CN107152691A - Low NOx afterburnings and the efficient minimizing technologies of VOC and system based on RTO - Google Patents
Low NOx afterburnings and the efficient minimizing technologies of VOC and system based on RTO Download PDFInfo
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- CN107152691A CN107152691A CN201710482600.XA CN201710482600A CN107152691A CN 107152691 A CN107152691 A CN 107152691A CN 201710482600 A CN201710482600 A CN 201710482600A CN 107152691 A CN107152691 A CN 107152691A
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- 238000005516 engineering process Methods 0.000 title claims abstract description 11
- 239000002912 waste gas Substances 0.000 claims abstract description 103
- 239000007789 gas Substances 0.000 claims abstract description 53
- 238000002485 combustion reaction Methods 0.000 claims abstract description 30
- 238000005338 heat storage Methods 0.000 claims description 98
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 18
- 238000009825 accumulation Methods 0.000 claims description 12
- 239000003345 natural gas Substances 0.000 claims description 9
- 230000000875 corresponding effect Effects 0.000 claims description 6
- 230000036760 body temperature Effects 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 5
- 230000009471 action Effects 0.000 claims description 4
- 239000010815 organic waste Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 239000012855 volatile organic compound Substances 0.000 abstract description 23
- 239000000446 fuel Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 238000009841 combustion method Methods 0.000 abstract description 2
- 238000002347 injection Methods 0.000 abstract description 2
- 239000007924 injection Substances 0.000 abstract description 2
- 230000009977 dual effect Effects 0.000 abstract 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 6
- 239000003546 flue gas Substances 0.000 description 6
- 238000013461 design Methods 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
- F23G7/066—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel preheating the waste gas by the heat of the combustion, e.g. recuperation type incinerator
- F23G7/068—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel preheating the waste gas by the heat of the combustion, e.g. recuperation type incinerator using regenerative heat recovery means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2206/00—Waste heat recuperation
- F23G2206/10—Waste heat recuperation reintroducing the heat in the same process, e.g. for predrying
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2209/00—Specific waste
- F23G2209/14—Gaseous waste or fumes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2900/00—Special features of, or arrangements for incinerators
- F23G2900/55—Controlling; Monitoring or measuring
- F23G2900/55001—Controlling combustion air preheating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G2900/00—Special features of, or arrangements for incinerators
- F23G2900/55—Controlling; Monitoring or measuring
- F23G2900/55003—Sensing for exhaust gas properties, e.g. O2 content
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Incineration Of Waste (AREA)
Abstract
The invention discloses the low NOx afterburnings based on RTO and the efficient minimizing technologies of VOC and system, applied to the dual chamber RTO exhaust treatment systems in VOCs treatment field, this method is monitored on-line to inlet exhaust, path outside corresponding equipment is switched according to exhaust gas concentration, the reverse switching of waste gas flow direction in equipment is carried out in combination with regenerator temperature, improve organic exhaust gas thermal oxide efficiency, on the one hand this method can realize low NOx combustion on the basis of device structure is not changed significantly, reduce the performance requirement to burner, abandon using expensive low-NOx combustor, reduce cost of investment;On the other hand high-level VOC removal efficiency can be realized, it is sufficiently mixed by fuel injection into organic exhaust gas, substantially improve efficiency of combustion, ignition temperature in combustion chamber distributes very evenly, produce " non-flaming combustion flameless combustion " effect, fuel is saved up to more than 20% than burner combustion method, while realizing NOx zero-emission.
Description
Technical field
The present invention is applied to thermal oxidation method and removes organic exhaust gas field of Environment Protection, and in particular to a kind of low NOx based on RTO is mended
Combustion and the efficient minimizing technologies of VOC and system.
Background technology
RTO (Regenerative Thermal Oxidizer, abbreviation RTO), heat accumulating type oxidation furnace is that one kind efficiently has
Machine waste gas pollution control and treatment equipment.
