetic anhydride it is mixed Close in solution, obtain the precursor liquid B for the stabilization that metal ion total concentration is 0.1mol/L;
Step 2:FTO/glass substrates are cleaned up, then irradiated under ultraviolet light, until FTO/glass substrate surfaces Atomic cleanliness degree is reached, then precursor liquid A is spin-coated on FTO/glass substrates, its spin coating rotating speed is 3800r/min, spin coating Time is 18s, obtains Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Wet film, wet film toasts 10min at 190 DEG C and must done Film, then the 10min that anneals in atmosphere at 540 DEG C, produce crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating Precursor liquid B, its spin coating rotating speed is 3800r/min, and spin coating time is 18s, is obtained Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film toasts 10min at 190 DEG C and obtains dry film, then at 540 DEG C Anneal 10min in air, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Crystalline state is prepared on film Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Prepared on film Crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3 Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, until prepare each 5 layers every layer 30~ Spaced crystalline state Bi thick 40nm0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, that is, obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.
Embodiment 3
Step 1:By raw material of bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate, (bismuth nitrate is excessive 5%) it is in molar ratio, 0.94:0.08:0.03:0.96:0.03:0.01 is dissolved in volume ratio for 2:1 ethylene glycol monomethyl ether and acetic acid In the mixed solution of acid anhydride, the precursor liquid A for the stabilization that metal ion total concentration is 0.2mol/L is obtained;
Using bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate as raw material (bismuth nitrate excessive 5%), press Mol ratio is 0.94:0.08:0.03:0.95:0.03:0.02 is dissolved in volume ratio for 2:1 ethylene glycol monomethyl ether and acetic anhydride it is mixed Close in solution, obtain the precursor liquid B for the stabilization that metal ion total concentration is 0.2mol/L;
Step 2:FTO/glass substrates are cleaned up, then irradiated under ultraviolet light, until FTO/glass substrate surfaces Atomic cleanliness degree is reached, then precursor liquid A is spin-coated on FTO/glass substrates, its spin coating rotating speed is 3900r/min, spin coating Time is 16s, obtains Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Wet film, wet film toasts 9min at 200 DEG C and obtains dry film, Anneal 8min in atmosphere at 560 DEG C again, produces crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating Precursor liquid B, its spin coating rotating speed is 3900r/min, and spin coating time is 16s, is obtained Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film toasts 9min at 200 DEG C and obtains dry film, then at 560 DEG C Anneal 8min in air, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Crystalline state is prepared on film Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Prepared on film Crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3 Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, until prepare each 6 layers every layer 30~ Spaced crystalline state Bi thick 40nm0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, that is, obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.
Embodiment 4
Step 1:By raw material of bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate, (bismuth nitrate is excessive 5%) it is in molar ratio, 0.94:0.08:0.03:0.96:0.03:0.01 is dissolved in volume ratio for 4:1 ethylene glycol monomethyl ether and acetic acid In the mixed solution of acid anhydride, the precursor liquid A for the stabilization that metal ion total concentration is 0.4mol/L is obtained;
Using bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate as raw material (bismuth nitrate excessive 5%), press Mol ratio is 0.94:0.08:0.03:0.95:0.03:0.02 is dissolved in volume ratio for 4:1 ethylene glycol monomethyl ether and acetic anhydride it is mixed Close in solution, obtain the precursor liquid B for the stabilization that metal ion total concentration is 0.4mol/L;
Step 2:FTO/glass substrates are cleaned up, then irradiated under ultraviolet light, until FTO/glass substrate surfaces Atomic cleanliness degree is reached, then precursor liquid A is spin-coated on FTO/glass substrates, its spin coating rotating speed is 4100r/min, spin coating Time is 14s, obtains Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Wet film, wet film toasts 7min at 220 DEG C and obtains dry film, Anneal 9.5min in atmosphere at 545 DEG C again, produces crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating Precursor liquid B, its spin coating rotating speed is 4100r/min, and spin coating time is 14s, is obtained Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film toasts 7min at 220 DEG C and obtains dry film, then at 545 DEG C Anneal 9.5min in air, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Crystalline state is prepared on film Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Prepared on film Crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3 Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, until prepare each 8 layers every layer 30~ Spaced crystalline state Bi thick 40nm0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, that is, obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.
Embodiment 5
Step 1:By raw material of bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate, (bismuth nitrate is excessive 5%) it is in molar ratio, 0.94:0.08:0.03:0.96:0.03:0.01 is dissolved in volume ratio for 5:1 ethylene glycol monomethyl ether and acetic acid In the mixed solution of acid anhydride, the precursor liquid A for the stabilization that metal ion total concentration is 0.5mol/L is obtained;
Using bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, manganese acetate and zinc nitrate as raw material (bismuth nitrate excessive 5%), press Mol ratio is 0.94:0.08:0.03:0.95:0.03:0.02 is dissolved in volume ratio for 5:1 ethylene glycol monomethyl ether and acetic anhydride it is mixed Close in solution, obtain the precursor liquid B for the stabilization that metal ion total concentration is 0.5mol/L;
Step 2:FTO/glass substrates are cleaned up, then irradiated under ultraviolet light, until FTO/glass substrate surfaces Atomic cleanliness degree is reached, then precursor liquid A is spin-coated on FTO/glass substrates, its spin coating rotating speed is 4200r/min, spin coating Time is 12s, obtains Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Wet film, wet film toasts 8.5min at 205 DEG C and must done Film, then the 8.59min that anneals in atmosphere at 555 DEG C, produce crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating Precursor liquid B, its spin coating rotating speed is 4200r/min, and spin coating time is 12s, is obtained Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film toasts 8.5min at 205 DEG C and obtains dry film, then at 555 DEG C Anneal 8.5min in atmosphere, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Crystalline state is prepared on film Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Prepared on film Crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3 Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, until prepare each 10 layers every layer 30~ Spaced crystalline state Bi thick 40nm0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, that is, obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.