In heat accumulation type thermal oxidation stove, organic exhaust gas carries out high-temperature oxydation in combustion chamber, discharges carbon dioxide and water steams
Gas.Waste gas is heated by the heat storage of side first, is then passed among combustion chamber and is burnt, the exhaust after burning
Heat is then released by the heat storage of other side so that heat storage is heating organic exhaust gas savings heat next time, waits to reach
Switching time, valve is acted, exhaust and waste gas reverse flow, the heat waste gas accumulated in being circulated using upper one, together
When liberated heat after burning is accumulated again, it is basic to provide heat for switching next time, to realize that RTO equipment is continuously transported
Turn.
For low concentration gas, existing equipment toward fuel oil or natural gas is filled into combustion chamber by maintaining its equipment operation
Heat balance.There is larger hidden danger in such a afterburning mode, in the case that existing RTO chamber structures are compact, afterburning fuel
Concentration is entered among combustion chamber, and local temperature around burner can be caused too high, the temperature field of combustion chamber and flow field
Uniformity declines, and produces substantial amounts of NOx, causes secondary pollution.According to low-NOx combustor, although can be to a certain extent
The problem of NOx emission is high is solved, but can not thoroughly be solved, while low-NOx combustor price is high, then can further increase enterprise
Cost of investment, therefore need to improve existing RTO equipment afterburning mode to solve corresponding pollution and investment problem.In addition, right
RTO equipment, it is existing in the case of be then heat storage follow the set time switching principle, in working conditions change situation, be easily caused
VOC removal efficiency is low or the problems such as high NOx content.
The content of the invention
To solve the above problems, the invention discloses the low NOx afterburnings based on RTO and the efficient minimizing technologies of VOC and system,
The system has NOx discharge low, reasonable in design, can handle a variety of concentration waste gas, keep the high-level removal efficiency of VOC etc. excellent
Gesture.
To achieve the above objectives, the present invention provides a kind of technical scheme:Low NOx afterburnings and VOC based on RTO are efficiently removed
Method, comprises the following steps, step one, Concentration Testing, and RTO waste gas is after concentration detector detectable concentration, and concentration detector will
Exhaust gas concentration according to detecting sends tri- signals of a, b, c, and signal a represents high exhaust gas concentration, and signal b represents that normal waste gas is dense
Degree, signal c represents low exhaust gas concentration;
Step 2, waste gas stroke switching, step one concentration detector will send tri- letters of a, b, c according to the exhaust gas concentration detected
Waste gas stroke switching system number is fed back to, waste gas stroke switching system includes tri- switching channels of A, B, C, and A channel represents high useless
Gas concentration is by passage, and channel B represents normal exhaust gas concentration by passage, and C-channel represents that low exhaust gas concentration passes through passage, waste gas
Stroke switching system is judged received signal with real-time status, and corresponding actions, and switching system action situation is as follows:
Situation I:Received signal is consistent with real-time stroke:
Waste gas switching system is failure to actuate, and keeps original switching state;
Situation II:Received signal and real-time stroke are inconsistent:
Now waste gas switching system is acted:
Reception signal is a, and now waste gas stroke switching system is acted, and switches to A paths, while air is filled into, the air filled into
Sufficiently mixed in mixing chamber with high-concentration organic waste gas, be then passed into next step;
Reception signal is b, and now waste gas stroke switching system is acted, and is switched to B paths, is entered directly into next step;
Reception signal is c, and now waste gas stroke switching system is acted, and switches to C paths, while natural gas is filled into, the day filled into
The organic exhaust gas of right gas and low concentration is sufficiently mixed in mixing chamber, then into next step;
Step 3, temperature control heat storage switching completes the waste gas waste gas after the switching of waste gas stroke and enters heat storage A, stored through heat storage A
Enter after heat in combustion chamber and burn, the waste gas after burning is through heat storage B heat releases, and the waste gas after heat release is discharged through chimney;By putting
Thermal regenerator body outlet real time temperature is switched over as feedback signal to heat storage, is set when the regenerator temperature of heat release heat storage reaches
During definite value, waste gas flow direction switching is performed, waste gas enters heat storage B, enters after heat storage B accumulation of heats in combustion chamber and burns, burning
Waste gas afterwards is through heat storage A heat releases, and the waste gas after heat release is discharged through chimney.
Preferably, tri- switched paths of the ABC of the waste gas stroke switching system are separate, during RTO equipment operations, give up
Only a path enters the progress temperature control heat storage switching of temperature control heat storage switching system to gas therefrom.
System, including the company of being sequentially connected in series efficiently are removed the invention also discloses a kind of low NOx afterburnings based on RTO and VOC
Exhaust gas concentration monitoring system, waste gas stroke switching system, the temperature control heat storage switching system connect, the exhaust gas concentration detecting system
Interior the waste gas pipeline road is provided with concentration detector including waste gas pipeline road, and the waste gas stroke switching system includes
Mixing chamber, the waste gas pipeline road connects mixing chamber, and the mixing chamber side connects delivery air chamber by pipeline, described mixed
Conjunction room opposite side is connected by pipeline is equipped with valve on natural air chamber, the pipeline, the valve is electric with concentration detector
Property connection, i.e. concentration detector can electrical control valve switch,;The temperature control heat storage switching system includes what is be connected in parallel
Two heat storages, the combustion chamber being connected with two heat storage sides, the chimney being connected with two heat storage opposite sides, the mixing
Admission line is respectively equipped between room and heat storage, discharge duct, the accumulation of heat are respectively equipped between the chimney and heat storage
Body is all connected with being equipped with valve on heat storage temperature controller, the discharge duct and admission line.
Preferably, the valve being equipped with discharge duct and admission line is Air control valve, the Air control valve and accumulation of heat
Body temperature controller is electrically connected with, and the heat storage temperature controller can electrically control the switch of Air control valve.
Preferably, filter is provided between the mixing chamber and heat storage.
Low NOx afterburnings and the efficient minimizing technologies of VOC disclosed by the invention based on RTO compared with prior art, with such as
Lower beneficial effect:
1. by improving afterburning mode, the maximum discharge of the NOx due to the concentration oxidized zone of fuel is eliminated, reaches that zero NOx pollutes
Discharge, while fuel can be saved up to more than 20%;
2. the organic exhaust gas of a variety of concentration is adapted to, including high concentration, low concentration and normal concentration;
3. reducing the performance requirement to burner, broken away from while NOx discharge is both reduced to expensive low-NOx combustor
Dependence, reduce equipment cost;
4. waste gas flow direction is rationally switched according to heat storage outlet temperature in RTO equipment, VOC removal efficiency is improved;
5. reducing cost of investment of the enterprise in terms of environmental protection, promote the popularization of RTO equipment, energy-saving and emission-reduction, environmental protection.
6. the present invention can realize low NOx combustion on the basis of device structure is not changed significantly, reduce to burner
Performance requirement, abandons using expensive low-NOx combustor, reduces cost of investment;On the other hand high-level VOC can be realized
Removal efficiency, is sufficiently mixed by fuel injection into organic exhaust gas, substantially improves the ignition temperature in efficiency of combustion, combustion chamber
Distribute very evenly, produce " non-flaming combustion flameless combustion " and effect, than burner combustion method save
Fuel is up to more than 20%, while realizing NOx zero-emission.
A kind of low NOx afterburnings and VOC based on RTO disclosed by the invention efficiently remove system compared with prior art, tool
Have the advantages that:
1. low NOx afterburnings and VOC disclosed by the invention based on RTO efficiently remove system and effectively improve waste gas afterburning problem,
Concentration detection signal feeds back in time, fast and effectively feeds natural gas or air, reaches the effect that low NOx afterburnings, VOC are efficiently removed
Really;
2. low NOx afterburnings and VOC disclosed by the invention based on RTO, which efficiently remove system, effectively to be solved heat storage and follows fixation
Time-switching problem, heat storage transition effect is good, and switch speed is fast, reaches the effect that low NOx afterburnings, VOC are efficiently removed;
3. rationally, floor space is small, simple to operate, practical for overall system design;
4. equipment cost is low, environment protecting is good, environmental protection.