Above said content is to combine specific preferred embodiment further description made for the present invention, is not Whole or unique embodiment, those of ordinary skill in the art are by reading description of the invention to technical solution of the present invention Any equivalent conversion taken, is that claim of the invention is covered.

Claims (10)

1. a kind of HoSrMnZn is co-doped with bismuth ferrite superlattice film, it is characterised in that it is super brilliant that the HoSrMnZn is co-doped with bismuth ferrite If lattice film is by the crystalline state Bi of the spaced arrangement of dried layer0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film is sequentially overlapped composition.
2. HoSrMnZn according to claim 1 is co-doped with bismuth ferrite superlattice film, it is characterised in that the crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film is water chestnut side's perovskite structure of distortion, tripartite's phase R3m:R and R3c:H is empty Between point group coexist;Crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film is water chestnut side's perovskite structure of distortion, tripartite Phase R3m:R and R3c:H space groups coexist.
3. HoSrMnZn according to claim 1 is co-doped with bismuth ferrite superlattice film, it is characterised in that the crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3The layer of film Number is respectively 5~10 layers, per layer crystal state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film and crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3The thickness of film is 30~40nm.
4. the HoSrMnZn in claim 1-3 described in any one is co-doped with the preparation method of bismuth ferrite superlattice film, it is special Levy and be, comprise the following steps:
Step 1:It is 0.94 in molar ratio:0.08:0.03:0.96:0.03:0.01 by bismuth nitrate, holmium nitrate, strontium nitrate, nitric acid Iron, manganese acetate and zinc nitrate are dissolved in the mixed solution of ethylene glycol monomethyl ether and acetic anhydride, obtain precursor liquid A;
It is 0.94 in molar ratio:0.08:0.03:0.95:0.03:0.02 by bismuth nitrate, holmium nitrate, strontium nitrate, ferric nitrate, acetic acid Manganese and zinc nitrate are dissolved in the mixed solution of ethylene glycol monomethyl ether and acetic anhydride, obtain precursor liquid B;
Step 2:Precursor liquid A is spin-coated on FTO/glass substrates, Bi is obtained0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3It is wet Film, wet film toasts to obtain dry film after spin coating at 190~220 DEG C, is annealed in atmosphere at 540~560 DEG C, obtains crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film;
Step 3:By crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film cooling is to room temperature, in its surface spin coating forerunner Liquid B, obtains Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Wet film, wet film is toasted at 190~220 DEG C after spin coating and must done Film, anneals in atmosphere at 540~560 DEG C, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3On film Prepare crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film;
Step 4:Repeat step 2 and step 3, i.e., in crystalline state Bi0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Prepared on film Crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3Film, then in crystalline state Bi0.89Ho0.08Sr0.03Fe0.96Mn0.03Zn0.01O3 Crystalline state Bi is prepared on film0.89Ho0.08Sr0.03Fe0.95Mn0.03Zn0.02O3Film, is so circulated until reaching required thickness, Obtain HoSrMnZn and be co-doped with bismuth ferrite superlattice film.
5. HoSrMnZn according to claim 4 is co-doped with the preparation method of bismuth ferrite superlattice film, it is characterised in that institute The total concentration for stating metal ion in precursor liquid A and precursor liquid B in step 1 is 0.1~0.5mol/L.
6. HoSrMnZn according to claim 4 is co-doped with the preparation method of bismuth ferrite superlattice film, it is characterised in that institute It is (1~5) to state ethylene glycol monomethyl ether and the volume ratio of acetic anhydride in precursor liquid A and precursor liquid B:1.
7. HoSrMnZn according to claim 4 is co-doped with the preparation method of bismuth ferrite superlattice film, it is characterised in that institute State before step 2 is carried out and first clean up FTO/glass substrates, then irradiate under ultraviolet light, until FTO/glass substrate surfaces Reach atomic cleanliness degree.
8. HoSrMnZn according to claim 4 is co-doped with the preparation method of bismuth ferrite superlattice film, it is characterised in that institute Spin coating rotating speed when stating spin coating in step 2 and step 3 is 3800~4200r/min, and spin coating time is 12~18s.
9. HoSrMnZn according to claim 4 is co-doped with the preparation method of bismuth ferrite superlattice film, it is characterised in that institute It is 7~10min to state the baking time in step 2 and step 3 after spin coating.
10. HoSrMnZn according to claim 4 is co-doped with the preparation method of bismuth ferrite superlattice film, it is characterised in that Annealing time in the step 2 and step 3 is 8~10min.
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