Brief description of the drawings
Fig. 1 is low NOx afterburning of the present invention based on RTO and the FB(flow block) of the efficient minimizing technologies of VOC;
Fig. 2 efficiently removes the structural representation of system for low NOx afterburnings of the present invention based on RTO and VOC.
In figure:Heat storage B 1, combustion chamber 2, heat storage A3, air blower 4, filter 5, air intlet valve 6, compression are empty
Gas air storage chamber 7, concentration monitor 8, exhaust gas inlet valve 9, mixing chamber 10, natural gas air storage chamber 11, natural gas intake valve 12, storage
Hot body temperature controller 13, air-introduced machine 14, chimney 15, waste gas pipeline road 16, density monitoring system S1, waste gas stroke switching system
S2, temperature control heat storage switching system S3.
Embodiment
With reference to the accompanying drawings and detailed description, the present invention is furture elucidated, it should be understood that following embodiments are only
For illustrating the present invention rather than limitation the scope of the present invention.
Embodiment 1
Fig. 1 is the FB(flow block) of method disclosed by the invention, and arrow is the flow direction of RTO organic exhaust gas in figure.As shown in Figure 1
Low NOx afterburnings and the efficient minimizing technologies of VOC based on RTO, comprise the following steps,
Step one, Concentration Testing, RTO organic exhaust gas(VOCs)After carrying out Concentration Testing through concentration detector, concentration detector will
Exhaust gas concentration according to detecting sends tri- signals of a, b, c, and signal a represents high exhaust gas concentration, and signal b represents that normal waste gas is dense
Degree, signal c represents low exhaust gas concentration;
Step 2, waste gas stroke switching, step one concentration detector will send tri- letters of a, b, c according to the exhaust gas concentration detected
Waste gas stroke switching system number is fed back to, waste gas stroke switching system includes tri- switching channels of A, B, C, and A channel represents high useless
Gas concentration is by passage, and channel B represents normal exhaust gas concentration by passage, and C-channel represents that low exhaust gas concentration passes through passage, waste gas
Stroke switching system is judged received signal with real-time status, and corresponding actions, and switching system action situation is as follows:
Situation I:Received signal is consistent with real-time stroke:
Waste gas switching system is failure to actuate, and keeps original switching state;
Situation II:Received signal and real-time stroke are inconsistent:
Now waste gas switching system is acted:
Reception signal is a, and now waste gas stroke switching system is acted, and switches to A paths, while air is filled into, the air filled into
Sufficiently mixed in mixing chamber with high-concentration organic waste gas, uniform waste gas is passed into next step;
Reception signal is b, and now waste gas stroke switching system is acted, and switches to B paths, uniform waste gas enters directly into next
Step;
Reception signal is c, and now waste gas stroke switching system is acted, and switches to C paths, while natural gas is filled into, the day filled into
The organic exhaust gas of right gas and low concentration is sufficiently mixed in mixing chamber, and uniform waste gas enters next step;
Step 3, temperature control heat storage switching completes the waste gas after the switching of waste gas stroke and enters heat storage switching system, first uniformly
Waste gas enters heat storage A, enters after heat storage A accumulation of heats in combustion chamber and burns, the waste gas after burning is put through heat storage B heat releases
Waste gas after heat is discharged through chimney;It is used as feedback signal by heat release heat storage outlet real time temperature to switch over heat storage,
When the regenerator temperature of heat release heat storage reaches setting value, waste gas flow direction switching is performed, waste gas enters heat storage B, through heat storage B
Enter after accumulation of heat in combustion chamber and burn, the waste gas after burning is through heat storage A heat releases, and the waste gas after heat release is discharged through chimney.Accumulation of heat
Body switching system action situation is as follows:
Working order I:By the waste gas of mixing chamber even concentration first through heat storage A, exchanged heat between waste gas and heat storage,
Heat storage A temperature drops, EGT rises, and then oxidizing fire is carried out in combustion chamber, with the flue gas after after-combustion(CO2、
H2O)By heat storage B, exchanged heat in heat storage B, heat storage B temperature rises, flue-gas temperature declines, then from accumulation of heat
Discharged in body B.In operation process, thermocouple is furnished with heat storage A, after regenerator temperature drops to design temperature, heat storage
Switching system is corresponding, and flue gas, waste gas flow direction are reverse in RTO equipment, into working order II.
Working order II:After the response of heat storage switching system, by the waste gas of mixing chamber even concentration first through accumulation of heat
Body B, exchanges heat between waste gas and heat storage, heat storage B temperature drops, and EGT rises, and then carries out oxygen in combustion chamber
Change burning, with the flue gas after after-combustion(CO2、H2O)By heat storage A, exchanged heat in heat storage A, in heat storage A temperature
Rise, flue-gas temperature declines, then discharged from heat storage A.In operation process, thermocouple is furnished with heat storage B, when accumulation of heat body temperature
Degree drops to after design temperature, and heat storage switching system is corresponding, and flue gas, waste gas flow direction are reverse in RTO equipment, into working order
Ⅰ。
In the present embodiment, tri- switched paths of the ABC of waste gas stroke switching system are separate, during RTO equipment operations,
Only a path enters the progress temperature control heat storage switching of temperature control heat storage switching system to waste gas therefrom.
Embodiment 2
A kind of low NOx afterburnings and VOC based on RTO as shown in Figure 2 efficiently removes system, including the waste gas being sequentially connected in series
Include in density monitoring system S1, waste gas stroke switching system S2, temperature control heat storage switching system S3, exhaust gas concentration detecting system
Waste gas pipeline road 16, waste gas pipeline road is provided with concentration detector 8, and provided with exhaust gas inlet valve on waste gas pipeline road
Door 9, concentration detector is arranged on the exhaust gas concentration for monitoring conveying in pipeline on waste gas pipeline road on-line, waste gas stroke switching system
System includes mixing chamber 10, and the waste gas pipeline road other end connects mixing chamber, and mixing chamber side connects delivery air chamber by pipeline
7, the pipeline between delivery air chamber and mixing chamber is provided with air intlet valve 6, and mixing chamber opposite side connects day by pipeline
Right air chamber 11, the pipeline between natural air chamber and mixing chamber is provided with natural gas intake valve 12, air intlet valve and natural gas
Intake valve is electrically connected with concentration detector, i.e., concentration detector can electrical control valve switch;Temperature control heat storage switches
System includes two heat storages being connected in parallel, the combustion chamber 2 being connected with two heat storage sides and two heat storage opposite sides
The chimney 15 of connection, two heat storages are heat storage A3, heat storage B1, and air inlet is respectively equipped between mixing chamber and two heat storages
Pipeline, admission line is provided with air blower 4, and air blower facilitates the waste gas mixed in mixing chamber to enter heat storage, chimney and two
Discharge duct is respectively equipped between individual heat storage, discharge duct is provided with air-introduced machine 14, and the waste gas after convenient processing enters chimney,
Two heat storages are all connected with being equipped with valve on heat storage temperature controller 13, discharge duct and admission line.
Preferably, the valve being equipped with discharge duct and admission line is Air control valve, Air control valve and accumulation of heat body temperature
Control device to be electrically connected with, heat storage temperature controller can electrically control the switch of Air control valve.
Preferably, filter 5 is provided between mixing chamber and heat storage.Filter can be effectively to mixed uniform waste gas
Filtered, be easy to follow-up burning.
Technological means disclosed in the present invention program is not limited only to the technological means disclosed in above-mentioned embodiment, in addition to
Constituted technical scheme is combined by above technical characteristic.It should be pointed out that for those skilled in the art
For, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (5)
1. low NOx afterburnings and the efficient minimizing technologies of VOC based on RTO, it is characterised in that:Comprise the following steps, step one, concentration
Detection, RTO waste gas is after concentration detector detectable concentration, and concentration detector will send a, b, c according to the exhaust gas concentration detected
Three signals, signal a represents high exhaust gas concentration, and signal b represents normal exhaust gas concentration, and signal c represents low exhaust gas concentration;
Step 2, waste gas stroke switching, step one concentration detector will send tri- letters of a, b, c according to the exhaust gas concentration detected
Waste gas stroke switching system number is fed back to, waste gas stroke switching system includes tri- switching channels of A, B, C, and A channel represents high useless
Gas concentration is by passage, and channel B represents normal exhaust gas concentration by passage, and C-channel represents that low exhaust gas concentration passes through passage, waste gas
Stroke switching system is judged received signal with real-time status, and corresponding actions, and switching system action situation is as follows:
Situation I:Received signal is consistent with real-time stroke:
Waste gas switching system is failure to actuate, and keeps original switching state;
Situation II:Received signal and real-time stroke are inconsistent:
Now waste gas switching system is acted:
Reception signal is a, and now waste gas stroke switching system is acted, and switches to A paths, while air is filled into, the air filled into
Sufficiently mixed in mixing chamber with high-concentration organic waste gas, be then passed into next step;
Reception signal is b, and now waste gas stroke switching system is acted, and is switched to B paths, is entered directly into next step;
Reception signal is c, and now waste gas stroke switching system is acted, and switches to C paths, while natural gas is filled into, the day filled into
The organic exhaust gas of right gas and low concentration is sufficiently mixed in mixing chamber, then into next step;
Step 3, temperature control heat storage switching completes the waste gas waste gas after the switching of waste gas stroke and enters heat storage A, stored through heat storage A
Enter after heat in combustion chamber and burn, the waste gas after burning is through heat storage B heat releases, and the waste gas after heat release is discharged through chimney;By putting
Thermal regenerator body outlet real time temperature is switched over as feedback signal to heat storage, is set when the regenerator temperature of heat release heat storage reaches
During definite value, waste gas flow direction switching is performed, waste gas enters heat storage B, enters after heat storage B accumulation of heats in combustion chamber and burns, burning
Waste gas afterwards is through heat storage A heat releases, and the waste gas after heat release is discharged through chimney.
2. low NOx afterburnings and the efficient minimizing technologies of VOC as claimed in claim 1 based on RTO, it is characterised in that:It is described useless
Tri- switched paths of ABC of gas stroke switching system are separate, during RTO equipment operations, and only a path enters waste gas therefrom
Enter temperature control heat storage switching system and carry out temperature control heat storage switching.
3. low NOx afterburnings and VOC based on RTO efficiently remove system, it is characterised in that:Waste gas including being sequentially connected in series is dense
Spending includes waste gas in monitoring system, waste gas stroke switching system, temperature control heat storage switching system, the exhaust gas concentration detecting system
Conveyance conduit, the waste gas pipeline road is provided with concentration detector, and the waste gas stroke switching system includes mixing chamber, described
Waste gas pipeline road connects mixing chamber, and the mixing chamber side connects delivery air chamber, the mixing chamber opposite side by pipeline
Connected by pipeline and valve is equipped with natural air chamber, the pipeline, the valve is electrically connected with concentration detector, i.e., dense
Spend detector can electrical control valve switch,;The temperature control heat storage switching system include be connected in parallel two heat storages,
The combustion chamber being connected with two heat storage sides, the chimney being connected with two heat storage opposite sides, the mixing chamber and heat storage
Between be respectively equipped with admission line, be respectively equipped with discharge duct between the chimney and heat storage, the heat storage is all connected with storing
Valve is equipped with hot body temperature controller, the discharge duct and admission line.
4. low NOx afterburnings and VOC based on RTO efficiently remove system as claimed in claim 3, it is characterised in that:Blast pipe
The valve being equipped with road and admission line is Air control valve, and the Air control valve is electrically connected with heat storage temperature controller, described
Heat storage temperature controller can electrically control the switch of Air control valve.
5. low NOx afterburnings and VOC based on RTO efficiently remove system as claimed in claim 3, it is characterised in that:It is described mixed
Close and filter is provided between room and heat storage.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111425869A (en) * | 2020-04-02 | 2020-07-17 | 北京北方华创微电子装备有限公司 | Control method and system of semiconductor equipment |
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